4820 results about "Plasma treatment" patented technology

A plasma processing method includes (a) generating plasma in a chamber of a plasma processing apparatus including a substrate support provided in the chamber and supporting a substrate placed thereon, (b) applying a voltage pulse from a bias power supply to a bias electrode of the substrate support in order to draw ions from the plasma into the substrate, and (c) repeating (b). In (c), a duration length of the voltage pulse is changed to change a potential of the substrate.

A system includes a processing chamber configured to perform a plasma process with respect to one or more substrates. The system further includes an electrostatic chuck disposed within the processing chamber. The electrostatic chuck includes one or more electrodes. The system further includes an analog filter electrically coupled to at least one electrode of the one or more electrodes. The analog filter includes an air-core coil including a first coil and a second coil disposed within the first coil. The first coil and the second coil together form an inductor.

Embodiments of the present disclosure relate to a system and methods for processing a substrate in a plasma processing system. In an embodiment a plasma processing system is provided that includes a radio frequency (RF) generator coupled to a substrate support base disposed within the plasma processing system and configured to deliver an RF signal to the substrate support base, a pulsed voltage (PV) waveform generator coupled the substrate support base and configured to deliver a PV waveform to the substrate support base while the RF signal is delivered to the substrate support base, and a high voltage supply coupled to a biasing electrode of the plasma processing system and configured to deliver a chucking voltage to a biasing electrode disposed with the plasma processing system.

Embodiments provided herein generally include apparatus, plasma processing systems and methods for tuning in a radio frequency (RF) plasma processing system for improving substrate processing metrics. Some embodiments are directed to an apparatus for processing a substrate in a plasma processing system. The apparatus generally includes: an impedance for a match circuit configured to perform impedance matching for a plasma load; a diode-based switch coupled to the impedance for the match circuit; at least one signal generator coupled to the diode-based switch and configured to bias the diode-based switch to a first position based on a first impedance generated in the plasma load; and a second position based on a second impedance generated in the plasma load and an RF signal generator configured to provide an RF signal to the plasma load.

A method of processing a substrate. The method including delivering, by an RF generator, an RF signal to a processing volume of a processing chamber through an RF match including a configurable impedance altering element. Measuring in real-time, an electrical characteristic of the RF signal. Determining in real-time, a target electrical characteristic based upon a comparison between a calibrated electrical characteristic value and the measured electrical characteristic, in which the calibrated electrical characteristic value is selected to achieve at least one desired plasma processing parameter result. Adjusting in real-time, a setting of the configurable impedance altering element of the RF match to achieve the target electrical characteristic and maintaining, the target electrical characteristic by controlling the setting of the configurable impedance altering element of the RF match.

The invention discloses a carbon fiber composite material surface modification spraying system and a control method thereof. The system comprises a multi-axis robot, a plasma spray gun, a contact angle measuring probe, a 3D line laser scanner, a hyperspectral imager, an environment sensor and a controller. According to the method, the plasma power and the robot speed are adjusted in real time through contact angle measurement and plasma treatment feedback control, so that the CFRP surface can accurately reach a target value, and the coating adhesive force is improved; 3D line laser scanning and hyperspectral imaging are combined, and the posture, the distance, the wet film thickness and the component uniformity of the spray gun are monitored in real time; based on a prediction model fusing a physical model and a neural network, a self-adaptive fuzzy PID control algorithm is adopted, and the coating flow and the track posture of a spray gun are accurately regulated and controlled in real time. The problems of weak coating binding force, uneven thickness, orange peel, sagging and serious coating waste in traditional spraying are effectively solved, and self-adaptive, high-quality and green spraying of workpieces with complex curved surfaces is achieved.

The present disclosure relates to methods for providing a silicon nitride film. In particular, the film can be a carbon-doped, silicon nitride film. Methods can include depositing a doped silicon nitride and then plasma treating the doped silicon nitride to provide a conformal film.

A plasma processing system includes a pulsed voltage source configured to generate a pulsed voltage waveform having a first frequency. The plasma processing system includes a radio frequency source configured to generate a radio frequency waveform having a second frequency that is higher than the first frequency. The plasma processing system includes a junction box enclosure electrically coupling the pulsed voltage source to a direct current conductor coupled to a substrate support and further electrically coupling the pulsed voltage source to a radio frequency conductor coupled to a radio frequency baseplate. The junction box enclosure includes a pulsed voltage filter circuit coupled between the radio frequency source and the radio frequency conductor and operable to filter the pulsed voltage waveform. The junction box enclosure further includes a radio frequency filter circuit coupled between the pulsed voltage source and the direct current conductor and operable to filter the radio frequency waveform.

The invention provides a robot joint dynamic cable made of a self-repairing polyurethane material and a preparation method of the robot joint dynamic cable, and belongs to the field of cables. Polytetrahydrofuran glycol and hexamethylene diisocyanate react to form a soft and hard segment structure, 1, 4-butanediol is added for chain extension, dopamine hydrochloride is introduced, the hard segment structure is enhanced, and a self-repairing hydrogen bond network is formed; carbon nanotubes are introduced, and through plasma treatment and silane coupling agent modification, the tensile resistance, fatigue resistance and electrical properties of the material are improved; montmorillonite is compounded with polyethyleneimine through organic treatment, so that the cracking resistance and wear resistance of the material are enhanced; epoxy groups are introduced to the surface of boron nitride, and dopamine hydrochloride is self-polymerized, so that excellent heat dissipation capability and dimensional stability are provided. Through the synergistic effect of the components, the composite material has excellent mechanical properties, electrical properties, heat dissipation, wear resistance and the like, is especially suitable for a dynamic cable of a robot, and can stably work in a complex environment for a long time.

The invention discloses industrial-grade mixed oil produced by utilizing kitchen waste oil and a preparation method of the industrial-grade mixed oil, and belongs to the technical field of recycling of the kitchen waste oil. The invention relates to industrial-grade mixed oil produced by using kitchen waste oil and a preparation method thereof, and the preparation method comprises the following steps: firstly collecting kitchen waste containing the waste oil, and storing the kitchen waste in a container through special equipment; carrying out screen solid-liquid separation, cleaning grease on the surface of the solid waste, and then carrying out precipitation separation; then carrying out centrifugal separation, chemical cleaning, water washing, acid treatment, dehydration, degumming and metal ion removal on the separated grease and oil-containing liquid; carrying out ultrasonic-assisted multistage ester exchange after enzymolysis optimization, carrying out membrane separation on glycerol and fatty acid methyl ester, and carrying out reduced pressure distillation to obtain a high-purity fraction; carrying out adsorption refining, plasma treatment and supercritical fluid extraction; finally, nano particles are added and blended with additives, efficient recycling of the kitchen waste oil is achieved, and then high-purity industrial-grade mixed oil is prepared.

Embodiments of the disclosure include apparatus (e.g., plasma processing systems) and methods for the plasma processing of a substrate in a processing chamber. Some embodiments are directed to a method for waveform generation, which generally includes delivering a radio frequency (RF) waveform at a frequency for a first period of time using a RF generator and then halting the delivery of the RF waveform for a second period of time, and delivering a pulsed voltage waveform at a first voltage for at least a portion of a third period of time using a pulser, wherein the delivery of the pulsed voltage waveform overlaps with the delivery of the RF waveform during a portion of the second period of time.

The embodiment of the invention provides a preparation method of a negative electrode active material, the negative electrode active material, a battery and equipment. Fluorine-containing gas is used as discharge gas, and discharge current is introduced into a plasma treatment device in the process of performing vibration dispersion treatment on a porous carbon substrate through the plasma treatment device; the fluorine-containing gas is used for carrying out plasma discharge treatment on the porous carbon matrix, so that the fluorine element provided by the fluorine-containing gas can react with carbon atoms on the surface of the porous carbon matrix to form chemical bonding, and the chemical bonding uniformity between the fluorine element and the carbon atoms on the surface of the porous carbon matrix can be improved; and the preparation cost of the negative electrode active material can be reduced, and the preparation efficiency of the negative electrode active material is improved, so that the battery capacity and the cycle performance of a secondary battery prepared from the negative electrode active material disclosed by the embodiment of the invention can be improved.

The invention discloses a method and equipment for rapidly and continuously preparing carbon nano tubes with adjustable tube diameters, which are used for continuously and rapidly preparing carbon nano tubes with different tube diameters and at least comprise a catalyst precursor atomizing chamber, a plasma device, a carbon nano tube preparation reactor, a collector and a tail gas treatment device. A catalyst precursor solution enters the atomizing chamber through the injection pump to be atomized, atomized mist enters the plasma treatment device and then enters a reaction from a sample inlet in the upper portion of the reactor, after the reaction in the reactor is completed for a short time, the carbon nanotubes are collected from a collecting device on the lower portion of the reactor, and tail gas can be returned to the reactor after being filtered by the filter. The tail gas can be repeatedly used; and the continuous preparation of the carbon nano tubes with different tube diameters can be realized.

The invention discloses an anti-corrosion coating method for a steel structure, belongs to the technical field of metal anti-corrosion coating, and solves the problems of reduced anti-corrosion effect and short maintenance period caused by incomplete pretreatment, insufficient coating adhesive force and poor complex environment adaptability in the existing anti-corrosion coating process for the steel structure. According to the technical scheme, the method is characterized by comprising the steps that the surface of the steel structure is pretreated through chemical oil removal, sand blasting and acid pickling and phosphating; epoxy zinc-rich primer, epoxy micaceous iron oxide intermediate paint and polyurethane finish paint are sequentially sprayed, and plasma treatment is introduced in the coating of each layer so as to enhance the interface bonding force of the coating; the uniformity and the corrosion resistance of the coating are optimized by regulating and controlling spraying parameters, plasma processing power and a gas ratio; and finally, a gradient heating curing process is adopted, so that the compactness and durability of the coating are ensured. The method is mainly used for long-term anti-corrosion protection of steel structures such as bridges and buildings, and the anti-corrosion performance and the service life in a complex environment can be remarkably improved.

The embodiment of the invention provides a glass-based structural member as well as a preparation method and application thereof, and the preparation method comprises the following steps: carrying out at least one pre-plating cleaning selected from alkali cleaning, acid pickling and plasma treatment on a glass substrate, so that the surface water drop angle of the glass substrate is in a range of 10-30 degrees; forming a dielectric layer comprising a silicon dioxide layer on the surface of one side of the glass substrate cleaned before plating; forming an anti-fingerprint layer on the silicon dioxide layer; si-CH2 bonds are formed between the silicon dioxide layer and the anti-fingerprint layer. After the glass base material is cleaned before plating, the binding force between the SiO2 layer formed on the glass base material and the glass base material and the binding force between the anti-fingerprint layer and the SiO2 layer are both high, so that the thickness of the SiO2 layer and the anti-fingerprint layer can be large, the structure of the whole coating is stable, and the glass-based structural part can have good abrasion resistance, good scratch resistance and a lasting anti-fingerprint effect; and the application requirements in the fields of electronic equipment and the like can be well met.

Methods and apparatuses for depositing silicon nitride in various applications are provided. Embodiments include depositing silicon nitride directly on silicon or silicon oxide surfaces using modulated dose to conversion time ratios in thermal atomic layer deposition. Embodiments include exposing a silicon oxide surface to a nitrogen-containing plasma treatment prior to depositing any silicon nitride and depositing silicon nitride by thermal atomic layer deposition.

In a plasma processing apparatus, a radio-frequency power supply adjusts frequencies of radio-frequency power in each bias cycle of electrical bias energy. The radio-frequency power supply uses a reference time series of frequencies of the radio-frequency power in each bias cycle. The radio-frequency power supply repeats using a changed time series of frequencies of the radio-frequency power in each bias cycle to increase a degree of match based on an evaluation value. The changed time series results from shifting the reference time series by a phase shift amount, scaling the reference time series in a frequency direction, or scaling two or more of multiple time zones of the reference time series in a time direction.

A plasma processing apparatus including a chamber, a placement unit which is disposed in the chamber and on which a substrate is to be placed, a plasma generation unit configured to generate a plasma within the chamber, a gas supply unit configured to supply a raw material gas of the plasma into the chamber, a measurement unit configured to measure and output a distribution information regarding a plasma distribution in the chamber, a control unit configured to control the plasma generation unit and the gas supply unit so as to repeat a unit processing on the substrate, a memory unit configured to store process conditions including conditions for the unit processing, and a modification unit configured to modify the process conditions. The measurement unit measures the distribution information (N) in the unit processing (N) at an Nth time, where N is an integer. When the distribution information (N) satisfies a predetermined condition, the modification unit modifies the process conditions in the unit processing (M) at an Mth time, where M is any integer equal to or greater than (N+1).

The invention provides an aerogel-based heat-preservation, heat-insulation and waterproof composite coating material for a building outer wall and a preparation method thereof, and belongs to the field of building materials. Through hydrophobic modified silicon dioxide aerogel, a lightweight heat insulation frame is provided, and the waterproofness and compatibility are improved; the mechanical property and the crack resistance are enhanced through the modified potassium titanate nanofibers, and self-adaptive heat insulation is achieved; the thermoelectric effect, the wear resistance and the thermal regulation performance are optimized through plasma treatment and polyaniline coated tungsten carbide nanoparticles; the heat management performance, the crack resistance and the comprehensive heat insulation and waterproof capacity are improved through graphene oxide composite modified boron nitride; the flexibility, the hydrophobicity and the interfacial compatibility are improved through organic silicon modified bisphenol A epoxy resin; and the performance of the coating is optimized through the synergistic effect of the components.

The invention relates to the technical field of preparation of a graphene lubricating oil additive through a graphene uniform dispersion technology, and discloses a preparation method of an efficient dispersion type graphene composite lubricating oil additive, which comprises the following steps: a) carrying out surface modification on graphene by utilizing plasma treatment; b) mixing the modified graphene with a surfactant; c) uniformly mixing the graphene dispersion liquid with poly-alpha-olefin (PAO) base oil with specific molecular weight distribution on a nanoscale by adopting a microfluidic technology to form a premix; d) adding a custom-formulated antioxidant, an extreme pressure additive and nanoscale silicon dioxide particles and / or metal oxide into the premix; through plasma treatment and ultrasonic treatment conditions, the compatibility of graphene and base oil is remarkably enhanced, the comprehensive performance of the lubricating oil is improved, meanwhile, the antioxidant, the extreme pressure additive and the nano material are introduced, and the wear resistance, oxidation resistance and extreme pressure performance of the composite additive are remarkably improved.

The invention provides a coating spraying process for an aluminum alloy wheel. The coating spraying process comprises the following steps: S1, surface treatment; s2, spraying a bottom coating; s3, spraying a surface coating; s4, spraying a nano-particle reinforcing layer; s5, thermal plasma spraying post-treatment is carried out; according to the process method, the adhesive force can be improved, the cold plasma treatment technology can efficiently activate the surface of the aluminum alloy, the adhesive force between the coating and the base material is enhanced, and the risk that the coating is peeled off is reduced. And by adding the nano-particle reinforcing layer, the surface hardness of the coating is remarkably improved, and the coating has higher scratch resistance. And the corrosion resistance is enhanced, specifically, the corrosion resistance and the ultraviolet resistance of the aluminum alloy wheel are greatly improved through the optimized formula of the bottom coating and the surface coating, especially the application of a nano reinforcing material and a photocureable coating. The ultraviolet curing technology of the photocureable coating greatly shortens the curing time, the high-frequency production requirement is met, and the production efficiency is improved.

In a plasma processing apparatus, a radio-frequency power supply adjusts frequencies of radio-frequency power in each bias cycle of electrical bias energy. The radio-frequency power supply uses a reference time series of frequencies of the radio-frequency power in each bias cycle. The radio-frequency power supply repeats using a changed time series of frequencies of the radio-frequency power in each bias cycle to increase a degree of match based on an evaluation value. The changed time series results from shifting the reference time series by a phase shift amount, scaling the reference time series in a frequency direction, or scaling two or more of multiple time zones of the reference time series in a time direction.

The invention belongs to the field of macromolecules, and particularly relates to a PBO fiber surface modification method for a synergistic copolymer coating through plasma treatment. According to the method, modification is designed by adopting a synergistic mechanism of plasma treatment and a functional coating: firstly, the PBO fiber is treated by oxygen plasma, a microstructure and an active group are formed on the surface of the PBO fiber, and the surface activity of the PBO fiber is rapidly improved; then coating a monomer solution containing a photoinitiator, exciting light to initiate free radical polymerization through ultraviolet irradiation, forming a random copolymer coating on the surface of the PBO fiber, and repairing the damage of oxygen plasmas to the PBO fiber structure while introducing active groups into the coating; and active groups formed by oxygen plasma treatment can enhance the adhesive force between the coating and the PBO fiber. Finally, the invention provides an environment-friendly and controllable PBO fiber surface synergistic modification technology, the intrinsic performance of the PBO fiber and the interface bonding strength are improved for a long time, and a support is provided for engineering application of the high-performance PBO fiber.

The invention discloses an electrocatalyst for acidic oxygen evolution reaction as well as a preparation method and application of the electrocatalyst, and belongs to the technical field of electrolyzed water. The preparation method of the electrocatalyst for the acidic oxygen evolution reaction comprises the following steps: growing a transition metal oxide on a conductive substrate in situ to obtain a transition metal oxide carrier; the transition metal oxide carrier is subjected to plasma treatment and then placed in a precious metal salt solution for a cation exchange reaction, and the electrocatalyst is obtained. The electrocatalyst prepared by the invention has extremely low initial overpotential (187mV) when a water electrolysis reaction is carried out in a 0.5 M H2SO4 solution, has no obvious performance degradation in a continuous acidic water electrolysis process for 4500h, shows very high operation stability, and has great application potential in the aspects of replacing a commercial RuO2 / IrO2 catalyst and reducing electrode preparation cost and acidic water electrolysis.

The invention discloses a microporous diaphragm for a low-electrical-impedance lithium battery and a preparation method of the microporous diaphragm. The diaphragm comprises: a base film layer, wherein the base film layer is of a microporous structure formed by biaxially stretching polypropylene and / or polyethylene; the surface of the base film layer is coated with the functional coating, and the functional coating contains mixed slurry of inorganic nanoparticles and a binder; the surface modification layer is formed by introducing a hydrophilic electrolyte group on the surface of the functional coating through plasma treatment or chemical grafting. The base membrane layer forms a uniform micropore structure through a two-way stretching process, the functional coating is formed by compounding nano silicon dioxide or aluminum oxide and polyvinylidene fluoride according to a specific proportion, a porous layer with gradient pore diameter is formed, the pore size of the porous layer is smaller than that of the base membrane layer, and efficient permeation of electrolyte is ensured. Electrolyte-philic groups such as sulfonic groups are introduced into the surface modification layer, so that the wettability of the diaphragm to an electrolyte is remarkably improved. During preparation, the base membrane is formed through melt blending, two-way stretching and pore-forming agent extraction, and then the functional layer is constructed through slurry coating and a low-temperature plasma treatment or sulfonation process. The diaphragm combines gradient aperture design, inorganic filler enhancement and surface chemical modification, and realizes low impedance, high thermal stability and excellent mechanical strength.

The disclosed plasma processing apparatus includes a chamber, a substrate support part, an excitation electrode, an emission unit, and a resonator. The substrate support part is provided in a processing space in the chamber. The excitation electrode is provided above the substrate support part. The emission unit emits electromagnetic waves into a plasma generation space below the excitation electrode. The resonator is provided on the excitation electrode and is electromagnetically coupled to the emission unit. A conductor portion that defines the waveguide of the resonator is formed from a first conductor in a first portion including a position 1 / 4 of a wavelength in the guide of the electromagnetic wave in the resonator from one end of the waveguide, and is formed from a second conductor in a second portion other than the first portion. The thermal conductivity of the first conductor is lower than the thermal conductivity of the second conductor.

The invention discloses a multi-layer composite barrier film and a production process thereof, and belongs to the field of polymer composite materials. Aiming at the problems of obvious performance attenuation, poor interlayer binding force and low step-by-step compounding process efficiency of a barrier film in a humid and hot environment in the prior art, the invention provides a five-layer asymmetric structure design: an outer layer, a bonding layer, a barrier layer, a bonding layer and an inner layer. Wherein the barrier layer is formed by blending EVOH and MAH-PA6 and cooperating with nano montmorillonite to form a multi-barrier network, so that the oxygen permeability is smaller than or equal to 0.3 cm / (m.24h. 0.1 MPa), and the water vapor permeability is smaller than or equal to 1.5 g / (m.24h). The production process innovation comprises five-layer co-extrusion melt flow rate ratio control, three-roller gradient cooling and a bidirectional plasma processing technology, the continuous production speed is larger than or equal to 120 m / min, and the interlayer peeling strength is larger than or equal to 8 N / 15 mm. The barrier property stability is remarkably improved.

The invention provides a modified lithium metal negative electrode and a preparation method and application thereof, and belongs to the technical field of lithium batteries. The modified lithium metal negative electrode comprises a negative electrode conductive substrate and an interface passivation layer formed on the surface of the negative electrode conductive substrate, and the interface passivation layer comprises lithium oxide, lithium sulfide, lithium nitride, lithium fluoride and a fluorocarbon compound; the interface passivation layer is obtained by putting lithium metal into chloroform for dipping treatment to obtain modified lithium metal and then performing plasma treatment. According to the lithium ion battery, the interface passivation film containing the lithium oxide, the lithium sulfide, the lithium nitride, the lithium fluoride and the fluorocarbon is formed on the negative electrode conductive substrate, and in the repeated charging and discharging process of the lithium ion battery, due to the existence of the interface passivation film, non-uniform deposition of lithium ions can be avoided, so that growth of lithium dendrites is inhibited. Furthermore, the coulombic efficiency and the cycling stability of the charge-discharge cycle of the lithium ion battery can be improved, and the service life of the lithium ion battery is prolonged.

The invention relates to the technical field of wafer processing, in particular to a reaction chamber and plasma processing equipment, which comprises a quartz tube, an induction coil, a Faraday shield cage, a state monitoring device, a rotation driving device and a control unit, and is characterized in that the quartz tube is arranged at the top of a processing chamber; the induction coil is arranged around the outer side of the quartz tube; the Faraday shielding cage is provided with a slit, and the orthographic projection of the slit on the circumferential wall of the quartz tube forms an erosion area; the state monitoring device is used for monitoring the erosion area; the driving end of the rotary driving device is connected with the quartz tube or the Faraday shielding cage; the control unit is in communication connection with the state monitoring device and the rotary driving device; according to the invention, through real-time monitoring and an active regulation and control mechanism, the problem of concentrated erosion of plasma to the quartz tube in a high-hydrogen process is effectively solved.

The invention provides a surface modified carbon fiber as well as a preparation method and application thereof, and belongs to the technical field of battery materials. Physical or chemical treatment on the surface of the carbon fiber is realized by performing one or more of accurate plasma treatment, chemical etching, coupling agent treatment and nano particle deposition on the surface of the carbon fiber, so that functional groups are introduced or a rough nano structure is formed; a functional layer with a specific functional group and a rough structure which are beneficial to attachment of positive electrode material slurry are formed on the surface of the carbon fiber, and then a stable and well-attached surface modified layer is obtained through heat treatment, so that the surface modified carbon fiber is prepared. According to the method disclosed by the invention, the surface roughness and the functional group richness can be improved on the premise that the mechanical property of the fiber is not obviously damaged, so that the adhesiveness and the electrical property of the positive electrode material slurry are enhanced, and a foundation is laid for the preparation of a carbon fiber positive electrode material and a structure-energy storage integrated composite structure.