3914 results about "Plasma treatment" patented technology

A system includes a processing chamber configured to perform a plasma process with respect to one or more substrates. The system further includes an electrostatic chuck disposed within the processing chamber. The electrostatic chuck includes one or more electrodes. The system further includes an analog filter electrically coupled to at least one electrode of the one or more electrodes. The analog filter includes an air-core coil including a first coil and a second coil disposed within the first coil. The first coil and the second coil together form an inductor.

Embodiments provided herein generally include apparatus, plasma processing systems and methods for tuning in a radio frequency (RF) plasma processing system for improving substrate processing metrics. Some embodiments are directed to an apparatus for processing a substrate in a plasma processing system. The apparatus generally includes: an impedance for a match circuit configured to perform impedance matching for a plasma load; a diode-based switch coupled to the impedance for the match circuit; at least one signal generator coupled to the diode-based switch and configured to bias the diode-based switch to a first position based on a first impedance generated in the plasma load; and a second position based on a second impedance generated in the plasma load and an RF signal generator configured to provide an RF signal to the plasma load.

The invention discloses a carbon fiber composite material surface modification spraying system and a control method thereof. The system comprises a multi-axis robot, a plasma spray gun, a contact angle measuring probe, a 3D line laser scanner, a hyperspectral imager, an environment sensor and a controller. According to the method, the plasma power and the robot speed are adjusted in real time through contact angle measurement and plasma treatment feedback control, so that the CFRP surface can accurately reach a target value, and the coating adhesive force is improved; 3D line laser scanning and hyperspectral imaging are combined, and the posture, the distance, the wet film thickness and the component uniformity of the spray gun are monitored in real time; based on a prediction model fusing a physical model and a neural network, a self-adaptive fuzzy PID control algorithm is adopted, and the coating flow and the track posture of a spray gun are accurately regulated and controlled in real time. The problems of weak coating binding force, uneven thickness, orange peel, sagging and serious coating waste in traditional spraying are effectively solved, and self-adaptive, high-quality and green spraying of workpieces with complex curved surfaces is achieved.

A plasma processing system includes a pulsed voltage source configured to generate a pulsed voltage waveform having a first frequency. The plasma processing system includes a radio frequency source configured to generate a radio frequency waveform having a second frequency that is higher than the first frequency. The plasma processing system includes a junction box enclosure electrically coupling the pulsed voltage source to a direct current conductor coupled to a substrate support and further electrically coupling the pulsed voltage source to a radio frequency conductor coupled to a radio frequency baseplate. The junction box enclosure includes a pulsed voltage filter circuit coupled between the radio frequency source and the radio frequency conductor and operable to filter the pulsed voltage waveform. The junction box enclosure further includes a radio frequency filter circuit coupled between the pulsed voltage source and the direct current conductor and operable to filter the radio frequency waveform.

Embodiments of the disclosure include apparatus (e.g., plasma processing systems) and methods for the plasma processing of a substrate in a processing chamber. Some embodiments are directed to a method for waveform generation, which generally includes delivering a radio frequency (RF) waveform at a frequency for a first period of time using a RF generator and then halting the delivery of the RF waveform for a second period of time, and delivering a pulsed voltage waveform at a first voltage for at least a portion of a third period of time using a pulser, wherein the delivery of the pulsed voltage waveform overlaps with the delivery of the RF waveform during a portion of the second period of time.

The embodiment of the invention provides a preparation method of a negative electrode active material, the negative electrode active material, a battery and equipment. Fluorine-containing gas is used as discharge gas, and discharge current is introduced into a plasma treatment device in the process of performing vibration dispersion treatment on a porous carbon substrate through the plasma treatment device; the fluorine-containing gas is used for carrying out plasma discharge treatment on the porous carbon matrix, so that the fluorine element provided by the fluorine-containing gas can react with carbon atoms on the surface of the porous carbon matrix to form chemical bonding, and the chemical bonding uniformity between the fluorine element and the carbon atoms on the surface of the porous carbon matrix can be improved; and the preparation cost of the negative electrode active material can be reduced, and the preparation efficiency of the negative electrode active material is improved, so that the battery capacity and the cycle performance of a secondary battery prepared from the negative electrode active material disclosed by the embodiment of the invention can be improved.

The invention discloses an anti-corrosion coating method for a steel structure, belongs to the technical field of metal anti-corrosion coating, and solves the problems of reduced anti-corrosion effect and short maintenance period caused by incomplete pretreatment, insufficient coating adhesive force and poor complex environment adaptability in the existing anti-corrosion coating process for the steel structure. According to the technical scheme, the method is characterized by comprising the steps that the surface of the steel structure is pretreated through chemical oil removal, sand blasting and acid pickling and phosphating; epoxy zinc-rich primer, epoxy micaceous iron oxide intermediate paint and polyurethane finish paint are sequentially sprayed, and plasma treatment is introduced in the coating of each layer so as to enhance the interface bonding force of the coating; the uniformity and the corrosion resistance of the coating are optimized by regulating and controlling spraying parameters, plasma processing power and a gas ratio; and finally, a gradient heating curing process is adopted, so that the compactness and durability of the coating are ensured. The method is mainly used for long-term anti-corrosion protection of steel structures such as bridges and buildings, and the anti-corrosion performance and the service life in a complex environment can be remarkably improved.

The embodiment of the invention provides a glass-based structural member as well as a preparation method and application thereof, and the preparation method comprises the following steps: carrying out at least one pre-plating cleaning selected from alkali cleaning, acid pickling and plasma treatment on a glass substrate, so that the surface water drop angle of the glass substrate is in a range of 10-30 degrees; forming a dielectric layer comprising a silicon dioxide layer on the surface of one side of the glass substrate cleaned before plating; forming an anti-fingerprint layer on the silicon dioxide layer; si-CH2 bonds are formed between the silicon dioxide layer and the anti-fingerprint layer. After the glass base material is cleaned before plating, the binding force between the SiO2 layer formed on the glass base material and the glass base material and the binding force between the anti-fingerprint layer and the SiO2 layer are both high, so that the thickness of the SiO2 layer and the anti-fingerprint layer can be large, the structure of the whole coating is stable, and the glass-based structural part can have good abrasion resistance, good scratch resistance and a lasting anti-fingerprint effect; and the application requirements in the fields of electronic equipment and the like can be well met.

The invention provides a coating spraying process for an aluminum alloy wheel. The coating spraying process comprises the following steps: S1, surface treatment; s2, spraying a bottom coating; s3, spraying a surface coating; s4, spraying a nano-particle reinforcing layer; s5, thermal plasma spraying post-treatment is carried out; according to the process method, the adhesive force can be improved, the cold plasma treatment technology can efficiently activate the surface of the aluminum alloy, the adhesive force between the coating and the base material is enhanced, and the risk that the coating is peeled off is reduced. And by adding the nano-particle reinforcing layer, the surface hardness of the coating is remarkably improved, and the coating has higher scratch resistance. And the corrosion resistance is enhanced, specifically, the corrosion resistance and the ultraviolet resistance of the aluminum alloy wheel are greatly improved through the optimized formula of the bottom coating and the surface coating, especially the application of a nano reinforcing material and a photocureable coating. The ultraviolet curing technology of the photocureable coating greatly shortens the curing time, the high-frequency production requirement is met, and the production efficiency is improved.

The invention belongs to the field of macromolecules, and particularly relates to a PBO fiber surface modification method for a synergistic copolymer coating through plasma treatment. According to the method, modification is designed by adopting a synergistic mechanism of plasma treatment and a functional coating: firstly, the PBO fiber is treated by oxygen plasma, a microstructure and an active group are formed on the surface of the PBO fiber, and the surface activity of the PBO fiber is rapidly improved; then coating a monomer solution containing a photoinitiator, exciting light to initiate free radical polymerization through ultraviolet irradiation, forming a random copolymer coating on the surface of the PBO fiber, and repairing the damage of oxygen plasmas to the PBO fiber structure while introducing active groups into the coating; and active groups formed by oxygen plasma treatment can enhance the adhesive force between the coating and the PBO fiber. Finally, the invention provides an environment-friendly and controllable PBO fiber surface synergistic modification technology, the intrinsic performance of the PBO fiber and the interface bonding strength are improved for a long time, and a support is provided for engineering application of the high-performance PBO fiber.

The invention discloses an electrocatalyst for acidic oxygen evolution reaction as well as a preparation method and application of the electrocatalyst, and belongs to the technical field of electrolyzed water. The preparation method of the electrocatalyst for the acidic oxygen evolution reaction comprises the following steps: growing a transition metal oxide on a conductive substrate in situ to obtain a transition metal oxide carrier; the transition metal oxide carrier is subjected to plasma treatment and then placed in a precious metal salt solution for a cation exchange reaction, and the electrocatalyst is obtained. The electrocatalyst prepared by the invention has extremely low initial overpotential (187mV) when a water electrolysis reaction is carried out in a 0.5 M H2SO4 solution, has no obvious performance degradation in a continuous acidic water electrolysis process for 4500h, shows very high operation stability, and has great application potential in the aspects of replacing a commercial RuO2 / IrO2 catalyst and reducing electrode preparation cost and acidic water electrolysis.

The invention discloses a microporous diaphragm for a low-electrical-impedance lithium battery and a preparation method of the microporous diaphragm. The diaphragm comprises: a base film layer, wherein the base film layer is of a microporous structure formed by biaxially stretching polypropylene and / or polyethylene; the surface of the base film layer is coated with the functional coating, and the functional coating contains mixed slurry of inorganic nanoparticles and a binder; the surface modification layer is formed by introducing a hydrophilic electrolyte group on the surface of the functional coating through plasma treatment or chemical grafting. The base membrane layer forms a uniform micropore structure through a two-way stretching process, the functional coating is formed by compounding nano silicon dioxide or aluminum oxide and polyvinylidene fluoride according to a specific proportion, a porous layer with gradient pore diameter is formed, the pore size of the porous layer is smaller than that of the base membrane layer, and efficient permeation of electrolyte is ensured. Electrolyte-philic groups such as sulfonic groups are introduced into the surface modification layer, so that the wettability of the diaphragm to an electrolyte is remarkably improved. During preparation, the base membrane is formed through melt blending, two-way stretching and pore-forming agent extraction, and then the functional layer is constructed through slurry coating and a low-temperature plasma treatment or sulfonation process. The diaphragm combines gradient aperture design, inorganic filler enhancement and surface chemical modification, and realizes low impedance, high thermal stability and excellent mechanical strength.

The invention discloses a multi-layer composite barrier film and a production process thereof, and belongs to the field of polymer composite materials. Aiming at the problems of obvious performance attenuation, poor interlayer binding force and low step-by-step compounding process efficiency of a barrier film in a humid and hot environment in the prior art, the invention provides a five-layer asymmetric structure design: an outer layer, a bonding layer, a barrier layer, a bonding layer and an inner layer. Wherein the barrier layer is formed by blending EVOH and MAH-PA6 and cooperating with nano montmorillonite to form a multi-barrier network, so that the oxygen permeability is smaller than or equal to 0.3 cm / (m.24h. 0.1 MPa), and the water vapor permeability is smaller than or equal to 1.5 g / (m.24h). The production process innovation comprises five-layer co-extrusion melt flow rate ratio control, three-roller gradient cooling and a bidirectional plasma processing technology, the continuous production speed is larger than or equal to 120 m / min, and the interlayer peeling strength is larger than or equal to 8 N / 15 mm. The barrier property stability is remarkably improved.

The invention provides a modified lithium metal negative electrode and a preparation method and application thereof, and belongs to the technical field of lithium batteries. The modified lithium metal negative electrode comprises a negative electrode conductive substrate and an interface passivation layer formed on the surface of the negative electrode conductive substrate, and the interface passivation layer comprises lithium oxide, lithium sulfide, lithium nitride, lithium fluoride and a fluorocarbon compound; the interface passivation layer is obtained by putting lithium metal into chloroform for dipping treatment to obtain modified lithium metal and then performing plasma treatment. According to the lithium ion battery, the interface passivation film containing the lithium oxide, the lithium sulfide, the lithium nitride, the lithium fluoride and the fluorocarbon is formed on the negative electrode conductive substrate, and in the repeated charging and discharging process of the lithium ion battery, due to the existence of the interface passivation film, non-uniform deposition of lithium ions can be avoided, so that growth of lithium dendrites is inhibited. Furthermore, the coulombic efficiency and the cycling stability of the charge-discharge cycle of the lithium ion battery can be improved, and the service life of the lithium ion battery is prolonged.

The invention relates to the technical field of wafer processing, in particular to a reaction chamber and plasma processing equipment, which comprises a quartz tube, an induction coil, a Faraday shield cage, a state monitoring device, a rotation driving device and a control unit, and is characterized in that the quartz tube is arranged at the top of a processing chamber; the induction coil is arranged around the outer side of the quartz tube; the Faraday shielding cage is provided with a slit, and the orthographic projection of the slit on the circumferential wall of the quartz tube forms an erosion area; the state monitoring device is used for monitoring the erosion area; the driving end of the rotary driving device is connected with the quartz tube or the Faraday shielding cage; the control unit is in communication connection with the state monitoring device and the rotary driving device; according to the invention, through real-time monitoring and an active regulation and control mechanism, the problem of concentrated erosion of plasma to the quartz tube in a high-hydrogen process is effectively solved.

The invention provides a surface modified carbon fiber as well as a preparation method and application thereof, and belongs to the technical field of battery materials. Physical or chemical treatment on the surface of the carbon fiber is realized by performing one or more of accurate plasma treatment, chemical etching, coupling agent treatment and nano particle deposition on the surface of the carbon fiber, so that functional groups are introduced or a rough nano structure is formed; a functional layer with a specific functional group and a rough structure which are beneficial to attachment of positive electrode material slurry are formed on the surface of the carbon fiber, and then a stable and well-attached surface modified layer is obtained through heat treatment, so that the surface modified carbon fiber is prepared. According to the method disclosed by the invention, the surface roughness and the functional group richness can be improved on the premise that the mechanical property of the fiber is not obviously damaged, so that the adhesiveness and the electrical property of the positive electrode material slurry are enhanced, and a foundation is laid for the preparation of a carbon fiber positive electrode material and a structure-energy storage integrated composite structure.

The invention relates to the technical field of wafer processing equipment, in particular to a reaction cavity for a high-hydrogen process and plasma processing equipment, and the reaction cavity comprises a quartz tube; the first coil surrounds the outer side of the quartz tube and is connected with an external radio frequency power supply; the Faraday shielding cage is annularly arranged outside the quartz tube and between the quartz tube and the first coil, and a plurality of slits which penetrate through the side wall of the Faraday shielding cage and extend in the axial direction are formed in the Faraday shielding cage; the blocking piece is arranged in the quartz tube, and a structure formed by orthographic projection of the blocking piece on the circumferential side wall of the Faraday shielding cage covers a structure formed by orthographic projection of the first coil on the circumferential side wall of the Faraday shielding cage; the blocking piece is arranged in the quartz tube, so that concentrated bombardment of plasma generated in the high-hydrogen process on the inner wall of the quartz tube can be effectively blocked, the problems of erosion of the quartz tube and particle stripping are remarkably relieved, the process yield of plasma processing equipment is increased, and the service life of a machine table is prolonged.

The invention discloses a silica gel pad with high thermal conductivity and heat resistance and a preparation method thereof, and the method comprises the following steps: preparing a composite thermal conductive filler, mixing boron nitride nanosheets and graphene according to a certain mass ratio, adding a silane coupling agent, carrying out ball milling, adding spherical alumina, and mixing; preparing modified organic silicon resin, wherein methyl vinyl silicone rubber, hydrogen-containing silicone oil, a platinum catalyst and MQ silicon resin react to obtain the modified organic silicon resin; mixing and defoaming the modified organic silicon resin, the composite heat-conducting filler, the flame retardant and the antioxidant to obtain a heat-conducting silica gel mixture; preparing a reinforced base material, carrying out plasma treatment on glass fiber cloth, and then impregnating the glass fiber cloth with vinyl ester resin for pre-curing; and grinding the mixture by three rollers, coating the mixture on a reinforced base material, and heating and curing. The thermal conductivity of the obtained silica gel pad is 2.5-3.5 W / m.K, the volume resistivity is larger than 1012 omega.cm, the long-term heat-resistant temperature reaches 200 DEG C or above, the tensile strength is larger than 5 MPa, the peel strength is larger than 15 N / cm, and the silica gel pad has excellent thermal conductivity, insulativity, heat resistance and mechanical strength.

The invention relates to the technical field of electrochromism coating, in particular to an electrochromism device coating process and method, and the electrochromism device coating process comprises the following steps: step 1, substrate pretreatment: cleaning attachments on the surface of a flexible substrate through ultrasonic cleaning and plasma treatment; step 2, conducting layer deposition treatment: depositing an indium tin oxide (ITO) conducting layer on the substrate at the deposition temperature of 100-380 DEG C, the thickness of 200-350 nm and the vacuum degree of less than or equal to 10 <-5 > Pa; step 3, electrochromic layer deposition treatment: sequentially depositing a tungsten oxide (WO3) layer and a nickel oxide (NiO) layer through a magnetron sputtering process, and controlling the film thickness ratio of NiO to WO3 to enable the ratio of NiO / W to be 0.25-0.357; 4, annealing treatment is conducted, specifically, annealing is conducted for the first time at the temperature of 200-500 DEG C, and the annealing time is 200-300 seconds; and secondary annealing is conducted, specifically, annealing is conducted at the temperature of 400 DEG C, and the annealing time ranges from 200 seconds to 800 seconds. The effect of improving the yellow ground color of the electrochromic device is achieved.

The invention relates to a preparation method of a hydrophobic and oleophobic PTFE membrane, and belongs to the technical field of PTFE membrane preparation. Aiming at the problems that an existing PTFE membrane is difficult to construct a micro-nano multi-stage coarse structure and has a synergistic effect with low chemical surface energy, the hydrophobic and oleophobic properties are insufficient and the structural stability is poor, the key points of the technical scheme provided by the invention are as follows: firstly, carrying out ethanol ultrasonic cleaning on a PTFE base membrane of 20-30 microns, and carrying out vacuum plasma treatment to form a nano coarse structure and oxygen-containing polar group active sites; then, under the protection of nitrogen, immersing into an ethanol solution containing perfluorodecyltriethoxysilane, dibutyltin dilaurate and nano cellulose whiskers, carrying out hot-pressing compounding with PET non-woven fabric, carrying out heat treatment, and finally, coating with a fluorine-containing polymer nano fiber layer through an electrostatic spinning process; the composite hydrophobic layer with the synergistic effect of a micro-nano multistage coarse structure and chemical low surface energy is formed, the water contact angle is larger than or equal to 155 degrees, and the oil contact angle is larger than or equal to 130 degrees. The PTFE film prepared by the preparation method can be used in the fields of waterproof breathable materials, self-cleaning surfaces, oil-resistant packaging and the like.

The invention relates to the technical field of wafer processing equipment, in particular to a reaction cavity and plasma processing equipment, comprising a quartz tube, an induction coil and a shielding member, the quartz tube is arranged at the top of a processing chamber; the induction coil is arranged on the outer side of the quartz tube in a surrounding manner and comprises a plurality of annular sections which are arranged at intervals in the axial direction of the quartz tube and a plurality of connecting sections which are arranged between every two adjacent annular sections and are used for connecting every two adjacent annular sections; the shielding component is annularly arranged between the quartz tube and the induction coil and comprises a plurality of annular shielding parts arranged in the axial direction of the quartz tube and a plurality of arc-shaped shielding parts arranged between every two adjacent annular shielding parts and used for connecting every two adjacent annular shielding parts; a slit is formed between two adjacent annular shielding parts; concentrated bombardment of high-energy ions on the inner wall of the quartz tube can be obviously prevented, so that erosion of the quartz tube is effectively reduced, particulate matter is reduced, the service life of a machine is prolonged, and the process yield is increased.

The invention discloses a fluorine-nitrogen-doped carbon-based oxygen reduction electrocatalyst for a zinc-air battery and a preparation method of the fluorine-nitrogen-doped carbon-based oxygen reduction electrocatalyst, and belongs to the technical field of catalysts. According to the method, a fluorocarbon mixture is rapidly treated through Joule heat to achieve efficient fluorine doping, then nitrogen doping is conducted through an ammonia gas plasma technology, and therefore an original carbon precursor is converted into fluorine-nitrogen-doped carbon. The catalyst material is short in preparation time and high in production efficiency, the content configuration of fluorine and nitrogen doped in fluorine-nitrogen-doped carbon finally formed by accurately controlling the temperature and time of Joule heat treatment and the power and time of plasma treatment is controllable, the morphology and the pore structure are controllable, high electro-catalytic performance is guaranteed, and the catalyst material is suitable for industrial production. The preparation method is high in production efficiency and low in cost, and has large-scale amplification potential.

The invention discloses a high-viscosity silicone rubber composite material and a preparation method thereof.The preparation method comprises the steps that a silicon-based polymerization solution and a silane raw material are mixed on the basis of a rotary dropper, and a silicon-based liquid compound containing a spiral laminated layer is obtained; the preparation method comprises the following steps: dispersing a nano-filler into a silicon-based liquid compound for synthesis treatment, carrying out crosslinking treatment on the obtained primary compound and peroxide to obtain a crosslinked compound, mixing the crosslinked compound with a fiber compound, and carrying out plasma treatment to obtain a fiber-reinforced compound; performing secondary cross-linking treatment on the fiber reinforced compound and a peroxide silicone oil solution in a vacuum high-temperature environment to obtain a secondary cross-linked compound; and immersing the secondary cross-linked compound into a turbid liquid containing nano aluminum oxide, and carrying out heating treatment to obtain a finished product of the high-viscosity silicone rubber composite material. According to the invention, the problem of compatibility between the filler and the matrix material is solved, the processability is improved, and the performance of the material in multiple aspects such as high temperature resistance and aging resistance is further improved.

A substrate processing system comprising: a plasma processing apparatus; a depressurization transfer device having a transfer robot and an edge ring; and a controller is disclosed. The plasma processing apparatus includes: a depressurizable processing chamber; a substrate support table; a lifting mechanism; a gas supply part; and a plasma generating part. The controller controls following steps to be performed in following order: (a) performing plasma processing on the substrate and, then, applying a voltage of a first polarity to the electrode; (b) neutralizing the edge ring, by applying a voltage of a second polarity to the electrode while supplying a gas, and stopping the application of the voltage to the electrode after a predetermined period of time elapses; (c) separating the edge ring from a ring placing surface of the substrate support table; and (d) transferring the edge ring from the processing chamber to the depressurization pressure transfer device.

The invention relates to the technical field of semiconductor manufacturing equipment, in particular to a process cavity with a controllable gas flow field and plasma processing equipment, and the process cavity comprises a cavity body which is provided with a cavity for bearing a wafer; the air inlet channel is communicated with the cavity; the main air exhaust channel is arranged at the bottom of the cavity body and is communicated with the cavity; the main air exhaust channel is connected with a main control valve; the auxiliary air exhaust channel is arranged on the side wall of the cavity body and is communicated with the cavity; the main control valve and the auxiliary control valve work cooperatively. The control device is in communication connection with the main control valve and the auxiliary control valve; through the cooperation of the auxiliary air exhaust channel and the auxiliary control valve and the cooperation of the main air exhaust channel and the main control valve, the flow field distribution in the process cavity is adjusted, the gas concentration gradient and the edge dead zone in the radial direction of the wafer are guided to be eliminated, and the consistency of the side face angle, the surface roughness center area and the edge area of the outer ring groove or hole of the wafer is achieved.

The invention relates to the technical field of spaceflight material forming, in particular to a tension control winding process of a spaceflight carbon fiber composite launch canister, which comprises pretreatment, winding forming, curing and post-treatment. The method comprises the following steps: S1, coating a release agent and a modified coating after processing a core mold, carrying out plasma treatment and eliminating stress; the carbon fiber filaments are soaked in resin containing nanometer components, and are pre-stretched after a hot melting reaction; s2, closed-loop tension control is conducted, winding is conducted according to segmented angles, and modified resin is coated between layers to be overlapped in a crossed mode; s3, stepwise heating and curing, dynamically regulating the pressure and introducing inert gas; and S4, polishing after hydraulic demolding, carrying out sand blasting, carrying out transition layer and ceramic coating, and carrying out multi-dimensional detection. According to the process, the mechanical property and environmental adaptability of the launch canister are improved, the process precision is high, defects are reduced, the forming time is shortened, the rework rate and cost are reduced, the spaceflight requirement is met, and the process is suitable for batch production.

The invention discloses a ceramic rock plate with a decorative effect and a production process thereof, and belongs to the technical field of ceramics. The rock plate is composed of a green body layer, a ground glaze layer, a cover glaze layer and an ink jet pattern layer, and after firing, a micro-nano rough and low-surface-energy synergistic protection layer is formed through oxygen-nitrogen plasma activation, a hydrothermal reaction of aluminum salt and an ammonia source compound, high-temperature calcination and silane derivative dipping and curing. The green body takes wollastonite, quartz sand and the like as raw materials, and the ground glaze and the cover glaze adopt a feldspar-quartz-nepheline system; after firing, performing plasma treatment and hydrothermal treatment to generate needle-shaped aluminum oxide, and introducing a silane derivative to realize double functions of super-hydrophobicity and wear resistance. Compared with the prior art, the anti-fouling and wear-resistant coating reaches the national standard 5 level, the process is simple, and the coating can be directly connected to an existing production line and is suitable for high-end wall floor decoration.

The invention relates to a preparation method and application of a three-step method environment-friendly SBS modified asphalt regenerant, and the regenerant is composed of modified bio-oil, functionalized desulfurized rubber, a solubilizer, an anti-oxidation aging agent, an anti-light aging agent, a multi-sulfydryl chain reconstruction auxiliary agent, a reversible thioether cross-linking agent and other components. The matrix and polymer network structure of the aged SBS modified asphalt is repaired through light oil supplement and chemical reaction. The preparation method comprises the following steps: introducing a polar functional group into ultrasonic transesterification modified bio-oil to improve wettability; the surface activity of the desulfurized rubber is improved through plasma low-temperature treatment; high-speed shearing and closed-loop control reaction are combined to realize rubber particle dispersion and network reconstruction; chemical crosslinking and aging regeneration are realized through cooperation of specific components. The prepared regenerant is doped into aged SBS modified asphalt at the temperature of 145-165 DEG C according to the proportion of 4-20 wt% to prepare regenerated asphalt.

The present disclosure describes a method for forming a nitrogen-rich protective layer within a low-k layer of a metallization layer to prevent damage to the low-k layer from subsequent processing operations. The method includes forming, on a substrate, a metallization layer having conductive structures in a low-k dielectric. The method further includes forming a capping layer on the conductive structures, where forming the capping layer includes exposing the metallization layer to a first plasma process to form a nitrogen-rich protective layer below a top surface of the low-k dielectric, releasing a precursor on the metallization layer to cover top surfaces of the conductive structures with precursor molecules, and treating the precursor molecules with a second plasma process to dissociate the precursor molecules and form the capping layer. Additionally, the method includes forming an etch stop layer to cover the capping layer and top surfaces of the low-k dielectric.

The invention relates to the technical field of preparation of medical supplies, in particular to a surgical membrane and a preparation process. During specific use, firstly, a polyurethane base membrane is selected and subjected to plasma treatment; spraying a nano SiO2 dispersion liquid containing a photoinitiator on the surface of the treated polyurethane base film, and then performing ultraviolet patterning irradiation to form a micro-bulge structure to obtain a base material layer; projecting the colloidal fluid to a temperature gradient mask through a digital micromirror device, so that the colloidal fluid is subjected to regional thermal polymerization on the substrate layer to form an intelligent adhesive layer with viscosity gradient; by adopting an aerosol jet printing technology, super absorbent fibers and polyvinyl alcohol-borax dynamic crosslinking hydrogel are co-deposited to form a drainage layer, so that the technical problems that a surgical membrane prepared by a surgical membrane preparation mode in the prior art is inflexible in adhesion and poor in surface structure performance, and a preparation process is difficult to accurately control are solved.