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1588 results about "Plasma generator" patented technology

Intravascular lithotripsy device with plasma generator including polymeric material

A catheter system (100) for treating a treatment site (106) within or adjacent to a vessel wall (108A) of a blood vessel (108) includes an energy source (124), an energy guide (122A), and a guidewire lumen (118). The energy source (124) generates energy. The energy guide (122A) is configured to selectively receive the energy from the energy source (124). The energy guide (122A) includes a guide distal end (122D). The energy that is received by the energy guide (122A) is emitted from the guide distal end (122D). The guidewire lumen (118) having an outer surface (218S). At least the guide distal end (122D) of the energy guide (122A) is positioned adjacent to the outer surface (218S) of the guidewire lumen (118) A portion of the guidewire lumen (118) encompasses a plasma generator (133) that is positioned near the guide distal end (122D) of the energy guide (122A). The plasma generator (133) is positionable near the treatment site (106). The plasma generator (133) is formed from a polymeric material.
Owner:BOSTON SCIENTIFIC SCIMED INC

Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.
Owner:USHIO INC

Multi-flame powder combustion eruption device

PendingCN119687731AFirework simulationsPlasma generatorMechanical engineering
The invention discloses a multi-flame powder combustion eruption device. The multi-flame powder combustion eruption device is characterized in that a quantitative blanking powder bin is communicated with an eruption pipe through a pneumatic pipeline; the spraying pipe is provided with a spraying guide cavity, the plasma generator discharges gas in the spraying guide cavity to form a plasma arc area, and the plasma arc area and the cavity wall of the spraying guide cavity have a distance which enables the plasma arc area and the cavity wall of the spraying guide cavity not to make contact. The plasma arc region is a free arc region or a compressed arc region; powder in the powder bin is quantitatively discharged into the pneumatic pipeline, the pneumatic pipeline conveys the powder into the eruption guide cavity, and airflow drives the powder to pass through the plasma arc area and then is sprayed out of an eruption opening of the eruption guide cavity. The plasma generator controls the working temperature of the plasma arc area according to the material and particle size of the powder. And the firework effect of various flame colors can be displayed. The energy loss is effectively reduced, the heating speed is high, the temperature uniformity is good, and the energy consumption is low; the device has the advantages of simple structure, safety and reliability.
Owner:卜海云

Self-adaptive control system and method of plasma generator

The invention relates to the technical field of plasma generators, and particularly discloses a self-adaptive control system and method of a plasma generator, and the method comprises the steps: carrying out the feature extraction of a voltage time sequence data set, a current time sequence data set and a plasma density time sequence data set through employing a data analysis and coding technology based on deep learning, meanwhile, time sequence feature extraction is carried out on curves of voltage, current and plasma density which correspond to each control mode and change along with time; therefore, the optimal control mode of the target plasma generator is intelligently screened out according to the fast scanning semantic query representation between the multivariable time sequence implicit cooperation feature of the plasma generator and the multivariable time sequence implicit coding feature of each control mode. By means of the mode, the future parameter change trend can be predicted more accurately, the optimal control mode can be intelligently screened out, and compared with a traditional threshold value judgment method, early warning can be carried out in advance before the parameters are close to but do not exceed the safety range.
Owner:江苏神州半导体科技股份有限公司

Plasma-based variable mach number wind tunnel design method

The invention discloses a plasma-based variable mach number wind tunnel design method, and belongs to the technical field of wind tunnel design in aerodynamics. The problem that in the prior art, a traditional variable Mach number wind tunnel needs to replace a specific spray pipe, so that the test efficiency is low is solved. The method comprises the steps of determining overall aerodynamic parameters; determining the section size of the stable section according to the wind tunnel flow, the set simulation temperature and the set simulation pressure; the method comprises the following steps: constructing axial Mach number distribution by setting an idea of calculating a wall surface profile by axial Mach number distribution, designing a nozzle outlet Mach number in combination with a transonic speed theory, and verifying the nozzle outlet Mach number by a computational fluid mechanics method; and the number of excited plasma generators is controlled, a volumetric force field generated by plasma excitation is solved by adopting a aesthetic model, the changed nozzle outlet Mach number is obtained, and the variable Mach number wind tunnel design is completed. The method effectively improves the efficiency of the test adopting the variable Mach number wind tunnel, and can be applied to design of the variable Mach number wind tunnel.
Owner:AVIC SHENYANG AERODYNAMICS RES INST

Plasma generator protection device

The invention relates to the technical field of plasma generator protection, and discloses a plasma generator protection device which comprises a plasma generator provided with a mounting seat and a spray gun extending into a combustion chamber; the sleeve sleeves the spray gun and is used for replacing the spray gun to bear the scouring of primary air pulverized coal airflow in the combustion chamber; the powder slag cleaning part comprises a scraping plate, the length direction of the scraping plate is consistent with the length direction of the spray gun, and the scraping plate is attached to the periphery of the sleeve; the scraping plate is driven by an annular driving mechanism to rotate along the circumferential track of the outer surface of the sleeve, the movement path of the scraping plate is tightly attached to the outer circumferential face of the sleeve, and the rotation axis of the scraping plate coincides with the geometric axis of the sleeve, so that powder slag generated after hot melting of the surface of the sleeve is removed. Pulverized coal airflow scouring is blocked through the sleeve, powder slag is cleaned in combination with the annular driving scraper, the heat dissipation performance of the spray gun is guaranteed, the service life of the spray gun is remarkably prolonged, the maintenance cost is reduced, and the operation stability and economical efficiency of equipment are improved.
Owner:HUANENG ANYUAN POWER GENERATION CO LTD

Plasma aquaculture water purification method and system

According to the plasma aquaculture water purification method and system, a cold plasma directional screening technology is used as a core to construct a cold plasma water treatment module, a nanosecond pulse plasma generator is used for exciting a gas medium to form cold plasma, active particles are screened in situ through a directional screening assembly, and the cold plasma water treatment module is used for purifying aquaculture water. The method comprises the following steps: introducing ammonia nitrogen into a water body, guiding < 1 > O2 to be quickly injected into the water body, instantaneously completing a primary purification reaction in a gas-liquid intersection chamber, further, in order to fully utilize residual active particles, directionally converting a reaction precursor O3 of < 1 > O2 into < 1 > O2 through a catalytic dissociation module, and completing a secondary purification reaction between the < 1 > O2 and the ammonia nitrogen. Ammonia nitrogen is directionally converted into nitrogen by utilizing a 1O2-dominated non-free radical reaction path, the content of ammonia nitrogen and total inorganic nitrogen in a water body is reduced, and after purification is completed, oxidizing components in the water body and tail gas are respectively removed by adopting a by-product removal assembly, so that the use safety is guaranteed.
Owner:HUZHOU INST OF ZHEJIANG UNIV

Blood product virus inactivation system based on synergistic effect of nano-catalysis photochemical inactivation and low-temperature plasma

The invention belongs to the technical field of medical treatment, and discloses a blood product virus inactivation system based on a synergistic effect of nano-catalysis photochemical inactivation and low-temperature plasma, the system comprises: a nano-photocatalysis inactivation module adopting titanium dioxide TiO2 and graphite phase carbon nitride g-C3N4 nano-materials as photocatalysts; the low-temperature plasma inactivation module adopts a low-temperature plasma generator to generate plasma cloud above the blood product and release active particles; the dynamic fluid stirring module is used for enabling the blood product to uniformly receive photocatalysis and plasma inactivation effects through a microfluid mixing technology so as to ensure the uniformity of virus inactivation; the sensing monitoring and intelligent feedback module is used for monitoring the residual quantity of viral nucleic acid and the activity of protein in the blood in real time by adopting a spectrum sensor and a biochemical sensor. The method can be widely applied to the fields of clinical blood transfusion, blood product manufacturing, blood disease treatment and the like, promotes the progress of a blood safety guarantee technology, reduces the virus infection risk and improves the patient safety.
Owner:NANYUE BIOPHARMING

Method and system for plasma protection of thermal runaway of air-cooled energy storage power station

The invention relates to the technical field of intelligent fire extinguishing control of energy storage power stations, in particular to a method and system for plasma protection of thermal runaway of an air-cooled energy storage power station. The method comprises the following steps: processing real-time data acquired by a multi-source sensor through a dynamic risk assessment model to obtain a risk level and an early warning level; an initial control instruction for the plasma generator and the air cooling and refrigerating system is formed according to the risk level and the early warning level; the initial control instruction is processed to form a driving control signal; a control signal is subjected to cooperative execution processing to obtain a high-energy active particle jet flow, a forced airflow and a refrigeration effect. The system comprises an air cooling box body, a battery, a fan, a plasma generator, an ejector, an intelligent controller, a compressor, a gas-liquid separator, a heat exchanger, an electronic expansion valve, a drying filter, a gas sensor and a pressure sensor valve. The safety and reliability of the energy storage power station are improved.
Owner:TIANJIN TIER TECHNOLOGY CO LTD

Substrate processing system and method for installing edge ring

A substrate processing system includes a plasma processing apparatus, a decompression transferrer coupled to the plasma processing apparatus, and control circuitry that controls a transfer robot to load an edge ring into a process chamber and to transfer the edge ring to a lift assembly, controls the lift assembly to lower the edge ring onto a ring support surface, controls an electrostatic chuck to electrostatically clamp the edge ring onto the ring support surface, and controls a plasma generator to generate plasma in the process chamber and stabilize the electrostatically clamping of the edge ring onto the electrostatic chuck before performing plasma processing on a product substrate, the stabilizing includes controlling a power source to apply pulsed direct current voltage to the substrate support, including applying a first bias voltage and applying a second bias voltage higher than the first bias voltage after applying the first bias voltage.
Owner:TOKYO ELECTRON LTD

Frequency modulation matching microwave plasma generator

The invention discloses a frequency modulation matching microwave plasma generator, which is characterized in that a circulator is connected between a microwave source and a plasma resonant cavity, microwaves are input from a port 1 of the circulator, and are output to the plasma resonant cavity from a port 2, so that the reflected microwaves are output from a port 3. Meanwhile, a matched load and a power meter are connected to a port 3 of the circulator, microwaves output by the port 3 of the circulator are absorbed by the matched load, most returned microwaves are absorbed by the matched load, a small part of the microwaves are reflected back to the port 3, the microwaves input by the port 3 are output at a port 1, the microwave power borne by the microwave source is reduced, and the stability and the service life of the microwave source are improved. The control system adjusts the output frequency of the microwave source according to the measured power, so that the output frequency of the microwave source is improved, and the output impedance of the microwave source is matched with the working impedance of the plasma resonant cavity again, so that the back-and-forth reflection loss of microwaves is avoided; and the impedance matching adjustment speed is greatly improved.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Electronic driving controller of multifunctional portable disinfection and sterilization acarus killing device

The invention discloses an electronic driving controller of a multifunctional portable disinfection and sterilization acarus killing device. The electronic driving controller comprises a power supply module, a control module, an LCD display module, a load driving module, an input interface and a key board. According to the multifunctional portable disinfection and sterilization acarus killing device, a microprocessor programming technology and an interface driving circuit are utilized to realize the combined working function of the multifunctional portable disinfection and sterilization acarus killing device in various modes of the fan, the plasma generator, the ozone generator and the air pump. At least two loads of each function work at the same time, and the working time is not consistent, so that the use convenience is reduced due to a complex logic relationship in manual operation and load control. The controller realizes multi-functional free combination and integration, reduces the equipment volume, and reduces the manufacturing cost. The LCD display screen displays all functions, currently executed work and remaining time, a man-machine interaction interface is attractive and simple, all the functions can be operated only through one button, and the defect that a traditional acarus killing device is complex in operation action is overcome.
Owner:SANDA UNIVERSITY

Substrate processing apparatus using plasma phase shift

A substrate processing system using plasma would be presented. The system may comprise a plurality of reaction chambers disposed on a platform, each of them being configured to process substrates; a plasma generator or generator coupled to the plurality of reaction chambers individually and configured to generate plasma or plasma power with a certain frequency and a certain phase, and further configured to provide the generated plasma or plasma power to the plurality of reaction chambers; and a control circuit connected to the plasma generator or generator and configured to adjust the phase of the plasma or plasma power generated by the plasma generator or generator; wherein, the control circuit is further configured to shift the phase of the generated plasma or plasma power provided to the plurality of reaction chambers independently.
Owner:ASM IP HLDG BV

Intelligent integrated system for manufacturing biological tissue engineering scaffold

The invention discloses an intelligent integrated system for manufacturing a biological tissue engineering scaffold, relates to the technical field of biomedicine, and is used for improving the biocompatibility, mechanical strength and cell adhesion capacity of a biological scaffold. The plasma generator comprises a microwave generator, a precise electrode and an efficient gas flowing unit; the integrated manufacturing module comprises a 3D printing unit, a plasma enhanced chemical vapor deposition (PECVD) unit and a cooperative control unit; the monitoring and control system comprises an intelligent temperature and humidity sensor, a gas component monitor and an automatic control unit; the data management and optimization module comprises a biological safety evaluation unit, a personalized design and simulation unit, a material selection and management unit, a degradable material processing unit and a dynamic feedback and adjustment unit. According to the invention, low-temperature plasma treatment, 3D printing and PECVD technologies are fused, and a highly intelligent and integrated manufacturing platform is constructed.
Owner:SHANDONG UNIV

Plasma generating devices and electrical equipment

The present invention discloses a plasma generating device and an electrical device, which relate to the field of plasma technology, wherein the plasma generating device comprises a dielectric structure, a first electrode and a second electrode, the dielectric structure covers the second electrode, a part of the dielectric structure is arranged as a planar dielectric layer, and the first electrode is arranged on a side of the planar dielectric layer away from the second electrode. The technical solution of the present application can avoid the plasma generating device from being too large in size under the condition of safe use of the plasma generating device.
Owner:GD MIDEA AIR CONDITIONING EQUIP CO LTD +1

Under water acoustics plasma generator

A system and method for evaluating a bond is provided. The system uses an underwater spark discharge to generate a compression wave in a first vessel containing a liquid. The system further includes a second vessel in which a vacuum is pulled to hold the first vessel against a bonded structure being inspected. The compression wave is directed to propagate from the liquid into the bonded structure to apply a known force to the bond being inspected.
Owner:THE BOEING CO

Multi-emitter assembly and excitation sequence for intravascular lithotripsy device

A catheter system (100) includes an energy source (124), a catheter shaft (110), a balloon (104), a plurality of energy directors (122A), a plurality of emitters (135), and a system controller (126). An energy source (124) generates energy. The balloon (104) is coupled to the catheter shaft (110). The balloon (104) includes a balloon wall (130) that defines a balloon interior (146) that holds catheter fluid (132). The energy director (122A) selectively receives energy from the energy source (124). A transmitter (135) is positioned within the balloon interior (146). Each emitter (135) includes a director distal end (122D) of one of the energy directors (122A) and a corresponding plasma generator (133) spaced apart from the director distal end (122D). The energy received by each energy director (122A) is emitted from the director distal end (122D) and impinges on a corresponding plasma generator (133) such that a plasma is generated in the catheter fluid (132) within the balloon interior (146). The system controller (126) controls the energy source (124) such that energy from the energy source (124) is alternately directed to each energy director (122A) in a first excitation mode and a second excitation mode different from the first excitation mode.
Owner:BOSTON SCIENTIFIC SCIMED INC

Method for preparing titanium-aluminum alloy powder based on plasma rotating electrode atomization method

The invention discloses a method for preparing titanium-aluminum alloy powder based on a plasma rotating electrode atomization method, and relates to a preparation method of titanium-aluminum alloy powder. The method aims at solving the technical problems that titanium-aluminum alloy powder prepared through an existing method is uneven in particle size, poor in sphericity degree and high in oxygen content, and comprises the steps that firstly, metal raw materials are weighed according to the target titanium-aluminum alloy chemical component proportion, and a uniform cast ingot is obtained through smelting of a vacuum arc smelting furnace; processing the cast ingot into an electrode bar with a smooth surface, mounting the electrode bar on plasma rotating electrode atomization equipment, enabling the electrode bar to rotate at a high speed, melting alloy at the end part of the electrode bar by utilizing a plasma beam generated by a plasma generator, atomizing the alloy into liquid drops under the action of centrifugal force, and cooling and solidifying the liquid drops in a high-purity argon protection atmosphere to form powder; and finally, the powder is collected and screened, finished powder is obtained, the sphericity degree of the powder reaches 95% or above, the oxygen content is lower than 500 ppm, particle size distribution is uniform, and the powder can be used in the fields of aerospace, the automobile industry, energy and the like.
Owner:HEILONGJIANG HEIKE TECH CO LTD

DBD plasma disinfection and sterilization treatment system

The invention discloses a DBD plasma disinfection and sterilization treatment system which comprises a base, conveying rollers are rotationally arranged on the base through a first support and a first connecting shaft, a conveying belt is arranged between the two conveying rollers, and a disinfection and sterilization machine shell is further arranged on the upper portion of the base through a second support. A DBD plasma generator is arranged at the top of a disinfection chamber in the disinfection and sterilization machine shell, a disinfection and cleaning pool is arranged on the base, and the lower end of the conveying belt is guided by a guide roller to pass through the lower portion in the disinfection and cleaning pool. The conveying belt is used for horizontally conveying articles to be disinfected, the DBD plasma generator is used for generating DBD plasma for disinfection and sterilization treatment when the articles pass through the disinfection chamber of the disinfection and sterilization machine shell, the articles are discharged from one end of the conveying belt after disinfection is completed, the disinfection and sterilization effect is good, continuity is high, and the continuous disinfection and sterilization efficiency of the multiple articles can be improved.
Owner:SUZHOU ZHAOYUAN MASCH MFG CO LTD

Plasma arc welding machine for fan steel plate machining

The invention relates to the technical field of plasma arc welding, in particular to a plasma arc welding machine for fan steel plate machining. Comprising a machining table, an electric sliding table used for transversely adjusting the welding position is fixedly connected to the machining table, and the output end of the electric sliding table is in transmission connection with a plasma generating mechanism used for welding the fan steel plate; the distance between the mounting block and the second annular block is monitored through a distance measuring infrared receiver and a distance measuring infrared transmitter, data are fed back to a controller, and the controller controls a third motor to adjust the distance between the mounting block and the second annular block. Therefore, the distance between the welding end of the plasma arc welding gun and the surface of the fan steel plate reaches a preset value, and through self-adaptive adjustment of the distance between the welding end of the plasma arc welding gun and the surface of the fan steel plate, the plasma arc welding gun can achieve the optimal welding effect when the fan steel plates with different thickness values are welded.
Owner:NANTONG HAORUN MECHANICAL & ELECTRICAL EQUIPMENT CO LTD

Method for plasma-assisted stripping of pole piece active material and current collector of lithium ion battery

The invention relates to the technical field of lithium ion battery recovery, and particularly discloses a method for plasma-assisted stripping of a lithium ion battery pole piece active material and a current collector, which comprises the following steps: (1) placing a lithium ion battery positive pole piece in a radio frequency plasma generator; (2) after air is introduced, a vacuum pump is started, and the pressure intensity is adjusted to be a preset value; (3) heating, starting a plasma generator when the temperature reaches a preset value, adjusting the power of the plasma generator to a preset value, and processing for a certain time; and (4) taking out the pole piece, and slightly bending the treated pole piece to separate the active material from the current collector. Compared with the prior art, the stripping effect of the active substance subjected to stripping treatment is good, the stripping rate can reach 99.14%, the aluminum content in the stripped material is only 0.022 wt%, meanwhile, the crystal structure of the treated active material can be kept intact through an X-ray diffraction pattern, and the valence state content of the iron element is not changed through an X-ray photoelectron spectroscopy.
Owner:JINGGANGSHAN UNIVERSITY

Plasma hydrodynamic cavitation aeration coupled piezoelectric catalysis organic wastewater treatment system and method

The invention discloses a plasma hydrodynamic cavitation aeration coupled piezoelectric catalysis organic wastewater treatment system and method. The system comprises a wastewater tank, a water pump, a Venturi tube hydrodynamic cavitator, a catalytic oxidation reactor, a piezoelectric particle separator, a piezoelectric catalytic particle bin, a low-temperature plasma generator and an air pump. By coupling piezoelectric catalysis, pressure pulsation mechanical energy generated by hydrodynamic cavitation is converted into chemical energy for driving the piezoelectric effect, on one hand, pollutants are directly oxidized, and on the other hand, plasma by-product H2O2 is efficiently converted into. OH with strong oxidizing property, so that cooperation with plasma advanced oxidation is formed, and the pollutant removal efficiency is improved. The pollutant degradation energy efficiency and the energy utilization rate of the system are greatly improved. Meanwhile, the system realizes efficient recovery and cyclic utilization of the magnetic piezoelectric catalytic particles through the magnetic separation type piezoelectric particle separator, so that secondary pollution of the catalyst is fundamentally avoided.
Owner:JIANGSU UNIV

Curved surface microstructure laser-plasma combined machining device and method

The invention discloses a curved surface microstructure laser-plasma combined machining device and method, and belongs to the technical field of non-traditional machining. The curved surface microstructure laser-plasma combined machining device comprises a plasma power supply, a gas supply system, a plasma generator, a nozzle assembly, a laser unit, a multi-axis moving unit, a vacuum clamp, a servo control system, a control panel and a machine tool body; and laser-plasma combined machining of the curved surface microstructure can be realized by combining linkage and interpolation movement of each shaft. Femtosecond laser is introduced into a plasma generation area, controllable output of a discharge plasma source is excited by the laser, micro plasma jet in a specific wavelength range is selected for micro-area localization machining, and the problem of machining defects caused by fluctuation and uneven distribution of jet particle energy in atmospheric plasma machining is solved. And meanwhile, laser is used for preheating in the machining area, energy needed by atom stripping of the to-be-machined material is reduced, the material atom stripping time is shortened, and the micro-plasma jet machining efficiency is greatly improved.
Owner:CHANGCHUN UNIV OF SCI & TECH

Electric flame stove capable of independently supplying power to single plasma generator

The utility model discloses an electric flame stove capable of independently supplying power to a single plasma generator. The electric flame stove comprises a shell, a burner arranged on the shell, a plurality of plasma generators arranged on the burner and a plurality of groups of high-voltage rectifying devices, the high-voltage rectifying devices are arranged in parallel, and each high-voltage rectifying device is composed of a transformer and a rectifying unit; the rectification unit is electrically connected with a corresponding plasma generator and outputs direct-current high voltage to the corresponding plasma generator. According to the utility model, the rectification circuit and the transformer are made into an integral modularized high-voltage rectification device, and the single high-voltage rectification device independently supplies power to the corresponding plasma generator, so that in the experience process of a user, even if one or more of the high-voltage rectification devices are abnormal, the high-voltage rectification device can be replaced. And the normal work of other high-voltage rectifying devices or electric flame stoves cannot be influenced.
Owner:YULONG TECHNOLOGY GROUP CO LTD

Deposition method and deposition apparatus

A deposition apparatus including: a processing chamber; a rotary table provided in the processing chamber; a first processing region provided at a predetermined position in a circumferential direction of the rotary table; a second processing region provided downstream of the first processing region in the circumferential direction of the rotary table; a third processing region provided downstream of the second processing region in the circumferential direction of the rotary table; a first heater provided above the rotary table in the second processing region; and a plasma generator. The plasma generator includes: a protrusion having a longitudinally elongated shape in a planar view extending along a radius of the rotary table in a portion of an upper surface of the processing chamber, and protruding upward from the upper surface; and a coil wound along a side surface of the protrusion and has a longitudinally elongated shape in a planar view.
Owner:TOKYO ELECTRON LTD

Waste heat utilization ejector of coupled plasma generator

The invention belongs to the technical field of electric heating, and particularly relates to a waste heat utilization ejector coupled with a plasma generator, the waste heat utilization ejector comprises the plasma generator, a nozzle and a Laval pipe structure, the rear end of the nozzle is provided with a working fluid inlet, and the Laval pipe structure sequentially comprises a receiving chamber, a mixing chamber, a throat pipe structure and a diffuser from back to front. A front end opening of the diffuser is a mixed fluid outlet, the nozzle is located in the receiving chamber, an anode structure of the plasma generator penetrates through the rear end of the receiving chamber and is communicated with an inner cavity of the nozzle through a working fluid inlet, a driving fluid inlet is formed in the side face of the receiving chamber, and a front end opening of the nozzle faces the throat pipe structure. The diffuser is conical, and the size of the mixed fluid outlet is larger than that of the rear end inlet of the diffuser. According to the invention, the waste heat utilization efficiency can be improved while the heating area of the plasma is obviously increased.
Owner:ANHUI CONCH IND TECHNOLOGY RESEARCH INSTITUTE CO LTD +1

Vacuum exhaust device

To provide a vacuum exhaust device capable of performing excellent plasma cleaning without providing a pressure control valve.SOLUTION: A vacuum exhaust device 10 comprises a turbo molecular pump 100, and a plasma generation device 210, and comprises a throttling unit 244 that can increase an internal pressure of the plasma generation device 210 until it satisfies the relation of P≥0.3 / D. P represents pressure [Pa], and D represents a distance [m] between electrodes in the plasma generation device. Also, the throttling unit can increase the internal pressure of the plasma generation device 210 until it satisfies the relation of P≤1.5 / D.SELECTED DRAWING: Figure 5
Owner:EDWARDS JAPAN

Plasma processing apparatus and plasma processing method

A plasma processing apparatus includes a chamber, a substrate support in the chamber, a plasma generator, a bias power supply, an edge ring, a lifter, a switch, and a controller. At least one of the bias power supply or a radio-frequency power supply in the plasma generator is electrically coupled to a base in the substrate support. The lifter includes a conductive ring, a rod, an actuator, and a connector. The lifter raises and lowers the edge ring supported on the conductive ring. The connector electrically couples the conductive ring and the base. The switch changes between a first state in which the edge ring and the base are electrically coupled to each other and a second state in which the edge ring and the base are electrically disconnected from each other. The controller controls the switch.
Owner:TOKYO ELECTRON LTD

Plasma processing apparatus

A plasma processing apparatus, comprising a plasma processing chamber; a plasma generator to generate a plasma from a processing gas in the plasma processing chamber; and a substrate support disposed in the plasma processing chamber, is provided. The substrate support includes a base; an electrostatic chuck disposed above the base; a first annular member to surround a substrate on the substrate support; a second annular member disposed below the first annular member and having a plurality of through holes; a plurality of lift pins disposed to correspond to the respective through holes, each lift pin having an upper portion to support the first annular member through the corresponding through hole and a lower portion; at least one spacer fixed to at least one of the lift pins, disposed on the lower portion so as to surround the upper portion and support the second annular member; and at least one actuator to vertically move the lift pins.
Owner:TOKYO ELECTRON LTD

Plasma generator applied to greenhouse

The utility model discloses a plasma generator applied to a greenhouse, which is characterized in that the front end of a shell B is coaxially connected with a shell A, the rear end of the shell B is eccentrically connected with a shell C, a fan motor is arranged in the shell A, a rotating shaft of the fan motor is connected with fan blades, and an ozone generator body and an ultraviolet germicidal lamp body are arranged in the shell C; an ozone air supply fan is installed at the rear end of the shell C. The rear end face of the shell C is a nano-silver ion net-shaped end face. The plasma generator has the functions of quickly purifying organic pollutants and peculiar smell gas in the air of the greenhouse and purifying the working air quality; structures of bacteria, fungi and diseases can be destroyed, the dip dyeing activity of the bacteria, fungi and diseases is reduced, and synthesis of fungaltoxin is destroyed; meanwhile, the antioxidant reaction of the root tips of the crops is induced, the metabolic process in the crops is promoted, the growth metabolism of the crops is more vigorous, the content and activity of enzyme antioxidants and non-enzyme antioxidants in the crops can be stimulated to be increased, and the stress resistance and pesticide residues of the crops are improved.
Owner:SUZHOU WEIPENG ELECTRICAL TECH CO LTD