679 results about "Plasma generator" patented technology

According to the plasma aquaculture water purification method and system, a cold plasma directional screening technology is used as a core to construct a cold plasma water treatment module, a nanosecond pulse plasma generator is used for exciting a gas medium to form cold plasma, active particles are screened in situ through a directional screening assembly, and the cold plasma water treatment module is used for purifying aquaculture water. The method comprises the following steps: introducing ammonia nitrogen into a water body, guiding < 1 > O2 to be quickly injected into the water body, instantaneously completing a primary purification reaction in a gas-liquid intersection chamber, further, in order to fully utilize residual active particles, directionally converting a reaction precursor O3 of < 1 > O2 into < 1 > O2 through a catalytic dissociation module, and completing a secondary purification reaction between the < 1 > O2 and the ammonia nitrogen. Ammonia nitrogen is directionally converted into nitrogen by utilizing a 1O2-dominated non-free radical reaction path, the content of ammonia nitrogen and total inorganic nitrogen in a water body is reduced, and after purification is completed, oxidizing components in the water body and tail gas are respectively removed by adopting a by-product removal assembly, so that the use safety is guaranteed.

The invention relates to the technical field of intelligent fire extinguishing control of energy storage power stations, in particular to a method and system for plasma protection of thermal runaway of an air-cooled energy storage power station. The method comprises the following steps: processing real-time data acquired by a multi-source sensor through a dynamic risk assessment model to obtain a risk level and an early warning level; an initial control instruction for the plasma generator and the air cooling and refrigerating system is formed according to the risk level and the early warning level; the initial control instruction is processed to form a driving control signal; a control signal is subjected to cooperative execution processing to obtain a high-energy active particle jet flow, a forced airflow and a refrigeration effect. The system comprises an air cooling box body, a battery, a fan, a plasma generator, an ejector, an intelligent controller, a compressor, a gas-liquid separator, a heat exchanger, an electronic expansion valve, a drying filter, a gas sensor and a pressure sensor valve. The safety and reliability of the energy storage power station are improved.

The invention discloses a plasma hydrodynamic cavitation aeration coupled piezoelectric catalysis organic wastewater treatment system and method. The system comprises a wastewater tank, a water pump, a Venturi tube hydrodynamic cavitator, a catalytic oxidation reactor, a piezoelectric particle separator, a piezoelectric catalytic particle bin, a low-temperature plasma generator and an air pump. By coupling piezoelectric catalysis, pressure pulsation mechanical energy generated by hydrodynamic cavitation is converted into chemical energy for driving the piezoelectric effect, on one hand, pollutants are directly oxidized, and on the other hand, plasma by-product H2O2 is efficiently converted into. OH with strong oxidizing property, so that cooperation with plasma advanced oxidation is formed, and the pollutant removal efficiency is improved. The pollutant degradation energy efficiency and the energy utilization rate of the system are greatly improved. Meanwhile, the system realizes efficient recovery and cyclic utilization of the magnetic piezoelectric catalytic particles through the magnetic separation type piezoelectric particle separator, so that secondary pollution of the catalyst is fundamentally avoided.

A plasma generator protection device is provided. The plasma generator (1) has a mounting base (11) and a spray gun (12) extending into the combustion chamber. A sleeve (2) is fitted to the outside of the spray gun and serves to withstand the flushing of the primary air flow of pulverized coal in the combustion chamber instead of the spray gun. A powder slag cleaning unit including a scraper is attached to the sleeve, with the length of the scraper aligned with the length of the spray gun. The scraper is driven by an annular drive mechanism and rotates along a circumferential path on the outer surface of the sleeve. Its movement path is closely attached to the outer circumferential surface of the sleeve, and its rotation axis overlaps the geometric axis of the sleeve, so that it can clean the powder slag that has adhered to the sleeve at high temperatures. The sleeve blocks the brushing of the pulverized coal flow, and the annular drive scraper cleans the powder slag, thereby ensuring the heat dissipation performance of the spray gun, significantly extending the service life of the spray gun, reducing maintenance costs, and improving the operational stability and economy of the device.

Plasma generators and methods for reforming hydrocarbon feedstocks are disclosed. A hydrocarbon feedstock is fed into the reactor. An electrode and a microwave generator form and sustain a plasma in a first reaction zone. The plasma is propagated to a second, downstream, reaction zone where it reforms the feedstock into a hydrogen product and a carbonaceous byproduct. The carbonaceous byproduct is entrained or otherwise directed by flow elements of the reactor toward the electrode. A second microwave generator directs microwaves to the entrained carbonaceous byproduct, heating the byproduct and in turn the feedstock. Selectively heating the feedstock before reforming in the second reaction zone improves efficiency, performance, and yield of the reactor.

The invention provides a pollution gas treatment device for polyurethane waterproof coating production and a treatment method thereof, and relates to the technical field of gas treatment.The pollution gas treatment device comprises a dry adsorption spray tower, the dry adsorption spray tower is provided with a treatment mechanism facilitating multi-stage treatment of gas, and the dry adsorption spray tower is provided with a gas inlet and a gas outlet. The treatment mechanism comprises a spiral diffusion plate, an adsorbent ejector, an interception chamber, a plasma generator and a wet-type adsorption spray tower, the spiral diffusion plate and the adsorbent ejector are both located on the inner side wall of the dry-type adsorption spray tower, and the interception chamber is located at the side end of the dry-type adsorption spray tower. According to the device, the plasma generator is arranged, after residual pollutants, such as free isocyanate, amine intermediates, free radicals and the like, of the dry adsorption spray tower enter the plasma generator, the plasma can decompose precursors in a short time aiming at pollutants difficult to degrade and the specific easy polymerization characteristic of polyurethane waste gas in the process, and therefore the degradation rate of the waste gas is improved. And the risk of secondary polymerization after entering the wet tower is blocked.

According to the low-temperature plasma activated water preparation system, the preparation method and the application, a direct-current voltage-driven air jet plasma generation device which is small and convenient and does not need a complex gas circuit is utilized in the preparation system, and air is adopted as working gas to treat an aqueous solution; an aqueous solution rich in active oxygen, active nitrogen and other active ingredients is efficiently generated, and the active ingredients have high oxidation-reduction potential and can effectively degrade PhSMe. The concentration of active particles in PAW is improved by optimizing the discharge voltage, the discharge time and the concentration of the sodium molybdate solution, so that the degradation effect of PhSMe is improved. An auxiliary agent sodium molybdate is introduced in the degradation process, and the degradation effect is two times higher than the pure PAW treatment effect.

The invention discloses a high-power cascade arc plasma generator, which belongs to the technical field of plasmas and structurally comprises a cathode structure, a cascade structure and an anode structure according to the plasma generation and injection direction. The cathode structure is composed of two cathode assemblies and a cathode seat, wherein the two cathode assemblies and the cathode seat are in a positioning type. The cascading structure is formed by stacking a plurality of cascading sheets and gaskets, and each cascading sheet is provided with a snakelike water cooling channel and an air inlet channel; the anode structure is composed of a step-shaped flange. According to the device, the air inlet channel and the snakelike cooling water channel are arranged in the cascade sheet, so that ablation of plasma to the discharge channel in the discharge process is reduced, and the discharge power reaches the MW level.

The present application relates to the field of plasma generators and discloses a plasma generator and electronic device based on a single emitter head. The plasma generator includes: a power input terminal configured to receive an external power supply; a resonant trigger circuit coupled to the power input terminal, the resonant trigger circuit including a bidirectional trigger switch and an energy storage capacitor; a transformer, the primary winding of the transformer being connected in series with the bidirectional trigger switch and the energy storage capacitor in the resonant trigger circuit to form a primary loop, the transformer being used to generate resonance under the action of charging and discharging the energy storage capacitor and outputting a resonant peak through a secondary winding; a emitter head coupled to one end of the secondary winding via a coupler, the resonant peak being used to generate positive and negative ions through the emitter head; and an isolation device coupled between the primary and secondary windings of the transformer. The present application realizes the generation of positive and negative ions using a single emitter head, has a simple circuit structure, and effectively solves the problem of difficult assembly of dual emitters in traditional solutions.

A processing apparatus includes a first chamber having a gas first inlet and a first gas outlet, a plasma generator that generates a plasma in the first chamber, and a second chamber having a second gas inlet and a second gas outlet. A control unit controls the first inlet to provide a carbon containing gas to the first chamber and control the plasma generator to apply a first plasma to a silicon-containing film of a substrate to a first depth. The control unit controls the second gas inlet to apply another gas inside the second chamber and deposit a second part of the protection film over the first part of the protection film. The control unit controls a supply of a fluorocarbon gas through the first gas inlet and control the plasma generator to generate a second plasma to etch the silicon-containing film to a second depth.

The invention provides a battery cell tab cleaning system and method. The battery cell tab cleaning method comprises the following steps: step 1, intelligent loading and self-adaptive positioning of tabs; step 2, pre-cleaning multi-modal detection and parameter initialization; step 3, multi-field collaborative precise cleaning; aiming at the problems of insufficient cleaning precision and poor surface wettability in the prior art, the multi-field collaborative cleaning step is combined with the pulse plasma generator, the deep ultraviolet LED array and the micro-fluidic jet chip, so that the cleanliness of the surface of the tab is remarkably improved, a super-hydrophilic surface is formed, and the welding performance is greatly improved. Compared with a traditional ultrasonic wave, laser or solvent cleaning method, more thorough pollutant removal is achieved through intelligent control, the strict requirement of the high-performance battery tab for surface cleaning is met, and the effect is remarkable.

The embodiment of the invention discloses a plasma operation electrode precise control method and system based on multi-dimensional signal mapping. The method comprises the steps that multi-dimensional signals in the working process of a plasma operation electrode are obtained; performing phase-space reconstruction on the multi-dimensional signal to obtain a state vector sequence representing the working state of the electrode; constructing a joint recursion plot based on the state vector sequence; joint recursion quantitative analysis is carried out on the joint recursion plot, joint recursion quantitative indexes used for representing multi-dimensional signal collaborative dynamic characteristics are extracted, and the joint recursion quantitative indexes at least comprise joint certainty, joint laminar flow, joint recursion rate and joint entropy; according to the corresponding relation between the joint recursion quantitative index and the plasma energy output stability, control parameters of a plasma generator are generated according to a preset mapping rule, and energy output of the plasma operation electrode is adjusted in real time according to the control parameters. The control precision is remarkably improved, thermal damage is reduced, and the operation safety is improved.

The invention discloses an ion slurry disinfection and purification module for air disinfection and purification equipment, and relates to the technical field of ion disinfection and purification, and the ion slurry disinfection and purification module is technically characterized by comprising two mounting seats, an ion slurry generator is mounted between the two mounting seats, and a mounting cover plate covers the upper parts of the mounting seats; the ion slurry generator comprises a metal sheet layer A, a first glass layer, a high-pressure composite sheet layer, a second glass layer and a metal sheet layer B which are arranged in sequence; the high-voltage composite sheet layer is formed by compositing a titanium alloy sheet and a PZT green sheet, the PZT green sheet and the titanium alloy sheet are obtained through hot pressing, the temperature is 850 DEG C, the pressure is 10 MPa, and the thicknesses of the titanium alloy sheet and the green sheet are both not larger than 0.1 mm. The technical effects are that the high-voltage composite sheet design is adopted, 20kHz ultrasonic waves are excited in cooperation with 12kV resonance voltage, an acoustic-electric coupling ionization field is formed, and the high-voltage composite sheet layer is formed. The concentration of the negative oxygen ions is greatly improved;

The invention discloses a polymer hollow-core optical fiber for an integrated SF6 gas sensor and a preparation method thereof, which are characterized in that a plasma generator is butted with a polymer capillary tube, and the tail end of the polymer capillary tube is connected with an air extractor, so that a plasma flow is in contact with the inner surface of the whole polymer capillary tube to generate an activation effect; and then depositing metal and a dielectric film in the capillary tube through a liquid phase deposition method to obtain the flexible and low-loss intermediate infrared polymer hollow-core optical fiber. The optical fiber is used as a gas chamber and a laser transmission channel, and an integrated SF6 gas sensor can be constructed through spiral integration. Compared with the prior art, the plasma processing method can activate the inner surface of a long and thin polymer capillary tube, improve the quality and interface bonding force of a liquid phase deposition metal / dielectric film, and further construct the polymer / metal / dielectric intermediate infrared hollow-core optical fiber through a liquid phase deposition method. The obtained polymer hollow-core optical fiber has the advantages of low loss, flexibility and high stability, and is suitable for constructing a high-sensitivity integrated SF6 gas sensor.

The invention discloses a heavy steel plasma cutting machine, and particularly relates to the technical field of plasma cutting, the heavy steel plasma cutting machine comprises a supporting table, a shell is fixedly connected to the upper end of a supporting plate, a universal mechanical arm is fixedly mounted on the inner surface of the shell, and a plasma spray gun connected with a plasma generator is fixedly mounted at the movable end of the universal mechanical arm; buffering limiting structures are arranged at the upper end of the supporting plate in a bilateral symmetry mode, and a slag cleaning structure is arranged on the inner surface of the supporting plate. According to the plasma cutting machine for the heavy steel, the L-shaped block, the mooring rope and the like drive the clamping and buffering assembly to achieve multi-directional clamping, the contact block, the compression spring and the non-Newtonian fluid act synergistically to reduce cutting offset, and precision is improved; the slag cleaning structure is matched with the supporting plate to achieve efficient slag cleaning, a sweeping piece, a Y-shaped connecting rod and a cleaning ring synchronously clean the slag, a second sliding block, a slag removal shovel and an oval block vibrate to scrape the slag, a fluted disc, a grinding piece and the like improve the cleaning efficiency, and the cutting quality is guaranteed.

The invention provides an efficient surface treatment method for plastic gaskets, which comprises the following steps: S1, pretreatment: putting a plurality of groups of plastic gaskets into a tool basket, and sequentially carrying out ultrasonic degreasing by an ultrasonic cleaning machine, deionized water spraying washing by a spraying cleaning machine and vacuum drying by a vacuum drying oven; s2, plasma activation is conducted, specifically, the gasket is placed on a rotary carrying table of rotary plasma treatment equipment along with the tool basket, a plasma treatment cavity is vacuumized to 5-15 Pa, then treatment gas is introduced, a plasma generator is started, and the rotary carrying table drives the gasket to rotate at a constant speed during treatment; s3, functional coating coating is conducted, specifically, the activated gaskets are taken out and arranged to an ultrasonic atomization and electrostatic spraying all-in-one machine, and modified coating is coated; and S4, composite curing: pre-curing the coated gasket through an infrared pre-curing oven, and then transferring the gasket into an ultraviolet pre-curing oven for ultraviolet curing to obtain a finished product. According to the method, the treatment efficiency and uniformity are improved, and the coating adhesive force and the gasket performance are enhanced.

The invention discloses an atmosphere plasma generator, which comprises a driving power supply and a spray gun, and is characterized in that the driving power supply comprises a rectifier, at least two half-bridge inverters and at least two transformers in one-to-one correspondence with the half-bridge inverters; the input end of the rectifier is connected with an AC power supply; the at least two half-bridge inverters are arranged at the output end of the rectifier in parallel; the primary side of each transformer is connected with the output end of the corresponding half-bridge inverter, the secondary sides of the multiple transformers are connected in series to form an output port, and the output port is connected with the spray gun. According to the atmospheric plasma generator, the specification requirement on a single related power device is reduced, so that higher total power output can be realized, the requirement of equipment such as the plasma generator on high voltage of several kilovolts can be met, and the controllability and adaptability of voltage output are improved. And when the power demand is increased, flexible expansion can be realized by increasing the number of the parallel modules, the whole system does not need to be redesigned, and the power expansion capability is improved.

The invention provides a PCB performance testing device and method, and particularly relates to the technical field of circuit board tests.The PCB performance testing device comprises a base, a main control displayer is installed on the front side of the top of the base, a testboard is fixedly arranged on the top face of the base, a PCB loading area is arranged in the center of the top face of the testboard, and a circuit board to be tested is loaded in the loading area; efficient cleaning pretreatment before testing is achieved through the combined treatment mechanism, plasma generated by the low-temperature plasma generator can remove an oxide layer and oil dirt on the surface of a testing point, ultrasonic vibration assists in stripping tiny impurities, impurities and chippings can be removed in time in cooperation with negative pressure adsorption of the rectangular suction nozzle, testing errors caused by surface pollution are effectively reduced, and the testing efficiency is improved. Meanwhile, by means of airflow purging and surrounding type high-frequency ultrasonic vibration, physical and mechanical friction is avoided, in the process of removing the oxide layer, the circuit board is not prone to being damaged, and the testing cost of the circuit board can be effectively reduced.

A portable airborne pathogen control apparatus and system. Aspects of the present disclosure provide for a portable airborne pathogen control apparatus configured to be selectively positioned within an interior room and configured to enable a floor-to-ceiling flow of air within the interior room. The portable airborne pathogen control apparatus may comprise a housing with an air intake disposed at a lower area of a base housing and an air outlet disposed at an upper area of an elongated duct extending from the base housing. A blower fan housed within an interior chamber of the housing may be configured to direct a floor-to-ceiling flow of air through the interior chamber from the air intake to the air outlet. A volume of air directed through the interior chamber of the housing may be disinfected using one or more UV-C emitters and / or cold plasma generator(s) housing in the interior chamber of the housing.

The utility model relates to a bottom cabin, a beauty instrument assembly and a cleaning method, and relates to the technical field of cleaning. The bottom cabin comprises a main body, a cover body and a plasma generating device, a containing cavity is formed in the main body, and the containing cavity is used for containing the electric device; the cover body is detachably mounted at one end of the main body and is provided with a functional cavity communicated with the accommodating cavity; the plasma generating device is installed in the functional cavity and carries out ionization discharge on the cleaning gas molecules to generate plasmas so as to clean the electric device through the plasmas. According to the invention, the surface of the electric device can be effectively cleaned without damaging the electric device.

According to the plasma high-efficiency water purification system and method suitable for factory-like circulating aquaculture, a water purification unit with a plasma secondary reaction technology as a core is constructed, and a low-energy-consumption cold plasma generator is used for pre-activating gas and introducing the gas into a water body in a micro-nano bubble form; further, an underwater SDBD cold plasma generator is utilized to secondarily excite the activated bubbles to obtain underwater micro-plasmas, and short-life ROS (reactive oxygen species) mainly comprising. OH is efficiently generated through a gas-liquid interface micro-discharge effect, so that pathogenic microorganisms and harmful components such as ammonia nitrogen and nitrite in aquaculture sea and fresh water are quickly and efficiently purified; an electrochemical reaction technology and an internal circulation technology are utilized to construct a plasma by-product elimination unit, the electrochemical reaction technology enables the biotoxicity of a water body to be rapidly reduced to a safe level, and the internal circulation technology avoids the problem of plasma reaction tail gas pollution.

A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe is connected to an RF transmission line for receiving and measuring voltage and current signals from the transmission line. A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental, intermodulation, triple beat, and harmonic amplitude and phase information corresponding to the original RF signals. The measurement system may also inhibit arcing by detecting when the amplitude of the intermodulation or triple beat signal exceeds a predetermined threshold, and indicating an alarm and / or reducing the power of the plasma generator when the predetermined threshold is exceeded.

The application discloses a low-NOx ammonia fuel combustion system based on plasma combustion support X The generated staged ammonia gas combustion system comprises a high-frequency high-voltage power supply, a dielectric barrier plasma generator, a gas distribution system (a blower and an ammonia storage tank), a combustion chamber and a swirler; the dielectric barrier plasma generator comprises a high-voltage electrode, an insulating medium, a swirler and a ground electrode; and the gas distribution system comprises a blower and an ammonia storage tank. The application utilizes dielectric barrier to generate ammonia gas plasma discharge, reduces the difficulty of ammonia gas combustion and improves the stability of ammonia gas combustion; utilizes the swirler to generate rotating airflow and improves the combustion efficiency; utilizes ammonia gas staged combustion to further reduce NOx emission; and the ideal staged ratio is that the volume ratio of ammonia gas plasma to side wall ammonia gas is 20% (10%-30%), so that the ammonia gas plasma can be fully discharged, and the ammonia sprayed from the side wall can also be fully combusted.

The invention discloses a power amplification module and a control method and system thereof, and belongs to the technical field of plasma generators. Wherein the PDM driving unit adopts a multi-phase PDM voltage reduction amplitude modulation technology and is used for generating two paths of symmetrical and complementary RF driving signals from an external RF driving signal through dead zone delay and logical operation; the BUCK voltage regulating unit comprises a plurality of BUCK circuits connected in parallel and is used for reducing input direct-current voltage into amplitude-modulated direct-current voltage; the RF driving unit is used for generating two paths of symmetrical and complementary RF driving signals; and the H-bridge conversion unit is used for receiving two paths of symmetrical and complementary RF driving signals generated by the RF driving unit and inverting the amplitude-modulated direct-current voltage supplied by the preceding-stage BUCK voltage regulating unit into a radio-frequency power signal to be output to a load. According to the power amplification module, the control method and the control system provided by the invention, the contradiction and unification of high-frequency response and ultra-low loss are realized through the mutual synergistic effect of the multi-phase PDM modulation and the D-type power amplifier topological structure.

This invention relates to the field of steel grinding technology, and more particularly to a rust removal and grinding device for bridge steel, comprising an outer frame and an I-beam, and further comprising: a rotating clamping mechanism, wherein two sets of the rotating clamping mechanism are symmetrically arranged; an adjusting mechanism, wherein a plasma generator is fixedly mounted on the working end of the adjusting mechanism, and the output end of the plasma generator is connected to a thin conduit, wherein a spirally arranged energized coil is sleeved on the outside of the thin conduit, and the density of the energized coil gradually increases from right to left; a support rod, wherein the support rod is fixedly mounted on the plasma generator, and a laser emitter is fixedly mounted on the front end of the support rod; and a vision sensor, wherein the working end of the vision sensor faces the side of the I-beam. This application can achieve all-round grinding of the surface of the I-beam, with better grinding effect, and can further intensify grinding of areas with thicker rust, which is beneficial for removing stubborn rust from the surface of the I-beam.

A plasma generation system for generating a multilayer plasma includes a plasma generator that includes an inner electrode, an intermediate electrode surrounding the inner electrode and defining therebetween an inner plasma channel having an inner plasma outlet, and an outer electrode surrounding the intermediate electrode and defining therebetween an outer plasma channel having an outer plasma outlet; a process gas unit configured to provide a first and a second process gas inside the inner and outer plasma channels, respectively; and a power supply unit configured to energize the first process gas into a first plasma that flows along the inner plasma channel and out through the inner plasma outlet as an inner layer of the multilayer plasma, and to energize the second process gas into a second plasma that flows along the outer plasma channel and out through the outer plasma outlet as an outer layer of the multilayer plasma.

A system for modifying one or more surfaces of a bipolar plate in a fuel cell includes a bipolar plate having a first surface and a second surface opposite the first surface, and a plasma generator configured to generate a plasma from a starting gas that contains at least one non-film-forming gas that contacts the first surface of the bipolar plate to convert at least a portion of the first surface to a hydrophilic state to attract water and / or distribute water across the first surface of the bipolar plate. Other exemplary systems, methods for modifying one or more surfaces of bipolar plates in fuel cells, and bipolar plates in fuel cells are also disclosed.

The invention discloses a plasma generator and a traditional Chinese medicine disinsection device thereof, and belongs to the technical field of plasma. The plasma generator comprises a base, a first electrode, a second electrode and a heat preservation pipe. The core of the device is that high-concentration mixed gas is ionized into plasma'kindling 'through discharge of the central electrode and the tubular electrode, and the'kindling' ignites extremely rarefied mixed gas, so that stable and low-consumption combustion is realized. The disinsection device integrates the generator, an air path system and a transmission and air injection device, and the high-temperature air flow generated by the generator is used for carrying out double-sided uniform injection on the medicinal materials subjected to transmission and turn-over treatment, so that worm eggs are effectively killed at instantaneous high temperature, and no medicine residues exist. The device has the advantages of high efficiency, safety and energy conservation.

The invention discloses a method for preparing an ultrahigh-conductivity graphene / copper composite material through nitrogen plasma ball milling, and relates to the technical field of metal-based composite material preparation. The preparation method of the composite material comprises the steps that copper powder and graphene are mixed and placed in plasma ball milling equipment, a plasma generator and a high-energy ball milling device are started for mixing treatment in the nitrogen atmosphere, and composite powder is obtained; and the composite powder is densified through a spark plasma sintering technology, and the block composite material is obtained. Through the synergistic effect of plasma stripping, nitrogen doping and mechanical compounding, high-quality stripping, controllable doping and uniform dispersion of graphene are achieved in one step, interface bonding of graphene and copper is remarkably improved, and the interface electron transmission capacity is effectively enhanced. The graphene / copper composite material prepared by the preparation method disclosed by the invention shows extremely high conductivity while keeping high density.

The present invention performs an appropriate plasma treatment on an edge part of a substrate while suppressing the effects of the plasma on a central section of the substrate.　Provided is a substrate treatment device comprising: a chamber that accommodates one or a plurality of substrates in an upright state; a liquid supply line that supplies a liquid into the chamber; a vacuum pump that is connected to an upper part of the chamber, and that forms a vacuum in a space in the chamber above a liquid surface in a state in which the liquid is present in the chamber so that a section of the substrate is exposed from the liquid surface; a plasma generator that is arranged in the upper part of the chamber, and that performs a plasma treatment on the section of the substrate exposed from the liquid surface; and a control module that controls each part of the substrate treatment device.