844 results about "Ionization" patented technology

The invention belongs to the technical field of aircraft oil leakage monitoring, and relates to an aircraft oil leakage detection method based on a high-sensitivity mass spectrometry technology, and the method comprises the steps: obtaining a time-resolved mass spectrogram of aviation kerosene molecules in a sample testing stage, and storing the time-resolved mass spectrogram in a database; then oil gas molecules are captured at leakage-prone points of an aircraft pipeline system through a gas collection probe, the captured oil gas molecules are transmitted to an ion source end of a proton transfer reaction mass spectrometer through a negative pressure transmission system to be ionized to generate ions, and the ions are analyzed by a mass analysis system to obtain a mass spectrum; comparing the mass spectrogram obtained by analysis with a time-resolved mass spectrogram in a database, and judging whether leakage occurs or not; based on the method, the problems of insufficient anti-interference capability, difficulty in sample collection and the like of a high-sensitivity mass spectrum oil gas leak detection method can be solved in a targeted manner, and the functions of environmental interference suppression, efficient collection of oil gas molecules, improvement of spatial scanning resolution and the like can be realized at the same time.

The invention provides a method for removing refractory organic matters in wastewater, which comprises the following steps: adding periodate into the wastewater, and uniformly mixing to obtain a solution to be irradiated; the addition amount of the periodate is 1-4 mM; performing ionization irradiation treatment on the solution to be irradiated; wherein the irradiation absorbed dose of the ionization irradiation treatment is 0.2 to 3.0 kGy. According to the method, the degradation rate and mineralization rate of the ionization irradiation technology on refractory organic pollutants are improved; the irradiation absorbed dose required by degradation and mineralization of refractory organic pollutants is reduced, and the reaction time is short; degradation and mineralization of refractory pollutants can be realized at normal temperature and normal pressure, and the operation is simple and convenient; the catalyst has no selectivity for degradation-resistant organic pollutants, and is suitable for a relatively wide pH range; the method has a wide application prospect in the field of environmental protection.

The invention discloses an ionization chamber internal electric field modeling and radioactive interference suppression method. The method comprises the following steps: modeling by adopting a multi-physical simulation software package to obtain a geometric model of an ionization chamber; analyzing electric field distribution in the ionization chamber through finite element analysis software, and simulating a plurality of parameters by adopting a particle physical experiment simulation program to set a drift trajectory and a drift end point of secondary electrons so as to obtain ionization chamber parameters meeting conditions; and optimizing the ionization gas chamber according to the ionization gas chamber parameters meeting the conditions, and monitoring and outputting particle drift and current induction results based on the optimized ionization gas chamber. The radiation interference caused by the detector can be shielded on the basis of the original functions of the traditional ionization gas chamber, and the background emissivity of the alpha particle measuring device is reduced, so that the detection efficiency and accuracy of low-level radioactive measurement are improved.

To study a system that transmutes atomic nuclei using muons, devise a light source device and a propulsion device including a nuclear transmutation system, and examine a centrifugal force application unit which may be accelerated by the propulsion device, and devise an electric field generator or a magnetic field generator.SOLUTION: A system is devised that decelerates cosmic muons produced from cosmic rays or high-speed muons derived from mesons produced from atomic collisions with electric field and deceleration means and uses the muons for nuclear transmutation. Also, a decelerator using a laser wake field and a decelerator using an element forming an electric field are proposed. A radiation light source having the nuclear transmutation unit is disclosed. An ionization device, a centrifugal gun device, a centrifugal force and pressure applying device, a pressure generation unit, a pressure applying material, a high-pressure induction superconductivity experimenting system, a magnetic device, and a magnetic sail are disclosed.SELECTED DRAWING: Figure 18

The embodiment of the invention provides an ionization layer electron density inversion method, device, system and equipment and a medium. The method specifically comprises the following steps: determining a target area of electron density inversion; obtaining observation data corresponding to the signal link in the target area; the signal links comprise a first signal link from a GNSS satellite to a ground station, a second signal link from the GNSS satellite to a low earth orbit satellite, and a third signal link from the low earth orbit satellite to the ground station; determining the slant total electron content corresponding to the signal link according to the observation data corresponding to the signal link; solving an ionized layer chromatography function according to the oblique total electron content corresponding to the signal link so as to obtain an electron density value of a grid in the target area; the ionized layer chromatography function is used for representing a mapping relation between the oblique total electron content and the electron density value of the grid. According to the embodiment of the invention, the inversion precision of the ionosphere electron density can be improved.

ICP-MS includes: an ion source to ionize a sample component; a vacuum chamber (4-into which generated ions are introduced; a cell inside the vacuum chamber to bring the ions into contact with a predetermined gas; a mass spectrometer unit at a later stage of the vacuum chamber to perform mass spectrometry of ions having passed through the cell or ions derived from the ions; a first gas introduction unit to introduce a predetermined gas into the cell; a second gas introduction unit to introduce a predetermined gas into the vacuum chamber and outside the cell; and controllers to control gas introduction such that a gas is introduced by the first gas introduction unit when analysis is performed while bringing a gas into contact with ions, whereas a gas is introduced by the second gas introduction unit when analysis is performed without bringing a gas into contact with ions.

The invention discloses a non-interception type detector for measuring the beam position and the cross section of proton / heavy ion radiotherapy equipment, and belongs to the technical field of nuclear medicine and electronics crossing. Secondary particles (electrons or ions) obtained after ionization reaction of high-energy protons / heavy ions and residual gas molecules are used as signals, the signals are amplified to reconstruct the original position and cross section distribution of a beam, and the detector is a completely non-interception type detector and can be used as long-term online measurement equipment. According to the invention, the structure of the detector is systematically designed and optimized aiming at the position and section measurement of an extremely weak beam in proton / heavy ion radiotherapy equipment, a test is carried out on an experimental platform, a clear signal image can be obtained, the structure is compact, the performance is good, the work is stable and reliable, and the cost is low. The method is of great significance to debugging, operation and maintenance of proton / heavy ion radiotherapy equipment.

The invention relates to a high-speed directional molecular flow generating device and application thereof. The device comprises an air supply system, an ion source, a grid electrode assembly, a neutral pore plate and a charged particle swallowing device, the gas supply system is communicated with the gas inlet end of the ion source through a pipeline and provides neutral gas for the ion source; the ion source is used for ionizing the neutral gas into plasma, and the gas outlet end of the ion source is sequentially connected with the grid electrode assembly, the neutral pore plate and the charged particle swallowing device in series; the grid electrode assembly is used for extracting ions, accelerating ions and focusing ions; the neutral pore plate is grounded and is used for enabling passing ion beams to be subjected to an Auger process and converting ions into neutral molecules; and the charged particle swallowing device is used for absorbing unconverted ions and drift electrons. According to the invention, the complexity is low, the generated high-speed oriented molecular flow has good collimation, and an important experimental basis is provided for development and ground calibration of a space vacuum measuring instrument.

The invention relates to the field of mass spectrometry, and describes a mass spectrometer based on multi-electrode coordination of a Jooden well. A multi-port ion source configured for multi-port input of electrons of ionization of gas molecules in a well and ions in an ion source outside the well, the ports being autonomously usable, comprising two external electrodes and four internal electrodes configured to excite periodic movement of ions in the well along an axis of symmetry and to detect signals caused by ions of secondary potential oscillation in the well, wherein ions are introduced into the trap from an external source with a slot, and ion movement is excited by applying an alternating voltage or the like to the electrodes. Or using a slot to introduce ions from an external source into a well in an external electrode, applying a potential to an internal electrode to create an electric field, the size of which is in a quadratic relationship with the coordinates, the electrodes having a specific equipotential surface geometry. Pulsed potentials can be applied to capture ions, multiple external ion sources can be equipped, and if the ion sources are not combined, each can be provided with a separate port. The mass spectrometer is uniquely designed in the aspects of ion input, excitation, detection, ion source configuration and the like.

The invention discloses a three-dimensional laser post-ionization-secondary neutron particle mass spectrometer which comprises a vacuum pool, a sample introduction system, a primary ion emission system, a three-dimensional laser post-ionization system, an ion optical system, a time-of-flight mass spectrometer, an observation system and a computer control system. By adjusting the wavelength, the frequency and the energy value of the laser, resonance between the energy of laser photons and the electron energy level of target molecules can be realized to realize selective ionization of substances, and the method has extremely high element, nuclide and molecule selectivity, can provide the sensitivity of an instrument, and can be used for mass spectrometry. The device can be applied to single-cell imaging analysis test of lipid, metabolites, small-molecule drugs and part of elements with the molecular weight smaller than 1000 Da, the problems of space metabolome small-molecule metabolite test and ultrahigh spatial resolution imaging are solved, and the device can be independently used as an SIMS when laser post-ionization is not used.

A machine, article, process of using, process of making, products produced thereby and necessary intermediates. Illustratively, there can be a process that includes: ionizing at least some injected gas to form ions; confining, without using magnetic fields, at least some of said ions to produce confined ions; accumulating at least some of said confined ions to produce accumulated ions; cooling at least some of said accumulated ions to produce cooled ions; compressing, without using magnetic fields, at least some of said accumulated ions to produce compressed ions; accelerating at least some of said compressed ions to produce accelerated ions; ejecting at least some of said accelerated ions; and measuring at least one property of said ejected ions.

The present disclosure relates to the field of mass spectrometry, and particularly provides a method for determining a chemical structure of a lipid and an ion mobility-tandem mass spectrometer. The method for determining a chemical structure of a lipid includes: an ionization step of ionizing a sample to obtain sample ions; an ion mobility-based separation step of separating target lipid ions from the sample ions based on ion mobility; a first dissociation step of dissociating the target lipid ions with dissociation energy adjusted to break a first chemical bond of the target lipid ions; a mass-based selection step of selecting the target lipid ions, whose first chemical bond is broken, based on a mass number to obtain fragment ions; a second dissociation step of dissociating the fragment ions to at least break a second chemical bond of the fragment ions which has bond energy higher than the first chemical bond, to obtain diagnostic ions; and a mass analysis step of performing a mass analysis on the diagnostic ions.

The invention belongs to the technical field of microwave plasmas, and particularly relates to a magnetized atmospheric pressure pulse microwave plasma jet discharger. The discharger is reasonable in design, microwave energy is fed into the discharge chamber through the SMA interface, high electric field intensity is formed at the tip of the hollow needle electrode, and fed working gas is disrupted and discharged; a magnet exciting coil outside the quartz tube generates an axial magnetic field inside the quartz tube through direct current, electrons do spiral cycloid motion in an electromagnetic field, and electron cyclotron resonance can be achieved under the field. Through magnetic field constraint, high-energy electrons are constrained in a core area, a motion path is prolonged, effective collision times are increased, gas dissociation efficiency and ionization degree are improved, and collision loss of the electrons and a wall surface is reduced; the plasma jet performance is improved; the device works in an atmospheric pressure environment, does not need a vacuum system, reduces equipment cost and maintenance difficulty, reduces electrode sputtering and cavity corrosion, and prolongs the service life of core components.

The invention discloses a method for preparing a nano-pore carbon-based two-dimensional membrane material through ionization irradiation and a product thereof, the preparation method comprises the following steps: step 1, dispersing a two-dimensional carbon-based nano material in a dispersant to prepare a dispersion liquid, and preparing the dispersion liquid into a precursor membrane for later use; and 2, carrying out ionization irradiation treatment on the precursor film prepared in the step 1, and carrying out annealing treatment on the precursor film subjected to the ionization irradiation treatment to obtain the nano-pore carbon-based two-dimensional film material. Compared with a traditional method, due to the unique physicochemical properties of the high-energy rays, physical damage and chemical effects can be synchronously generated in the process of penetrating through the membrane material, and the porous preparation process can be simplified; by regulating and controlling the raw material ratio in the precursor and the ionization irradiation condition, the size and density of gas molecules between membrane material layers can be controlled, and the aperture and empty density of the surface of the membrane material can be regulated and controlled in the subsequent annealing process; therefore, the method provided by the invention has the advantages of rapidness, high efficiency, economy, energy conservation and the like.

The invention provides a target poisoning resisting method and system based on multi-stage pulse reactive sputtering, and belongs to the technical field of magnetron sputtering. According to the method, air serves as reaction gas, a pulse direct-current power source is adopted, and reactive sputtering treatment is conducted on a metal target material; the reactive sputtering treatment comprises a first stage, a second stage and a sputtering voltage feedback control stage in sequence. The sputtering power and the duty ratio are adjusted in three stages, the first stage can stabilize luminance build-up and preliminarily clean the surface of the target material, and the second stage can improve the nitrogen ionization rate (gt; 50%) and suppresses the oxygen ionization rate (lt; and in the sputtering voltage feedback control stage, the sputtering power and the duty ratio are adjusted according to the drop amplitude of the sputtering voltage, an insulating compound layer on the surface of the target material can be efficiently sputtered and stripped, and the poisoning state of the target material is effectively inhibited, so that the method can effectively inhibit target material poisoning, the service life of the target material is prolonged, complex equipment is not needed, and the cost is relatively low.

The utility model relates to the technical field of organic matter detection, in particular to an online photoionization detector system for measuring volatile organic compounds, which comprises a gas circuit module, an ionization module, a signal amplification module, a data storage module and a power supply module. The gas path module is used for collecting and guiding gas and realizing real-time monitoring of gas flow, gas path temperature and humidity; the ionization module can efficiently ionize to-be-detected gas, an ionization chamber in the ionization module can efficiently capture gas ions and electrons, interference of environmental condition changes on signals is reduced, and generated current signals and the concentration of the to-be-detected gas are in a linear relation; the signal amplification module amplifies the generated current and converts the current into a voltage signal, and the amplification efficiency can reach 109 times; the data storage module records and stores the voltage signal to realize online data visualization; the power supply module provides working voltage for the detector system. The system is high in integration degree, strong in stability and high in sensitivity, and the detection limit is superior to 0.5 ppbv.

The invention relates to the technical field of ion characterization and preparation, in particular to a high-throughput preparation mass spectrum device and method giving consideration to high-resolution characterization. The device comprises an ion source, an ion transmission cavity, a quadrupole mass screening cavity, an ion dissociation cavity, an ion deflection cavity, an ion deceleration and deposition cavity and a high-resolution mass spectrum characterization cavity which are sequentially arranged, wherein the high-resolution mass spectrum characterization cavity is formed in one side of the ion deflection cavity in the vertical direction; soft ionization is combined with a quadrupole analyzer to screen ions, the ions are dissociated through a dissociation cavity, an ion deflection cavity is used for selecting a high-resolution characterization or high-throughput preparation function, a high-resolution mass spectrum characterization cavity is used for achieving high-resolution characterization of screened and fragmented ions, and an ion deceleration and deposition cavity is used for high-throughput preparation of the ions. According to the method, perfect compatibility of high-throughput preparation and high-resolution mass spectrum characterization is realized through ion deflection design, and the method has a wide application prospect in the fields of efficient preparation of biological macromolecules, synthetic macromolecules and the like and the like.

Nitric-oxide ionization induced flow tagging and imaging (NiiFTI) is described. In one embodiment a method for characterizing a flow of a gas containing an agent includes ionizing the agent by a source of pulsed light emitting at a frequency overlapping a resonant transition frequency of the agent. In response to ionizing of the agent, a fluorescence of the gas is generated. The method also includes capturing at least one time-delayed image of the flow of the gas, where the capturing is time-delayed with respect to a pulse of the source of pulsed light. The method includes determining at least one property of the flow of the gas by analyzing the at least one time-delayed image of the flow.

A decorative sheet and a method for producing the decorative sheet are provided, the decorative sheet having a gloss level of 15 or less and excellent design properties, and also having fingerprint resistance, high durability (in particular, scratch resistance and stain resistance), and processability. A decorative sheet (1) according to the present embodiment includes: a primary film layer (2); and a surface protective layer (5), wherein the surface protective layer (5) has a gloss level of 15 or less, the surface protective layer includes a ridged portion projecting in a ridged pattern from a surface of the surface protective layer to form an uneven shape on the surface, the surface protective layer (5) contains an ionizing radiation-curable resin as a main material, the ionizing radiation-curable resin contains, as a main component, a tetrafunctional acrylic resin having a repeating structure, the number of repetitions of the repeating structure is 12 or more, a content of vinyl groups contained in the ionizing radiation-curable resin is 20% or less relative to carbonyl groups contained in the ionizing radiation-curable resin, and the uneven shape of the surface protective layer (5) has RSm / Ra in a range of 10 or greater and 300 or less.

The low-pressure ionization chamber comprises a closed chamber, a low-pressure environment lower than the standard atmospheric pressure is formed in the closed chamber, and an electrode plate assembly is arranged in the closed chamber to collect electron-ion pairs in the closed chamber in the low-pressure environment; by arranging the negative-pressure closed chamber, the air density is reduced under the condition of low air pressure, so that the number of gas molecules in unit volume is reduced, the total number of charges generated by radiation ionization of a gas medium is reduced, and then the charge density and the ion recombination probability are reduced, so that the saturation characteristic of the ionization chamber is influenced.

The invention discloses a furnace end capable of exciting high-energy plasma through long-distance discharge and an electric flame stove. The furnace end comprises an upper shell, a lower shell, a plurality of plasma combustors, a magnetron and a furnace end fan, wherein the upper shell and the lower shell define a furnace end cavity. According to the microwave-driven gas ionization device, the breakdown working voltage between the anode needle and the cathode tube which are arranged at a long interval is reduced by microwave-driven gas ionization, and the problem of circuit instability is avoided; the magnetron stops working immediately after electrode arc striking succeeds, a special power supply and a cooling system can be omitted, and the failure rate is reduced; the two electrodes are arranged at a long interval, so that the number of times of electron collision is increased by several times, and compared with the prior art, the plasma density is improved, the efficiency is greatly improved, and the electric quantity is saved; the magnetron is directly installed between the upper shell and the lower shell of an existing metal structure of the burner, microwave leakage is effectively prevented, the magnetron does not need to be additionally provided with a shielding piece, the stability of the electric flame stove is effectively improved, and the limited space of the electric flame stove is effectively utilized.

The invention relates to an ionosphere TEC prediction method in a near space, and belongs to the technical field of ionospheres. The method comprises the following steps: acquiring ionosphere environment data at three consecutive moments; wherein the ionosphere environment data comprises ionosphere TEC data and earth magnetic field data; inputting the ionosphere environment data at the three moments into the trained ionosphere TEC prediction model to obtain ionosphere TEC data at the next moment; wherein the ionosphere TEC prediction model comprises an encoder, a condition generator and a decoder; the encoder is used for encoding the ionized layer TEC data at the current moment to obtain potential representation of the ionized layer TEC data; the condition generator is used for performing inversion coding on the ionosphere environment data at the three moments to obtain ionosphere electron density information; and the decoder is used for reconstructing the ionospheric TEC data at the next moment from the potential representation of the ionospheric TEC data at the current moment by using the ionospheric electron density information. The state of the ionosphere is predicted through inversion of the electron density information of the ionosphere.

In a mass spectrometer (10) for gas analysis, comprising: a mass spectrometer housing (12) evacuated by a vacuum pump; an ion source (16) for ionizing gas atoms or molecules entering the mass spectrometer enclosure (12) and accelerating ions in the mass spectrometer enclosure (12); an ion trap (22) made of an electrically conductive material for collecting ions generated by the ion source (16); an electrical measurement device (24) for measuring the potential or current of the ion trap (22) and connected to the ion trap (22) for inferring the ions collected by the ion trap (22) from the measured potential or current; a magnetic or electromagnetic deflection device configured to deflect or map ions having a specific mass-to-charge ratio to the ion trap (22); an electron barrier (30) made of an electrically conductive material is provided at the ion trap (22), the electron barrier having a lower potential than the ion trap (22) and being configured to generate a reverse electric field to return electrons released from the ion trap (22) onto the ion trap (22).

The invention relates to the field of trace element detection, in particular to a system for detecting the concentration of trace elements in water. The gas chamber is connected with the atomization device, is internally provided with a light path capable of dynamically adjusting the White cell, and is used for enhancing a spectral absorption signal of the low-concentration trace elements; the light path modulation module is mounted on the side wall of the gas chamber; the temperature control module is used for adjusting the temperature of the optical element and the air chamber; the spectrum detection module is arranged behind the light outlet of the gas chamber and is used for detecting a spectrum signal after the aerosol is absorbed; the ionization and mass spectrum module comprises an ionization source and a mass spectrometer, the ionization source is used for ionizing the aerosol in the gas chamber into ions, and the mass spectrometer is used for separating the ions according to the mass-to-charge ratio and detecting the ions. According to the invention, a spectrum and mass spectrum combined technology is adopted, a water sample to be detected is atomized into aerosol water drops, and high-sensitivity detection of trace elements in water is realized by enhancing a spectrum absorption signal of low-concentration trace elements.

The invention discloses a method for determining and analyzing primary and secondary elements in dolomite and magnesite based on ICP-AES (Inductively Coupled Plasma-Atomic Emission Spectrometry), and relates to the technical field of determination and analysis of the primary and secondary elements, the method comprises the following steps: obtaining determination samples of the dolomite and the magnesite, pretreating the determination samples, obtaining spectral line interference conditions of each element based on the determination samples, and determining the spectral line interference conditions of the elements based on the spectral line interference conditions; the method comprises the following steps: pre-processing measured data, drawing a calibration curve of each element, obtaining the interference condition of the calibration curve of each element, and carrying out ICP-AES measurement on the pre-processed measured data to obtain a characteristic spectral line. According to the method, the source and the influence degree of the interference spectral line are determined by analyzing the spectral line interference condition, then targeted measures are adopted for correction, and meanwhile, concentration measurement deviation caused by chemical interference, physical interference, ionization interference and other factors is found by evaluating element concentration interference factors, so that the accuracy of the concentration measurement is improved. And correction is carried out by means of optimizing a sample pretreatment method, adjusting instrument working conditions and the like, so that the reliability and the stability of the analysis method are improved.

The invention discloses a method for preparing methane by reforming small molecular alcohol through high-energy electron beam irradiation, and belongs to the technical field of environmental catalysis. According to the method, methane is prepared by reforming small molecular alcohol through high-energy electron beam irradiation. Compared with a traditional biological method, high-energy electron beam irradiation is adopted, substances are irradiated by electron rays accelerated in a high-voltage electric field, molecules of various substances are ionized and excited through interaction of high-energy electrons and the substances, and therefore chemical reactions are initiated. The method disclosed by the invention has a better irradiation methane preparation effect, and the problems of long reaction period (15-30 days), high energy consumption of a preparation process, large carbon emission and the like in the prior art are solved.

The invention discloses a vacuum system for precisely controlling the gas density of a nano-dose detector, and belongs to the field of ionizing radiation nano-dose measurement. The system comprises a vacuum pump set unit, a vacuum degree detection unit and a logic control unit. According to the requirements of the nano dose detector for the vacuum degree and the gas concentration, the working air pressure is within 1 Torr and the air pressure control precision reaches 0.01 Torr through cooperation of a pump set in a vacuum system and PLC logic control and data monitoring. The system can provide gas for generating ionizing radiation and a low-vacuum environment for the nano-dose detector, and ensures that a measurement signal of the nano-dose detector is accurate and stable. The ionization degree of the nano dose detector depends on the vacuum degree in the cavity, and the vacuum degree of the cavity depends on the concentration of gas in the sensitive volume. The method has the advantages of high precision, high accuracy, high reliability and the like. According to the invention, the vacuum environment of the nano-dose detector is constant, the sensitive gas is single, and the precise measurement of the nano-dose detector can be supported.

The invention relates to the technical field of lasers, and discloses a corona-based creeping spark discharge strong pre-ionization pulse gas laser which comprises a main frame chamber, a pre-ionization device is fixedly mounted at the top of an inner cavity of the main frame chamber, a cathode electrode is arranged at the top of the inner cavity of the main frame chamber, and a connecting copper sheet is fixedly mounted on the lateral upper portion of the inner wall of the main frame chamber. A flow guide plate is fixedly installed on the connecting copper sheet, and an anode electrode is fixedly installed at the top end of the flow guide plate. A corona-based creeping spark discharge strong pre-ionization pulse gas laser is characterized in that a pre-ionization area can be formed on a pre-ionization device and structures on the pre-ionization device, electrons in the pre-ionization area move in an accelerated manner under the action of electric field force, and in the movement process, the electrons in the pre-ionization area are separated from the pre-ionization device. And the electrons and other gas particles are subjected to inelastic collision and ionization or excitation, so that high-concentration and uniform initial electrons are generated, a micro-discharge channel is formed, and continuous seed electrons are provided for a core discharge region of the micro-discharge channel.

The invention provides a plasma enhanced chemical vapor deposition device and method, and relates to the technical field of plasma surface treatment. The first electric field and the first magnetic field can be formed in the coating area, the coating gas can be ionized into the first charged particles and the first active particles under the action of the first electric field, and the first charged particles can spirally move under the dual action of the first electric field and the first magnetic field; therefore, the energy of the first charged particles is improved, the movement path of the first charged particles is prolonged, and the collision opportunity of the first charged particles and the coating gas molecules is greatly increased, so that the first charged particles can effectively transfer the energy to the coating gas molecules and promote chemical bond breakage of the coating gas molecules; in this way, more first charged particles and first active particles can be generated, when the number of the first active particles is increased, the chemical reaction speed of the first active particles on the surface of the substrate is correspondingly increased, and finally the coating efficiency of the substrate is remarkably improved.