4639results about "Plasma technique" patented technology

The invention discloses a coil connecting device for a star imitator magnet and the star imitator magnet, the coil connecting device comprises a shell, a first connecting part and a second connecting part, and a movable space is formed between the outer peripheral surface of each connecting part and the inner wall surface of an accommodating space and between the outer peripheral surface of each connecting part and a connecting hole. The first part of the first connecting part and the second connecting part can relatively rotate around the axial direction of the shell, so that the first connecting part and the second connecting part have a certain degree of freedom of movement in the radial direction of the shell and can adapt to irregular changes of adjacent surfaces of adjacent coils in the radial direction; and the risks of plastic deformation, fatigue cracks and fracture of the connecting part can be reduced.

The invention discloses a dissociation rate testing device of a remote plasma source in the field of remote plasma sources. The dissociation rate testing device is characterized in that the remote plasma source is used for dissociating process gas, and a gas outlet is communicated with an etching testing table through a water cooling pipeline; the gas ionization detection device comprises a maintenance gas input control module, an output detection unit and an output calculation unit, the maintenance gas input control module is used for controlling the amount of input maintenance gas, the output detection unit is used for detecting the amount of residual maintenance gas, and the output calculation unit is used for calculating the dissociation rate; the Fourier infrared spectrometer is used for collecting infrared spectrum data of the residual maintenance gas; the RPS control test bench is used for detecting and controlling the air inlet flow, the pressure in the cavity and the cooling water flow of the remote plasma source; the tail gas treatment equipment is used for treating the residual maintenance gas. According to the testing device, full-process monitoring and closed-loop control of the plasma source operation state are realized, and the dissociation rate detection precision and the process stability are improved.

The invention provides a method and a system for measuring plasma current in a quasi-ring symmetrical star simulator, and relates to the technical field of star simulators, and the method comprises the steps: determining a sensor design index according to a bootstrap current simulation calculation result, and converting the design index into an actual arrangement scheme according to an installation environment constraint; all the magnet coils are independently excited in a plasma-free state, wall eddy current interference signals generated by the magnet coils are calibrated, and thus wall eddy current calibration voltage signals are output; a sensor in an actual arrangement scheme is used for synchronously collecting a total original induced voltage signal including plasma current and wall eddy current; an integral voltage signal representing the total current is output; and compensating the integral voltage signal by using the wall eddy current calibration voltage signal, and inverting the final measurement value of the plasma current in the quasi-ring symmetric star simulator. The device and the method have the beneficial effects that the interference of a stray field on a measurement result is weakened, and a high-precision diagnostic tool is provided for the plasma physical research of the star simulator.

The invention discloses a radio frequency voltage sensor and a plasma source system. The radio frequency voltage sensor comprises a signal acquisition module and a signal processing circuit. The signal processing circuit comprises a rectangular wave pulse detection module, a signal conversion module, a peak holding module and an operation output module; the input end of the rectangular wave pulse detection module receives a pulse synchronization signal; the signal conversion module is connected with the output end of the signal acquisition module; the first input end of the peak holding module is connected with the output end of the signal conversion module, and the second input end of the peak holding module is connected with the output end of the rectangular wave pulse detection module; and the operation output module is connected with the output end of the peak holding module. According to the radio frequency voltage sensor and the plasma source system provided by the invention, the peak voltage corresponding to the single-stage pulse can be accurately detected, the peak voltage corresponding to the multi-stage pulse can also be stably detected, the output is prevented from jumping to zero during the pulse closing period, and the stability and practicability of measurement are improved.

Provided is a processing method with which it is possible to efficiently process an organic fluorine compound contained in a processing target liquid.　This processing method for processing an organic fluorine compound contained in a processing target liquid comprises: a step (a) for supplying electrons in and through the processing target liquid between a first electrode and a second electrode disposed apart from the first electrode; and a step (b) for, while said step (a) is being executed, irradiating the processing target liquid with ultraviolet rays exhibiting light emission intensity at least in a wavelength range of 200 nm or less.

Development of technologies for effectively suppressing edge localized modes (ELM), maintaining core plasma stability, controlling plasma rotation, adjusting edge transport barriers, achieving smooth transitions between different plasma regimes, minimizing error magnetic fields, sustaining plasma for long periods, stabilizing fusion power, controlling plasma impurities, and optimizing plasma-wall interactions simultaneously in tokamak fusion reactors. [Solution] We provide an adaptive edge-localized 3D magnetic field control system that organically links a real-time plasma state monitoring system, a 3D magnetic field response prediction model, a flexible 3D coil system, an adaptive control algorithm, a plasma regime transition management system, an integrated control interface, a high-precision magnetic diagnostic system, a fusion power control system, a plasma impurity control system, and a plasma-wall interaction optimization system.

A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.

The invention relates to the technical field of light sources, particularly discloses a method and a device for adjusting the central position of a plasma, and aims to realize accurate positioning and stable control of the plasma by accurately controlling output parameters of a magnetic field generator. According to the method, a magnetic field generator with a specific shape and distribution is utilized, a magnetic field with a closed magnetic line structure is generated in a plasma chamber, charged particles in plasma are guided to move along a preset path, and it can be ensured that the plasma reaches and is kept at an expected position by monitoring and adjusting magnetic field parameters in real time.

A thermal plasma can be generated using a pair of electrodes spaced apart from each other by a gap along a first direction. One or more reactants can be conveyed into and / or through at least a portion of the generated plasma. For example, the portion of the generated plasma can subject the reactant(s) to a temperature of at least 1000 K. As a result, the one or more reactants can undergo a thermochemical reaction that converts the one or more reactants into one or more products.

The invention relates to the technical field of power electronics, and discloses a dielectric barrier discharge high-voltage series resonance system and a control method thereof. The system comprises a high-voltage series resonance circuit, an upper computer and a hardware circuit. The upper computer is electrically connected with the hardware circuit, and the hardware circuit is electrically connected with the high-voltage series resonance circuit; wherein the high-voltage series resonance circuit comprises a PFC circuit, a Buck circuit, an LC series resonance circuit, a high-voltage pulse transformer and a dielectric barrier discharge load which are connected in sequence, the high-voltage series resonance circuit converts alternating current into high-frequency high-voltage pulse voltage and provides the high-frequency high-voltage pulse voltage for the dielectric barrier discharge load, and stable dielectric barrier discharge is generated; the upper computer is used for setting parameters, the hardware circuit controls the on-off state of the Buck circuit and the LC series resonance circuit according to the parameters set by the upper computer, accurate generation and control of high-voltage pulse voltage in the dielectric barrier discharge process are achieved, and the response speed and the control precision of the system are also improved.

The invention features a replaceable cartridge for a plasma arc torch. The cartridge includes a cartridge body having a first section and a second section. The first and second sections are joined at an interface to form a substantially hollow chamber. The interface provides a coupling force that secures the first and second sections together. The cartridge also includes an arc constricting member located in the second section; an electrode included within the substantially hollow chamber; and a contact start spring element affixed to the electrode. The spring element imparts a separating force that biases the electrode toward at least one of the first section or the second section of the body. The separating force has a magnitude that is less than a magnitude of the coupling force.

The invention discloses a multi-mode magnetic field intelligent closed-loop plasma confinement system and method. The system comprises a multi-mode magnetic field generation module, a multi-dimensional plasma diagnosis module and a layered intelligent closed-loop control module. The multi-mode magnetic field generation module generates a steady-state, pulse and alternating composite magnetic field to realize adjustable space gradient; the multi-dimensional diagnosis module synchronously acquires electrical, optical and particle parameters, and ensures the accuracy through data fusion; and the hierarchical intelligent closed-loop control module generates an adjusting instruction to realize closed-loop optimization based on dynamic threshold and multi-algorithm scheduling. According to the method, the constraint performance is improved through the steps of initialization, data acquisition, state evaluation and closed-loop adjustment in combination with parameter self-optimization and three-level fault protection. According to the scheme, the plasma constraint time exceeds 300 s, the escape rate is lower than 5%, the adjustment response is smaller than or equal to 10 ms, the method adapts to multiple working conditions and can be popularized to the fields of nuclear fusion experiments and plasma processing, and the problems that a traditional system is poor in stability and lags in response are solved.

The invention discloses a parallel discharge circuit and an electric flame stove. The parallel discharge circuit comprises a transformer and at least two groups of discharge branches, and the two groups of discharge branches comprise a first discharge branch and a second discharge branch. The scheme that a single transformer replaces multiple transformers is adopted, multi-time conversion loss of electric energy-magnetic energy-electric energy is reduced, electromagnetic interference is reduced, meanwhile, a stove body does not need to be provided with a large number of transformers, the size is more compact, and the parallel connection requirement of hundreds of discharging devices of the high-power electric flame stove is met; according to the invention, continuous control of asynchronous breakdown and independent charging and discharging of multiple discharging branches is realized, the method is adaptive to the breakdown threshold value difference of discharging devices among the discharging branches and the charging speed deviation of voltage-multiplying capacitors, extra voltage-sharing control is not needed, and it is ensured that all the discharging branches can stably complete charging and discharging closed loop, discharging failure is avoided, and mutual interference is avoided; the wide-voltage input circuit is suitable for various voltage inputs, and wide-voltage input is achieved.

Disclosed in the present invention are a scanning box device and an electron accelerator, the electron accelerator comprising an accelerating tube and a deflection coil; the scanning box device comprising a scanning chamber and a scanning box, wherein the scanning chamber is sealingly connected to the scanning box; the scanning chamber is arranged above the scanning box; the accelerating tube is arranged above the scanning chamber; the deflection coil is arranged on the outer side of the scanning chamber; and the scanning chamber is made of a non-metallic material. The present invention can prevent the generation of eddy currents in the scanning box, thus reducing the problems of energy loss and heat generation, improving the performance and stability of the apparatus.

The invention discloses a radio frequency plasma generating device with a radial confinement magnetic field, and belongs to the technical field of plasma generating devices. Comprising a plasma generation area and a diffusion area which are vertically distributed and communicated, a quartz glass cover is arranged outside the plasma generation area, a water-cooling shielding device is arranged in the quartz glass cover, a magnet exciting coil is arranged outside the quartz glass cover, a quartz shell is arranged outside the diffusion area, and an outer annular magnet is fixedly arranged on the periphery of the quartz shell in a sleeving mode. An inner annular magnet matched with the outer annular magnet is fixed to the inner bottom of the quartz tube, and the bottom end of the quartz glass cover is fixedly connected with the top end of the quartz shell. The beneficial effects of the invention are that magnetic field configuration is optimized, and an induced potential field generated by electron cyclotron motion and an external constraint magnetic field are mutually counteracted; lateral diffusion of electron beams is effectively inhibited, spatial non-uniformity of plasma density is remarkably reduced, and the electron beams can be highly and uniformly diverged and distributed in a whole plasma area.

A control method of a plasma processing apparatus including a first electrode that places a workpiece thereon includes supplying a bias power to the first electrode, and supplying a source power having a frequency higher than that of the bias power into a plasma processing space. The source power has a first state and a second state. The control method further includes a first control process of alternately applying the first state and the second state of the source power in synchronization with a signal synchronized with a cycle of a radio frequency of the bias power, or a phase within one cycle of a reference electrical state that represents any one of a voltage, current, and electromagnetic field measured in a power feeding system of the bias power.

The invention discloses a composite plasma synthetic jet exciter for aircraft attitude regulation and control. The composite plasma synthetic jet exciter comprises an exciter body, a discharge cavity, a cathode needle electrode, an anode needle electrode, an insulating dielectric layer, an exposed electrode, a buried electrode and a jet hole. During working, an electric arc is formed between the needle electrodes on the two sides of the discharge cavity, and gas in the discharge cavity is instantly heated and flows to the jet hole; meanwhile, gas discharges on the surface of a plate-shaped electrode at the top of the exciter, generated ions are induced by an electric field to conduct secondary acceleration on gas flow, and high-speed jet flow is sprayed outwards from a jet flow outlet. The structure and characteristics of a traditional plasma synthetic jet exciter are not damaged, the composite plasma synthetic jet exciter is formed, the performance of the traditional exciter is effectively improved, and the generated torque can effectively meet the requirement for attitude regulation and control of an aircraft.

The application discloses a six-pole ring plasma generating device for sterilization and disinfection, which is composed of a plasma generating area, a plasma activated water storage area and a plasma special power supply; the plasma generating area is composed of a fan, a single-pole high-voltage electrode column, a quartz tube, a six-pole grounding electrode column and a ring electrode fixing plate; the upper side wall of the plasma generating area is provided with a circular air hole in the center; the plasma activated water storage area is located below the plasma generating area and communicates with the plasma generating area; the left side wall of the plasma activated water storage area is provided with a circular water injection hole in the center, and the front side communicates with a water faucet. Gas enters the plasma generating area through the circular air hole and generates plasma under the action of high voltage. The gas carrying the plasma enters the plasma activated water storage area, so that ordinary water is changed into plasma activated water, and the plasma activated water can be taken through the water faucet.

The utility model discloses a wide-width atmosphere gun plasma device, which belongs to the technical field of plasma, and comprises a protective shell, a plasma gas outlet, a gas inlet, a gas outlet, a gas inlet, a gas outlet, a gas outlet, a gas outlet, a gas inlet and a gas outlet, and is characterized in that the protective shell is provided with an accommodating cavity extending along the length direction and a plasma gas outlet communicated with the accommodating cavity; the ceramic insulation tube is arranged in the containing cavity, an airflow channel is formed between the ceramic insulation tube and the containing cavity, the ceramic insulation tube is provided with a containing cavity, and the two ends of the containing cavity are communicated with the airflow channel; the electrode is arranged in the accommodating cavity and is used for generating plasma gas; the gas inlet connecting block is connected with the protective shell and comprises a first gas inlet and a first gas outlet which are communicated with each other, the first gas inlet is used for feeding process gas, and the first gas outlet is communicated with the gas flow channel. Compared with the prior art, the wide atmosphere gun plasma equipment is high in stability, and can cool the equipment and plasma gas.

The invention provides a method for plasma bombardment energy distribution detection and life prediction of a silicon carbide part, and belongs to the technical field of semiconductor processing based on deep learning. The method comprises the following steps: firstly, arranging a magnetic probe array to obtain local electromagnetic parameters, and obtaining plasma luminescence characteristics by using optical imaging and spectrum acquisition equipment; preprocessing the acquired data to obtain multi-source fusion features; designing an energy distribution reconstruction framework based on a generative adversarial network, wherein a generator is used for deducing a three-dimensional energy distribution field of plasma; and inputting the three-dimensional energy distribution field time sequence characteristics into a bombardment dynamic characteristic modeling time sequence depth network, establishing a nonlinear mapping relation between energy distribution and material aging, further obtaining life prediction parameters, and finally obtaining the remaining service life of the silicon carbide part. According to the method, a complex degradation mechanism can be reflected more accurately, and the precision and robustness of life prediction are remarkably improved.

A control method of a plasma processing apparatus including a first electrode that places a workpiece thereon includes supplying a bias power to the first electrode, and supplying a source power having a frequency higher than that of the bias power into a plasma processing space. The source power has a first state and a second state. The control method further includes a first control process of alternately applying the first state and the second state of the source power in synchronization with a signal synchronized with a cycle of a radio frequency of the bias power, or a phase within one cycle of a reference electrical state that represents any one of a voltage, current, and electromagnetic field measured in a power feeding system of the bias power.

The invention relates to a beam feedback system based on radio frequency direct acquisition, which comprises a beam position detector, a sum and difference device, a front-end processing module, a feedback processor and an amplification excitation module which are connected in sequence, the sum-difference device is used for determining a horizontal position signal, a vertical position signal and a longitudinal position signal of the beam bunch according to the position signal of the beam bunch, the front-end processing module is used for pre-processing the position signals of the beam bunch, and the feedback processor is used for sampling the pre-processed position signals of the beam bunch; the feedback module is used for receiving a beam bunch and generating a horizontal feedback signal, a vertical feedback signal and a longitudinal feedback signal of the beam bunch, and the amplification excitation module is used for amplifying the feedback signals of the beam bunch and acting the amplified feedback signals of the beam bunch on the beam bunch, so that the instability of the beam is inhibited.

The invention relates to the technical field of electronic circuits, in particular to a polar field magnet coil power supply system and a power supply method. The polar field magnet coil power supply system comprises a super capacitor, a control module and a driving module. The control module is coupled with the driving module and the polar field magnet coil, and the control module is configured to obtain feedback current of the polar field magnet coil, generate a first pulse width modulation signal group and generate a second pulse width modulation signal group. And the driving module is configured to respond to the first pulse width modulation signal group and generate the second pulse width modulation signal group, transmit energy stored by the super capacitor to the polar field magnet coil in the current rising sub-stage and the current maintaining sub-stage, and feed back the energy of the polar field magnet coil to the super capacitor in the current feedback sub-stage. According to the polar field magnet coil power supply system, the energy utilization rate can be greatly improved, the problem that energy cannot be recycled in the prior art is solved, and the problem that the failure rate is high is solved.

The invention belongs to the technical field of electric heating, and particularly relates to a waste heat utilization ejector coupled with a plasma generator, the waste heat utilization ejector comprises the plasma generator, a nozzle and a Laval pipe structure, the rear end of the nozzle is provided with a working fluid inlet, and the Laval pipe structure sequentially comprises a receiving chamber, a mixing chamber, a throat pipe structure and a diffuser from back to front. A front end opening of the diffuser is a mixed fluid outlet, the nozzle is located in the receiving chamber, an anode structure of the plasma generator penetrates through the rear end of the receiving chamber and is communicated with an inner cavity of the nozzle through a working fluid inlet, a driving fluid inlet is formed in the side face of the receiving chamber, and a front end opening of the nozzle faces the throat pipe structure. The diffuser is conical, and the size of the mixed fluid outlet is larger than that of the rear end inlet of the diffuser. According to the invention, the waste heat utilization efficiency can be improved while the heating area of the plasma is obviously increased.

The invention belongs to the technical field of microwave plasmas, and particularly relates to a magnetized atmospheric pressure pulse microwave plasma jet discharger. The discharger is reasonable in design, microwave energy is fed into the discharge chamber through the SMA interface, high electric field intensity is formed at the tip of the hollow needle electrode, and fed working gas is disrupted and discharged; a magnet exciting coil outside the quartz tube generates an axial magnetic field inside the quartz tube through direct current, electrons do spiral cycloid motion in an electromagnetic field, and electron cyclotron resonance can be achieved under the field. Through magnetic field constraint, high-energy electrons are constrained in a core area, a motion path is prolonged, effective collision times are increased, gas dissociation efficiency and ionization degree are improved, and collision loss of the electrons and a wall surface is reduced; the plasma jet performance is improved; the device works in an atmospheric pressure environment, does not need a vacuum system, reduces equipment cost and maintenance difficulty, reduces electrode sputtering and cavity corrosion, and prolongs the service life of core components.

Inventive techniques for forming unique compositions of matter are disclosed, as well as various advantageous physical characteristics, and associated properties of the resultant materials. In particular, particles comprising polymer matrices are characterized by having carbon disposed within the polymer matrix structure thereof. The carbon is primarily, or entirely, present at interstitial sites of the polymer matrix, and may be present in amounts ranging from about 15 wt % to about 90 wt %. The carbon, moreover, forms covalent bonds with both atoms of the polymer matrix and other carbon atoms present in, but not part of, the matrix. This facilitates substantially homogeneous dispersal of the carbon throughout the resultant material, conveying unique and advantageous properties such as strength-to-weight ratio, density, mechanical toughness, sheer strength, flex strength, hardness, anti-corrosiveness, electrical and / or thermal conductivity, etc. as described herein. In some approaches, the resultant materials may be powderized or pelletized.

The invention discloses a multi-source driving radio frequency ion source for improving plasma distribution uniformity, and belongs to the technical field of plasma generation devices. Comprising an ion diffusion cavity and a plurality of ion sources communicated with the ion diffusion cavity, cylindrical coils are wound around the peripheries of the ion sources, and planar coils are arranged between the adjacent ion sources and located on the outer top wall of the diffusion cavity. The device has the beneficial effects that the design of the auxiliary planar coil is added, active modulation of plasma uniformity is carried out by adjusting the driving current passing through the planar coil, and the distribution uniformity of plasmas in the diffusion cavity is optimized.

Provided is a superconducting cryo module that can be made more compact. A superconducting cryo module according to the present disclosure comprises: a superconducting accelerating cavity that has a cell part accelerating electrons, a beam pipe part extending from the cell part to an electron incidence side, and an extraction part of the electrons which were accelerated by the cell part; and an electron gun that is located in the interior of the beam pipe part of the superconducting accelerating cavity, is located on the same axis as a beam axis BA of the superconducting accelerating cavity, and emits electrons into the cell part.

The invention relates to the technical field of plasma ignition, in particular to a split type plasma ignition device and ignition system for passivating gunpowder, which comprises an ignition tube assembly and an oscillation control assembly, the ignition tube assembly comprises an ignition tube, gunpowder and a hollow resonance coil; the oscillation control assembly comprises a coil support, an excitation coil and an oscillator circuit module. The excitation coil on the coil support is used for being matched with an insulation tube in an ignition tube in an inserted mode. An ignition pulse excites an oscillator circuit module to generate a high-frequency excitation signal, the high-frequency excitation signal is released by an excitation coil and coupled to a hollow resonance coil in an electromagnetic induction mode to form LC resonance, the LC resonance enables a discharge part to generate a high-intensity electric field, the high-intensity electric field excites plasmas on the surface of gunpowder to ignite the gunpowder, and ignition is completed. The device breaks through multiple limitations of a traditional ignition mode, and intrinsic safety and high reliability of passivation agent ignition are achieved.

The invention provides a directional ultra-short strong field electromagnetic pulse generation device, a plasma channel is formed through laser targeting gas and ultra-short strong field electromagnetic pulses are generated, the device comprises a high-power laser, a laser focusing module, a gas target module and a vacuum cavity, the high-power laser is used for generating femtosecond laser pulses and emitting the femtosecond laser pulses into the vacuum cavity; the laser focusing module is arranged in the vacuum cavity and is used for focusing femtosecond laser pulses generated by the high-power laser onto the gas target; the gas target module is arranged in the vacuum cavity and used for generating a high-density gas target and spraying the high-density gas target upwards, and a gas spraying opening of a gas target nozzle is located below the laser focus and can be adjusted in an electric control mode. According to the invention, escape electrons with charge quantity larger than that of a solid target and a low-density gas target can be generated, and laser forms arc discharge similar to thunder and lightning cloud in near-critical density plasma to generate EMP, so that electromagnetic radiation which is stronger than that of the solid target and far better than that of a common gas target can be generated.