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69768 results about "Hydrogen" patented technology

Hydrogen is the chemical element with the symbol H and atomic number 1. With a standard atomic weight of 1.008, hydrogen is the lightest element in the periodic table. Hydrogen is the most abundant chemical substance in the Universe, constituting roughly 75% of all baryonic mass. Non-remnant stars are mainly composed of hydrogen in the plasma state. The most common isotope of hydrogen, termed protium (name rarely used, symbol ¹H), has one proton and no neutrons.

Liquid precursors for the CVD deposition of amorphous carbon films

Methods are provided for depositing amorphous carbon materials. In one aspect, the invention provides a method for processing a substrate including positioning the substrate in a processing chamber, introducing a processing gas into the processing chamber, wherein the processing gas comprises a carrier gas, hydrogen, and one or more precursor compounds, generating a plasma of the processing gas by applying power from a dual-frequency RF source, and depositing an amorphous carbon layer on the substrate.
Owner:APPLIED MATERIALS INC

Apparatuses and methods for atomic layer deposition of hafnium-containing high-k dielectric materials

Embodiments of the invention provide methods for depositing dielectric materials on substrates during vapor deposition processes, such as atomic layer deposition (ALD). In one example, a method includes sequentially exposing a substrate to a hafnium precursor and an oxidizing gas to deposit a hafnium oxide material thereon. In another example, a hafnium silicate material is deposited by sequentially exposing a substrate to the oxidizing gas and a process gas containing a hafnium precursor and a silicon precursor. The oxidizing gas usually contains water vapor formed by flowing a hydrogen source gas and an oxygen source gas through a water vapor generator. In another example, a method includes sequentially exposing a substrate to the oxidizing gas and at least one precursor to deposit hafnium oxide, zirconium oxide, lanthanum oxide, tantalum oxide, titanium oxide, aluminum oxide, silicon oxide, aluminates thereof, silicates thereof, derivatives thereof or combinations thereof.
Owner:APPLIED MATERIALS INC

Precursors for depositing silicon containing films and processes thereof

Processes for precursors for silicon dielectric depositions of silicon nitride, silicon oxide and silicon oxynitride on a substrate using a hydrazinosilane of the formula:[R12N—NH]nSi(R2)4−nwhere each R1 is independently selected from alkyl groups of C1 to C6; each R2 is independently selected from the group consisting of hydrogen, alkyl, vinyl, allyl, and phenyl; and n=1–4. Some of the hydrazinosilanes are novel precursors.
Owner:VERSUM MATERIALS US LLC

Red phosphorescent compounds and organic electroluminescent devices using the same

Disclosed herein are red phosphorescent compounds of the following Formulas 1 to 4:
wherein
 is
    •  R1, R2 and R3 are independently a C1-C4 alkyl group, R4, R5, R6 and R7 are independently selected from hydrogen, C1-C4 alkyl groups and C1-C4 alkoxy groups, and
 is selected from 2,4-pentanedione, 2,2,6,6,-tetramethylheptane-3,5-dione, 1,3-propanedione, 1,3-butanedione, 3,5-heptanedione, 1,1,1-trifluoro-2,4-pentanedione, 1,1,1,5,5,5-hexafluoro-2,4-pentanedione, and 2,2-dimethyl-3,5-hexanedione;
wherein
 is
  •  R1 and R2 are independently selected from C1-C4 alkyl groups and C1-C4 alkoxy groups, R3, R4, R5 and R6 are independently selected from hydrogen, C1-C4 alkyl groups and C1-C4 alkoxy groups, and
  •  is selected from 2,4-pentanedione, 2,2,6,6,-tetramethylheptane-3,5-dione, 1,3-propanedione, 1,3-butanedione, 3,5-heptanedione, 1,1,1-trifluoro-2,4-pentanedione, 1,1,1,5,5,5-hexafluoro-2,4-pentanedione and 2,2-dimethyl-3,5-hexanedione;
    wherein
     is
  •  R1 and R2 are independently selected from C1-C4 alkyl groups and C1-C4 alkoxy groups, R3, R4, R5 and R6 are independently selected from hydrogen, C1-C4 alkyl groups and C1-C4 alkoxy groups, and
  •  is selected from 2,4-pentanedione, 2,2,6,6,-tetramethylheptane-3,5-dione, 1,3-propanedione, 1,3-butanedione, 3,5-heptanedione, 1,1,1-trifluoro-2,4-pentanedione, 1,1,1,5,5,5-hexafluoro-2,4-pentanedione and 2,2-dimethyl-3,5-hexanedione; and
    wherein
     is
  •  R1 and R2 are independently selected from C1-C4 alkyl groups and C1-C4 alkoxy groups, R3, R4, R5 and R6 are independently selected from hydrogen, C1-C4 alkyl groups and C1-C4 alkoxy groups, and  is selected from 2,4-pentanedione, 2,2,6,6,-tetramethylheptane-3,5-dione, 1,3-propanedione, 1,3-butanedione, 3,5-heptanedione, 1,1,1-trifluoro-2,4-pentanedione, 1,1,1,5,5,5-hexafluoro-2,4-pentanedione and 2,2-dimethyl-3,5-hexanedione. Further disclosed herein is an organic electroluminescent (EL) device comprising an anode, a hole injecting layer, a hole transport layer, a light-emitting layer, an electron transport layer, an electron injecting layer, and a cathode laminated in this order wherein one of the red phosphorescent compounds is used as a dopant of the light-emitting layer.
  • Owner:LG DISPLAY CO LTD
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