The invention discloses a droplet
radio frequency micro-electromechanical
system switch based on piezoelectric
ceramic film drive, which mainly solves the problems of large driving
voltage and weak resistance to external acceleration
signal interference of existing
radio frequency micro-electromechanical
system switches. The switch comprises three
layers of substrates, namely, lower, middle and upper
layers. The upper substrate (3) is provided with two
metal pads (9, 10), and the upper and lower surfaces are provided with piezoelectric
ceramic films (6) and back cavities (7) respectively; the lower substrate (1) is provided with a
coplanar waveguide (4) composed of two ground electrodes (41, 43) and two
signal electrodes (42, 44); the middle substrate (2) is provided with a through groove (8), which is located above the
signal electrode, and part of the two ground electrodes is exposed in the through groove; the through groove is aligned with the center of the back cavity, and is connected from top to bottom, and contains a mercury droplet (5); the three
layers of substrates are packaged as one. The invention has low driving
voltage, strong resistance to external acceleration
signal interference, small size, low cost, and can be used in micro-electromechanical systems.