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223 results about "Reference structure" patented technology

A structured reference is a special syntax for referencing Excel Tables. Structured references work like regular cell references in formulas, but they are easier to read and understand.

Method and Apparatus for Measuring a Structure on a Substrate, Computer Program Products for Implementing Such Methods and Apparatus

Diffraction models and scatterometry are used to reconstruct a model of a microscopic structure on a substrate. A plurality of candidate structures are defined, each represented by a plurality of parameters (p1, p2, etc.)). A plurality of model diffraction signals are calculated by simulating illumination of each of the candidate structures. The structure is reconstructed by fitting one or more of the model diffraction signals to a signal detected from the structure. In the generation of the candidate structures, a model recipe is used in which parameters are designated as either fixed or variable. Among the variable parameters, certain parameters are constrained to vary together in accordance with certain constraints, such as linear constraints. An optimized set of constraints, and therefore an optimized model recipe, is determined by reference to a user input designating one or more parameters of interest for a measurement, and by simulating the reconstruction process reconstruction. The optimized model recipe can be determined automatically by a parameter advisor process that simulates reconstruction of a set of reference structures, using a plurality of candidate model recipes. In the generation of the reference structures, restrictions can be applied to exclude unrealistic parameter combinations.
Owner:ASML NETHERLANDS BV

No-reference structural sharpness image quality evaluation method

The invention discloses a no-reference structural sharpness image quality evaluation method, which comprises the following steps of: acquiring an original image input in a computer; preprocessing the original image, removing influence of isolated noise points on the sharpness of the original image and acquiring an original image to be evaluated; constructing a reference image for the original image to be evaluated through a low pass filter; respectively performing gradient calculation on the original image to be evaluated and the reference image, and extracting sub-image vectors with rich texture information; calculating the structural similarity between corresponding sub-image vectors so as to obtain structural similarity results of the sub-image vectors; and calculating no-reference structural sharpness by using the obtained structural similarity results of the sub-image vectors so as to obtain quality evaluation index no-reference structural sharpness of the original image. The reference image is constructed through an imaging model, no-reference image quality evaluation is performed by a reference image quality evaluation method aiming at image blurring, and the method is applied to the fields of imaging quality detection and control of an imaging system, evaluation of an image processing algorithm, and the like.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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