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628results about "Acceleration measurement in multiple dimensions" patented technology

Vehicle falling detection method and device

The invention discloses a vehicle falling detection method and device, the method is applied to a vehicle-mounted device, and the method comprises the steps that first information is obtained, the first information comprises accelerated speeds of a vehicle in a first direction, a second direction and a third direction, and / or angular speeds of the vehicle in the first direction, the second direction and the third direction, the first direction, the second direction and the third direction are three coordinate axis directions of a three-dimensional coordinate system respectively; and then, according to the first information, determining whether the vehicle falls off or not. According to the method, in consideration of possible vehicle direction change, rolling and other situations when a vehicle falls off, falling detection is carried out on the vehicle according to acceleration of the vehicle in a first direction, a second direction and a third direction and / or angular velocity of the vehicle in the first direction, the second direction and the third direction, and the vehicle falling detection accuracy is improved. Therefore, whether the vehicle falls off or not can be determined, and the accuracy of vehicle falling detection can be ensured.
Owner:YINWANG INTELLIGENT TECHNOLOGIES CO LTD

Emergency cut-off valve bolt looseness detection method and system based on multi-modal fusion

The invention relates to the technical field of equipment state monitoring, in particular to an emergency cut-off valve bolt looseness detection method and system based on multi-modal fusion. The method specifically comprises the following steps of multi-source data synchronous acquisition, accelerometer installation and data processing, environmental adaptability preprocessing, bolt area optical flow feature extraction, Kalman filtering multi-source fusion, bolt looseness detection and loose bolt positioning. According to the emergency cut-off valve bolt looseness detection method based on multi-modal fusion, online, automatic and real-time accurate monitoring and early warning are achieved, the reliability and the anti-jamming capability of the system are remarkably improved, a high-precision and quantifiable objective diagnosis result is provided, good economical efficiency and large-scale deployment feasibility are achieved, and the method is suitable for popularization and application. The industrial pain point that a traditional contact type sensor scheme is difficult to apply to an industrial site with a large number of bolts in a large scale due to too high cost and technical complexity is effectively solved.
Owner:ZHEJIANG PROVINCIAL SPECIAL EQUIP INSPECTION & RES INST

Method for predicting wear state and precision degradation of ball screw transmission system

The invention discloses a wear state and precision degradation prediction method for a ball screw drive system, and the method comprises the steps: employing a dual-label obtaining strategy, and constructing a'strong label + weak label 'mixed label sequence covering a whole life cycle; mapping a macroscopic working condition into a contact interface micromechanical state quantity, and converting a time domain signal into a travel domain / space domain stable sequence by adopting equal travel synchronous resampling, so as to weaken the influence of speed fluctuation on feature extraction; a double-flow physical guidance neural network is further constructed, and a physical attention mechanism is introduced to realize data feature and physical prior fusion; training is completed based on supervision loss and physical consistency constraint, and online recursive correction is carried out by using sparse laser interferometer calibration data. By adopting the method, the prediction deviation caused by equipment aging and working condition change can be reduced, and stable prediction of the wear state and the repeated positioning error degradation trend is realized.
Owner:ZHEJIANG UNIV

Three-axis accelerometer based on four-degree-of-freedom weak coupling resonator

The invention provides a triaxial accelerometer based on a four-degree-of-freedom weak coupling resonator, the triaxial accelerometer comprises an upper-layer structure and a lower-layer structure, the upper layer is a micromechanical sensitive element constructed by taking silicon as a material, the lower layer is a glass base processed by a silicon dioxide material, and the glass base is used for providing mechanical support and electrical isolation functions. Wherein the micromechanical sensitive element has a signal conversion function; and the lower-layer glass base is formed by wet etching and metal sputtering processes and is used for signal output. On the basis of collaborative design of the orthogonally distributed resonance unit array and the mechanical amplification mechanism, electrostatic driving and amplitude ratio detection are combined, synchronous and accurate sensing of acceleration of the Y axis, the X axis and the Z axis is achieved through a single sensitive element, the technical limitation of a traditional single-axis detection mode is broken through, the complexity of a rear-end signal processing circuit is reduced, and the detection precision is improved. The device space utilization rate is improved.
Owner:NANJING UNIV OF INFORMATION SCI & TECH

Sensor data peak tracking

An acceleration sensor circuit is disclosed. The acceleration sensor circuit includes a package; an accelerometer to generate acceleration data samples during a peak tracking window; a sample register, to store the acceleration data samples; an acceleration calculation digital circuit, to calculate an acceleration magnitude sample based on the stored acceleration data samples; a peak register, to store a current peak acceleration value; a sample compare circuit, to compare the acceleration magnitude sample to the current peak acceleration value, where the peak register is configured to replace the current peak acceleration value with the acceleration magnitude sample in response to the sample compare circuit determining that the acceleration magnitude sample is greater than the current peak acceleration value; and a memory, configured to store the current peak acceleration value, and to transmit the current peak acceleration value to an external circuit in response to an end of the peak tracking window.
Owner:STMICROELECTRONICS INT NV

MEMS drift correction method based on data dynamic sampling and multi-source fusion

The invention relates to the field of sensor data processing, and discloses an MEMS drift correction method based on data dynamic sampling and multi-source fusion, and the method comprises the following steps: S1, collecting MEMS three-axis acceleration original data at a first sampling frequency, and synchronously collecting environment temperature, humidity and air pressure data at a second sampling frequency, the first sampling frequency is higher than the second sampling frequency, the basic drift correction model is established by using the low-frequency data to capture the macroscopic and slow-varying relationship between the environmental factors and the drift, then the residual refinement model is established for the high-frequency data, and the high-frequency residual is specially processed; high-frequency drift components related to the environmental change rate are captured, through the two-stage fusion strategy, the accuracy of the model in the macroscopic trend is guaranteed, high-frequency data are fully utilized to improve the instantaneous correction precision, information loss caused by simple downsampling in a traditional method is avoided, and false signals introduced by rough interpolation are also avoided.
Owner:SHENZHEN BEIDOU COMM TECH CO

Information processing apparatus, information processing method, and program

An information processing apparatus 1 sequentially receives a plurality of input data between predetermined time TS and time TE, and uses model information to estimate predetermined estimated data at a time point of time T (TS<T<TE) based on the received input data, the model information having been trained by machine learning so as to estimate the estimated data at the time point of the time T on the basis of the received input data.
Owner:SONY INTERACTIVE ENTERTAINMENT LLC

Multi-axial mechanical accelerometer and measuring method

The invention discloses a multi-axial mechanical accelerometer and a measuring method, and relates to the technical field of mechanical accelerometer equipment.The multi-axial mechanical accelerometer comprises a dome shell, a touch type alarm is installed in the dome shell, a transverse shaft is installed in the dome shell in the radial line direction of the dome shell, and the transverse shaft is sleeved with a conical sleeve; the conical sleeve is in sliding fit with the transverse rod, and the transverse shaft is sleeved with a first reset spring used for driving the conical sleeve to be close to the touch type alarm. The first base is installed at the bottom of the dome shell, a limiting assembly used for limiting the conical sleeve to move in the radial line direction is installed in the bottom of the first base, and the limiting assembly can move in the axis direction in the first base; when the multi-axial mechanical accelerometer works, acceleration signals in the axial direction and acceleration signals in the axial direction of other intersecting coordinate systems are responded, acceleration values in the axial direction of the multi-axial mechanical accelerometer are measured, an over-limit alarm state is indicated, and an alarm signal is output.
Owner:CHENGDU ZHONGKE ZHICHENG TECH CO LTD +1

Configurable low-power-consumption six-axis inertial sensor sampling method suitable for livestock and poultry

The invention discloses a configurable low-power-consumption six-axis inertial sensor sampling method suitable for livestock and poultry, and belongs to the technical field of animal behavior recognition and intelligent breeding. According to the method, by setting an intermittent sampling strategy and combining low-frequency period awakening and a short-time high-frequency data sampling window, behavior recognition data collection of the six-axis inertial sensor under the low-power-consumption condition is achieved. Meanwhile, a sampling template mechanism based on a behavior target is introduced, various sampling parameters can be configured according to the growth stage of the animal, the monitoring requirement and the variety difference, and multi-scene switching application such as oestrus recognition, parturient monitoring and night energy-saving guarding is supported. In addition, the system has an edge recognition capability, and can automatically trigger temporary recollection when detecting that the attitude angle is abnormal, so that the integrity of key behavior data is guaranteed. The method has the advantages of low power consumption, accurate recognition, flexible configuration, high adaptability and the like, and is widely applied to behavior monitoring scenes of bred animals such as dairy cows, pigs, sheep, chickens, ducks, geese and the like.
Owner:GUANGDONG OPERATOR WIRE INTELLIGENT TECHNOLOGY CO LTD

Aircraft high-load landing event detection, classification and maintenance guidance methods

Aircraft high-load landing event detection, classification and maintenance guidance methods relate to the technical field of aircraft high-load landing event detection. The aircraft high-load landing event detection method collects complete and accurate landing data online during an aircraft landing process and performs an analysis and calculation to determine whether a high-load landing event occurred and determines the type of the high-load landing event. The aircraft high-load landing event detection method removes the high-load landing event determination from the pilot's subjective perception and does not need to wait for decoding of quick access recorder (QAR) data, greatly improving the accuracy and timeliness of high-load landing event detection. In addition, by analyzing and estimating structural loads of the aircraft, the aircraft high-load landing event detection method provides targeted maintenance recommendations for possible aircraft structural damage caused by the high-load landing event, and forms a corresponding report.
Owner:CHENGDU CAIC ELECTRONICS CO LTD

Direct-buried power cable intermediate joint state monitoring cable warning pile and method

The invention discloses a cable warning pile and method for monitoring the state of an intermediate joint of a directly-buried power cable, relates to the field of state monitoring of power equipment in power engineering, and aims to solve the problems of single-parameter acquisition, large interference influence, non-objective evaluation and non-visual early warning in the existing monitoring technology. The warning pile is vertically buried at the position 0.3-0.8 m above a connector, temperature, partial discharge, vibration and environment data are synchronously collected through multiple sensors such as an optical fiber temperature sensor and a high-frequency current transformer, after data alignment, abnormal value elimination, filtering and integral preprocessing, the real temperature of the connector is restored through an environment and vibration coupling correction model, and the real temperature of the connector is obtained. And extracting a partial discharge peak factor and an average discharge capacity core characteristic. An index weight is determined based on an entropy weight method to construct a health degree evaluation model, operation states are divided into normal, attention, early warning and fault classes, hierarchical visual warning is realized through a three-color indicating lamp group and a buzzer, and the model is dynamically updated in combination with maintenance data every three months.
Owner:DINGYUAN COUNTY POWER SUPPLY CO OF STATE GRID ANHUI ELECTRIC POWER CO LTD

Multi-sensor fusion road impact event detection method and system

The invention discloses a multi-sensor fusion road impact event detection method and system, and the method comprises the steps: dividing the whole detection process into four parts according to the change rule of geomagnetic data and acceleration data corresponding to a vehicle impact behavior, the method comprises the steps of data acquisition, data preprocessing, fluctuation data extraction and fluctuation data impact event judgment, and the change condition of geomagnetic data is added in acceleration fluctuation judgment, that is, if acceleration impact judgment and geomagnetic impact judgment both detect vehicle impact events, a vehicle impact result is output; according to the method, whether the vehicle collision is caused by the vehicle collision or not can be further judged, the misjudgment of the non-vehicle collision event is effectively solved, and the detection accuracy is improved.
Owner:四川九通智路科技有限公司

Method, system, and medium for assessing bridge damage triggered by ship impact

The present disclosure provides a method, a system, and a medium for maintaining bridge structures susceptible to damage triggered by ship impact, and relates to the field of bridge health monitoring technology. If ship-bridge collision damage occurs, time-frequency coherence degradation factors at different positions of a time-series matrix, allows determination of an impact damage position and a damage degree based on a convex maximum point in the trajectory curve of the time-frequency coherence degradation factors. This method can effectively separate the influence of environmental factors and provide a fundamental methodological basis for establishing ship-bridge collision damage assessment technology.
Owner:HOHAI UNIV +1

A method, system, and medium for assessing bridge damage induced by ship impact

The application provides a bridge damage assessment method and system caused by ship collision and a medium, and relates to the technical field of bridge health monitoring. The method comprises the following steps: collecting acceleration response signal arrays of different heights and positions of a bridge pier, and generating a time series matrix; drawing a time-frequency coherence spectrum under different base functions, and obtaining a coherence spectrum entropy; determining the optimal base function based on the information entropy principle; obtaining the local correlation coefficient of the time series matrix in the time-frequency space under the optimal base function, and drawing a time-frequency coherence spectrum; evaluating the correlation and dependence degree between time series according to the local correlation coefficient and the time-frequency coherence spectrum, and judging whether the ship-bridge collision damage occurs; if the collision damage occurs, calculating the time-frequency coherence damage factor of the time series matrix at different positions, and determining the collision position and the collision degree according to the maximum protruding value in the time-frequency coherence damage factor trajectory curve. The method can effectively separate the influence of environmental factors, and provides basic method support for establishing the ship-bridge collision damage assessment technology.
Owner:HOHAI UNIV +2

System for monitoring and early warning highway infrastructure

The invention discloses a highway infrastructure monitoring and early warning system, which comprises a Beidou displacement monitoring module used for monitoring the three-dimensional coordinate of a highway infrastructure in real time and comparing the three-dimensional coordinate with an initial value to obtain the displacement of the highway infrastructure on the three-dimensional coordinate; the three-axis acceleration sensor is used for acquiring the three-axis acceleration of the highway infrastructure; the data processing module is used for receiving displacement data sent by the Beidou displacement monitoring module and three-axis acceleration data sent by the three-axis MENS acceleration sensor; extracting a displacement characteristic value and a three-axis acceleration characteristic value; predicting the displacement characteristic value and the three-axis acceleration characteristic value to obtain corresponding characteristic prediction values; determining the alarm level of the road infrastructure according to the feature value and the feature prediction value; the communication module is used for sending corresponding alarm information according to the alarm level determined by the data processing module; and the battery module is used for supplying power to each module. And the perceptual ability of the highway infrastructure to disasters is improved.
Owner:BEIJING YUNXINGYU TRAFFIC SCI & TECH

A method to synchronize the time of a tire-mounted sensor to the road impact and measure the contact patch duration and amplitude

A method for measuring impact signals over a plurality of revolutions of a tire that rolls on a road surface is provided, the impact signals being induced in acceleration data measured by an acceleration sensor mounted in the tire at a contact patch coming into contact with the road surface with each revolution of the tire. The method comprises acquiring the acceleration data over a plurality of revolutions of the tire and processing the acceleration data at the sensor. Processing the acceleration data at the sensor comprises processing the acceleration data to measure acceleration values for each impact signal and calculate an impact peak acceleration value (a_min); calculating a running average of the impact peak acceleration value (a_min) over the plurality of revolutions of the tire; measuring a start time and an end time of each impact signal by comparing acceleration values of the acceleration data to a first or second dynamic threshold, wherein the dynamic threshold is adjusted dependent on the running average of the impact peak acceleration value (a_min); and generating, from the measured start time and end time of each impact signal, a time-related parameter chosen from one or more of: a duration of an impact signal (t_patch), a time period between two consecutive impact signals (t_rev), and a ratio between the duration (t_patch) and the time period (t_rev). The method further comprises transmitting the time-related parameter to an external server.
Owner:BRIDGESTONE EURO NV SA

Intelligent foundation detection and evaluation method and system

The invention discloses an intelligent foundation detection and evaluation method and system, and the method comprises the steps: setting a ground penetrating radar and a micro-electromechanical sensor array based on the condition of a foundation and a detected target; data acquisition is carried out based on a ground penetrating radar and a micro-electro-mechanical sensor array, and detection radar data and micro-electro-mechanical sensor data are obtained; analyzing and processing the data of the ground penetrating radar and the data of the micro-electro-mechanical sensor; carrying out weighted fusion on the analyzed ground penetrating radar data and the micro-electromechanical sensor data through a space-time synchronization mechanism, and dynamically adjusting the fusion weight according to the soil texture type; and establishing a dynamic risk assessment model, and inputting the fused multivariate data into the dynamic risk assessment model to obtain a risk assessment level of the foundation to be monitored. According to the method, foundation information is obtained from multiple dimensions, defects such as tiny cracks and cavities can be recognized more accurately, and tiny vibration, pressure and humidity changes of the foundation are monitored accurately.
Owner:SHANGHAI ROCK ENG INSPECTION & TESTING CENT

Fall response procedures for aerosol-generating devices

To provide fall detection and associated response procedures for an aerosol-generating device that is initiated in response to, especially, one or more acceleration values.SOLUTION: A response procedure for an aerosol-generating device includes detecting a fall or shock using at least one acceleration value and initiating at least one response procedure using a controller. Acceleration values are provided by at least one accelerometer coupled to the aerosol-generating device. The response procedures may include initiating a mechanical change in the aerosol-generating device, initiating a modification to an external device interface, generating a human-perceptible beacon, storing data associated with the fall or shock in a persistent or non-volatile memory, initiating a diagnostic routine, monitoring for a lost device condition, and initiating a soft shutdown or restart.SELECTED DRAWING: Figure 1
Owner:PHILIP MORRIS PRODUCTS SA

Device and method for detecting gyroscope attack and recovering using accelerometer

Disclosed herein is an attack detection device for detecting an attack targeting a gyroscope. The attack detection device includes: a data collection unit configured to receive measurement values from an accelerometer and the gyroscope; and an attack detection unit configured to estimate an angular velocity using the measurement value from the accelerometer, and to detect an attack by comparing the estimated angular velocity to an angular velocity measured by the gyroscope.
Owner:KOREA UNIV RES & BUSINESS FOUND

Physical quantity sensor, physical quantity sensor device, and inertial measurement unit

A physical quantity sensor includes a substrate that has a first fixed electrode and a movable body that has a first mass portion facing the first fixed electrode. The first mass portion includes a first region, and a second region farther from the rotation axis than the first region, a first through-hole group is provided in the first region, and a second through-hole group is provided in the second region, and the movable body has a first surface on a substrate side, and a second surface. The first surface of the first mass portion is provided with a step or a slope such that a first gap distance of a first gap between the first mass portion and the first fixed electrode in the first region is smaller than a second gap distance of a second gap between the first mass portion and the first fixed electrode in the second region. A depth of through-holes of the first through-hole group and the second through-hole group is smaller than a maximum thickness of the movable body.
Owner:SEIKO EPSON CORP

Drug logistics transportation monitoring method and system

The invention relates to the technical field of electric data processing, in particular to a medicine logistics transportation monitoring method and system, and the method comprises the steps: collecting temperature data in a box body on a transport vehicle; the validity of the temperature data at the current moment is calculated, the validity is the bumping strength of the box body at the moment and the optimal matching degree of a temperature change sequence at the current moment in the current state and a standard temperature sequence after the box body is normally opened, and the length of the temperature change sequence at the current moment is consistent with that of the standard temperature sequence; and acquiring a temperature prediction value at the next moment based on a sliding moving average method. According to the method, the size of the moving average window is dynamically adjusted by combining the matching degree of the jolting strength and the temperature change trend, and self-adaptive smoothing processing of the temperature data is achieved. Noise can be suppressed during jolting, sensitivity can be kept during real fluctuation, and therefore prediction accuracy is improved, and the false alarm rate of abnormal detection is reduced.
Owner:SHANXI JUNYAN PHARMACEUTICAL CO LTD

A laser speckle testing device based on hyperspectral imaging

The application discloses a kind of laser speckle testing device based on hyperspectral imaging, which realizes high-precision measurement of laser spot and speckle signal under the condition of not relying on expensive refrigeration system by optimizing optical structure and control strategy.The device includes imaging lens, lens electric control module, liquid crystal tunable filter module, ND filter wheel and its driving mechanism, two-dimensional image sensor, main control unit, three-axis acceleration sensor, PC host and the screen to be measured.The noise calibration piece pre-stored in the ND filter wheel is used to collect noise data in real time before each measurement, and noise subtraction is carried out before the filter switching to improve the timeliness and accuracy of data correction;At the same time, the integrated three-axis acceleration sensor is used to monitor vibration, and when vibration exceeding the preset threshold is detected, it is determined that the current collected data is invalid and automatically triggers re-sampling.The application has compact structure and low cost, and is suitable for laser display, projection calibration and high-brightness light source detection and other fields.
Owner:EAST CHINA NORMAL UNIV +1

A growth environment multi-factor comprehensive monitoring method and system based on ancient tree protection

The application discloses a kind of based on the growth environment multi-factor comprehensive monitoring method and system of old tree protection, including step (S1) non-invasive perception network construction: in the crown layer area of old tree deployment meteorological monitoring unit, real-time acquisition photosynthetic active radiation intensity PAR and crown layer surface temperature T c ; with trunk as center, soil sensor array is radially laid in root distribution area, and soil volume water content θ and soil water potential are monitored in layers;Micro-invasive thermal diffusion probe is installed at the breast diameter of trunk, and xylem original liquid flow flux SF raw Is continuously measured, and initial liquid flow flux SF raw Calibration is carried out;Foundation interferometric radar is erected outside the protection zone, and three-dimensional spatial distribution point cloud P r Of root is obtained by surface scanning.This application can realize more comprehensive old tree monitoring, and timely find the existing abnormality of old tree environment.
Owner:SICHUAN FORESTRY & GRASSLAND INVESTIGATION & PLANNING INST (SICHUAN FORESTRY & GRASSLAND ECOLOGICAL ENVIRONMENT MONITORING CENT)

Water conservancy tunnel construction axis deviation real-time measurement method based on inertial navigation

The invention relates to the technical field of tunnel construction, in particular to a water conservancy tunnel construction axis deviation real-time measurement method based on inertial navigation, which comprises the following steps: acquiring data based on a water conservancy tunnel construction section, identifying a key measurement area, tracking attitude angle change and correcting navigation reference, and extracting cross section structure change characteristics; and judging the main shaft direction offset and the spatial coincidence relation between the main shaft direction offset and the trigger section, and adjusting the sampling rule and the amplitude limiting boundary. According to the method, a synchronous analysis chain of an attitude angle and an acceleration sequence is established through continuous acquisition of inertial navigation data and dynamic recognition of a structural response signal in the water conservancy tunnel construction process, and a data circulation mechanism with attitude drift monitoring, section stable recognition and main shaft direction correction as the core is formed; and the deviation trend is identified through the spatial coincidence relation, a constraint correction interval is generated, closed-loop management of the axis trend, the posture change and the displacement deviation is formed, and it is ensured that the posture stability and the deviation controllable state are maintained in the tunnel closed environment.
Owner:SHANXI PROVINCIAL WATER CONSERVANCY & HYDROPOWER ENG CONSTR SUPERVISION CO LTD

Total station for diversion engineering tunnel construction

The invention belongs to the technical field of survey and measurement, and particularly relates to a total station for diversion engineering tunnel construction, the total station comprises a total station body, the lower end of the total station body is symmetrically and fixedly connected with two supporting plates, the lower ends of the two supporting plates are fixedly connected with the same annular bearing plate, and the annular bearing plate is fixedly connected with the lower end of the total station body. The device further comprises a multi-stage anti-shake mechanism, a machine body posture locking mechanism, an air curtain forming protection mechanism, an anti-vibration sealing enhancement mechanism, a three-axis acceleration sensor and an environment vibration standard indicating lamp. Direct transmission of construction environment vibration to the total station can be effectively blocked, the damping strength of the multi-stage anti-shake mechanism and the sealing strength of the lens are adaptively regulated and controlled according to the real-time vibration strength, the proper measurement time period is visually prompted through the indicator lamp, the total station can be limited and fixed during measurement, a conical air curtain protection layer can be automatically formed, and the measurement efficiency is improved. The adverse effects caused by vibration damage and dust attachment are avoided, and the measurement precision and the equipment operation stability are comprehensively guaranteed.
Owner:SINOHYRDO ENG BUREAU 3 CO LTD

Method for attenuating interference in the measurement of a tilt angle of a vehicle

A method for attenuating interference in the measurement of an angle of sideways tilt of a motorized two-wheeled vehicle including an electronic control unit configured to compute an angle of sideways tilt of the vehicle from the measurements of a tilt sensor. The method includes: reception of the value of the speed of the vehicle measured by the speed-measuring module; reception of the number of revolutions per minute of the engine; computation of the ratio between the received speed value and the received number of revolutions per minute; comparison of the ratio between the received speed value and the number of revolutions per minute with an attenuation interval; if the ratio is outside the attenuation interval, computation of the tilt angle without attenuation; if the ratio is within the attenuation interval, computation of the tilt angle with attenuation.
Owner:SCHAEFFLER TECHNOLOGIES AG & CO KG

MEMS device and manufacturing method for MEMS device

A MEMS device that includes: a first cover; a second cover defining a space between the second cover and the first cover; a first substrate opposite to the first cover in the space between the second cover and the first cover, the first substrate comprising single-crystal silicon; a second substrate opposite to the second cover in the space between the second cover and the first cover, the second substrate comprising single-crystal silicon, the second substrate including a movable portion, the single-crystal silicon of the second substrate being joined to the single-crystal silicon of the first substrate; and an electrostatic capacity portion between at least one of (1) the second cover and the second substrate or (2) the first substrate and the second substrate, the electrostatic capacity portion being configured such that electrostatic capacity changes depending on a distance between the movable portion and the second cover or the first substrate.
Owner:MURATA MFG CO LTD

Micromechanical sensor device and corresponding manufacturing process

Micromechanical sensor device with: an ASIC substrate (10) with a first front side (VSa) and a first back side (RSa); a rewiring device (20) formed on the first front side (VSa) with a plurality of stacked conductor track levels (LB0, LB1) and insulation layers (I); a MEMS substrate (9) with a second front (VS) and a second back (RS); a first micromechanical functional layer (16) formed above the second front surface (VS); a second micromechanical functional layer (17) formed above the first micromechanical functional layer (16), which is connected to the rewiring device (20) via a bond connection (50); wherein a movable sensor structure (MS) is formed in the second micromechanical functional layer (17) which is anchored on one side to the MEMS substrate (9) via a first anchoring area (17b') formed in the second micromechanical functional layer (17); wherein in the second micromechanical functional layer (17) an electrical connection element formed in a second anchoring area (17d; 17d'; 17d'') is anchored on one side via a contact area (52) of the bond connection (50) on the ASIC substrate (10); and wherein the first anchoring area (17b') and the second anchoring area (17d; 17d'; 17d'') are elastically connected to each other via a spring element (17c) formed in the second micromechanical functional layer (17).
Owner:ROBERT BOSCH GMBH