1202results about "Acceleration measurement using interia forces" patented technology

The invention discloses a vehicle falling detection method and device, the method is applied to a vehicle-mounted device, and the method comprises the steps that first information is obtained, the first information comprises accelerated speeds of a vehicle in a first direction, a second direction and a third direction, and / or angular speeds of the vehicle in the first direction, the second direction and the third direction, the first direction, the second direction and the third direction are three coordinate axis directions of a three-dimensional coordinate system respectively; and then, according to the first information, determining whether the vehicle falls off or not. According to the method, in consideration of possible vehicle direction change, rolling and other situations when a vehicle falls off, falling detection is carried out on the vehicle according to acceleration of the vehicle in a first direction, a second direction and a third direction and / or angular velocity of the vehicle in the first direction, the second direction and the third direction, and the vehicle falling detection accuracy is improved. Therefore, whether the vehicle falls off or not can be determined, and the accuracy of vehicle falling detection can be ensured.

The invention discloses a method for predicting the damage of a prestressed concrete cylinder pipe in a complex environment, and relates to the technical field of pipeline structure health monitoring, and the method comprises the steps: collecting multi-physical field data through deploying multiple types of sensors, transmitting the data to a central monitoring system in a wireless manner, carrying out the standardized preprocessing, and obtaining a multi-source fusion data set; a salt migration driving index dsa, a stress disturbance induction index yry and an electrochemical activity potential index che are constructed, a comprehensive corrosion risk index SCR is obtained, and corrosion behavior evaluation is carried out. And when the corrosion behavior is evaluated as a disturbance sign, a corrosion change prediction index CAR is further calculated according to time sequence evolution forming a corrosion risk index SCR, grading evaluation and transition identification of the corrosion state are realized, an evaluation result is stored in a database, and a corrosion risk evolution trend is presented through a visual chart. The method supports early warning and emergency response decision making, and has high adaptability and engineering practicability without adding hardware.

Various optical systems for use in a light pulse atomic interferometer (LPAI)-based one-, two-, or three-axis accelerometer or gyroscope are disclosed. As an LPAI accelerometer or gyroscope may employ many different laser beams to implement the LPAI functionality, ways of combining these different laser beams to thereby simplify the optical systems are desired. The cooling laser beam portion of the optical system may be simplified using one or more reflective grating chips. The Raman laser beam optics may be simplified using combiners and separators. For LPAI systems sensing along three axes, various optical switching schemes may be employed, including ones that generate variable data-rates with a primary sensing axis having a higher data-rate than the secondary sensing axes. Further, by combining various laser beams in a time-multiplexed manner, the number of optical fiber tethers to a sensor head may be reduced.

The invention provides a spherical complex vibration type vector hydrophone based on an MEMS accelerometer, and relates to the technical field of underwater acoustic signal detection, and the spherical complex vibration type vector hydrophone comprises an MEMS accelerometer, a built-in core, a piezoelectric ceramic spherical shell, a sound transmission sealing shell, and a suspension ring. The MEMS accelerometer is orthogonally arranged in the built-in core; the built-in core is nested in the lower half ball of the piezoelectric ceramic spherical shell; the upper hemisphere of the perforated piezoelectric ceramic spherical shell is adhered to the upper edge of the built-in core; the sound transmission sealing shell coats the piezoelectric ceramic spherical shell through an encapsulation process; the suspension ring is bonded with the sound transmission sealing shell, and the hydrophone is suspended on the fixing support for use. The composite hydrophone can detect sound pressure signals and vibration velocity signals at the same position underwater, solves the problem of omnidirectional detection of the composite hydrophone on the sound pressure signals, and has the advantages of small size, simple structure, high reliability, wide application range and the like.

The invention discloses a single-axis mechanical accelerometer and a measuring method, and relates to the technical field of accelerometer measuring equipment.The single-axis mechanical accelerometer comprises a base and a dome shell installed on the base, a first cavity is formed in the base, and an I-shaped balancing weight capable of axially sliding is installed in the first cavity; a first spring is mounted between the I-shaped balancing weight and the cavity bottom of the first cavity; a conical sleeve capable of sliding in the radial direction is installed in the dome shell, a transverse shaft is inserted into the conical sleeve in a penetrating mode, the two ends of the transverse shaft are fixedly connected to the inner wall of the dome shell, the transverse shaft is sleeved with a second spring, one end of the second spring is fixedly connected to the transverse shaft, and the other end of the second spring is fixedly connected with the conical sleeve. An alarm triggering module is installed on the dome shell, and through the synergistic effect of an I-shaped balancing weight-spring inertia system and a conical sleeve triggering mechanism, the acceleration detection and alarm functions of a pure mechanical structure are achieved.

The invention discloses a contact type alarm output device for a mechanical accelerometer, and relates to the technical field of accelerometers, the contact type alarm output device comprises a dome shell, and the dome shell is provided with a first cavity; the first contact, the second contact, the first alarm output lead and the second alarm output lead are inserted into the dome shell in a penetrating mode, the first alarm output lead is connected to the end, inserted into the outside of the dome shell, of the first contact, and the second alarm output lead is connected to the end, inserted into the outside of the dome shell, of the second contact. The second alarm output lead is connected to the end, penetrating into the outer portion of the dome shell, of the second contact, one end of the metal spring piece is fixedly connected to the first contact, the other end of the metal spring piece is in point contact with the second contact, and the metal spring piece and the second contact are in point contact design. And in combination with mechanical pushing of the conical sleeve, tight contact and reliable conduction during alarm triggering are ensured, and mistaken contact or poor contact caused by vibration or impact is avoided.

The invention relates to the technical field of equipment state monitoring, in particular to an emergency cut-off valve bolt looseness detection method and system based on multi-modal fusion. The method specifically comprises the following steps of multi-source data synchronous acquisition, accelerometer installation and data processing, environmental adaptability preprocessing, bolt area optical flow feature extraction, Kalman filtering multi-source fusion, bolt looseness detection and loose bolt positioning. According to the emergency cut-off valve bolt looseness detection method based on multi-modal fusion, online, automatic and real-time accurate monitoring and early warning are achieved, the reliability and the anti-jamming capability of the system are remarkably improved, a high-precision and quantifiable objective diagnosis result is provided, good economical efficiency and large-scale deployment feasibility are achieved, and the method is suitable for popularization and application. The industrial pain point that a traditional contact type sensor scheme is difficult to apply to an industrial site with a large number of bolts in a large scale due to too high cost and technical complexity is effectively solved.

The invention discloses a wear state and precision degradation prediction method for a ball screw drive system, and the method comprises the steps: employing a dual-label obtaining strategy, and constructing a'strong label + weak label 'mixed label sequence covering a whole life cycle; mapping a macroscopic working condition into a contact interface micromechanical state quantity, and converting a time domain signal into a travel domain / space domain stable sequence by adopting equal travel synchronous resampling, so as to weaken the influence of speed fluctuation on feature extraction; a double-flow physical guidance neural network is further constructed, and a physical attention mechanism is introduced to realize data feature and physical prior fusion; training is completed based on supervision loss and physical consistency constraint, and online recursive correction is carried out by using sparse laser interferometer calibration data. By adopting the method, the prediction deviation caused by equipment aging and working condition change can be reduced, and stable prediction of the wear state and the repeated positioning error degradation trend is realized.

The invention discloses a laser speckle testing device based on hyperspectral imaging, which realizes high-precision measurement of laser spots and speckle signals under the condition of not depending on an expensive refrigerating system by optimizing an optical structure and a control strategy. The device comprises an imaging lens, a lens electric control module, a liquid crystal tunable optical filter module, an ND filter wheel, a driving mechanism of the ND filter wheel, a two-dimensional image sensor, a main control unit, a three-axis acceleration sensor, a PC host and a tested screen. A noise calibration piece preset in an ND filter wheel is used for collecting noise data in real time before each time of measurement, and noise deduction is carried out before the filter is switched, so that the timeliness and accuracy of data correction are improved; meanwhile, the integrated three-axis acceleration sensor is used for monitoring vibration, and when vibration exceeding a preset threshold value is detected, it can be judged that currently collected data is invalid, and re-collection is automatically triggered. The device is compact in structure, low in cost and suitable for the fields of laser display, projection calibration, high-brightness light source detection and the like.

The invention provides a triaxial accelerometer based on a four-degree-of-freedom weak coupling resonator, the triaxial accelerometer comprises an upper-layer structure and a lower-layer structure, the upper layer is a micromechanical sensitive element constructed by taking silicon as a material, the lower layer is a glass base processed by a silicon dioxide material, and the glass base is used for providing mechanical support and electrical isolation functions. Wherein the micromechanical sensitive element has a signal conversion function; and the lower-layer glass base is formed by wet etching and metal sputtering processes and is used for signal output. On the basis of collaborative design of the orthogonally distributed resonance unit array and the mechanical amplification mechanism, electrostatic driving and amplitude ratio detection are combined, synchronous and accurate sensing of acceleration of the Y axis, the X axis and the Z axis is achieved through a single sensitive element, the technical limitation of a traditional single-axis detection mode is broken through, the complexity of a rear-end signal processing circuit is reduced, and the detection precision is improved. The device space utilization rate is improved.

A fall protection compliance system includes a connection structure configured for interfacing an anchor structure and a connection sensor associated with the connection structure. The connection sensor includes an accelerometer or a pressure switch, where the connection sensor is configured to monitor continued connection of the connection structure to the anchor structure over a period of time and to output a signal indicating said continued connection.

An accelerometer includes a housing, a proof mass assembly encased in the housing, and one or more heating elements configured to heat the proof mass assembly in response to an electrical current. The one or more heating elements include a positive temperature coefficient of resistance (PTC) material. The PTC material exhibits a relatively high increase in resistance above a threshold temperature. For example, a ratio of the resistance of the PTC material above the threshold temperature to the resistance of the PTC material at room temperature (PTC ratio) is greater than five.

An accelerometer including: a housing; a proof mass; a piezoelectric material; a support member for holding the proof mass a predetermined distance from the piezoelectric material, the proof mass being rotatably disposed relative to the housing and having a center of gravity offset from an axis of rotation of the support member; a first biasing material for biasing the proof mass towards the piezoelectric material and against the support member; and a second biasing material for biasing the proof mass at the predetermined distance from the piezoelectric material. When a level of acceleration of the proof mass is less than or equal to an acceleration level that is to be measured, the second biasing material is configured to force the support member to rotate to disengage the proof-mass and the first biasing material to move the proof-mass to contact the piezoelectric material.

The invention discloses a micro-seismic monitoring piezoelectric acceleration sensor optimization method based on an NSGA-II algorithm, provides a piezoelectric sensor based on a triangular shear structure, and relates to the technical field of piezoelectric acceleration sensors. According to the micro-seismic monitoring piezoelectric acceleration sensor optimization method based on the NSGA-II algorithm, the NSGA-II genetic algorithm is adopted to optimize the structural size of the designed sensor, and an optimal structural parameter combination is obtained, that is, when the height of a mass block is 10.6 mm, the thickness of a piezoelectric patch is 3.29 mm, the height of the piezoelectric patch is 8.1 mm and the height of a central column is 19 mm, the sensor design is optimal, and the optimal structural parameter combination is obtained. The working frequency of the optimized sensor is improved by 2.68%, and the voltage sensitivity is improved by 8.96%. And finally, respectively carrying out a calibration experiment and a micro-seismic signal test on the designed sensor by building an experiment platform. Experimental results show that the working frequency range of the designed sensor is 0.1-2123 Hz, and the voltage sensitivity is 173.49 mv / g.

An acceleration sensor circuit is disclosed. The acceleration sensor circuit includes a package; an accelerometer to generate acceleration data samples during a peak tracking window; a sample register, to store the acceleration data samples; an acceleration calculation digital circuit, to calculate an acceleration magnitude sample based on the stored acceleration data samples; a peak register, to store a current peak acceleration value; a sample compare circuit, to compare the acceleration magnitude sample to the current peak acceleration value, where the peak register is configured to replace the current peak acceleration value with the acceleration magnitude sample in response to the sample compare circuit determining that the acceleration magnitude sample is greater than the current peak acceleration value; and a memory, configured to store the current peak acceleration value, and to transmit the current peak acceleration value to an external circuit in response to an end of the peak tracking window.

The invention relates to the field of sensor data processing, and discloses an MEMS drift correction method based on data dynamic sampling and multi-source fusion, and the method comprises the following steps: S1, collecting MEMS three-axis acceleration original data at a first sampling frequency, and synchronously collecting environment temperature, humidity and air pressure data at a second sampling frequency, the first sampling frequency is higher than the second sampling frequency, the basic drift correction model is established by using the low-frequency data to capture the macroscopic and slow-varying relationship between the environmental factors and the drift, then the residual refinement model is established for the high-frequency data, and the high-frequency residual is specially processed; high-frequency drift components related to the environmental change rate are captured, through the two-stage fusion strategy, the accuracy of the model in the macroscopic trend is guaranteed, high-frequency data are fully utilized to improve the instantaneous correction precision, information loss caused by simple downsampling in a traditional method is avoided, and false signals introduced by rough interpolation are also avoided.

An information processing apparatus 1 sequentially receives a plurality of input data between predetermined time TS and time TE, and uses model information to estimate predetermined estimated data at a time point of time T (TS<T<TE) based on the received input data, the model information having been trained by machine learning so as to estimate the estimated data at the time point of the time T on the basis of the received input data.

The invention discloses a multi-axial mechanical accelerometer and a measuring method, and relates to the technical field of mechanical accelerometer equipment.The multi-axial mechanical accelerometer comprises a dome shell, a touch type alarm is installed in the dome shell, a transverse shaft is installed in the dome shell in the radial line direction of the dome shell, and the transverse shaft is sleeved with a conical sleeve; the conical sleeve is in sliding fit with the transverse rod, and the transverse shaft is sleeved with a first reset spring used for driving the conical sleeve to be close to the touch type alarm. The first base is installed at the bottom of the dome shell, a limiting assembly used for limiting the conical sleeve to move in the radial line direction is installed in the bottom of the first base, and the limiting assembly can move in the axis direction in the first base; when the multi-axial mechanical accelerometer works, acceleration signals in the axial direction and acceleration signals in the axial direction of other intersecting coordinate systems are responded, acceleration values in the axial direction of the multi-axial mechanical accelerometer are measured, an over-limit alarm state is indicated, and an alarm signal is output.

The invention discloses a configurable low-power-consumption six-axis inertial sensor sampling method suitable for livestock and poultry, and belongs to the technical field of animal behavior recognition and intelligent breeding. According to the method, by setting an intermittent sampling strategy and combining low-frequency period awakening and a short-time high-frequency data sampling window, behavior recognition data collection of the six-axis inertial sensor under the low-power-consumption condition is achieved. Meanwhile, a sampling template mechanism based on a behavior target is introduced, various sampling parameters can be configured according to the growth stage of the animal, the monitoring requirement and the variety difference, and multi-scene switching application such as oestrus recognition, parturient monitoring and night energy-saving guarding is supported. In addition, the system has an edge recognition capability, and can automatically trigger temporary recollection when detecting that the attitude angle is abnormal, so that the integrity of key behavior data is guaranteed. The method has the advantages of low power consumption, accurate recognition, flexible configuration, high adaptability and the like, and is widely applied to behavior monitoring scenes of bred animals such as dairy cows, pigs, sheep, chickens, ducks, geese and the like.

The invention discloses an MOMES accelerometer based on light intensity modulation, and belongs to the technical field of micro-electro-mechanical systems and inertial measurement. The MOMES accelerometer comprises a silicon-based base, a mass block, a fixed anchor point, an elastic beam assembly and a double-photoelectric detector. The mass block is hung on the silicon-based base through the elastic beam assembly and the fixed anchor point, the fixed anchor point is fixed on the surface of the silicon-based base, and the fixed anchor point is connected with the elastic beam assembly; the center of the mass block is provided with a light hole which completely penetrates through the thickness direction. And the double photoelectric detector is fixed on the surface of the silicon-based base and is positioned in a light projection area of the light hole. When the accelerometer is subjected to the action of external acceleration along the Y-axis direction, the rectangular mass block generates displacement relative to the silicon-based base, so that the light intensity distribution of a light spot projected by the light hole on the double photoelectric detector generates differential change; the accelerometer has the advantages of high sensitivity, strong anti-interference capability, good process compatibility and the like, and is suitable for high-precision inertial measurement.

The invention discloses a cable warning pile and method for monitoring the state of an intermediate joint of a directly-buried power cable, relates to the field of state monitoring of power equipment in power engineering, and aims to solve the problems of single-parameter acquisition, large interference influence, non-objective evaluation and non-visual early warning in the existing monitoring technology. The warning pile is vertically buried at the position 0.3-0.8 m above a connector, temperature, partial discharge, vibration and environment data are synchronously collected through multiple sensors such as an optical fiber temperature sensor and a high-frequency current transformer, after data alignment, abnormal value elimination, filtering and integral preprocessing, the real temperature of the connector is restored through an environment and vibration coupling correction model, and the real temperature of the connector is obtained. And extracting a partial discharge peak factor and an average discharge capacity core characteristic. An index weight is determined based on an entropy weight method to construct a health degree evaluation model, operation states are divided into normal, attention, early warning and fault classes, hierarchical visual warning is realized through a three-color indicating lamp group and a buzzer, and the model is dynamically updated in combination with maintenance data every three months.

The invention discloses a multi-sensor fusion road impact event detection method and system, and the method comprises the steps: dividing the whole detection process into four parts according to the change rule of geomagnetic data and acceleration data corresponding to a vehicle impact behavior, the method comprises the steps of data acquisition, data preprocessing, fluctuation data extraction and fluctuation data impact event judgment, and the change condition of geomagnetic data is added in acceleration fluctuation judgment, that is, if acceleration impact judgment and geomagnetic impact judgment both detect vehicle impact events, a vehicle impact result is output; according to the method, whether the vehicle collision is caused by the vehicle collision or not can be further judged, the misjudgment of the non-vehicle collision event is effectively solved, and the detection accuracy is improved.

The invention discloses a cold atom interference type low-frequency vibration measurement device and a measurement method, and solves the problems that the existing cold atom interference gravimeter measurement equipment is limited by the performance of a vibration sensor, the compensation precision is insufficient, timing calibration is needed, and the measurement precision is low. And measurement errors generated by gravity and ultralow-frequency vibration cannot be effectively separated from a measurement result of the cold atom interference gravimeter, namely, decoupling of two measurement parameters is realized, and cold atom interference measurement of low-frequency vibration is realized. The measuring device comprises a Raman laser output system, a vacuum cavity, a sensitive axis converter and a vibration detection reflecting mirror, the Raman laser output system outputs two pieces of Raman laser which have the same polarization state and are both circular polarization states; the low-frequency vibration is transmitted to the liquid crystal phase modulator through the vacuum cavity for polarization state conversion, and then is reflected to the liquid crystal phase modulator or the vibration detection reflector through the polarization splitting prism, so that the interference type low-frequency vibration of the cold atoms is measured, and decoupling of the two is realized.

The present disclosure provides a method, a system, and a medium for maintaining bridge structures susceptible to damage triggered by ship impact, and relates to the field of bridge health monitoring technology. If ship-bridge collision damage occurs, time-frequency coherence degradation factors at different positions of a time-series matrix, allows determination of an impact damage position and a damage degree based on a convex maximum point in the trajectory curve of the time-frequency coherence degradation factors. This method can effectively separate the influence of environmental factors and provide a fundamental methodological basis for establishing ship-bridge collision damage assessment technology.

The invention discloses an anti-magnetic suspension accelerometer device based on a quasi-zero stiffness structure and a measurement method, and belongs to the field of precise instruments and meters. The device comprises a support, an axial displacement platform, magnetic conductive soft iron, an upper-layer pyrolytic graphite sheet, a lower-layer thin bismuth wafer, a capacitance displacement sensor and a permanent magnet array, wherein an anti-magnetic suspension system, a magnetic rigidity regulation and control system and a displacement detection system are arranged in the support; the anti-magnetic suspension system is composed of an upper-layer pyrolytic graphite sheet, a lower-layer thin bismuth wafer and a permanent magnet array, the magnetization directions of an inner ring and an outer ring of the permanent magnet array are opposite, a suspension element is suspended by virtue of anti-magnetic force and gravity balance, and quasi-zero stiffness is realized through positive and negative stiffness offset; according to the regulation and control mode, the magnetic field of the air gap where the suspension element is located is adjusted by adjusting the distance between the magnetic conductive soft iron and the permanent magnet, and the magnitude and gradient of magnetic induction intensity in all directions are changed, so that the magnetic rigidity is regulated and controlled, and efficient and accurate regulation and control of the sensitivity and the measuring range of the anti-magnetic suspension accelerometer are achieved. Therefore, the application range of the anti-magnetic suspension accelerometer is expanded.

The invention provides an IMU sensor space-time fusion industrial defect detection system and method based on an SORT algorithm. The method comprises the steps that S1, system initialization and space-time calibration are carried out, a time synchronization model is established, the single pixel size dpixel is calculated, and IMU and camera coordinate system registration is completed; s2, collecting asynchronous data, and obtaining working parameters of a camera and the speed vt of a conveyor belt; s3, constructing an SORT state vector and predicting an IMU enhancement state, detecting defects of a current frame by adopting YOLOV8, and generating a detection set Dt; s4, executing EKF space-time fusion, and predicting and updating a defect state covariance and a position; s5, quantifying the position uncertainty sigma pos, calculating an optimal acquisition period Topt, controlling the line frequency of the camera, and carrying out confidence verification and misjudgment elimination; s6, cloud federated filtering fuses the edge and the cloud state, IMU zero offset is estimated, and cooperation of multiple detection devices and system expansibility enhancement are achieved.

The invention relates to the technical field of remote monitoring, in particular to a road repair state monitoring system based on edge calculation, which comprises the following steps: an increment acquisition module, an environment comparison module, a crack pressure matching module, a linkage alarm module and a load sequence adjustment module. According to the method, through periodic three-axis acceleration and temperature and humidity parameter linkage analysis, calibration and correction of collected signals under environment instantaneous disturbance are achieved, the compaction state of a road is recognized by combining trend consistency judgment of particle density and humidity trend, and the compaction rate is calculated through direction track coupling of multi-period microcracks and the compaction rate. According to the method, the structure collaborative stress and change relation and the synchronous comparison of direction track fluctuation and an expansion path are accurately reflected, the structure fracture risk is captured in real time, the time-efficient transmission of abnormal risk information is improved in combination with a dynamic sequence adjustment mechanism of communication bandwidth and queue pressure, and high perception and real-time response of multi-source dynamic change in the road repair process are achieved.

The invention relates to a fan vibration quantity testing device and a testing method thereof.The fan vibration quantity testing device comprises a rack, double testing stations are arranged on the rack, each testing station is provided with a two-dimensional cooperative clamping mechanism and an acceleration detector, and each two-dimensional cooperative clamping mechanism comprises a transverse driving air cylinder and a longitudinal driving air cylinder; a transverse clamping plate is arranged at the end of a piston rod of the transverse driving air cylinder, a longitudinal clamping plate is arranged at the end of a piston rod of the longitudinal driving air cylinder, the transverse clamping plate and the longitudinal clamping plate are vertically matched to form an L-shaped clamping face, an industrial personal computer is integrated in the rack, and the industrial personal computer is electrically connected with the transverse driving air cylinder, the longitudinal driving air cylinder and the acceleration detector. And through hardware initialization and self-calibration, double-station self-adaptive clamping and positioning, multi-dimensional vibration data acquisition, signal preprocessing and feature extraction, vibration quantity fusion calculation, intelligent judgment and error compensation, detection of the vibration quantity of the fan is realized. The method has the effect of improving the efficiency of fan testing.

The invention relates to a method for triggering protective means, in particular an airbag and / or a belt tensioner, in a child restraint device, in particular according to one of claims 18 to 20, comprising the steps of: a) determining at least one measurement direction and / or a measurement direction corridor; b) receiving acceleration sensor signals from at least two acceleration sensors (74x, 74y, 74z), which are preferably orientated differently; c) calculating at least one first acceleration value (aX) along the measurement direction and / or within the measurement direction corridor; d) determining a triggering signal based at least on the at least one first acceleration value (aX); e) triggering at least one protective means based on the triggering signal.

The invention relates to a flattened three-dimensional acceleration and three-dimensional force composite sensor and a detection method thereof, and belongs to the field of sensors. According to the technical scheme, the flattened three-dimensional acceleration and three-dimensional force composite sensor comprises a force sensor module and an acceleration sensor module, the force sensor module comprises four shear effect force detection elements and four longitudinal effect force detection elements, and the four shear effect force detection elements and the four longitudinal effect force detection elements are coplanar. The acceleration sensor module comprises four shear effect acceleration detection elements and four longitudinal effect acceleration detection elements, and the four shear effect acceleration detection elements and the four longitudinal effect acceleration detection elements are coplanar. According to the scheme, the sensitive elements with the longitudinal effect and the shear effect are combined, three-dimensional detection is achieved through the thickness of the single-layer sensitive element, flattening of the sensor is achieved through single-layer arrangement of the sensitive elements, thermal expansion and stress are greatly reduced in the installation direction, and the detection precision is guaranteed.