90 results about "Differential capacitance" patented technology

The invention provides an oscillator frequency modulation circuit and a communication chip. The oscillator frequency modulation circuit comprises a first resonance area which comprises a first resonance circuit, a first coupling tube (Mn) and a second coupling tube (Mp), wherein the first coupling tube (Mn) and the second coupling tube (Mp) are cross-coupled with the first resonance circuit; the second resonance area comprises a second resonance circuit, and the second resonance circuit comprises a first branch circuit electrically connected with the first coupling tube (Mn) and a second branch circuit electrically connected with the second coupling tube (Mn); the second branch is electrically connected with the second coupling tube (Mp); the first tail inductor (Ln) is connected to the first branch in series; the second tail inductor (Lp) is connected in series with the second branch; and the differential capacitor array (Ct) is connected between the first branch circuit and the second branch circuit in parallel. According to the oscillator frequency modulation circuit and the communication chip, low noise can be realized in a broadband range, the anti-interference capability is realized, meanwhile, the occupied area is relatively small, and high-quality signals can be continuously output for a multi-protocol system.

The invention discloses a variable-area capacitive sensor displacement measurement method for suppressing interference, and relates to the technical field of precision displacement detection, and the method comprises the steps: S1, obtaining a differential capacitor array through a variable-area capacitive sensor; s2, acquiring a capacitance change signal by using the differential capacitor array; and S3, performing differential processing on the capacitance change signal to obtain a displacement measurement result of the variable-area capacitive sensor. According to the invention, a plurality of groups of differential capacitor pairs are arranged in the same direction, and differential output is carried out after odd-even grouping parallel connection, so that the output signal of the sensor is linearly increased along with the increase of the number of the differential capacitor pairs, and the measurement sensitivity is effectively improved. The structure not only can make quick and accurate response to infinitesimal displacement change, but also can realize higher-precision detection capability on the premise of not obviously increasing system complexity.

The invention relates to a three-level linkage differential capacitance sensor, which belongs to the technical field of micro electro mechanical sensors, and comprises a fixed support structure, three polar plates are horizontally arranged at the top of the fixed support structure at equal intervals along the vertical direction, and the polar plates and the fixed support structure as well as the adjacent polar plates are connected in an insulating and sealing manner; according to the invention, gas or liquid on the outer side of the sensor enters the middle cavity by using the vent holes, so that the pressure load of the gas or liquid acts on the three polar plates at the same time, and the pressure load of the gas or liquid is applied to the three polar plates at the same time; the three polar plates can deform at the same time, the gap between the two polar plates on the upper side is reduced, the capacitance between the polar plates is increased, the gap between the two polar plates on the lower side is increased, the capacitance between the polar plates is reduced, and the total output capacitance can be remarkably increased finally through differential output of the capacitance between the upper polar plate and the lower polar plate. And the sensitivity of the three-stage linkage differential capacitance sensor is greatly improved.

The invention discloses a pilot protection method and device based on instantaneous power total and incremental waveform similarity, and belongs to the technical field of power systems. According to the method, fault detection is started through voltage or current abrupt change, differential capacitance current compensation is carried out based on a full current sampling value, and a compensated voltage value is calculated by combining an electromagnetic wave transmission equation and a line Bergeron model so as to eliminate the influence of line parameters; and judging a passive load branch fault through a current amplitude and an integral value, otherwise, synchronously adopting an instantaneous power full-quantity waveform cosine similarity longitudinal main protection criterion and an instantaneous power increment waveform cosine similarity criterion to identify an internal fault, and overcoming a reliability'dead zone 'defect caused by near-zone fault voltage drop. The method does not need to depend on power frequency phasor calculation, and can improve the sensitivity and reliability of protection in scenes of a high-proportion new energy power grid, a micro-grid and the like.

The present invention provides a MEMS system and a signal processing circuit. A differential capacitive MEMS sensing module outputs N first voltage signals representing sound signals according to a first common mode voltage, capacitance changes generated by N differential capacitors, and N bias voltages. N signal processing modules are respectively connected to N output ends of the differential capacitive MEMS sensing module, access the N first voltage signals and perform signal processing. The output end of the i-th signal processing module is connected to the i+1-th differential capacitor, which is equivalent to superimposing the output signal of each signal processing module on the input end of the next differential capacitor to achieve signal superposition. The amplitude of the second voltage signal output by the last signal processing module is enhanced by a multi-stage cascade method without introducing other noises. Therefore, the signal-to-noise ratio of the MEMS system can be improved, thereby improving the performance of the MEMS system.

The application discloses a variable-area capacitive sensor displacement measurement method for interference suppression and relates to the technical field of precise displacement detection, and comprises the following steps: S1, acquiring a differential capacitance array by using a variable-area capacitive sensor; S2, acquiring a capacitance change signal by using the differential capacitance array; and S3, performing differential processing on the capacitance change signal to acquire a variable-area capacitive sensor displacement measurement result. The application arranges multiple groups of differential capacitance pairs in the same direction, adopts a processing mode of odd-even grouping and parallel connection and then differential output, so that the output signal of the sensor linearly increases with the increase of the number of differential capacitance pairs, and the sensitivity of measurement is effectively improved. The structure can not only quickly and accurately respond to slight displacement changes, but also realize higher-precision detection capability without significantly increasing the complexity of the system.

The utility model relates to the technical field of mother and baby products, in particular to a breast pump. The breast pump comprises a milk storage container and three differential capacitance sensor assemblies. In the rising direction of the liquid level of milk in the milk storage container, the first detection electrode assembly of the first differential capacitance sensor assembly is arranged in the top area; a second detection electrode assembly of the second differential capacitance sensor assembly is arranged in the bottom area; the height of the top of a third detection electrode assembly of the third differential capacitance sensor assembly is lower than that of the first detection electrode assembly, and the height of the bottom of the third detection electrode assembly is higher than that of the second detection electrode assembly. According to the breast pump, the milk storage container is detected through the three differential capacitance sensor assemblies, the state of the milk storage container can be comprehensively determined in detail, the intelligent degree of the breast pump can be improved, interference can be effectively resisted through the differential capacitance sensor assemblies, and the detection accuracy is guaranteed.

The application discloses a kind of foundation pit retaining pile construction casing precision control device and its construction method, device includes casing cylinder, pre-tightening connecting piece, insulating kettle, capacitive differential solution unit and opposite electrode array;Pre-tightening connecting piece is provided with closed interface cavity;Insulating kettle is contained in interface cavity, dielectric cavity is provided in insulating kettle, and filled with dielectric liquid insulation medium;Capacitive differential solution unit is sealed in interface cavity with insulating kettle;Opposite electrode array is attached to the inner wall of dielectric cavity, including at least two pairs of measuring electrodes being two by two oppositely arranged along the circumference of dielectric cavity.The capacitive differential sensing scheme of opposite electrode array and dielectric liquid insulation medium is used in the application, complementary differential capacitance signals are generated by the circumferential asymmetric change of dielectric free interface, so as to solve the deflection direction and inclination of casing, and the correction parameter set containing target adjustment direction and compensation amount can be directly generated to support directional correction operation.

The present invention relates to an accelerometer, which comprises a substrate and detecting devices. The substrate is provided with supporting anchor points and electrode fixing anchor points; the detecting device comprises two detecting plates and corresponding detecting electrodes, and the detecting electrodes are connected to the electrode fixing anchor points through connecting arms; the detecting plate is elastically connected to the supporting anchor point, the two detecting plates are asymmetrically arranged with respect to axes of the supporting anchor points, and the two detecting plates are parallel to each other and in opposite directions; and the detecting electrodes and the detecting plates are arranged at intervals to form a detecting capacitor. The wiring of in-plane detecting electrodes of different detecting devices can be separated, and wire crossing can be avoided to reduce the influence of parasitic capacitance caused by complex wiring, thus improving the detection accuracy of the accelerometer.

The present invention discloses a low-frequency capacitive closed-loop acceleration sensor, which uses a multi-layer circuit board made of FR4 material as the main body of the low-frequency capacitive acceleration sensor. The main body circuit board includes: a mass block for detecting vibration; an elastic structure formed by CNC machining to form a folded cantilever beam; a coil structure in the middle layer of the circuit board and two groups of copper metal arrays on the top layer. A circuit board symmetric to the copper metal array is welded and fixed above the main body circuit board to form a differential capacitance plate. There is an acrylic shell with grooves outside, and a set of magnets with opposite magnetic fields in the vertical direction are placed at the left and right grooves respectively. Interfaces are left around the circuit board for introducing coil current, and combining with the magnetic field to generate Ampere force to achieve closed-loop control. The sensor of the present invention can detect low-frequency signals (<10Hz), has a simple production process, low material cost, and has good anti-interference and stability.

The invention belongs to the technical field of semiconductors, and provides a method and a system for analyzing and evaluating the interface quality of an easy-to-oxidize semiconductor epitaxial thin film, and the method comprises the following steps: firstly, screening a proper material in an oxidation state through the measurement of surface potential by utilizing the operation atmosphere of high-purity inert gas, and then, carrying out differential capacitance measurement, and carrying out difference or differential processing on the measurement result to obtain related information of the interface of the material. The method is convenient to implement, high in measurement reliability and non-loss in detection, is suitable for an easily oxidized semiconductor epitaxial film, and supports high-space electrical measurement and analysis in a low-oxygen environment; the nano-scale high spatial resolution is realized, and the electrical property change of a tiny area at an interface can be captured; the method is of great significance in evaluating and analyzing the quality of the epitaxial interface of the semiconductor material and predicting and optimizing the device performance of related materials.

The invention relates to a fisheye terminal crystal slag prevention precision stamping machining control method. The method comprises the steps that a friction volt potential standard response is established based on a mold of a pre-machined micro-nano structure; a transient friction volt potential is collected in real time by using a suspension ground potential technology; a dynamic differential capacitance spectrum of the lubricating oil film is collected, and the molecular orientation order degree is analyzed; performing time sequence correlation analysis on the potential variation characteristic and the dispersion characteristic, and judging that the phase is a microscopic nucleation stage of the crystal slag when the polarity is detected to be overturned and the order degree is dropped; and the electrostatic minimal quantity lubrication system is triggered, and the charged oil mist is driven by a high-gradient electrostatic field induced by the micro-nano structure to be adsorbed to the friction hot spots in a targeted mode. The method has the advantages that the microcosmic early warning of crystal slag nucleation is realized, and self-aligned targeted lubrication is achieved.

The invention relates to the technical field of earthquake monitoring, in particular to a novel broadband geophone suitable for severe use environments, and is characterized in that a lower support piece is arranged on a lower fixed pole plate in a penetrating manner, a movable pole plate is arranged at the upper end of the lower fixed pole plate, a mass block is connected to the upper end of the movable pole plate, and two ends of the mass block are in contact with the upper support piece and the lower support piece respectively; a first capacitor is formed between the upper fixed plate and the upper side surface of the movable plate; and a second capacitor is formed between the lower fixed plate and the lower side surface of the movable plate. A first capacitor is formed between the upper fixed pole plate and the upper side face of the movable pole plate, a second capacitor is formed between the lower fixed pole plate and the lower side face of the movable pole plate, and when external vibration exists, the mass block drives the movable pole plate to move, so that the difference value of the first capacitor and the second capacitor is changed; the differential capacitor design can symmetrically counteract zero drift caused by temperature, full temperature range stability is achieved, temperature interference is reduced, and detection accuracy is improved.

A differential capacitance sensor signal detection device comprises: a first metal plate and a second metal plate arranged in parallel and oppositely, an intermediate capacitor arranged in parallel between the first metal plate and the second metal plate; an upper capacitor formed between the first metal plate and an upper plate of the intermediate capacitor; a lower capacitor formed between the second metal plate and a lower plate of the intermediate capacitor; the first metal plate and the second metal plate connected to a sinusoidal wave signal source; the intermediate capacitor connected in parallel to an external capacitor; the electric signals outputted by the upper plate and the lower plate of the intermediate capacitor connected to a phase-sensitive detector as measured signals via a superposition amplification circuit and a first coupling circuit; the electric signals outputted by the upper plate and the lower plate of the intermediate capacitor connected to the phase-sensitive detector as reference signals via a second coupling circuit and a comparison circuit; the output of the phase-sensitive detector connected to an output amplifier, and a signal related to the position of the intermediate capacitor is obtained. Accordingly, the reference signal and the measured signal in the phase-sensitive detection are the same frequency and the same phase.

There is provided a measuring head comprising a supported frame, an arm extending along a trajectory between at least a first end and a second end and comprising at least one probe arranged at the first end and adapted to be in contact with an external object, and a restraint device configured to loosely couple the frame with the arm, the arm is movable relative to the frame such that the arm is rotatable relative to the frame about a rotation axis transverse to the trajectory, the rotation being proportional to a displacement defined by the interaction of the probe and the object; the measuring head includes a differential capacitive sensor including a transmitter integrally formed with the frame and disposed near the second end, a receiver integrally formed with the second end, and a computer operably connected to the receiver, the computer is configured to determine a position parameter of the receiver relative to the transmitter from a predetermined reference position value, thereby determining a displacement of the probe.

The invention discloses a mesothermodynamic model-based electrode electrolyte interface property prediction method. The method comprises the following steps of S1, establishing a mesothermodynamic model of an electrode electrolyte interface; step S2, constructing a DeepMT model based on a DeepONet framework; step S3, generating a training data set through the mesothermodynamic model, and training DeepONet by using an Adamax optimizer; s4, obtaining ion density distribution based on the trained DeepMT model, and calculating the interfacial adsorption capacity, the surface charge and the differential capacitance; and S5, combining the ion density distribution prediction phase diagram and the electrolyte shielding effect, and analyzing the interface behavior in the complex electrochemical environment. According to the method, the calculation efficiency of the mesothermodynamic model is improved by 2-4 orders of magnitude, and a theoretical tool is provided for optimization design of a supercapacitor, a battery and an electro-catalysis interface.

The embodiment of the invention provides a differential capacitance displacement transducer. The differential capacitance displacement transducer comprises a sinusoidal oscillation circuit, a capacitor bank, an addition amplification circuit, a differential comparison circuit and a demodulation filtering amplification circuit, the sinusoidal oscillation circuit is used for generating a differential sinusoidal oscillation signal of which the peak-to-peak value is a positive and negative first voltage value and applying the differential sinusoidal oscillation signal to a first movable pole plate and a second movable pole plate of the capacitor bank; the addition amplification circuit is used for carrying out addition calculation on the differential sinusoidal signals output by the fixed pole plate of the capacitor bank and outputting sinusoidal signals; the differential comparison circuit is used for carrying out comparison calculation on the differential sinusoidal signal and outputting a square wave signal with the same phase as the differential sinusoidal signal; and the demodulation filtering and amplifying circuit is used for rectifying the sinusoidal signal by using the square signal, filtering and amplifying the rectified sinusoidal signal, and outputting a detected vibration voltage signal. According to the differential capacitance displacement transducer, detection of tiny vibration signals can be achieved, noise interference is reduced, and the detection precision is improved.

This invention discloses a method for identifying coal and coal gangue based on capacitance tomography. It utilizes a differential capacitance tomography electrode sensor to collect capacitance measurement data of coal, coal gangue, or mixtures thereof within the measured area. Direct coupling capacitance between electrodes is canceled by applying an inverse excitation signal. The raw data is preprocessed, and stable and valid capacitance measurements are selected to form a data vector. A regularized iterative algorithm is used to solve for the dielectric constant distribution, combining a preset sensitivity distribution function. An initial solution is obtained through regularization, and then iteratively updated until convergence. Image reconstruction is performed based on the dielectric constant distribution. After normalization and edge detection, a capacitance tomography image representing the location, size, and dielectric differences of the materials is generated. The image grayscale values ​​are analyzed, and coal and coal gangue regions are automatically identified and marked according to a preset dielectric constant threshold range. Simultaneously, their centroid coordinates and equivalent areas are calculated, achieving non-destructive and accurate identification of the mixture components.

A method for detecting and adaptively compensating for ultra-low frequency weak vibrations in a MEMS accelerometer includes: a multi-channel parallel coherent modulation and demodulation module acquiring differential capacitance signals of the sensitive units in the MEMS accelerometer through n parallel coherent detection links, and then synchronously modulating and coherently demodulating the differential capacitance signals to obtain n baseband signals; an adaptive weighted fusion module evaluating the signal-to-noise ratio (SNR) of each baseband signal, and then weighting and fusing the n baseband signals using the square of the SNR as a weighting coefficient to obtain a fused signal; a dynamic temperature drift compensation module performing temperature drift compensation on the fused signal to obtain a compensated signal; and a variational mode decomposition adaptive filtering module performing adaptive filtering on the compensated signal to output the final acceleration signal. The effect is to improve the detection of ultra-low frequency weak vibrations in a MEMS accelerometer and enhance the accuracy of wide-temperature-range dynamic temperature drift compensation.

The invention discloses a wafer surface film thickness on-line detection method and device, and the method comprises the steps: transmitting a grating signal to a wafer through a grating device, receiving a reflection signal outputted by the reflection of the grating signal on the surface of the wafer, and judging whether the wafer is in a horizontal state or not; if yes, when the wafer is driven to rotate for spin coating treatment, alternately applying excitation signals to the first capacitive sensor and the second capacitive sensor; acquiring a differential capacitance value between the first capacitive sensor and the second capacitive sensor in real time, and synchronously acquiring dynamic gaps between the wafer and the first capacitive sensor and between the wafer and the second capacitive sensor; and according to the differential capacitance value, the dynamic gap and the dielectric constant of the film layer material coated on the surface of the wafer, the thickness distribution of the film layer on the surface of the wafer is analyzed and calculated through impedance spectroscopy. According to the invention, the precision of wafer surface film thickness detection can be effectively improved, and the problem that the precision is not high when a capacitance sensor is adopted to carry out capacitance detection on the wafer surface film in the prior art is solved.

The application relates to the technical field of aluminum alloy stamping die detection, and specifically discloses a fatigue test device and a test process for an aluminum alloy stamping die. The device comprises multiple sets of elastic supporting assemblies and multiple sets of elastic pressing assemblies which are distributed below the die and above the die. The elastic supporting assemblies and the elastic pressing assemblies realize stress-free, self-adaptive and stable clamping of the complex stamping die. Meanwhile, the orthogonal three-axis guide rail drives the detection probe to realize programmed precise movement in the three-dimensional space, so that the detection probe can reach every concave-convex area of the die surface without dead angle to perform scanning, thereby providing a stable workpiece posture and an accurate probe path for high-precision detection from the physical level, and overcoming the bottleneck that large special-shaped workpieces are difficult to be stably clamped and comprehensively detected. The device also integrates a double-physical-field sensing mechanism of eddy current and differential capacitance, and synchronously analyzes the eddy current impedance signal and the differential capacitance signal, so that the detection equipment has the ability to distinguish the base crack and the surface aluminum adhesion.

Provided in the present invention are a differential capacitance diaphragm vacuum gauge and a production device therefor. The vacuum gauge comprises a housing, a fixed electrode plate and a diaphragm, wherein the housing is provided with a gas intake pipe and a gas filling pipe; the fixed electrode plate is arranged inside the housing; the diaphragm is arranged inside the housing, and divides the interior of the housing into an upper chamber and a lower chamber; the fixed electrode plate is located in the upper chamber, and a preset distance is provided between the fixed electrode plate and the diaphragm; the lower chamber is in communication with the gas intake pipe and forms an open measurement chamber; the gas filling pipe is in communication with the upper chamber and forms a closed reference chamber; and a preset volume of gas filled by means of the gas filling pipe is provided in the closed reference chamber, so that the closed reference chamber is in a preset positive high-pressure state. The closed reference chamber is filled with gas to a certain pressure by means of the gas filling pipe, so that the reference chamber is in a constant high-pressure state, thereby achieving a simple structure and the effect of easy manufacturing.

The present invention relates to a capacitance measurement device and method for a capacitor array in a chip. By optimizing the design of a traditional capacitance measurement circuit and adopting a differential capacitance measurement technology based on the mutual capacitance of vertical and horizontal lines, the tolerance between each two mutual capacitances is processed and analyzed to improve the ability to capture tiny capacitance changes. By applying excitations of opposite phases to adjacent transmitting electrodes, the capacitance difference is extracted using the current cancellation principle, effectively eliminating the influence of circuit device process deviations and ambient temperature drift. A differential capacitance measurement module is used to convert nA-level composite current signals into voltages, and high-pass and low-pass filtering are combined to eliminate DC offsets and ensure signal stability under high gain. A frequency domain signal processing module is used to extract the amplitude and phase of the excitation, convert the analog signal into a digital signal, minimize the noise impact, and generate a high-entropy key. The measurement results are highly robust and accurate, and have strong anti-interference capabilities.

The invention discloses a design method of a differential compensation electromagnetic metamaterial array, and belongs to the technical field of artificial electromagnetic materials. Firstly, basic structure parameters of the electromagnetic metamaterial are calculated according to a selected structure and resonance frequency, element simulation is carried out in Maxwell to obtain self-inductance of the electromagnetic metamaterial, and differential capacitance compensation is carried out according to the electromagnetic effect of elements. According to the invention, the low-frequency electromagnetic metamaterial is introduced into the magnetic coupling resonant wireless power transmission system, and through a differential compensation strategy, the overall resonant frequency deviation of the array is effectively suppressed, so that the system stably works at a target frequency and shows a stable negative magnetic conductivity characteristic; the problems of low transmission efficiency and poor stability under low frequency caused by coupling change between coils are solved.

The present application relates to a kind of micromechanical capacitance compensation structure and its preparation method, the capacitance compensation structure is in the shape of cylinder, cone, platform or inverted crater, be arranged in capacitor plate inside, for changing capacitance.When being arranged below the plate, recess is formed by depositing sacrificial layer and patterning on the lower plate structure layer;Depositing thin film material, etching to remove the surface medium thin film material of sacrificial layer, retaining the medium material in recess;Depositing capacitor upper plate structure layer thin film material, and patterning is formed release hole;After releasing the sacrificial layer through release hole, the compensation capacitance structure is obtained.When being arranged above the plate, convex structure is formed by etching to form thin film material on the lower plate structure layer of capacitor;Depositing and planarizing sacrificial layer;Depositing capacitor upper plate and patterning is formed release hole;After releasing the sacrificial layer through release hole, the compensation capacitance structure is obtained.The present application realizes capacitance matching and compensation, especially for differential capacitance structure, reaches the effect of upper and lower symmetrical capacitance structure.

The invention provides an MEMS pressure sensor, a manufacturing method thereof and an electronic device, and the method comprises the steps: providing a first substrate, forming at least one first pressure structure on the surface of the first substrate, and enabling the first pressure structure to comprise a first electrode layer and a first sacrificial layer from bottom to top, and a first cavity which penetrates through the first sacrificial layer and exposes the first electrode layer; a second substrate is provided, second pressure structures corresponding to the first pressure structures in number are formed on the surface of the second substrate, and each second pressure structure comprises a second electrode layer, a second sacrificial layer and a third electrode layer from bottom to top; bonding the first sacrificial layer and the third electrode layer, and removing the second substrate to expose the second electrode layer; a plurality of first release holes penetrating through the second electrode layer and a second cavity penetrating through the second sacrificial layer and arranged corresponding to the first cavity are formed, the first release holes are exposed out of the second cavity, the first electrode layer and the third electrode layer form a first variable capacitance structure, and the second electrode layer and the third electrode layer form a second variable capacitance structure. According to the scheme, the first pressure structure and the second pressure structure are bonded to form the differential capacitance type pressure sensor, namely, the first variable capacitance structure and the second variable capacitance structure are formed, pressure is measured through differential output of the first variable capacitance structure and the second variable capacitance structure, the measurement precision is higher, and the measurement precision is higher. And thus, the performance of the MEMS pressure sensor can be improved.

The utility model relates to the technical field of mother and baby products, in particular to a breast pump. The breast pump comprises a milk storage container and three differential capacitance sensor assemblies. The first differential capacitance sensor assembly comprises a first detection electrode assembly, and the first detection electrode assembly is arranged at the bottom in the rising direction of the milk liquid level; the second differential capacitance sensor assembly comprises a second detection electrode assembly, and the second detection electrode assembly is arranged at the top in the rising direction of the milk liquid level; the third differential capacitance sensor assembly comprises a third detection electrode assembly, and the third detection electrode assembly is arranged between the first detection electrode assembly and the second detection electrode assembly in the milk liquid level rising direction. According to the breast pump, the milk storage container is detected through the three differential capacitance sensor assemblies, the state of the milk storage container can be comprehensively determined in detail, the intelligent degree of the breast pump can be improved, interference can be effectively resisted through the differential capacitance sensor assemblies, and the detection accuracy is guaranteed.

The present invention discloses a double differential capacitive torque sensor, which is composed of a sensor outer ring, a plurality of deformation beams, a sensor inner ring, a capacitive moving electrode part, an overload protection part, a substrate, a capacitive static electrode part, etc. The capacitive moving electrode part and the capacitive static electrode part form 4 capacitors, wherein the first capacitor and the third capacitor are symmetrically distributed about the x-axis, constituting a differential structure one; the second capacitor and the fourth capacitor are symmetrically distributed about the y-axis, constituting a differential structure two; the differential structure one and the differential structure two are orthogonally distributed, constituting a double differential structure. Through the double differential structure, the sensitivity and reliability of the torque sensor can be effectively improved, the linear error can be reduced, and the interference caused by the lateral force can be offset. Applying the torque feedback information of the sensor to robot control can achieve precise torque control of the robot and improve the operation efficiency of the robot.

The invention provides a capacitive pressure sensor and a preparation method thereof, and belongs to the technical field of pressure detection, the capacitive pressure sensor comprises a vertical differential capacitance structure, the vertical differential capacitance structure comprises a reference pole plate, a middle pole plate and a pressure sensing film, and the middle pole plate is located between the reference pole plate and the pressure sensing film; the metal supporting structure is used for supporting the vertical differential capacitor structure; the middle pole plate is directly bonded with the reference pole plate and the pressure sensing film through laser, and the metal supporting structure is directly bonded with the vertical differential capacitor structure through laser. Through a vertical differential capacitor structure and a laser direct bonding process, the defects that structural errors cannot be eliminated and polar plate gaps are uncertain due to warping of a diaphragm are overcome, original errors caused by the structure are reduced, sealing materials are omitted, and the control precision of the distance between polar plates of the capacitive pressure sensor is improved.

An MEMS capacitive planar micro-force sensor based on a bistable mechanical structure comprises a bottom silicon layer, a middle oxidation insulating layer and a top silicon structure layer, a sensor sensitive structure is arranged in the top silicon structure layer and comprises a probe structure, the rear end of the probe structure is connected with an internal mass block, the internal mass block is connected with an internal supporting beam, and the internal supporting beam is connected with an external supporting beam. The internal supporting beam is connected with the external mass block, the external mass block is connected with the external supporting beam, and the probe structure, the internal mass block, the internal supporting beam and the external mass block form a sensor movable structure; the external supporting beam is connected with the supporting beam frame; the two sides of the probe structure are differential capacitance comb tooth arrays at the front part of the sensor, the two sides of the internal supporting beam are differential capacitance comb tooth arrays at the middle part of the sensor, the outer side of the external mass block is a differential capacitance comb tooth array at the rear part of the sensor, and the fixed comb tooth array is connected with a comb tooth cantilever frame; according to the invention, precise detection of planar biaxial sub-nN magnitude micro force can be realized at the same time.