204 results about "Capacitive pressure sensor" patented technology

The invention relates to the technical field of vacuum coating, and particularly discloses a control system for a vacuum coating machine, which comprises a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module and a coating parameter control analysis module. Pressure intensity values of monitoring time points in all control time periods are accurately collected through a capacitive pressure sensor, the average value of the pressure intensity is calculated, the overall level of the vacuum pressure intensity in the time period can be visually reflected, and basic data are provided for judging whether the vacuum degree is in a proper range or not; an active monitoring and prevention mechanism is adopted for the vacuum coating machine, so that the continuity and the stability of coating production are guaranteed, a scientific basis is provided for preventive maintenance of the equipment, the service life of the equipment is prolonged, the probability of sudden failure of the equipment is reduced, the reliability, the high efficiency and the intelligent level of the whole vacuum coating production system are improved, and the production cost is reduced. And the competitiveness of enterprises in the field of coating processing is improved, the production cost is reduced, and the product quality is improved.

The invention discloses a sandwich-type flexible capacitive pressure sensor, and relates to the technical field of pressure sensors, the sandwich-type flexible capacitive pressure sensor comprises a photoresist layer and a fixed cylinder, the surface of the photoresist layer is provided with a flexible substrate layer, the surface of the flexible substrate layer is provided with a lower metal electrode layer, the surface of the lower metal electrode layer is provided with a flexible dielectric layer, and the flexible dielectric layer is provided with an upper metal electrode layer and a lower metal electrode layer. The surface of the flexible dielectric layer is provided with an upper metal electrode layer, and the outer sides of the upper metal electrode layer and the photoresist layer are provided with a waterproof packaging layer. According to the sandwich type flexible capacitive pressure sensor, the fixing sleeve, the first pipeline and the air bag ring are arranged, and the first rotating disc can be screwed to move through a tool; and then air in the first air bag is input into the air bag ring through the first pipeline, so that the air bag ring is expanded, the connecting line is limited, and the connection between the connecting line and the connecting end is limited.

The invention relates to the technical field of thin film actuators and flexible sensors, and provides a sensing actuating system and method based on a flexible sensor and a thin film actuator and application, and the sensing actuating system comprises a flexible capacitive pressure sensor, a double-layer thin film actuator and a central processing unit. The sensor detects object contact, and the central processing unit collects and processes changed capacitance signals and controls the actuator to conduct actuating bending. According to the sensor part, an AAO microstructure is introduced into a dielectric layer and matched with an ultra-thin electrode layer, micro stress detection can be achieved, electrode packaging integrated design is adopted in the whole, and the ultra-thin effect is achieved; the actuator part realizes multi-response actuation on the basis of a simple structure. According to the invention, by improving the preparation methods of the flexible capacitive pressure sensor and the double-layer film-shaped actuator, the ability of the sensor to detect micro stress and the ability of the actuator to respond to diversification are improved, the sensor and the actuator are directly and physically combined to form an integrated device, and the integrated device is matched with the central processing unit. Integrated operation of signal detection and feedback control can be achieved, and the device can be applied to the related fields of bionic animal and plant simulation, simulated grippers and the like.

The invention discloses a rough surface-oriented bionic adhesion / sensing integrated structure and a manufacturing method thereof. The rough surface-oriented bionic adhesion / sensing integrated structure comprises a bottom-layer bionic mushroom-shaped array structure and a top-layer inclined supporting micro-column array structure which are bonded through a flexible connecting layer, the top layer inclined supporting micro-column array structure and the bottom layer bionic mushroom-shaped array structure are attached to the upper layer flexible regionalization electrode and the lower layer flexible regionalization electrode respectively, and the top layer inclined supporting micro-column array structure, the upper layer flexible regionalization electrode and the lower layer flexible regionalization electrode form the flexible capacitive pressure sensor. The method comprises the following steps: firstly, manufacturing a top-layer inclined support micro-column array structure and a bottom-layer bionic mushroom-shaped array structure, then manufacturing flexible regionalized electrodes, and respectively attaching the flexible regionalized electrodes to the bottom-layer bionic mushroom-shaped array structure and the top-layer inclined support micro-column array structure; and finally, bonding the bottom bionic mushroom-shaped array structure and the top inclined supporting micro-column array structure through a flexible connecting layer. The method adapts to rough surfaces, realizes stable adhesion, monitors the contact state of the interface in real time and senses the morphology of the contact interface.

The invention provides a flexible microstructure capacitive pressure sensor, a preparation method and application, and belongs to the technical field of sensors, and the preparation method comprises the following steps: S1, preparing a microstructure electrode layer; s2, preparing a microstructure dielectric layer; and S3, assembling the flexible microstructure capacitive pressure sensor. The flexible micro-structure capacitive pressure sensor is assembled based on a sandwich structure, the upper layer and the lower layer of the flexible micro-structure capacitive pressure sensor are micro-structure electrode layers, the conductive surfaces of the two micro-structure electrode layers are oppositely arranged, and a micro-structure dielectric layer is inserted into a middle layer between the two micro-structure electrode layers. According to the flexible microstructure capacitive pressure sensor, the preparation method and the application, the problems that in the prior art, a traditional sensor is difficult to meet the requirement for complex shape recognition, and an existing flexible pressure sensor is high in preparation cost and complex in preparation process are solved.

The invention provides a capacitive pressure sensor core, a preparation method thereof and a capacitive pressure sensor. Specifically, the capacitive pressure sensor core comprises a deformable diaphragm, a ceramic substrate and a capacitive performance transducer. The capacitive performance transducer comprises a first electrode comprising a first measuring electrode part and a first capacitive shielding electrode part, a second electrode comprising a second measuring electrode part and a second capacitive shielding electrode part, and a gap separator, wherein the first measuring electrode part comprises a first measuring electrode central part, the second measuring electrode part comprises a second measuring electrode central part, and the area of the first measuring electrode central part is smaller than that of the second measuring electrode central part; wherein the first measuring electrode part, the first capacitance shielding electrode part, the second measuring electrode part and the second capacitance shielding electrode part are formed by reducing and sintering organic metal conductor paste.

The invention discloses a ceramic capacitive pressure sensor, which comprises a packaging shell, a commercial small circular shell is arranged on the packaging shell, a copper pipe is arranged on one side, far away from the packaging shell, of the commercial small circular shell, an electronic wire is arranged on the packaging shell in a penetrating manner, and the electronic wire is connected with the packaging shell. The insulating paper, the inner copper body and the check ring are integrally designed into the combined base with the PPS and the glass fiber wrapping the SUS metal inner container, a traditional multi-part manual assembly structure is replaced, and compared with the scheme that in the prior art, insulating paper and an inner copper body shielding cover need to be bonded, the number of parts is reduced, and the cost is reduced. The cost is reduced, meanwhile, automatic injection molding is achieved, manual assembly errors are avoided, the assembly efficiency is improved, the compression strength of the PPS composite reinforcing material is improved compared with that of traditional insulation paper, and the reliability in the high-pressure-resistant environment is ensured.

The invention discloses a capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises a dielectric layer, an upper electrode and a lower electrode, wherein the dielectric layer is composed of a three-dimensional periodic lattice structure fabric and ionic gel; the three-dimensional periodic lattice structure fabric is composed of a plurality of C-shaped elastic filaments, an upper-layer mesh fabric and a lower-layer mesh fabric, and the elastic filaments are arranged between the upper-layer mesh fabric and the lower-layer mesh fabric as longitudinal supports; the ionic gel is compounded with the lower-layer mesh fabric, and a gap exists between the top of the ionic gel and the upper-layer mesh fabric; the upper electrode and the lower electrode are foam nickel electrodes with three-dimensional mesh structures, the upper electrode is arranged at the top of the upper-layer mesh fabric, and the lower electrode is arranged at the bottom of the ionic gel. The sensor provided by the invention is provided with the dielectric layer with a special structure, and can maintain high-sensitivity linear sensing in a large pressure detection range.

The invention relates to the technical field of flexible electronics, in particular to a method for preparing a dielectric layer of a capacitive sensor, which comprises the following main steps of: preparing an ITO / PET (indium tin oxide / polyethylene terephthalate) electrode; spontaneously forming a flexible dielectric layer; a flexible dielectric layer dispersion process; and packaging the device. The array type flexible pressure sensor prepared by the invention has the advantages of high-sensitivity feedback, stable work, good signal transmission, good flexibility and the like.

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

The invention provides a fibrous degradable flexible pressure sensor with ultralow detection limit and a preparation method and application thereof.The preparation method comprises the steps that lignin powder is dispersed in a sodium hydroxide aqueous solution, ultrasonically crushed and stirred to be uniform, then polyethylene oxide powder is uniformly dissolved in the solution in four times, stirring is conducted till the solution is uniform, and the pressure sensor is obtained; putting the solution into a vacuum cavity, and removing bubbles at room temperature to obtain an electrostatic spinning precursor solution; then preparing a lignin fiber thin film by adopting an electrostatic spinning process, and then drying the thin film; and finally, cutting the obtained lignin fiber film into a square film, placing an interdigital electrode mask on the square film, spraying a metal silver nanowire electrode by using a silver nanowire solution, and then embedding the fiber film in a polyimide film to prepare the flexible pressure sensor. According to the invention, the integrated design of the capacitive pressure sensor is realized, the cost is low, the process is simple, and the pressure sensor has excellent flexibility and sensitivity.

The invention provides a flexible capacitive pressure sensor based on a bionic fin structure. The sensor comprises an upper electrode, a lower electrode and an elastic supporting piece located between the upper electrode and the lower electrode. The elastic supporting piece comprises an upper platform, a lower platform and a plurality of bionic fin structural pieces located between the upper platform and the lower platform. The bionic fin structural member comprises an upper plane part, a lower plane part, an annular part with an opening in one side and an arc-shaped part with two arcs overlapped in a 3 shape. The upper side and the lower side, without the opening, of the annular part are connected with the upper plane part and the lower plane part correspondingly. The arc-shaped part is located in the annular part, and the two ends of the arc-shaped part are connected with the two ends of the opening of the annular part correspondingly. According to the bionic microstructure, the Young modulus of the dielectric layer is effectively reduced, the pressure response sensitivity and speed are improved, meanwhile, good structural stability and array expansibility are achieved, and the application requirement of a multi-scene intelligent interaction system is met.

The invention discloses a flexible capacitive pressure sensor structure and a motion detection application method thereof. The flexible capacitive pressure sensor structure comprises an upper waterproof layer, an upper electrode layer, a dielectric layer, a lower electrode layer and a lower waterproof layer which are stacked. Wherein the electrode layer comprises a polydimethylsiloxane thin film substrate, a polyimide thin film and laser-induced graphene, and the dielectric layer comprises a polydimethylsiloxane thin film and a micro-conical array structure which is subjected to laser orthogonal processing. The method has the advantages of high sensitivity, high consistency, high stability, high reliability and high repeatability.

The utility model relates to a grounding structure of a ceramic capacitive pressure sensor. The utility model comprises a metal shell which is provided with an annular cavity; the plastic socket comprises a connecting column extending into the annular cavity; the printed circuit board is arranged in the annular cavity; and the grounding insert comprises an annular part and a connecting part, wherein the annular part is respectively propped against the side walls of the annular cavity and the connecting column, and the connecting part extends to the annular part, is partially embedded in the plastic socket and is connected with the printed circuit board. The utility model solves the problems that the ground lug of the ceramic pressure sensor in the prior art is easy to break during assembly and the ground lug is loose and poor in contact after long-time use.

The utility model relates to a ceramic substrate with an annular supporting structure and a capacitive pressure sensor, and belongs to the technical field of sensor electrodes. At least one of the problems of initial point drift, large non-linear error and precision reduction, poor measurement repeatability and the like caused by different thermal expansion coefficients of materials due to machining error accumulation of a capacitive vacuum gauge in the prior art is solved. The utility model discloses a ceramic base body with an annular supporting structure, the lower surface of the ceramic base body is provided with an annular supporting part, the annular supporting part extends downwards along the edge of the lower surface of the ceramic base body, and the supporting part is provided with an air guide notch. According to the ceramic substrate and the capacitive pressure sensor provided by the invention, a unique annular supporting structure and an integral forming technology are adopted, so that the phenomena of machining error accumulation and mechanical lag caused by expansion coefficient difference of parts made of different materials are avoided, the measurement precision and the measurement repeatability are remarkably improved, and the ceramic substrate and the capacitive pressure sensor are simple in preparation process and low in cost. The method is suitable for large-scale popularization.

The invention relates to the technical field of dielectric layers, in particular to a microstructure composite dielectric layer and a preparation method and application thereof. The preparation method comprises the following steps: S1, scanning a PI film by using laser to serve as an LIG template; s2, slowly adding the carbon nanotube dispersion liquid into the polydimethylsiloxane prepolymer, fully stirring and dispersing, then adding a curing agent, and continuously stirring to obtain a stable SWCNT / PDMS composite solution; and S3, uniformly spreading the SWCNT / PDMS composite solution on the surface of the LIG template, carrying out thermosetting treatment, cooling to room temperature, and stripping a formed SWCNT / PDMS film to obtain the microstructure composite dielectric layer. The novel method for manufacturing the capacitive pressure sensor is adjustable in structural parameters, simple and convenient in preparation process, high in repeatability, suitable for large-area preparation of the flexible substrate and capable of achieving high sensitivity, low detection limit and excellent cycle stability.

The invention discloses a flexible capacitive pressure sensor and a preparation method, and relates to the technical field of flexible capacitive pressure sensors.The flexible capacitive pressure sensor comprises a shell, a second binding post arranged at one end of the shell, a shell cover arranged at the other end of the shell and a first binding post arranged on the shell cover, an upper packaging layer is arranged in the shell, an upper electrode layer is arranged on one side of the upper packaging layer, and a lower electrode layer is arranged on the other side of the upper packaging layer; a middle dielectric layer is arranged on one side of the upper electrode layer, a lower electrode layer is arranged on one side of the middle dielectric layer, and a lower packaging layer is arranged on one side of the lower electrode layer; conductive film structures are arranged between the lower electrode layer and the middle dielectric layer and between the upper electrode layer and the middle dielectric layer; a sealing assembly is arranged in the shell cover; an extrusion assembly is further arranged in the shell cover; by using the sealing assembly, the sealing performance between the shell and the shell cover is improved, external moisture and dust are prevented from entering the shell, the accuracy of capacitance measurement is improved, and the service life of the flexible capacitive pressure sensor is further prolonged.

Method for manufacturing a micro-electro-mechanical system, MEMS, integrating a first MEMS device and a second MEMS device. The first MEMS device is a capacitive pressure sensor and the second MEMS device is an inertial sensor. The steps of manufacturing the first and second MEMS devices are, at least partly, shared with each other, resulting in a high degree of integration on a single die, and allowing to implement a manufacturing process with high yield and controlled costs.

The invention provides a comb tooth capacitive pressure sensor and a preparation method thereof, and belongs to the technical field of capacitive pressure sensors. The fixing frame is connected with the substrate through an insulating layer, a containing area is formed in the fixing frame, and a pressure sensing film is formed on the portion, corresponding to the containing area, of the substrate; the multiple fixed comb teeth are arranged in the containing area, and a gap is formed between each fixed comb tooth and the pressure sensing film; the plurality of movable comb teeth are arranged in the accommodating area, and each movable comb tooth is connected with the pressure sensing film through an insulating layer; the movable comb teeth and the fixed comb teeth are alternately arranged in the containing area in the first direction, and the orthographic projection of the movable comb teeth on the first plane and the orthographic projection of the fixed comb teeth on the first plane are at least partially overlapped. According to the comb tooth capacitive pressure sensor and the preparation method thereof provided by the invention, the linearity and sensitivity of capacitance measurement of the comb tooth capacitive pressure sensor can be improved.

Capacitive pressure sensor with a pressure measuring cell (10) for detecting the pressure of a medium in a container and an evaluation circuit (30) for preparing and processing the measuring signals transmitted by the pressure measuring cell (10), wherein the pressure measuring cell (10) has a pressure-sensitive measuring capacitor (C M ) and a reference capacitor (C R ) and the pressure measuring cell (10) is connected to the evaluation circuit (30) via three lines (L1, L2, L3), wherein a first line (L1) is connected to a common electrode (COM) of measuring capacitor (C M ) and reference capacitor (C R ), a second line (L2) to the measuring capacitor (C M ) and a third line (L3) to the reference capacitor (C R ) leads, wherein the evaluation circuit (30) comprises a first operational amplifier (OP1), the low-impedance output of which is connected to the common electrode (COM) via the first line (L1), characterized by that the common electrode (COM) is used in addition to the temperature measurement of the medium applied to the pressure measuring cell (10) and the temperature measurement is carried out exclusively via the common electrode (COM), in that the common electrode (COM) is connected to a fourth line (L4) in addition to the third line (L3), by means of the third and fourth lines (L3, L4) the voltage drop across the common electrode (COM) is tapped and fed to an evaluation unit (AWE), and that at the output of the evaluation unit (AWE) a voltage signal U Temp corresponding to the temperature detected by the common electrode (COM), wherein the common electrode (COM) is designed as a meandering resistance track and the pressure sensor (1) comprises a constant current regulator (KSR), by means of which the common electrode (COM) is supplied with a constant current I via a fourth line (L4) konst is applied, whereby the constant current I konst from the output of the first operational amplifier (OP1), so that the course of the tapped voltage only depends on the medium temperature.

A nano-scale capacitive pressure sensor formed of an array of capacitive pressure cells is disclosed. The capacitive pressure sensor is integrated with an ASIC working as a pressure sensor and a PUF. Each of capacitive pressure cells is a hermetically sealed cavity and includes a first stationary conductive membrane and a second conductive membrane that deflects due to a force (pressure change) applied on the array of capacitive pressure sensor cells. A method of manufacturing the nano-scale capacitive pressure sensor is also disclosed.

The invention relates to the technical field of capacitive pressure sensors, and provides an absolute pressure sensitive structure manufacturing method and an absolute pressure sensitive structure, and the method comprises the steps: printing glass slurry on an upper substrate and a lower substrate based on screen printing; pre-sintering the upper substrate sheet and the lower substrate sheet; aligning and pre-fixing the upper substrate sheet, the pressure sensing film sheet and the lower substrate sheet; carrying out vacuum sintering on the pre-fixed upper substrate sheet, the pre-fixed pressure sensing diaphragm and the pre-fixed lower substrate sheet; and cutting up the bonded upper substrate sheet, the pressure sensing film sheet and the lower substrate sheet to form an absolute pressure sensitive structure bare chip. On the basis of a glass slurry bonding mode, by utilizing the printing accuracy of silk-screen printing and accurate control over the boundary of glass slurry, the structural strength and sealing degree of bonding are ensured, the stability and reliability of the structure are improved, a large number of metal materials do not need to be used, the implementation cost is reduced, the production efficiency is high, and the repeatability is high; and the production yield can be guaranteed.

The invention discloses a capacitive pressure sensor and a dual-mechanism relay sensing method thereof. The sensor comprises a dielectric layer and an electrode layer, the dielectric layer comprises a first end face, a second end face and an elastic supporting structure, and the elastic supporting structure is arranged between the first end face and the second end face, so that an air gap exists in the dielectric layer; the electrode layers are of a porous structure and are arranged on the first end face and the second end face respectively. Any end face of the dielectric layer is provided with ion conductive gel, the ion conductive gel is in contact with the electrode layer arranged on the end face, and the thickness of the ion conductive gel is smaller than that of an air gap in the dielectric layer, so that a gap exists between the ion conductive gel and the electrode layer arranged on the other end face of the dielectric layer; when the sensor is pressed, the elastic supporting structure deforms, so that the distance between the two electrode layers is gradually reduced until the ion conductive gel is in contact with the electrode layer arranged on the other end face of the dielectric layer, and the relay between a traditional capacitance sensing mechanism and an ion electronic sensing mechanism is completed.

The present invention belongs to the field of flexible sensor technology, specifically relating to a capacitive pressure sensor and a dual-mode pressure sensor based on laser direct writing, as well as their preparation methods and applications. The capacitive pressure sensor comprises two identical composite electrodes; the composite electrodes are produced by secondary laser direct writing onto a PDMS layer in a resistive pressure sensor. The resistive pressure sensor comprises a Kevlar / graphene substrate layer and a PDMS layer; the PDMS layer is coated on the graphene surface of the Kevlar / graphene substrate layer; the Kevlar / graphene substrate layer is formed by laser direct writing onto the surface of a Kevlar fabric. The dual-mode pressure sensor comprises the capacitive pressure sensor and the resistive pressure sensor.

The present application relates to a capacitive pressure sensor and a manufacturing method therefor. The capacitive pressure sensor comprises: a substrate; a variable capacitor located on the substrate; and a reference capacitor located on the substrate on one side of the variable capacitor. The variable capacitor and the reference capacitor both comprise a bottom electrode, a top electrode, and a capacitor dielectric located between the bottom electrode and the top electrode. The capacitor dielectric of the variable capacitor comprises an air cavity, and the capacitor dielectric of the reference capacitor comprises a dielectric layer provided with an air groove. The capacitive pressure sensor of the present application comprises the variable capacitor and the reference capacitor at the same time, thereby adding the calibration function, and improving the test precision of the capacitive pressure sensor; the air groove is formed in the dielectric layer of the reference capacitor, so that the capacitance of the reference capacitor can be adjusted by changing the size of the air groove, thereby improving the controllability of the reference capacitor; and since the controllability of the reference capacitor is high, by accurately controlling the reference capacitor according to requirements, the test precision of the capacitive pressure sensor can be improved.

The invention provides a body weight dynamic measurement method and device, and belongs to the field of body weight measurement, and the measurement method comprises the steps: S1, collecting pressure data through a shoe pad provided with a plurality of capacitive pressure sensors, correcting the data collected by the shoe pad through a predetermined correction factor, and obtaining a training data set; s2, a neural network is constructed, the neural network comprises a ShuffleNet unit, an AGWO algorithm is utilized to acquire an initialization value of a neural network parameter, and iteration is performed by introducing an augmented Lagrange multiplier ALM model based on the initialization value in combination with the training data set to acquire an optimal neural network parameter; and S3, training the neural network obtained in the step S2 by adopting a training data set so as to enable the loss function to be minimum. According to the invention, the convenience and precision of weight measurement can be improved.

The utility model discloses a turnover device for chip manufacturing production, belonging to the technical field of chip production and manufacturing. It solves the problems that the existing device is difficult to ensure that the bottom surface of the clamped chip and the top surface of the support plate are in the same plane, the position of the support plate is not convenient to adjust, and it is not convenient to support chips at different positions. It includes a bottom plate. A support column is fixedly installed at the rear side of the top surface of the bottom plate. A rotary clamping component is arranged at the top of the support column. A support component is arranged below the rotary clamping component. Through the settings of the second motor, the threaded rod, the slider, the cross plate, the support seat, the capacitive pressure sensor and their connection relationships, the top surface of the support seat can be made to contact the bottom surface of the clamped chip, and then the support seat supports the chip. Through the setting of the capacitive pressure sensor, it is convenient to judge whether the top surface of the support seat contacts the bottom surface of the chip, achieving the purpose of conveniently adjusting the position of the support seat and then supporting chips at different positions.

The utility model relates to a capacitive pressure sensor, which comprises a shell, a main body, an upper polar plate and a lower polar plate, the main body, the upper polar plate and the lower polar plate are arranged in the shell, a pressure sensing diaphragm is arranged on the main body, a middle column is arranged on the pressure sensing diaphragm, a movable polar plate is arranged on the middle column, and the movable polar plate is arranged between the upper polar plate and the lower polar plate. And metal protection rings are arranged on the upper polar plate and the lower polar plate. The differential capacitance principle is adopted, the movable polar plate is connected with the pressure sensing diaphragm through the middle column, and when measured pressure pushes the pressure sensing diaphragm to deform, the pressure sensing diaphragm synchronously pushes the movable polar plate to move between the upper polar plate and the lower polar plate, so that a differential structure is formed; pressure measurement is achieved by measuring capacitance changes formed by the movable polar plate, the upper polar plate and the lower polar plate, and small water level changes are accurately measured under the condition that high sensitivity, high precision and high stability are guaranteed.

The invention provides a capacitive pressure sensor, which comprises an electrode layer and at least one ion electron sensing layer, and a gap is arranged between the sensing area of the ion electron sensing layer and the adjacent electrode layer. According to the invention, the gap is arranged between the sensing area of the ion electron sensing layer in the sensor and the adjacent electrode layer, so that a corresponding space exists to enable the microfibers on the ion electron sensing layer and the electrode layer to move freely, and therefore, under the action of pressure, the microfibers on the ion electron sensing layer and the electrode layer can move freely. The change of the contact area between the ion electron sensing layer and the electrode layer is more obvious, so that the sensitivity and the linearity of the sensor can be improved.

The present application selects foamed silicone rubber as a flexible dielectric layer material in a flexible capacitive pressure sensor, obtaining a high-stability pressure sensor. Further, the thickness of the flexible dielectric layer and the hardness of the foamed silicone rubber are selected to balance high detection sensitivity and high range of the sensor. Still further, the closed-cell structure in the foamed silicone rubber is opened to improve the detection sensitivity of the sensor, and when part of the closed-cell structure in the foamed silicone rubber is opened, not only the detection sensitivity of the sensor is improved, but also the high detection range is balanced. Still further, the cells in the foamed silicone rubber are designed to be arranged in a single layer to improve controllability. Considering that the reversible deformation part of the flexible dielectric layer changes with time during creep, the present application introduces a time parameter, provides a time delay calibration method, and introduces a time parameter in actual pressure detection for dynamic pressure detection, which can further improve the stability of the sensor.