122 results about "Capacitive pressure sensor" patented technology

The invention discloses a ceramic capacitive pressure sensor, which comprises a packaging shell, a commercial small circular shell is arranged on the packaging shell, a copper pipe is arranged on one side, far away from the packaging shell, of the commercial small circular shell, an electronic wire is arranged on the packaging shell in a penetrating manner, and the electronic wire is connected with the packaging shell. The insulating paper, the inner copper body and the check ring are integrally designed into the combined base with the PPS and the glass fiber wrapping the SUS metal inner container, a traditional multi-part manual assembly structure is replaced, and compared with the scheme that in the prior art, insulating paper and an inner copper body shielding cover need to be bonded, the number of parts is reduced, and the cost is reduced. The cost is reduced, meanwhile, automatic injection molding is achieved, manual assembly errors are avoided, the assembly efficiency is improved, the compression strength of the PPS composite reinforcing material is improved compared with that of traditional insulation paper, and the reliability in the high-pressure-resistant environment is ensured.

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

The invention relates to the technical field of dielectric layers, in particular to a microstructure composite dielectric layer and a preparation method and application thereof. The preparation method comprises the following steps: S1, scanning a PI film by using laser to serve as an LIG template; s2, slowly adding the carbon nanotube dispersion liquid into the polydimethylsiloxane prepolymer, fully stirring and dispersing, then adding a curing agent, and continuously stirring to obtain a stable SWCNT / PDMS composite solution; and S3, uniformly spreading the SWCNT / PDMS composite solution on the surface of the LIG template, carrying out thermosetting treatment, cooling to room temperature, and stripping a formed SWCNT / PDMS film to obtain the microstructure composite dielectric layer. The novel method for manufacturing the capacitive pressure sensor is adjustable in structural parameters, simple and convenient in preparation process, high in repeatability, suitable for large-area preparation of the flexible substrate and capable of achieving high sensitivity, low detection limit and excellent cycle stability.

The invention discloses a flexible capacitive pressure sensor and a preparation method, and relates to the technical field of flexible capacitive pressure sensors.The flexible capacitive pressure sensor comprises a shell, a second binding post arranged at one end of the shell, a shell cover arranged at the other end of the shell and a first binding post arranged on the shell cover, an upper packaging layer is arranged in the shell, an upper electrode layer is arranged on one side of the upper packaging layer, and a lower electrode layer is arranged on the other side of the upper packaging layer; a middle dielectric layer is arranged on one side of the upper electrode layer, a lower electrode layer is arranged on one side of the middle dielectric layer, and a lower packaging layer is arranged on one side of the lower electrode layer; conductive film structures are arranged between the lower electrode layer and the middle dielectric layer and between the upper electrode layer and the middle dielectric layer; a sealing assembly is arranged in the shell cover; an extrusion assembly is further arranged in the shell cover; by using the sealing assembly, the sealing performance between the shell and the shell cover is improved, external moisture and dust are prevented from entering the shell, the accuracy of capacitance measurement is improved, and the service life of the flexible capacitive pressure sensor is further prolonged.

Method for manufacturing a micro-electro-mechanical system, MEMS, integrating a first MEMS device and a second MEMS device. The first MEMS device is a capacitive pressure sensor and the second MEMS device is an inertial sensor. The steps of manufacturing the first and second MEMS devices are, at least partly, shared with each other, resulting in a high degree of integration on a single die, and allowing to implement a manufacturing process with high yield and controlled costs.

The invention provides a comb tooth capacitive pressure sensor and a preparation method thereof, and belongs to the technical field of capacitive pressure sensors. The fixing frame is connected with the substrate through an insulating layer, a containing area is formed in the fixing frame, and a pressure sensing film is formed on the portion, corresponding to the containing area, of the substrate; the multiple fixed comb teeth are arranged in the containing area, and a gap is formed between each fixed comb tooth and the pressure sensing film; the plurality of movable comb teeth are arranged in the accommodating area, and each movable comb tooth is connected with the pressure sensing film through an insulating layer; the movable comb teeth and the fixed comb teeth are alternately arranged in the containing area in the first direction, and the orthographic projection of the movable comb teeth on the first plane and the orthographic projection of the fixed comb teeth on the first plane are at least partially overlapped. According to the comb tooth capacitive pressure sensor and the preparation method thereof provided by the invention, the linearity and sensitivity of capacitance measurement of the comb tooth capacitive pressure sensor can be improved.

A nano-scale capacitive pressure sensor formed of an array of capacitive pressure cells is disclosed. The capacitive pressure sensor is integrated with an ASIC working as a pressure sensor and a PUF. Each of capacitive pressure cells is a hermetically sealed cavity and includes a first stationary conductive membrane and a second conductive membrane that deflects due to a force (pressure change) applied on the array of capacitive pressure sensor cells. A method of manufacturing the nano-scale capacitive pressure sensor is also disclosed.

The invention provides a body weight dynamic measurement method and device, and belongs to the field of body weight measurement, and the measurement method comprises the steps: S1, collecting pressure data through a shoe pad provided with a plurality of capacitive pressure sensors, correcting the data collected by the shoe pad through a predetermined correction factor, and obtaining a training data set; s2, a neural network is constructed, the neural network comprises a ShuffleNet unit, an AGWO algorithm is utilized to acquire an initialization value of a neural network parameter, and iteration is performed by introducing an augmented Lagrange multiplier ALM model based on the initialization value in combination with the training data set to acquire an optimal neural network parameter; and S3, training the neural network obtained in the step S2 by adopting a training data set so as to enable the loss function to be minimum. According to the invention, the convenience and precision of weight measurement can be improved.

The utility model discloses a turnover device for chip manufacturing production, belonging to the technical field of chip production and manufacturing. It solves the problems that the existing device is difficult to ensure that the bottom surface of the clamped chip and the top surface of the support plate are in the same plane, the position of the support plate is not convenient to adjust, and it is not convenient to support chips at different positions. It includes a bottom plate. A support column is fixedly installed at the rear side of the top surface of the bottom plate. A rotary clamping component is arranged at the top of the support column. A support component is arranged below the rotary clamping component. Through the settings of the second motor, the threaded rod, the slider, the cross plate, the support seat, the capacitive pressure sensor and their connection relationships, the top surface of the support seat can be made to contact the bottom surface of the clamped chip, and then the support seat supports the chip. Through the setting of the capacitive pressure sensor, it is convenient to judge whether the top surface of the support seat contacts the bottom surface of the chip, achieving the purpose of conveniently adjusting the position of the support seat and then supporting chips at different positions.

The invention provides a capacitive pressure sensor, which comprises an electrode layer and at least one ion electron sensing layer, and a gap is arranged between the sensing area of the ion electron sensing layer and the adjacent electrode layer. According to the invention, the gap is arranged between the sensing area of the ion electron sensing layer in the sensor and the adjacent electrode layer, so that a corresponding space exists to enable the microfibers on the ion electron sensing layer and the electrode layer to move freely, and therefore, under the action of pressure, the microfibers on the ion electron sensing layer and the electrode layer can move freely. The change of the contact area between the ion electron sensing layer and the electrode layer is more obvious, so that the sensitivity and the linearity of the sensor can be improved.

The present application selects foamed silicone rubber as a flexible dielectric layer material in a flexible capacitive pressure sensor, obtaining a high-stability pressure sensor. Further, the thickness of the flexible dielectric layer and the hardness of the foamed silicone rubber are selected to balance high detection sensitivity and high range of the sensor. Still further, the closed-cell structure in the foamed silicone rubber is opened to improve the detection sensitivity of the sensor, and when part of the closed-cell structure in the foamed silicone rubber is opened, not only the detection sensitivity of the sensor is improved, but also the high detection range is balanced. Still further, the cells in the foamed silicone rubber are designed to be arranged in a single layer to improve controllability. Considering that the reversible deformation part of the flexible dielectric layer changes with time during creep, the present application introduces a time parameter, provides a time delay calibration method, and introduces a time parameter in actual pressure detection for dynamic pressure detection, which can further improve the stability of the sensor.

The invention provides a direct bonding-based differential capacitive pressure sensor and a pressure detection method. The direct bonding-based differential capacitive pressure sensor comprises a metal base, a sapphire diaphragm and a sapphire fixed electrode plate, the sapphire diaphragm is fixedly connected to the metal base through a direct bonding process; the sapphire fixed electrode plate is fixedly connected to the sapphire diaphragm through a direct bonding process, and a capacitance gap with a preset distance is formed between the sapphire fixed electrode plate and the sapphire diaphragm; the sapphire diaphragm and the sapphire fixed electrode plate are respectively provided with a plurality of corresponding electrodes to form a differential capacitor structure; the difference value of the material thermal expansion coefficients of the metal base and the sapphire is smaller than a preset threshold value. The differential capacitive pressure sensor has relatively low sealing stress and relatively small temperature excursion, and the distance control precision between the diaphragm and the fixed electrode plate is ensured, so that the inherent precision of the pressure sensor is improved.

Disclosed is an implant and method of making an implant. The implant having a housing that defines a cavity. The housing includes a sensor comprising a base attached to a diaphragm wherein said base may be positioned within said cavity. The sensor may be a capacitive pressure sensor. The diaphragm may be connected to the housing to hermetically seal said housing. The sensor may include electrical contacts positioned on the diaphragm. The attachment between the base and the diaphragm may define a capacitive gap and at least one discontinuity configured to enhance at least one performance parameter of said implant.

Disclosed example pressure sensors include: a first body defining a reference pressure cavity; a second body defining a measured pressure cavity and having an inlet configured to receive a fluid; a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less; an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm; and measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.

The application discloses a pressure detection method of a capacitive pressure sensor based on a multi-plate array, comprising a substrate, a multi-plate array, an independent conductive plate and a signal processing unit; the upper surface of the substrate is provided with the multi-plate array, a flexible rubber layer is covered above the multi-plate array, and the independent conductive plate is embedded in the flexible rubber layer; a plurality of single plates in the multi-plate array share one independent conductive plate, thereby forming a plurality of capacitive units; in an initial pressure-free state, the capacitance values of the plurality of capacitive units are symmetrical, and a signal processing module records the initial capacitance value of each capacitive unit; when the flexible rubber layer is pressed by external force, the signal processing module detects the capacitance value of each capacitive unit in the plurality of capacitive units in real time; the capacitance change amount of the current capacitance value of each capacitive unit relative to the initial capacitance value is calculated, and the direction of the pressure and the size of the pressure are judged.

The invention relates to a method (2000, 3000, 4000) for calibrating a posture / gait analysis system (1). The system (1) comprises an insole (2) equipped with a plurality of capacitive pressure sensors (4), and a control unit (5) connected to the pressure sensors (4). The method includes the following steps. First, signals provided by a pressure sensor (4) are acquired (2000), said sensor being subjected to a pressure varying between a first value and a second value, where each signal is indicative of a capacity value of the sensor, which capacity value depends on the pressure applied thereto. For each pressure sensor, a polynomial relationship is to be defined between an estimate of the pressure experienced by the sensor (4) and a change in the capacity of the sensor; a plurality of sets of coefficients of a polynomial are calculated (3001-3011) that minimize a norm of a residual between the pressure estimate and a corresponding pressure applied on the sensor (4), wherein each set of coefficients is calculated for a polynomial relationship between a minimum order and an optimized maximum order. An averaging of the minimization results obtained by each sensor for the same order of the polynomial relationship is then performed (3011). The set of coefficients and respective orders of the polynomial relationship associated with the minimum value between the calculated averages are selected (3012, 3013) and stored (3014, 3015) in the control unit (5).

Disclosed example pressure sensors include: a first body defining a reference pressure cavity; a second body defining a measured pressure cavity and having an inlet configured to receive a fluid; a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less; an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm; and measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.

The invention belongs to the technical field of vacuum metering, and particularly relates to a capacitive pressure sensor capable of reducing welding stress of a pressure sensing diaphragm. The pressure sensing diaphragm of the capacitive pressure sensor is welded between a measuring cavity rack and a pressure sensing diaphragm rack; and welding stress release grooves are formed in the outer peripheral surfaces of the measuring cavity rack and the pressure sensing diaphragm rack close to one end needing to be welded with the pressure sensing diaphragm. Compared with a traditional capacitive pressure sensor, the capacitive pressure sensor has the advantages that the influence of the welding stress of the pressure sensing diaphragm on the deformation of the thin film is avoided, so that the measurement precision and accuracy are improved.

The utility model provides a kind of integrated pressure-sensing heating film, include structure: flexible dielectric layer;The interdigitated electrode layer of attachment in the dielectric layer one side, the interdigitated electrode respectively leads out electric property, a electrode electrically grounded, another root adds voltage;The electrode array layer of attachment in the dielectric layer other side, evenly distribute in flexible dielectric layer each area and lead to port, respectively test each area and the potential difference change of ground electrode in interdigitated electrode layer;PPTC film layer is attached on the interdigitated electrode layer, and realize surface heating by the potential difference of the interdigitated electrode conduction;Heat-conducting insulating film layer is respectively attached on the PPTC film layer and the electrode array layer.The utility model compactly integrates self-limiting temperature heating function PPTC device and capacitive pressure sensor, flexible and foldable, heating function and area pressure monitoring function integration degree is high, help the safety and light weight of power battery.

This invention relates to the field of pressure sensors and discloses a dual-cavity capacitive pressure sensor, comprising: a pressure-sensing layer, a first capacitor cavity, a second capacitor cavity, and a substrate; the pressure-sensing layer is sealed on the upper side of the substrate; the pressure-sensing layer has a first capacitor cavity and a second capacitor cavity spaced apart on the side near the substrate; a first upper electrode and a second upper electrode are respectively disposed on the top of the first capacitor cavity and the second capacitor cavity; a first lower electrode and a second lower electrode are respectively disposed on the upper side of the substrate corresponding to the positions of the first capacitor cavity and the second capacitor cavity; the substrate has a through hole for connecting to the outside. The dual-cavity design, combined with the dual concave cavity configuration, ensures that the deformation of the cavity under pressure is effectively transmitted to the capacitance change, enabling precise capture of minute pressure changes, and is suitable for high-precision measurement applications.

This invention discloses a MEMS capacitive pressure sensor structure and its manufacturing method, belonging to the field of pressure sensor technology. It employs a planar capacitor structure, where a doped layer is formed on a substrate to create the lower electrode of the capacitive pressure sensor. Multiple structural layers are deposited on this doped layer to form the upper electrode. A first insulating dielectric layer and a cavity are disposed between the upper and lower electrodes, from bottom to top. This invention features a simple structure and convenient fabrication. Furthermore, the entire fabrication process is performed on the front side of the substrate, a planar process, eliminating the need for front-back alignment and facilitating single-chip integration with CMOS technology.

The present application relates to the technical field of pressure sensors. Disclosed are a capacitive pressure sensor, and a pressure measurement device. The capacitive pressure sensor mainly comprises: a fixed electrode layer, an insulating layer and a variable electrode layer, wherein the insulating layer is arranged at the upper end of the fixed electrode layer, and the upper surface of the insulating layer is provided with a groove; the variable electrode layer seals an opening of the groove to form a sealed cavity, and the fixed electrode layer and the variable electrode layer form a variable capacitor; and a response of the variable electrode layer and the sealed cavity to an air pressure is determined on the basis of sensitivity per unit area, a degree of deformation of the variable electrode layer is determined on the basis of the response of the variable electrode layer and the sealed cavity to the air pressure, a variation in capacitance readings is determined on the basis of the degree of deformation of the variable electrode layer, and an air pressure value is determined on the basis of the variation in capacitance readings. With regard to the capacitive pressure sensor provided in the present application, the performance of the capacitive pressure sensor is dominated by an equivalent spring coefficient of a sealed cavity, improving both the sensitivity and linear measurement range of the capacitive pressure sensor.

The application discloses a multi-diaphragm composite capacitive pressure sensor and relates to the technical field of vacuum measurement.The multi-diaphragm composite capacitive pressure sensor comprises a cavity structure, a plurality of diaphragm mounting portions are arranged on the cavity structure, a plurality of elastic diaphragms are fixedly arranged at the diaphragm mounting portions, the structural parameters of the plurality of elastic diaphragms are different from each other, an electrode structure is arranged in the cavity structure, is located at opposite sides of the plurality of elastic diaphragms, and forms a plurality of capacitive detection gaps between the electrode structure and each elastic diaphragm, so that the electrode structure and each elastic diaphragm respectively form independent capacitive detection units, and the plurality of elastic diaphragms correspond to different deformation intervals respectively.The wide-range pressure measurement is realized in a single sensor, and meanwhile, the high-precision and high-sensitivity vacuum gas pressure measurement is ensured.

The invention discloses a device for improving the pressure detection precision of a capacitive pressure-sensitive touch panel, and relates to the technical field of input equipment. The device comprises a capacitive pressure sensor, a touch control chip, a DC-DC booster circuit and a TX signal amplitude amplification circuit, the touch control chip is connected with the DC-DC booster circuit and the TX signal amplitude amplification circuit, the DC-DC booster circuit is connected with the TX signal amplitude amplification circuit, a TX bonding pad welded to a bonding pad ring is arranged on the back face of a pressure-sensitive touch pad, and the TX bonding pad is connected with the pressure-sensitive touch pad. The TX signal amplitude amplifying circuit is connected with the TX bonding pad and the bonding pad ring, and the RX bonding pad is arranged on the back face of the pressure-sensitive touch pad and connected with the touch control chip. Through the DC-DC booster circuit, the TX signal amplitude amplification circuit and the capacitive pressure sensor for improving the capacitance variation, the sensitivity, consistency and linearity of pressure detection of the capacitive pressure-sensitive touch panel are greatly improved. The device has the functions of pressure sensing detection and touch detection at the same time.

The application discloses a PEDOT:PSS pre-fracture conductive network electrode and a preparation method and a capacitive pressure sensor thereof, and belongs to the technical field of flexible sensors.The preparation method of the PEDOT:PSS pre-fracture conductive network electrode comprises the following steps: uniformly mixing a PEDOT:PSS polymer aqueous solution and an elastomer matrix, adding a conductive reinforcing agent, and forming a PEDOT:PSS double-network film embedded in the elastomer matrix through heat annealing treatment; a strain is applied to the PEDOT:PSS double-network film, so that a conductive network of the PEDOT:PSS double-network film is fractured; and after the strain is released, the PEDOT:PSS double-network film is reorganized into the PEDOT:PSS pre-fracture conductive network electrode under the constraint and rebounding action of the elastomer matrix network.

The application provides a bio-based foam with super resilience and a preparation method thereof. The foam material is composed of fiber raw material, bioactive agent, bio-crosslinking agent and polyvalent metal salt, and the fiber raw material is composed of natural wood fiber and bio-based synthetic fiber. The length of the natural wood fiber is 1-3 mm, the length of the bio-based synthetic fiber is 3-6 mm, and the content of the bio-based synthetic fiber in the fiber raw material is not less than 50 wt%. The foam material significantly improves the resilience, and still maintains excellent strength and original shape after 10000-40000 times of compression, achieving unexpected technical effects. The application also provides a preparation method of the bio-based foam material, which adopts a wet foaming method with simple process, easy amplification and low cost. On this basis, the application also provides an application of the bio-based foam as a dielectric layer of a capacitive pressure sensor, which can realize contact and non-contact sensing of pressure, has wide application prospect and huge economic value.

The utility model discloses a kind of vacuum boxes for cosmetic bottle testing, it is related to cosmetic packaging detection field.A kind of vacuum boxes for cosmetic bottle testing, including box, the box is composed of bottom plate and sealing cover, equidistant fixed connection has multiple rows of positioning slots on the bottom plate, sealing cover is fixedly connected with vacuumizing pipe, further include: sealing washer, it is set on the bottom plate, and located between the outside one circle of multiple positioning slots;Compared with the way that traditional only judges the sealing property by observing bubble through naked eye, the capacitive pressure sensor has good stability, fast response speed, high sensitivity and wide measurement range, can accurately measure the change of air pressure in bottle, even if the bottle leakage point is small, air pressure anomaly can also be accurately detected, effectively avoid the misjudgment caused by naked eye observation not in place or difficult to detect small leakage point, greatly improve the accuracy of cosmetic bottle sealing detection.

The invention relates to a capacitive pressure sensor (10) for capacitively measuring an ambient pressure in a sensor environment (22), comprising a sensor unit (12) with an electrical bridge circuit (18) to which an electrical first input potential (D1) and an electrical second input potential (D2) are applied and from which at least one electrical output potential (S) can be tapped off and which has at least one first measurement capacitance (M1), which can be changed depending on the ambient pressure, between a first electrode (24) and a first counter electrode (26), at least one first reference capacitance (R1), which cannot be changed with respect to the ambient pressure, between a first reference electrode (28) and a first reference counter electrode (30), a first input connection (34) which is at the first input potential (D1), a second input connection (36) which is at the second input potential (D2) and an output connection (38) which is at the output potential (S), the bridge circuit (18) being of symmetrical design at least with respect to a surface of the sensor unit (12) about an axis of symmetry (46) running through the output connection (38).

The invention discloses an underwater sound pressure sensor, a sensor preparation method and an underwater sound monitoring device, and relates to the technical field of underwater sound monitoring. The underwater acoustic pressure sensor comprises an upper-layer plate electrode, a double-sided microstructure dielectric layer and a lower-layer plate electrode which are sequentially arranged from top to bottom, and the upper-layer plate electrode and the lower-layer plate electrode are made of 7wt% carbon nanotube-polydimethylsilane composite materials. The double-sided microstructure dielectric layer is made of a 2wt% carbon nanotube-polydimethylsilane composite material, and convex or concave structures are distributed on the upper surface and the lower surface of the double-sided microstructure. The flexible capacitive pressure sensor is prepared on the basis of the CNTs-PDMS composite material, high sensitivity, fast response and broadband monitoring are achieved through the specific structural design and the preparation method, impedance matching with water sound is achieved, the underwater sound monitoring capacity is improved, and the flexible capacitive pressure sensor has wide application prospects.