61 results about "Capacitive pressure sensor" patented technology

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

Method for manufacturing a micro-electro-mechanical system, MEMS, integrating a first MEMS device and a second MEMS device. The first MEMS device is a capacitive pressure sensor and the second MEMS device is an inertial sensor. The steps of manufacturing the first and second MEMS devices are, at least partly, shared with each other, resulting in a high degree of integration on a single die, and allowing to implement a manufacturing process with high yield and controlled costs.

A nano-scale capacitive pressure sensor formed of an array of capacitive pressure cells is disclosed. The capacitive pressure sensor is integrated with an ASIC working as a pressure sensor and a PUF. Each of capacitive pressure cells is a hermetically sealed cavity and includes a first stationary conductive membrane and a second conductive membrane that deflects due to a force (pressure change) applied on the array of capacitive pressure sensor cells. A method of manufacturing the nano-scale capacitive pressure sensor is also disclosed.

The utility model discloses a turnover device for chip manufacturing production, belonging to the technical field of chip production and manufacturing. It solves the problems that the existing device is difficult to ensure that the bottom surface of the clamped chip and the top surface of the support plate are in the same plane, the position of the support plate is not convenient to adjust, and it is not convenient to support chips at different positions. It includes a bottom plate. A support column is fixedly installed at the rear side of the top surface of the bottom plate. A rotary clamping component is arranged at the top of the support column. A support component is arranged below the rotary clamping component. Through the settings of the second motor, the threaded rod, the slider, the cross plate, the support seat, the capacitive pressure sensor and their connection relationships, the top surface of the support seat can be made to contact the bottom surface of the clamped chip, and then the support seat supports the chip. Through the setting of the capacitive pressure sensor, it is convenient to judge whether the top surface of the support seat contacts the bottom surface of the chip, achieving the purpose of conveniently adjusting the position of the support seat and then supporting chips at different positions.

Disclosed is an implant and method of making an implant. The implant having a housing that defines a cavity. The housing includes a sensor comprising a base attached to a diaphragm wherein said base may be positioned within said cavity. The sensor may be a capacitive pressure sensor. The diaphragm may be connected to the housing to hermetically seal said housing. The sensor may include electrical contacts positioned on the diaphragm. The attachment between the base and the diaphragm may define a capacitive gap and at least one discontinuity configured to enhance at least one performance parameter of said implant.

Disclosed example pressure sensors include: a first body defining a reference pressure cavity; a second body defining a measured pressure cavity and having an inlet configured to receive a fluid; a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less; an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm; and measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.

Disclosed example pressure sensors include: a first body defining a reference pressure cavity; a second body defining a measured pressure cavity and having an inlet configured to receive a fluid; a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less; an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm; and measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.

The utility model provides a kind of integrated pressure-sensing heating film, include structure: flexible dielectric layer;The interdigitated electrode layer of attachment in the dielectric layer one side, the interdigitated electrode respectively leads out electric property, a electrode electrically grounded, another root adds voltage;The electrode array layer of attachment in the dielectric layer other side, evenly distribute in flexible dielectric layer each area and lead to port, respectively test each area and the potential difference change of ground electrode in interdigitated electrode layer;PPTC film layer is attached on the interdigitated electrode layer, and realize surface heating by the potential difference of the interdigitated electrode conduction;Heat-conducting insulating film layer is respectively attached on the PPTC film layer and the electrode array layer.The utility model compactly integrates self-limiting temperature heating function PPTC device and capacitive pressure sensor, flexible and foldable, heating function and area pressure monitoring function integration degree is high, help the safety and light weight of power battery.

This invention relates to the field of pressure sensors and discloses a dual-cavity capacitive pressure sensor, comprising: a pressure-sensing layer, a first capacitor cavity, a second capacitor cavity, and a substrate; the pressure-sensing layer is sealed on the upper side of the substrate; the pressure-sensing layer has a first capacitor cavity and a second capacitor cavity spaced apart on the side near the substrate; a first upper electrode and a second upper electrode are respectively disposed on the top of the first capacitor cavity and the second capacitor cavity; a first lower electrode and a second lower electrode are respectively disposed on the upper side of the substrate corresponding to the positions of the first capacitor cavity and the second capacitor cavity; the substrate has a through hole for connecting to the outside. The dual-cavity design, combined with the dual concave cavity configuration, ensures that the deformation of the cavity under pressure is effectively transmitted to the capacitance change, enabling precise capture of minute pressure changes, and is suitable for high-precision measurement applications.

The present application relates to the technical field of pressure sensors. Disclosed are a capacitive pressure sensor, and a pressure measurement device. The capacitive pressure sensor mainly comprises: a fixed electrode layer, an insulating layer and a variable electrode layer, wherein the insulating layer is arranged at the upper end of the fixed electrode layer, and the upper surface of the insulating layer is provided with a groove; the variable electrode layer seals an opening of the groove to form a sealed cavity, and the fixed electrode layer and the variable electrode layer form a variable capacitor; and a response of the variable electrode layer and the sealed cavity to an air pressure is determined on the basis of sensitivity per unit area, a degree of deformation of the variable electrode layer is determined on the basis of the response of the variable electrode layer and the sealed cavity to the air pressure, a variation in capacitance readings is determined on the basis of the degree of deformation of the variable electrode layer, and an air pressure value is determined on the basis of the variation in capacitance readings. With regard to the capacitive pressure sensor provided in the present application, the performance of the capacitive pressure sensor is dominated by an equivalent spring coefficient of a sealed cavity, improving both the sensitivity and linear measurement range of the capacitive pressure sensor.

The application discloses a multi-diaphragm composite capacitive pressure sensor and relates to the technical field of vacuum measurement.The multi-diaphragm composite capacitive pressure sensor comprises a cavity structure, a plurality of diaphragm mounting portions are arranged on the cavity structure, a plurality of elastic diaphragms are fixedly arranged at the diaphragm mounting portions, the structural parameters of the plurality of elastic diaphragms are different from each other, an electrode structure is arranged in the cavity structure, is located at opposite sides of the plurality of elastic diaphragms, and forms a plurality of capacitive detection gaps between the electrode structure and each elastic diaphragm, so that the electrode structure and each elastic diaphragm respectively form independent capacitive detection units, and the plurality of elastic diaphragms correspond to different deformation intervals respectively.The wide-range pressure measurement is realized in a single sensor, and meanwhile, the high-precision and high-sensitivity vacuum gas pressure measurement is ensured.

The application discloses a PEDOT:PSS pre-fracture conductive network electrode and a preparation method and a capacitive pressure sensor thereof, and belongs to the technical field of flexible sensors.The preparation method of the PEDOT:PSS pre-fracture conductive network electrode comprises the following steps: uniformly mixing a PEDOT:PSS polymer aqueous solution and an elastomer matrix, adding a conductive reinforcing agent, and forming a PEDOT:PSS double-network film embedded in the elastomer matrix through heat annealing treatment; a strain is applied to the PEDOT:PSS double-network film, so that a conductive network of the PEDOT:PSS double-network film is fractured; and after the strain is released, the PEDOT:PSS double-network film is reorganized into the PEDOT:PSS pre-fracture conductive network electrode under the constraint and rebounding action of the elastomer matrix network.

The utility model discloses a kind of vacuum boxes for cosmetic bottle testing, it is related to cosmetic packaging detection field.A kind of vacuum boxes for cosmetic bottle testing, including box, the box is composed of bottom plate and sealing cover, equidistant fixed connection has multiple rows of positioning slots on the bottom plate, sealing cover is fixedly connected with vacuumizing pipe, further include: sealing washer, it is set on the bottom plate, and located between the outside one circle of multiple positioning slots;Compared with the way that traditional only judges the sealing property by observing bubble through naked eye, the capacitive pressure sensor has good stability, fast response speed, high sensitivity and wide measurement range, can accurately measure the change of air pressure in bottle, even if the bottle leakage point is small, air pressure anomaly can also be accurately detected, effectively avoid the misjudgment caused by naked eye observation not in place or difficult to detect small leakage point, greatly improve the accuracy of cosmetic bottle sealing detection.

The utility model discloses a capacitive pressure measuring device, which relates to the technical field of capacitive pressure sensors and comprises an outer shell. A variable capacitance pressure sensing element is arranged on the inner side of the base, a protection frame is fixedly connected to the inner side of the bottom end of the base, an inner groove is formed in the inner side of the protection frame, and the variable capacitance pressure sensing element is arranged on the inner side of the inner groove; and a rubber pad is arranged on one side of the inner side of the inner groove. According to the utility model, the variable capacitance pressure sensing element and the protection frame are arranged, the variable capacitance pressure sensing element can be arranged on the inner side of the protection frame, and the pressing plate is arranged on one side of the protection frame, so that the variable capacitance pressure sensing element can be effectively pressed on the inner side of the protection frame; the top plate is fixedly installed through the fastening bolt, when the variable capacitance pressure sensing element needs to be rapidly replaced, the top plate can be conveniently taken down, and meanwhile, the pressing of the pressing plate is relieved, so that the variable capacitance pressure sensing element can be conveniently and rapidly replaced.

The application discloses a micro capacitive pressure sensor and a preparation method thereof, and relates to the technical field of sensors.The sensor comprises, from top to bottom, an upper electrode metal layer, a single crystal silicon film layer, a vacuum cavity, a silicon dioxide insulating layer, a single crystal silicon substrate and a lower electrode metal layer; the vacuum cavity is a concave arc-shaped closed cavity formed by bonding the single crystal silicon film layer and the silicon dioxide insulating layer together; and the structure greatly improves the linearity and sensitivity of the micro capacitive pressure sensor.

The temperature and pressure in-situ measurement flexible sensor comprises a transparent substrate, a sacrificial layer, a lower electrode layer, a piezoelectric layer, an upper electrode layer and a substrate layer which are sequentially arranged, the substrate layer is made of flexible materials, a metal electrode pattern is etched on the lower electrode layer, a pin A is arranged on the lower electrode layer, a metal electrode pattern is etched on the upper electrode layer, and a pin B is arranged on the pin A; a pin B and a pin C are arranged, and all the pins are connected with the lead; when the flexible sensor is attached to an object to be measured, the upper electrode layer serves as a thermal resistance type temperature sensor to perform in-situ measurement on temperature and transmits temperature signals through the pin B and the pin C. The lower electrode layer, the piezoelectric layer and the upper electrode layer form a capacitive pressure sensor to perform in-situ measurement on pressure. And the pressure signal is transmitted through the pin A and the pin B or the pin C. The device has the advantages of being compact in structure, small in size, convenient to disassemble and assemble and the like, and the requirement for in-situ measurement of the surface temperature and pressure of a complex curved surface is met.

The invention relates to a method for adjusting a trigger threshold value of a capacitive pressure sensor, wherein the capacitive pressure sensor comprises an operation panel for pressing. The method comprises the following steps: applying a plurality of test presses on the operation panel with the same force; determining test distances from the position of the test press to a reference position, wherein the test distances have different lengths; determining a test capacitance value caused by the test pressing; fitting a function relationship between the test capacitance value and the test distance according to the trend of the test capacitance value along with the test distance; and determining the trigger threshold according to the distance from each position on the operation panel to the reference position by using the function relationship. The invention further relates to a capacitive pressure sensor and to a method for determining whether a pressing operation on a capacitive pressure sensor is valid.

The invention discloses a signal-drift-free and low-lag ionization type capacitance pressure sensor and a preparation method and application thereof. The ionization type capacitance pressure sensor comprises a capacitance medium and substrates which are attached to the upper surface and the lower surface of the capacitance medium and comprise electrodes. The capacitor medium takes silicone rubber foam as a matrix, the surface of the silicone rubber foam is uniformly coated with a layer of polydopamine, the polydopamine is combined on the surface of the silicone rubber foam through multi-covalent and non-covalent interaction, and a bis (fluorosulfonyl) imide ion layer is formed on the surface of the polydopamine through protonation and ion exchange. The ionizing capacitive pressure sensor provided by the invention shows excellent detection performance in a wider pressure range, is high in sensitivity, high in response speed, good in long-term stability, capable of working in a wider temperature range and good in high and low temperature resistance stability, and the stability is remarkably superior to that of a traditional ion electronic sensor; and a solid foundation is laid for the development of real-time physiological signal monitoring and intelligent man-machine interaction systems.

A glass wafer is provided that includes a sheetlike glass substrate with an opening. The sheetlike glass substrate is configured for use in a sensor selected from a group consisting of a pressure sensor, a piezoresistive sensor, a capacitive pressure sensor, and a piezoresistive pressure sensor. The opening is defined in the glass substrate from a first surface to a second, opposite surface. The opening has a cross-sectional area that is delimited by a straight portion having a minimum length of at least 10 μm and a side face with a surface characterized by a skewness (Ssk) of at most 5.0.

The utility model discloses a temperature and pressure instant induction ceramic capacitive pressure sensor, which comprises a ceramic base, a glass sealing layer, a ceramic induction diaphragm, an upper electrode, a lower electrode, at least two pressure pins, at least two pressure interfaces, a plurality of groups of temperature pins and a plurality of temperature interfaces which are sequentially arranged from bottom to top, the upper electrode is arranged on the surface of the bottom of the ceramic sensing diaphragm, and the lower electrode is arranged on the surface of the top of the ceramic base; the two pressure guide needles penetrate through the ceramic base and are downwards led out to form a pressure interface; the upper parts and the lower parts of the group of temperature guide pins are connected through wires. The pressure sensor and the temperature sensor are integrated, so that the pressure sensor can be used for pressure detection and temperature detection, and is convenient to use and wide in application range.

This disclosure relates to a method for manufacturing microelectromechanical devices (MEMS). The method includes the following steps: forming a first protective layer of HF-impermeable crystalline alumina on a substrate; forming a sacrificial layer of HF-removable silicon oxide on the first protective layer; forming a second protective layer of crystalline alumina on the sacrificial layer; exposing a sacrificial portion of the sacrificial layer; forming a first film layer of HF-permeable porous material on the sacrificial portion; removing the sacrificial portion through the first film layer to form a cavity; and sealing the pores of the first film layer by forming a second film layer on the first film layer.

The invention discloses an intelligent correction system based on pressure-action correlation analysis. The intelligent correction system comprises a flexible sensing insole body, an energy autonomous module, a microprocessor control module, an intelligent analysis module and a real-time display and feedback module. The flexible sensing insole main body is provided with N pressure monitoring areas, each pressure monitoring area is integrated with a flexible capacitive pressure sensor to form an N-channel pressure sensing array, the microprocessor control module is connected with the N-channel pressure sensing array and the energy autonomous module, and the energy autonomous module is connected with the microprocessor control module. The microprocessor control module is connected with the intelligent analysis module and the real-time display and feedback module. The system can integrate the functions of high-precision flexible sensing, autonomous energy supply, intelligent gait analysis and real-time correction feedback.

This invention discloses a flexible capacitive pressure sensor and its fabrication method. The fabrication method includes the following steps: S1. Fabrication of breathable flexible electrodes: A porous and breathable TPU film is prepared using the breath diagram method, and then a conductive layer is formed on the upper surface of the TPU film using silver nanowire ink; S2. Fabrication of a sponge-like insulating dielectric layer: Mxene nanosheets and silane-modified cellulose nanocrystals are ultrasonically dispersed in anhydrous ethanol to obtain a dispersion, then PDMS base liquid, PDMS curing agent, and foaming agent are added, mixed evenly, poured into a film-forming mold, and heated to cure into a film; S3. Composite encapsulation: The breathable flexible electrodes are respectively adhered and fixed to the upper and lower surfaces of the sponge-like insulating dielectric layer by a flexible epoxy resin adhesive coated around the perimeter. The advantages of this invention are that the fabrication method is simple and low-cost; the resulting flexible capacitive pressure sensor can simultaneously achieve good breathability and a wide range of pressure sensing performance.

The invention relates to the technical field of sensors, and provides a thin-film capacitive pressure sensor, which comprises a metal shell provided with an accommodating space, the bottom of the accommodating space is provided with a support connecting part, and the support connecting part is provided with a gas channel for introducing to-be-detected gas; the core structure is arranged in the accommodating space and comprises an electrode plate, an elastic film and a connecting layer which are sequentially arranged at intervals, the connecting layer is connected with the supporting connecting part, the electrode plate, the elastic film and the connecting layer are sealed through a seal welding area to form a plate capacitor, and a first vacuum reference cavity is formed between the electrode plate and the elastic film; a process cavity is defined by the elastic film and the connecting layer and is communicated with the gas channel; the problem of thermal stress mismatch and the problem of sensor temperature drift caused by mismatch of thermal expansion coefficients are solved.

The invention discloses a low-cost non-gold electrode pressure core body, a manufacturing method and a pressure sensor, and relates to the technical field of pressure core bodies, the low-cost non-gold electrode pressure core body comprises a ceramic base, an elastic membrane, a silk-screen electrode, sealing glass and a PIN needle; the opposite surfaces of the ceramic base and the elastic diaphragm are respectively provided with a silk-screen electrode, and sealing glass is used for sealing in the sintering process to form a capacitance cavity for pressure measurement; the PINs penetrate through the back face of the ceramic base and are connected with the silk-screen electrodes in a conducting mode. The silk-screen electrode is made of organic slurry containing platinum, palladium or alloy thereof, and a conductive film layer is formed after sintering; compared with a traditional gold electrode and silver electrode structure, the structure can maintain the stability of long-term output of a pressure signal, remarkably reduces the cost of an electrode material, has good sintering compatibility, chemical stability and mechanical reliability, and can be widely applied to capacitive pressure sensors, such as capacitive pressure sensors. The device is suitable for pressure measurement in high-temperature, high-humidity and temperature circulation environments.

This invention relates to the field of flexible electronics technology, and in particular to a multimodal flexible sensor based on liquid metal and its fabrication method. The flexible sensor comprises, from bottom to top: a Y-axis strain sensing layer, an X-axis strain sensing layer, a lower electrode array layer, a micropillar dielectric layer, and an upper electrode array layer; wherein the lower electrode array layer, the micropillar dielectric layer, and the upper electrode array layer together form a capacitive pressure sensor. This invention combines an X-axis strain sensor, a Y-axis strain sensor, and a pressure sensor to form a multimodal flexible sensor, effectively expanding the sensor's application range. Furthermore, the use of a vertical stacking method makes the multimodal sensor structure compact. Simultaneously, the sensor of this invention has high sensitivity and detection accuracy, and also possesses good portability and flexibility.

The application relates to a liquid metal pressure sensing fiber and a preparation method and application thereof, and belongs to the technical field of sensing fiber preparation. The liquid metal pressure sensing fiber of the application is a pressure sensing fiber sequentially comprising a small-hole elastomer layer, a large-hole elastomer layer and a liquid metal conductive core layer from outside to inside. The liquid metal pressure sensing fiber disclosed by the application has a multi-layer structure, and when two fibers are used to form a capacitive pressure sensor, the pressure sensing fiber exhibits a segmented sensing effect. On the other hand, the multi-layer structure contains a porous structure, and under the same pressure, the distance between the liquid metal cores of the two fibers without the porous structure is reduced more, so that the capacitance changes more, that is, the porous structure improves the sensitivity of the pressure sensing fiber, and therefore the application has a good application prospect in the preparation of flexible wearable electronic products.

The invention discloses silk-screen printing type low-gold-content organic gold paste and a preparation method thereof. The slurry comprises the following components in percentage by mass: 21.0-25.0% of a vulcanized resin acid gold powder precursor; 25.0 to 35.0% of an organic resin filler; the total amount of the organic resinate additives containing palladium, lead, rhodium, bismuth and chromium is 5.0-7.0%; and 30.0 to 50.0% of an organic solvent. According to the organic gold paste, high-gold-content (more than or equal to 60%) vulcanized resin acid gold powder prepared by taking dichloromethane as a medium at normal temperature and normal pressure is used as a precursor, the mass fraction of the gold element can be as low as 14.6-15.2% after the paste is prepared, and the paste still has a reliable silk-screen printing characteristic and an appropriate-temperature (750-900 DEG C) film-forming sintering characteristic; when being applied to electrode preparation of capacitive pressure sensors, thermal printing heads and other products, the electrode has the advantages of low cost and high reliability.

The invention discloses a flexible capacitive pressure sensor and a preparation method thereof. The sensor comprises an inner electrode, an ionic dielectric layer and an outer electrode which are coaxially arranged. The inner electrode is a liquid metal / polyvinylidene fluoride-hexafluoropropylene-tetrafluoroethylene composite fiber, the ionic dielectric layer is an ionic liquid / polyvinylidene fluoride-hexafluoropropylene-tetrafluoroethylene composite material, and the outer electrode is a multi-walled carbon nanotube / polyvinylidene fluoride-hexafluoropropylene-tetrafluoroethylene composite strip with an abrasive paper imitating microstructure. The preparation method comprises the following steps: preparing an inner shaft spinning solution and an outer shaft spinning solution, and carrying out coaxial wet spinning to obtain coaxial fibers; preparing a polydimethylsiloxane microstructure mold, and pouring a multi-walled carbon nanotube dispersion liquid on the polydimethylsiloxane microstructure mold to form a film so as to obtain a strip of an external electrode; and finally, winding the strip on the coaxial fiber. The sensitivity of the sensor in a low-pressure area of 0-4 kPa reaches up to 64 kPa <-1 >, the linearity reaches 99.75%, and the sensor has high flexibility and is suitable for wearable equipment and electronic skin.