258 results about "Capacitive pressure sensor" patented technology

The present application discloses a sensing circuit and a sensing method of a capacitive pressure sensor array, which belongs to the field of capacitive pressure sensing. The sensing circuit alternately inputs a positive excitation voltage and a negative excitation voltage at the positive input terminal of an operational amplifier, or alternately inputs a positive excitation voltage and a negative excitation voltage at the driving end of a pressure sensing capacitor, and the inverting input terminal of the operational amplifier is connected to the detection terminal of the pressure sensing capacitor of the corresponding column, so as to obtain a first detection voltage and a second detection voltage corresponding to the positive excitation voltage and the negative excitation voltage outputted from the output terminal of the operational amplifier, respectively, so as to calculate the capacitance value of the pressure sensing capacitor of the target row based on the amplitude of the positive excitation voltage and the negative excitation voltage, the first detection voltage and the second detection voltage, and the capacitance value of the reference capacitor. The present application can improve the detection accuracy of the sensing capacitance of the capacitive pressure sensor array and meet the demand for high-precision pressure distribution measurement.

The invention relates to a wide-range gradient microstructure ion capacitive pressure sensor and a preparation method thereof. The sensor comprises an outer wrapping layer and a sensor main body part, the sensor main body part is packaged in the outer wrapping layer; the sensor main body part is of a multi-layer combined structure and comprises a top polyimide film layer, a top copper electrode layer, a dielectric layer, a bottom copper electrode layer and a bottom polyimide film layer which are arranged in sequence; the dielectric layer is made of ionic gel, and the ionic gel is formed by mixing polyvinylidene fluoride-hexafluoropropylene and 1-ethyl-3-methylimidazoline bis (trifluoromethylsulfonyl) imide salt; the top polyimide film and the top copper electrode layer are tightly attached and fixed, the bottom polyimide film and the bottom copper electrode layer are tightly attached and fixed, and the dielectric layer is located between the top copper electrode and the bottom copper electrode. And one side, close to the top copper electrode, of the dielectric layer is provided with a uniformly-distributed gradient microstructure with height difference. According to the invention, the sensitivity of the sensor is kept at a high level in a wide range.

The present application discloses an anti-crosstalk sensing circuit of a capacitive pressure sensing array and a sensing method thereof, which relates to the field of capacitive pressure sensing technology. The circuit alternately inputs a positive excitation voltage and a negative excitation voltage at the driving end of each row of pressure sensing capacitors through a row selection state, and the detection end of each column of pressure sensing capacitors is respectively connected to the inverting input end and the reference voltage of the corresponding operational amplifier according to the column selection state, and obtains a first detection voltage and a second detection voltage corresponding to the positive excitation voltage and the negative excitation voltage output by the output end of the operational amplifier, respectively, and calculates the capacitance value of the pressure sensing capacitor of the target row based on the amplitude of the positive excitation voltage and the negative excitation voltage, the first detection voltage and the second detection voltage, and the capacitance value of the reference capacitor. The present application can prevent the crosstalk phenomenon between the same row or the same column of the capacitive pressure sensing array, and significantly improve the detection accuracy of the sensing circuit of the capacitive pressure sensor array for the sensing capacitor.

The invention relates to a contact main guide field enhanced flexible capacitive pressure sensor and a preparation method thereof, the contact main guide field enhanced flexible capacitive pressure sensor comprises an elastomer composite electrode and a composite dielectric layer, the elastomer composite electrode is formed by compounding an elastomer electrode and a metal electrode, the elastomer electrode is an elastomer prepared from polydimethylsiloxane and a carbon nanotube composite material, a multi-scale microstructure is formed on the outer surface, facing the composite dielectric layer, of the elastomer electrode, and the metal electrode is a metal layer evaporated on the surface of the multi-scale microstructure; the composite dielectric layer is formed by compounding an inorganic metal oxide dielectric layer and an organic dielectric layer in an upper and lower layer structure. The contact dominant field enhanced flexible capacitive pressure sensor provided by the invention has the characteristics of relatively high sensitivity, relatively high linear responsivity, relatively wide sensing range and relatively good mechanical stability, and is wide in application prospect.

The invention discloses a preparation method and application of a dry self-adhesion flexible capacitive pressure sensor, and the method comprises the steps: dissolving a polymer through an organic solvent, and obtaining an electrostatic spinning precursor solution; performing same-pressure conjugate electrostatic spinning through the electrostatic spinning precursor solution to obtain a self-adhesion composite nanofiber membrane; a nanofiber membrane is obtained through electrostatic spinning; the obtained self-adhesion composite nanofiber membrane is used as a packaging layer, and the nanofiber membrane is used for preparing a flexible electrode in a mode of vacuum filtration of a carbon nanotube; and assembling the obtained packaging layer and the flexible electrode according to a capacitive structure, leading out a wire, positioning the assembled structure by using a hollow mask plate, and completing packaging through a hollow hot pressing technology. Through specific polymer selection and an electrostatic spinning technology, the prepared self-adhesion composite nanofiber membrane can be directly adhered to the skin or other complex surfaces, an additional adhesive is not needed, and the comfort level and the use convenience of a user are improved.

The invention relates to the technical field of vacuum coating, and particularly discloses a control system for a vacuum coating machine, which comprises a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module and a coating parameter control analysis module. Pressure intensity values of monitoring time points in all control time periods are accurately collected through a capacitive pressure sensor, the average value of the pressure intensity is calculated, the overall level of the vacuum pressure intensity in the time period can be visually reflected, and basic data are provided for judging whether the vacuum degree is in a proper range or not; an active monitoring and prevention mechanism is adopted for the vacuum coating machine, so that the continuity and the stability of coating production are guaranteed, a scientific basis is provided for preventive maintenance of the equipment, the service life of the equipment is prolonged, the probability of sudden failure of the equipment is reduced, the reliability, the high efficiency and the intelligent level of the whole vacuum coating production system are improved, and the production cost is reduced. And the competitiveness of enterprises in the field of coating processing is improved, the production cost is reduced, and the product quality is improved.

The invention discloses a sandwich-type flexible capacitive pressure sensor, and relates to the technical field of pressure sensors, the sandwich-type flexible capacitive pressure sensor comprises a photoresist layer and a fixed cylinder, the surface of the photoresist layer is provided with a flexible substrate layer, the surface of the flexible substrate layer is provided with a lower metal electrode layer, the surface of the lower metal electrode layer is provided with a flexible dielectric layer, and the flexible dielectric layer is provided with an upper metal electrode layer and a lower metal electrode layer. The surface of the flexible dielectric layer is provided with an upper metal electrode layer, and the outer sides of the upper metal electrode layer and the photoresist layer are provided with a waterproof packaging layer. According to the sandwich type flexible capacitive pressure sensor, the fixing sleeve, the first pipeline and the air bag ring are arranged, and the first rotating disc can be screwed to move through a tool; and then air in the first air bag is input into the air bag ring through the first pipeline, so that the air bag ring is expanded, the connecting line is limited, and the connection between the connecting line and the connecting end is limited.

The invention relates to the technical field of thin film actuators and flexible sensors, and provides a sensing actuating system and method based on a flexible sensor and a thin film actuator and application, and the sensing actuating system comprises a flexible capacitive pressure sensor, a double-layer thin film actuator and a central processing unit. The sensor detects object contact, and the central processing unit collects and processes changed capacitance signals and controls the actuator to conduct actuating bending. According to the sensor part, an AAO microstructure is introduced into a dielectric layer and matched with an ultra-thin electrode layer, micro stress detection can be achieved, electrode packaging integrated design is adopted in the whole, and the ultra-thin effect is achieved; the actuator part realizes multi-response actuation on the basis of a simple structure. According to the invention, by improving the preparation methods of the flexible capacitive pressure sensor and the double-layer film-shaped actuator, the ability of the sensor to detect micro stress and the ability of the actuator to respond to diversification are improved, the sensor and the actuator are directly and physically combined to form an integrated device, and the integrated device is matched with the central processing unit. Integrated operation of signal detection and feedback control can be achieved, and the device can be applied to the related fields of bionic animal and plant simulation, simulated grippers and the like.

The invention discloses a rough surface-oriented bionic adhesion / sensing integrated structure and a manufacturing method thereof. The rough surface-oriented bionic adhesion / sensing integrated structure comprises a bottom-layer bionic mushroom-shaped array structure and a top-layer inclined supporting micro-column array structure which are bonded through a flexible connecting layer, the top layer inclined supporting micro-column array structure and the bottom layer bionic mushroom-shaped array structure are attached to the upper layer flexible regionalization electrode and the lower layer flexible regionalization electrode respectively, and the top layer inclined supporting micro-column array structure, the upper layer flexible regionalization electrode and the lower layer flexible regionalization electrode form the flexible capacitive pressure sensor. The method comprises the following steps: firstly, manufacturing a top-layer inclined support micro-column array structure and a bottom-layer bionic mushroom-shaped array structure, then manufacturing flexible regionalized electrodes, and respectively attaching the flexible regionalized electrodes to the bottom-layer bionic mushroom-shaped array structure and the top-layer inclined support micro-column array structure; and finally, bonding the bottom bionic mushroom-shaped array structure and the top inclined supporting micro-column array structure through a flexible connecting layer. The method adapts to rough surfaces, realizes stable adhesion, monitors the contact state of the interface in real time and senses the morphology of the contact interface.

The invention provides a flexible microstructure capacitive pressure sensor, a preparation method and application, and belongs to the technical field of sensors, and the preparation method comprises the following steps: S1, preparing a microstructure electrode layer; s2, preparing a microstructure dielectric layer; and S3, assembling the flexible microstructure capacitive pressure sensor. The flexible micro-structure capacitive pressure sensor is assembled based on a sandwich structure, the upper layer and the lower layer of the flexible micro-structure capacitive pressure sensor are micro-structure electrode layers, the conductive surfaces of the two micro-structure electrode layers are oppositely arranged, and a micro-structure dielectric layer is inserted into a middle layer between the two micro-structure electrode layers. According to the flexible microstructure capacitive pressure sensor, the preparation method and the application, the problems that in the prior art, a traditional sensor is difficult to meet the requirement for complex shape recognition, and an existing flexible pressure sensor is high in preparation cost and complex in preparation process are solved.

A pressure sensing device, comprising: a frame work; a capacitive pressure sensor layer, surrounding the frame work; a capacitive touch sensor layer; and a flexible material layer, located between the pressure sensor layer and the touch sensor layer and surrounding the capacitive pressure sensor layer. The capacitive touch sensor layer is above the flexible material layer when the capacitive pressure sensor layer is below the flexible material layer. The capacitive touch sensor layer has a first driving electrode and a first sensing electrode. The capacitive pressure sensor layer has a second driving electrode and a second sensing electrode. A 3D gesture control system and a vehicle control system applying the pressure sensing device are also disclosed. Via the pressure sensing device, the 3D gesture control system and the vehicle control system can generate control commands according to a touch or a pressure provided by a user.

The invention provides a capacitive pressure sensor core, a preparation method thereof and a capacitive pressure sensor. Specifically, the capacitive pressure sensor core comprises a deformable diaphragm, a ceramic substrate and a capacitive performance transducer. The capacitive performance transducer comprises a first electrode comprising a first measuring electrode part and a first capacitive shielding electrode part, a second electrode comprising a second measuring electrode part and a second capacitive shielding electrode part, and a gap separator, wherein the first measuring electrode part comprises a first measuring electrode central part, the second measuring electrode part comprises a second measuring electrode central part, and the area of the first measuring electrode central part is smaller than that of the second measuring electrode central part; wherein the first measuring electrode part, the first capacitance shielding electrode part, the second measuring electrode part and the second capacitance shielding electrode part are formed by reducing and sintering organic metal conductor paste.

The utility model discloses a novel capacitive MEMS pressure sensor, which comprises a sensitive structure layer, a bonding layer and a bottom plate layer which are sequentially arranged from top to bottom, and a closed vacuum cavity is defined by the sensitive structure layer, the middle part of the bottom plate layer and the bonding layer; the sensitive structure layer comprises a sensitive layer frame and a sensitive layer capacitance plate, and the bottom plate layer comprises a bottom layer outer frame and a bottom layer capacitance plate; the middle parts of the sensitive layer frame and the bottom layer outer frame are correspondingly provided with a sensitive layer capacitance plate and a bottom layer capacitance plate respectively; the peripheral side of the sensitive layer capacitance plate is connected with the sensitive layer frame through a sensitive layer elastic film; a capacitance gap located in the vacuum cavity is formed between the sensitive layer capacitance plate and the bottom layer capacitance plate. Deformation under the action of external pressure mainly occurs at the elastic thin film, the deformation quantity of the sensitive layer capacitance polar plate is small, the linearity between the capacitance value variation and the air pressure or pressure variation is effectively improved, and good practicability is achieved.

The invention discloses a ceramic capacitive pressure sensor, which comprises a packaging shell, a commercial small circular shell is arranged on the packaging shell, a copper pipe is arranged on one side, far away from the packaging shell, of the commercial small circular shell, an electronic wire is arranged on the packaging shell in a penetrating manner, and the electronic wire is connected with the packaging shell. The insulating paper, the inner copper body and the check ring are integrally designed into the combined base with the PPS and the glass fiber wrapping the SUS metal inner container, a traditional multi-part manual assembly structure is replaced, and compared with the scheme that in the prior art, insulating paper and an inner copper body shielding cover need to be bonded, the number of parts is reduced, and the cost is reduced. The cost is reduced, meanwhile, automatic injection molding is achieved, manual assembly errors are avoided, the assembly efficiency is improved, the compression strength of the PPS composite reinforcing material is improved compared with that of traditional insulation paper, and the reliability in the high-pressure-resistant environment is ensured.

The invention discloses a capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises a dielectric layer, an upper electrode and a lower electrode, wherein the dielectric layer is composed of a three-dimensional periodic lattice structure fabric and ionic gel; the three-dimensional periodic lattice structure fabric is composed of a plurality of C-shaped elastic filaments, an upper-layer mesh fabric and a lower-layer mesh fabric, and the elastic filaments are arranged between the upper-layer mesh fabric and the lower-layer mesh fabric as longitudinal supports; the ionic gel is compounded with the lower-layer mesh fabric, and a gap exists between the top of the ionic gel and the upper-layer mesh fabric; the upper electrode and the lower electrode are foam nickel electrodes with three-dimensional mesh structures, the upper electrode is arranged at the top of the upper-layer mesh fabric, and the lower electrode is arranged at the bottom of the ionic gel. The sensor provided by the invention is provided with the dielectric layer with a special structure, and can maintain high-sensitivity linear sensing in a large pressure detection range.

The invention discloses a flexible capacitive pressure sensor with a micro-nano array structure, which comprises a first electrode layer, a flexible dielectric layer, a second electrode layer and a flexible thin film layer which are sequentially stacked from top to bottom, and the flexible thin film layer is provided with the micro-nano array structure. By constructing the micro-nano structure, the sensitivity and the detection range of the pressure sensor are improved, and the pressure sensor has good stability and repeatability. The invention further discloses a preparation method of the flexible capacitive pressure sensor, the flexible thin film layer with the micro-nano array structure is prepared by modulating corona electric field treatment, a micro-nano structure template does not need to be additionally manufactured, the process is simple, the cost is low, and batch preparation can be achieved.

The invention discloses a fingerprint-imitating high-sensitivity flexible sensor capable of identifying directions and a preparation method thereof, and belongs to the technical field of flexible sensors. The capacitive pressure sensor array and the CPU connected with the capacitive pressure sensor array are used for detecting the magnitude and direction of the acting force between the pre-recognition material and the fingerprint bionic texture, and the periodic surface texture information of the pre-recognition material is detected. According to the capacitive pressure sensor, the strip-shaped air gaps are formed in the dielectric layer, so that the insulativity of the capacitive pressure sensor can be improved, and the capacitive pressure sensor can recognize the direction more accurately. Meanwhile, the strip-shaped air gap can significantly enhance the deformation and pressure response of the sensor, thereby improving the sensitivity of the sensor, preventing the material from being broken, and prolonging the service life. The fingerprint bionic texture has a ridge line structure, and each fingerprint is equivalent to an amplification lever, so that the sensitivity of the sensor is further enhanced. According to the method, a new research direction is provided for restoring the perception ability of the handicapped and researching the humanoid tactile receptor applied to the humanoid robot.

The invention relates to the technical field of flexible electronics, in particular to a method for preparing a dielectric layer of a capacitive sensor, which comprises the following main steps of: preparing an ITO / PET (indium tin oxide / polyethylene terephthalate) electrode; spontaneously forming a flexible dielectric layer; a flexible dielectric layer dispersion process; and packaging the device. The array type flexible pressure sensor prepared by the invention has the advantages of high-sensitivity feedback, stable work, good signal transmission, good flexibility and the like.

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

The invention relates to a capacitive pressure sensor capable of reducing surface pollution of a pressure sensing diaphragm. The capacitive pressure sensor comprises a spiral cylinder; the spiral column body is detachably mounted in the air inlet of the measuring cavity; and a spiral air inlet channel is formed between the air inlet of the measuring cavity and the spiral cylinder. According to the capacitive pressure sensor, the spiral column body is arranged in the gas inlet of the measuring cavity, and measured gas enters the measuring cavity body after rotating along the spiral column body and then is in contact with the pressure sensing diaphragm, so that the measured gas firstly passes through the spiral column body and is in contact with the surface of the spiral column body, and particles are attached to and condensed on the surface of the spiral column body; therefore, the defect that a large amount of pollutants are condensed on the surface of the pressure sensing diaphragm when a traditional capacitive pressure sensor measures condensable volatile gas is overcome, the measuring and metering characteristics of the capacitive pressure sensor are remarkably improved, and the service life is prolonged.

The invention provides a fibrous degradable flexible pressure sensor with ultralow detection limit and a preparation method and application thereof.The preparation method comprises the steps that lignin powder is dispersed in a sodium hydroxide aqueous solution, ultrasonically crushed and stirred to be uniform, then polyethylene oxide powder is uniformly dissolved in the solution in four times, stirring is conducted till the solution is uniform, and the pressure sensor is obtained; putting the solution into a vacuum cavity, and removing bubbles at room temperature to obtain an electrostatic spinning precursor solution; then preparing a lignin fiber thin film by adopting an electrostatic spinning process, and then drying the thin film; and finally, cutting the obtained lignin fiber film into a square film, placing an interdigital electrode mask on the square film, spraying a metal silver nanowire electrode by using a silver nanowire solution, and then embedding the fiber film in a polyimide film to prepare the flexible pressure sensor. According to the invention, the integrated design of the capacitive pressure sensor is realized, the cost is low, the process is simple, and the pressure sensor has excellent flexibility and sensitivity.

The invention discloses a preparation method and application of a wide-range flexible capacitive pressure sensor, and the method comprises the steps: obtaining the parameter information of a high-modulus dielectric material based on a test result of a single-layer flexible pressure sensor; simulation analysis is carried out based on the high-modulus medium parameter information, and the optimal modulus gradient range between the media is determined; according to the obtained optimal modulus gradient range data, low-modulus dielectric material parameters are determined; respectively selecting low-modulus polymer powder and high-modulus polymer powder according to the parameters of the low-modulus dielectric material and the parameters of the high-modulus dielectric material to prepare a low-modulus dielectric film and a high-modulus dielectric film; and assembling the low-modulus dielectric film, the high-modulus dielectric film and the flexible electrode according to a sandwich structure, and leading out a lead to obtain the double-layer flexible pressure sensor. According to the invention, smooth conversion of force between two kinds of modulus media is ensured, and the phenomenon of force conduction failure caused by modulus mismatch between the media is avoided.

The invention provides a flexible capacitive pressure sensor based on a bionic fin structure. The sensor comprises an upper electrode, a lower electrode and an elastic supporting piece located between the upper electrode and the lower electrode. The elastic supporting piece comprises an upper platform, a lower platform and a plurality of bionic fin structural pieces located between the upper platform and the lower platform. The bionic fin structural member comprises an upper plane part, a lower plane part, an annular part with an opening in one side and an arc-shaped part with two arcs overlapped in a 3 shape. The upper side and the lower side, without the opening, of the annular part are connected with the upper plane part and the lower plane part correspondingly. The arc-shaped part is located in the annular part, and the two ends of the arc-shaped part are connected with the two ends of the opening of the annular part correspondingly. According to the bionic microstructure, the Young modulus of the dielectric layer is effectively reduced, the pressure response sensitivity and speed are improved, meanwhile, good structural stability and array expansibility are achieved, and the application requirement of a multi-scene intelligent interaction system is met.

The invention discloses a flexible capacitive pressure sensor structure and a motion detection application method thereof. The flexible capacitive pressure sensor structure comprises an upper waterproof layer, an upper electrode layer, a dielectric layer, a lower electrode layer and a lower waterproof layer which are stacked. Wherein the electrode layer comprises a polydimethylsiloxane thin film substrate, a polyimide thin film and laser-induced graphene, and the dielectric layer comprises a polydimethylsiloxane thin film and a micro-conical array structure which is subjected to laser orthogonal processing. The method has the advantages of high sensitivity, high consistency, high stability, high reliability and high repeatability.

The utility model relates to a grounding structure of a ceramic capacitive pressure sensor. The utility model comprises a metal shell which is provided with an annular cavity; the plastic socket comprises a connecting column extending into the annular cavity; the printed circuit board is arranged in the annular cavity; and the grounding insert comprises an annular part and a connecting part, wherein the annular part is respectively propped against the side walls of the annular cavity and the connecting column, and the connecting part extends to the annular part, is partially embedded in the plastic socket and is connected with the printed circuit board. The utility model solves the problems that the ground lug of the ceramic pressure sensor in the prior art is easy to break during assembly and the ground lug is loose and poor in contact after long-time use.

The utility model relates to a ceramic substrate with an annular supporting structure and a capacitive pressure sensor, and belongs to the technical field of sensor electrodes. At least one of the problems of initial point drift, large non-linear error and precision reduction, poor measurement repeatability and the like caused by different thermal expansion coefficients of materials due to machining error accumulation of a capacitive vacuum gauge in the prior art is solved. The utility model discloses a ceramic base body with an annular supporting structure, the lower surface of the ceramic base body is provided with an annular supporting part, the annular supporting part extends downwards along the edge of the lower surface of the ceramic base body, and the supporting part is provided with an air guide notch. According to the ceramic substrate and the capacitive pressure sensor provided by the invention, a unique annular supporting structure and an integral forming technology are adopted, so that the phenomena of machining error accumulation and mechanical lag caused by expansion coefficient difference of parts made of different materials are avoided, the measurement precision and the measurement repeatability are remarkably improved, and the ceramic substrate and the capacitive pressure sensor are simple in preparation process and low in cost. The method is suitable for large-scale popularization.

The invention relates to the technical field of dielectric layers, in particular to a microstructure composite dielectric layer and a preparation method and application thereof. The preparation method comprises the following steps: S1, scanning a PI film by using laser to serve as an LIG template; s2, slowly adding the carbon nanotube dispersion liquid into the polydimethylsiloxane prepolymer, fully stirring and dispersing, then adding a curing agent, and continuously stirring to obtain a stable SWCNT / PDMS composite solution; and S3, uniformly spreading the SWCNT / PDMS composite solution on the surface of the LIG template, carrying out thermosetting treatment, cooling to room temperature, and stripping a formed SWCNT / PDMS film to obtain the microstructure composite dielectric layer. The novel method for manufacturing the capacitive pressure sensor is adjustable in structural parameters, simple and convenient in preparation process, high in repeatability, suitable for large-area preparation of the flexible substrate and capable of achieving high sensitivity, low detection limit and excellent cycle stability.

The invention discloses a flexible capacitive pressure sensor and a preparation method, and relates to the technical field of flexible capacitive pressure sensors.The flexible capacitive pressure sensor comprises a shell, a second binding post arranged at one end of the shell, a shell cover arranged at the other end of the shell and a first binding post arranged on the shell cover, an upper packaging layer is arranged in the shell, an upper electrode layer is arranged on one side of the upper packaging layer, and a lower electrode layer is arranged on the other side of the upper packaging layer; a middle dielectric layer is arranged on one side of the upper electrode layer, a lower electrode layer is arranged on one side of the middle dielectric layer, and a lower packaging layer is arranged on one side of the lower electrode layer; conductive film structures are arranged between the lower electrode layer and the middle dielectric layer and between the upper electrode layer and the middle dielectric layer; a sealing assembly is arranged in the shell cover; an extrusion assembly is further arranged in the shell cover; by using the sealing assembly, the sealing performance between the shell and the shell cover is improved, external moisture and dust are prevented from entering the shell, the accuracy of capacitance measurement is improved, and the service life of the flexible capacitive pressure sensor is further prolonged.

Method for manufacturing a micro-electro-mechanical system, MEMS, integrating a first MEMS device and a second MEMS device. The first MEMS device is a capacitive pressure sensor and the second MEMS device is an inertial sensor. The steps of manufacturing the first and second MEMS devices are, at least partly, shared with each other, resulting in a high degree of integration on a single die, and allowing to implement a manufacturing process with high yield and controlled costs.

The invention provides a comb tooth capacitive pressure sensor and a preparation method thereof, and belongs to the technical field of capacitive pressure sensors. The fixing frame is connected with the substrate through an insulating layer, a containing area is formed in the fixing frame, and a pressure sensing film is formed on the portion, corresponding to the containing area, of the substrate; the multiple fixed comb teeth are arranged in the containing area, and a gap is formed between each fixed comb tooth and the pressure sensing film; the plurality of movable comb teeth are arranged in the accommodating area, and each movable comb tooth is connected with the pressure sensing film through an insulating layer; the movable comb teeth and the fixed comb teeth are alternately arranged in the containing area in the first direction, and the orthographic projection of the movable comb teeth on the first plane and the orthographic projection of the fixed comb teeth on the first plane are at least partially overlapped. According to the comb tooth capacitive pressure sensor and the preparation method thereof provided by the invention, the linearity and sensitivity of capacitance measurement of the comb tooth capacitive pressure sensor can be improved.