493results about "Fluid pressure measurement using capacitance variation" patented technology

The invention provides a method for testing flow-induced noise of a pipeline. The method comprises the following steps: S1, determining measurement positions at an upstream flow channel and a downstream flow channel of a measured element, carrying out normalization processing on measured signals, and calculating the pressure power spectrum density of the inner wall surface of a pipe; s2, calculating a wall surface pressure fluctuation time domain cross correlation coefficient, and analyzing correlation characteristics between wall surface pressure pulsation; s3, spectrum intrinsic orthogonal decomposition is carried out on the pressure pulsation field, and space-time decoupling is achieved through time domain-frequency domain conversion; s4, extracting a dominant flow-induced noise mode, constructing an empirical frequency-wave number spectrum, and decomposing fluctuating energy distribution into contributions of different frequency and wave number combinations; s5, analyzing the decoupled flow-induced noise characteristic result, and identifying the amplitude-frequency characteristic of the flow-induced noise; according to the invention, real-time measurement of pressure pulsation in the pipeline can be realized, decoupling analysis of flow field pulsation and sound pressure pulsation can be carried out on the measured signal, and characteristics and a generation mechanism of pipeline flow-induced noise can be identified.

To measure a capacitance between electrodes of a sensor chip without influencing a parasitic capacitance or stray capacitance of a cable.SOLUTION: A diaphragm vacuum gauge comprises: a sensor chip 1 that comprises a first electrode formed on a pedestal, and a second electrode formed so as to face the first electrode on a diaphragm arranged across a gap from the pedestal, and in which an interval between the first and second electrodes changes according to the displacement of the diaphragm due to the pressure of a medium to be measured; an operational amplifier A1 that converts a current output from the first electrode into a voltage and amplifies it; and a coaxial cable 21 that connects the first electrode and the operational amplifier A1. The first electrode is connected to a virtual ground of the operational amplifier A1 through a core wire 22 of the coaxial cable 21.SELECTED DRAWING: Figure 3

The invention belongs to the technical field of sensors, and particularly discloses a capacitive sensor based on multistage compression deformation and a preparation method thereof, the capacitive sensor comprises an upper electrode layer and a lower electrode layer; a deformable corrugated structure is arranged between the upper electrode layer and the lower electrode layer, and the deformable corrugated structure comprises three deformation areas with the same structure; the deformation area is internally provided with three cavities, and the three cavities are filled with a first dielectric layer, a second dielectric layer and a third dielectric layer respectively; magnetic adsorption units are arranged on the outer sides of the adjacent deformation areas. According to the capacitive sensor based on multi-stage compression deformation and the preparation method thereof, the sensor realizes wide-range and multi-resolution pressure measurement capability; the sensor can present different sensitivity characteristics in different pressure ranges, can flexibly switch working modes, meets various measurement requirements from low pressure to ultrahigh pressure, and solves the technical problem that a traditional capacitive sensor is difficult to consider wide range and high resolution at the same time.

The invention provides an MEMS pressure sensor, a preparation method thereof and an electronic device, and the method comprises the steps: providing a first substrate and a second substrate, sequentially forming a first pressure sensing film layer, a first sacrificial layer and a first sub-electrode layer on the first substrate, and sequentially forming a second pressure sensing film layer, a second sacrificial layer and a second supporting layer on the second substrate; respectively etching the first sub-electrode layer and the second supporting layer to form a plurality of first release holes and a plurality of second release holes; removing part of the first sacrificial layer to form a first cavity, and removing part of the second sacrificial layer to form a second cavity; the first sub-electrode layer and the second supporting layer are bonded, and the first release holes and the second release holes are arranged in a staggered mode; and etching the first substrate to form a back cavity, and removing the second substrate to expose the second pressure sensing film layer. According to the scheme, the first sub-electrode layer and the second supporting layer are bonded to form the MEMS pressure sensor with the double pressure sensing film layers, and the sensitivity and the linearity are improved.

The invention provides an MEMS pressure sensor and a manufacturing method thereof, and an electronic device, and the method comprises the steps: providing a first substrate, forming at least two first pressure structures on the surface of the first substrate, each first pressure structure comprises a first electrode layer, a first sacrificial layer, a first supporting layer, a second electrode layer, a second supporting layer, and a first cavity, and a first release hole; a second substrate is provided, at least two second pressure structures are formed on the surface of the second substrate, and each second pressure structure comprises a third electrode layer, a second sacrificial layer and a second cavity; bonding the second supporting layer with the second sacrificial layer; the second substrate is removed to expose the third electrode layer, the third electrode layer and the second electrode layer form a variable capacitance structure, the second electrode layer and the first electrode layer form a reference capacitance structure, and the two variable capacitance structures and the two reference capacitance structures jointly form a Wheatstone bridge. According to the scheme, the measurement precision is improved, and the device performance is further improved.

The invention provides an MEMS pressure sensor, a manufacturing method thereof and an electronic device, and the method comprises the steps: providing a first substrate and a second substrate, forming a first pressure structure on the first substrate, and forming a second pressure structure on the second substrate; bonding the first pressure structure and the second pressure structure; the first substrate is removed, the first pressure structure and the second pressure structure jointly form a third pressure structure, the third pressure structure comprises a first electrode layer, a second electrode layer, a third electrode layer, a fourth electrode layer and a fifth electrode layer which are arranged at intervals from top to bottom, and a dielectric layer is formed between every two adjacent electrode layers; and cavities penetrating through the dielectric layers are formed in the dielectric layers. According to the scheme, the multiple electrode layers arranged from bottom to top are formed, the multiple electrode layers form the first capacitor, the second capacitor, the third capacitor and the fourth capacitor respectively, then the Wheatstone bridge is formed jointly, the measurement precision of the MEMS pressure sensor is improved, meanwhile, the plane size of the MEMS pressure sensor is reduced, and the integration level of the device is improved.

The invention relates to the technical field of sensor measurement, and discloses a bimodal sensor based on a single unit and a measurement method thereof.The sensor comprises a flexible upper substrate used for providing flexible supporting and packaging protection for the upper surface of the whole sensor, an upper electrode layer comprising a first circular electrode and used for forming capacitance change to respond to pressure stimulation, and a lower electrode layer comprising a second circular electrode and used for forming capacitance change to respond to pressure stimulation; the upper electrode layer is arranged on the flexible lower substrate and serves as a leading-out end of an electric signal; the method comprises the steps of system initialization, bimodal signal synchronous acquisition and transmission, signal processing and signal output and display. According to the invention, through the cooperation of the concentric circle electrode design and the independent signal channel, the hardware decoupling of temperature and pressure signals is realized, the problem that the traditional sensor interferes with pressure measurement and depends on algorithm compensation due to temperature drift caused by sharing the same electrode and signal channel is solved, and the accuracy and reliability of bimodal measurement are fundamentally improved.

The invention relates to the technical field of flexible electronics and sensing, in particular to a capacitive flexible pressure sensor based on a barium titanate composite dielectric layer, which sequentially comprises a lower electrode layer, an upper electrode layer, a lower electrode layer and an upper electrode layer from bottom to top, the composite dielectric layer is arranged on the lower electrode layer and is formed by compounding an elastic polymer matrix and a high-dielectric-constant barium titanate (BaTiO3) filler; the upper electrode layer is made of a flexible conductive material and is arranged on the composite dielectric layer; the lower electrode layer and the upper electrode layer are connected with an external capacitance measuring circuit through wires. According to the sensor disclosed by the invention, the comprehensive performance of high sensitivity, wide detection range, low hysteresis and excellent cycle stability is realized by optimizing the shape of the barium titanate filler, surface modification and composite structure design.

The invention relates to the technical field of thin film actuators and flexible sensors, and provides a sensing actuating system and method based on a flexible sensor and a thin film actuator and application, and the sensing actuating system comprises a flexible capacitive pressure sensor, a double-layer thin film actuator and a central processing unit. The sensor detects object contact, and the central processing unit collects and processes changed capacitance signals and controls the actuator to conduct actuating bending. According to the sensor part, an AAO microstructure is introduced into a dielectric layer and matched with an ultra-thin electrode layer, micro stress detection can be achieved, electrode packaging integrated design is adopted in the whole, and the ultra-thin effect is achieved; the actuator part realizes multi-response actuation on the basis of a simple structure. According to the invention, by improving the preparation methods of the flexible capacitive pressure sensor and the double-layer film-shaped actuator, the ability of the sensor to detect micro stress and the ability of the actuator to respond to diversification are improved, the sensor and the actuator are directly and physically combined to form an integrated device, and the integrated device is matched with the central processing unit. Integrated operation of signal detection and feedback control can be achieved, and the device can be applied to the related fields of bionic animal and plant simulation, simulated grippers and the like.

The invention relates to the technical field of flexible electronic sensing, and particularly discloses a composite fiber membrane-based capacitive flexible pressure sensor integrated system and a preparation method thereof. The sensor is composed of a composite fiber membrane sensitive layer, an interlayer type electrode structure, a multi-channel signal acquisition module and an intelligent data processing system. Wherein the composite fiber membrane is prepared through an electrostatic spinning technology, polyvinylidene fluoride serves as a matrix, ionic liquid with the mass ratio of 40%-70% is evenly dispersed, a three-dimensional porous structure is formed, and a pressure signal is converted into capacitance change through the double-electric-layer capacitance effect; the signal acquisition module adopts a high-precision capacitance digital converter to cooperatively work with a microcontroller, 9-channel parallel data acquisition is realized, the resolution reaches 6aF, and data is transmitted through an anti-interference bus protocol; and the data processing system dynamically analyzes the pressure-capacitance relationship based on an exponential function model, suppresses noise to be below 0.1 aF RMS in combination with a filtering algorithm, and synchronously generates a visual pressure distribution map.

The invention relates to a MEMS component, in particular an acoustic transducer or pressure sensor, comprising: a substrate with a cavern and a mainland, an interaction element arranged above the cavern and connected to the mainland, where the interaction element is a bending beam, a boundary layer arranged at a distance from the bending beam via connecting elements, which defines a cavity with the bending beam, and a back plate located within the cavity, which is designed as a back electrode, wherein the back plate is designed to be stiffer with respect to the boundary layer and the bending beam, at least one electrode which forms a readable capacitance with a back electrode of the back plate in order to capacitively detect a deflection of at least one of the bending beam, the connecting elements and the boundary layer, at least one stop element which is designed to be displaced into a mechanical stop, wherein the stop element in the stop has at least one fluid flow resistance, in particular a fluid seal, between the cavity on a substrate-facing side and a volume on a substrate-facing side of the cavity.

The invention provides a capacitive pressure sensor core, a preparation method thereof and a capacitive pressure sensor. Specifically, the capacitive pressure sensor core comprises a deformable diaphragm, a ceramic substrate and a capacitive performance transducer. The capacitive performance transducer comprises a first electrode comprising a first measuring electrode part and a first capacitive shielding electrode part, a second electrode comprising a second measuring electrode part and a second capacitive shielding electrode part, and a gap separator, wherein the first measuring electrode part comprises a first measuring electrode central part, the second measuring electrode part comprises a second measuring electrode central part, and the area of the first measuring electrode central part is smaller than that of the second measuring electrode central part; wherein the first measuring electrode part, the first capacitance shielding electrode part, the second measuring electrode part and the second capacitance shielding electrode part are formed by reducing and sintering organic metal conductor paste.

The invention discloses a capacitive flexible sensing array based on an FPC technology and a preparation method thereof, PVDF-TrFE and ionic salt [BMIM / Br] in a specific mass ratio are prepared into an ionic thin film dielectric layer under the action of a cross-linking agent, and a specific rectangular pyramid microstructure is given to the ionic thin film dielectric layer through a microneedle structure mold; and an upper electrode layer and a lower electrode layer for channel multiplexing are prepared in combination with an FPC technology, and finally the sensing array is packaged through vacuum hot pressing bonding. The core innovation of the invention lies in that through the synergistic effect of the ion double electric layer effect, the microstructure stress concentration and the FPC electrode multiplexing design, ultrahigh sensitivity (0-20kPa interval sensitivity gt, 30kPa) and low crosstalk (array crosstalk rate lt, 5%) are realized at the same time. The local deformation characteristic of the microneedle structure effectively restrains edge electric field diffusion, the crosstalk problem of a high-density array is solved from the physical structure, and a key technology is provided for application of flexible electronics in the field of precise tactile perception.

The invention discloses a ceramic capacitive pressure sensor, which comprises a packaging shell, a commercial small circular shell is arranged on the packaging shell, a copper pipe is arranged on one side, far away from the packaging shell, of the commercial small circular shell, an electronic wire is arranged on the packaging shell in a penetrating manner, and the electronic wire is connected with the packaging shell. The insulating paper, the inner copper body and the check ring are integrally designed into the combined base with the PPS and the glass fiber wrapping the SUS metal inner container, a traditional multi-part manual assembly structure is replaced, and compared with the scheme that in the prior art, insulating paper and an inner copper body shielding cover need to be bonded, the number of parts is reduced, and the cost is reduced. The cost is reduced, meanwhile, automatic injection molding is achieved, manual assembly errors are avoided, the assembly efficiency is improved, the compression strength of the PPS composite reinforcing material is improved compared with that of traditional insulation paper, and the reliability in the high-pressure-resistant environment is ensured.

The invention provides a capacitive flexible multifunctional sensor and a preparation method thereof, the sensor comprises an upper electrode layer, a dielectric layer and a lower electrode layer, and the dielectric layer is located between the upper electrode layer and the lower electrode layer; the upper electrode layer and the lower electrode layer are liquid metal composite flexible polymer films and are divided into a high liquid metal concentration area and a low liquid metal concentration area from bottom to top; the dielectric layer is a porous flexible film. According to the capacitive flexible multifunctional sensor and the preparation method thereof provided by the invention, through the synergistic effect of the electrode layer and the dielectric layer, the sensor is endowed with excellent capability of detecting proximity and pressure signals, and the flexible multifunctional sensor is expected to provide a multi-mode sensing mode for protection of fragile objects or precise devices.

The invention discloses a capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises a dielectric layer, an upper electrode and a lower electrode, wherein the dielectric layer is composed of a three-dimensional periodic lattice structure fabric and ionic gel; the three-dimensional periodic lattice structure fabric is composed of a plurality of C-shaped elastic filaments, an upper-layer mesh fabric and a lower-layer mesh fabric, and the elastic filaments are arranged between the upper-layer mesh fabric and the lower-layer mesh fabric as longitudinal supports; the ionic gel is compounded with the lower-layer mesh fabric, and a gap exists between the top of the ionic gel and the upper-layer mesh fabric; the upper electrode and the lower electrode are foam nickel electrodes with three-dimensional mesh structures, the upper electrode is arranged at the top of the upper-layer mesh fabric, and the lower electrode is arranged at the bottom of the ionic gel. The sensor provided by the invention is provided with the dielectric layer with a special structure, and can maintain high-sensitivity linear sensing in a large pressure detection range.

The invention discloses a through needle temperature and pressure sensor and an assembly process, and relates to the technical field of temperature and pressure sensors, and the sensor comprises a ceramic pressure core body and an NTC assembly. An NTC (Negative Temperature Coefficient) through needle for outputting a temperature signal is arranged on the ceramic pressure core body in a penetrating manner; the NTC assembly comprises an NTC chip, a lead wire sleeve, a fixing seat and a metal sheath, a lead wire of the NTC chip is sleeved in the lead wire sleeve and extends out to be arranged through the fixing seat, and the metal sheath is sleeved outside the lead wire sleeve and the NTC chip and is fixed on the fixing seat; the lead of the NTC chip is connected with the NTC through pin through electric resistance welding, so that the connection reliability is improved, and meanwhile, the soldering tin rosin is prevented from sputtering to pollute the fixed seat and the ceramic pressure core body; the structure of the temperature pressure sensor is simplified, the reliability of electric connection is improved, and a signal path is rationalized through lead wire arrangement, metal sheath protection and electric resistance welding direct connection; the problems of complex structure, circuit virtual connection and low reliability of the existing temperature and pressure sensor are effectively solved.

The invention relates to the technical field of flexible electronics, in particular to a method for preparing a dielectric layer of a capacitive sensor, which comprises the following main steps of: preparing an ITO / PET (indium tin oxide / polyethylene terephthalate) electrode; spontaneously forming a flexible dielectric layer; a flexible dielectric layer dispersion process; and packaging the device. The array type flexible pressure sensor prepared by the invention has the advantages of high-sensitivity feedback, stable work, good signal transmission, good flexibility and the like.

The invention provides an integrated capacitive multifunctional sensor with ultrahigh sensitivity and a preparation method thereof, belongs to the technical field of flexible sensors, and aims to solve the technical problem that the multifunctional sensor is low in integration level and sensitivity. The integrated capacitive multifunctional sensor comprises a top-layer electrode, a microstructure dielectric layer and a bottom-layer electrode which are stacked from top to bottom, wherein the top-layer electrode and the bottom-layer electrode are provided with conductive leading-out belts; a hole-shaped electrode array consisting of hole-shaped electrode units is arranged on the top layer electrode; the hole-shaped electrode unit comprises an internal annular electrode, an external annular electrode and a connecting electrode; and the internal annular electrode is positioned in the external annular electrode and is communicated with the external annular electrode through the connecting electrode. According to the invention, three measurement functions are integrated in a single sensor, and the sensor has the advantages of high sensitivity, simple structure, low preparation cost, high adaptability and the like. In addition, the three signals can be effectively decoupled and distinguished, and extra circuits and algorithms are not needed.

The invention provides a force direction feedback system and method of pneumatic pressure. The system generates a first oscillation signal changing along with air pressure and a second oscillation signal with fixed frequency through a signal conversion module; and the counter counts the cycles of the two paths of oscillation signals. The back noise calibration module samples environment back noise by using a second oscillation signal in a frequency division manner, and eliminates back noise interference in a force count value through a subtractor, so that the problem of detection deviation caused by environment air pressure fluctuation is solved; and the dual-threshold comparison module screens the difference signal through a back noise threshold and an anti-shake threshold, generates a force conversion value, and avoids error output caused by slight fluctuation and shake. The differential operation module processes the force conversion value in combination with the second oscillation signal, the accurate pneumatic force value is output through signal correlation, the pneumatic direction can be distinguished by means of comparison with the fixed reference, and finally accurate and stable feedback of the pneumatic pressure force and direction is achieved.

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

The invention discloses a capacitive pressure transmitter temperature compensation method based on RMEA-DACA-SVR, and the method comprises the steps: 1, collecting corresponding pressure real-time data at different temperatures, and generating a comprehensive data set; 2, preprocessing the acquired data, including noise data removal, data scaling and key feature extraction; 3, decomposing the data by adopting HHT (Hilbert-Huang Transform); 4, a comprehensive temperature compensation model based on the RMEA-DACA-SVR is constructed; rMEA-DACA combination is used for dynamic optimization and real-time compensation, SVR is used for constructing a nonlinear relation between temperature and pressure value output, and MHA and ResNet structures are combined, so that attention to key temperature features is improved, and overfitting and model complexity are reduced; and 5, integrating the compensation results of the RMEA, the DACA and the SVR by adopting a weighted fusion method, and generating high-precision temperature compensation output. According to the invention, the complex compensation requirements of the capacitive pressure transmitter in different temperature environments can be effectively met, and the temperature compensation precision is improved; the method is suitable for the field of industrial automation and high-precision measurement, and has a wide application prospect.

The invention relates to the technical field of pressure sensors, and provides a pressure sensor and a preparation method thereof. The pressure sensor comprises an upper pole plate, a pressure sensing film and a metal base. The upper pole plate is made of an aluminum oxide crystal material; the pressure sensing film is made of an aluminum oxide crystal material and is arranged on one side of the upper polar plate, and the pressure sensing film and the upper polar plate form a capacitor structure; the metal base is arranged on one side, deviating from the upper polar plate, of the pressure-sensitive film and used for supporting the upper polar plate and the pressure-sensitive film; wherein the upper pole plate is provided with a pole plate gap, the upper pole plate is in direct bonding connection with the pressure sensing film, and the pressure sensing film is in direct bonding connection with the metal base. The high-temperature-resistant corrosion-resistant pressure sensor overcomes the defects that in the prior art, a pressure sensor is prone to generating stress in a high-temperature environment, so that the zero-bias stability of the sensor is poor, and the precision is reduced after long-term use, and the high-temperature-resistant corrosion-resistant pressure sensor is achieved.

The invention relates to the technical field of transmitters, in particular to a pressure difference transmitting device which comprises a hydraulic body, and an upstream hydraulic channel and a downstream hydraulic channel are arranged in the hydraulic body. The sealing mechanism isolates the high-pressure cavity from the low-pressure cavity when the first pressure detection unit and the second pressure detection unit perform air pressure detection, and communicates the high-pressure cavity with the low-pressure cavity when the first pressure detection unit and the second pressure detection unit do not perform air pressure detection; separate transmission of liquid and gas is carried out through a liquid flow channel composed of an upstream hydraulic channel and a downstream hydraulic channel and a gas pressure cavity channel, so that a high-pressure cavity extends between a first pressure detection unit and the upstream hydraulic channel, a low-pressure cavity extends between a second pressure detection unit and the downstream hydraulic channel, and a medium is introduced at the beginning or discharged after completion; and the damage of measurement components caused by overlarge one-way pressure difference is avoided.

Disclosed example pressure transducers include: a pressure housing comprising a first cavity; a fluid input line configured to provide a fluid to the first cavity; a first pressure measurement assembly having a first type and configured to output a first measurement signal based on a pressure of the fluid in the first cavity; a second pressure measurement assembly having a second type and configured to output a second measurement signal based on the pressure of the fluid in the first cavity; and a controller configured to determine the pressure of the fluid in the first cavity based on the first measurement signal when the pressure is within a first range and determine the pressure of the fluid in the first cavity based on the second measurement signal when the pressure is within a second range.

There is provided a pressure sensor, including a top cover assembly, an upper seat (120), and a movable membrane (200); each of a top and a bottom of the upper seat (120) is provided with an opening, the top cover assembly seals the opening at the top of the upper seat, and the movable membrane (200) seals the opening at the bottom of the upper seat (120); the top cover assembly, the upper seat (120), and the movable membrane (200) form a pressure reference chamber (100), and the pressure sensor detects a gas pressure on a side of the movable membrane (200) away from the top cover assembly based on a state of the movable membrane (200); at least one gas guide passage (510) is formed at the top cover assembly, and is configured to connect the pressure reference chamber (100) to the outside; the top cover assembly includes at least one blocking member (521) configured to seal the gas guide passage (510); and the blocking member (521) seals the gas guide passage (510) after being heated to a temperature higher than a preset melting temperature to be at least partially melted and being cooled to solidify. A manufacturing method for a pressure sensor is further provided. The pressure sensor has high manufacturing efficiency, stable structure, and high pressure detection precision.

The invention relates to a three-level linkage differential capacitance sensor, which belongs to the technical field of micro electro mechanical sensors, and comprises a fixed support structure, three polar plates are horizontally arranged at the top of the fixed support structure at equal intervals along the vertical direction, and the polar plates and the fixed support structure as well as the adjacent polar plates are connected in an insulating and sealing manner; according to the invention, gas or liquid on the outer side of the sensor enters the middle cavity by using the vent holes, so that the pressure load of the gas or liquid acts on the three polar plates at the same time, and the pressure load of the gas or liquid is applied to the three polar plates at the same time; the three polar plates can deform at the same time, the gap between the two polar plates on the upper side is reduced, the capacitance between the polar plates is increased, the gap between the two polar plates on the lower side is increased, the capacitance between the polar plates is reduced, and the total output capacitance can be remarkably increased finally through differential output of the capacitance between the upper polar plate and the lower polar plate. And the sensitivity of the three-stage linkage differential capacitance sensor is greatly improved.

The invention discloses an ionic gel flexible pressure film sensing array and a preparation method thereof. The sensing array comprises two layers of patterned flexible electrodes, an ionic gel unit array containing a surface microstructure and a patterned isolation layer. The ionic gel layer and the isolation layer are located on the same plane, each ionic gel unit is surrounded by the isolation layer unit structure, the two layers of electrodes respectively cover the upper side and the lower side, the ionic gel is in contact with an electrode conductive region, and the isolation layer is in contact with a non-conductive region. The preparation method comprises the following steps: performing laser etching and patterning processing on the flexible electrode; preparing a mask with a hollow pattern and covering the mask to the first electrode; imprinting on the polymer film to prepare a microstructure mold; dropwise adding liquid ionic gel into the mold, and pressing and curing the first electrode covered with the mask to form an ionic gel unit array; and bonding the isolation layer and the two layers of electrodes. The preparation method is low in cost, simple, flexible, thin in device thickness, wide in measuring range, high in sensitivity and signal-to-noise ratio, resistant to sensitive layer crosstalk and suitable for various pressure detection scenes.

The invention provides a pressure sensor, a preparation method thereof and electronic equipment. The preparation method of the pressure sensor comprises the following steps: sequentially depositing a first sacrificial layer, a first movable electrode layer, a second sacrificial layer, a fixed electrode layer and a third sacrificial layer on a substrate; wherein the sensing area of the first movable electrode layer is provided with a first release hole, and the sensing area of the fixed electrode layer is provided with a second release hole; performing etching on the third sacrificial layer to form a first sinking hole extending to the surface of the induction region of the first mobile electrode layer, and depositing a connecting column in the first sinking hole; depositing a second moving electrode layer on the third sacrificial layer, wherein a sensing area of the second moving electrode layer is provided with a third release hole; removing the first sacrificial layer, the second sacrificial layer and the third sacrificial layer on the two sides of the induction region of the fixed electrode layer through the first release hole, the second release hole and the third release hole by adopting an erosion process; and blocking the third release hole to obtain the pressure sensor.

The invention relates to a capacitive flexible pressure sensor based on a double-sided hierarchical microstructure and a preparation method of the capacitive flexible pressure sensor, and belongs to the technical field of sensors. An upper flexible electrode layer; an ion sensitive layer; an isolation layer; an ionic gel layer; an intermediate support layer; a lower flexible electrode layer; and a lower encapsulation layer. According to the invention, by designing the double-sided graded microstructure, the ion sensitive layer and the ion gel layer can respond step by step under different pressures, so that the top of the microstructure is contacted at first under low pressure, and high sensitivity is provided; as the pressure is increased, the microstructure gradually topples over, and the contact area is increased, so that linear response is kept in a wide pressure range, and the problems that the sensitivity and the measuring range cannot be obtained at the same time, the response / recovery speed is low, the structure collapses and lags, and the EDL area utilization rate is low are solved.