189results about "Fluid pressure measurement using capacitance variation" patented technology

The invention provides an MEMS pressure sensor and a manufacturing method thereof, and an electronic device, and the method comprises the steps: providing a first substrate, forming at least two first pressure structures on the surface of the first substrate, each first pressure structure comprises a first electrode layer, a first sacrificial layer, a first supporting layer, a second electrode layer, a second supporting layer, and a first cavity, and a first release hole; a second substrate is provided, at least two second pressure structures are formed on the surface of the second substrate, and each second pressure structure comprises a third electrode layer, a second sacrificial layer and a second cavity; bonding the second supporting layer with the second sacrificial layer; the second substrate is removed to expose the third electrode layer, the third electrode layer and the second electrode layer form a variable capacitance structure, the second electrode layer and the first electrode layer form a reference capacitance structure, and the two variable capacitance structures and the two reference capacitance structures jointly form a Wheatstone bridge. According to the scheme, the measurement precision is improved, and the device performance is further improved.

The invention provides an MEMS pressure sensor, a manufacturing method thereof and an electronic device, and the method comprises the steps: providing a first substrate and a second substrate, forming a first pressure structure on the first substrate, and forming a second pressure structure on the second substrate; bonding the first pressure structure and the second pressure structure; the first substrate is removed, the first pressure structure and the second pressure structure jointly form a third pressure structure, the third pressure structure comprises a first electrode layer, a second electrode layer, a third electrode layer, a fourth electrode layer and a fifth electrode layer which are arranged at intervals from top to bottom, and a dielectric layer is formed between every two adjacent electrode layers; and cavities penetrating through the dielectric layers are formed in the dielectric layers. According to the scheme, the multiple electrode layers arranged from bottom to top are formed, the multiple electrode layers form the first capacitor, the second capacitor, the third capacitor and the fourth capacitor respectively, then the Wheatstone bridge is formed jointly, the measurement precision of the MEMS pressure sensor is improved, meanwhile, the plane size of the MEMS pressure sensor is reduced, and the integration level of the device is improved.

The invention relates to the technical field of flexible electronics and sensing, in particular to a capacitive flexible pressure sensor based on a barium titanate composite dielectric layer, which sequentially comprises a lower electrode layer, an upper electrode layer, a lower electrode layer and an upper electrode layer from bottom to top, the composite dielectric layer is arranged on the lower electrode layer and is formed by compounding an elastic polymer matrix and a high-dielectric-constant barium titanate (BaTiO3) filler; the upper electrode layer is made of a flexible conductive material and is arranged on the composite dielectric layer; the lower electrode layer and the upper electrode layer are connected with an external capacitance measuring circuit through wires. According to the sensor disclosed by the invention, the comprehensive performance of high sensitivity, wide detection range, low hysteresis and excellent cycle stability is realized by optimizing the shape of the barium titanate filler, surface modification and composite structure design.

The invention discloses a capacitive flexible sensing array based on an FPC technology and a preparation method thereof, PVDF-TrFE and ionic salt [BMIM / Br] in a specific mass ratio are prepared into an ionic thin film dielectric layer under the action of a cross-linking agent, and a specific rectangular pyramid microstructure is given to the ionic thin film dielectric layer through a microneedle structure mold; and an upper electrode layer and a lower electrode layer for channel multiplexing are prepared in combination with an FPC technology, and finally the sensing array is packaged through vacuum hot pressing bonding. The core innovation of the invention lies in that through the synergistic effect of the ion double electric layer effect, the microstructure stress concentration and the FPC electrode multiplexing design, ultrahigh sensitivity (0-20kPa interval sensitivity gt, 30kPa) and low crosstalk (array crosstalk rate lt, 5%) are realized at the same time. The local deformation characteristic of the microneedle structure effectively restrains edge electric field diffusion, the crosstalk problem of a high-density array is solved from the physical structure, and a key technology is provided for application of flexible electronics in the field of precise tactile perception.

The invention discloses a through needle temperature and pressure sensor and an assembly process, and relates to the technical field of temperature and pressure sensors, and the sensor comprises a ceramic pressure core body and an NTC assembly. An NTC (Negative Temperature Coefficient) through needle for outputting a temperature signal is arranged on the ceramic pressure core body in a penetrating manner; the NTC assembly comprises an NTC chip, a lead wire sleeve, a fixing seat and a metal sheath, a lead wire of the NTC chip is sleeved in the lead wire sleeve and extends out to be arranged through the fixing seat, and the metal sheath is sleeved outside the lead wire sleeve and the NTC chip and is fixed on the fixing seat; the lead of the NTC chip is connected with the NTC through pin through electric resistance welding, so that the connection reliability is improved, and meanwhile, the soldering tin rosin is prevented from sputtering to pollute the fixed seat and the ceramic pressure core body; the structure of the temperature pressure sensor is simplified, the reliability of electric connection is improved, and a signal path is rationalized through lead wire arrangement, metal sheath protection and electric resistance welding direct connection; the problems of complex structure, circuit virtual connection and low reliability of the existing temperature and pressure sensor are effectively solved.

The invention provides a force direction feedback system and method of pneumatic pressure. The system generates a first oscillation signal changing along with air pressure and a second oscillation signal with fixed frequency through a signal conversion module; and the counter counts the cycles of the two paths of oscillation signals. The back noise calibration module samples environment back noise by using a second oscillation signal in a frequency division manner, and eliminates back noise interference in a force count value through a subtractor, so that the problem of detection deviation caused by environment air pressure fluctuation is solved; and the dual-threshold comparison module screens the difference signal through a back noise threshold and an anti-shake threshold, generates a force conversion value, and avoids error output caused by slight fluctuation and shake. The differential operation module processes the force conversion value in combination with the second oscillation signal, the accurate pneumatic force value is output through signal correlation, the pneumatic direction can be distinguished by means of comparison with the fixed reference, and finally accurate and stable feedback of the pneumatic pressure force and direction is achieved.

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

The invention relates to the technical field of transmitters, in particular to a pressure difference transmitting device which comprises a hydraulic body, and an upstream hydraulic channel and a downstream hydraulic channel are arranged in the hydraulic body. The sealing mechanism isolates the high-pressure cavity from the low-pressure cavity when the first pressure detection unit and the second pressure detection unit perform air pressure detection, and communicates the high-pressure cavity with the low-pressure cavity when the first pressure detection unit and the second pressure detection unit do not perform air pressure detection; separate transmission of liquid and gas is carried out through a liquid flow channel composed of an upstream hydraulic channel and a downstream hydraulic channel and a gas pressure cavity channel, so that a high-pressure cavity extends between a first pressure detection unit and the upstream hydraulic channel, a low-pressure cavity extends between a second pressure detection unit and the downstream hydraulic channel, and a medium is introduced at the beginning or discharged after completion; and the damage of measurement components caused by overlarge one-way pressure difference is avoided.

The invention relates to a capacitive flexible pressure sensor based on a double-sided hierarchical microstructure and a preparation method of the capacitive flexible pressure sensor, and belongs to the technical field of sensors. An upper flexible electrode layer; an ion sensitive layer; an isolation layer; an ionic gel layer; an intermediate support layer; a lower flexible electrode layer; and a lower encapsulation layer. According to the invention, by designing the double-sided graded microstructure, the ion sensitive layer and the ion gel layer can respond step by step under different pressures, so that the top of the microstructure is contacted at first under low pressure, and high sensitivity is provided; as the pressure is increased, the microstructure gradually topples over, and the contact area is increased, so that linear response is kept in a wide pressure range, and the problems that the sensitivity and the measuring range cannot be obtained at the same time, the response / recovery speed is low, the structure collapses and lags, and the EDL area utilization rate is low are solved.

In certain examples, methods and semiconductor structures are directed to a force-sensing apparatus (e.g., synthetic skin) comprising an electrode layer and a plurality of deformation-recoverable microstructures in a dielectric region adjacent the electrode layer. In various examples, the deformation-recoverable microstructures are at randomly configured (e.g., in terms of morphology and / or spatial distribution) and, as in a capacitive-type sensor, the dielectric region may include a dielectric layer between a pair of electrode layers and with the dielectric layer and / or at least one of the electrode layers having such deformation- recoverable microstructures integrated into a surface and extending in a direction to sense forces applied towards or against the force-sensing apparatus.

The invention discloses a gas pressure digital monitoring device and monitoring method for power equipment, and relates to the technical field of power equipment monitoring. The device comprises a valve body, a monitoring unit, a pressure adjusting unit, a gas pressure sensing terminal, a gas temperature sensing terminal, a first switch module, a second switch module and a stop valve. The valve body is provided with a first valve element, a second valve element, a first stop block, a second support block, an inter-valve connecting rod, a push rod and a push mechanism. A first port, a second port and a third port are formed in the surface of the valve body. The first valve element and the second valve element slide in the valve body to achieve switching of various communication positions of a first port and a third port in the surface of the valve body, and a proper closed space is provided for self-checking of a device signal output node. The monitoring unit obtains the gas pressure and temperature collected by the gas pressure sensing terminal and the gas temperature sensing terminal, completes comparison and verification of the terminals, and gives an alarm when high and low pressure, early leakage and mixing ratio abnormity of the gas are diagnosed; the device integrates the functions of high-precision measurement, state diagnosis, self-inspection and the like, the device is free of maintenance, the operation and maintenance efficiency is greatly improved, and the production cost is reduced.

The invention provides a hybrid micro / nano structure pressure sensor, a preparation method and electronic equipment. The hybrid micro / nano structure pressure sensor comprises an upper electrode, a lower electrode and an ionic conductive medium layer located between the upper electrode and the lower electrode, the surface of the upper electrode and the surface of the lower electrode are of a preset micro / nano composite structure formed through femtosecond laser etching. By introducing a programmable micro / nano composite structure etched by femtosecond laser on the surface of the metal electrode and combining with the ionic conductive medium layer, the technical problem that the existing pressure sensor is difficult to give consideration to both high sensitivity and wide detection range is solved.

A pressure transmitter includes a pressure sensor having a variable capacitance that is indicative of a sensed pressure, a measurement circuit, an output circuit and an oscillator monitor circuit. The measurement circuit includes an oscillator configured to generate an alternating current (AC) drive signal that is applied to the pressure sensor, and a demodulator configured to demodulate a capacitance signal, which is generated by the pressure sensor in response to the AC drive signal, and produce a pressure signal that is indicative of the capacitance and the sensed pressure. The output circuit is configured to control a loop current in a current control loop to be within an operating range to indicate the sensed pressure based on the pressure signal. The oscillator monitor circuit is configured to monitor the AC drive signal and drive the loop current outside the operating range in response to an invalid AC drive signal.

The invention discloses an integrated double-hole friction stress sensor based on pressure gradient detection, and belongs to the field of friction sensors. The sensor adopts flow field surface pressure to detect the magnitude of friction stress, and a friction pressure sensitive module, a pressure detection module and a friction calculation module are integrated in the sensor. When the pressure sensing double-hole structure is subjected to an incoming flow effect, the wall surface has a pressure gradient due to friction resistance, the differential pressure is amplified through the double-hole structure, the differential pressure and the static pressure are detected through the high-precision differential pressure sensitive core body and the high-precision absolute pressure sensitive core body, and then the friction resistance stress is solved. The sensitive core body adopts an integrated packaging scheme, and a double-hole sensitive structure, a pressure cavity, an absolute pressure sensitive core body, a differential pressure sensitive core body and a detection circuit module can be integrally packaged in a single tube shell, so that application under a high static pressure background is realized. The friction resistance stress sensor is excellent in performance, compact in structure, high in robustness and capable of achieving friction resistance stress detection of the hypersonic flight vehicle under the extreme working condition.

An embodiment of the present specification provides a pressure sensor comprising: a first capacitor formed by a first electrode on which a first conductive microstructure in contact with the first dielectric layer is arranged, a second electrode on which a second conductive microstructure in contact with the second dielectric layer is arranged, and a first dielectric layer between the first electrode and the second electrode; when the first electrode is close to the second electrode in response to external pressure, the first conductive microstructure deforms, and the deformation changes the first capacitance of the first capacitor and generates a sensing signal changing along with the first capacitance.

The application discloses a super-capacitive off-electric flexible pressure sensor and a preparation method thereof. The super-capacitive off-electric flexible pressure sensor comprises a first electrode plate, a second electrode plate and a flexible dielectric layer. The first electrode plate and the second electrode plate are oppositely arranged. The first electrode plate comprises a first flexible substrate and a first electrode layer arranged below the first flexible substrate. The second electrode plate comprises a second flexible substrate and a second electrode layer arranged above the second flexible substrate. The flexible dielectric layer is arranged between the first electrode layer and the second electrode layer. The flexible dielectric layer is a bucky gel composite material obtained by embedding an ionic liquid into a physical cross-linking network combined with acidified carbon nanotubes and polyvinylidene fluoride-hexafluoropropylene copolymer. The bucky gel based on a micro-ridge structure is used as the flexible dielectric layer, and the flexible electrode is pressed and bonded, so that the super-capacitive off-electric flexible pressure sensor is prepared.

The application discloses a kind of graphene oxide modified ionic liquid's electric field pressure sensor and preparation method, preparation method includes the following steps: (1) synthesis hydroxyl modified cation salt (2) ionic liquid preparation (3) ionic liquid and graphene oxide conjugate connection (4) PU foaming and covalent grafting (5) sensor assembly (6) sensor packaging.The application is modified by introducing graphene oxide (GO) to ionic liquid and makes it covalently grafted in polyurethane (PU) foam skeleton, overcomes the key technical bottleneck that signal drift, response delay and short cycle life etc. caused by ionic liquid leakage, migration and interface instability in traditional electric field pressure sensor.The application realizes the unity of high sensitivity, fast response, wide linear range and excellent durability, provides key technical support for long-term reliable application of electric field sensor in complex environment.

The invention relates to a pressure sensor (10) for measuring ambient pressure, comprising a first pressure measuring element (12) with a first cavity (16) and at least one first deflection element (20) spanning at least section by section over the first cavity (16) and deflectable in a normal direction (18) depending on the ambient pressure, a second pressure measuring element (14) with a second cavity (44) and at least one second deflection element (46) spanning at least section by section over the second cavity (44) and deflectable in the normal direction (18) depending on the ambient pressure, wherein the second deflection element (46) comprises the first pressure measuring element (12) and a peripheral deflection region (48) adjacent to the first pressure measuring element (12), wherein the second cavity (44) overlaps the first cavity (16) at least section by section with respect to the normal direction (18),wherein the first deflection element (20) has a smaller material thickness than the edge-side deflection area (48).

The application discloses a pressure sensor based on friction nanogenerator, which can be deployed in a wearable device for monitoring pulse fluctuation, or deployed in an electronic device with a touch screen for detecting touch action. The sensor comprises two friction layers and at least one electrode layer. The two friction layers are respectively made of materials with different electron loss and gain abilities. The surface of at least one friction layer comprises a multi-stage micro-nano structure for inducing equal and opposite net charges corresponding to the applied pressure on the two friction layers under pressure. The multi-stage micro-nano structure comprises at least two kinds of micro-nano columnar structures with different heights. The electrode layer is used for generating current based on the net charges. The application can make the pressure sensor maintain high sensitivity to large static force through the designed multi-stage structure with different heights, and can expand the measurement range of the pressure sensor, so that the sensor maintains the same or similar sensitivity under various static forces.

The invention relates to a microsensor (10) for measuring a physical quantity (14), comprising a first measuring element (16) with a first measuring characteristic (C1) and a second measuring element (56) with a second measuring characteristic (C2), which is mechanically delimited and offset from the first measuring area (54) by means of a second measuring characteristic (C2), and a second measuring element (18) with a micromechanical first deflection element (18) which is deflectable depending on the quantity (14), and a second measuring element (28) which is measurable in a third measuring area (52) with a third measuring characteristic (C3), wherein the third measuring area (52) overlaps a transition (53) between the first and second measuring areas (54, 56) and forms a first overlap area (58) with the first measuring area (54) and a second overlap area (60) with the second measuring area (56).wherein the measured quantity (14) present at least at the transition (53) can be measured by measuring the second measuring element (28) based on the third measuring characteristic (C3). Furthermore, the invention relates to a method for measurement and a method for sensor condition monitoring.

An exemplary pressure transducer is disclosed that includes an absolute pressure sensor including a fluid input and configured to output a signal representative of the pressure sensed at the fluid input, and an outer insulating housing around the absolute pressure sensor, where a space between the housing and the absolute pressure sensor contains a vacuum pressure.

The utility model discloses a gas cylinder sealing performance testing device, and belongs to the field of gas cylinder testing. The technical scheme adopted by the utility model is as follows: the gas cylinder leakproofness testing device comprises a fixed rack, and a gas cylinder leakproofness testing part is arranged above the fixed rack and can be used for testing the leakproofness of a gas cylinder; the device optimizes and improves the structure of an existing gas cylinder leakproofness testing device, performs multi-angle testing on a gas cylinder by arranging the outer wall testing component and the side wall testing component, effectively improves the quality and precision of gas cylinder leakproofness testing, can realize automatic testing of the gas cylinder, reduces the complexity of manual assistance, and improves the working efficiency. Therefore, labor loss is reduced.

The invention relates to a pressure sensor with high detection performance and optimized manufacturing. A pressure sensor includes a substrate, a deformable detection element suspended on the substrate, and an anchor structure configured to support the deformable detection element over the substrate. The deformable detection element extends in a first direction at a distance from the substrate and is deformable in accordance with a pressure to be detected. The anchoring structure includes anchoring portions extending from the substrate, coupled to the deformable detection element, and arranged at a distance from each other along a second direction transverse to the first direction. A structural region of the anchoring structure extends between the anchoring portions along a second direction and includes at least one release opening extending through the structural region.

The invention provides a direct bonding-based differential capacitive pressure sensor and a pressure detection method. The direct bonding-based differential capacitive pressure sensor comprises a metal base, a sapphire diaphragm and a sapphire fixed electrode plate, the sapphire diaphragm is fixedly connected to the metal base through a direct bonding process; the sapphire fixed electrode plate is fixedly connected to the sapphire diaphragm through a direct bonding process, and a capacitance gap with a preset distance is formed between the sapphire fixed electrode plate and the sapphire diaphragm; the sapphire diaphragm and the sapphire fixed electrode plate are respectively provided with a plurality of corresponding electrodes to form a differential capacitor structure; the difference value of the material thermal expansion coefficients of the metal base and the sapphire is smaller than a preset threshold value. The differential capacitive pressure sensor has relatively low sealing stress and relatively small temperature excursion, and the distance control precision between the diaphragm and the fixed electrode plate is ensured, so that the inherent precision of the pressure sensor is improved.

The application discloses a solid composite structure pressure guide wire, which comprises a guide wire body, a plurality of pressure sensing units and a conductive film. The guide wire body is of a solid structure, and a helical groove is formed in the surface of the guide wire body. A plurality of mounting grooves are arranged at intervals on the helical groove. The plurality of pressure sensing units are embedded in the mounting grooves. The conductive film is attached to the helical groove, electrically connected with the pressure sensing units, and extends to the tail of the guide wire body to be connected with an operating handle at one end. The solid structure avoids the problem of excessive material removal caused by accommodating sensors in traditional hollow lumen guide wires. Compared with the existing hollow guide wire, the structure can complete the pressure measurement of multiple points in the blood vessel at one time, avoids the error accumulation caused by multiple zero calibration operations, further shortens the surgical procedure, and reduces the risk of endothelial injury in the blood vessel caused by repeated operations.

The present application relates to the field of implantable pressure sensor, disclose a multi-working condition adaptation corrugated diaphragm double cavity composite pressure sensor, including: corrugated diaphragm, pressure sensing layer and substrate;Corrugated diaphragm is set in the upside of pressure sensing layer, pressure sensing layer is sealed and arranged in the upside of substrate;The side of pressure sensing layer close to substrate is provided with first capacitor cavity and second capacitor cavity arranged at intervals, and flow channel is arranged between first capacitor cavity and second capacitor cavity;Corrugated diaphragm includes integrally formed main corrugated part, auxiliary corrugated part and flat part, flat part is attached to pressure sensing layer, main corrugated part is arranged corresponding to first capacitor cavity, and auxiliary corrugated part is arranged corresponding to second capacitor cavity.The present application realizes the adaptation to different pressure range, pressure type working condition through the design of double cavity and composite corrugated structure, improves the measurement reliability and environmental adaptability of sensor in different implant environment, and the structure design is reasonable and practical.

Disclosed example pressure sensors include: a first body defining a reference pressure cavity; a second body defining a measured pressure cavity and having an inlet configured to receive a fluid; a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less; an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm; and measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.

A microelectromechanical pressure sensor having a housing unit, a base structure, a pressure sensor element, and a deflection measuring element. The housing unit defines a receiving space. The base structure, the pressure sensor element, and the deflection measuring element are arranged in the receiving space. The receiving space is filled with a protective medium which covers the pressure sensor element. The pressure sensor element is arranged so as to be deflectable relative to the base structure. The deflection measuring element is configured to determine a relative deflection of the pressure sensor element relative to the base structure. A method for correcting pressure measurement values of a microelectromechanical pressure sensor is also described.

Provided is a pressure sensor, including: a first substrate; a second substrate having a pressure-sensitive membrane, a pressure reference cavity is provided between the pressure-sensitive membrane and the first substrate, the pressure-sensitive membrane is configured to deform; a capacitor having a first / second electrode plate, the first electrode plate being disposed on the first substrate, the second electrode plate being disposed on the pressure-sensitive membrane; a detection inductor having coil structures, each coil structure includes a first trace, a second trace and a conductive post; the first trace is disposed on a side of the first substrate, the second trace is disposed on the other side of the first substrate, orthographic projections of the first trace and the second trace on the first substrate intersect, the first trace is connected to the second trace at an intersection position; the detection inductor and the capacitor form a resonant circuit.

It is planned that, at least in certain areas, electrode structures will be inserted between deformable membrane regions of membrane structures and a central electrode structure or a counter electrode structure located between two membrane structures. These additional electrode structures, i.e., the first and second electrode structures, will be attached to the support structures that mechanically connect the membrane structures and freely penetrate the central electrode structure, specifically at a distance from the deformable membrane regions of the membrane structures (i.e., the first and second membranes) and at a distance from the central electrode structure.