354results about "Fluid pressure measurement using capacitance variation" patented technology

The invention provides an MEMS pressure sensor and a manufacturing method thereof, and an electronic device, and the method comprises the steps: providing a first substrate, forming at least two first pressure structures on the surface of the first substrate, each first pressure structure comprises a first electrode layer, a first sacrificial layer, a first supporting layer, a second electrode layer, a second supporting layer, and a first cavity, and a first release hole; a second substrate is provided, at least two second pressure structures are formed on the surface of the second substrate, and each second pressure structure comprises a third electrode layer, a second sacrificial layer and a second cavity; bonding the second supporting layer with the second sacrificial layer; the second substrate is removed to expose the third electrode layer, the third electrode layer and the second electrode layer form a variable capacitance structure, the second electrode layer and the first electrode layer form a reference capacitance structure, and the two variable capacitance structures and the two reference capacitance structures jointly form a Wheatstone bridge. According to the scheme, the measurement precision is improved, and the device performance is further improved.

The invention provides an MEMS pressure sensor, a manufacturing method thereof and an electronic device, and the method comprises the steps: providing a first substrate and a second substrate, forming a first pressure structure on the first substrate, and forming a second pressure structure on the second substrate; bonding the first pressure structure and the second pressure structure; the first substrate is removed, the first pressure structure and the second pressure structure jointly form a third pressure structure, the third pressure structure comprises a first electrode layer, a second electrode layer, a third electrode layer, a fourth electrode layer and a fifth electrode layer which are arranged at intervals from top to bottom, and a dielectric layer is formed between every two adjacent electrode layers; and cavities penetrating through the dielectric layers are formed in the dielectric layers. According to the scheme, the multiple electrode layers arranged from bottom to top are formed, the multiple electrode layers form the first capacitor, the second capacitor, the third capacitor and the fourth capacitor respectively, then the Wheatstone bridge is formed jointly, the measurement precision of the MEMS pressure sensor is improved, meanwhile, the plane size of the MEMS pressure sensor is reduced, and the integration level of the device is improved.

The invention relates to the technical field of sensor measurement, and discloses a bimodal sensor based on a single unit and a measurement method thereof.The sensor comprises a flexible upper substrate used for providing flexible supporting and packaging protection for the upper surface of the whole sensor, an upper electrode layer comprising a first circular electrode and used for forming capacitance change to respond to pressure stimulation, and a lower electrode layer comprising a second circular electrode and used for forming capacitance change to respond to pressure stimulation; the upper electrode layer is arranged on the flexible lower substrate and serves as a leading-out end of an electric signal; the method comprises the steps of system initialization, bimodal signal synchronous acquisition and transmission, signal processing and signal output and display. According to the invention, through the cooperation of the concentric circle electrode design and the independent signal channel, the hardware decoupling of temperature and pressure signals is realized, the problem that the traditional sensor interferes with pressure measurement and depends on algorithm compensation due to temperature drift caused by sharing the same electrode and signal channel is solved, and the accuracy and reliability of bimodal measurement are fundamentally improved.

The invention relates to the technical field of flexible electronics and sensing, in particular to a capacitive flexible pressure sensor based on a barium titanate composite dielectric layer, which sequentially comprises a lower electrode layer, an upper electrode layer, a lower electrode layer and an upper electrode layer from bottom to top, the composite dielectric layer is arranged on the lower electrode layer and is formed by compounding an elastic polymer matrix and a high-dielectric-constant barium titanate (BaTiO3) filler; the upper electrode layer is made of a flexible conductive material and is arranged on the composite dielectric layer; the lower electrode layer and the upper electrode layer are connected with an external capacitance measuring circuit through wires. According to the sensor disclosed by the invention, the comprehensive performance of high sensitivity, wide detection range, low hysteresis and excellent cycle stability is realized by optimizing the shape of the barium titanate filler, surface modification and composite structure design.

The invention relates to the technical field of flexible electronic sensing, and particularly discloses a composite fiber membrane-based capacitive flexible pressure sensor integrated system and a preparation method thereof. The sensor is composed of a composite fiber membrane sensitive layer, an interlayer type electrode structure, a multi-channel signal acquisition module and an intelligent data processing system. Wherein the composite fiber membrane is prepared through an electrostatic spinning technology, polyvinylidene fluoride serves as a matrix, ionic liquid with the mass ratio of 40%-70% is evenly dispersed, a three-dimensional porous structure is formed, and a pressure signal is converted into capacitance change through the double-electric-layer capacitance effect; the signal acquisition module adopts a high-precision capacitance digital converter to cooperatively work with a microcontroller, 9-channel parallel data acquisition is realized, the resolution reaches 6aF, and data is transmitted through an anti-interference bus protocol; and the data processing system dynamically analyzes the pressure-capacitance relationship based on an exponential function model, suppresses noise to be below 0.1 aF RMS in combination with a filtering algorithm, and synchronously generates a visual pressure distribution map.

The invention discloses a capacitive flexible sensing array based on an FPC technology and a preparation method thereof, PVDF-TrFE and ionic salt [BMIM / Br] in a specific mass ratio are prepared into an ionic thin film dielectric layer under the action of a cross-linking agent, and a specific rectangular pyramid microstructure is given to the ionic thin film dielectric layer through a microneedle structure mold; and an upper electrode layer and a lower electrode layer for channel multiplexing are prepared in combination with an FPC technology, and finally the sensing array is packaged through vacuum hot pressing bonding. The core innovation of the invention lies in that through the synergistic effect of the ion double electric layer effect, the microstructure stress concentration and the FPC electrode multiplexing design, ultrahigh sensitivity (0-20kPa interval sensitivity gt, 30kPa) and low crosstalk (array crosstalk rate lt, 5%) are realized at the same time. The local deformation characteristic of the microneedle structure effectively restrains edge electric field diffusion, the crosstalk problem of a high-density array is solved from the physical structure, and a key technology is provided for application of flexible electronics in the field of precise tactile perception.

The invention discloses a ceramic capacitive pressure sensor, which comprises a packaging shell, a commercial small circular shell is arranged on the packaging shell, a copper pipe is arranged on one side, far away from the packaging shell, of the commercial small circular shell, an electronic wire is arranged on the packaging shell in a penetrating manner, and the electronic wire is connected with the packaging shell. The insulating paper, the inner copper body and the check ring are integrally designed into the combined base with the PPS and the glass fiber wrapping the SUS metal inner container, a traditional multi-part manual assembly structure is replaced, and compared with the scheme that in the prior art, insulating paper and an inner copper body shielding cover need to be bonded, the number of parts is reduced, and the cost is reduced. The cost is reduced, meanwhile, automatic injection molding is achieved, manual assembly errors are avoided, the assembly efficiency is improved, the compression strength of the PPS composite reinforcing material is improved compared with that of traditional insulation paper, and the reliability in the high-pressure-resistant environment is ensured.

The invention discloses a through needle temperature and pressure sensor and an assembly process, and relates to the technical field of temperature and pressure sensors, and the sensor comprises a ceramic pressure core body and an NTC assembly. An NTC (Negative Temperature Coefficient) through needle for outputting a temperature signal is arranged on the ceramic pressure core body in a penetrating manner; the NTC assembly comprises an NTC chip, a lead wire sleeve, a fixing seat and a metal sheath, a lead wire of the NTC chip is sleeved in the lead wire sleeve and extends out to be arranged through the fixing seat, and the metal sheath is sleeved outside the lead wire sleeve and the NTC chip and is fixed on the fixing seat; the lead of the NTC chip is connected with the NTC through pin through electric resistance welding, so that the connection reliability is improved, and meanwhile, the soldering tin rosin is prevented from sputtering to pollute the fixed seat and the ceramic pressure core body; the structure of the temperature pressure sensor is simplified, the reliability of electric connection is improved, and a signal path is rationalized through lead wire arrangement, metal sheath protection and electric resistance welding direct connection; the problems of complex structure, circuit virtual connection and low reliability of the existing temperature and pressure sensor are effectively solved.

The invention relates to the technical field of flexible electronics, in particular to a method for preparing a dielectric layer of a capacitive sensor, which comprises the following main steps of: preparing an ITO / PET (indium tin oxide / polyethylene terephthalate) electrode; spontaneously forming a flexible dielectric layer; a flexible dielectric layer dispersion process; and packaging the device. The array type flexible pressure sensor prepared by the invention has the advantages of high-sensitivity feedback, stable work, good signal transmission, good flexibility and the like.

The invention provides a force direction feedback system and method of pneumatic pressure. The system generates a first oscillation signal changing along with air pressure and a second oscillation signal with fixed frequency through a signal conversion module; and the counter counts the cycles of the two paths of oscillation signals. The back noise calibration module samples environment back noise by using a second oscillation signal in a frequency division manner, and eliminates back noise interference in a force count value through a subtractor, so that the problem of detection deviation caused by environment air pressure fluctuation is solved; and the dual-threshold comparison module screens the difference signal through a back noise threshold and an anti-shake threshold, generates a force conversion value, and avoids error output caused by slight fluctuation and shake. The differential operation module processes the force conversion value in combination with the second oscillation signal, the accurate pneumatic force value is output through signal correlation, the pneumatic direction can be distinguished by means of comparison with the fixed reference, and finally accurate and stable feedback of the pneumatic pressure force and direction is achieved.

An analog frontend architecture for a capacitive pressure sensor. The analog frontend architecture includes a low-noise amplifier unit for low-noise amplification of sensor signals of the capacitive pressure sensor, the low-noise amplifier unit including a first integrator unit and a second integrator unit, the first integrator unit being connected to input terminals of the low-noise amplifier unit, being designed as a boxcar integrator, and being configured to amplify sensor signals of the capacitive pressure sensor according to the boxcar integration technique, and the second integrator unit being connected to output terminals of the low-noise amplifier unit and being configured to integrate the amplified voltage signals of the first integrator unit.

The invention relates to the technical field of pressure sensors, and provides a pressure sensor and a preparation method thereof. The pressure sensor comprises an upper pole plate, a pressure sensing film and a metal base. The upper pole plate is made of an aluminum oxide crystal material; the pressure sensing film is made of an aluminum oxide crystal material and is arranged on one side of the upper polar plate, and the pressure sensing film and the upper polar plate form a capacitor structure; the metal base is arranged on one side, deviating from the upper polar plate, of the pressure-sensitive film and used for supporting the upper polar plate and the pressure-sensitive film; wherein the upper pole plate is provided with a pole plate gap, the upper pole plate is in direct bonding connection with the pressure sensing film, and the pressure sensing film is in direct bonding connection with the metal base. The high-temperature-resistant corrosion-resistant pressure sensor overcomes the defects that in the prior art, a pressure sensor is prone to generating stress in a high-temperature environment, so that the zero-bias stability of the sensor is poor, and the precision is reduced after long-term use, and the high-temperature-resistant corrosion-resistant pressure sensor is achieved.

The invention relates to the technical field of transmitters, in particular to a pressure difference transmitting device which comprises a hydraulic body, and an upstream hydraulic channel and a downstream hydraulic channel are arranged in the hydraulic body. The sealing mechanism isolates the high-pressure cavity from the low-pressure cavity when the first pressure detection unit and the second pressure detection unit perform air pressure detection, and communicates the high-pressure cavity with the low-pressure cavity when the first pressure detection unit and the second pressure detection unit do not perform air pressure detection; separate transmission of liquid and gas is carried out through a liquid flow channel composed of an upstream hydraulic channel and a downstream hydraulic channel and a gas pressure cavity channel, so that a high-pressure cavity extends between a first pressure detection unit and the upstream hydraulic channel, a low-pressure cavity extends between a second pressure detection unit and the downstream hydraulic channel, and a medium is introduced at the beginning or discharged after completion; and the damage of measurement components caused by overlarge one-way pressure difference is avoided.

The invention discloses an ionic gel flexible pressure film sensing array and a preparation method thereof. The sensing array comprises two layers of patterned flexible electrodes, an ionic gel unit array containing a surface microstructure and a patterned isolation layer. The ionic gel layer and the isolation layer are located on the same plane, each ionic gel unit is surrounded by the isolation layer unit structure, the two layers of electrodes respectively cover the upper side and the lower side, the ionic gel is in contact with an electrode conductive region, and the isolation layer is in contact with a non-conductive region. The preparation method comprises the following steps: performing laser etching and patterning processing on the flexible electrode; preparing a mask with a hollow pattern and covering the mask to the first electrode; imprinting on the polymer film to prepare a microstructure mold; dropwise adding liquid ionic gel into the mold, and pressing and curing the first electrode covered with the mask to form an ionic gel unit array; and bonding the isolation layer and the two layers of electrodes. The preparation method is low in cost, simple, flexible, thin in device thickness, wide in measuring range, high in sensitivity and signal-to-noise ratio, resistant to sensitive layer crosstalk and suitable for various pressure detection scenes.

The invention relates to a capacitive flexible pressure sensor based on a double-sided hierarchical microstructure and a preparation method of the capacitive flexible pressure sensor, and belongs to the technical field of sensors. An upper flexible electrode layer; an ion sensitive layer; an isolation layer; an ionic gel layer; an intermediate support layer; a lower flexible electrode layer; and a lower encapsulation layer. According to the invention, by designing the double-sided graded microstructure, the ion sensitive layer and the ion gel layer can respond step by step under different pressures, so that the top of the microstructure is contacted at first under low pressure, and high sensitivity is provided; as the pressure is increased, the microstructure gradually topples over, and the contact area is increased, so that linear response is kept in a wide pressure range, and the problems that the sensitivity and the measuring range cannot be obtained at the same time, the response / recovery speed is low, the structure collapses and lags, and the EDL area utilization rate is low are solved.

In certain examples, methods and semiconductor structures are directed to a force-sensing apparatus (e.g., synthetic skin) comprising an electrode layer and a plurality of deformation-recoverable microstructures in a dielectric region adjacent the electrode layer. In various examples, the deformation-recoverable microstructures are at randomly configured (e.g., in terms of morphology and / or spatial distribution) and, as in a capacitive-type sensor, the dielectric region may include a dielectric layer between a pair of electrode layers and with the dielectric layer and / or at least one of the electrode layers having such deformation- recoverable microstructures integrated into a surface and extending in a direction to sense forces applied towards or against the force-sensing apparatus.

The utility model discloses a novel pressure and temperature composite sensor. Comprising a shell, an elastic tube, a carrying table, a pressure channel, a stress isolation groove, a first insulating sheet, a second insulating sheet, a third insulating sheet, a fourth insulating sheet, a movable electrode sheet, a fifth insulating sheet, a fixed electrode sheet and a conductive piece, wherein the conductive piece is arranged in the stress isolation groove in a bending manner; one end of the conductive piece is electrically connected with the movable electrode sheet; the fixed electrode lead is electrically connected with the fixed electrode slice; the NTC thermistor is wrapped by heat-conducting gel and is arranged in the stress isolation groove; one end of the connecting lead is connected with the NTC thermistor, and the other end of the connecting lead extends to the outside of the shell. By adopting the technical scheme, the elastic tube of the pressure sensor is also used as a protective sleeve of the NTC thermistor, so that a single pressure sensor is changed into a temperature and pressure integrated composite sensor; the conductive piece arranged in the stress isolation groove in a bent mode changes the previous two capacitor structures connected in series into a single capacitor structure, and the size can be reduced.

The invention discloses a gas pressure digital monitoring device and monitoring method for power equipment, and relates to the technical field of power equipment monitoring. The device comprises a valve body, a monitoring unit, a pressure adjusting unit, a gas pressure sensing terminal, a gas temperature sensing terminal, a first switch module, a second switch module and a stop valve. The valve body is provided with a first valve element, a second valve element, a first stop block, a second support block, an inter-valve connecting rod, a push rod and a push mechanism. A first port, a second port and a third port are formed in the surface of the valve body. The first valve element and the second valve element slide in the valve body to achieve switching of various communication positions of a first port and a third port in the surface of the valve body, and a proper closed space is provided for self-checking of a device signal output node. The monitoring unit obtains the gas pressure and temperature collected by the gas pressure sensing terminal and the gas temperature sensing terminal, completes comparison and verification of the terminals, and gives an alarm when high and low pressure, early leakage and mixing ratio abnormity of the gas are diagnosed; the device integrates the functions of high-precision measurement, state diagnosis, self-inspection and the like, the device is free of maintenance, the operation and maintenance efficiency is greatly improved, and the production cost is reduced.

The invention provides a hybrid micro / nano structure pressure sensor, a preparation method and electronic equipment. The hybrid micro / nano structure pressure sensor comprises an upper electrode, a lower electrode and an ionic conductive medium layer located between the upper electrode and the lower electrode, the surface of the upper electrode and the surface of the lower electrode are of a preset micro / nano composite structure formed through femtosecond laser etching. By introducing a programmable micro / nano composite structure etched by femtosecond laser on the surface of the metal electrode and combining with the ionic conductive medium layer, the technical problem that the existing pressure sensor is difficult to give consideration to both high sensitivity and wide detection range is solved.

The utility model relates to a grounding structure of a ceramic capacitive pressure sensor. The utility model comprises a metal shell which is provided with an annular cavity; the plastic socket comprises a connecting column extending into the annular cavity; the printed circuit board is arranged in the annular cavity; and the grounding insert comprises an annular part and a connecting part, wherein the annular part is respectively propped against the side walls of the annular cavity and the connecting column, and the connecting part extends to the annular part, is partially embedded in the plastic socket and is connected with the printed circuit board. The utility model solves the problems that the ground lug of the ceramic pressure sensor in the prior art is easy to break during assembly and the ground lug is loose and poor in contact after long-time use.

Gas pressure measuring device (100) for measuring a pressure (P, P1) of a process gas (304) at a work location (306) of a device (300) for particle beam-induced processing of a photomask (302) for microlithography, comprising: a chamber (102) with an opening (104) on a first side (118) for receiving the process gas (304) and a pressure diaphragm (122) on a second side (124), and a sensor unit (134) for detecting a deflection (A) of the pressure diaphragm (122) for determining a pressure (P1) of the process gas (304) in the chamber (102) as a pressure (P) of the process gas (304) at the workplace (306), wherein the gas pressure measuring device (100) is arranged for placement in the device (300) such that its opening (104) is located at the working location (306) of the device (300).

The invention relates to the technical field of dielectric layers, in particular to a microstructure composite dielectric layer and a preparation method and application thereof. The preparation method comprises the following steps: S1, scanning a PI film by using laser to serve as an LIG template; s2, slowly adding the carbon nanotube dispersion liquid into the polydimethylsiloxane prepolymer, fully stirring and dispersing, then adding a curing agent, and continuously stirring to obtain a stable SWCNT / PDMS composite solution; and S3, uniformly spreading the SWCNT / PDMS composite solution on the surface of the LIG template, carrying out thermosetting treatment, cooling to room temperature, and stripping a formed SWCNT / PDMS film to obtain the microstructure composite dielectric layer. The novel method for manufacturing the capacitive pressure sensor is adjustable in structural parameters, simple and convenient in preparation process, high in repeatability, suitable for large-area preparation of the flexible substrate and capable of achieving high sensitivity, low detection limit and excellent cycle stability.

The invention discloses a flexible capacitive pressure sensor and a preparation method, and relates to the technical field of flexible capacitive pressure sensors.The flexible capacitive pressure sensor comprises a shell, a second binding post arranged at one end of the shell, a shell cover arranged at the other end of the shell and a first binding post arranged on the shell cover, an upper packaging layer is arranged in the shell, an upper electrode layer is arranged on one side of the upper packaging layer, and a lower electrode layer is arranged on the other side of the upper packaging layer; a middle dielectric layer is arranged on one side of the upper electrode layer, a lower electrode layer is arranged on one side of the middle dielectric layer, and a lower packaging layer is arranged on one side of the lower electrode layer; conductive film structures are arranged between the lower electrode layer and the middle dielectric layer and between the upper electrode layer and the middle dielectric layer; a sealing assembly is arranged in the shell cover; an extrusion assembly is further arranged in the shell cover; by using the sealing assembly, the sealing performance between the shell and the shell cover is improved, external moisture and dust are prevented from entering the shell, the accuracy of capacitance measurement is improved, and the service life of the flexible capacitive pressure sensor is further prolonged.

A pressure transmitter includes a pressure sensor having a variable capacitance that is indicative of a sensed pressure, a measurement circuit, an output circuit and an oscillator monitor circuit. The measurement circuit includes an oscillator configured to generate an alternating current (AC) drive signal that is applied to the pressure sensor, and a demodulator configured to demodulate a capacitance signal, which is generated by the pressure sensor in response to the AC drive signal, and produce a pressure signal that is indicative of the capacitance and the sensed pressure. The output circuit is configured to control a loop current in a current control loop to be within an operating range to indicate the sensed pressure based on the pressure signal. The oscillator monitor circuit is configured to monitor the AC drive signal and drive the loop current outside the operating range in response to an invalid AC drive signal.

The invention provides a comb tooth capacitive pressure sensor and a preparation method thereof, and belongs to the technical field of capacitive pressure sensors. The fixing frame is connected with the substrate through an insulating layer, a containing area is formed in the fixing frame, and a pressure sensing film is formed on the portion, corresponding to the containing area, of the substrate; the multiple fixed comb teeth are arranged in the containing area, and a gap is formed between each fixed comb tooth and the pressure sensing film; the plurality of movable comb teeth are arranged in the accommodating area, and each movable comb tooth is connected with the pressure sensing film through an insulating layer; the movable comb teeth and the fixed comb teeth are alternately arranged in the containing area in the first direction, and the orthographic projection of the movable comb teeth on the first plane and the orthographic projection of the fixed comb teeth on the first plane are at least partially overlapped. According to the comb tooth capacitive pressure sensor and the preparation method thereof provided by the invention, the linearity and sensitivity of capacitance measurement of the comb tooth capacitive pressure sensor can be improved.

The application provides a resonant differential pressure sensor capable of static pressure measurement and a preparation method. The differential pressure sensor comprises a cover plate structure from top to bottom, a silicon-on-insulator (SOI) structure and a pressure guide structure. The cover plate structure comprises two small cover plates, i.e., a first small cover plate and a second small cover plate, and a large cover plate. The SOI structure comprises a device layer, a buried oxygen layer and a substrate layer. The beam membrane integrated structure has a stress amplification effect, which improves the small static pressure and differential pressure measurement sensitivity in the prior art, and the problems of large hysteresis, poor repeatability and poor precision caused thereby.

A pressure sensor comprises a substrate (100) and at least one capacitive second electrode (12) arranged on the substrate (100), the at least one second electrode (12) is provided with a release hole (121), a cavity (13) is formed between the at least one second electrode (12) and the substrate (100), and the at least one second electrode (12) surrounds the side wall of the cavity (13); the hole sealing layer (30) is arranged on the periphery of the cavity (13), and the hole sealing layer (30) covers the release hole (121) and at least part of the surface, away from the substrate (100), of the at least one second electrode (12). The invention also provides a preparation method of the pressure sensor and a pressure sensing assembly.

The invention discloses an integrated double-hole friction stress sensor based on pressure gradient detection, and belongs to the field of friction sensors. The sensor adopts flow field surface pressure to detect the magnitude of friction stress, and a friction pressure sensitive module, a pressure detection module and a friction calculation module are integrated in the sensor. When the pressure sensing double-hole structure is subjected to an incoming flow effect, the wall surface has a pressure gradient due to friction resistance, the differential pressure is amplified through the double-hole structure, the differential pressure and the static pressure are detected through the high-precision differential pressure sensitive core body and the high-precision absolute pressure sensitive core body, and then the friction resistance stress is solved. The sensitive core body adopts an integrated packaging scheme, and a double-hole sensitive structure, a pressure cavity, an absolute pressure sensitive core body, a differential pressure sensitive core body and a detection circuit module can be integrally packaged in a single tube shell, so that application under a high static pressure background is realized. The friction resistance stress sensor is excellent in performance, compact in structure, high in robustness and capable of achieving friction resistance stress detection of the hypersonic flight vehicle under the extreme working condition.

Capacitive pressure sensor with a pressure measuring cell (10) for detecting the pressure of a medium in a container and an evaluation circuit (30) for preparing and processing the measuring signals transmitted by the pressure measuring cell (10), wherein the pressure measuring cell (10) has a pressure-sensitive measuring capacitor (C M ) and a reference capacitor (C R ) and the pressure measuring cell (10) is connected to the evaluation circuit (30) via three lines (L1, L2, L3), wherein a first line (L1) is connected to a common electrode (COM) of measuring capacitor (C M ) and reference capacitor (C R ), a second line (L2) to the measuring capacitor (C M ) and a third line (L3) to the reference capacitor (C R ) leads, wherein the evaluation circuit (30) comprises a first operational amplifier (OP1), the low-impedance output of which is connected to the common electrode (COM) via the first line (L1), characterized by that the common electrode (COM) is used in addition to the temperature measurement of the medium applied to the pressure measuring cell (10) and the temperature measurement is carried out exclusively via the common electrode (COM), in that the common electrode (COM) is connected to a fourth line (L4) in addition to the third line (L3), by means of the third and fourth lines (L3, L4) the voltage drop across the common electrode (COM) is tapped and fed to an evaluation unit (AWE), and that at the output of the evaluation unit (AWE) a voltage signal U Temp corresponding to the temperature detected by the common electrode (COM), wherein the common electrode (COM) is designed as a meandering resistance track and the pressure sensor (1) comprises a constant current regulator (KSR), by means of which the common electrode (COM) is supplied with a constant current I via a fourth line (L4) konst is applied, whereby the constant current I konst from the output of the first operational amplifier (OP1), so that the course of the tapped voltage only depends on the medium temperature.

An embodiment of the present specification provides a pressure sensor comprising: a first capacitor formed by a first electrode on which a first conductive microstructure in contact with the first dielectric layer is arranged, a second electrode on which a second conductive microstructure in contact with the second dielectric layer is arranged, and a first dielectric layer between the first electrode and the second electrode; when the first electrode is close to the second electrode in response to external pressure, the first conductive microstructure deforms, and the deformation changes the first capacitance of the first capacitor and generates a sensing signal changing along with the first capacitance.