687results about "Fluid pressure measurement using capacitance variation" patented technology

A method for detecting a state of an energy storage device (e.g. lithium-ion battery) is provided, which includes acquiring at least one of a change signal of a temperature or a change signal of a pressure inside the energy storage device, and determining the state of the energy storage device based thereon. The method may further include triggering a warning when the state of the energy storage device meets a preset condition, such as when the energy storage device is determined to be in an irreversible state, an internal short circuit state, a safety valve opening state, or a thermal runaway state. A detection device implementing the detection method is also provided, which comprises a sensing module and an analyzing module. The sensing module is arranged at an interior position of the energy storage device, and can include an optical sensor and / or an electrical sensor.

A transistor that has a capacitance that varies in response to pressure includes a gel coupled to a gate thereof. The gel comprises a eutectic mixture having ionic conductivity.

The invention provides a method for testing flow-induced noise of a pipeline. The method comprises the following steps: S1, determining measurement positions at an upstream flow channel and a downstream flow channel of a measured element, carrying out normalization processing on measured signals, and calculating the pressure power spectrum density of the inner wall surface of a pipe; s2, calculating a wall surface pressure fluctuation time domain cross correlation coefficient, and analyzing correlation characteristics between wall surface pressure pulsation; s3, spectrum intrinsic orthogonal decomposition is carried out on the pressure pulsation field, and space-time decoupling is achieved through time domain-frequency domain conversion; s4, extracting a dominant flow-induced noise mode, constructing an empirical frequency-wave number spectrum, and decomposing fluctuating energy distribution into contributions of different frequency and wave number combinations; s5, analyzing the decoupled flow-induced noise characteristic result, and identifying the amplitude-frequency characteristic of the flow-induced noise; according to the invention, real-time measurement of pressure pulsation in the pipeline can be realized, decoupling analysis of flow field pulsation and sound pressure pulsation can be carried out on the measured signal, and characteristics and a generation mechanism of pipeline flow-induced noise can be identified.

The invention discloses an ionizing flexible pressure sensor with an adjustable linear interval and a preparation method thereof, and belongs to the technical field of pressure sensing. The sensor is composed of an upper PET substrate, a positive electrode, a TPU / ILs ionic membrane, a Gr / WPU sponge, a polyurethane sponge frame, a negative electrode and a lower PET substrate from top to bottom. The Gr / WPU sponge elastomer with adjustable conductivity is introduced on the basis of the ionization type pressure sensor with the sandwich structure, the double-electric-layer capacitance of the sensor is regulated and controlled by changing the resistance range of the Gr / WPU sponge elastomer, and the linear interval of the pressure sensor is adjustable in a wide range; the pressure sensor has good cycling stability, high response recovery speed and good resolution capability for small pressure in a wide pressure detection range, the detection range can reach 0-2300 kPa, the linearity is 0.98, the sensitivity is 1.11 kPa <-1 >, and the pressure sensor has good application prospects.

To measure a capacitance between electrodes of a sensor chip without influencing a parasitic capacitance or stray capacitance of a cable.SOLUTION: A diaphragm vacuum gauge comprises: a sensor chip 1 that comprises a first electrode formed on a pedestal, and a second electrode formed so as to face the first electrode on a diaphragm arranged across a gap from the pedestal, and in which an interval between the first and second electrodes changes according to the displacement of the diaphragm due to the pressure of a medium to be measured; an operational amplifier A1 that converts a current output from the first electrode into a voltage and amplifies it; and a coaxial cable 21 that connects the first electrode and the operational amplifier A1. The first electrode is connected to a virtual ground of the operational amplifier A1 through a core wire 22 of the coaxial cable 21.SELECTED DRAWING: Figure 3

The invention belongs to the technical field of sensors, and particularly discloses a capacitive sensor based on multistage compression deformation and a preparation method thereof, the capacitive sensor comprises an upper electrode layer and a lower electrode layer; a deformable corrugated structure is arranged between the upper electrode layer and the lower electrode layer, and the deformable corrugated structure comprises three deformation areas with the same structure; the deformation area is internally provided with three cavities, and the three cavities are filled with a first dielectric layer, a second dielectric layer and a third dielectric layer respectively; magnetic adsorption units are arranged on the outer sides of the adjacent deformation areas. According to the capacitive sensor based on multi-stage compression deformation and the preparation method thereof, the sensor realizes wide-range and multi-resolution pressure measurement capability; the sensor can present different sensitivity characteristics in different pressure ranges, can flexibly switch working modes, meets various measurement requirements from low pressure to ultrahigh pressure, and solves the technical problem that a traditional capacitive sensor is difficult to consider wide range and high resolution at the same time.

This invention belongs to the field of sensors, and relates to a polymer ionogel membrane for capacitive sensors, its preparation method, and the capacitive sensor itself. One side of the membrane has a layer of spontaneously crystallized polymer ionogel particles. The gel particles have a spherical or near-spherical structure, and the gel particle layer forms an uneven structure on one side surface of the membrane. Each gel particle includes a porous polymer backbone and an ionic liquid located within the pores. The polymer backbone includes an enriched first PVDF-based polymer. Adjacent polymer ionogel particles are mainly connected by a second PVDF-based polymer. The composition of the polymer ionogel membrane includes a PVDF-based polymer to ionic liquid mass ratio of 1:2 to 2:1. Based on the mass of the PVDF-based polymer, the content of the first PVDF-based polymer is 80wt% to 95wt%, and the content of the second PVDF-based polymer is 5wt% to 20wt%. When used in a capacitive sensor, the gel membrane can improve detection sensitivity.

The invention discloses a sandwich-type flexible capacitive pressure sensor, and relates to the technical field of pressure sensors, the sandwich-type flexible capacitive pressure sensor comprises a photoresist layer and a fixed cylinder, the surface of the photoresist layer is provided with a flexible substrate layer, the surface of the flexible substrate layer is provided with a lower metal electrode layer, the surface of the lower metal electrode layer is provided with a flexible dielectric layer, and the flexible dielectric layer is provided with an upper metal electrode layer and a lower metal electrode layer. The surface of the flexible dielectric layer is provided with an upper metal electrode layer, and the outer sides of the upper metal electrode layer and the photoresist layer are provided with a waterproof packaging layer. According to the sandwich type flexible capacitive pressure sensor, the fixing sleeve, the first pipeline and the air bag ring are arranged, and the first rotating disc can be screwed to move through a tool; and then air in the first air bag is input into the air bag ring through the first pipeline, so that the air bag ring is expanded, the connecting line is limited, and the connection between the connecting line and the connecting end is limited.

The invention provides an MEMS pressure sensor, a preparation method thereof and an electronic device, and the method comprises the steps: providing a first substrate and a second substrate, sequentially forming a first pressure sensing film layer, a first sacrificial layer and a first sub-electrode layer on the first substrate, and sequentially forming a second pressure sensing film layer, a second sacrificial layer and a second supporting layer on the second substrate; respectively etching the first sub-electrode layer and the second supporting layer to form a plurality of first release holes and a plurality of second release holes; removing part of the first sacrificial layer to form a first cavity, and removing part of the second sacrificial layer to form a second cavity; the first sub-electrode layer and the second supporting layer are bonded, and the first release holes and the second release holes are arranged in a staggered mode; and etching the first substrate to form a back cavity, and removing the second substrate to expose the second pressure sensing film layer. According to the scheme, the first sub-electrode layer and the second supporting layer are bonded to form the MEMS pressure sensor with the double pressure sensing film layers, and the sensitivity and the linearity are improved.

The invention provides an MEMS pressure sensor and a manufacturing method thereof, and an electronic device, and the method comprises the steps: providing a first substrate, forming at least two first pressure structures on the surface of the first substrate, each first pressure structure comprises a first electrode layer, a first sacrificial layer, a first supporting layer, a second electrode layer, a second supporting layer, and a first cavity, and a first release hole; a second substrate is provided, at least two second pressure structures are formed on the surface of the second substrate, and each second pressure structure comprises a third electrode layer, a second sacrificial layer and a second cavity; bonding the second supporting layer with the second sacrificial layer; the second substrate is removed to expose the third electrode layer, the third electrode layer and the second electrode layer form a variable capacitance structure, the second electrode layer and the first electrode layer form a reference capacitance structure, and the two variable capacitance structures and the two reference capacitance structures jointly form a Wheatstone bridge. According to the scheme, the measurement precision is improved, and the device performance is further improved.

The invention provides an MEMS pressure sensor, a manufacturing method thereof and an electronic device, and the method comprises the steps: providing a first substrate and a second substrate, forming a first pressure structure on the first substrate, and forming a second pressure structure on the second substrate; bonding the first pressure structure and the second pressure structure; the first substrate is removed, the first pressure structure and the second pressure structure jointly form a third pressure structure, the third pressure structure comprises a first electrode layer, a second electrode layer, a third electrode layer, a fourth electrode layer and a fifth electrode layer which are arranged at intervals from top to bottom, and a dielectric layer is formed between every two adjacent electrode layers; and cavities penetrating through the dielectric layers are formed in the dielectric layers. According to the scheme, the multiple electrode layers arranged from bottom to top are formed, the multiple electrode layers form the first capacitor, the second capacitor, the third capacitor and the fourth capacitor respectively, then the Wheatstone bridge is formed jointly, the measurement precision of the MEMS pressure sensor is improved, meanwhile, the plane size of the MEMS pressure sensor is reduced, and the integration level of the device is improved.

The invention relates to the technical field of sensor measurement, and discloses a bimodal sensor based on a single unit and a measurement method thereof.The sensor comprises a flexible upper substrate used for providing flexible supporting and packaging protection for the upper surface of the whole sensor, an upper electrode layer comprising a first circular electrode and used for forming capacitance change to respond to pressure stimulation, and a lower electrode layer comprising a second circular electrode and used for forming capacitance change to respond to pressure stimulation; the upper electrode layer is arranged on the flexible lower substrate and serves as a leading-out end of an electric signal; the method comprises the steps of system initialization, bimodal signal synchronous acquisition and transmission, signal processing and signal output and display. According to the invention, through the cooperation of the concentric circle electrode design and the independent signal channel, the hardware decoupling of temperature and pressure signals is realized, the problem that the traditional sensor interferes with pressure measurement and depends on algorithm compensation due to temperature drift caused by sharing the same electrode and signal channel is solved, and the accuracy and reliability of bimodal measurement are fundamentally improved.

The invention relates to the technical field of flexible electronics and sensing, in particular to a capacitive flexible pressure sensor based on a barium titanate composite dielectric layer, which sequentially comprises a lower electrode layer, an upper electrode layer, a lower electrode layer and an upper electrode layer from bottom to top, the composite dielectric layer is arranged on the lower electrode layer and is formed by compounding an elastic polymer matrix and a high-dielectric-constant barium titanate (BaTiO3) filler; the upper electrode layer is made of a flexible conductive material and is arranged on the composite dielectric layer; the lower electrode layer and the upper electrode layer are connected with an external capacitance measuring circuit through wires. According to the sensor disclosed by the invention, the comprehensive performance of high sensitivity, wide detection range, low hysteresis and excellent cycle stability is realized by optimizing the shape of the barium titanate filler, surface modification and composite structure design.

To obtain a wider measurement range by suppressing degradation of measurement accuracy.SOLUTION: The pressure sensor has a first sensor element 121a and a second sensor element 121b. The pressure in a first reference room 103a of the first sensor element 121a is higher than the pressure in a second reference room 103b of the second sensor element 121b. The pressure of the first reference room 103a is set to a vacuum (0 Pa), for example.SELECTED DRAWING: Figure 1

An aerosol delivery device is provided that includes a housing, microelectromechanical systems-based (MEMS-based) sensor and microprocessor. The MEMS-based sensor is within the housing and configured to detect a pressure on the MEMS-based sensor caused by airflow through at least a portion of the housing. The MEMS-based sensor is configured to convert the pressure to an electrical signal, and output the electrical signal. The microprocessor is configured to receive the electrical signal from the MEMS-based sensor, and control operation of at least one functional element of the aerosol delivery device based thereon.

The invention relates to the technical field of thin film actuators and flexible sensors, and provides a sensing actuating system and method based on a flexible sensor and a thin film actuator and application, and the sensing actuating system comprises a flexible capacitive pressure sensor, a double-layer thin film actuator and a central processing unit. The sensor detects object contact, and the central processing unit collects and processes changed capacitance signals and controls the actuator to conduct actuating bending. According to the sensor part, an AAO microstructure is introduced into a dielectric layer and matched with an ultra-thin electrode layer, micro stress detection can be achieved, electrode packaging integrated design is adopted in the whole, and the ultra-thin effect is achieved; the actuator part realizes multi-response actuation on the basis of a simple structure. According to the invention, by improving the preparation methods of the flexible capacitive pressure sensor and the double-layer film-shaped actuator, the ability of the sensor to detect micro stress and the ability of the actuator to respond to diversification are improved, the sensor and the actuator are directly and physically combined to form an integrated device, and the integrated device is matched with the central processing unit. Integrated operation of signal detection and feedback control can be achieved, and the device can be applied to the related fields of bionic animal and plant simulation, simulated grippers and the like.

The invention relates to the technical field of flexible electronic sensing, and particularly discloses a composite fiber membrane-based capacitive flexible pressure sensor integrated system and a preparation method thereof. The sensor is composed of a composite fiber membrane sensitive layer, an interlayer type electrode structure, a multi-channel signal acquisition module and an intelligent data processing system. Wherein the composite fiber membrane is prepared through an electrostatic spinning technology, polyvinylidene fluoride serves as a matrix, ionic liquid with the mass ratio of 40%-70% is evenly dispersed, a three-dimensional porous structure is formed, and a pressure signal is converted into capacitance change through the double-electric-layer capacitance effect; the signal acquisition module adopts a high-precision capacitance digital converter to cooperatively work with a microcontroller, 9-channel parallel data acquisition is realized, the resolution reaches 6aF, and data is transmitted through an anti-interference bus protocol; and the data processing system dynamically analyzes the pressure-capacitance relationship based on an exponential function model, suppresses noise to be below 0.1 aF RMS in combination with a filtering algorithm, and synchronously generates a visual pressure distribution map.

Disclosed an airflow sensor and an airflow sensor packaging structure. The airflow sensor comprises a base, a vibrating electrode, and a fixed electrode in a stacked arrangement, wherein the base has a back cavity passing through in its thickness direction. it is intended that the fixed electrode of the air flow sensor is provided with a vent hole and the perimeter edge of the vibration sensitive area of the vibration electrode is provided with a pressure equalizing hole. In the thickness direction of the substrate, the pressure equalizing hole The projection overlaps with the projection of the vent hole, and the pressure equalizing hole, the vent hole and the gap layer channel jointly form an air release channel, which is conducive to the smooth diffusion of oil smoke entering the air flow sensor along the air release channel.

The invention relates to a MEMS component, in particular an acoustic transducer or pressure sensor, comprising: a substrate with a cavern and a mainland, an interaction element arranged above the cavern and connected to the mainland, where the interaction element is a bending beam, a boundary layer arranged at a distance from the bending beam via connecting elements, which defines a cavity with the bending beam, and a back plate located within the cavity, which is designed as a back electrode, wherein the back plate is designed to be stiffer with respect to the boundary layer and the bending beam, at least one electrode which forms a readable capacitance with a back electrode of the back plate in order to capacitively detect a deflection of at least one of the bending beam, the connecting elements and the boundary layer, at least one stop element which is designed to be displaced into a mechanical stop, wherein the stop element in the stop has at least one fluid flow resistance, in particular a fluid seal, between the cavity on a substrate-facing side and a volume on a substrate-facing side of the cavity.

The invention provides a capacitive pressure sensor core, a preparation method thereof and a capacitive pressure sensor. Specifically, the capacitive pressure sensor core comprises a deformable diaphragm, a ceramic substrate and a capacitive performance transducer. The capacitive performance transducer comprises a first electrode comprising a first measuring electrode part and a first capacitive shielding electrode part, a second electrode comprising a second measuring electrode part and a second capacitive shielding electrode part, and a gap separator, wherein the first measuring electrode part comprises a first measuring electrode central part, the second measuring electrode part comprises a second measuring electrode central part, and the area of the first measuring electrode central part is smaller than that of the second measuring electrode central part; wherein the first measuring electrode part, the first capacitance shielding electrode part, the second measuring electrode part and the second capacitance shielding electrode part are formed by reducing and sintering organic metal conductor paste.

The invention discloses a capacitive flexible sensing array based on an FPC technology and a preparation method thereof, PVDF-TrFE and ionic salt [BMIM / Br] in a specific mass ratio are prepared into an ionic thin film dielectric layer under the action of a cross-linking agent, and a specific rectangular pyramid microstructure is given to the ionic thin film dielectric layer through a microneedle structure mold; and an upper electrode layer and a lower electrode layer for channel multiplexing are prepared in combination with an FPC technology, and finally the sensing array is packaged through vacuum hot pressing bonding. The core innovation of the invention lies in that through the synergistic effect of the ion double electric layer effect, the microstructure stress concentration and the FPC electrode multiplexing design, ultrahigh sensitivity (0-20kPa interval sensitivity gt, 30kPa) and low crosstalk (array crosstalk rate lt, 5%) are realized at the same time. The local deformation characteristic of the microneedle structure effectively restrains edge electric field diffusion, the crosstalk problem of a high-density array is solved from the physical structure, and a key technology is provided for application of flexible electronics in the field of precise tactile perception.

The utility model discloses a novel capacitive MEMS pressure sensor, which comprises a sensitive structure layer, a bonding layer and a bottom plate layer which are sequentially arranged from top to bottom, and a closed vacuum cavity is defined by the sensitive structure layer, the middle part of the bottom plate layer and the bonding layer; the sensitive structure layer comprises a sensitive layer frame and a sensitive layer capacitance plate, and the bottom plate layer comprises a bottom layer outer frame and a bottom layer capacitance plate; the middle parts of the sensitive layer frame and the bottom layer outer frame are correspondingly provided with a sensitive layer capacitance plate and a bottom layer capacitance plate respectively; the peripheral side of the sensitive layer capacitance plate is connected with the sensitive layer frame through a sensitive layer elastic film; a capacitance gap located in the vacuum cavity is formed between the sensitive layer capacitance plate and the bottom layer capacitance plate. Deformation under the action of external pressure mainly occurs at the elastic thin film, the deformation quantity of the sensitive layer capacitance polar plate is small, the linearity between the capacitance value variation and the air pressure or pressure variation is effectively improved, and good practicability is achieved.

The invention relates to the technical field of pressure sensors, and provides a differential pressure sensor sensitive structure and a packaging method, and the packaging method comprises the following steps: preparing a screen printing plate; printing glass slurry on the lower substrate layer wafer; printing glass slurry on the upper substrate layer wafer; the printed lower substrate layer wafer and the printed upper substrate layer wafer are placed in a drying oven to be subjected to glue discharging and pre-sintering; the lower substrate layer wafer and the pressure sensing film layer wafer are pre-fixed after being aligned; aligning the upper substrate layer wafer with the fixed lower substrate layer wafer and the pressure sensing film layer and then pre-fixing the upper substrate layer wafer and the fixed lower substrate layer wafer and the pressure sensing film layer; putting the three layers of pre-fixed wafer combinations into a variable-load muffle furnace, and applying a pre-load for sintering; cutting up the three layers of wafers to form a naked DIE of the MEMS header; and mounting an ASIC bare DIE, and interconnecting each electrode with the ASIC chip to complete electrical connection. The packaging precision, the structural stability, the electrical performance and the production efficiency of the differential pressure sensor sensitive structure are improved, and meanwhile the production cost is reduced.

The invention discloses a ceramic capacitive pressure sensor, which comprises a packaging shell, a commercial small circular shell is arranged on the packaging shell, a copper pipe is arranged on one side, far away from the packaging shell, of the commercial small circular shell, an electronic wire is arranged on the packaging shell in a penetrating manner, and the electronic wire is connected with the packaging shell. The insulating paper, the inner copper body and the check ring are integrally designed into the combined base with the PPS and the glass fiber wrapping the SUS metal inner container, a traditional multi-part manual assembly structure is replaced, and compared with the scheme that in the prior art, insulating paper and an inner copper body shielding cover need to be bonded, the number of parts is reduced, and the cost is reduced. The cost is reduced, meanwhile, automatic injection molding is achieved, manual assembly errors are avoided, the assembly efficiency is improved, the compression strength of the PPS composite reinforcing material is improved compared with that of traditional insulation paper, and the reliability in the high-pressure-resistant environment is ensured.

The invention provides a capacitive flexible multifunctional sensor and a preparation method thereof, the sensor comprises an upper electrode layer, a dielectric layer and a lower electrode layer, and the dielectric layer is located between the upper electrode layer and the lower electrode layer; the upper electrode layer and the lower electrode layer are liquid metal composite flexible polymer films and are divided into a high liquid metal concentration area and a low liquid metal concentration area from bottom to top; the dielectric layer is a porous flexible film. According to the capacitive flexible multifunctional sensor and the preparation method thereof provided by the invention, through the synergistic effect of the electrode layer and the dielectric layer, the sensor is endowed with excellent capability of detecting proximity and pressure signals, and the flexible multifunctional sensor is expected to provide a multi-mode sensing mode for protection of fragile objects or precise devices.

The invention discloses a capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises a dielectric layer, an upper electrode and a lower electrode, wherein the dielectric layer is composed of a three-dimensional periodic lattice structure fabric and ionic gel; the three-dimensional periodic lattice structure fabric is composed of a plurality of C-shaped elastic filaments, an upper-layer mesh fabric and a lower-layer mesh fabric, and the elastic filaments are arranged between the upper-layer mesh fabric and the lower-layer mesh fabric as longitudinal supports; the ionic gel is compounded with the lower-layer mesh fabric, and a gap exists between the top of the ionic gel and the upper-layer mesh fabric; the upper electrode and the lower electrode are foam nickel electrodes with three-dimensional mesh structures, the upper electrode is arranged at the top of the upper-layer mesh fabric, and the lower electrode is arranged at the bottom of the ionic gel. The sensor provided by the invention is provided with the dielectric layer with a special structure, and can maintain high-sensitivity linear sensing in a large pressure detection range.

The invention discloses a flexible capacitive pressure sensor with a micro-nano array structure, which comprises a first electrode layer, a flexible dielectric layer, a second electrode layer and a flexible thin film layer which are sequentially stacked from top to bottom, and the flexible thin film layer is provided with the micro-nano array structure. By constructing the micro-nano structure, the sensitivity and the detection range of the pressure sensor are improved, and the pressure sensor has good stability and repeatability. The invention further discloses a preparation method of the flexible capacitive pressure sensor, the flexible thin film layer with the micro-nano array structure is prepared by modulating corona electric field treatment, a micro-nano structure template does not need to be additionally manufactured, the process is simple, the cost is low, and batch preparation can be achieved.

The invention discloses a through needle temperature and pressure sensor and an assembly process, and relates to the technical field of temperature and pressure sensors, and the sensor comprises a ceramic pressure core body and an NTC assembly. An NTC (Negative Temperature Coefficient) through needle for outputting a temperature signal is arranged on the ceramic pressure core body in a penetrating manner; the NTC assembly comprises an NTC chip, a lead wire sleeve, a fixing seat and a metal sheath, a lead wire of the NTC chip is sleeved in the lead wire sleeve and extends out to be arranged through the fixing seat, and the metal sheath is sleeved outside the lead wire sleeve and the NTC chip and is fixed on the fixing seat; the lead of the NTC chip is connected with the NTC through pin through electric resistance welding, so that the connection reliability is improved, and meanwhile, the soldering tin rosin is prevented from sputtering to pollute the fixed seat and the ceramic pressure core body; the structure of the temperature pressure sensor is simplified, the reliability of electric connection is improved, and a signal path is rationalized through lead wire arrangement, metal sheath protection and electric resistance welding direct connection; the problems of complex structure, circuit virtual connection and low reliability of the existing temperature and pressure sensor are effectively solved.

The present invention provides a capacitive-piezoelectric-pyroelectric sensor and a preparation method thereof, wherein the capacitive-piezoelectric-pyroelectric sensor comprises a first electrode layer, a capacitive-piezoelectric-pyroelectric layer and a second electrode layer, wherein the capacitive-piezoelectric-pyroelectric layer is located between the first electrode layer and the second electrode layer; the capacitive-piezoelectric-pyroelectric layer comprises a PVDF material, and when the capacitive-piezoelectric-pyroelectric layer is subjected to an external force, it will deform, and the two surfaces of the capacitive-piezoelectric-pyroelectric layer will generate charges of opposite polarity and equal magnitude, and the capacitance between the first electrode layer and the second electrode layer will change; when the capacitive-piezoelectric-pyroelectric layer is heated or cooled, a potential difference is generated on the two surfaces of the capacitive-piezoelectric-pyroelectric layer. The capacitive-piezoelectric-pyroelectric sensor provided by the present invention can detect static force and dynamic force at the same time, and can also detect pressure and temperature at the same time.

The invention relates to the technical field of flexible electronics, in particular to a method for preparing a dielectric layer of a capacitive sensor, which comprises the following main steps of: preparing an ITO / PET (indium tin oxide / polyethylene terephthalate) electrode; spontaneously forming a flexible dielectric layer; a flexible dielectric layer dispersion process; and packaging the device. The array type flexible pressure sensor prepared by the invention has the advantages of high-sensitivity feedback, stable work, good signal transmission, good flexibility and the like.