4 results about "Mems capacitors" patented technology

The invention is suitable for the field of health detection and life prediction of the whole life cycle of an MEMS capacitor film, and provides an MEMS capacitor film vacuum gauge diaphragm life prediction system based on deep learning. The device comprises a molecular pump set, a first vacuum valve, a second vacuum valve, a first cold cathode ionization vacuum gauge, a second cold cathode ionization vacuum gauge, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber, a first LCR digital bridge, a second LCR digital bridge, a first MEMS diaphragm chamber, a second MEMS diaphragm chamber, a temperature control box, an upper computer, a controller and an electromagnetic valve. According to the method, more reliable life prediction can be realized, and better robustness is achieved. According to the method, test equipment does not need to be developed, the method can be realized through conventional equipment and methods, the evaluation accuracy is high, the efficiency is high, and the operation is convenient and simple.

Described are various circuits for controlling an actuator for driving an oscillating movement of at least one movable component of a microelectromechanical system (MEMS), as well as a MEMS equipped with such a circuit. The circuits have at least one MEMS capacitor which is designed as an actuator component in such a way that said MEMS capacitor forms a component of an electromechanical converter of the actuator, the converter being configured to convert electrical energy stored in the MEMS capacitor into at least one mechanical quantity for driving a movement of the actuator. The circuits contain a step-up converter circuit for generating a charging voltage for the direct, capacitor-unbuffered charging of the MEMS capacitor, and / or a pausable oscillation circuit with the MEMS capacitor as an oscillation circuit capacitor.

The invention relates to the technical field of vacuum gauge test and calibration, in particular to a wide-range vacuum gauge composite gauge tube with a self-calibration function, which comprises a magnetic suspension rotor vacuum sensing assembly, a vacuum chamber, an ionization type vacuum sensing assembly and an MEMS (Micro Electro Mechanical System) capacitance film vacuum sensing assembly, wherein the magnetic suspension rotor vacuum sensing assembly is connected with the outer pipe wall of the vacuum chamber through a CF16 flange; the ionization type vacuum sensing assembly is fixedly welded on a CF35 flange electrode below the vacuum chamber; and the MEMS capacitance film vacuum sensing assembly is arranged below the ionization type vacuum sensing assembly and is isolated through the shielding plate. According to the invention, the embedding of the high-vacuum-range vacuum reference standard appliance is realized, the in-situ / online calibration of the MEMS capacitor film vacuum sensing assembly corresponding to the medium-low vacuum range and the high-vacuum / ultrahigh-vacuum-range ionization type vacuum sensing assembly is realized by utilizing the good linearity and long-term stability of the high-vacuum-range vacuum reference standard appliance, the disassembly in the cycle detection process is avoided, and the detection efficiency is improved. And a self-calibration function is realized.

The invention discloses a dual-MEMS capacitance pendulum dual-parameter acceleration and speed output sensor, and relates to the technical field of MEMS vibration measurement devices. The MEMS capacitance pendulum I is used as an acceleration signal sensor and a feedback restoring force actuator; one end of the first MEMS capacitor pendulum is connected with a cantilever beam, the other end of the first MEMS capacitor pendulum is connected with the second MEMS capacitor pendulum through a rigid connecting rod, and the first MEMS capacitor pendulum and the second MEMS capacitor pendulum serve as sensitive structures to be packaged in a tube shell in a vacuum mode and are provided with a first movable mass block and a second movable mass block respectively to sense external vibration. An upper polar plate and a lower polar plate are respectively arranged corresponding to the movable polar plates; the vibration acceleration and the vibration speed can be measured at the same time, the effect can be achieved by directly using the MEMS capacitor pendulum as an actuator and utilizing electrostatic restoring force, the structure is more compact, and integration and industrialization are easier to achieve.