8 results about "Mems capacitors" patented technology

The invention belongs to the field of semiconductor devices, and particularly discloses a photoelectric memcapacitor device based on a floating gate structure and a preparation method of the photoelectric memcapacitor device. Wherein the oxide tunneling dielectric layer is used for enabling carriers on the substrate to pass through and enter the floating gate layer under the action of an electric field or a light field; the oxide barrier dielectric layer is used for preventing tunneling carriers from flowing out of the transparent top electrode; the oxide tunneling dielectric layer and the oxide blocking dielectric layer are used for shielding carriers on the floating gate layer, so that the capacitance value is regulated and controlled, and memory regulation and control of optical signals and electric signals on the capacitance value are realized. According to the invention, memory regulation and control of the electric signal and the optical signal on the capacitance value of the device are realized, and the photoelectric hybrid memory capacitance behavior is realized on a single device.

The invention is suitable for the field of health detection and life prediction of the whole life cycle of an MEMS capacitor film, and provides an MEMS capacitor film vacuum gauge diaphragm life prediction system based on deep learning. The device comprises a molecular pump set, a first vacuum valve, a second vacuum valve, a first cold cathode ionization vacuum gauge, a second cold cathode ionization vacuum gauge, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber, a first LCR digital bridge, a second LCR digital bridge, a first MEMS diaphragm chamber, a second MEMS diaphragm chamber, a temperature control box, an upper computer, a controller and an electromagnetic valve. According to the method, more reliable life prediction can be realized, and better robustness is achieved. According to the method, test equipment does not need to be developed, the method can be realized through conventional equipment and methods, the evaluation accuracy is high, the efficiency is high, and the operation is convenient and simple.

The invention relates to a switching arrangement for controlling an actuator for driving an oscillating movement of a mass element in an MEMS. The switching arrangement comprises: an electric oscillating circuit with an inductor, an MEMS capacitor and a charging connection; a controllable switching device for selectively interrupting or closing the oscillating circuit by controlling the switching device; and a resonance frequency based on a permanently closed state. The switching arrangement furthermore has a controller for controlling the switching device. The inductor is arranged in the oscillating circuit such that during charge transfer and during temporary recharging of the MEMS capacitor, the inductor is in a current path through which current flows and which extends through the MEMS capacitor. The controller is configured to set, by way of corresponding controlling, the switching device to a state in which it interrupts the oscillating circuit, and therefore the oscillation frequency is lower than the resonance frequency, this being done during an oscillation period of the oscillating circuit occurring in the closed state of the switching device temporarily at a time at which the voltage over the MEMS capacitor reaches a maximum amount.

Described are various circuits for controlling an actuator for driving an oscillating movement of at least one movable component of a microelectromechanical system (MEMS), as well as a MEMS equipped with such a circuit. The circuits have at least one MEMS capacitor which is designed as an actuator component in such a way that said MEMS capacitor forms a component of an electromechanical converter of the actuator, the converter being configured to convert electrical energy stored in the MEMS capacitor into at least one mechanical quantity for driving a movement of the actuator. The circuits contain a step-up converter circuit for generating a charging voltage for the direct, capacitor-unbuffered charging of the MEMS capacitor, and / or a pausable oscillation circuit with the MEMS capacitor as an oscillation circuit capacitor.

The application provides a MEMS capacitor and a manufacturing method thereof, wherein a first isolation layer, a first electrode plate layer, a second isolation layer and a second electrode plate layer are sequentially formed on the upper surface of a substrate, the substrate has a first through hole, the first isolation layer has a second through hole above the first through hole and larger than the first through hole in radial dimension, the second through hole exposes a sharp corner formed by the side wall of the first through hole and the upper surface of the substrate, the first electrode plate layer is suspended on the second through hole, the second isolation layer exposes the middle area of the first electrode plate layer to form a cavity between the second electrode plate layer and the first electrode plate layer, at least one connecting column connecting the first electrode plate layer and the second electrode plate layer is arranged in the cavity, and the horizontal distance between the connecting column and the sharp corner is within a set range. In this way, when the first electrode plate layer vibrates downward, the connecting column provides an upward pulling force to the first electrode plate layer, and the probability of the first electrode plate layer touching the sharp corner can be reduced without affecting the performance of the MEMS capacitor.

The invention relates to the technical field of vacuum gauge test and calibration, in particular to a wide-range vacuum gauge composite gauge tube with a self-calibration function, which comprises a magnetic suspension rotor vacuum sensing assembly, a vacuum chamber, an ionization type vacuum sensing assembly and an MEMS (Micro Electro Mechanical System) capacitance film vacuum sensing assembly, wherein the magnetic suspension rotor vacuum sensing assembly is connected with the outer pipe wall of the vacuum chamber through a CF16 flange; the ionization type vacuum sensing assembly is fixedly welded on a CF35 flange electrode below the vacuum chamber; and the MEMS capacitance film vacuum sensing assembly is arranged below the ionization type vacuum sensing assembly and is isolated through the shielding plate. According to the invention, the embedding of the high-vacuum-range vacuum reference standard appliance is realized, the in-situ / online calibration of the MEMS capacitor film vacuum sensing assembly corresponding to the medium-low vacuum range and the high-vacuum / ultrahigh-vacuum-range ionization type vacuum sensing assembly is realized by utilizing the good linearity and long-term stability of the high-vacuum-range vacuum reference standard appliance, the disassembly in the cycle detection process is avoided, and the detection efficiency is improved. And a self-calibration function is realized.

The invention discloses a dual-MEMS capacitance pendulum dual-parameter acceleration and speed output sensor, and relates to the technical field of MEMS vibration measurement devices. The MEMS capacitance pendulum I is used as an acceleration signal sensor and a feedback restoring force actuator; one end of the first MEMS capacitor pendulum is connected with a cantilever beam, the other end of the first MEMS capacitor pendulum is connected with the second MEMS capacitor pendulum through a rigid connecting rod, and the first MEMS capacitor pendulum and the second MEMS capacitor pendulum serve as sensitive structures to be packaged in a tube shell in a vacuum mode and are provided with a first movable mass block and a second movable mass block respectively to sense external vibration. An upper polar plate and a lower polar plate are respectively arranged corresponding to the movable polar plates; the vibration acceleration and the vibration speed can be measured at the same time, the effect can be achieved by directly using the MEMS capacitor pendulum as an actuator and utilizing electrostatic restoring force, the structure is more compact, and integration and industrialization are easier to achieve.

The invention relates to the technical field of vacuum measurement, in particular to a double-layer absolute pressure type MEMS capacitor film vacuum gauge, which comprises a silicon substrate, a glass substrate and a PCB, and is characterized in that the silicon substrate comprises a thick silicon layer, a silicon oxide layer and a thin silicon layer from bottom to top; obtaining a reference cavity and a film extraction electrode window on the thick silicon layer, and obtaining a pressure sensing film and a film extraction electrode on the thin silicon layer; the glass substrate comprises a silicon electrode and glass; a silicon electrode lead-out hole is formed in the center of the glass; the lower surface of the silicon electrode is bonded with the upper surface of the glass through anodic bonding; an insulating layer is arranged on the upper surface of the silicon electrode; performing secondary anodic bonding on the upper surface of the glass and the lower surface of the thick silicon layer; and the combination body of the silicon substrate and the glass substrate is welded with the PCB through a bonding pad and soldering tin. The double-layer structure of the silicon substrate and the glass substrate is adopted, the preparation process flow is simplified, the sensitivity is high, the stability is good, and the absolute vacuum degree in the range of 1 * 10 <-2 > Pa to 1 * 10 < 5 > Pa can be measured.