The invention relates to a filter, in particular to a low-pass filter based on TSV (Through-Silicon-Via) technology. The low-pass filter based on the TSV technology comprises a spiral inductance unit, a rewiring layer and a TSV component, wherein the spiral inductance unit comprises a spiral inductor I and a spiral inductor II, the rewiring layer comprises an input end, an output end, grounding metal, an interconnecting layer I and an interconnecting layer II, the TSV component comprises five coaxial through silicon vias of a through silicon via I, a through silicon via II, a through silicon via III, a through silicon via IV and a through silicon via V respectively which are the same in structure, and each coaxial through silicon via comprises a first dielectric layer, an outer metal layer, a second dielectric layer and a metal core layer in sequence from outside to inside; according to the invention, the coaxial through silicon vias are adopted to realize vertical capacitors, compared with the common plane structure capacitors, the occupied areas of the capacitors are greatly reduced, and the sizes of the devices are reduced to micron magnitudes, so that the circuit integration can be improved, and further the cost is reduced.