63 results about "Spiral inductor" patented technology

The invention relates to the technical field of radio frequency integrated circuits and advanced semiconductor packaging, in particular to a multilayer spiral inductor structure based on an RDL process and a preparation method. The preparation method comprises the steps of seed layer deposition, gradient line width coil formation through photoetching and electroplating, alternate dielectric layer deposition, through hole etching to form vertical interconnection copper columns, air bridge forming through a photoresist sacrificial layer process and silicon nitride passivation packaging. Through fan-shaped topological layout, dielectric material collaborative optimization and three-dimensional interconnection structure design, the self-resonant frequency bandwidth is effectively improved, conductor and dielectric loss is reduced, and miniaturization integration and high reliability of high-frequency inductance elements are achieved.

Spiral inductors, magnetic field sensors incorporating the spiral inductors, and methods of using the magnetic field sensors are provided. The spiral inductors include an electrically conductive spiral coil and a nitrogen vacancy (NV) diamond substrate. A thin barrier layer of a dielectric material separates the spiral coil from the surface of the NV diamond substrate and an overlayer of dielectric material is disposed over the spiral nanocoil. The integration of the spiral coil with an NV substrate in this manner creates a highly enhanced magnetic transduction and produces a simple, high-performance way to control and read out electromagnetic signals. Because the spiral inductors enable electromagnetic-to-optical signal conversion, they can be used as sensors for environmental or biomedical applications and spin-based computation.

The invention relates to the technical field of semiconductors, and discloses an axial three-dimensional spiral inductor based on a glass substrate and a manufacturing method thereof.The axial vertical spiral inductor comprises an upper surface layer, the glass substrate and a lower surface layer, and the upper surface layer comprises a plurality of first metal connecting wires; the lower surface layer comprises a plurality of second metal connecting wires and a plurality of third metal connecting wires, the glass substrate comprises a first glass through hole group and a second glass through hole group, and the first metal connecting wires and the second metal connecting wires are connected through the first glass through hole group or the second glass through hole group; the third metal connecting lines are located below the second metal connecting lines, the third metal connecting lines are parallel to the second metal connecting lines, one sides of the third metal connecting lines are electrically connected with the adjacent second metal connecting lines, and the other sides of the third metal connecting lines are grounded; the distance between the third metal connecting line and the adjacent second metal connecting line is larger than 20 microns. According to the technical scheme, the quality factor of the spiral inductor can be improved.

A wireless passive resonance sensor and contact lens for intraocular pressure monitoring comprises a contact lens body which is used for packaging a sensor assembly and serves as a substrate of the sensor. The first spiral inductor is arranged in the contact lens body; the middle elastic dielectric layer covers the first spiral inductor and is used for forming a deformable dielectric medium; the second spiral inductor is arranged on the middle-layer elastic dielectric layer, is opposite to the first spiral inductor and forms an inductor assembly with the first spiral inductor; wherein the first spiral inductor, the middle elastic dielectric layer and the second spiral inductor jointly form a capacitor and equivalently form a serial L-C-L resonant circuit, and the change of intraocular pressure is responded through the change of resonant frequency of the resonant circuit, so that passive wireless monitoring is realized. The design optimizes the preparation process, reduces the cost, improves the signal stability, is suitable for 24-hour continuous monitoring, and provides a powerful tool for early diagnosis and intervention of glaucoma.

The invention provides a heterogeneous integrated filter structure with transient voltage protection and a manufacturing method, the filter structure comprises an insulating substrate, the upper surface of the insulating substrate is provided with a mounting groove, and a semiconductor chip with a transient voltage protection function is arranged in the mounting groove. A double-layer spiral inductor is arranged on the upper surface of the insulating substrate and comprises a first plane inductance coil and a second plane inductance coil which are arranged in a stacked mode, and a first passivation layer is arranged between the semiconductor chip and the first plane inductance coil. A first passivation layer is arranged between the first planar inductance coil and the second planar inductance coil, a second passivation layer is arranged between the first planar inductance coil and the second planar inductance coil, a third passivation layer is arranged on the upper surface of the second planar inductance coil, the first passivation layer and the second passivation layer are both provided with through holes used for electrically connecting an upper layer and a lower layer, and filter pins are arranged on the third passivation layer. And the filter pin is electrically connected with the second planar inductance coil. The differential mode bandwidth index of the filter can be improved.

This invention discloses a miniaturized, wide-stopband low-pass filter design method, covering 3D model design, simulation optimization, circuit fabrication and testing, and design verification based on dielectric integrated suspension line technology. The core of the low-pass filter design is based on dielectric integrated suspension line technology. Furthermore, the core circuit of this filter employs three layers of surface-mount capacitors and a double-layer spiral inductor to reduce circuit size, while combining a honeycomb structure to extend the stopband. Compared to traditional circuit designs, the implemented filter exhibits self-encapsulation characteristics, achieving low insertion loss and an ultra-wide stopband range, providing an important basis for filter performance optimization.

The invention provides a pattern generation method of a spiral inductor manufactured by a semiconductor process, which comprises the following steps of: setting the number of turns of a coil of the spiral inductor to be M, and setting the shape of a single-turn coil to be an N-sided polygon; the center of an N-polygon where an inner ring is located serves as an X-axis and Y-axis coordinate center original point, N areas are correspondingly divided, the first area is provided with a starting point edge and an ending point edge which are parallel to an X axis or a Y axis, and the other N-1 areas correspond to one edge of the N-polygon respectively, the difference between the distance between the starting point edge and the ending point edge and the distance between the starting point edge and the original point is S, the distance between the N + 1 sides and the original point is the following expression: r1 is the inner diameter of the N-sided coil; i = 1, 2, 3... N + 1; step is equal to S / N, and S is the sum of the line width and the line distance of the N-polygon coil; and respectively listing linear relational expressions corresponding to the areas where the N edges are located, solving an intersection point coordinate of two adjacent edges as a vertex coordinate of the N-polygon, obtaining other vertex coordinates in this way, and drawing a single-turn coil of the spiral inductor.

The invention relates to a spiral inductor integrated in an electronic assembly and an antenna. An electronic assembly having an integrated spiral inductor is disclosed. The electronic assembly includes a substrate having a through hole disposed along a side edge of the substrate. A wire of the spiral inductor is spirally wound around the side edge for several turns through the through hole. A magnetic core may be included in the spiral inductor to increase inductance. The electronic assembly may have an additional substrate, and the spiral inductor spirals around a side edge of the substrate through a through-hole of the substrate.

The present disclosure relates to an inductor assembly, an impedance matching network, and a system including the inductor assembly. An inductor assembly (100) includes: a fixed element (102) having a central core (104) and a support structure (106) coupled to and projecting outwardly from the central core, each of the support structures having an outer edge (108) having a notched profile with a recess (110) extending toward the central core; and a spiral inductor (112) having a plurality of turns located in the recesses of the at least two support structures. The support structures are spaced equidistantly from each other around the central core by air gaps (308). The inductor assembly can be incorporated into an impedance matching network (1100), and one or more impedance matching networks can be incorporated into a defrost system (100). The impedance matching network can be a single-ended network (1100) or a double-ended network (1300).

The present invention discloses a common-mode noise suppression filter based on three-dimensional integration technology, which includes seven top RDL spiral inductors, and four TSV capacitors are connected below the seven top RDL spiral inductors. The present invention can achieve the basic performance of common-mode noise while having a compact overall structure and high integration.

A metal magnetic flexible composite inductor conductor and a preparation method thereof; the preparation method of the metal magnetic flexible composite inductor conductor comprises the following steps: S1: taking metal and magnetic material; the magnetic induction intensity of the magnetic material is greater than or equal to 1.6 T; S2: continuously attaching the metal to the magnetic material to obtain a conductive and magnetically conductive composite conductor; S3: cutting the conductive and magnetically conductive composite conductor by using a femtosecond laser processing technology to obtain a spiral flexible composite inductor conductor. The flexible composite inductor conductor prepared by the scheme can obtain a larger self-inductance value under the same size, can effectively suppress leakage magnetic flux, reduce leakage magnetic coupling to the outside world and electromagnetic interference, and can realize a more compact spiral inductor layout by reducing the number of turns or reducing the coil geometric size, thereby solving the problem that high inductance density and low power consumption cannot be simultaneously achieved in the traditional inductor conductor.

The invention discloses a terahertz single-photon detection unit and an array type detection device, the terahertz single-photon detection unit comprises a resonator, a superconductive tunnel junction and a terahertz photon absorber, and the resonator and the terahertz photon absorber are connected through a gate capacitor and the superconductive tunnel junction; the resonator comprises a circular spiral inductor and an interdigital capacitor, and a circular spiral inductor connecting part is led out from the extension position of the outer periphery of the circular spiral inductor and connected with the top of the interdigital capacitor. According to the invention, a circular spiral inductor structure is adopted, the quality factor of the resonator is effectively improved, and the sensitivity of a detector to signals causing phase shift is enhanced. The array type detection device comprises a plurality of detection units with different resonant frequencies, signals of the detection units are coupled to a central feeder line, and a reading system is simple. According to the terahertz array type detection device disclosed by the invention, terahertz detection in a wide frequency band range can be realized; the detection sensitivity is extremely high, and terahertz single photons can be detected and counted.

A three-dimensional spiral inductor, its fabrication method, and an electronic device are disclosed. The three-dimensional spiral inductor, from bottom to top, comprises: a substrate; a first nitride dielectric layer, in which a first conductive layer is formed; a first oxide dielectric layer, in which a second conductive layer is formed; a second nitride dielectric layer, in which a third conductive layer is formed; and further comprises a first metal passivation layer and / or a second metal passivation layer, wherein the first conductive layer is located on the first metal passivation layer, and the second metal passivation layer is located on the second conductive layer. This invention forms a stacked structure of a first nitride dielectric layer, a first oxide dielectric layer, and a second nitride dielectric layer, and simultaneously forms a first metal passivation layer and / or a second metal passivation layer, which can better protect the first, second, and third conductive layers, effectively prevent device aging, thereby significantly reducing line losses and extending service life.

The invention discloses a wave beam regulation and control unit, a wave beam regulator and an antenna system, and the wave beam regulation and control unit comprises a first metal layer which comprises a first pedestal, the first pedestal is provided with four first spiral inductors, any two adjacent first spiral inductors are mutually symmetrical, and two adjacent first spiral inductors at the tail ends are connected; the second metal layer comprises a second base, four second spiral inductors are arranged on the second base, the four second spiral inductors are arranged in a central symmetry mode, and the tail ends of the second spiral inductors are connected at the central point of the second base; the third metal layer comprises a third base, four third spiral inductors are arranged on the third base, any two adjacent third spiral inductors are symmetrical to each other, and two adjacent third spiral inductors at the tail ends are connected. The deployment cost of the antenna system can be effectively reduced, and the aperture efficiency of the antenna system is improved.

A semiconductor package substrate with embedded passive devices and methods of forming the same is provided. Embedded passive devices include inductors and inductor modules and methods of forming the same are provided. Embedded inductors may be formed by deposition of magnetic core material, trenching of one or more channels, and placement of conductive wires to form an module embeddable in the semiconductor package substrate core. Provided are methods and apparatus for formation of embeddable pot-core, toroidal, and helical inductors.

The spiral inductor comprises a substrate, a groove is formed in the substrate, and the projection of the groove on the plane where the substrate is located is in a spiral shape; the seed layer is formed in the groove; and the inductor body comprises an inductor root part embedded into the groove and an inductor end part exposed on the surface of the substrate. According to the spiral inductor, the adhesive force between the inductor metal electrode and the substrate is enhanced, and the damp and hot load capacity of a product is improved.

The invention discloses a mixed lumped distributed five-order band-pass filter based on an LTCC technology. The mixed lumped distributed five-order band-pass filter comprises a ceramic substrate and an electrode located at the bottom of the ceramic substrate. The electrodes are periodically arranged and comprise an input electrode, an output electrode and a grounding electrode; a traditional five-order Chebyshev band-pass filter structure is adopted in the ceramic substrate, and the ceramic substrate comprises a first parallel resonator, a first series resonator, a second parallel resonator, a second series resonator and a third parallel resonator. On the basis, two cross coupling inductors L13 and L35 and three cross coupling capacitors C13, C35 and C15 are introduced, the number of transmission zero points of the band-pass filter is increased, the selectivity of the band-pass filter is greatly improved, and out-of-band rejection is deepened. The problems that a traditional LTCC multi-layer spiral inductor is large in occupied space, complex in design and debugging and high in manufacturing process requirement are solved.

This invention discloses a method, system, and terminal device for reverse engineering on-chip RF spiral inductors, relating to the field of RF integrated circuit auxiliary design technology. The invention includes: constructing an inductor database containing the mapping relationship between geometric structural parameters and S-parameters; building a forward surrogate model based on the Transformer architecture, introducing reciprocity and passive physical constraint loss functions, and training the model using a low-frequency weighting strategy to establish a high-precision mapping from geometric parameters to S-parameters; constructing a cascaded reverse neural network, using the fixed-parameter forward surrogate model to calculate the reconstruction error to update the reverse network weights; and in the design phase, employing a hybrid optimization strategy coupling differential evolution algorithm and the forward surrogate model, using the output of the reverse network as the initial population, searching in the global space for geometric parameters that satisfy the target inductance value and quality factor. This invention solves the problems of long simulation time in traditional inductor design and the existence of multi-value mapping and poor physical consistency in reverse engineering.

This invention discloses a design method for a three-dimensional passive lumped low-pass filter based on TSV (Through-Spirit Transformer). The method includes: determining the electrical parameters of each filter element in the passive lumped low-pass filter based on the performance indicators and selection results of the low-pass filter, and constructing the circuit structure diagram of the low-pass filter; determining the process parameters of the TSV three-dimensional integrated inductor using a computational model of a three-dimensional integrated spiral inductor; determining the process parameters of the coaxial TSV capacitor using a computational model of a coaxial TSV capacitor; and performing simulations based on the process parameters of the TSV three-dimensional integrated inductor and the coaxial TSV capacitor to complete the design of the three-dimensional passive lumped low-pass filter. The low-pass filter designed in this invention uses TSV technology to design a three-dimensional integrated spiral inductor and a coaxial TSV capacitor, resulting in good compatibility with integrated circuit processes and ease of three-dimensional integration. Furthermore, the use of a three-dimensional spiral inductor and coaxial TSV capacitor design significantly reduces the area of ​​the inductor and capacitor, facilitating integration and miniaturization.

The application provides a heterogeneous integrated filter structure with transient voltage protection and a manufacturing method. The filter structure comprises an insulating substrate, a mounting groove is arranged on the upper surface of the insulating substrate, a semiconductor chip with transient voltage protection function is arranged in the mounting groove, a double-layer spiral inductor is arranged on the upper surface of the insulating substrate, the double-layer spiral inductor comprises a first planar inductor coil and a second planar inductor coil which are arranged in a stack mode, a first passivation layer is arranged between the semiconductor chip and the first planar inductor coil, a second passivation layer is arranged between the first planar inductor coil and the second planar inductor coil, a third passivation layer is arranged on the upper surface of the second planar inductor coil, the first passivation layer and the second passivation layer are both provided with through holes for electrically connecting the upper and lower layers, filter pins are arranged on the third passivation layer, and the filter pins are electrically connected with the second planar inductor coil. The application can improve the differential mode bandwidth index of the filter.

This invention relates to the fields of radio frequency integrated circuits and advanced semiconductor packaging technology, and particularly to a multilayer spiral inductor structure and its fabrication method based on RDL technology. The fabrication method includes seed layer deposition, photolithography and electroplating to form gradient linewidth coils, alternating dielectric layer deposition, via etching to form vertical interconnect copper pillars, photoresist sacrificial layer process to form air bridges, and silicon nitride passivation packaging. This invention effectively improves the self-resonant frequency bandwidth and reduces conductor and dielectric losses through a fan-shaped topology layout, synergistic optimization of dielectric materials, and three-dimensional interconnect structure design, achieving miniaturized integration and high reliability of high-frequency inductor components.

The invention discloses an ultra-wideband high-power-resistance amplitude limiting switch multifunctional chip, and relates to the technical field of amplitude limiting switches and integrated circuits. The chip comprises a PIN amplitude limiter and a single-pole four-throw PIN switch, the PIN amplitude limiter equally divides the power of a radio frequency input signal into two paths to improve the power capacity of the amplitude limiter, adjusts the amplitude limiting level through an anti-parallel diode, and transmits an amplitude limiting radio frequency input signal to the single-pole four-throw PIN switch; according to the single-pole four-throw PIN switch, a spiral inductor is adopted, resistors are introduced between coils of the spiral inductor to eliminate resonance points caused by parasitic capacitance and expand bandwidth, four corresponding branches are turned on or turned off according to four control voltages, and then an amplitude limiting radio frequency input signal is transmitted to the low-noise amplifier according to the turned-on branches. The power capacity of the amplitude limiter can be improved, the amplitude limiting level can be adjusted, and the bandwidth can be expanded while the amplitude limiting of the radio frequency input signal is realized.

The invention provides a combined signal filter, and aims to solve the problems of single function, low integration level and insufficient dynamic adaptation capability of an existing filter, and adopts a three-level layered structure design. The first layer is an LTCC substrate integrated low-pass filter, and suppresses high-frequency harmonic waves through the combination of a spiral inductor and an interdigital capacitor; the second layer is a distributed band-pass filter which adopts an asymmetric resonant cavity structure and inhibits clutters at a Beidou / GPS frequency band (1.56 GHz + / -50 MHz); the third layer is a tunable high-pass filter module, a variable capacitance diode is arranged in the third layer, the cut-off frequency (2.4-5 GHz) can be controlled through external voltage, and the requirement of the 5G frequency band is dynamically met. The inner wall of the asymmetric resonant cavity is coated with a composite dielectric coating, the shielding effectiveness is larger than or equal to 60 dB at 1-6 GHz, and the mode selectivity and stability of the resonant cavity are remarkably improved. According to the invention, 1-6GHz broadband coverage is realized, the harmonic suppression ratio is greater than or equal to 40dBc, the clutter suppression depth is greater than or equal to 60dB, the size is reduced by 50% compared with that of a traditional filter, and the filter is suitable for 5G communication, radar systems and Internet of Things equipment, and has the characteristics of high integration level, high performance and strong dynamic adaptation capability.

The spiral inductor of the present invention includes a substrate and a spiral wiring disposed on the substrate. A part of the spiral wiring includes a divided wiring portion, and the divided wiring portion is divided into a plurality of mutually parallel wirings when viewed from a top-down perspective. The divided wiring portion is disposed inside the spiral wiring. In the circuit of the divided wiring portion, the wirings inside and outside the divided wiring portion are alternately arranged with a second insulating layer in between, such that the wiring inside the divided wiring portion becomes the wiring on the outside after being staggered, and the wiring on the outside of the divided wiring portion becomes the wiring on the inside after being staggered. The spiral inductor can suppress the skin effect and the proximity effect, and can improve the area utilization efficiency and reduce the series impedance. In addition, the divided wiring portion is alternately arranged through the insulating layer, which can improve the Q value.

The application provides a pattern generation method of a spiral inductor manufactured by a semiconductor process, comprising the following steps: setting the number of turns of the spiral inductor as M, and the shape of a single-turn coil as an N-polygon; taking the center of the N-polygon where the inner coil is located as the center of the XY axis coordinate origin, and corresponding to dividing into N regions, the first region is provided with a starting edge and an ending edge parallel to the X axis or the Y axis, and the other N-1 regions correspond to one edge of the N-polygon respectively: the distance difference between the starting edge and the ending edge relative to the distance of the origin is S, and the distance between the N+1 edges relative to the origin is the following expression:, r1 is the inner diameter of the N-polygon coil; i=1, 2, 3…N+1; Step=S / N, S is the sum of the line width and the line spacing of the N-polygon coil; linear relationship formulas corresponding to the regions where N edges are located are listed respectively, the intersection coordinates of two adjacent edges are solved as a vertex coordinate of the N-polygon, other vertex coordinates are obtained in this way, and the single-turn coil of the spiral inductor is drawn.

The invention provides a three-dimensional integrated low-temperature co-fired ferrite differential band-pass filter, which is applied to the fields of radio frequency front-end modules, satellite communication, radar systems and the like, adopts a differential filter form in a symmetrical circuit form, and adopts a low-temperature co-fired ferrite LTCF process to process both capacitors and inductors. The inductor adopts a multilayer spiral inductor structure design, the capacitor adopts a multilayer laminated tile type capacitor structure design, the characteristics of the inductor are embedded into the dielectric substrate, an external discrete inductor is not needed, the parasitic effect is reduced, and the circuit stability is improved; the ferrite material has natural absorption and inhibition effects on common-mode signals, and the differential circuit design is combined, so that the filter has excellent common-mode noise inhibition capability, and the electromagnetic compatibility performance of a system can be effectively improved.

The invention relates to an intelligent screw capable of monitoring bone mechanical signals in real time. The intelligent screw is composed of one or more passive wireless pressure sensors and a screw with a sensor mounting groove. The passive wireless pressure sensor is composed of a primary loop and a secondary loop which are coupled through an inductor. The primary loop comprises an LRC circuit packaged by Gr-PDMS, and the LRC circuit is composed of a spiral inductor, a snakelike variable resistor and a capacitor which are connected in parallel. As a fracture fixture, the intelligent sensor is mounted on the fracture fixture, mechanical data displayed by the intelligent sensor is transmitted to terminal equipment through a passive signal transmission technology, and a doctor can evaluate fracture healing and mechanical conditions by using the received data, so that the dependence on traditional imaging examination is reduced, and the medical cost is reduced; the medical treatment convenience is improved, and the life quality of patients is improved.

To provide an aerosol generation device, an aerosol generation system, a method of generating an aerosol, a method of manufacturing an aerosol generation device, and an aerosol delivery device.SOLUTION: The aerosol-generating device comprises a device housing, a planar, non-helical inductor coil 21, and a power supply connected to the planar, non-helical inductor coil 21 and configured to supply an oscillating electrical current to the planar, non-helical inductor coil 21.SELECTED DRAWING: Figure 1

Disclosed are a magnetic coupling-based inter-chip wireless communication interface structure and method for three-dimensional stacked chips. The interface structure includes a master chip and at least one slave chip, wherein the master chip and all the slave chips are vertically stacked; the slave chip includes a clock receiving module, a data transmitting module, and a data receiving module; the master chip includes a clock transmitting module, a data transmitting module, and a data receiving module. The solution herein makes use of the magnetic coupling relationship between on-chip spiral inductors of different chips in a vertical direction to simultaneously transmit data and clock signals. The communication method herein modulates each bit of digital signal into a differential bi-directional non-return-to-zero pulse train and performs decision and data parsing at the receiving end by a high-speed dynamic comparator.