The invention discloses a production process of spherical
alumina powder with high purity and low
uranium content, which comprises the following steps: by taking angular
alumina with the
uranium content of 50-100ppb as a
raw material, sequentially carrying out
flame melting spheroidization, gradient
pickling, hydrothermal strengthening
uranium removal, wet grading coarse grain removal, low-temperature
drying and
airflow depolymerization to finally obtain the finished product spherical
alumina powder with the uranium content of less than 30ppb. Through a multi-stage uranium removal
system including incoming material management and control, gradient
pickling, hydrothermal
coupling and particle size optimization, the traditional single
pickling efficiency
bottleneck is broken through, and deep
dissolution of lattice uranium and effective removal of coarse-grain uranium enrichment nuclei are achieved; the morphology and the specific surface are locked through whole-process low-temperature hydrothermal and low-shear
drying, so that the
powder is ensured to be used as a filler in resin sealing materials of high-integration integrated circuits, large-scale integrated circuits and super-large-scale integrated circuits, and the powder has the comprehensive performance of high filling, low
thermal resistance and zero alpha-
ray soft errors; and the limit requirements of node packaging materials of 3nm and below are met.