The invention belongs to the technical field of
semiconductor materials, and relates to a preparation method of a large-size high-performance
single crystal, which at least comprises the following steps: S1, material preparation and melting, S2, seeding and
necking, S3, shouldering: carrying out gradient shouldering after
necking is completed, S4, rotating the shouldering, S5, carrying out
diameter equalization: carrying out gradient pressurization and
diameter equalization, S6, ending, and S7, annealing: carrying out two-stage annealing treatment on the
crystal in a furnace. According to the method, through temperature segmented regulation and control of gradient shouldering, the problems of edge breakage,
dislocation proliferation and the like easily caused by misalignment of temperature-pulling speed
coupling control in a traditional process are solved, and the shouldering success rate in the
crystal preparation process is greatly increased. According to the invention, the problem of
temperature instability in the prior art is systematically solved through
temperature control at three different stages, and the overall
crystal quality is improved.