The utility model discloses a composite
dielectric gate photosensitive detection unit and a
detector, each unit comprises a composite
dielectric gate photosensitive
capacitor and a composite
dielectric gate
MOSFET (
Metal-
Oxide-
Semiconductor Field Effect Transistor), and the composite dielectric gate photosensitive
capacitor and the composite dielectric gate
MOSFET are formed above the same P-type
semiconductor substrate. An active region of a P-type
semiconductor substrate of the composite dielectric gate
MOSFET adopts an L-shaped or U-shaped structure, the direction of an
electric field between a source and a drain is arc-shaped,
electron accelerated motion is restrained, channel
hot electron injection is not easy to occur in
electric field distribution, and the structure of the L-shaped or U-shaped active region enables the composite dielectric gate photosensitive
detector to work at a higher drain
terminal voltage, so that the reliability of the composite dielectric gate photosensitive
detector is improved. And the working current of the photosensitive detector is larger under the same
gate voltage, so that the readout
noise of the photosensitive detector is further reduced. The P-type
semiconductor substrate active region of the composite dielectric gate MOSFET adopts an annular structure, so that the
layout in two dimensions of a two-dimensional plane is realized, the equivalent
gate length of the composite dielectric gate MOSFET is increased, the channel area of a
transistor is increased, and the random telegraph
noise is reduced.