The invention relates to the technical field of monolithic integration, in particular to a monolithic three-dimensional integration implementation method and device for a
hybrid precision in-memory computing architecture, and the method comprises the steps: obtaining a
silicon-based
CMOS technology and a subsequent integration technology in a monolithic three-dimensional integration technology; manufacturing a
control logic circuit on the computing architecture in the
mixed precision memory by adopting a
silicon-based
CMOS (Complementary
Metal Oxide Semiconductor) process; a plurality of functional
layers are vertically stacked on a logic circuit by adopting a back-end integration process, communication among the functional
layers is realized through interlayer
dielectric via holes in the vertical direction, an analog in-
memory array, a digital in-
memory array and a cache are arranged on the functional
layers, the analog in-
memory array realizes matrix and vector multiplication with fixed weight, and the digital in-memory array realizes matrix and vector multiplication with fixed weight. And the array in the
digital memory realizes
matrix multiplication of refresh weight. Therefore, the problems that an in-memory computing architecture usually needs to occupy a relatively large part of
chip area, the computing efficiency is relatively low and the like in related technologies are solved.