The invention relates to a
wafer level MMCM (
microwave multichip module) packaging structure using photosensitive BCB (
benzocyclobutene) as a
dielectric layer and a method. The packaging structure is characterized by 1) manufacturing
metal ground (GND) shielding
layers on a
silicon substrate with cavities for embedding; 2) using the photosensitive BCB as the
dielectric layers and forming an interconnected through hole structure on the BCB by utilizing photoetching and developing processes; and 3) forming a multi-layer
interconnection packaging structure through alternate occurrence of
metal layers and the
dielectric layers. The method is characterized by eroding or
etching the cavities for embedding on the
silicon substrate,
sputtering a
metal seed layer and carrying out
electroplating to form the GND, embedding MMIC (
monolithic microwave integrated circuit) chips, using conductive adhesives to bond the chips and the substrate,
coating the photosensitive BCB and carrying out photoetching and developing to form the interconnected through hole patterns and carrying out curing to realize multi-layer MMCM
package. The thickness of the dielectric layers is 20-35mu m. Capacitors, resistors, inductors, power dividers and antenna passive devices can be integrated in the multi-layer
interconnection structure or discrete components are integrated through
surface mount technology, thus realizing the functionalization of the module.