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6305 results about "Dielectric" patented technology

A dielectric (or dielectric material) is an electrical insulator that can be polarized by an applied electric field. When a dielectric is placed in an electric field, electric charges do not flow through the material as they do in an electrical conductor but only slightly shift from their average equilibrium positions causing dielectric polarization. Because of dielectric polarization, positive charges are displaced in the direction of the field and negative charges shift in the direction opposite to the field (for example if the field is moving in the positive x-axis, the negative charges will shift in the negative x-axis). This creates an internal electric field that reduces the overall field within the dielectric itself. If a dielectric is composed of weakly bonded molecules, those molecules not only become polarized, but also reorient so that their symmetry axes align to the field.

Automatic control method and system for secondary granulation of high-voltage zinc oxide resistor disc

The invention discloses an automatic control method and system for secondary granulation of a high-voltage zinc oxide resistor disc, relates to the technical field of intelligent manufacturing of power equipment, and solves the problems of out-of-control particle morphology caused by dynamic coupling parameter identification lag and control instability caused by multi-physical field parameter coupling in an existing method. According to the invention, a dynamic physical property parameter matrix is generated in real time based on multi-band dielectric relaxation spectrum analysis and terahertz wave tomography; predicting a fluidized phase change threshold value and an energy gathering area through multi-physics field coupling modeling; a time sequence attention deep reinforcement learning algorithm is adopted to generate a multi-field cooperative adjustment instruction; positioning a parameter conflict source and triggering decoupling compensation by combining a high-frequency vibration and acoustic emission combined monitoring module; performing closed-loop correction on the control network weight based on the laser spectrum data and a partial least squares regression model; the real-time performance of fluidization parameter identification, the stability of multi-field coupling control and the recovery efficiency of abnormal working conditions are remarkably improved, and meanwhile the batch consistency of the electrical performance of the resistor discs is guaranteed.
Owner:NANYANG GOLDEN CROWN IND CO LTD

Low temperature molybdenum deposition assisted by silicon-containing reactants

Molybdenum-containing films are deposited on semiconductor substrates at relatively low temperatures of between about 100 and about 500° C., such as between about 200 and about 450° C. For example, molybdenum metal can be deposited at this temperature on a substrate having exposed metal and exposed dielectric in a substantially non-selective manner. In one implementation, a substrate having a recessed feature is provided, where the recessed feature has an exposed dielectric on the sidewalls and an exposed metal on the bottom. The substrate is exposed to a molybdenum-containing precursor, a reducing agent, and a silicon-containing reagent, to thereby reduce the molybdenum-containing precursor and form a molybdenum-containing layer that includes metallic molybdenum. The use of the silicon-containing reactant leads to a reduction in on-metal / on-dielectric selectivity of molybdenum deposition.
Owner:LAM RES CORP

Back contact cell with passivated specific light receiving surface and preparation method and application thereof

The invention belongs to the technical field of back contact cells, and particularly relates to a back contact cell with a passivated specific light receiving surface and a preparation method and application thereof.The back contact cell comprises a substrate, the substrate is provided with a backlight surface and a light receiving surface, the light receiving surface of the substrate is sequentially provided with a first tunneling oxide layer, a doped amorphous silicon layer and a silicon medium anti-reflection layer, the thickness of the first tunneling oxide layer is 0.2-1.5 nm, and the thickness of the doped amorphous silicon layer is 0.2-1.5 nm; the doped amorphous silicon layer is doped with an oxygen element and a hydrogen element, the first tunneling oxide layer is doped with a hydrogen element, and the content of the hydrogen element close to the side of the doped amorphous silicon layer in the first tunneling oxide layer is greater than the content of the hydrogen element close to the side of the substrate. According to the invention, good passivation effect and optical loss can be taken into account, and the passivation effect is enhanced, so that the passivation effect and current of the battery are improved, the efficiency of the battery is improved, and the equipment cost is low.
Owner:GOLDEN SOLAR (QUANZHOU) NEW ENERGY TECH CO LTD

Container monitoring system with dielectric-based contamination detection

A non-invasive liquid integrity monitoring system using dielectric fingerprinting and machine learning to detect and identify contamination in sealed containers is described. The system may employ externally-mounted sensors that measure dielectric properties through electromagnetic interrogation, comparing measurements against baseline signatures to detect deviations indicating contamination, tampering, or degradation. Industry-specific ML models enable identification of specific contaminants with confidence, providing alerts without breaching container integrity.
Owner:BARREL PROOF TECHNOLOGIES LLC

Package architecture with thermal enhancements for vertically oriented integrated circuit dies

Embodiments of a microelectronic assembly comprise: a first set comprising one or more of first integrated circuit (IC) dies; a second set comprising another one or more of the first IC dies; a plate between, and in direct contact with, the first set and the second set; and a second IC die coupled to the first set, the second set, and the plate. Each IC die comprises a substrate of semiconductor material and an interconnect region including metallization in interlayer dielectric (ILD), the substrate and the interconnect region share a planar interface, and the first IC dies and the second IC die are arranged with the planar interfaces of the first IC dies parallel to each other and orthogonal to the planar interface of the second IC die.
Owner:INTEL CORP

Urban hidden unmanned aerial vehicle identification method and system

The invention provides a city hidden unmanned aerial vehicle identification method and system. The method comprises the following steps: acquiring geometric morphology and material dielectric constant data of an urban building group, and generating a building material reflection parameter set; secondly, based on reflection parameters, millimeter wave frequency band combinations adaptive to building attenuation characteristics are screened, millimeter wave signals are directionally transmitted, reflection components of metal parts and unmanned aerial vehicle composite materials are separated, and a three-dimensional millimeter wave imaging map fused with multipath interference suppression parameters is generated; collecting a radio frequency signal, compensating path loss by using scattering phase offset, extracting a harmonic component of a propeller motor and a frequency hopping residual component of a communication module, and generating a time-space synchronous radio frequency fingerprint coding sequence; through constructing a millimeter wave and radio frequency coupling model, cross validation is carried out on a reflection component and a harmonic component, and accurate identification of the hidden unmanned aerial vehicle in the urban building group shielding area is realized. According to the invention, the urban hidden unmanned aerial vehicle identification precision is improved.
Owner:TIANJIN YUNXIANG UAV TECH CO LTD

Experimental system for measuring dielectric constant of drilling fluid

The invention relates to the technical field of oil and gas well drilling, in particular to an experimental system for measuring the dielectric constant of drilling fluid, which comprises a reaction kettle body, a pressure unit, a temperature unit and a dielectric constant sensor. In the oil-gas well drilling operation process, whether the overflow phenomenon occurs in an oil-gas well or not is judged by monitoring the fluctuation of the dielectric constant of drilling fluid in real time, but the fluctuation of the dielectric constant can also be caused by changes of physical conditions such as pressure and temperature of the drilling fluid, and if the fluctuation of the dielectric constant caused by the changes of the physical conditions is not eliminated, the overflow phenomenon is judged. If so, the accuracy of overflow monitoring is influenced. In the application, the pressure unit and the temperature unit are used for respectively changing the pressure and the temperature of the drilling fluid so as to obtain the change relationship between the pressure and the temperature of the drilling fluid and the dielectric constant; therefore, whether the fluctuation of the dielectric constant of the drilling fluid in the oil and gas well is caused by the change of physical property conditions such as pressure and temperature or not is judged according to the change relation, and the accuracy of overflow monitoring is further improved.
Owner:CHINA UNIV OF PETROLEUM (BEIJING)

Light-operated reconfigurable metasurface for full-space terahertz wave beam regulation and control

The invention discloses a light-operated reconfigurable metasurface for full-space terahertz wave beam regulation and control, solves the problem of how to provide ubiquitous full-space wave beam coverage for multi-user wireless communication application, and belongs to the field of artificial electromagnetic metamaterials. The super subunit comprises N super subunits which are arranged periodically, each super subunit comprises 4 * 4 identical coding units, corresponding codes are '0' and '1' respectively when illumination exists or not, and the phase response difference of the two coding units at 0.7 THz is 180 degrees. Each super subunit comprises five layers, the third layer is used for switching between reflection and transmission, when vanadium dioxide is in a medium state, the super surface is in a transmission mode, and when vanadium dioxide is in a metal state, the super surface is in a reflection mode. The first layer, the second layer, the fourth layer and the fifth layer are used for controlling the amplitude and the phase of the total-space terahertz wave, the conductivity of the photosensitive silicon pattern is changed under excitation of light with different intensities, the phase of the total-space terahertz wave beam is effectively modulated, and one-bit terahertz information coding is achieved.
Owner:HARBIN INST OF TECH

Multi-parameter coupling intelligent regulation and control method and system in vanadium ore smelting process

The invention discloses a multi-parameter coupling intelligent regulation and control method and system in a vanadium ore smelting process, relates to the technical field of non-ferrous metal smelting automatic control, and solves the problems of feeding deviation and resource chain scission caused by slow response of an existing heat balance model to ore impurity fluctuation, online sensing lag and process island. The impurity concentration and the dielectric constant are obtained in real time through an LIBS / XRF combined probe and a microwave dielectric spectrum, rheological disturbance is dynamically corrected through extended Kalman filtering, a dynamic coupling response model is input, a thermodynamic interference factor is calculated, and a leaching and precipitation strategy is generated; performing mother liquor tail gas material flow collaborative optimization in parallel, constructing a multi-dimensional control vector U, performing iterative updating through near-end strategy optimization in a digital twin and issuing the multi-dimensional control vector U to an edge PLC (Programmable Logic Controller) in a distributed manner, and finally correcting a model weight through online XRD (X-Ray Diffraction) feedback; according to the method, the adaptive capacity to complex vanadium ore component disturbance, the response precision of online control and the inter-process resource circulation efficiency are remarkably improved.
Owner:XICHUAN BEIJING JINYANG VANADIUM IND CO LTD

Server basket for use in an immersion cooling tank

Server baskets for use in immersion tanks are described herein. In one example, a server basket may be configured to receive a computer server. The server basket may include a cable management housing that has one or more data and power ports. The cable management housing may be located at or proximate to a top portion of the server basket. When the server basket is immersed in dielectric fluid in an immersion tank, the cable management housing may be located above a liquid level, thereby providing convenient access to the one or more ports. A signal repeater may be located in the cable management housing and above the liquid level. The server basket may include support arms that can be deployed when removing the server from the dielectric fluid. The support arms may enable drip drying and fluid recapture by the immersion tank. Other examples may be claimed or described.
Owner:LIQUIDSTACK HLDG BV

Road underground disease detection model based on medium inversion and deep learning

The invention provides a road underground disease detection model based on medium inversion and deep learning. A generation method of the model comprises the following steps: 1) collecting road underground radar data by using a ground penetrating radar; 2) obtaining the distribution condition of the underground dielectric constant corresponding to the B-Scan, and constructing a B-Scan-dielectric constant distribution data set; 3) constructing a deep learning medium dielectric property inversion model, and performing training by optimizing a comprehensive loss function; 4) utilizing the trained dielectric dielectric property inversion model to perform inversion on the actually measured radar map to generate an underground dielectric property distribution map; 5) performing disease classification marking according to the underground dielectric property distribution diagram, and constructing and training a disease target identification model; and 6) inputting the to-be-detected dielectric property distribution data into the disease target identification model, and outputting a prediction result of the underground hidden disease. Compared with the prior art, the method provided by the invention can realize accurate disease identification and positioning under complex underground medium distribution, and has better accuracy advantage and stronger generalization ability.
Owner:TONGJI UNIV

Multilayer metal medium metamaterial wave absorber and 3D printing manufacturing method thereof

The invention provides a multilayer metal medium metamaterial wave absorber and a 3D printing manufacturing method thereof.The multilayer metal medium metamaterial wave absorber comprises a plurality of structural units arranged in rows and columns, and each structural unit comprises a metal base and a plurality of hollow square ring-shaped metal-medium composite layers stacked up and down; the metal-medium composite layers are sequentially and vertically stacked on the metal base according to the side length sequence, and the sizes of the metal-medium composite layers are sequentially decreased from bottom to top. Compared with the prior art, the multi-layer metal medium metamaterial wave absorber has a high-efficiency wave absorbing effect in an ultra-wide frequency band; and the medium material and size can be flexibly selected, and the 3D printing additive manufacturing technology is utilized for manufacturing, so that the processing difficulty and the manufacturing cost are reduced.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Subsurface soil humidity inversion method and system based on P-band radiometer

The invention provides a subsurface soil humidity inversion method and system based on a P-band radiometer, and the method comprises the steps: collecting observation data, carrying out the preprocessing of the observation data, and constructing initial parameters for a pre-configured dielectric hybrid model; calculating the relative dielectric constant of the soil and the soil emissivity of each incident angle; calling a pre-configured Chodhure module, and calculating to obtain the effective temperature of the soil; calculating by using a radiation transfer zero-order approximation model to obtain a simulated brightness temperature; the brightness temperature difference value between the original brightness temperature data and the simulated brightness temperature is calculated, a cost function is constructed, optimization parameters are obtained, and the weight of each angle in the cost function is dynamically adjusted and updated; and iteratively executing soil humidity inversion calculation to obtain an inverted soil humidity result. According to the method, the sensitivity to vegetation and surface roughness is reduced, and the soil humidity inversion precision is improved; and through dynamic weight adjustment and iterative optimization, the adaptability and flexibility of the model are ensured.
Owner:HOHAI UNIV

Forksheet transistors with dielectric or conductive spine

Embodiments disclosed herein include forksheet transistor devices having a dielectric or a conductive spine. For example, an integrated circuit structure includes a dielectric spine. A first transistor device includes a first vertical stack of semiconductor channels spaced apart from a first edge of the dielectric spine. A second transistor device includes a second vertical stack of semiconductor channels spaced apart from a second edge of the dielectric spine. An N-type gate structure is on the first vertical stack of semiconductor channels, a portion of the N-type gate structure laterally between and in contact with the first edge of the dielectric spine and the first vertical stack of semiconductor channels. A P-type gate structure is on the second vertical stack of semiconductor channels, a portion of the P-type gate structure laterally between and in contact with the second edge of the dielectric spine and the second vertical stack of semiconductor channels.
Owner:INTEL CORP

Diffusion barrier collar for interconnects

Representative implementations of techniques and devices are used to reduce or prevent conductive material diffusion into insulating or dielectric material of bonded substrates. Misaligned conductive structures can come into direct contact with a dielectric portion of the substrates due to overlap, especially while employing direct bonding techniques. A barrier interface that can inhibit the diffusion is disposed generally between the conductive material and the dielectric at the overlap.
Owner:ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC

On-line detection control method and system for fly ash blackening in thermal power plant

The invention relates to the technical field of fire coal control, and discloses a thermal power plant fly ash floating black online detection control method and system, and the method comprises the steps: 1, employing microwave, infrared and laser sensors for cooperative work, detecting carbon dielectric characteristics through microwave dust interference resistance, identifying thermal radiation difference through infrared, and analyzing particle distribution through laser; 2, on the basis of the detection requirements in the step 1, triple protection of air curtain barrier, ultrasonic cleaning and hydrophobic coating is designed, dust condensation is blocked, and it is ensured that the light transmittance of the sensor is larger than 90%; the invention provides a multi-mode sensing fusion-anti-interference current stabilization-closed loop optimization full-link solution for the industrial problem of signal distortion caused by optical window dew formation and dust deposition, airflow disturbance and environmental interference in fly ash floating black online detection. The light transmittance of the optical window is greater than 93% by combining triple protection of air curtain barrier, ultrasonic cavitation stripping and nano hydrophobic coating.
Owner:GUODIAN CHENGDU JINTANG POWER GENERATION CO LTD

Container monitoring system with dielectric-based contamination detection

A non-invasive liquid integrity monitoring system using dielectric fingerprinting and machine learning to detect and identify contamination in sealed containers is described. The system may employ externally-mounted sensors that measure dielectric properties through electromagnetic interrogation, comparing measurements against baseline signatures to detect deviations indicating contamination, tampering, or degradation. Industry-specific ML models enable identification of specific contaminants with confidence, providing alerts without breaching container integrity.
Owner:BARREL PROOF TECHNOLOGIES LLC

Component layout system of DC-DC power supply module

The invention relates to the technical field of circuit component layout, in particular to a component layout system of a DC-DC power module, which obtains a candidate position range according to a first preset position range and a second preset position range, and obtains a reference distance according to an initial value set, a target value, a preset wiring width and a preset dielectric constant. According to the method, a series of possible candidate positions are generated by comprehensively considering different distance and angle combinations, so that the layout possibility of a target element on a target printed circuit board can be comprehensively explored, and an output voltage sequence and response delay time corresponding to each candidate position are obtained respectively; according to the method, performance of stability, accuracy, reliability, timeliness and the like of a circuit under different candidate positions is represented through the characteristic of the candidate positions, then the target priority corresponding to each candidate position is obtained, the candidate position corresponding to the maximum target priority is determined as the target position of the target element, the layout reasonability of the target element is improved, and the reliability of the circuit is improved. And the performance and the reliability of the whole circuit are improved.
Owner:SHENZHEN FLASHLIGHT EQUIP

Fluorene polyester and polyaryletherurea blended dielectric energy storage polymer film and preparation method thereof

The invention belongs to the field of dielectric materials and dielectric energy storage, and particularly relates to a fluorene polyester and polyaryletherurea blended dielectric energy storage polymer film and a preparation method thereof. The preparation method specifically comprises the following steps: adding fluorene polyester and polyaryletherurea into a solvent, fully dissolving to obtain a mixed solution, uniformly coating a substrate with the mixed solution, and then drying; and carrying out vacuum annealing on the dried film, and then carrying out curing treatment to strip the film from the substrate to obtain the fluorene polyester and polyaryletherurea blended dielectric energy storage polymer film, thereby improving the charge-discharge efficiency and high discharge energy density of the polymer under high temperature and high field, and solving the problems of high electric leakage loss and low cost of the existing polymer film. And the charging and discharging efficiency is low.
Owner:HUAZHONG UNIV OF SCI & TECH

Dielectric metasurface reverse optimization method based on space coupling mode theory

ActiveCN119578072AGood calculation efficiencyComputationally efficientGeometric CADDesign optimisation/simulationDielectricCoupled mode theory
The invention discloses a medium metasurface reverse optimization method based on a space coupling mode theory, and relates to the field of optics, and the method comprises the following steps: building a cut-off waveguide array based on a metasurface, calculating a guided mode and a propagation constant of each waveguide according to the cut-off waveguide array, and coupling adjacent waveguides through a coupling matrix, a waveguide array is obtained; an input light field is coupled into a waveguide array, propagation of light in waveguides is simulated based on a spatial coupling mode theory model, and near-field intensity distribution is converted into far-field intensity distribution by using a Rayleigh-Sommerfeld diffraction theory; and calculating the difference between the target intensity and the far-field intensity through a loss function, evaluating the effect of the current metasurface design, and gradually adjusting the geometric parameters of the waveguide unit through an optimization algorithm. According to the method, the problems of efficient modeling and optimization in metasurface design are solved through the space coupling mode theoretical model.
Owner:江苏优众微纳半导体科技有限公司

Double-sided wave-absorbing broadband stealth composite material and preparation method thereof

The invention belongs to the technical field of radar wave-absorbing materials, and discloses a double-sided wave-absorbing broadband stealth composite material and a preparation method thereof. The broadband stealth composite material with the double-sided wave absorbing function comprises a non-metal-based composite material body and at least five metamaterial layers arranged in the thickness direction of the non-metal-based composite material body at intervals. The number of the metamaterial layers is an odd number, a middle metamaterial layer is arranged in the middle of the metamaterial layers in the thickness direction, and the rest metamaterial layers are symmetrically distributed on the two sides of the middle metamaterial layer; the metamaterial layer comprises conductive pattern units which are periodically arranged; the relative dielectric constant of the nonmetal-based composite material body is not greater than 10; the double-sided wave-absorbing broadband stealth composite material does not contain a metal reflecting layer. When electromagnetic waves with the frequency of 1-18 GHz vertically enter the material, the transmissivity of the material is small (smaller than-13 dB, namely smaller than 5%), and meanwhile the material has low reflectivity in a broadband. And the preparation method is simple to operate and easy to realize large-scale production.
Owner:CHANGSHA JINGYOU NEW MATERIAL TECH CO LTD

Intelligent control method, device and equipment for composite material curing, storage medium and program product

The invention discloses an intelligent control method and device for composite material curing, equipment, a storage medium and a program product, and relates to the technical field of material processing, and the intelligent control method for composite material curing comprises the steps that the material dielectric constant of a composite material and temperature data in the curing process are obtained; determining the regional curing degree of the composite material based on the dielectric constant of the material and the temperature data; and carrying out traction speed control on the curing process of the composite material according to the regional curing degree. The curing process is reflected in real time through changes of material dielectric constants and temperature data, and the traction speed is dynamically adjusted in combination with an external thermal imaging temperature value, so that the traction speed is synchronous with the curing reaction, and the yield of pultrusion products is improved.
Owner:SICHUAN ZHOUYU HUAZHOU ARCHITECTURAL DESIGN CO LTD

Semiconductor device and methods of forming the same

A method includes: forming first bond pads along a wafer; bonding a first die to a first set of the first bond pads, the first die being electrically connected to the wafer; depositing a gap-fill dielectric over the wafer and around the first die; forming openings in the gap-fill dielectric; forming first active through vias in physical contact with the second set of the first bond pads and first dummy through vias in physical contact with the third set of the first bond pads, the first active through vias being electrically connected to the wafer, the first dummy through vias being electrically isolated from the wafer; forming second bond pads along the first die, the first active through vias, and the first dummy through vias; and bonding a second die to the first die and to a first active via of the first active through vias.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Systems and methods for fabrication of superconducting integrated circuits

Various techniques and apparatus permit fabrication of superconductive circuits. A niobium / aluminum oxide / niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and / or additive patterning. A superconducting metal layer may be deposited by electroplating and / or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.
Owner:1372934 B C LTD

Remote plasma generator

The invention belongs to the technical field of plasmas, and provides a remote plasma generator, which comprises an ionization cavity, an ignition assembly, a magnetic core assembly and a heat dissipation assembly, and is characterized in that an air channel is formed in the ionization cavity; the ignition assembly is used for conducting excitation ignition on gas in the gas channel to form plasma. The ignition assembly comprises a dielectric sheet, a sealing structure and an ignition structure, and the dielectric sheet is attached to the ionization cavity; the sealing structure is arranged on the outer side of the dielectric sheet; the ignition structure is used for performing excitation ignition on gas; an anodic oxidation coating film is formed on the inner wall of the ionization cavity; an anodic oxidation coating film is formed on the surface of the dielectric sheet through an anodic oxidation process. The anodic oxidation coating film is formed on the surface of the dielectric sheet, the dielectric sheet serves as a dielectric material, meanwhile, the anodic oxidation coating film on the surface is tightly attached to the anodic oxidation coating film in the ionization cavity, the contact surface stress is increased, the dielectric sheet is prevented from cracking, gas corrosion caused by plasma bombardment is effectively reduced, and the service life is prolonged.
Owner:江苏神州半导体科技股份有限公司

Power capacitor explosion-proof test method, system, medium and equipment

The invention relates to the technical field of power capacitors, and discloses a power capacitor explosion-proof test method, system, medium and equipment, and the method comprises the steps: constructing a composite stress field according to the actual working condition of a power capacitor, and injecting a multi-band harmonic current sequence; three-dimensional strain propagation characteristics of the power capacitor outer shell are captured in real time, a strain-discharge time-space correlation model is established, a structural integrity attenuation curve of the power capacitor outer shell is obtained accordingly, and when the slope of the attenuation curve breaks through a preset critical topological form, a multi-stage linkage protection device is triggered to implement energy discharge; and extracting a characteristic spectral line of a plasma spectrum formed by the self-healing characteristic of the metallized film in the energy discharge process, constructing a multi-stage evaluation index through the offset of the characteristic spectral line, and generating an explosion-proof performance grade evaluation result. According to the invention, accurate simulation of the composite stress field and dynamic monitoring and early warning of the power capacitor can be realized, and the accuracy of early warning and explosion resistance evaluation is improved.
Owner:SUZHOU CITY UNIV

Semiconductor device having nanosheet transistor and methods of fabrication thereof

Method for forming semiconductor device structure includes forming a sacrificial layer between first and second stacks of layers, the first stack of layers comprises first and second semiconductor layers alternatingly stacked, and the second stack of layers comprises third and fourth semiconductor layers alternatingly stacked, wherein the sacrificial layer comprises a semiconductor metal oxide, forming a sacrificial gate structure over portion of the second stack of layers, removing portions of the first and second stack of layers not covered by the sacrificial gate structure, removing the sacrificial layer to form cavity, filling the cavity with a dielectric to form an isolation layer, and forming first and second source / drain features on opposing sides of sacrificial gate structure, wherein the first source / drain feature is disposed below the second source / drain feature, and the first and second source / drain features are in contact with the isolation layer, first semiconductor layers, and third semiconductor layers.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Substrate processing device and substrate processing method

There is provided an apparatus for processing a substrate, comprising: a substrate holder disposed in a processing chamber and configured to hold the substrate; a processing gas supplying part configured to supply a processing gas into the processing chamber; a surrounding member disposed to surround a peripheral portion of the substrate held by the substrate holder and having an annular wall portion made of a dielectric; a plasma actuator disposed at the wall portion and configured to plasmarize the processing gas supplied by the processing gas supply part and form flow of plasma of the processing gas along the wall portion in a preset direction; and an injection mechanism configured to inject the plasma formed by the plasma actuator and flowing along the wall portion toward the peripheral portion of the substrate held by the substrate holder to perform processing using the plasma.
Owner:TOKYO ELECTRON LTD

Self-aligned backside gate cut dielectric with air gap

A semiconductor structure including a first nanosheet transistor device, a second nanosheet transistor device, a dielectric gate cut structure between and electrically isolating the first nanosheet transistor device from the second nanosheet transistor device, where a first portion of the dielectric gate cut structure has a positive tapered profile, and a second portion of the dielectric gate cut structure has a negative tapered profile.
Owner:INTERNATIONAL BUSINESS MACHINE CORPORATION

Semiconductor package and method

A semiconductor package with two interposers, and the method of forming the same are provided. The semiconductor package may include a first interposer, a first semiconductor die on the first interposer, a second interposer on the first semiconductor die, and a second semiconductor die on the second interposer. The second interposer may be between the first semiconductor die and the second semiconductor die. The first semiconductor die may be bonded to the first interposer by metal-to-metal bonding and dielectric-to-dielectric bonding. The second semiconductor die may be bonded to the second interposer by metal-to-metal bonding and dielectric-to-dielectric bonding.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD