129 results about "Rare gas" patented technology

The invention relates to a Kr separation method and system based on selective desorption, a terminal and a storage medium, and relates to the technical field of rare gas purification. Calculating the difference between the quotient of the historical krypton loss amount and the adsorption column mass and the initial unit krypton adsorption amount to generate the actual unit krypton adsorption amount; calculating the quotient between the product of the actual unit krypton adsorption quantity and the mass of the adsorption column and the flow velocity of the single to-be-adsorbed air so as to generate actual adsorption time; controlling the first-stage adsorption column to adsorb the to-be-adsorbed air according to the actual adsorption time so as to generate a to-be-separated adsorption column; controlling the adsorption column cleaning device to clean the adsorption column to be separated according to the actual unit krypton adsorption quantity, and collecting desorbed gas after cleaning to the waste gas storage device; and performing desorption operation on the cleaned adsorption column, controlling a gas collection device to collect desorbed gas, and heating and activating the first-stage adsorption column to recover the adsorption capacity. The application has the effect of reducing krypton loss.

The invention discloses a heat exchanger and method for rare gas preparation, and relates to the technical field of heat exchangers, the heat exchanger comprises a heat exchange mechanism, the outer surface wall of the heat exchange mechanism is sleeved with a cleaning structure, the input end of the heat exchange mechanism communicates with a feeding mechanism, and an aeration mechanism is inserted into the inner surface wall of the heat exchange mechanism. In the cleaning process, the second air pump conveys outside air to the aeration ball, so that a large number of bubbles are formed in cleaning liquid, dirt is cleaned by means of tiny shock waves and high-speed micro jet flow generated during bubble movement and breakage, and the ultrasonic generator can release sound wave energy; the synergistic effect of bubbles and sound waves greatly improves the cleaning efficiency and effect, enhances the stripping capacity of dirt on the inner wall of the heat exchanger, ensures that rare gas is not polluted in the heat exchange process, maintains the high purity of the rare gas, keeps the inner wall of the heat exchanger smooth, and improves the heat transfer efficiency, so that the cooling or heating speed of the rare gas is increased, and the service life of the heat exchanger is prolonged. The efficiency of the whole preparation process is improved.

The invention discloses a recovery device and method of rare gas He for CVD (chemical vapor deposition) atmosphere, and relates to the field of rare gas recovery, the recovery device of rare gas He for CVD atmosphere comprises an alkaline drying device, a primary filtering device, a helium recovery membrane group, a trace impurity removal device and a precision filtering device which are connected in sequence, the alkaline drying device is connected with a waste gas outlet of the CVD reactor, the primary filtering device is used for preliminarily filtering waste gas to remove particle dust, and an outlet of the precision filtering device is connected with the helium recovery membrane group, so that high-purity helium obtained by the precision filtering device is circularly purified. And efficient recovery and purification of the rare gas He in the CVD atmosphere are realized. By means of the circulating purification design, the helium recovery rate is increased, product losses caused by one-time treatment are effectively reduced, and therefore resource waste is reduced.

The invention belongs to the technical field of tail gas treatment, and relates to a device system and a method for recovering helium from semiconductor manufacturing process tail gas, by adopting a composite device system of an adsorption device, a membrane separation assembly and a gas purification tower, the recovery and purification operation of low-concentration helium containing toxic, corrosive and various rare gas mixed working conditions can be completed, and the helium recovery efficiency is improved. The recovered helium can be purified to 99.999% or above, the recovery rate is high, the purity is high, front and back gas heat exchange is fully utilized, the energy consumption is low, and the helium supply source is further widened; the device system is free of gas emptying in the whole process, reflows, collects and discharges back to a tail gas pipeline, and is suitable for various manufacturing processes of semiconductors.

The invention discloses a microporous metal organic framework material, a preparation method and a rare gas separation method, and belongs to the technical field of chemical adsorption separation, the microporous metal organic framework material is constructed by coordination of divalent metal ions, heterocyclic dicarboxylic acid ligands and nitrogen-containing heterocyclic ligands; divalent metal ions and heterocyclic dicarboxylic acid ligands are coordinated to form a two-dimensional polymer, and nitrogen-containing heterocyclic ligands serve as pillared bodies and are coordinated with the two-dimensional polymer to form a three-dimensional frame structure. A microporous metal organic framework material is used as an adsorbent and is in contact with a rare gas mixture, so that high-polarity rare gas is recognized and captured, and separation and purification of the rare gas are achieved. According to the invention, by changing different ligands and functional group substituents thereof, precise regulation and control of a pore chemical electrostatic environment are realized, so that selective separation of rare gases such as xenon / krypton, helium / neon and the like is realized.

The invention discloses a multi-band enhanced infrared optical comb spectrum rare gas detection system in a hollow cavity of building glass, which is characterized in that a line scanning optical frequency comb light source module and a reflective array module jointly form a virtual enhanced cavity to enhance the optical path of an emitted fan-shaped optical comb light beam so as to improve the detection precision; rapid switching of multi-band gas is achieved through an electric filter wheel according to sequential control so as to detect different gases, gas data in a hollow cavity are collected in real time by combining the high-speed collection capacity of a dual-band area array detection module, and a concentration distribution cloud chart of argon and krypton is rapidly constructed based on a data terminal processing module; the detection efficiency and accuracy of the gas in the glass hollow cavity are greatly improved, the synchronous operation of space scanning and wave band switching is realized, and multi-dimensional data of the concentration, the position and the impurity content of multiple gases can be measured and obtained at a time; a polarization filtering function and a temperature field compensation algorithm are integrated, and the detection precision under outdoor strong light and temperature difference environments is ensured.

The present invention belongs to the technical field of tail gas treatment, and relates to a device system and method for recovering helium from semiconductor process tail gas. By adopting a composite device system of an adsorption device, a membrane separation module, and a gas purification tower, it can complete the recovery and purification operations of low-concentration helium under the conditions of containing toxins, corrosion, and a mixture of multiple rare gases. The recovered helium can be purified to more than 99.999%. It has a high recovery rate, high purity, makes full use of heat exchange of the front and rear gases, has low energy consumption, and further broadens the helium supply source. The device system has no gas venting throughout the process, and all are refluxed, collected, and discharged back into the tail gas pipeline, and is applicable to various semiconductor processes.

The invention discloses a method for adsorbing and separating high-purity gas, which belongs to the technical field of chemical separation and comprises the following steps of: separating and purifying mixed gas or isotope by using an adsorption separation medium; the adsorption separation medium is a microporous metal organic framework material which is thermally synthesized from divalent metal salt and a ligand 1, 5-dihydrobenzo [1, 2-d: 4, 5-d '] bis ([1, 2, 3] triazole) through a solvent. The microporous metal organic framework material has a uniformly distributed microporous structure, a high specific surface area and excellent thermal stability and chemical stability, and high-selectivity separation of rare gas xenon / krypton, methane / propane / ethane, propylene / ethylene, ethane / ethylene and xenon isotopes can be realized through pressure swing / temperature swing adsorption; the adsorbent has ultrahigh adsorption and storage capacity for xenon, propane, propylene and ethane, and high-purity (greater than or equal to 99.99%) xenon, krypton, methane, ethylene and ethane and high-purity isotopes of 129Xe and 131Xe can be obtained after separation.

This invention discloses a method for producing high-purity oxygen based on LNG cold energy, belonging to the technical field of gas purification equipment. The implementation steps include: S1, pre-cooling and stepped heat exchange of raw air; S2, distillation separation process using LNG cold energy; S3, oxygen purification and argon separation; S4, cold energy recycling. This invention can improve the purity of oxygen, making the molar purity of oxygen above 99.9%, and rationally utilize LNG cold energy to liquefy raw air, reducing air separation costs. In addition, by coupling a crude argon tower, argon with a molar fraction of 7.4% can be produced for the utilization of rare gases.

The utility model relates to a purification pretreatment device for high-purity electronic rare gas. The purification pretreatment device comprises a filtering system and an adsorption system which are arranged in sequence, the filtering system comprises a filtering frame, a first air inlet pipe and a first air outlet pipe are arranged at the left and right ends of the filtering frame respectively, and a multi-stage filtering assembly is arranged in the filtering frame; the adsorption system comprises an adsorption tank, a second gas inlet pipe and a second gas outlet pipe are arranged on one side of the bottom and one side of the top of the adsorption tank respectively, a liquid outlet pipe is arranged in the center of the bottom of the adsorption tank, the second gas inlet pipe transversely extends into the adsorption tank, and the end, located in the adsorption tank, of the second gas inlet pipe communicates with a vertically-arranged buffer pipe; a baffle is arranged at the top of the buffer pipe, a first gas-liquid separation assembly is arranged in the buffer pipe, and an adsorption assembly is arranged above the baffle in the adsorption tank. The device has the beneficial effects of high purification efficiency, simplicity in operation and the like.

The invention relates to a fuel tank inerting system, a fuel tank inerting method and an aircraft. On one hand, the low-temperature rare gas generated by gasification of the liquid rare gas is directly used for replacing oxygen and fuel steam in the fuel tank and reducing the temperature in the fuel tank, and on the other hand, the low-temperature rare gas is used for cooling the fuel steam discharged out of the fuel tank; and then the cooled fuel steam or the fuel liquid drops formed by condensation are returned to the fuel tank to further reduce the temperature in the fuel tank and the concentration of the fuel steam, so that double inerting of the fuel tank is realized. The fuel tank inerting system and method according to the present disclosure may be applicable to various types of aircraft.

The present invention discloses a recovery device and method for rare gas He used in CVD atmosphere, which relates to the field of rare gas recovery. The recovery device for rare gas He used in CVD atmosphere includes an alkaline drying device, a primary filtration device, a helium recovery membrane module, a trace impurity removal device and a precision filtration device connected in sequence. The alkaline drying device is connected to the exhaust gas outlet of the CVD reactor. The primary filtration device is used for preliminarily filtering and removing particulate dust from the exhaust gas. The outlet of the precision filtration device is connected to the helium recovery membrane module to circulate and purify the high-purity helium gas obtained by the precision filtration device. The recovery device and method for rare gas He used in CVD atmosphere provided by this application achieve efficient recovery and purification of rare gas He in CVD atmosphere. The design of circulating purification in this application not only improves the recovery rate of helium gas, but also effectively reduces the product loss caused by one-time treatment, thereby reducing the waste of resources.

The invention discloses a process for extracting helium from low-grade natural gas, and belongs to the field of rare gas chemical industry. According to the technical scheme, the process for extracting the helium from the low-grade natural gas comprises the following steps: 1, carrying out purification and impurity removal on raw natural gas; 2, the purified and impurity-removed raw natural gas passes through a centrifugal enrichment unit, so that the helium concentration of paraxial output gas flow of the centrifugal enrichment unit reaches the refining treatment concentration, and the paraxial output gas flow is collected; and 3, refining the paraxial output gas flow to obtain a high-purity helium product. The process for extracting the helium from the low-grade natural gas has the beneficial effects that the production difficulty is low, the process cost is low, the utilization rate of helium resources in China can be increased, and the supply and demand contradiction of the helium resources in China is solved.

The invention discloses a general high-precision fixed-point static recognition detection box, an electronic nose and a control method thereof, and the electronic nose comprises the general high-precision fixed-point static recognition detection box and a filter assembly. By adopting the high-precision universal static recognition detection box, the electronic nose and the control method thereof, the type of each gas detection film sensor can be adaptively adjusted according to the type of the detected gas and the detection environment; the position of the detection space can be adjusted, so that the operation convenience is greatly improved; the detection space can be equivalent to the effect of multiple redundant tests through one test; meanwhile, when the detected gas is sucked into the detection space, the detected gas can be filtered through the corresponding filters in sequence, and interference gas and impurities are filtered out; the filter element of each stage of filter has self-checking and self-cleaning functions; the ratio of detected gas can be compressed, so that the detection requirements of some specific rarefied gas are met; the whole device is extremely compact, and the application requirements of miniaturization and modularization are met.

The present invention discloses an ion source for a rare gas isotope mass spectrometer, comprising a cathode assembly and an electron receiving stage assembly, an ionization box, a repeller, an extraction focusing lens group, and an ion source fixing seat. The cathode assembly and the electron receiving stage assembly are respectively fixed at the upper and lower ends of the ionization box, the repeller is fixed at the rear end of the ionization box, the extraction focusing lens group is at the front end of the ionization box, the extraction focusing lens group is connected to the ionization box via a connecting porcelain column to achieve fixation and insulation, the extraction focusing lens group is composed of a pull-out electrode, a z focusing electrode, a grounding electrode, a y focusing electrode, and an exit slit arranged in sequence, the extraction focusing lens group realizes extraction and focusing of sample ions in the ionization box, the other end of the connecting porcelain column is connected to the ion source fixing seat, the center of the ion source fixing seat has an exit slit, the structure is simple, the number of pole pieces is small, the internal volume is small, and the sensitivity is greatly improved. The repeller and extraction focusing system has high ion extraction efficiency and good focusing effect.

The disclosure relates to lithium metal protection using reactive gas combinations. A passivation process for a lithium metal anode includes subjecting a lithium metal to a passivation gas having the following composition: two or more gases selected from the group consisting of CO2, O2, H2O, N2, HC, CO, H, He, F, and SiH4; and optionally, a rare gas. The passivation gas reacts with the lithium metal to form a passivation layer on the lithium metal having a depth of less than ten microns.

The invention relates to the technical field of filling equipment, and discloses a rare gas precise filling device which comprises an adjusting box. The filling box is arranged on one side of the adjusting box; and the volume adjusting mechanism is used for flexibly adjusting the filling volume of the argon gas according to the filling quantitative requirements of the filling bottles with different volumes. By adding and arranging a gradient dehumidification mechanism, before high-pressure raw material argon is filled, the mechanism adopts dual treatment of precooling separation of a high-pressure dryer and adsorption of a tank body, firstly, liquid water and steam are efficiently removed through a spiral guide plate and a cyclone separator, and water accumulation of a pipeline is avoided; secondly, residual moisture is further adsorbed and impurities are filtered out through adsorption filling cotton and a filtering base, moisture interference in subsequent filling is reduced, finally, the residual moisture is treated through a hollow fiber membrane, the multi-stage dehumidification mode can deeply purify argon, the situation that the welding quality is affected by the moisture can be prevented, and the welding quality is improved. And meanwhile, the fault risk caused by frosting of the equipment is reduced.

The utility model discloses a CO2 coal seam CH4 gas competitive adsorption heat effect testing device, and belongs to the field of coal mines. The device comprises a CH4 gas tank, a rare gas tank, a first high-pressure buffer tank, a first reference tank, a non-contact temperature measurement coal sample tank, an infrared thermal imager, a data acquisition and storage mechanism, a second reference tank, a second high-pressure buffer tank, a CO2 gas tank, a constant-temperature water bath, a vacuumizing mechanism, first and second pressure gauges, first to twelfth valves, first and second tee joints, first to third four-way joints, first and third pressure sensors, a CO2 concentration sensor and a CH4 concentration sensor. And connecting the components. The method has no influence on the replacement effect during testing, enables the measurement result to be accurate, can obtain the gas competitive adsorption and gas reciprocal diffusion rules in the process of replacing the CH4 in the coal seam by the CO2, can deeply analyze the driving mechanism and the action efficiency of the CH4 in the coal seam by the CO2 from the perspective of energy migration, and can improve the detection accuracy. And a theoretical support is provided for realizing reasonable optimization and efficiency maximization of key control parameters.

This invention discloses a method for accurately tracing geological hydrogen migration, belonging to the field of geological hydrogen exploration and migration tracing technology. The invention involves preparing stable hydrogen isotopes and radioactive tritium tracers with specific geochemical fingerprints and injecting them into target geological units; deploying a three-dimensional monitoring network including sensor arrays and automatic samplers to collect hydrogen concentration data and gas samples in real time; laboratory analysis to determine hydrogen isotope composition and rare gas concentrations, using an N2-He-Ar ternary diagram to identify gas sources and eliminate interference; integrating data and performing numerical simulations using migration control equations coupled with isotope fractionation effects, optimizing parameters through inversion algorithms; and generating a three-dimensional visualization map of hydrogen migration paths and a quantitative report based on the inversion results. This invention achieves a breakthrough in geological hydrogen migration from qualitative detection to quantitative tracking, significantly improving the reliability and accuracy of tracing, enabling real-time dynamic capture of the migration process, and providing precise decision-making basis for hydrogen exploration.

A film forming method includes a first step of supplying a first aromatic hydrocarbon gas having a first functional group to a substrate provided with an underlayer film, and a second step of activating the first aromatic hydrocarbon gas adsorbed on a surface of the underlayer film by plasma of a first reaction gas that contains at least a rare gas.

The utility model belongs to the technical field of rare gas extraction and concentration, and particularly relates to a crude helium-neon concentration device, which comprises a rectifying tower, a condensing evaporator, a vaporizer, a buffer tank and a film press, the condensing evaporator is arranged on the upper portion of the inner side of the rectifying tower, the vaporizer is connected with the rectifying tower through a pipeline, and the buffer tank is connected with the vaporizer through a pipeline. The film press is connected with the buffer tank through a pipeline, the condensation evaporator comprises a shell, a first liquid nitrogen inlet and a nitrogen outlet are formed in the top of the shell, a second liquid nitrogen inlet is formed in the bottom of the shell, and a hot fluid inlet and a hot fluid outlet are formed in the side wall of the shell; the air guide pipe is arranged in the shell, and the air guide pipe is connected with the hot fluid inlet and the hot fluid outlet; the flow guide pipes are arranged outside part of the air guide pipes in a sleeving manner; a plurality of flow dividing holes are formed in the flow dividing plate, and the flow guide pipes are communicated with the flow dividing holes. The device can reduce the energy consumption of the concentrated helium-neon gas and enhance the working efficiency of the condensation evaporator.

The utility model provides a pipeline replacement structure of a rare gas film pressing machine, which relates to the technical field of rare gas production equipment and comprises a pipeline fixing component, a pipeline fixing component and a pipeline fixing component, and the pipeline fixing component is composed of a sleeve clamp, a rubber sleeve and two tightening rings arranged on two sides of the rubber sleeve. In the pipeline replacement process, firstly, the pipeline can be connected and fixed through the adjusting assembly, the two arc-shaped top plates are driven to get close to each other by screwing the tightening screw rod, and under the action of the arc-shaped top plates, the sleeve clamps are clamped inwards, so that the pipeline is replaced, and the sleeve clamps are clamped inwards. According to the pipeline fixing device, the two pipelines are arranged in the sleeve seat, the tightening ring is matched for tightening to extrude and fix the surfaces of the pipelines, after fixing is completed, the distance between the two pipelines is adjusted by sliding the adjusting frame, and after the two pipelines are attached, the two pipelines can be rotated to a specified angle through the rotating seat and the sleeve seat connecting seat correspondingly, so that the two pipelines are aligned; and therefore, the subsequent connection and fixation work between two pipelines is facilitated.

The utility model relates to a flow control system, which comprises a gas storage module, a pressure regulation module, a pressure control module and a flow control module, and is characterized in that the pressure regulation module is used for regulating the pressure of rare gas in a pipeline flowing out of the gas storage module; and meanwhile, a flow control module is arranged after the pressure of the rare gas in the pipeline is stable, and the actual flow of the rare gas in the pipeline is adjusted in real time according to a given set value, so that the actual flow is consistent with the set flow. According to the flow control system, the flow rate of the rare gas is monitored or regulated in real time, so that the flow rate of the rare gas in the pipeline is uniform, and subsequent use of the rare gas is facilitated.

The present invention relates to collecting rare gas, and more specifically to a system for collecting waste gas containing rare gas, and a method for collecting waste gas containing rare gas, the waste gas containing rare gas being discharged from a semiconductor manufacturing facility. The present invention provides a system for collecting waste gas containing rare gas, the system comprising: one or more first buffer tanks (100) connected to one or more exhaust lines (11) for discharging waste gas containing rare gas generated as a result of performing a semiconductor process, and temporarily storing the waste gas discharged through the exhaust lines (11); one or more first compressors (210) receiving the waste gas stored in the first buffer tanks (110) so as to primarily compress same, and one or more purification units (220) receiving first compressed waste gas compressed in the first compressors (210) so as to remove therefrom one or more predetermined materials to be removed; one or more second buffer tanks (300) receiving and temporarily storing purified waste gas purified in the purification units (220); one or more second compressors (410) for secondarily compressing the purified waste gas from the second buffer tanks (300); and one or more waste gas discharge units (540) for discharging second compressed waste gas compressed by the second compressors (410) to a waste gas collection tank (510).

This invention discloses a gas purification device for neutron-activated argon isotope dating based on a D-D accelerator, belonging to the field of rare gas isotope mass spectrometry analysis and geological dating technology. Addressing the limitations of traditional gas purification systems, which suffer from large internal volumes and high static release rates, making them unsuitable for the efficient purification and enrichment of trace argon isotopes generated by the D-D accelerator neutron activation method, this invention employs an integrated 316L stainless steel substrate, internally integrating a main gas flow channel and multiple branch channels. The substrate houses a sample gas injection module, a primary purification module, a secondary purification module, a tertiary purification module, a vacuum preparation and monitoring module, a standard gas injection module, and a gas enrichment module. Each module is connected to the main gas flow channel via branch channels, achieving multi-stage purification of the mixed gas and low-temperature enrichment of trace argon isotopes. This device is used for gas purification in D-D accelerator neutron-activated argon isotope dating, meeting the requirements for efficient purification and enrichment of extremely small amounts of argon gas.

Embodiments provide a substrate processing apparatus, a substrate processing method, a gas recovery system, and a gas recovery method that can suppress an increase in the cost of rare gas and reduce the initial cost and maintenance cost of a gas recovery device, and the like. The gas recovery method of the embodiments includes an operation of setting a prescribed reference based on the flow rate of rare gas set in a process recipe, selecting a rare gas recovery step based on the prescribed reference, guiding exhaust gas from a prescribed chamber to a rare gas recovery device in the rare gas recovery step, and causing the exhaust gas to avoid the rare gas recovery device in a step other than the rare gas recovery step.

The invention provides an etching method. The etching method comprises the following steps: (a) supplying a substrate to a substrate supporting part in a chamber; (b) exposing the substrate to a first processing gas containing a hydrogen fluoride gas; and (c) after (b), supplying an electrical bias to the substrate supporting part and exposing the substrate to plasma generated by a second processing gas, the second processing gas including at least one inert gas selected from the group consisting of a rare gas and a nitrogen gas.

The invention relates to a method and a device for applying a coating. The invention also relates to a coated article (60). Articles (60, 62) are provided in a vacuum chamber (12) and a process gas is supplied. Plasma is generated in the vacuum chamber (12) by supplying power to the cathode (30) via application of a cathode voltage VP having a cathode pulse and by atomizing the target (32). A bias VB is applied to the article (60), (62) such that charge carriers of the plasma accelerate toward the article (60), (62) and attach to the surface of the article. In order to achieve advantageous properties of the coating (64) in a controlled manner, the time curve of the bias VB is varied during the application duration D. In the coating (64) of the article (60), (62), the material of the layer (64) contains a rare gas, the concentration of which in the layer (64) varies over the layer thickness.

A sputtering gas containing a rare gas is introduced into a vacuum chamber 1 of a vacuum atmosphere, an electric power with a negative potential is supplied to a target 2, a positive potential is applied to the reflector plate 4, a plasma is generated, and subsequently the supply of the sputtering gas is stopped, then the target is sputtered while a self-holding discharge under low pressure of plasma is generated. A high-frequency bias power is supplied from a high-frequency power source 61 through an impedance matching device 62 to a stage 5 on which an object to be deposited is mounted. An electron matcher having at least one variable reactor to be electronically controlled is used as an impedance matching device, and a high-frequency bias power is intermittently supplied to the stage at a predetermined frequency.

The invention relates to the technical field of neon and helium gas separation, in particular to a neon and helium rare gas separation refiner and a method thereof. Comprising a tower body and a base at the bottom of the tower body, the internal space of the tower body is divided into an upper cavity, a middle cavity and a lower cavity from top to bottom; an air outlet pipe is arranged at the upper position of the upper cavity in a communicating manner; a liquid inlet pipe is arranged at the lateral position of the upper cavity in a communicating manner; a liquid outlet pipe is arranged at the lateral position of the lower cavity in a communicating manner; a central rod is vertically arranged in the center of the tower body; a spiral plate sleeves the outer wall of the central rod and is positioned in the middle cavity; the outer edge of the spiral plate is in sealing contact with the inner wall of the tower body; the mixed liquid rolls along the upper surface of the spiral plate from top to bottom and makes contact with helium flowing from bottom to top, compared with existing mixed liquid advection and helium contact, the contact area of the mixed liquid and the helium is increased, and therefore the heat transfer effect of the helium and the mixed liquid is improved, and the neon and helium separation efficiency of the mixed liquid is improved.