64 results about "Rare gas" patented technology

The invention relates to a Kr separation method and system based on selective desorption, a terminal and a storage medium, and relates to the technical field of rare gas purification. Calculating the difference between the quotient of the historical krypton loss amount and the adsorption column mass and the initial unit krypton adsorption amount to generate the actual unit krypton adsorption amount; calculating the quotient between the product of the actual unit krypton adsorption quantity and the mass of the adsorption column and the flow velocity of the single to-be-adsorbed air so as to generate actual adsorption time; controlling the first-stage adsorption column to adsorb the to-be-adsorbed air according to the actual adsorption time so as to generate a to-be-separated adsorption column; controlling the adsorption column cleaning device to clean the adsorption column to be separated according to the actual unit krypton adsorption quantity, and collecting desorbed gas after cleaning to the waste gas storage device; and performing desorption operation on the cleaned adsorption column, controlling a gas collection device to collect desorbed gas, and heating and activating the first-stage adsorption column to recover the adsorption capacity. The application has the effect of reducing krypton loss.

The invention discloses a multi-band enhanced infrared optical comb spectrum rare gas detection system in a hollow cavity of building glass, which is characterized in that a line scanning optical frequency comb light source module and a reflective array module jointly form a virtual enhanced cavity to enhance the optical path of an emitted fan-shaped optical comb light beam so as to improve the detection precision; rapid switching of multi-band gas is achieved through an electric filter wheel according to sequential control so as to detect different gases, gas data in a hollow cavity are collected in real time by combining the high-speed collection capacity of a dual-band area array detection module, and a concentration distribution cloud chart of argon and krypton is rapidly constructed based on a data terminal processing module; the detection efficiency and accuracy of the gas in the glass hollow cavity are greatly improved, the synchronous operation of space scanning and wave band switching is realized, and multi-dimensional data of the concentration, the position and the impurity content of multiple gases can be measured and obtained at a time; a polarization filtering function and a temperature field compensation algorithm are integrated, and the detection precision under outdoor strong light and temperature difference environments is ensured.

This invention discloses a method for producing high-purity oxygen based on LNG cold energy, belonging to the technical field of gas purification equipment. The implementation steps include: S1, pre-cooling and stepped heat exchange of raw air; S2, distillation separation process using LNG cold energy; S3, oxygen purification and argon separation; S4, cold energy recycling. This invention can improve the purity of oxygen, making the molar purity of oxygen above 99.9%, and rationally utilize LNG cold energy to liquefy raw air, reducing air separation costs. In addition, by coupling a crude argon tower, argon with a molar fraction of 7.4% can be produced for the utilization of rare gases.

The invention discloses a general high-precision fixed-point static recognition detection box, an electronic nose and a control method thereof, and the electronic nose comprises the general high-precision fixed-point static recognition detection box and a filter assembly. By adopting the high-precision universal static recognition detection box, the electronic nose and the control method thereof, the type of each gas detection film sensor can be adaptively adjusted according to the type of the detected gas and the detection environment; the position of the detection space can be adjusted, so that the operation convenience is greatly improved; the detection space can be equivalent to the effect of multiple redundant tests through one test; meanwhile, when the detected gas is sucked into the detection space, the detected gas can be filtered through the corresponding filters in sequence, and interference gas and impurities are filtered out; the filter element of each stage of filter has self-checking and self-cleaning functions; the ratio of detected gas can be compressed, so that the detection requirements of some specific rarefied gas are met; the whole device is extremely compact, and the application requirements of miniaturization and modularization are met.

The disclosure relates to lithium metal protection using reactive gas combinations. A passivation process for a lithium metal anode includes subjecting a lithium metal to a passivation gas having the following composition: two or more gases selected from the group consisting of CO2, O2, H2O, N2, HC, CO, H, He, F, and SiH4; and optionally, a rare gas. The passivation gas reacts with the lithium metal to form a passivation layer on the lithium metal having a depth of less than ten microns.

The invention relates to the technical field of filling equipment, and discloses a rare gas precise filling device which comprises an adjusting box. The filling box is arranged on one side of the adjusting box; and the volume adjusting mechanism is used for flexibly adjusting the filling volume of the argon gas according to the filling quantitative requirements of the filling bottles with different volumes. By adding and arranging a gradient dehumidification mechanism, before high-pressure raw material argon is filled, the mechanism adopts dual treatment of precooling separation of a high-pressure dryer and adsorption of a tank body, firstly, liquid water and steam are efficiently removed through a spiral guide plate and a cyclone separator, and water accumulation of a pipeline is avoided; secondly, residual moisture is further adsorbed and impurities are filtered out through adsorption filling cotton and a filtering base, moisture interference in subsequent filling is reduced, finally, the residual moisture is treated through a hollow fiber membrane, the multi-stage dehumidification mode can deeply purify argon, the situation that the welding quality is affected by the moisture can be prevented, and the welding quality is improved. And meanwhile, the fault risk caused by frosting of the equipment is reduced.

The utility model discloses a CO2 coal seam CH4 gas competitive adsorption heat effect testing device, and belongs to the field of coal mines. The device comprises a CH4 gas tank, a rare gas tank, a first high-pressure buffer tank, a first reference tank, a non-contact temperature measurement coal sample tank, an infrared thermal imager, a data acquisition and storage mechanism, a second reference tank, a second high-pressure buffer tank, a CO2 gas tank, a constant-temperature water bath, a vacuumizing mechanism, first and second pressure gauges, first to twelfth valves, first and second tee joints, first to third four-way joints, first and third pressure sensors, a CO2 concentration sensor and a CH4 concentration sensor. And connecting the components. The method has no influence on the replacement effect during testing, enables the measurement result to be accurate, can obtain the gas competitive adsorption and gas reciprocal diffusion rules in the process of replacing the CH4 in the coal seam by the CO2, can deeply analyze the driving mechanism and the action efficiency of the CH4 in the coal seam by the CO2 from the perspective of energy migration, and can improve the detection accuracy. And a theoretical support is provided for realizing reasonable optimization and efficiency maximization of key control parameters.

This invention discloses a method for accurately tracing geological hydrogen migration, belonging to the field of geological hydrogen exploration and migration tracing technology. The invention involves preparing stable hydrogen isotopes and radioactive tritium tracers with specific geochemical fingerprints and injecting them into target geological units; deploying a three-dimensional monitoring network including sensor arrays and automatic samplers to collect hydrogen concentration data and gas samples in real time; laboratory analysis to determine hydrogen isotope composition and rare gas concentrations, using an N2-He-Ar ternary diagram to identify gas sources and eliminate interference; integrating data and performing numerical simulations using migration control equations coupled with isotope fractionation effects, optimizing parameters through inversion algorithms; and generating a three-dimensional visualization map of hydrogen migration paths and a quantitative report based on the inversion results. This invention achieves a breakthrough in geological hydrogen migration from qualitative detection to quantitative tracking, significantly improving the reliability and accuracy of tracing, enabling real-time dynamic capture of the migration process, and providing precise decision-making basis for hydrogen exploration.

A film forming method includes a first step of supplying a first aromatic hydrocarbon gas having a first functional group to a substrate provided with an underlayer film, and a second step of activating the first aromatic hydrocarbon gas adsorbed on a surface of the underlayer film by plasma of a first reaction gas that contains at least a rare gas.

The present invention relates to collecting rare gas, and more specifically to a system for collecting waste gas containing rare gas, and a method for collecting waste gas containing rare gas, the waste gas containing rare gas being discharged from a semiconductor manufacturing facility. The present invention provides a system for collecting waste gas containing rare gas, the system comprising: one or more first buffer tanks (100) connected to one or more exhaust lines (11) for discharging waste gas containing rare gas generated as a result of performing a semiconductor process, and temporarily storing the waste gas discharged through the exhaust lines (11); one or more first compressors (210) receiving the waste gas stored in the first buffer tanks (110) so as to primarily compress same, and one or more purification units (220) receiving first compressed waste gas compressed in the first compressors (210) so as to remove therefrom one or more predetermined materials to be removed; one or more second buffer tanks (300) receiving and temporarily storing purified waste gas purified in the purification units (220); one or more second compressors (410) for secondarily compressing the purified waste gas from the second buffer tanks (300); and one or more waste gas discharge units (540) for discharging second compressed waste gas compressed by the second compressors (410) to a waste gas collection tank (510).

This invention discloses a gas purification device for neutron-activated argon isotope dating based on a D-D accelerator, belonging to the field of rare gas isotope mass spectrometry analysis and geological dating technology. Addressing the limitations of traditional gas purification systems, which suffer from large internal volumes and high static release rates, making them unsuitable for the efficient purification and enrichment of trace argon isotopes generated by the D-D accelerator neutron activation method, this invention employs an integrated 316L stainless steel substrate, internally integrating a main gas flow channel and multiple branch channels. The substrate houses a sample gas injection module, a primary purification module, a secondary purification module, a tertiary purification module, a vacuum preparation and monitoring module, a standard gas injection module, and a gas enrichment module. Each module is connected to the main gas flow channel via branch channels, achieving multi-stage purification of the mixed gas and low-temperature enrichment of trace argon isotopes. This device is used for gas purification in D-D accelerator neutron-activated argon isotope dating, meeting the requirements for efficient purification and enrichment of extremely small amounts of argon gas.

Embodiments provide a substrate processing apparatus, a substrate processing method, a gas recovery system, and a gas recovery method that can suppress an increase in the cost of rare gas and reduce the initial cost and maintenance cost of a gas recovery device, and the like. The gas recovery method of the embodiments includes an operation of setting a prescribed reference based on the flow rate of rare gas set in a process recipe, selecting a rare gas recovery step based on the prescribed reference, guiding exhaust gas from a prescribed chamber to a rare gas recovery device in the rare gas recovery step, and causing the exhaust gas to avoid the rare gas recovery device in a step other than the rare gas recovery step.

The invention provides an etching method. The etching method comprises the following steps: (a) supplying a substrate to a substrate supporting part in a chamber; (b) exposing the substrate to a first processing gas containing a hydrogen fluoride gas; and (c) after (b), supplying an electrical bias to the substrate supporting part and exposing the substrate to plasma generated by a second processing gas, the second processing gas including at least one inert gas selected from the group consisting of a rare gas and a nitrogen gas.

The invention relates to a method and a device for applying a coating. The invention also relates to a coated article (60). Articles (60, 62) are provided in a vacuum chamber (12) and a process gas is supplied. Plasma is generated in the vacuum chamber (12) by supplying power to the cathode (30) via application of a cathode voltage VP having a cathode pulse and by atomizing the target (32). A bias VB is applied to the article (60), (62) such that charge carriers of the plasma accelerate toward the article (60), (62) and attach to the surface of the article. In order to achieve advantageous properties of the coating (64) in a controlled manner, the time curve of the bias VB is varied during the application duration D. In the coating (64) of the article (60), (62), the material of the layer (64) contains a rare gas, the concentration of which in the layer (64) varies over the layer thickness.

A sputtering gas containing a rare gas is introduced into a vacuum chamber 1 of a vacuum atmosphere, an electric power with a negative potential is supplied to a target 2, a positive potential is applied to the reflector plate 4, a plasma is generated, and subsequently the supply of the sputtering gas is stopped, then the target is sputtered while a self-holding discharge under low pressure of plasma is generated. A high-frequency bias power is supplied from a high-frequency power source 61 through an impedance matching device 62 to a stage 5 on which an object to be deposited is mounted. An electron matcher having at least one variable reactor to be electronically controlled is used as an impedance matching device, and a high-frequency bias power is intermittently supplied to the stage at a predetermined frequency.

The invention relates to a natural gas cause identification method, and belongs to the field of natural gas cause identification. The method comprises the following steps: (1) acquiring carbon isotope data and rare gas isotope data of natural gas in a target area; (2) identifying the cause source of the natural gas in the target area by using the carbon isotope data; (3) carrying out rare gas isotope clustering analysis on the typical oil-type gas and the coal-formed gas identified in the step (2), determining rare gas isotope interval characteristics of the typical oil-type gas and the coal-formed gas, and establishing 3He / 4He and 40Ar / 36Ar identification charts of the oil-type gas and the coal-formed gas; and (4) identifying the cause of the natural gas to be detected according to the identification chart. The identification method provided by the invention is higher in accuracy, and can better avoid the occurrence of multiplicity of solutions.

This invention relates to an oxidation-induced lattice softening etching method and patterning method for metal chalcogenide layers, and a method for fabricating transistor devices. The oxidation-induced lattice softening etching method of this invention includes: (A1) plasma treatment of the metal chalcogenide layer in an atmosphere containing O2 and / or O3, wherein the metal chalcogenide layer contains a metal chalcogenide compound that produces a non-volatile etching residue in any atomic layer etching method, and is composed of the formula XY. n The method is defined as follows: X is a metallic element, Y is sulfur, selenium, or tellurium, and n is 1 to 4; (A2) Plasma etching is performed on the oxidized metal chalcogenide layer in an inert rare gas atmosphere, wherein the etching power is lower than the threshold power required for plasma etching of the exposed, unoxidized substrate in the same atmosphere. The patterning method and transistor device fabrication method of the present invention are based on this etching method.

The invention discloses a full-low molecular sieve purification and adsorption air separation device, relates to the technical field of air separation devices, and realizes breakthrough in the aspects of energy efficiency, safety and product diversity by innovatively integrating pre-cooling, purification, rectification and rare gas extraction systems. The process flow scheme of a full-low-pressure molecular sieve purification and adsorption system, an air supercharging turbo expander for providing cooling capacity required by the device, air supercharging expansion, double-tower rectification, oxygen, nitrogen and argon internal compression and external compression, a full-rectification hydrogen-free argon production system and a coarse krypton and xenon extraction system is formed. The device has the advantages of reliable operation, mature technology, advanced process, convenience in operation, low energy consumption, good safety and economical and reasonable cloth machine.

The present application relates to rare gas separation and purification equipment technical field, and relates to a kind of krypton-xenon fine extraction device, including mounting plate, including raw material gas pretreatment unit, adaptive concentration system, rectification purification unit, product gas collection unit, the adaptive concentration system includes concentration tower and variable-angle elastic gas-liquid distributor, the concentration tower adopts variable-diameter tower body structure, including integrally arranged tower body upper section and tower body lower section, several layers of tray are arranged in the tower body of the concentration tower along the axial direction interval, the tray adopts sieve hole structure, a set of variable-angle elastic gas-liquid distributor is correspondingly provided above each layer of tray, the variable-angle elastic gas-liquid distributor includes stepper motor, rotatable flow guide pipe, titanium alloy elastic sieve plate and spring support assembly, effectively solve the distribution uniformity of gas-liquid two-phase in concentration tower in prior art, prone to channeling, deflection phenomenon, lead to mass transfer efficiency is low, influence krypton-xenon concentration effect problem.

The application relates to a Kr separation method and system based on selective desorption, a terminal and a storage medium, and relates to the technical field of rare gas purification, which comprises the following steps: collecting a historical krypton loss amount; calculating the difference between the quotient of the historical krypton loss amount and the mass of an adsorption column and the initial unit krypton adsorption amount, so as to generate an actual unit krypton adsorption amount; calculating the quotient between the product of the actual unit krypton adsorption amount and the mass of the adsorption column and the single-time air flow speed to be adsorbed, so as to generate an actual adsorption time; controlling a primary adsorption column to adsorb air to be adsorbed according to the actual adsorption time, so as to generate an adsorption column to be separated; controlling an adsorption column cleaning device to clean the adsorption column to be separated according to the actual unit krypton adsorption amount, and collecting the desorbed gas after cleaning to a waste gas storage device; performing a desorption operation on the cleaned adsorption column, controlling a gas collecting device to collect the desorbed gas, and heating and activating the primary adsorption column to recover the adsorption capacity. The application has the effect of reducing krypton loss.

The present application belongs to the technical field of rare gas sample content and isotope composition determination in soil, and particularly relates to a device for rare gas sample collection and release in soil. The present application comprises a collection device and a release device. The collection device comprises a hydraulic clamp head frame, a first fixed rod, a metal clamp head, a first cylindrical clamp head, a second cylindrical clamp head, a first power rod, and a hydraulic receiving rod. The release device comprises an upper flange of an observation window, an observation window, a jackscrew, a lower flange of the observation window, an upper cover of a gas release device, a copper pipe fixing clamp, a movable handle, a connecting rod, a second power rod, a lower cover of the gas release device, a first copper pipe extrusion pad, a first vacuum pipe, a second copper pipe extrusion pad, a second vacuum pipe, and a second fixed rod. The present application can solve the problems of complex copper pipe sealing operation and difficulty in field application, and can realize the connection with a gas purification system for use after the sealing of the copper pipe, thereby improving the test precision and test efficiency.

The invention discloses an electric propulsion vacuum system, and relates to a vacuum system. The invention aims to solve the problem that the test and use cost is increased due to the fact that an existing electric propulsion system cannot recover rare gas. The device comprises a vacuum chamber, an outlet of the vacuum chamber is connected with an inlet of a vacuum pump, an outlet of the vacuum pump is connected with an inlet of a gas storage tank through a pipeline, an outlet of the gas storage tank is connected with an inlet of a membrane pressure pump through a pipeline, and an outlet of the membrane pressure pump is connected with an inlet of a gas cylinder through a pipeline; the vacuum pump is used for pumping out gas in the vacuum chamber; the gas storage tank is used for storing gas pumped from the vacuum chamber by the vacuum pump; the membrane pressure pump is used for compressing gas in the gas storage tank; the gas cylinder is used for storing gas compressed by the film pressure pump. The invention belongs to the technical field of aerospace.

The invention relates to the field of laser welding, and discloses a valve plate and valve block automatic laser welding machine which comprises a box body, a support and a second telescopic rod are installed in the box body, and a welding module is installed at the telescopic end of the second telescopic rod; a plurality of sets of supporting cylinders are fixedly installed in an inner cavity of the support, the left side and the right side of each supporting cylinder are fixedly connected with an air inlet pipe and a draught fan respectively, the top end of each air inlet pipe is fixedly connected with an air inlet groove, a collecting box is installed at the air outlet end of each draught fan, and the two ends of each supporting cylinder are each sleeved with a fixing column in a sealed mode. According to the device, the inner cavity of the support is inflated through the draught fan, the negative pressure area is arranged on one side of the workpiece through the air inlet pipe and the air inlet groove and used for absorbing rare gas, smoke and heat generated by welding enter the support, and when a smoke mixture enters the inner cavity of the support, the heat can directly act on the bottom of the workpiece; therefore, continuous and uniform preheating is provided for the whole workpiece, and deformation caused by uneven heating during welding of the workpiece is reduced.

The present application includes (a) a step of carrying a substrate having a film formed on a surface into a processing vessel; (b) a step of generating reaction species containing oxygen and reaction species of a rare gas by plasma-izing a mixed gas containing a rare gas and an oxygen-containing gas; and (c) a step of supplying the reaction species containing oxygen to the substrate together with the reaction species of the rare gas to oxidize the film, wherein in (b), the partial pressure P N of the rare gas in the processing vessel is set to 0.4 or less with respect to the total pressure P T of the mixed gas. The ratio P N of the rare gas is set to 0.4 or less with respect to the total pressure P T of the mixed gas.

The invention provides a plasma processing method capable of constructing a self-limited process excellent in mass productivity in a cycle etching method in which an adsorption step of forming a reaction layer on a surface of an etching target wafer and a desorption step of removing the formed reaction layer using a rare gas in a metastable state are repeated. The plasma processing method includes: an adsorption step of forming a reaction layer on an etching target film by plasma generated using a reactive gas; and a desorption step of removing the reaction layer using the rare gas in the metastable state generated by the plasma. The adsorption step and the desorption step are repeated, and a pressure of the adsorption step is higher than a pressure of the desorption step.

The invention relates to the technical field of rare gas separation and purification equipment, in particular to a krypton-xenon fine extraction device which comprises a mounting plate, a raw material gas pretreatment unit, a self-adaptive concentration system, a rectification and purification unit and a product gas collection unit, and the self-adaptive concentration system comprises a concentration tower and a variable-angle elastic gas-liquid distributor. The concentration tower adopts a variable-diameter tower body structure and comprises a tower body upper section and a tower body lower section which are integrally arranged, a plurality of layers of tower plates are arranged in the tower body of the concentration tower at intervals along the axial direction, each tower plate adopts a sieve pore structure, a set of variable-angle elastic gas-liquid distributor is correspondingly arranged above each layer of tower plate, and a plurality of gas-liquid distributors are arranged in the tower body. The variable-angle elastic gas-liquid distributor comprises a stepping motor, a rotatable flow guide pipe, a titanium alloy elastic sieve plate and a spring supporting assembly, and effectively solves the problems of low mass transfer efficiency and influence on krypton and xenon concentration effect caused by poor distribution uniformity of gas and liquid phases in a concentration tower and easy channeling and bias flow phenomena in the prior art.

The application discloses a kind of magnetohydrodynamic power generation device, it relates to nuclear reactor technical field, including protective shell, inside along axial through power generation passage, outside is equipped with current coil, current coil is used to provide magnetic field;Pump, communicate with power generation passage by pipeline, pipeline is filled with Ar gas, pump is used to pressurize Ar gas;Core, it is arranged in power generation passage inside along axial, core is formed by multiple fuel plates with the shape of Chinese character well, the fuel in fuel plate generates multiple fission fragments after nuclear fission;Fuel plate thickness is less than the range of fission fragment;Reflective layer, cover in the outer wall of core, including two symmetrically arranged half-ring metal electrodes.The application utilizes the fission fragment generated by nuclear reactor to bombard rare gas and ionize the gas, and the ionized gas generates electricity through the magnetohydrodynamic generator, which ensures high thermoelectric conversion efficiency while avoiding the harsh working conditions and large safety hazards of existing methods.

A sintered body containing polycrystalline grains of a metal oxynitride containing at least two metal elements, wherein Ba and at least one metal element of a crystal phase of the sintered body are contained in a triple point that is not a void between the polycrystalline grains. A method for producing the sintered body includes sintering a mixture of at least a metal oxynitride as a main component and a sintering aid containing cyanamide in an atmosphere containing nitrogen or a rare gas or in a reduced-pressure atmosphere of 10 Pa or less while applying a mechanical pressure with a retention time at a maximum heating temperature during the sintering set to 1 minute to 10 minutes.

The method for manufacturing a transparent conductive film of the present invention includes: a preparation step of preparing a transparent substrate (10); and a film formation step of forming an amorphous light-transmissive conductive layer (20) by sputtering a light-transmissive conductive material on the transparent substrate (10). In the sputtering method of the film formation step, a sputtering gas containing a rare gas having an atomic number larger than that of argon is used, and the light-transmissive conductive material is formed under a condition that a film formation gas pressure is 0.04 Pa or more and 0.9 Pa or less.

To provide a transparent conductive layer and a transparent conductive film excellent in etching property.SOLUTION: The transparent conductive layer contains a rare gas having an atomic number larger than that of argon. A full width at half maximum of a peak in a (440) plane when the transparent conductive layer is subjected to X-ray diffraction is 0.27 degrees or less.SELECTED DRAWING: Figure 1