80 results about "Glow discharge" patented technology

The invention provides a spark discharge device and a spark discharge accurate control method, and relates to the technical field of spark discharge. The device comprises a pair of spark electrodes, a rotary switch, a capacitor and a power supply, wherein a gap exists between working ends of the spark electrodes; the spark electrode, the rotary switch and the capacitor are connected in series to form a discharging loop, and the capacitor and the power supply are connected in series to form a charging loop; the rotary switch comprises a rotatable rotor and a toothed bar connected with the rotor; a contact is arranged in the discharge loop, and when the contact is in contact with the toothed bar, the discharge loop is conducted. According to the invention, the discharge loop is rapidly switched on and switched off through the rotary switch, various parameters of spark discharge can be accurately and stably controlled, so that the spark discharge is not influenced by the environment, such as spark breakdown voltage, discharge frequency and the like, and the spark discharge can be prevented from being converted into corona, glow or arc discharge, for example, the spark discharge can be normally generated under low air pressure.

Provided is a steel sheet comprising a base steel sheet and a chemical conversion coating disposed on the surface of the base steel sheet. The steel sheet is characterized in that: the base steel sheet has a chemical composition containing, in mass%, 0.10-1.00% of Cr; and the S-maximum emission intensity and the Cr-maximum emission intensity of the chemical conversion coating as measured by a high-frequency glow discharge emission spectrometer (GDS) satisfy the relations of 1.1≤S-maximum emission intensity / S-emission intensity of base steel sheet≤20.0, and 1.1≤Cr-maximum emission intensity / Cr-emission intensity of base steel sheet≤5.0. Also provided is a component including the steel sheet.

The invention discloses a preparation method of a low-temperature plasma plating and permeating modified layer on the surface of a metal mold. The preparation method comprises the following steps: S1, precise pretreatment of a base body: sequentially carrying out mechanical grinding and polishing and ultrasonic cleaning on the base body, and then drying and putting the base body in a vacuum chamber; s2, plasma activation: after vacuumizing, introducing mixed gas of argon and hydrogen, generating glow discharge under the action of a pulse power supply, and performing sputtering activation on the surface of the substrate; s3, gradient transition layer plasma deposition is conducted, specifically, a pulse direct-current plasma source is adopted, a Ti target and a Cr target serve as sputtering sources, and a transition layer with components changing in a gradient mode is prepared; s4, plating and permeating a multi-element synergistic functional layer: preparing the functional layer by adopting a radio frequency-pulse direct-current composite plasma source, namely a Ti target, a Cr target, a Si-Al alloy target and a rare earth element target through synergistic sputtering; and S5, post-treatment optimization: performing vacuum cooling to room temperature after low-temperature annealing treatment to obtain a final modified layer. The permeation modified layer prepared by the method has high binding force, high hardness, high wear resistance and salt spray corrosion resistance.

The invention discloses a method suitable for on-site analysis of the valence state of thallium in water. The method comprises the following operation steps: step 1, collecting and separating a water sample; step 2, acidizing treatment; 3, Tl (I) and Tl (III) are separated; 4, total thallium is measured; step 5, Tl (I) determination; the invention relates to the technical field of atomic spectrum metal element analysis, and the method has the beneficial effects that by combining an electrochemical separation technology with a Chelex-100 solid-phase extraction column and cooperating with a portable liquid cathode glow discharge thallium measurement instrument, high-sensitivity field detection of Tl (I) and Tl (III) is realized, the detection limit is lower than 1.0 g / L, and the repeatability is RSDlt; the analysis period of a single sample is less than or equal to 30 minutes, the weight of equipment is only 5kg, battery power supply is supported, and acidification-separation-detection integrated operation can be completed outdoors without professional laboratory conditions.

The utility model discloses a plasma variable capacitance type boosting device, and relates to the technical field of electrical elements. The utility model aims to solve the problems that the conventional coil mutual inductance type boosting structure needs a large amount of copper materials, a high-quality mutual inductance magnetic core and a relatively complicated driving circuit, and meanwhile, a large amount of electromagnetic radiation exists and the conversion efficiency is low. The capacitor comprises a first conductive electrode, a second conductive electrode, a first dielectric medium, a second dielectric medium and gas, the capacitor formed by connecting the first dielectric medium, the gas and the second dielectric medium in series is integrally formed, and the first conductive electrode and the second conductive electrode are two electrodes of the capacitor. According to the utility model, the series capacitance value can reach a uF level or higher during gas glow discharge, the series capacitance value is smaller than the capacitance value of gas in a gas insulation state, the large-proportion change of the capacitance value is realized, the large-amplitude boosting effect is further realized, and the high-voltage boosting capacitor has the advantages of copper material saving, light weight, simple structure, low cost, energy conservation and environmental protection.

The utility model provides a preparation device of an ultrathin sheet sample for a glow discharge mass spectrometer. The preparation device comprises an external dustproof box and an internal sample preparation system, the dustproof box comprises an air port, an air outlet with a silencer, a dustproof box side door, a side door lock catch, an internal sample preparation system and a tool table; in the internal sample preparation system, fixed seats and a lower fixed mold are respectively arranged on two sides and the center of a bottom plate, and the upper ends of the fixed seats on two sides are connected with a guide rail; the two sliding plates drive the upper die to move downwards, so that the sample and the indium sheet are compressed; the center of the lower end of the upper die moving sliding plate is sequentially connected with an upper die pressing spring, an upper die and a pressing head. Tension springs, pressing claws and pressing wheels are sequentially arranged on the two sides of the center of the lower end of the upper die moving sliding plate. The lower ends of the air inlet pipes are connected with a manual control valve to drive the two sliding plates to move. The device has the advantages that the ultrathin sheet sample for the glow discharge mass spectrometer can be prepared, and the device is simple to operate and not easy to pollute. The sample center can be accurately positioned, and subsequent accurate testing is facilitated.

Provided is a plated steel sheet comprising a base steel sheet and a plating layer formed on a surface of the base steel sheet, wherein the plating layer has a predetermined chemical composition, and when measuring the plating layer by glow discharge spectroscopy (GDS), a ratio of “Al concentration at center of plating layer” / “Al concentration at position of plating layer where Fe concentration is 50% of base steel sheet” is 0.10 to 1.50.

The invention discloses a high-temperature in-situ diffuse reflection infrared device applied to low-temperature plasma, and relates to the technical field of in-situ diffuse reflection infrared measurement. The ceramic cover plate is detachably arranged at the opening of the stainless steel tank body, and a sealed high-temperature accommodating cavity is formed when the ceramic cover plate covers the opening of the stainless steel tank body; the ceramic fixing flange penetrates through a bottom plate of the stainless steel tank body and is in sealed connection with the stainless steel tank body, the top of the ceramic fixing flange is located at the position, close to the center, of the high-temperature containing cavity, and a material containing space with the diameter larger than that of a through hole in the ceramic fixing flange is formed in the top of the ceramic fixing flange; the high-voltage electrode is arranged in the ceramic fixing flange in a penetrating mode, the top of the high-voltage electrode extends into the material containing space, and the top end of the high-voltage electrode is lower than the top of the ceramic fixing flange. The beneficial effects are that the central high-voltage electrode and the annular electrode are cooperatively designed, the central high-voltage electrode is used as a discharge electrode, and the glow-like discharge phenomenon is generated between the central high-voltage electrode and the annular electrode, so that a uniform discharge area is formed.

A detachable cover plate is arranged at the top of a reaction cavity, and a vacuum air exhaust assembly is arranged at the bottom of the inner side of the reaction cavity; the two groups of cathode gas uniformizing assemblies are symmetrically arranged on the two sides of the bottom of the cover plate, and the electrode input ends of the cathode gas uniformizing assemblies penetrate through the cover plate to be connected to a radio frequency power supply outside the reaction cavity; the anode carrier is in insulation lap joint with the two sets of cathode gas uniformizing assemblies, and the anode carrier is located between the two sets of cathode gas uniformizing assemblies to form a glow discharge area. A battery piece to be coated is stacked in the anode carrier, and the cutting edges on the two sides of the battery piece face the two sets of cathode gas uniformizing assemblies respectively and are located in the glow discharge area; the gas conveying assembly penetrates through the cover plate and is connected with the cathode gas uniformizing assembly so that process gas can be conveyed into the reaction cavity. The device has the characteristics of compact structure, convenience in operation, high reliability and the like, and the production efficiency of battery pieces is remarkably improved.

The application discloses a low-temperature ion nitriding method and application. The low-temperature ion nitriding method comprises the following steps: under a selected temperature condition, ion etching treatment is performed on the surface of a workpiece by adopting an arc-enhanced glow discharge process, and then plasma nitriding treatment is performed on the workpiece by adopting an arc-enhanced plasma process to obtain a nitriding workpiece; wherein, a positive and negative alternating voltage is applied to the workpiece in the arc-enhanced plasma process. The low-temperature ion nitriding method provided by the application can realize nitriding at a lower temperature, effectively improves the deformation degree of the workpiece, and is widely applicable to surface strengthening of cutters, molds and metal parts.

The invention provides semiconductor process equipment and an etching end point monitoring method, relates to the technical field of semiconductor processing, and aims to solve the problem that an etching end point without glow discharge is difficult to monitor. The semiconductor process equipment comprises a process cavity, a laser emission device and a laser detection device, the process cavity is provided with a first side cavity wall and a second side cavity wall which are opposite, the first side cavity wall is provided with a first observation window, the second side cavity wall is provided with a second observation window, and the first observation window and the second observation window are correspondingly arranged; the laser emitting device is arranged outside the first observation window and comprises a first laser emitter and a second laser emitter, the emitting direction of the first laser emitter is horizontal, and the direction of the second laser emitter faces the wafer; the laser detection device is arranged outside the second observation window and comprises a first detector and a second detector, the first detector is used for receiving laser emitted by the first laser emitter, and the second detector is used for receiving laser emitted by the second laser emitter and reflected by the wafer. The method can effectively monitor the etching end point without glow discharge.

Cathode based on glow discharge and hollow cathode effect belongs to the technical field of space electric propulsion electron source, and aims to solve the problems of high failure risk of heater and difficulty in working in oxygen environment of traditional hollow cathode.The cathode comprises a gas supply pipe, a negative electrode, a contact electrode and an extraction electrode; the contact electrode is sleeved outside the discharge chamber from the top end of the negative electrode, and the extraction electrode is sleeved outside the contact electrode from the top end; the bottom plate of the negative electrode is provided with an air inlet hole in the center and is communicated with the gas supply pipe; the top cover of the contact electrode is provided with a throttle hole in the center for maintaining the air pressure of the discharge chamber; the top cover of the extraction electrode is provided with an extraction hole; a discharge power source is loaded between the negative electrode and the contact electrode, which is used for carrying out glow discharge on the gas working medium entering the discharge chamber to generate plasma; the glow plasma generates hollow cathode effect in the cylindrical negative electrode; an extraction power source is loaded between the contact electrode and the extraction electrode, which is used for making electrons pass through the throttle hole and the extraction hole in sequence and spray to form electron emission.

This invention relates to a hydride generation gaseous sample introduction method and apparatus for heavy metal element determination in conjunction with a liquid cathode glow discharge-atomic emission spectrometer, belonging to the field of atomic spectroscopy metal element analysis technology. This invention uses chemically generated carbon dioxide gas as a carrier gas, which is then used as the atmosphere gas in the liquid cathode glow discharge to ionize and generate micro-plasma. The chemical hydride generation method converts the applicable analyte element into a hydride, which is then carried into the micro-plasma by the carbon dioxide carrier gas, atomized, and excited to generate an emission spectrum.

A grain oriented electrical steel sheet includes: by mass %, 0.010% or less of C; 2.50 to 4.00% of Si; 0.0010 to 0.0100% of acid soluble Al; 0.012% or less of N; 1.00% or less of Mn; 0.02% or less of S; and a balance comprising Fe and impurities, and has a tension-insulation coating at steel sheet surface and a SiO2 intermediate oxide film layer with an average thickness of 1.0 nm to 1.0 μm at an interface between the tension-insulation coating and the steel sheet surface. In the grain oriented electrical steel, a time differential curve fM(t) of a glow discharge optical emission spectrum of a metallic element M (Al) in the SiO2 intermediate oxide film layer satisfies a predetermined condition.

This invention provides a low-dusting, multi-functional material that suppresses dust generation associated with sliding and other processes, and an efficient method for manufacturing the same. [Solution] The invention comprises a substrate and an acrylic resin coating layer formed on the surface of the substrate, wherein when the acrylic resin coating layer is measured in the thickness direction by glow discharge emission spectrometry, there exists a depth where the silicon concentration (at%) / carbon concentration (at%) is 0.002 or more and 0.1 or less, and when SEM-EDS analysis is performed with an acceleration voltage of 5.0kV in a cross section parallel to the thickness direction of the acrylic resin coating layer, the number density of silicon-containing particles is 10 particles / 100μm 2 The following is a low-dusting, multi-functional material characterized in that silicon-containing particles are regions within the white dots identifiable by SEM observation where the silicon concentration in the EDS analysis results is 2.5 at% or more higher compared to the peripheral areas that do not include the white dots within the probe diameter.

A system for determining the concentration of radicals in a particle stream delivered into a semiconductor processing chamber comprises a plasma generator, a spectrometer optically coupled to the glow discharge region of the plasma generator, and a controller communicatively coupled to the spectrometer. The plasma source is operable to generate a glow discharge to excite radicals and diluent gases in the accepted effluent stream. The spectrometer is operable to output measurement data representing the intensity of light emitted by the excited radicals and diluent gases. The controller is operable to calculate the concentration of radicals in the effluent stream based on the measurement data.

To provide a galvannealed steel sheet excellent not only in plating appearance but also in resistance to resistance welding cracking.SOLUTION: An alloyed hot-dip galvanized steel sheet according to the present invention includes a cold-rolled steel sheet having a composition containing 0.1 mass% or more and 3.0 mass% or less of Si and 0.05 mass% or more and 0.8 mass% or less of C, and an alloyed hot-dip galvanized layer formed on one side or both sides of the cold-rolled steel sheet, wherein an emission intensity profile of a wavelength indicating Si measured in a depth direction from a surface of the alloyed hot-dip galvanized layer by a glow discharge optical emission spectrometry does not satisfy a predetermined relationship, and a surface layer portion of the cold-rolled steel sheet has a predetermined decarburized layer.SELECTED DRAWING: Figure 1

The utility model discloses a kind of ultra-thin sample auxiliary clamping devices for glow discharge mass spectrometer, belong to the technical field of glow discharge mass spectrometer test, the device includes block main body, the bottom of the block main body is flat bottom surface, for being contacted with ultra-thin sample surface, the top surface of the block main body is equipped with recess, for accommodating and positioning the original set of pressure tool pressure head of glow discharge mass spectrometer, the block main body is arranged between ultra-thin sample and pressure tool pressure head, pass through flat bottom surface even transmission pressure, and pass through recess and pressure tool pressure head cooperation to realize stable clamping. The utility model solves the stress deformation in the test of ultra-thin sample, clamping is not stable, breakdown pollution and pressure tool pressure head damage problem, improves detection precision, prolongs the life of equipment.

A method for preparing a coating on the inner wall of a tube includes a magnetically enhanced electrode with a uniformly distributed magnetic field generating mechanism inside. The magnetically enhanced electrode is installed inside a tubular workpiece and is coaxial with the workpiece. The coating deposition methods are as follows: 1. Gas or vaporous deposition particles are introduced into a vacuum chamber through a particle feeding pipe. A negative voltage is applied to the tubular workpiece through an external power supply, generating a glow discharge between the workpiece and the magnetically enhanced electrode. The gas or vaporous deposition particles are ionized and move towards the cathode of the tubular workpiece under the influence of the electric field, thus achieving coating deposition. 2. Gas is introduced into the vacuum chamber through a particle feeding pipe. A positive voltage is applied to the tubular workpiece through an external power supply, generating a glow discharge between the workpiece and the magnetically enhanced electrode. The deposition particles can be either the supply gas or particles sputtered from the surface of the magnetically enhanced electrode. The particles move towards the cathode of the tubular workpiece, thus achieving coating deposition. This method improves the ionization rate, deposition efficiency, uniformity, and quality.

Disclosed is a surface-treated steel sheet containing Ti and Al, and having improved post-paint corrosion resistance. The surface-treated steel sheet of this disclosure comprises a base steel sheet and a chemical conversion coating disposed on the surface of the base steel sheet. The chemical composition of the base steel sheet is, by mass%, Ti: 0.050 to 1.000% and Al: 0.050 to 2.000%. When elemental analysis of the surface-treated steel sheet of this disclosure is performed from the surface in the thickness direction by glow discharge emission spectrometry, the following relationships are satisfied: 1.1 ≤ I1 / I2 ≤ 20.0 and 1.1 ≤ I3 / I4 ≤ 5.0 (I1: maximum emission intensity for N in the chemical conversion coating, I2: average emission intensity for N in the base steel sheet, I3: maximum emission intensity for Ti in the chemical conversion coating, I4: average emission intensity for Ti in the base steel sheet).

The embodiment of the present application provides an electrode cleaning method, device, electronic equipment and readable storage medium, the glow discharge removes peculiar smell device includes the deodorization module, dust cleaning module, dust detection module and guide rail, the deodorization module includes the electrode, the dust cleaning module and the dust detection module are installed on the guide rail, the electrode is installed in the middle of the guide rail, one end of the electrode is provided with a guide shaft, the method comprises the following steps: detecting whether dust exists on the electrode; when it is detected that dust exists on the electrode, the electrode is controlled to rotate through the guide shaft, and the dust detection module is controlled to move by moving the guide rail, so as to detect the dust position of the dust existing in the electrode through the dust detection module; the dust cleaning module is controlled to be aligned with the dust position of the electrode, so as to clean the dust on the dust position of the electrode. The embodiment of the present application can guarantee the peculiar smell removal effect of the electrode.

The present invention provides: a surface-treated titanium material which is used for adhesive bonding and with which it is possible to further improve bondability; and a bonded body which includes the surface-treated titanium material. Provided is a surface-treated titanium material in which a silane film is provided on at least a part of the surface of a titanium base material, wherein when element distribution is measured by glow discharge optical emission spectrometry with respect to a region R1 on the outermost surface and a region R2 at a depth of 10 nm from the region R1 in a region in which the silane film is provided, the atomic concentration of silicon in the region R1 is 3.0 atom% to 30.0 atom% inclusive. The decrease rate M of the silicon concentration is 50% or more as calculated by formula (1) on the basis of the atomic concentration A1 of silicon in the region R1 and the atomic concentration A2 of silicon in the region R2. (1): M = ((A1 – A2) / A1) × (100)

This application provides a coating system and method for the inner wall surface of a nuclear fusion reactor, and a boronizing reaction system for a fusion device. The coating system includes an inlet assembly, a solid heating assembly, a solid container, and a discharge electrode. The solid container contains solid boron trioxide, and the discharge electrode is located on the inner wall of the reaction chamber of the nuclear fusion reactor. The solid heating assembly is used to heat the solid container. The inlet assembly is used to introduce hydrogen gas into the reaction chamber. The discharge electrode is used to generate positive ions containing boron compounds through glow discharge in the reaction chamber. The positive ions are accelerated in the sheath electric field at the interface between the plasma and the chamber wall, bombarding the inner wall of the reaction chamber to deposit and form a boron film. Boron trioxide, which is low-risk, low-toxicity, and low-cost, is used as a raw material to complete the boronizing coating, enabling the long-term, efficient, low-cost, and safe operation of the nuclear fusion reactor.

This invention relates to a high-hardness, strong-adhesion gradient composite coating and its preparation method. The method involves polishing a 316 stainless steel substrate before deposition, followed by ultrasonic cleaning with alcohol, glow discharge cleaning, and low-bias plasma etching to deposit an AlCr alloy transition layer, and finally depositing a ternary nitride coating (Al). 0.3 Cr 0.15 N 0.55 The obtained coating adheres to the surface of a 316 stainless steel substrate and consists of the following three layers from the surface of the 316 stainless steel substrate outwards: the first transition layer Al 0.7 Cr 0.3 Second transition layer Al 0.5 Cr 0.5 and ternary nitride coating Al 0.3 Cr 0.15 N 0.55 Compared with existing technologies, this invention constructs a 316 stainless steel-based Al material with high hardness, strong bonding strength, and a continuous gradient of thermal expansion coefficients. 0.7 Cr 0.3 / Al 0.5 Cr 0.5 / Al 0.3 Cr 0.15 N 0.55 Composite coating. This invention achieves a good combination of high hardness and strong adhesion by reducing interfacial thermal stress, aiming to significantly enhance the service reliability of structural materials in the harsh LBE corrosion environment of lead-based reactors.

The invention relates to the technical field of metal material surface treatment, and discloses a metal part surface ion nitriding method which comprises the following steps: acquiring three-dimensional computer-aided design boundary data of a to-be-treated metal part and discretizing to generate a three-dimensional grid, traversing the three-dimensional grid to extract local geometric parameters representing surface heat accumulation characteristics, according to the method, local geometric parameters are converted into a pulse control parameter sequence changing along with processing duration, the pulse control parameter sequence is used for driving a high-frequency bipolar pulse power supply to generate glow discharge, and the surface geometric evolution rule is adapted by adjusting plasma sheath impedance. The corresponding form gradient distribution of metal surface active nitrogen atom flux is balanced, energy accumulation and glow overload of complex characteristic parts are effectively inhibited, the uniformity of a diffusion layer is improved, and the service reliability of a heavy precision component is enhanced.

The invention discloses a glow discharge treatment device for degrading clothianidin in water and a treatment method thereof. According to the device, a beaker added with a rotor is arranged above a magnetic stirrer, a tungsten steel rod is suspended above the beaker through an iron support, the tungsten steel rod is connected with a high-voltage glass glaze resistor through a wire, and the high-voltage glass glaze resistor is connected with a high-voltage direct-current power supply through a wire. The treatment method comprises the following steps: putting a clothianidin solution to be treated into a beaker, adding a rotor, adjusting the rotating speed of a magnetic stirrer, adjusting the distance between the vertex of the tip of a tungsten steel bar electrode and the upper surface of wastewater, adjusting the voltage and current of a high-voltage direct-current power supply, and breaking down air by high-voltage direct current to irradiate active ions to the water surface for degradation treatment. According to the device, direct-current-driven low-temperature plasma glow discharge is optimized, the positive electrode and the negative electrode are suspended above the liquid level, clothianidin in water is effectively degraded, the degradation rate can reach 99%, anode loss is avoided, and the device is simple in structure, easy and convenient to operate, low in manufacturing and operating cost, smaller in energy consumption and better in treatment effect.

A cold-rolled steel sheet according to an embodiment of the present invention has a room-temperature tensile strength of 980 MPa or more, with the core portion thereof including 3 to 15% by area fraction of an austenite phase and other residual structures, and satisfies the following carbon concentration flattening index of equation (1) at a depth of 50 μm or more in a thickness direction from the outermost surface of the cold-rolled steel sheet, as analyzed by glow discharge spectrometry (GDS), and the following equation (1a-1) of 0.75 or less, the following equation (2a-1) of 0.80 or less, and the following equation (3a-1) of 0.85 or less. Equation (1): equation (1a-1): equation (2a-1): equation (3a-1): (wherein the core portion refers to a position at 1 / 4t in the thickness direction from the outermost surface of the cold-rolled steel sheet, Cx,GDS represents the carbon concentration at a depth x in the thickness direction, and d is a natural number of 40 to 100).

Provided are: a surface-treated aluminum material that is suitably used for adhesive bonding and can further improve adhesion durability with respect to other members or the like; and a joined body containing the surface-treated aluminum material. The surface-treated aluminum material has a silane film provided on at least a portion of the surface of an aluminum base material, wherein, when an element distribution is measured by glow discharge emission spectroscopy with respect to a region R1 on the outermost surface and a region R2 at a depth of 10 nm from the region R1 in the region where the silane film is provided, the atomic concentration of silicon in the region R1 is 3.0-30.0 at%. In addition, a reduction rate M of the silicon concentration is 45% or greater, as calculated by equation (1) on the basis of an atomic concentration A1 of silicon in the region R1 and an atomic concentration A2 of silicon in the region R2. (1): M=((A1-A2) / A1)×(100)