212 results about "Glow discharge" patented technology

The present invention provides: a steel sheet which contains Ni, Cu and Sn, and has excellent chemical conversion treatability; and a component which includes said steel sheet.　A steel sheet and a component including the same according to the present invention are characterized by having a chemical composition containing, in mass %, 0.010-1.000% of Ni, 0.010-1.000% of Cu, and 0.003-1.000% of Sn, and by the emission intensities of Ni, Cu, and Sn in the surface layer of the steel sheet as measured by high-frequency glow discharge optical emission spectrometry satisfying the following relationships.　Ni: Surface layer maximum intensity / Bulk intensity ≤ 1.5 Cu: Surface layer maximum intensity / Bulk intensity ≤ 1.3 Sn: Surface layer maximum intensity / Bulk intensity ≤ 15

The invention discloses a high-power corona preionization excimer laser, which is characterized in that a laser discharge cavity is arranged in a shell, a main discharge electrode is arranged in the laser discharge cavity, and the main discharge electrode comprises a main discharge cathode and a main discharge anode; corona rods capable of conducting discharge preionization on working gas are arranged in the laser discharge cavity and located on one side of the main discharge cathode at intervals, each corona rod comprises a preionization electrode and a ceramic insulator, gaps are formed between the peripheral face of each ceramic insulator and the outer side wall of the main discharge cathode and the inner side wall of the insulation cavity, and the preionization electrodes and the main discharge anode are grounded. The main discharge cathode is connected with a negative high-voltage pulse, and when the excimer laser works, the driving voltage pulse of the corona rod is the same as the driving voltage pulse of the main discharge electrode. Corona discharge preionization is carried out through the corona rod, the main discharge electrode cannot be corroded, discharge dust cannot be generated, and it is ensured that the main discharge electrode carries out uniform glow discharge to generate high-quality laser.

The invention relates to a deicing method, system and device based on gas-liquid discharge mode conversion and intelligent regulation, and the method comprises the steps: monitoring and predicting an icing state, and adjusting the output of a multi-gear adjustable power supply according to a prediction result, so as to generate weak spark discharge; when the icing condition is met, the needed energy is calculated according to the monitoring data to adjust the output of the multi-gear adjustable power supply so as to generate dielectric barrier glow discharge, and the discharge parameter is dynamically adjusted to maximize the strong heat input effect; the forming time and position of a gas-liquid mixture cavity under the condition of dielectric barrier glow discharge are predicted in real time by introducing a thermodynamic principle and an ice layer melting model, and after the cavity is detected to be formed, the optimal opportunity and energy of strong arc discharge are determined according to cavity parameters; therefore, the output of the multi-gear adjustable power supply is adjusted to generate strong arc discharge, and the cavity of the gas-liquid mixture is induced to expand and break, so that the ice layer falls off. The invention provides a more efficient, environment-friendly and reliable deicing solution.

The present invention discloses a non-thermal plasma treatment of metal powders in order to improve their processability by additive manufacturing (AM). The invention consists in bonding primary particles constituted of metals or metal alloys to a plurality of secondary particles constituted of metals, metal alloys, ceramics or polymers by the mean of a non-thermal plasma treatment. The primary particles have a larger mean diameter than the secondary. Both particles are injected through a non-thermal plasma glow discharge and / or in its afterglow region (region downstream the plasma discharge) where their surfaces are cleaned by removing contaminants and / or oxide layer and activated to react between each other. The functionalized metal powders are then collected and afterwards processed by AM leading to high quality parts. The functionalized metal powders produced by this plasma treatment improve the processability of metal by AM.

The invention provides a spark discharge device and a spark discharge accurate control method, and relates to the technical field of spark discharge. The device comprises a pair of spark electrodes, a rotary switch, a capacitor and a power supply, wherein a gap exists between working ends of the spark electrodes; the spark electrode, the rotary switch and the capacitor are connected in series to form a discharging loop, and the capacitor and the power supply are connected in series to form a charging loop; the rotary switch comprises a rotatable rotor and a toothed bar connected with the rotor; a contact is arranged in the discharge loop, and when the contact is in contact with the toothed bar, the discharge loop is conducted. According to the invention, the discharge loop is rapidly switched on and switched off through the rotary switch, various parameters of spark discharge can be accurately and stably controlled, so that the spark discharge is not influenced by the environment, such as spark breakdown voltage, discharge frequency and the like, and the spark discharge can be prevented from being converted into corona, glow or arc discharge, for example, the spark discharge can be normally generated under low air pressure.

The invention discloses a method for depositing a TiAlSiN nano composite hard film through high-power pulse magnetron sputtering. An advanced combination technology of an arc enhanced glow discharge technology and a high-power pulse magnetron sputtering technology is adopted, and the TiAlSiN thin film which is well combined with a base body and is high in hardness, good in toughness and high in abrasion resistance is obtained. The method comprises the following steps: firstly, carrying out ion cleaning and etching on the surface of a workpiece matrix by utilizing argon ions generated by arc enhanced glow discharge, then optimizing key process parameters by adopting a high-power pulse magnetron sputtering technology under constant deposition temperature, gas pressure and reaction gas proportion, and depositing a TiAlSiN hard film on the surface of a hard alloy, stainless steel or high-speed steel, so as to obtain the TiAlSiN hard film on the surface of the hard alloy, stainless steel or high-speed steel. The thickness and the density of the film are easy to control, meanwhile, the binding force and the coating uniformity of the TiAlSiN film are remarkably improved, and excellent wear resistance and corrosion resistance are obtained. The method is easy to operate, high in repeatability, wide in applicability and wide in application prospect in the field of surface strengthening of advanced cutting tools and precision forming dies.

Provided is a steel sheet comprising a base steel sheet and a chemical conversion coating disposed on the surface of the base steel sheet. The steel sheet is characterized in that: the base steel sheet has a chemical composition containing, in mass%, 0.10-1.00% of Cr; and the S-maximum emission intensity and the Cr-maximum emission intensity of the chemical conversion coating as measured by a high-frequency glow discharge emission spectrometer (GDS) satisfy the relations of 1.1≤S-maximum emission intensity / S-emission intensity of base steel sheet≤20.0, and 1.1≤Cr-maximum emission intensity / Cr-emission intensity of base steel sheet≤5.0. Also provided is a component including the steel sheet.

The invention provides an organic wastewater degradation device system and method based on photocatalysis and plasma discharge. The device system comprises a three-dimensional photocatalysis and plasma synergistic degradation reaction device and a wastewater aeration treatment device, the degradation reaction device comprises an inner cylinder and an outer cylinder which are coaxially arranged, a plasma discharge inner electrode, a plasma discharge outer electrode, a glow discharge electrode, a wastewater conveying pipeline, a pulse xenon lamp and a spiral xenon lamp, and the first plasma generation cavity, the wastewater aeration treatment device and the wastewater conveying pipeline are sequentially communicated. According to the device system provided by the invention, a coaxial surrounding type plasma discharge structure is designed, gas-liquid secondary degradation is formed on the organic wastewater, glow discharge is designed on the two sides of a pipeline to enable a spiral xenon lamp to emit light, uniform three-dimensional xenon light degradation is formed by combining a pulse xenon lamp, and further through the synergistic effect of photocatalysis and a plasma field, the gas-liquid secondary degradation of the organic wastewater is realized. The degradation process of organic matters is enhanced, and the degradation efficiency of organic wastewater is improved.

The present invention discloses a manufacturing method of CVD single-crystal diamond for long-time one-time growth, which comprises the following steps: (1) Seed screening; (2) Seed pretreatment; (3) Using an MPCVD device for single-wafer growth, the steps are as follows: a. Place the seed on a terraced molybdenum sample substrate stage, place it in the MPCVD device, evacuate the vacuum, introduce H2, ignite and start the glow discharge to heat up to 700-780 °C, then introduce O2 for etching for 60 minutes, and then introduce CH4 and N2, with a microwave power of 8-9 kw and a gas pressure of 17-18 KPa, and maintain the temperature at 800-850 °C for 2 h; b. Adjust the microwave power to 9-9.5 kw and the gas pressure to 18-19 KPa. When the temperature reaches 850-900 °C, introduce CH4 and N2 and maintain for 30 minutes. Adjust the microwave power to 9.5-10 kw and the gas pressure to 19-20 KPa, and maintain the temperature at 1000-1030 °C. Regularly control the height of the substrate stage according to the growth rate at a set time period, regularly close the introduction of CH4, N2, and O2 for etching for 30 minutes, and then re-introduce CH4, N2, and O2 to resume growth. It realizes one-time stable growth for 700 hours, the good product rate is over 70%, and the product thickness reaches 6.0 mm.

The invention relates to the technical field of mass spectrometers, and discloses an analytical instrument based on glow discharge and quadrupole mass spectrometry combination, which comprises an ion source, an ion transmission system and an ion separator, wherein the ion source is a glow discharge ion source; the ion separator is a quadrupole rod mass analyzer, and the quadrupole rod mass analyzer comprises four electrodes which are arranged in parallel. Compared with an existing analytical instrument, the glow discharge ion source can directly analyze a solid sample without being pretreated into a solution, and compared with an inductively coupled plasma source, the glow discharge ion source is small in matrix effect and especially suitable for high-salt and high-carbon samples; the quadrupole rod mass analyzer is simple in structure, small in size, low in cost, especially suitable for commercialized popularization and high in scanning speed.

The invention relates to an atmospheric pressure glow discharge atomic emission spectrum analysis device and a detection method. The device comprises an ultrasonic atomization-membrane desolvation sampling system, a high-voltage power supply, an excitation source and a spectrum detection system. The high-voltage system outputs pulse voltage and a synchronous TTL level signal; and the TTL level signal is connected to a detection system. The excitation source is atmospheric pressure glow discharge micro-plasma, and the stable glow discharge micro-plasma can be maintained under atmospheric pressure. The monopulse modulation analysis device provided by the invention effectively solves the problem of insufficient heavy metal excitation efficiency caused by the fact that the discharge current is limited to 20-35mA in the existing atmospheric pressure glow discharge technology. The ultrasonic atomization-membrane desolventizing sampling device can directly sample a liquid sample which is not suitable for volatilization, complex pretreatment is not needed, and the desolventizing membrane is used for removing water from aerosol, so that sensitive and rapid atomic analysis is realized. The device is suitable for efficient detection of trace metal elements, and has the advantages of being simple in structure, low in cost, suitable for real-time online analysis and the like.

This invention relates to the field of laser technology, and more particularly to an energy storage and discharge device for a laser and its charging and discharging method. The discharge device includes a support frame, a discharge mechanism, and an energy storage mechanism. A first insulating plate and a second insulating plate are disposed within the support frame. The first insulating plate is located at the bottom of the support frame, and the second insulating plate divides the support frame into an energy storage cavity and a discharge cavity. The discharge mechanism includes a pair of electrodes, an anode electrical connection plate, a first current-guiding plate, and a second current-guiding plate. The pair of electrodes includes an anode and a cathode. The anode is connected to the support frame and the first insulating plate via the anode electrical connection plate, and the cathode is mounted on the second insulating plate. The first current-guiding plate is symmetrically disposed on both sides of the anode, and the second current-guiding plate is symmetrically disposed on both sides of the cathode. The energy storage mechanism is connected to the cathode and is used to store electrical energy and release energy to the pair of electrodes during discharge. The advantage of this invention is that it can achieve large-volume, high-energy, uniform glow discharge without the need for pre-ionization.

A galvanized steel sheet for hot stamping in which the component composition of a base steel sheet satisfies the following conditions: 0.15-0.50% by mass of C, 0.02-2.5% by mass of Si, 0.5-5% by mass of Mn, 0.03% by mass or less (including 0% by mass) of P, 0.02% by mass or less (including 0% by mass) of S, 0.010-1% by mass of Al, 0.005-0.080% by mass of Ti, and 0.0005-0.005% by mass of B, with the remainder being Fe and unavoidable impurities, and when elemental analysis is performed from the surface of a plating layer in the thickness direction of the plating layer by glow discharge emission spectroscopy (GD-OES), the content of Si in the plating layer in the thickness direction of the plating layer is less than 1% by mass. The carbon concentration [Cf] (mass%) at a position where the Zn concentration constituting the plating layer is 1.0 mass% and the bulk carbon concentration [Cb] (mass%) satisfy formula (1): [Cf] < = 0.65 [Cb].

The invention discloses a preparation method of a low-temperature plasma plating and permeating modified layer on the surface of a metal mold. The preparation method comprises the following steps: S1, precise pretreatment of a base body: sequentially carrying out mechanical grinding and polishing and ultrasonic cleaning on the base body, and then drying and putting the base body in a vacuum chamber; s2, plasma activation: after vacuumizing, introducing mixed gas of argon and hydrogen, generating glow discharge under the action of a pulse power supply, and performing sputtering activation on the surface of the substrate; s3, gradient transition layer plasma deposition is conducted, specifically, a pulse direct-current plasma source is adopted, a Ti target and a Cr target serve as sputtering sources, and a transition layer with components changing in a gradient mode is prepared; s4, plating and permeating a multi-element synergistic functional layer: preparing the functional layer by adopting a radio frequency-pulse direct-current composite plasma source, namely a Ti target, a Cr target, a Si-Al alloy target and a rare earth element target through synergistic sputtering; and S5, post-treatment optimization: performing vacuum cooling to room temperature after low-temperature annealing treatment to obtain a final modified layer. The permeation modified layer prepared by the method has high binding force, high hardness, high wear resistance and salt spray corrosion resistance.

The present invention belongs to the field of atmospheric pressure glow discharge and relates to a low-temperature plasma processing device controlled by a transverse magnetic field. The device comprises a power supply unit, a discharge unit with a built-in high-voltage spike electrode, an annular ground electrode, and an electromagnetic coil, a gas unit, a gas control unit, a magnetostrictive unit, and a sample unit for holding a treatment liquid or collecting gaseous products processed in the discharge unit. The discharge end of the high-voltage spike electrode is a pointed tip, and the radially inner side of the annular ground electrode is prefabricated with an axially symmetrical cut angle. A magnetic core is provided on the inner surface of the outer cylinder, and the magnetic core includes a first annular magnetic core and a second annular magnetic core. The device improves the efficiency of generating high-energy active particles in the low-temperature plasma by significantly increasing the discharge area. It can either utilize the discharge process of a specific dielectric gas to generate high-energy active particles for subsequent liquid treatment, or directly mix the gas to be treated with the dielectric gas in a certain proportion in the gas unit and then complete the treatment directly in the discharge unit.

The invention discloses a method suitable for on-site analysis of the valence state of thallium in water. The method comprises the following operation steps: step 1, collecting and separating a water sample; step 2, acidizing treatment; 3, Tl (I) and Tl (III) are separated; 4, total thallium is measured; step 5, Tl (I) determination; the invention relates to the technical field of atomic spectrum metal element analysis, and the method has the beneficial effects that by combining an electrochemical separation technology with a Chelex-100 solid-phase extraction column and cooperating with a portable liquid cathode glow discharge thallium measurement instrument, high-sensitivity field detection of Tl (I) and Tl (III) is realized, the detection limit is lower than 1.0 g / L, and the repeatability is RSDlt; the analysis period of a single sample is less than or equal to 30 minutes, the weight of equipment is only 5kg, battery power supply is supported, and acidification-separation-detection integrated operation can be completed outdoors without professional laboratory conditions.

The utility model discloses a plasma variable capacitance type boosting device, and relates to the technical field of electrical elements. The utility model aims to solve the problems that the conventional coil mutual inductance type boosting structure needs a large amount of copper materials, a high-quality mutual inductance magnetic core and a relatively complicated driving circuit, and meanwhile, a large amount of electromagnetic radiation exists and the conversion efficiency is low. The capacitor comprises a first conductive electrode, a second conductive electrode, a first dielectric medium, a second dielectric medium and gas, the capacitor formed by connecting the first dielectric medium, the gas and the second dielectric medium in series is integrally formed, and the first conductive electrode and the second conductive electrode are two electrodes of the capacitor. According to the utility model, the series capacitance value can reach a uF level or higher during gas glow discharge, the series capacitance value is smaller than the capacitance value of gas in a gas insulation state, the large-proportion change of the capacitance value is realized, the large-amplitude boosting effect is further realized, and the high-voltage boosting capacitor has the advantages of copper material saving, light weight, simple structure, low cost, energy conservation and environmental protection.

The invention discloses a magnetron sputtering winding coating machine, and belongs to the technical field of magnetron sputtering coating. The magnetron sputtering winding coating machine comprises: a vacuum system forming a vacuum chamber; the winding system is mounted in the vacuum chamber and is used for conveying the flexible base material; the magnetron sputtering device is installed in the vacuum cavity and comprises a plurality of magnetron sputtering assemblies, each magnetron sputtering assembly comprises a target material and a magnetic pole, glow discharge areas of the multiple magnetron sputtering assemblies of the same magnetron sputtering device at least partially coincide, and the arrangement directions of the multiple magnetron sputtering assemblies of the same magnetron sputtering device are relatively inclined. The central axes of all the magnetron sputtering assemblies of the same magnetron sputtering device intersect in the overlapped area of the glow discharge area. The multiple magnetron sputtering assemblies of the same magnetron sputtering device are obliquely arranged, and the glow discharge areas of the magnetron sputtering assemblies at least partially coincide, so that the production efficiency of sputter coating can be improved, and damage of sputtering particles to a deposited film layer is reduced.

The invention relates to a high-nitrogen stainless steel spectrum standard sample and a preparation method thereof. The preparation method comprises the following steps: a) smelting in a vacuum furnace, alloying and casting; b) forging the cast ingot to obtain a round ingot; c) processing the round ingot to obtain blocky samples, marking numbers on the blocky samples, and grouping the blocky samples; d) selecting more than 20 block-shaped samples from each group of block-shaped samples, carrying out homogeneity test by adopting direct reading spectrometry or glow spectrometry, and carrying out homogeneity statistics on each element according to a variance analysis method; and e) carrying out constant value analysis on the characteristic value, and taking the block sample with the element characteristic value meeting the requirement as a spectrum standard sample. The prepared spectrum standard sample can be used as a series of standard samples with known components for a direct-reading spectrometer, a glow spectrometer, a glow mass spectrometer and an X-ray fluorescence spectrometer; the method effectively solves the problem of rapid and accurate component detection of the high-nitrogen stainless steel, and has very important application value.

The utility model provides a preparation device of an ultrathin sheet sample for a glow discharge mass spectrometer. The preparation device comprises an external dustproof box and an internal sample preparation system, the dustproof box comprises an air port, an air outlet with a silencer, a dustproof box side door, a side door lock catch, an internal sample preparation system and a tool table; in the internal sample preparation system, fixed seats and a lower fixed mold are respectively arranged on two sides and the center of a bottom plate, and the upper ends of the fixed seats on two sides are connected with a guide rail; the two sliding plates drive the upper die to move downwards, so that the sample and the indium sheet are compressed; the center of the lower end of the upper die moving sliding plate is sequentially connected with an upper die pressing spring, an upper die and a pressing head. Tension springs, pressing claws and pressing wheels are sequentially arranged on the two sides of the center of the lower end of the upper die moving sliding plate. The lower ends of the air inlet pipes are connected with a manual control valve to drive the two sliding plates to move. The device has the advantages that the ultrathin sheet sample for the glow discharge mass spectrometer can be prepared, and the device is simple to operate and not easy to pollute. The sample center can be accurately positioned, and subsequent accurate testing is facilitated.

The invention belongs to the technical field of atomic spectrum metal element analysis, and particularly relates to a liquid cathode glow discharge spectrometer with an optical filter automatic switching function, which comprises a solid anode, a liquid cathode, an optical filter assembly, a circular convex lens and an optical fiber spectrometer, a glow discharge area is arranged between the solid anode and the liquid cathode, the optical fiber spectrometer is arranged outside the glow discharge area, and the circular convex lens is arranged between the glow discharge area and the optical fiber spectrometer; the optical filter assembly is arranged between the glow discharge area and the circular convex lens and comprises a rotating disc and a plurality of through holes distributed in the circumference of the rotating disc, and at least one through hole is provided with an optical filter. According to the liquid cathode glow discharge spectrometer, different optical filters can be switched and selected according to different measured wavelengths of to-be-measured elements and interference conditions of adjacent spectral lines (bands), so that the working efficiency is improved, the consumption of a test solution of a test sample is reduced, the measurement precision is improved, and the labor time is saved.

Provided are methods, apparatus and systems for stabilization of a glow discharge from a plasma. Also provided are methods, apparatus and systems for processing optical signals from a stabilised glow plasma with enhanced signal to noise recovery. A first method comprises: generating an electric field within a plasma cell using an alternating excitation voltage to excite particles within the cell, to produce a glow discharge from a plasma in the plasma cell in a resonant condition; monitoring, in each excitation cycle of the alternating excitation voltage, one or more signals that correlate with glow discharge optical emissions from the plasma in the plasma cell; and, in response to said monitoring, controlling one or more operating conditions for the plasma cell to maintain the glow discharge emissions from the plasma within a desired operating range in each excitation cycle of the alternating excitation voltage. A relatively stable glow discharge optical emission is maintained via dynamic resonant feedback control of operating conditions such as the electric field that is used to excite particles within the plasma cell. The stabilization of the glow plasma can be used in glow discharge optical emission spectroscopy (GD-OES) for gas analysis and in other applications.

The invention discloses an intelligent multi-channel glow discharge device, which is characterized in that a positive electrode discharge unit and a negative electrode discharge unit have high integration degree and high safety degree through a multi-layer integrated design, and the distance between electrodes can be accurately regulated and controlled through an accurate electrode position detection and control unit. The flow of each channel and the size of liquid drops can be in an optimal state through independent monitoring and independent control of fluid of multiple channels, and the whole glow discharge process is efficient, intelligent, accurate, safe and controllable through an innovative multi-channel cooperative feedback control technology, an intelligent self-adaptive adjustment algorithm and an integrated safety protection system in the aspect of control. The method is particularly suitable for the fields of catalyst preparation and the like, and can effectively reduce the risk of manual operation while remarkably improving the production and preparation efficiency and the quality consistency of the catalyst.

The invention discloses a tantalum film preparation method and system, a chip and equipment, and relates to the technical field of chips. The method comprises the following steps: connecting a tantalum target material and a substrate with two poles of a direct current source; in a vacuum environment at room temperature, the power of the direct current source is adjusted to be within a first power range, so that the first gas generates a glow discharge phenomenon, plasma generated by the first gas due to the glow discharge phenomenon bombards the tantalum target material to sputter tantalum, and the tantalum is deposited on the substrate to generate a pure alpha-phase tantalum film; wherein the temperature range of the room temperature is 20-40 DEG C, and the first gas is a non-reaction gas relative to the sputtered tantalum. According to the embodiment of the invention, the pure alpha-phase tantalum film can be directly generated on the substrate in a room temperature environment, the substrate does not need to be heated to a high temperature (such as more than 400 DEG C), and a seed layer does not need to be prepared on the substrate in advance, so that the preparation efficiency of the pure alpha-phase tantalum film is effectively improved, and the preparation cost of the pure alpha-phase tantalum film is reduced.

The utility model discloses a needle plate composite glow electrode for displaying a rarefied flow field of a large-size model, which relates to the technical field of wind tunnel tests and is oppositely arranged at an outlet of a wind tunnel nozzle, and each needle plate composite glow electrode comprises an electrode fixing device and an insulating sleeve, the probe plate composite glow electrode module is arranged on the electrode fixing device and is electrically connected with an external power supply through a high-voltage cable; the needle plate composite glow electrode module comprises an electrode plate; the electrode insulating cover sleeves the outer side of the electrode plate; and the needle-shaped structure is vertically arranged on the electrode plate so as to shorten the distance between the two needle plate composite glow electrode modules. The utility model provides a needle plate composite glow electrode for displaying a rarefied flow field of a large-size model, which is more favorable for puncturing gas between the electrodes to form plasmas under the condition of the same voltage, and reduces the breakdown voltage and the maintaining voltage of glow discharge.

Provided is a plated steel sheet comprising a base steel sheet and a plating layer formed on a surface of the base steel sheet, wherein the plating layer has a predetermined chemical composition, and when measuring the plating layer by glow discharge spectroscopy (GDS), a ratio of “Al concentration at center of plating layer” / “Al concentration at position of plating layer where Fe concentration is 50% of base steel sheet” is 0.10 to 1.50.

The invention discloses a high-temperature in-situ diffuse reflection infrared device applied to low-temperature plasma, and relates to the technical field of in-situ diffuse reflection infrared measurement. The ceramic cover plate is detachably arranged at the opening of the stainless steel tank body, and a sealed high-temperature accommodating cavity is formed when the ceramic cover plate covers the opening of the stainless steel tank body; the ceramic fixing flange penetrates through a bottom plate of the stainless steel tank body and is in sealed connection with the stainless steel tank body, the top of the ceramic fixing flange is located at the position, close to the center, of the high-temperature containing cavity, and a material containing space with the diameter larger than that of a through hole in the ceramic fixing flange is formed in the top of the ceramic fixing flange; the high-voltage electrode is arranged in the ceramic fixing flange in a penetrating mode, the top of the high-voltage electrode extends into the material containing space, and the top end of the high-voltage electrode is lower than the top of the ceramic fixing flange. The beneficial effects are that the central high-voltage electrode and the annular electrode are cooperatively designed, the central high-voltage electrode is used as a discharge electrode, and the glow-like discharge phenomenon is generated between the central high-voltage electrode and the annular electrode, so that a uniform discharge area is formed.

The invention provides a preparation method of a structural component, the structural component and electronic equipment, and the preparation method of the structural component comprises the steps that a coating chamber, a target material and a base material are provided, and the base material comprises an outer surface; the target material and the base material are placed in a coating chamber, and working gas is introduced into the coating chamber; positive voltage is applied to the target material, the working gas generates arc discharge, and the material of the target material is deposited on the outer surface of the base material; negative voltage is applied to the target material, the working gas generates glow discharge, and the material of the target material is deposited on the outer surface of the base material; and alternately performing the step of applying the positive voltage to the target material and the step of applying the negative voltage to the target material so as to form a metal texture layer on the outer surface. According to the preparation method of the structural part, the surface of the base material can be covered with the target material in a deposition mode, the metal texture layer can be made to be uniform and very thin, and the problem of local paint accumulation is avoided while it is guaranteed that the structural part has the good metal imitation effect.

A detachable cover plate is arranged at the top of a reaction cavity, and a vacuum air exhaust assembly is arranged at the bottom of the inner side of the reaction cavity; the two groups of cathode gas uniformizing assemblies are symmetrically arranged on the two sides of the bottom of the cover plate, and the electrode input ends of the cathode gas uniformizing assemblies penetrate through the cover plate to be connected to a radio frequency power supply outside the reaction cavity; the anode carrier is in insulation lap joint with the two sets of cathode gas uniformizing assemblies, and the anode carrier is located between the two sets of cathode gas uniformizing assemblies to form a glow discharge area. A battery piece to be coated is stacked in the anode carrier, and the cutting edges on the two sides of the battery piece face the two sets of cathode gas uniformizing assemblies respectively and are located in the glow discharge area; the gas conveying assembly penetrates through the cover plate and is connected with the cathode gas uniformizing assembly so that process gas can be conveyed into the reaction cavity. The device has the characteristics of compact structure, convenience in operation, high reliability and the like, and the production efficiency of battery pieces is remarkably improved.