The application relates to a
fiber Fabry-Perot
ultrasonic sensor and a manufacturing method thereof. On the basis of a traditional
quartz diaphragm, a double-sided groove type
quartz diaphragm is prepared by using photoetching and
hydrofluoric acid etching technology, the central thickness of the
quartz diaphragm is reduced, the quartz diaphragm can generate a larger deformation amount when subjected to ultrasonic
waves, the sensor is more sensitive and accurate in capturing
partial discharge signals, the sensor sensitivity is improved, meanwhile, the inherent frequency of the diaphragm is improved, the
frequency detection range of the sensor is increased, meanwhile, the multiple rectangular grooves arranged on the quartz diaphragm connect the air inside and outside the Fabry-Perot cavity, the measurement error of the sensor caused by the expansion of the gas in the cavity after temperature rise is avoided, the external environment gas can enter the Fabry-Perot cavity, the change of the environment gas can be judged by using the change of the
refractive index of different gases, double-parameter sensing is realized, the whole device has the advantages of simple structure, good overall stability, long service period, low manufacturing cost and suitability for practical use.