Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

3978results about "Machine frames" patented technology

Active vibration damping system and forecast control method thereof

The invention provides an active damping system which comprises a pedestal, a main substrate, damping units and a control system and which is characterized in that: the number of the damping units is at least three; the damping units are arranged at the same included angle around a center and uniformly distributed on the same circumference; the bottom ends of the damping units are positioned on the pedestal and the top ends of the damping units are positioned on the main substrate; the control system is connected with the damping units to receive vibration signals from the damping units and feedback a control signal. According to the path planning of the moving parts such as the mask table and the working table on the main substrate, the preview control module generates the position information of each moving part within a future time period; integrates the current position information and the position information within the future time period of each moving parts; calculates a preview compensation control signal by means of the preview control algorithm; superposes the preview compensation control signal to the damping feedback control signal; and actuates the active damping system. The active damping system has the advantages of small power, low energy consumption and high damping accuracy.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products