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The Wireless Integrated Network Sensor Next Generation (WINS NG) nodes provide distributed network and Internet access to sensors, controls, and processors that are deeply embedded in equipment, facilities, and the environment. The WINS NG network is a new monitoring and control capability for applications in transportation, manufacturing, health care, environmental monitoring, and safety and security. The WINS NG nodes combine microsensor technology, low power distributed signal processing, low power computation, and low power, low cost wireless and / or wired networking capability in a compact system. The WINS NG networks provide sensing, local control, remote reconfigurability, and embedded intelligent systems in structures, materials, and environments.

A metal film composed of multiple atomic layers continuously formed by atomic layer deposition of Ru and Ta or Ti includes at least a top section and a bottom section, wherein an atomic composition of Ru, Ta or Ti, and N varies in a thickness direction of the metal film. The atomic composition of Ru, Ta or Ti, and N in the top section is represented as Ru(x1)Ta / Ti(y1)N(z1) wherein an atomic ratio of Ru(x1) / (Ta / Ti(y1)) is no less than 15, and z1 is 0.05 or less. The atomic composition of Ru, Ta or Ti, and N in the bottom section is represented as Ru(x2)Ta / Ti(y2)N(z2) wherein an atomic ratio of Ru(x2) / (Ta / Ti(y2)) is more than zero but less than 15, and z2 is 0.10 or greater.

Network systems and processes for delivery of electronic content to recipient processors may be configured to facilitate the delivery of relatively large content items and / or a relatively large number of content items. In one example, a movie rental system and process delivers (downloads) movie files to customers across the Internet. System network architecture includes three or more layers of servers, including a main server supporting an interface for recipient processors to request content items, a plurality of parent servers, and a plurality of edge servers. Edge servers are distributed throughout a region in which the system provides content delivery services to recipient processors. Parent servers, spaced across the service region, support edge servers. A copy of each content item available through the service is distributed from the main server to each parent servers for storage. Parent servers distribute content to edges servers, pursuant to instructions from the main server or requests from the edge servers. The main server receives and processes requests for content items from recipient processors and directs recipient processors to edge servers for obtaining requested content items. The main server also authenticates licenses and publishes rules for the distribution of content items.