The invention relates to a CO2
laser atomic-scale defect repairing method based on a densification effect, which is characterized in that
microsecond CO2
laser is used for inducing a material to generate the densification effect for atomic-scale defects which are difficult to repair in a
fused quartz element, so that thermally induced relaxation and rearrangement of an atomic network are promoted, and low-stress repairing of various defects is realized. The method comprises the following steps: carrying out multi-
modal characterization on a to-be-repaired area to obtain the type and distribution information of an atomic-scale defect; based on
finite element simulation, determining an optimization
process window capable of triggering uniform densification and having thermal stress lower than material strength;
laser scanning repair is carried out in a controllable
atmosphere environment according to optimized parameters, and
infrared thermal image online monitoring and
feedback control are assisted; and the repairing effect is evaluated through multi-dimensional collaborative characterization and
laser damage threshold testing. According to the method disclosed by the invention, the effective repair of atomic-scale
processing induction defects, intrinsic ring cluster defects and polluting impurities is realized by utilizing the densification effect on the premise of not triggering large-range melting and
mass migration, and the
laser damage resistance threshold of the
fused quartz element is greatly improved.