The invention discloses a high-precision micro-fluidic
chip mold and a preparation process thereof, and relates to the field of
chip molds, the high-precision micro-fluidic
chip mold comprises a
metal mold core, a photosensitive tape, a photoetching forming groove,
metal and a
metal protection layer, the
metal mold core comprises but is not limited to a
silicon template, a
copper template, an aluminum template and a
tungsten template; the photosensitive
adhesive tape comprises but is not limited to a PI heat-resistant film
silica gel adhesive tape, a printable photosensitive
adhesive and a photosensitive adhesive tape for injection molding of a plastic micro-fluidic chip; the metal
protection layer comprises but is not limited to a
titanium nitride protection layer, an aluminum protection layer and a
tantalum and
tantalum nitride protection layer. According to the high-precision micro-fluidic chip mold and the preparation process thereof, the mold manufacturing period is short, general patterns can be controlled to be completed within 3 days, compared with
machining, the cost is greatly reduced, the pattern
fineness can reach the UM level, and the precision is the same as that of a
photoresist direct curing mold; and after-process
polishing is not needed, and the method can be directly used.