The invention discloses an Archimedes spiral
anode rotary scanning
electroforming device, and belongs to the technical field of
electroforming. The Archimedes spiral
anode is made of
platinum with the width of 50 micrometers and the purity of 99.999%, the Archimedes spiral
anode is embedded in the center of a line anode carrying plate, and the polar coordinate equation is that during
electroforming, a
cathode carrying plate rotates along with a rotating shaft at the rotating speed of 0.1-20 r / s, and uniform coverage of a
cathode global
electric field is achieved; the device is provided with an adjustable gap of 0.5-4 mm between two electrodes, a liquid supply channel is formed in the center of a wire anode carrying disc, the carrying disc is parallel to a
cathode carrying plate, and the distance between the carrying disc and the cathode carrying plate is adjustable. The
spiral line anode structure can solve the problem that a traditional radial anode is uneven in
electric field; through the flow-rotating speed synergistic effect, the rotating
centrifugal force of the cathode can be counteracted, and the interelectrode
ion concentration is kept stable; the continuous
helical structure can also eliminate non-effective working time. According to the method, the edge effect and the bubble defect are effectively restrained, the deposition uniformity, the electroforming efficiency and the deposition layer performance are improved, and the method is suitable for high-precision electroforming manufacturing of the
chip type disc-shaped cathode substrate.