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1541 results about "Fluid supply" patented technology

Component including a volatile hydrophobic coating and methods including the same

Methods of manufacturing a substrate including a component, such as superabsorbent material, having a volatile hydrophobic coating are disclosed. The method can include providing a fluid supply including a liquid and providing a supply of the component. The component can include a volatile hydrophobic coating. The method can include introducing the component to the fluid supply. The method can also include transferring the component in the fluid supply to provide the substrate. The method can further include applying heat to the substrate. The heat can remove the volatile hydrophobic coating from the component.
Owner:KIMBERLY CLARK WORLDWIDE INC

Methods and apparatus for anti-ice heat supply from waste heat recovery systems

Methods and apparatus for anti-ice heat supply from waste heat recovery systems are disclosed. An apparatus for an aircraft, the apparatus comprising a fuel heat exchange system, an anti-ice heat exchanger, a waste heat recovery heat exchanger, and a conduit coupled to the fuel heat exchange system, the anti-ice heat exchanger, and the waste heat recovery heat exchanger, the conduit including a first portion and a second portion distinct from the first portion, wherein the first portion of the conduit carries a first portion of a thermal transfer fluid from the waste heat recovery heat exchanger to the anti-ice heat exchanger in which the thermal transfer fluid supplies anti-ice heat to a portion of the aircraft, wherein the second portion of the conduit carries a second portion of the thermal transfer fluid from the waste heat recovery heat exchanger to the fuel heat exchange system.
Owner:GENERAL ELECTRIC CO

Device capable of supplying fluid at high pressure

The utility model belongs to the technical field of glue supply, and particularly relates to a high-pressure fluid supply device which comprises a bearing base, first power cylinders are fixedly installed above the left end and the right end of the bearing base respectively, an air control box is fixedly installed on the right side wall of the first power cylinder on the right side, and a pressure plate pump is fixedly installed at the top end of each first power cylinder. A second power air cylinder is fixedly installed in the middle of the bottom end of the pressure plate pump, the output end of the second power air cylinder is fixedly connected with a plunger pump, a glue outlet is formed in the front outer wall of the top of the plunger pump, a pressure plate body is fixedly installed at the bottom of the plunger pump, and an exhaust assembly is installed on the upper front portion of the pressure plate body. The whole plunger pump is made of 304 stainless steel materials, has high strength and good corrosion resistance, the maximum working pressure is 440 bar, and the plunger pump is convenient to meet the operation requirement of high-pressure fluid supply.
Owner:BEIJING DESHUO TECH CO LTD

Filtered spray head assembly

A spray head assembly includes an inlet assembly configured to receive a fluid, a body fluidly coupled with the inlet assembly, a head portion fluidly removably coupled with the body, and a filter assembly. The head portion includes a plurality of nozzles configured to discharge fluid from the spray head assembly. The body and the head portion define an interior chamber. The filter assembly is configured to filter the fluid supplied from the inlet assembly to the head portion. The filter assembly is configured to be received within the interior chamber.
Owner:KOHLER CO(US)

Working machine

A working machine includes a machine body, tank(s) provided in the machine body and including a fluid supply port, a cover body to cover the tank, the cover body including a main wall portion and an opening provided in a portion of the main wall portion to expose the fluid supply port, a fluid supply port cover to open and close the opening, and a hinge to support the fluid supply port cover in a rotatable manner. The hinge includes an abutting portion to abut on an abutted portion at an opening peripheral edge portion that is a peripheral edge portion of the opening of the cover body or in a vicinity of the opening peripheral edge portion from an inner side of the machine body, to limit rotation in an opening direction of the fluid supply port cover when the fluid supply port cover is rotated and opened.
Owner:KUBOTA CORP

Full-automatic centralized cutting fluid supply control method and system

The invention discloses a cutting fluid full-automatic centralized liquid supply control method and system, cutting fluid concentration data and liquid supply system pressure data are obtained through a sensor array, real-time monitoring data are generated by adopting a high-frequency sampling technology, and if the cutting fluid concentration data deviates from a preset threshold range or the liquid supply system pressure data exceeds a stable range, the cutting fluid is monitored. If so, generating an abnormal signal; according to the abnormal signal, the operation frequency of a liquid supply pump is adjusted through a proportional-integral-differential algorithm, a closed-loop control system is formed to maintain a target pressure value, and meanwhile the opening value of a liquid distribution valve is adjusted according to the concentration deviation signal; and the cutting fluid return liquid is extracted from the adjusted liquid supply system, the cutting fluid return liquid is treated through a multi-stage filtering device and a centrifugal separation device, and if it is detected that the impurity content of the cutting fluid return liquid is lower than a preset threshold value, it is judged that purification treatment is completed. The stable performance of the cutting fluid can be kept, the service life of equipment is prolonged, the processing quality and the production efficiency are improved, and the cutting fluid has important practical value.
Owner:ZHUZHOU SIXING MACHINERY

Fully-mechanized coal mining liquid supply system speed regulation method based on model prediction and multi-objective optimization

The invention discloses a fully-mechanized coal mining liquid supply system speed regulation method based on model prediction and multi-objective optimization, and belongs to the technical field of fully-mechanized coal mining liquid supply control, and the method comprises the following steps: S1, collecting the real-time state information of a pump station; s2, according to the real-time state information of the pump station, utilizing the prediction model to predict the outlet pressure of the pump station; s3, constructing a multi-objective optimization function, and S4, controlling the pump station outlet pressure according to the predicted pump station outlet pressure and the multi-objective optimization function. According to the method, the health of the pump machine is guaranteed, and the service life of the pump machine can be effectively prolonged, the maintenance cost is reduced and the reliability and economy of the system are improved by monitoring the health state of the pump machine in real time and taking the health state into an optimization target.
Owner:CHENGDU HANGTIAN PHOTOELECTRIC TECH

Double-fluid nozzle and substrate processing equipment

The invention discloses a double-fluid nozzle and substrate processing equipment. The double-fluid nozzle comprises a liquid outlet main body, the first buffer part is arranged on the first extension part; a plurality of circulation channels are formed in the first buffer piece; the shell is provided with a liquid outlet, and the liquid outlet main body is sleeved with the shell; a buffer space is defined by the inner wall of the shell, the end of the liquid outlet body, the end of the first buffer piece and the side wall of the first extending part and used for gathering fluid in the second pipeline to slow down the flow speed. A substrate processing device comprises a two-fluid nozzle, a bearing part and a supply part. The bearing part is used for bearing a wafer; the double-fluid nozzle sprays fluid to the wafer; the supply part comprises a supply device, a first supply pipeline and a second supply pipeline, one end of the first supply pipeline is communicated with the supply device, and the other end is communicated with the first pipeline; one end of the second supply pipeline is communicated with the supply device, and the other end is communicated with the second pipeline. The liquid drop forming speed can be increased, and meanwhile damage to the surface of the wafer is reduced.
Owner:SHANGHAI XINYUAN MICRO ENTERPRISE DEV CO LTD

Fluid mattress

A fluid mattress includes:a fluid supply unit capable of supplying a fluid;a fluid path to which the fluid is supplied from the fluid supply unit;a plurality of first cells connected to each other;a plurality of second cells connected to each other;a first solenoid valve including a first end connected to the plurality of first cells and a second end connected to the fluid path;a second solenoid valve including a first end connected to the plurality of second cells and a second end connected to the fluid path;an external solenoid valve including a first end connected to an outside and a second end connected to the fluid path;a pressure sensor that measures a pressure of the fluid in the fluid path; anda controller that receives input of a measurement result by the pressure sensor, and controls the fluid supply unit, the first solenoid valve, the second solenoid valve, and the external solenoid valve.The controller can implementa first mode in which a pressure in the second cell is set to be a first pressure, and a pressure in the first cell is set to be equal to or lower than a second pressure lower than the first pressure, anda second mode in which a pressure in the first cell is set to be the first pressure, and a pressure in the second cell is set to be equal to or lower than the second pressure.The controller, when implementing the second mode by shifting from the first mode, stops the fluid supply unit, causes the first solenoid valve to be in a closed state, causes the second solenoid valve and the external solenoid valve to be in an open state, determines the first pressure based on time during when a measurement value by the pressure sensor changes from a third pressure lower than the first pressure and higher than the second pressure to a fourth pressure lower than the third pressure and higher than the second pressure, and causes the first pressure to be higher as the time is longer.
Owner:PARAMOUNT BED CO LTD

Waterfall deckplate

A waterfall deckplate assembly that includes a deckplate structure adapted to be mounted on a horizontal surface and a fluid conveyance system coupled with deckplate structure. The fluid conveyance system is adapted to be connected to a fluid supply and includes a plurality of discharge nozzles supported by the deckplate structure wherein the plurality of discharge nozzles are horizontally aligned when the deckplate structure is mounted on the horizontal surface; and a user operable control valve wherein the control valve is operable to independently and selectively allow fluid flow to the discharge nozzles and prevent fluid flow to the discharge nozzles. In some embodiments, the plurality of nozzles are formed on a first nozzle manifold and the deckplate assembly includes a storage compartment for a second nozzle manifold having a second plurality of discharge nozzles.
Owner:KRAUS USA PLUMBING LLC

Work machine

A work machine includes a flow control valve that controls the flow rate of a hydraulic operating fluid supplied from a hydraulic pump to a hydraulic cylinder, a solenoid valve that generates an operation pressure for operating the flow control valve, and a controller. The controller executes learning processing of changing in a stepwise manner the operation pressure generated by the solenoid valve, sensing the pressure of the hydraulic cylinder, and storing the operation pressure when the pressure of the hydraulic cylinder has become a reference value, as a learning result operation pressure. The controller calculates a differential pressure across the flow control valve and computes a target opening area of the flow control valve on the basis of the differential pressure across the flow control valve and a target flow rate of the hydraulic operating fluid that passes through the flow control valve. The controller computes a target value of the operation pressure generated by the solenoid valve, on the basis of an opening characteristic table, the target opening area, and the learning result operation pressure, and controls the solenoid valve on the basis of the target value of the operation pressure.
Owner:HITACHI CONSTRUCTION MACHINERY CO LTD

Hydrogen fuel cell stack

The present invention provides a hydrogen fuel cell stack, which includes a first end plate, a second end plate, a first current collecting plate, a second current collecting plate, a fuel cell monomer group and at least one temperature maintaining element, wherein the fuel cell monomer group is stacked between the first end plate and the second end plate, the first current collecting plate is arranged between the first end plate and the fuel cell monomer group, the second current collecting plate is arranged between the second end plate and the fuel cell monomer group, and the temperature maintaining element is arranged between the first current collecting plate and the fuel cell monomer group, wherein the first end of the temperature maintaining element and the first end of the fuel cell monomer group form a fluid supply channel, the second end of the temperature maintaining element and the second end of the fuel cell monomer group form a fluid reflux channel, and every two adjacent fuel cell monomers of the fuel cell monomer group form a heat dissipation channel located therebetween.
Owner:WUHAN TROOWIN POWER SYST TECH

Flow path switching device

Disclosed is a flow path switching device including: a case including a first nozzle into which fluid is introduced, a second nozzle through which fluid is discharged, a plurality of inner outflow pipes through which fluid supplied from the first nozzle flows, a plurality of inner inflow pipes through which the fluid supplied to the second nozzle flows, and a flow path connection portion in which a space is formed to communicate the plurality of inner outflow pipes with the first nozzle or to communicate the plurality of inner inflow pipes with the second nozzle; a valve rotatably disposed in the space of the flow path connection portion, and having a first chamber connecting one of the plurality of inner inflow pipes and the first nozzle according to placement, and a second chamber connecting one of the plurality of inner outflow pipes and the second nozzle; and a motor disposed in one side of the valve and rotating the valve. Each of the first nozzle, the inner outflow pipe, and the flow path connection portion forms a flow path perpendicular to each other inside. A first chamber hole connecting the first chamber and a nozzle flow path formed inside the first nozzle is formed in the valve. A cross-sectional area of the nozzle flow path is reduced to a size corresponding to the first chamber hole from an inlet portion of the first nozzle towards the flow connection portion.
Owner:LG ELECTRONICS INC

Well fracture systems and methods

ActiveUS12540539B2Drilling rodsFluid removalEquipment suppliesFluid supply
A method for performing simultaneous operations at a wellsite comprising two or more adjacent wellheads, each respectively connected to a well, may include the following steps: providing a fluid supply via upstream equipment to an intermediate supply point; fluidly connecting the intermediate supply point to a single wellhead, the fluidly connecting comprising connecting a first end of a flexible pipe to the intermediate supply point and a second end of the flexible pipe to a first wellhead; performing a wellbore operation on a first well using the fluid supply from the upstream equipment supplied to the first wellhead; disconnecting the second end of the flexible pipe from the first wellhead; and connecting the second end of the flexible pipe to a second wellhead.
Owner:FMC TECHNOLOGIES INC

Injection molding system and method for cleaning fluid supply unit

An injection molding system is provided. A mixing unit is configured to mix a flowable polymeric material with a blowing agent to form a mixture. A fluid supply unit is configured to provide the blowing agent to the mixing unit. The fluid supply unit includes an injection outlet coupled to the mixing unit, a compressor configured to generate the blowing agent, an injection valve disposed between the injection outlet and the compressor and configured to receive the blowing agent from the compressor through a first passage, and a cleaning mechanism configured to clean the injection valve. The cleaning mechanism includes a control valve coupled to the compressor through a second passage and coupled to the injection valve through a third passage connected to the first passage, and an actuating device configured to actuate the control valve. The blowing agent is flowable to the injection valve through the control valve.
Owner:KING STEEL MACHINERY CO LTD

Wet dry appliance

A cleaning device and methods for cleaning are provided. In one embodiment, the cleaning device includes a head assembly, a body assembly, and a handle assembly. The cleaning device also includes components that enable the cleaning device to operate in dry cleaning modes and wet cleaning modes. Dry cleaning modes can employ a vacuum assembly, including a motor, tubing, and a fluid recovery tank in order to draw in debris and waste into a fluid recovery tank. Wet cleaning modes can further employ a fluid supply tank, a pump, and tubing in order to supply fluid to a brushroll to aid in a cleaning process.
Owner:SHARKNINJA OPERATING LLC

Rapid detection device and method for oil and gas well pipe column sealing thread damage injection agent repair

The invention relates to the technical field of oil and gas field development and production, and discloses a rapid detection device and method for oil and gas well tubular column sealing thread damage injection agent repair, and the device comprises a pressurization mechanism, a pressure container and a thread damage assembly; the pressurizing mechanism comprises a liquid supply assembly, a manual hydraulic pump and a pipeline assembly, the liquid supply assembly is installed on the manual hydraulic pump, and the pipeline assembly is installed at the output end of the manual hydraulic pump; the pressure container comprises a sealed container and a piston, the piston is slidably connected to the inner side wall of the sealed container, and the bottom of the sealed container communicates with the pipeline assembly; the thread damage assembly comprises a conduit assembly, a pressure gauge and an external plug; the conduit assembly is communicated with the top of the sealed container; the external plug is in threaded connection with the end, away from the sealed container, of the guide pipe assembly. According to the invention, two states of thread slippage and damage leakage can be simulated, and downhole conduit thread leakage simulation and rapid detection of chemical injection agent repair are realized.
Owner:ZHEJIANG OCEAN UNIV +2

Apparatus and method capable of performing vehicle-to-vehicle heat management

An apparatus for performing vehicle-to-vehicle charging includes a charging cable having a fluid tube along which a cooling fluid flows configured to connect a vehicle equipped with a battery and a charging vehicle supplying electric power for charging the battery of the vehicle requiring a charge, a cooling device provided in the charging vehicle and configured to cool the cooling fluid, a heat supply device provided in the charging vehicle configured to supply heat to the cooling fluid, and a fluid regulation device configured to regulate the flow of the cooling fluid in such that the cooling fluid having been cooled by the cooling device or heated by the heat supply device in the charging vehicle is supplied to the vehicle requiring a charge along the fluid tube, in order to cool or increase the temperature of the battery of the vehicle requiring a charge using the cooling fluid.
Owner:HYUNDAI MOTOR CO LTD +1

Supply device and supply method

A supplying device and a supplying method for more reliably cleaning the observation window of a rigid endoscope are provided. [Solution] The control unit 72 controls the cleaning liquid supply unit 14 and the gas supply unit 16 to perform a cleaning fluid supply operation in which the cleaning liquid supply unit 14 supplies cleaning liquid to the supply pipe 64, causing the cleaning liquid to remain in the middle of the supply pipe 64, and then the gas supply unit 16 supplies gas to the supply pipe 64, thereby supplying a mixture of cleaning liquid and gas to the cover 22 as a cleaning fluid.
Owner:TRYTEC

Transdermal drug administration device

A transdermal drug administration device comprises: a housing; a battery; an injection system; a movable connection part for providing fluid connection between the injection system and a reservoir containing an active ingredient intended to be administered; a pump system, the pump system being motorized so as to cause a fluid to circulate within a fluid network of the device; and an electronic system for controlling the driving of the pump system, the electronic system being provided with a mechanical switch for powering the pump system with a battery, wherein the movable connection part is moveable relative to the housing and the reservoir, the movable connection part jointly controlling the fluid supply of the pump and the power supply of the electronic system during the movement, at least part of the movement being performed by a human mechanical action.
Owner:SOCIETE INDUSTRIELLE DE SONCEBOZ SA

Device for laying a cable into a duct with a lubricating capacity

A Device for installing an elongated element into a duct, comprising a pressure housing having an entry port, an exit port arranged to be connected to the duct for introducing the elongated element into the duct with a driving fluid, a driving fluid chamber, arranged to receive the driving fluid supplied under pressure and to distribute the driving fluid into the duct with the elongated element, and a lubricant chamber, arranged to receive a lubricant and to distribute the lubricant onto an outer surface of the elongated element, the lubricant chamber being located upstream of the driving fluid chamber, characterized in that the pressure housing comprises an upstream chamber, arranged to receive the pressurized driving fluid and located upstream of the lubricant chamber.
Owner:PLUMETTAZ HLDG SA

Automated de-powdering of additive manufacturing build

An automated de-powdering system includes a build box defined by a build plate and a plurality of sidewalls where the build plate and the plurality of sidewalls define a build chamber configured to contain an additive manufacturing build comprising one or more objects disposed within a powder build material. The build plate includes at least one passageway extending from a top side to ae bottom side of the build plate. The passageway is defined by at least one passageway sidewall having at least one nozzle to direct a fluid into the build chamber to separate at least a portion of the powder build material from the one or more objects. At least one fluid source is fluidically coupled to the at least one nozzle and is actuatable to supply the fluid to the at least one nozzle.
Owner:GENERAL ELECTRIC CO

Protection device and protection method

A protection device including: a wearable structure to be worn by an user; an airbag configured to be attached to the wearable structure in a contracted state during standby, and configured to inflate to surround a protection target portion in a spiral and cylindrical form at completion of expansion, the airbag including one end fixed to the wearable structure, and the other end located on an opposite side to the one end, the airbag being configured to inflate with the other end separated from the wearable structure when the airbag is expanded; and a fluid supplier connected to the airbag and configured to supply fluid into the airbag.
Owner:DAICEL CORP

Valve arrangement

The invention relates to a valve arrangement (1; 81; 91) with several functional modules arranged in series from the group: valve disc group (8), safety valve group (7), throttle valve (171), wherein the valve disc group (8) has one or more valve discs (101, 102), each with at least one electrically controllable valve (103, 104) which is connected to an electrical supply line (17) and to a fluid supply line (18), wherein the throttle valve (171) is arranged upstream of the safety valve group (7) between a fluid connection (36) and the fluid supply line (18) of the valve disc group (8), wherein the safety valve group (7) has two safety valves (51, 52) which are designed to influence a fluid flow between the fluid connection (36) and the fluid supply line (18),wherein the safety control (7) is designed for the safety-oriented blocking of electrical control signals for the safety valves (51, 52), wherein the throttle valve is designed for a temporary reduction of a working pressure in the fluid supply line (18), and wherein a valve control (5) is designed to control the valve disc group (8) and the safety valve group (7).
Owner:FESTO AG & CO KG

Substrate treating apparatus

The present invention relates to an apparatus for treating a substrate, and more particularly, to an apparatus for dry-treating a substrate by using a supercritical fluid. The apparatus for treating a substrate includes: a vessel having a treatment space; a support unit for supporting a substrate in the treatment space; a fluid supply unit for supplying a treatment fluid to the treatment space; a fluid exhaust unit for exhausting the treatment fluid from the treatment space; a heating unit installed in the vessel to heat the treatment space; and a temperature measurement unit installed in the vessel to measure the temperature of the treatment space, in which the vessel includes: a housing providing the treatment space; and a cover unit for covering a part or an entirety of an inner wall of the housing exposed to the treatment space in the inner wall of the housing, and the temperature measurement unit includes a temperature sensor provided between the housing and the cover unit.
Owner:SYSTEM ENGINEERING MEGA SOLUTION CO LTD

Learning for controlling pneumatic driven positioning devices

A vacuum system comprises at least a pneumatic positioning device comprising a mount configured to hold an effecting element and a pneumatic actuator connected to the mount. A control valve is connected to the pneumatic actuator and to a fluid supply. A fluid sensor measures the pressure of the pneumatic actuator. A method includes applying a controlling signal to the control valve to vary the pressure of the pneumatic actuator and move the mount from a starting position to an end position, monitoring the pressure of the pneumatic actuator by the fluid sensor, determining when the mount arrives at the end position, and deriving the controlling parameters based on processing a set of observed parameters, wherein the set of observed parameters comprises at least the controlling signal, the varying pressure, and arrival information of the mount at the end position.
Owner:VAT HOLDING AG

Endoscope with temperature measurement function

The invention relates to the technical field of medical endoscopes, and provides an endoscope with a temperature measurement function, the endoscope comprises an operation part and a soft lens catheter, and the operation part and the soft lens catheter are both internally provided with a liquid supply channel, a suction channel and a transmission medium channel; the flexible lens catheter is detachably arranged on the operating part through a connecting part, and the connecting part comprises a locking piece, a sealing insertion tube, an elastic contact piece and a sealing piece; the operation part and the flexible lens catheter are both provided with the abutting pipes communicated with the suction channel, and a sealing piece is arranged at the connecting position of the two abutting pipes. Through the arrangement of the connecting part, the flexible lens catheter can be quickly disassembled and replaced during use, the replacement time when the operation part breaks down in the operation process can be greatly shortened, and the flexible lens catheter can be disassembled and replaced without being taken out.
Owner:ZHEJIANG MINGKE MEDICAL OPTICAL TECH CO LTD

Apparatus for treating a substrate

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space therein; a substrate support unit configured to support a substrate in the treating space; and a fluid supply unit configured to supply a fluid in a supercritical state to the treating space, wherein the fluid supply unit comprises: a supply line provided at a top wall of the chamber; and a discharge unit installed at the top wall of the chamber and configured to discharge a fluid to a substrate, and wherein the discharge unit comprises: a body having a discharge fluid channel for the fluid; a nozzle plate provided at a discharge end of the body; and a blocking plate within the discharge fluid channel and spaced apart from the nozzle plate.
Owner:SYSTEM ENGINEERING MEGA SOLUTION CO LTD

Precise densification cryogenic propellant supply system and method

The invention relates to a fluid supply system and method, in particular to a precise densified cryogenic propellant supply system and method, and aims to solve the problem that the follow-up test run precision is affected due to the phenomena that an existing densified cryogenic propellant is difficult to store and uneven in propellant flow. The system comprises a main container group, a heat exchange device, a first flow meter, a second flow meter, a liquid nitrogen supply valve, a liquid nitrogen flow regulating valve, a liquid nitrogen flow regulating valve bypass valve, a nitrogen emptying valve, a second valve, a first valve, a third valve, a front filling valve, a front filling bypass valve, a rear filling valve and a first low-temperature propellant discharge valve, a first low-temperature propellant discharge valve, a second low-temperature propellant discharge valve, a first temperature sensor, a second temperature sensor, a third temperature sensor and a fourth temperature sensor. The heat exchange temperature of the low-temperature propellant can be dynamically adjusted, and subsequent storage and uniform and stable supply are facilitated.
Owner:XIAN AEROSPACE PROPULSION TESTING TECHN INST

Substrate processing method, substrate processing device, and storage medium

A substrate processing method includes: forming a liquid film of a protective liquid, which covers a front surface of a substrate, by supplying the protective liquid, which protects a front surface pattern of the substrate, to the front surface where a liquid processing using a processing liquid has been performed; loading the substrate with the liquid film formed thereon into a processing container; supplying a pressurized processing fluid into the processing container, replacing the processing liquid on the substrate with the pressurized processing fluid supplied while maintaining an internal pressure of the processing container at a level where the processing fluid remains in a supercritical state, discharging the processing fluid from the processing container, and drying the substrate; and cleaning a rear surface of the substrate by supplying a cleaning liquid to the rear surface, wherein the cleaning is performed at least while the forming the liquid film is performed.
Owner:TOKYO ELECTRON LTD