106875 results about "Thermodynamics" patented technology

A substrate heat treatment apparatus includes a heat-treating plate having a flat upper surface, support devices formed of a heat-resistant resin for contacting and supporting a substrate, a seal device disposed annularly for rendering gastight a space formed between the substrate and heat-treating plate, and exhaust bores for exhausting gas from the space. The support devices are formed of resin, and the upper surface of the heat-treating plate is made flat, whereby a reduced difference in the rate of heat transfer occurs between contact parts and non-contact parts on the surface of the substrate. Consequently, the substrate is heat-treated effectively while suppressing variations in heat history over the surface of the substrate.

An apparatus and related method for distributing process gas in a vapor deposition system is described. The gas distribution system includes a vertically movable piston within its plenum, and the movement of the piston controls the flow rate of process gas through the vapor distribution plate of the gas distribution system. The piston can be used to accommodate changes in processing parameters that affect flow characteristics and to create edge-enhanced, uniform, and center-enhanced profiles of deposited material on a substrate without the need to replace the vapor distribution plate.

A reactor having a housing that encloses a gas delivery system operatively connected to a reaction chamber and an exhaust assembly. The gas delivery system includes a plurality of gas lines for providing at least one process gas to the reaction chamber. The gas delivery system further includes a mixer for receiving the at least one process gas. The mixer is operatively connected to a diffuser that is configured to diffuse process gases. The diffuser is attached directly to an upper surface of the reaction chamber, thereby forming a diffuser volume therebetween. The diffuser includes at least one distribution surface that is configured to provide a flow restriction to the process gases as they pass through the diffuser volume before being introduced into the reaction chamber.

Provided is a substrate processing apparatus capable of suppressing accumulation of reaction products or decomposed matters on an inner wall of a nozzle and suppressing scattering of foreign substances in a process chamber. The substrate processing apparatus includes a process chamber, a heating unit, a source gas supply unit, a source gas nozzle, an exhaust unit, and a control unit configured to control at least the heating unit, the source gas supply unit and the exhaust unit. The source gas nozzle is disposed at a region in the process chamber, in which a first process gas is not decomposed even under a temperature in the process chamber higher than a pyrolysis temperature of the first process gas, and the control unit supplies the first process gas into the process chamber two or more times at different flow velocities to prevent the first process gas from being mixed.

The present invention provides methods and apparatus for performing thermal processes to a semiconductor substrate. Thermal processing chambers of the present invention comprise two different energy sources, such as an infrared radiation source and a UV radiation source. The UV radiation source and the infrared radiation source may be used alone or in combination to supply heat, activate electronic, or create active species inside the thermal processing chamber.

The present invention relates to fluoroolefin compositions. The fluoroolefin compositions of the present invention are useful as refrigerants or heat transfer fluids and in processes for producing cooling or heat. Additionally, the fluoroolefin compositions of the present invention may be used to replace currently used refrigerant or heat transfer fluid compositions that have higher global warming potential.

A method for vapor deposition on a substrate in a vapor deposition system having a process space separated from a transfer space. The method disposes a substrate in a process space of a processing system that is vacuum isolated from a transfer space of the processing system, processes the substrate at either of a first position or a second position in the process space while maintaining vacuum isolation from the transfer space by way of a movement accommodating sealing material, and deposits a material on the substrate at either the first position or the second position.

A hybrid structure that combines characteristics of the DACRS and Swozzle burners to provide the high mixing ability of an axial flowing counter rotating vane swirler with good dynamic flame stability characteristics of a bluff center body.

A stream conditioning system for a fuel cell gas management system or fuel cell engine. The stream conditioning system manages species potential in at least one fuel cell reactant stream. A species transfer device is located in the path of at least one reactant stream of a fuel cell's inlet or outlet, which transfer device conditions that stream to improve the efficiency of the fuel cell. The species transfer device incorporates an exchange media and a sorbent. The fuel cell gas management system can include a cathode loop with the stream conditioning system transferring latent and sensible heat from an exhaust stream to the cathode inlet stream of the fuel cell; an anode humidity retention system for maintaining the total enthalpy of the anode stream exiting the fuel cell related to the total enthalpy of the anode inlet stream; and a cooling water management system having segregated deionized water and cooling water loops interconnected by means of a brazed plate heat exchanger.

Parallel flow reaction systems comprising four or more reaction channels are disclosed. Distribution systems, and parallel flow reaction systems comprising such distribution systems are also disclosed. Specifically, the distribution systems comprise one or more subsystems, including for example, a flow-partitioning subsystem for providing a different flow rate to each of the four or more reactors, a pressure-partitioning subsystem for providing a different reaction pressure in the reaction cavity of each of the four or more reactors, and a feed-composition subsystem for providing a different feed composition to each of the four or more reactors. In preferred embodiments, the one or more subsystems can comprise at least one set of four or more flow restrictors, each of the four or more flow restrictors having a flow resistance that varies relative to other flow restrictors in the set.

A climate control device includes a first and a second thermal module. The first module is configured to provide climate conditioned air to a first portion of a seat. The second module is configured to provide climate conditioned air to a second portion of the seat. A control system is provided for controlling the climate control device. The control system includes an input device for providing a set point for the system. A first control unit of the control system is provided for the first thermal module and a second control unit is provided for the second thermal module.

Particulate compositions are described comprising an intimate mixture of a petroleum coke, coal and a gasification catalyst, where the gasification catalyst is loaded onto at least the coal for gasification in the presence of steam to yield a plurality of gases including methane and at least one or more of hydrogen, carbon monoxide, and other higher hydrocarbons are formed. Processes are also provided for the preparation of the particulate compositions and converting the particulate composition into a plurality of gaseous products.

First circulation portions switch a flow of a heat medium such that one of the heat media for two systems selectively circulates through a radiator flow path or a first bypass flow path. Second circulation portions switch the flow of the heat medium such that the heat media for the two systems selectively circulate with respect to a second flow path group. The first circulation portions and the second circulation portions are adapted to switch the flow of the heat medium so as to form a first circulation circuit for allowing the heat medium to circulate among a first flow path group, the second flow path group, and a first pump, as well as a second circulation circuit for allowing the heat medium to circulate among the first flow path group, the second flow path group, and a second pump.

A facility comprising integrated systems for the extraction, and optionally upgrading and / or refinement, of unconventional oil sources, using fossil fuels as a primary source of energy. In particular, this facility provides a means to gasify one or more fossil fuels in an efficient manner, converting it into intermediate products such as heat, steam and electricity, which are then used by the system to obtain useful fuel products from unconventional oil sources such as tar sands and oil shale. The design of the components of this facility is optimized such that the overall costs are competitive with an equivalent unconventional oil source processing facility that uses natural gas as a source of processing energy. The facility can be used on its own, may use supplemental natural gas energy sources, or may be used in conjunction with an existing facility that uses natural gas as an energy source in order to improve the overall cost effectiveness of the processing and / or reduce the requirement for other energy sources, such as natural gas.

A method of operating a gas turbine engine combustion system at lower load conditions while maintaining required emissions levels is disclosed. The present invention includes multiple embodiments of axial, radial, and circumferential fuel staging within a can-type combustor having alternate ignition techniques of spark ignition or torch ignition.