4524 results about "Spatial distribution" patented technology

In many processes used in fabricating semiconductors the wafer is seated on the top surface of a pedestal and heated in a high energy process step, such as plasma etching. The pedestal, chuck or platen may be cooling but the wafer gradually heats until the process can no longer continue. Where large, e.g. 300 mm diameter, wafers are being processed the temperature level across the wafer is difficult to maintain substantially constant. In this system and method the lateral temperature distribution is equalized by a heat sink structure in a chamber immediately under the wafer support on top of the pedestal. A number of spatially distributed wicking posts extend downwardly from a layer of wicking material across the top of the chamber, into a pool of a vaporizable liquid. At hot spots, vaporized liquid is generated and transported to adjacent condensation posts extending up from the liquid. The system thus passively extracts heat to equalize temperatures while recirculating liquid and assuring adequate supply. The free volume above and within the liquid, and the short distances between posts, assure adequate heat transfer rates.

A non-invasive method and system for combined ultrasound treatment are provided. An exemplary combined ultrasound treatment system comprises a transducer configured to deliver ultrasound energy to provide two or more energy effects to a region of interest. The energy effects facilitate the initiation of one or more responses in the region of interest. In accordance with an exemplary embodiment of the present invention, a transducer is configured to deliver energy over varying temporal and / or spatial distributions in order to provide energy effects and initiate responses in a region of interest.

A resonator system for generating a radio frequency (RF) magnetic field in a volume under investigation of a magnetic resonance (MR) arrangement, comprises a number N of individual resonators (2) which surround the volume under investigation and which are each disposed on a flat dielectric substrate (1) around a z-axis, wherein the individual resonators (2) have windows (8) through each of which one individual RF field is generated in the volume under investigation in single operation of the individual resonators (2) and, through cooperation among the individual resonators (2), a useful RF field (7) is generated in the volume under investigation, wherein a remote RF field (6) is asymptotically generated far outside of the resonator system, and the spatial distribution of the useful RF field (7) is substantially mirror-symmetrical relative to a first plane A which contains the z-axis, and that of the asymptotic remote RF field (6) is substantially mirror-symmetrical relative to a second plane B which contains the z-axis, the useful RF field (7) extending substantially parallel to the first plane A in the volume under investigation, wherein the number of individual resonators (2) is N>4 and wherein, during operation of the resonator system at at least one point in time, the substrate plane of at least one individual resonator (2) subtends an angle of more than 40° with respect to the direction of the useful RF field (7) in the volume under investigation, and at least one further individual resonator (2) subtends an angle of less than 40° with respect to the direction of the useful RF field (7) in the volume under investigation, is characterized in that the first plane A is not rotated about the z-axis relative to the second plane B or is rotated by less than 360° / (N+1). The inventive resonator system realizes a resonator system with improved field homogeneity and full quadrature suitability, high quality factor and large efficiency using straightforward constructional measures.

An illuminating device coupled with sensors or an image acquisition device and a logical controller allows illumination intensity and spectrum to be varied according to changing user needs. The system provides illumination to areas according to the principles of correct lighting practice for the optimal performance of visual tasks in the most efficient, cost effective manner. Aspects of the invention include: lighting fixtures which adapt to ambient lighting, movement, visual tasks being performed, and environmental and personal conditions affecting illumination requirements at any given instant. Lighting fixtures have spatial distribution of spectrum and intensity, providing both “background” room lighting, and “task” lighting.