1183results about "Polarisation-affecting properties" patented technology

An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent. The radiation that is reflected off the substrate is radially polarized.

An apparatus includes a first section operable to detect polarization-sensitive radiation emitted by an object, and a second section operable to determine a Jones matrix based on information obtained by the first section from the polarization-sensitive radiation. The second section thereafter transforms the Jones matrix into a Mueller matrix, the Mueller matrix being representative of properties of the object.

Method and apparatus for reflected imaging analysis. Reflected imaging is used to perform non-invasive, in vivo analysis of a subject's vascular system. A raw reflected image (110) is normalized with respect to the background to form a corrected reflected image (120). An analysis image (130) is segmented from the corrected reflected image to include a scene of interest for analysis. The method and apparatus can be used to determine such characteristics as the hemoglobin concentration per unit volume of blood, the number of white blood cells per unit volume of blood, a mean cell volume, the number of platelets per unit volume of blood, and the hematocrit. Cross-polarizers can be used to improve visualization of the reflected image.

Registration correction for optical tomographic imaging in three dimensions. An object of interest is illuminated to produce an image. A lateral offset correction value is determined for the image. An axial offset correction value is determined for the image. The lateral offset correction value and the axial offset correction value are applied to the image to produce a corrected file image.

An apparatus and method for automatically tuning a resonant circuit in a chiroptical measurement system. A sample cell holds a sample being measured for a chiroptical property as the sample is modulated by the resonant circuit. A signal source coupled to the resonant circuit generates a driving signal at one of a plurality of frequencies to modulate the resonant circuit. The frequencies are within a range of expected resonant frequencies for the resonant circuit. A feedback loop circuit coupled to the signal source is used to adjust the frequency of the driving signal to another of the frequencies in response to a feedback signal associated with a measured parameter of the driving signal. In this way, the frequency of the driving signal is adjusted to create a resonant condition. The driving signal may also be applied at a reduced power level so that the resonant circuit can be driven at off-resonant frequencies within the range of frequencies.

Apparatus and methods for hyperspectral imaging analysis that assists in real and near-real time assessment of biological tissue condition, viability, and type, and monitoring the above over time. Embodiments of the invention are particularly useful in surgery, clinical procedures, tissue assessment, diagnostic procedures, health monitoring, and medical evaluations, especially in the detection and treatment of cancer.

To provide a measuring method which enables a highly accurate measurement of concentrations of specific components in subjects of measurement even when the concentration measuring contact of a concentration measuring instrument is contaminated with drinks or the like.

The concentration measuring instrument includes:

a main body that has a concentration measuring contact, a light source and a photodetector; and

judging means that calculates the difference between a non-contact-measured value, a value, measured by the photodetector while keeping a subject of measurement out of contact with the concentration measuring contact, of the quantity of light that is emitted and entered by the light source into the concentration measuring contact and returned to the concentration measuring contact and a predetermined reference value obtained in advance by making measurement while keeping the concentration measuring contact clean and judges whether the calculation of the concentration of the specific component in the subject of measurement is effective or not by comparing the calculated difference with a predetermined threshold.

A system for the identification and quantification of a biological sample suspended in a liquid includes a fluorescence excitation module with at least one excitation light source; a sample interface module optically coupled to the fluorescence excitation module for positioning a biological sample to receive excitation light from the at least one excitation light source; a fluorescence emission module optically coupled to the sample interface module and comprising at least one detection device for detecting fluorescence excitation-emission matrices of the biological sample; and a computer module operatively coupled to the fluorescence emission module. The computer module performs multivariate analysis on the fluorescence excitation-emission matrices of the biological sample to identify and quantify the biological sample. The multivariate analysis may comprise extended partial least squared analysis for identification and quantification of the biological sample. A method for the identification and quantification of a biological sample suspended in a liquid is also provided.

A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.

A method and apparatus for determining optical mask corrections for photolithography. A plurality of grating patterns is printed onto a wafer utilizing a photomask having at least one grating. Each grating pattern within the plurality of grating patterns is associated with known photolithographic settings. Each grating pattern is illuminated independently with a light source, so that light is diffracted off each grating pattern. The diffracted light is measured utilizing scatterometry techniques to determine measured diffracted values. The measured diffracted values are compared to values in a library to determine a profile match. A 2-dimensional profile description is assigned to each grating pattern based on the profile match. A database is compiled of the profile descriptions for the plurality of grating patterns. Photomask design rules are then generated by accessing the database containing the 2-dimensional profile descriptions. In preferred embodiments, the design rules are used to create and correct masks containing OPC corrections, phase-shifting mask corrections and binary masks. In a preferred embodiment the at least one grating is a bi-periodic grating. In a preferred embodiment, the scatterometry technique is optical digital profilometry utilizing a reflectometer or ellipsometer.

An in vivo imaging device having an illumination system that creates a virtual source within a tissue region of a subject in a non-invasive manner. The illumination system transforms a maximum amount of illumination energy from a light source into a high contrast illumination pattern. The illumination pattern is projected onto the object plane in a manner that maximizes the depth to which clear images of sub-surface features can be obtained. The high intensity portion of the illumination pattern is directed onto the object plane outside the field of view of an image capturing device that detects the image. In this configuration, scattered light from within the tissue region interacts with the object being imaged. This illumination technique provides for a high contrast image of sub-surface phenomena such as vein structure, blood flow within veins, gland structure, etc.

Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension, a presence of defects, and a thin film characteristic. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.

The present invention provides a method for embedding particles in a solid structure including the steps of extruding a slurry of particles and a polymeric solution into a linear polymer medium having particles embedded into a polymer portion; and curing the polymer portion of the linear polymer medium.

A process control method to monitor ion implantation process conditions by measuring the optical properties of a masking material is provided. A patterned masking material may protect underlying regions of a semiconductor substrate from undergoing a chemical or physical change during an ion implantation process. The patterned masking material, however, may also undergo a chemical or physical change during processing. The chemical or physical changes to the masking material during such processing may also cause the optical properties of the material to change. The optical properties of the masking material may be used to determine the concentration of ions implanted into the semiconductor substrate.

Apparatus, method and storage medium which can provide at least one first electro-magnetic radiation to a sample and at least one second electromagnetic radiation to a reference, such that the first and/or second electromagnetic radiations have a spectrum which changes over time. In addition, a first polarization component of at least one third radiation associated with the first radiation can be combined with a second polarization component of at least one fourth radiation associated with the second radiation with one another. The first and second polarizations may be specifically controlled to be at least approximately orthogonal to one another.

An apparatus and a method of depositing a dielectric material film, including steps of initiating a process of depositing a dielectric material film under at least one controllable initial condition in an apparatus comprising a dielectric material deposition chamber and a spectroscopic ellipsometer; and measuring, by the spectroscopic ellipsometer, at least one ellipsometric parameter of the dielectric material film during the process of depositing the film.

An image analysis workstation for analyzing optical thin film arrays is disclosed. One disclosed embodiment relates to individual arrays that comprise a single optical thin film test surface that provides a plurality of discretely addressable locations, each comprising an immobilized capture reagent for an analyte of interest. These are referred to herein as "arrayed optical thin film test surfaces." Preferably, an individual arrayed optical thin film test surface comprises at least 4, more preferably at least 16, even more preferably at least 32, still more preferably at least 64, and most preferably 128 or more discretely addressable locations. One or more of the discretely addressable locations may provide control signals (e.g., for normalizing signals and/or that act as positive and/or negative controls) or fiducial signals (i.e., information that is used to determine the relative alignment of the arrayed optical thin film test surface within the device.

A method and apparatus for measuring microstructures, anistropy and birefringence in polymers using laser scattered light includes a laser which provides a beam that can be conditioned and is directed at a fiber or film which causes the beam to scatter. Backscatter light is received and processed with detectors and beam splitters to obtain data. The data is directed to a computer where it is processed to obtain information about the fiber or film, such as the birefringence and diameter. This information provides a basis for modifications to the production process to enhance the process.

A device to provide hyperspectral reflection spectrum, hyperspectral depolarization, and hyperspectral fluorescence spectrum data in a portable, remote sensing instrument. The device can provide a large range of remotely-sensed optical property data, presently only obtainable in laboratories, in a low-cost field instrument. Among its many uses, the present invention can be used by farmers as a tool for determining the nitrogen content of crops to optimize fertilizer laydown.

Rapid spectrum assay of multiple samples with infrared light is made possible by devices and methods that increase total light throughput. Multiple wavelength scan with Fourier analysis is combined with large numbers of sample wells located within infrared light compatible solid materials. In particular, very large scale measurement devices and systems for their use are fabricated from lithography and other techniques used for semiconductor processing.

The invention relates to a computer-implemented method for determining at least one kinetic parameter for the interaction of an analyte in solution with an immobilized ligand from a data set comprising a plurality of different binding curves, each of which represents the progress of the interaction of the analyte with the ligand with time, comprising the steps of: a) performing at least one fit of the whole data set or subsets thereof to a predetermined kinetic model for the interaction; b) based on the result of the fit or fits performed in step a), identifying and excluding binding curves of unacceptable quality; c) performing a final fit to the remaining data set; and d) obtaining therefrom the kinetic parameter or parameters. The invention also relates to an analytical system for carrying out the method, as well as a computer program, computer program product and computer system for performing the method.

A device for detecting a target substance in a fluid is provided. This device comprises a periodic structure having a vacant portion for passing the fluid containing the target substance and a solid portion arranged regularly and capable of transmitting an electromagnetic wave, an electro-magnetic wave-projecting means for projecting the electromagnetic wave to the periodic structure, and a detecting means for measuring the magnetic wave emitted from the periodic structure to detect a change in periodic distribution of a refractive index. This sensor is highly sensitive in a small size.

Accuracy and sensitivity in the optical characterization of solids and solid materials are improved through the use of the interdependent features of: extending the photon energy range over which the metrology is performed to include a portion of the range up through 10 eV, in which, the higher photon energy of the light improves signal distinguishing ability; and providing a controlled ambient in the entire light path between the light source and a detector that prevents absorption and signal definiteness masking so as to sharpen the identifiability of the change parameters imparted into the reflected light. Combinations of specific devices and materials that for different types of ellipsometry are provided.

A gallery of seed profiles is constructed and the initial parameter values associated with the profiles are selected using manufacturing process knowledge of semiconductor devices. Manufacturing process knowledge may also be used to select the best seed profile and the best set of initial parameter values as the starting point of an optimization process whereby data associated with parameter values of the profile predicted by a model is compared to measured data in order to arrive at values of the parameters. Film layers over or under the periodic structure may also be taken into account. Different radiation parameters such as the reflectivities R_s, R_p and ellipsometric parameters may be used in measuring the diffracting structures and the associated films. Some of the radiation parameters may be more sensitive to a change in the parameter value of the profile or of the films then other radiation parameters. One or more radiation parameters that are more sensitive to such changes may be selected in the above-described optimization process to arrive at a more accurate measurement. The above-described techniques may be supplied to a track/stepper and etcher to control the lithographic and etching processes in order to compensate for any errors in the profile parameters.

PCT No. PCT/JP98/02567 Sec. 371 Date Jan. 13, 1999 Sec. 102(e) Date Jan. 13, 1999 PCT Filed Jun. 10, 1998 PCT Pub. No. WO98/57146 PCT Pub. Date Dec. 17, 1998Measurement light, which has been emitted from a Xe light source (20) and then linearly polarized by a polarizer (21), is made to be incident at a tilt angle on a region in a silicon substrate (11) with crystallinity disordered by the implantation of dopant ions. And the spectra of cos DELTA and tan psi are measured with a variation of the measurement light, where DELTA is a phase difference between respective components in p and s directions as to the light reflected as an elliptically-polarized ray, and psi is a ratio between the amplitudes of these components. By correlating in advance the spectral patterns of cos DELTA and so on with the thickness of an amorphous region through a destructive test or the like, or by paying special attention to characteristic parts of the patterns of cos DELTA and so on, the thickness or the degree of disordered crystallinity of the amorphous region is estimated. Also, since a variation in the thickness of the amorphous region can be identified based on a variation of cos DELTA before and after a heat treatment, a temperature of the heat treatment can be sensed based on the variation of the thickness. Thus, an evaluation method allowing for nondestructive estimation of the thickness and the degree of disorder of a region, having crystallinity disordered by implanting dopant ions into a semiconductor region at a high level, can be provided.

The present invention provides methods and apparatuses for accurate noninvasive determination of tissue properties. Some embodiments of the present invention comprise an optical sampler having an illumination subsystem, adapted to communicate light having a first polarization to a tissue surface; a collection subsystem, adapted to collect light having a second polarization communicated from the tissue after interaction with the tissue; wherein the first polarization is different from the second polarization. The difference in the polarizations can discourage collection of light specularly reflected from the tissue surface, and can encourage preferential collection of light that has interacted with a desired depth of penetration or path length distribution in the tissue. The different polarizations can, as examples, be linear polarizations with an angle between, or elliptical polarizations of different handedness.

A polarization lidar system capable of remotely identifying characteristics of atmospheric aerosol particles by transmitting a polarized beam of light and analyzing polarization characteristics of received backscatter is disclosed. The transmitter features high pulse energy to remotely identify aerosol particles with substantially one pulse. The transmitter employs a thin film plate polarizer and a Raman wavelength shifter to achieve eye-safe, single-plane linearly polarized energy. The transmit beam and receiver field of view are coaxial. The receiver employs a telescope, a collimating lens, and a beam splitter. The beam splitter splits the received backscatter into a single-plane polarized beam whose polarization plane is parallel to the plane of transmission and a single-plane polarized beam whose polarization plane is perpendicular to the plane of transmission. Each split beam is directed through separate focusing lenses onto separate detectors. The detector signals are amplified and processed to remotely determine atmospheric aerosol particle characteristics.

Disclosed is a liquid droplet recognition apparatus for detecting liquid droplets attached to a front surface of a transparent member. The apparatus includes an image pickup apparatus that picks up a vertically polarized light image and a horizontally polarized light image at the front surface of the transparent member from a side of a rear surface of the transparent member; and a signal processing unit that determines whether the liquid droplets are attached to the front surface of the transparent member based on a polarized-light image ratio composed of the vertically polarized light image and the horizontally polarized light image picked up by the image pickup apparatus.

An apparatus and method for recording spatially dependent intensity patterns of polarized light that is diffusely backscattered from highly scattering media are described. These intensity patterns can be used to differentiate different turbid media, such as polystyrene-sphere and biological-cell suspensions. Polarized light from a He-Ne laser ( lambda =543 nm) is focused onto the surface of the scattering medium, and a surface area of approximately 4x4 cm centered on the light input point is imaged through polarization analysis optics onto a CCD camera. A variety of intensity patterns may be observed by varying the polarization state of the incident laser light and changing the analyzer configuration to detect different polarization components of the backscattered light. Experimental results for polystyrene-sphere and Intralipid suspensions demonstrate that the radial and azimuthal variations of the observed pattern depend on the concentration, size, and anisotropy factor, g, of the particles constituting the scattering medium. Measurements performed on biological cell suspensions show that intensity patterns can be used to differentiate between suspensions of cancerous and non-cancerous cells. Introduction of the Mueller-matrix for diffusely backscattered light, permits the selection of a subset of measurements which comprehensively describes the optical properties of backscattering media.

A method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate an average degree of polarization, a weighted average degree of polarization, a degree of polarization map, a degree of polarization surface. Also, a method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate depolarization relative to a retardance axis and/or a diattentuation axis, and to calculate a ratio of diattenuation to polarizance or ratios of row and column magnitudes. Also, a method for retinal polarimetry, including a non-depolarizing light tube configured for insertion into the eye.