The invention relates to a non-intrusive
fast scanning identification method and
system for MEMS resonant frequency, and belongs to the technical field of MEMS device detection.The method comprises the steps that an extremely-low-power
broadband detection
signal is emitted, a high-sensitivity
receiver is used for capturing a weak
harmonic wave or
intermodulation response
signal generated by
coupling of the
signal and a target MEMS device mechanical structure, and the weak
harmonic wave or
intermodulation response signal is obtained; after amplification and
noise reduction preprocessing, a matched filtering or
correlation analysis algorithm is adopted to process a response signal, the resonant frequency of the target MEMS device is rapidly and accurately extracted under the extremely low signal-to-
noise ratio, and the whole recognition process does not interfere with normal work of the device. According to the method, a target device does not need to be contacted or interfered, the technical problems that a traditional MEMS resonant frequency identification method is high in invasiveness, low in signal-to-
noise ratio, poor in identification precision and low in identification efficiency are solved, and the method has the advantages of being non-invasive, rapid in identification, high in precision and wide in adaptability and is suitable for resonant
frequency detection scenes of various
MEMS sensors and resonators.