The invention relates to an electro-
optical modulator, a preparation method thereof and an electro-optical
chip. The electro-
optical modulator comprises a substrate, an
optical beam splitter, a first optical
waveguide, a second optical
waveguide, traveling wave electrodes and an electro-
optical film, the traveling wave electrodes comprise a first
signal electrode and a second
signal electrode, the first
signal electrode and the second signal electrode are sequentially arranged in the second direction, the first signal electrode and the second signal electrode form a differential electrode, and the first signal electrode and the second signal electrode are sequentially arranged in the second direction. The first signal electrode generates a first
electric field when transmitting a first
electric signal, the second signal electrode generates a second
electric field when transmitting a second
electric signal, the directions of the first
electric field and the second electric field are opposite, and the
refractive index of the electro-
optical film is changed under the action of the electric fields to realize electro-optical modulation; part of the electro-
optical film, the first optical
waveguide overlaps with the first electric field, and the other part of the electro-optical film overlaps with the second electric field. According to the invention, the differential driving of the electro-
optical modulator is realized based on the electro-optical film, and the anti-interference capability and the transmission distance of the electro-optical modulator are effectively improved.