The invention discloses an overlay deviation value correction method, electronic equipment and a computer readable storage medium. The method comprises the following steps of providing a wafer comprising a plurality of exposure areas, selecting a plurality of exposure areas, and determining a plurality of to-be-detected overlay identifiers from the selected exposure areas, calculating the image ofeach to-be-detected overlay identifier for multiple times to obtain a plurality of overlay deviation measurement values, calculating an average value and a standard deviation of the overlay deviationmeasurement value, and taking the average value and the standard deviation as an overlay deviation value and a measurement error value respectively, setting a weight in negative correlation with eachmeasurement error value according to the measurement error value, and performing weighted assignment correction on each overlay deviation value by utilizing each measurement error value and the set weight. According to the method, the average value and the standard deviation of the overlay deviation measurement value serve as the overlay deviation value and the measurement error value respectively, the overlay deviation is corrected based on the measurement error value, the influence of the measurement error is fully considered when the overlay correction parameter is calculated, and the overlay correction accuracy is improved.