532 results about "Optical surface" patented technology

The invention belongs to the technical field of film quality analysis and evaluation, and particularly relates to a flexible circuit board film pressing quality detection and analysis method and system. The method comprises the steps of generating a self-adaptive scanning path based on a design file and surface deformation data; performing multi-modal data acquisition and fusion along a path through optical surface scanning, ultrasonic tomography and an optical coherence tomography imaging assembly; potential defects are positioned, and size, shape, position and defect type probability values are quantized; judging the authenticity of the defect by adopting a three-stage mechanism of cross-modal probability comparison, physical characteristic logic verification and multi-frame time sequence verification; and performing weighted scoring on the real defect matching acceptance standard table, and performing disqualification marking or outputting a process optimization suggestion to the pressing equipment according to a scoring result. According to the invention, the imaging limitation of the transparent coating layer is broken through, the internal interface layering and the precise detection of the microbubbles are realized, and the closed-loop control from detection to production adjustment is formed.

The invention discloses an optical surface defect data detection method based on deep learning, and relates to the technical field of optical defect detection, and the method comprises the following steps: constructing an optical scattering physical model, inputting a collected optical surface image into the optical scattering physical model for multi-modal data synthesis, and generating multi-modal image data; constructing a deep learning feature extraction network, inputting multi-modal image data, and performing multi-scale feature fusion and enhancement through a bidirectional attention feedback mechanism to generate a deep feature map; performing spatial domain analysis on the depth feature map by using a deep learning region generation method, positioning coordinates of potential defect regions, and generating a candidate defect region coordinate set; through multi-modal data synthesis driven by an optical scattering physical model, the limitation of a single imaging mode is broken through, the scattering characteristics of defects under multi-physics field coupling are dynamically analyzed, the recognizable degree of weak defects in a complex scattering environment is enhanced, and the problem of defect missing detection is solved.

The invention relates to the technical field of titanium alloy bar detection, and discloses a titanium alloy bar quality detection system and method. The system comprises a multi-modal data acquisition module, a detection reference dynamic optimization module, a data standardization processing module, a multi-modal feature fusion module, an intelligent defect identification and evaluation module, a quality grade evaluation module and a quality detection report generation module. When the quality of the titanium alloy bar is detected, through a multi-mode nondestructive detection mechanism integrating ultrasonic detection data, optical surface detection data and eddy current electromagnetic detection data, all-dimensional defect information of the interior, the surface and the near surface of the bar is synchronously obtained, and complementation and cross validation of the multi-mode detection data are achieved; the problem of limitation of a single sensor detection visual angle is solved, the missed detection and misjudgment risks are reduced, and the comprehensiveness and reliability of a defect detection result are ensured.

The invention relates to the technical field of nano particle heterogeneous reaction kinetic research, in particular to a nano single particle reaction rate measuring system and method based on optical surface wave dark field imaging. The method comprises the following steps: preparing a nano single particle sample; the humidity of the environment where the nano single particles are located is adjusted; starting a heterogeneous reaction of the nano single particulate matter, performing in-situ dark field imaging on the nano single particulate matter in the reaction process, and collecting scattering hot spot imaging data under different reaction times and different humidity; and based on the acquired imaging data, the reaction rate of the nano single particulate matter is inversed in combination with a kinetic model. According to the invention, the defects in the existing nano-particle reaction rate measurement technology can be overcome, and the reaction rate of a single particle as low as 50 nanometers in the heterogeneous reaction process can be accurately measured and inverted under the high-humidity standard atmospheric pressure condition.

The invention relates to a multi-parameter estimation algorithm combining a disturbance quantification model and a rooting method in interference measurement. In order to solve the problems that in the prior art, the disturbance degree of a sequence is difficult to quantify, and harmonic key parameters are influenced by spectrum leakage, the invention provides the following innovative scheme: firstly, a sequence multi-classification measurement entropy quantification model is constructed, and quantitative evaluation of the signal noise degree is realized; secondly, through a Hankel matrix construction and rooting parameter estimation method, realizing accurate estimation of the harmonic frequency of the real-value signal; meanwhile, an amplitude correction algorithm based on window function characteristics is designed, and the signal sampling condition is effectively judged; and finally, through matrix weighting operation of a phase demodulation function, efficient reconstruction of an optical surface shape is realized, the problems of spectrum leakage and disturbance quantification in a traditional method are solved, and the method has relatively high measurement precision.

Disclosed is a method implemented by a computer for determining surfacing data to obtain a surface of a lens element, the surface of the lens element including: a refraction area having a first curvature; and multiple optical elements placed on at least part of the finished optical surface, each optical element having at least a second curvature.

The invention relates to the technical field of high-precision optical detection, in particular to a fixing assembly for installing a lens measuring instrument and the measuring instrument, and the fixing assembly comprises a rooting block which is used for being connected to the back surface of a lens in a gluing manner; the base is connected with the rooting block through a fastening assembly, the base is provided with at least three first contacts opposite to the back face of the lens and at least two second contacts opposite to the side face of the lens, and the fastening assembly is configured to be capable of generating first elastic force on the base in the first direction; and a second elastic force in a second direction. The rooting block is adhered to the back surface of the lens, so that a mechanical attachment point is prevented from being found on a vulnerable optical surface; meanwhile, the base is elastically connected with the rooting block through the fastening assembly instead of being rigidly and directly fixed, and the base elastically abuts against the back face and the side face of the lens through the first contact and the second contact respectively, so that self-adaptive accurate positioning of the base with the mirror face as the benchmark is achieved.

The invention discloses a flexible support design method for a spatial large-aperture reflector and a support structure, and relates to the field of quasi-kinematics support design of large-aperture spatial reflectors. According to the method, a titanium alloy material is selected, parameters such as the size of a connecting frame and the total height of a Bipod support are determined according to the quality of a reflector, the size of a glue spot and an installation space, a cross-shaped blade flexible element is designed to serve as a flexible knot, a three-dimensional parameterized model is established and imported into finite element analysis software, and the three-dimensional parameterized model is obtained. And optimizing structural parameters by taking the RMS value of the optical surface deformation of the reflector as a judgment standard, and finally carrying out dynamic verification such as modal analysis and random vibration analysis. According to the supporting structure, rigidity and flexibility are balanced through a flexible joint, thermal stress can be released, rigidity in the optical axis direction is guaranteed, the bending moment and the influence of machining and assembling errors are reduced, the supporting structure is suitable for reliable supporting of the spatial large-aperture silicon carbide reflector, and the positioning precision and the surface shape precision of the reflector during on-orbit work are effectively guaranteed.

The invention relates to a method for reducing long-term changes (ΔP) in a pass (P) of an optical surface (25a) of an optical element (Mi), preferably a mirror, in particular an EUV mirror. The method comprises processing the optical element (Mi), preferably a substrate (25) of the optical element (Mi), outside the optical surface (25a) to reduce surface damage, in particular to reduce surface roughness R. a, of the optical element (Mi) outside the optical surface (25a). During processing, material is preferably removed from the substrate (25) of the optical element (Mi) by brushing with at least one brush tool (27). The invention also relates to an optical element (Mi) comprising: an optical surface (25a), preferably for reflecting radiation, in particular for reflecting EUV radiation. The optical element (Mi), preferably a substrate (25) of the optical element (Mi) that is particularly transparent, has a surface roughness R on one or more partial surfaces outside the optical surface (25a). aof 5 µm or less, preferably of 3 µm or less, particularly preferably of 1.5 µm or less, and / or the partial surface or the multiple partial surfaces are transparent. The invention also relates to a semiconductor lithography system comprising at least one such optical element (Mi), which is preferably arranged in a projection optic (10).

The invention provides a multi-target adaptive optical tracking method and system for an unmanned intelligent turntable. The method comprises the following steps: acquiring a video stream and turntable attitude data on an unmanned intelligent turntable; carrying out scene understanding operation on the video stream, fusing the dynamic attention area and extracting spatial distribution information of a plurality of moving targets in a rotary table coordinate system; calculating an optical deformation parameter of the liquid lens, and driving the liquid lens to execute non-uniform optical curved surface adjustment, so that a focus area simultaneously covers a plurality of spatially dispersed moving targets; receiving distance data fed back by the distance measuring equipment, carrying out cross validation on the distance data and actual optical parameters of the adjusted liquid lens, and generating a cooperative calibration instruction when the deviation exceeds the tolerance; and synchronously updating the dynamic region of interest identification logic of scene understanding and an optical deformation parameter calculation strategy according to the instruction. According to the invention, the stability and spatial positioning precision of multi-moving-target tracking in a wide-area complex scene are improved.

In a method for the interferometric determination of the shape of a freeform optical surface of a test specimen using an interferometer, the specimen is successively positioned in different measurement positions. These positions include a nominal position and a multitude of non-nominal positions that deviate from it, each of which can be described by a change in position relative to the nominal position. An interferogram is recorded in each measurement position, and phase information derived from the interferogram is evaluated to determine the surface shape. An interferometer error tilt sensitivity is determined by means of position changes in the form of tilts. A shear of the surface form error is determined by means of position changes in the form of displacements. Through integration, the surface form error, and consequently the interferometer error, can be determined.

The invention relates to an optical component, in particular a mirror, comprising: at least one heating structure (25, 25a) that can be subjected to an electric current, in particular a resistance heating structure, for introducing heat into a material of the optical component. In one aspect of the invention, the heating structure (25a) and a further, adjacent heating structure (25b) have interlocking edge structures (30a, 30b), wherein a heating power density (1a) of the edge structures (30a) of the heating structure (25a) on a side (32b) of the edge structures (30a) of the heating structure (25a) facing the further heating structure (25b) is lower than on a side (32a) of the edge structures (30a) of the heating structure (25a) facing away from the further heating structure (25b).In another aspect of the invention, the at least one heating structure (25) extends substantially over the entire optical surface (27) of the optical component and has a locally varying electrical resistance (Ra(x,y)) which preferably approximates a basis function extending substantially over the entire optical surface (27), in particular a Zernike polynomial.

The invention discloses a ground large-aperture reflector composite support design method and a ground large-aperture reflector composite support structure. The ground large-aperture reflector composite support design method comprises the following steps: S1, determining the position of an adhesive point annular belt of a center support at a center hole of a lightweight primary mirror; s2, determining the position of a distribution circle supported by six points on the back of the primary mirror; s3, designing the size of a force unloading groove at the central support for releasing thermal stress; s4, designing the size and the installation depth of a universal flexible joint supported by six points, and realizing freedom decoupling; and S5, parametric modeling is carried out on the supporting structure, supporting parameters are optimized through finite element analysis, and it is ensured that the optical surface deformation RMS values of the primary mirror at the optical axis level and the 60-degree elevation angle are both not larger than 15 nm. The problem that in the prior art, when a large-aperture reflector is in the environment of large temperature change and large pose change, the optical surface is deformed due to the action of thermal stress and gravity, and the imaging quality is affected is effectively solved.

Methods, systems, and storage media for performing multi-user gaze tracking in a vehicle space using multi-surface optical reflections are disclosed. Implementations may: acquire face and eye region image data of a plurality of occupants within a field of view of at least one camera associated with a vehicle; evaluate reflected image quality thresholds; locate and match occupants within the vehicle space; and perform eye tracking for multiple occupants independently via reflected multi-view images provided to a deep learning model.

Method for producing an optical test element (19) for determining a fit defect of an optical surface (20). The method comprises the following steps: - Determining a CGH design (24) suitable for measuring the optical surface (20), - Generating a CGH auxiliary structure (25) corresponding to the CGH design (24) on an auxiliary substrate (30) using a direct-write lithography process, - Generating an image of the CGH auxiliary structure (25) on a final substrate (40) using a transfer lithography process, - Generating a CGH structure (50) corresponding to the CGH design (24) based on the generated image. The method offers the advantage that the auxiliary substrate can be produced with high precision using a standardized direct-write lithography system, regardless of the size of the optical test element.

An optical element includes a mirror array and an optical surface opposed to the mirror array. The mirror array includes a mirror group including a plurality of retroreflective mirrors arranged in an X direction, and a mirror group including a plurality of retroreflective mirrors arranged in the X direction. The mirror group and the mirror group are juxtaposed in a Y direction. The plurality of retroreflective mirrors of the mirror group extends along a W1 direction oblique to the optical surface. The plurality of retroreflective mirror of the mirror group extends along a W2 direction oblique to the optical surface. The mirror group and the mirror group overlap in part in a V1 direction.

Method for determining a state of at least one mirror (17-19, M1-M6) of a projection exposure system. The mirror (17-19, M1-M6) has a mirror body (38) and an optical surface (32) formed thereon that reflects EUV radiation or DUV radiation. The projection exposure system comprises a temperature control device designed to actively cool the at least one mirror (17-19, M1-M6) using a temperature control medium. The method comprises the following steps: - Operating the projection exposure system; - Active cooling of the mirror (17-19, M1-M6) using the temperature control medium; - Determining a quantity of heat absorbed by the temperature control medium during active cooling of the mirror (17-19, M1-M6); - Deriving a state of the mirror (17-19, M1-M6) based on the determined amount of heat. Using this method, an individual and independent measurement value can be recorded for the mirror, which allows a reliable assessment of the condition of the mirror.

To manufacture an optical assembly (27) with at least two adjacent optical components (17a, 18, 17b) in a useful light beam path, a basic optical assembly is first prepared. Within this assembly, the opposing optical surfaces of the two adjacent components (17a, 18, 17b) are initially in direct contact with each other. A gap with a finite slit width is then defined between the opposing optical surfaces of the two adjacent components (17a, 18, 17b). A gap (d) then exists between the two adjacent components (17a, 18, 17b). P , d S ). This results in a manufacturing process that produces an optical assembly which in turn ensures a precisely defined light guidance through the optical neighboring components of the optical assembly.

An anti-peep light source module and an anti-peep display device having an anti-peep function and good image quality are provided. The anti-peep light source module includes a light guide plate, a first light emitting element, a second light emitting element, a plurality of optical microstructures and a first surface. The light guide plate has a first light incident surface and a second light incident surface. Each of the optical microstructures has a first optical surface facing the first light incident surface and a second optical surface facing the second light incident surface. A magnitude of a first included angle between the first optical surface and the first surface and a magnitude of a second included angle between the second optical surface and the first surface gradually change as getting farther away from the first surface.

An optical subsystem for use in a display system or an imaging system comprises a plurality of reflective surfaces collectively arranged to provide variable control of device-internal path lengths of light coming to an imaging sensor or traveling a path to an eye of a viewer. The optical subsystem can be used to provide multiple images concurrently at different apparent depths as perceived by the user.

An optical component, a virtual image display device, and a measurement method for the optical component. While measuring multiple optical surfaces, the relative tilt and arrangement relationships between the multiple optical surfaces are accurately determined. The optical component (10, 210) has multiple effective optical surfaces (11a, 11b, 11c), and is accompanied by multiple measurement reference components (16, 17) each having a reference related to the arrangement of the multiple effective optical surfaces (11a, 11b, 11c). In this case, the relative positional relationships of the effective optical surfaces (11a, 11b, 11c) can be determined, and the optical performance of the optical component (10, 210) can be accurately evaluated.

The invention relates to a method for reducing a long-term change (∆P) in a form (P) of an optical surface (25a) of an optical element (Mi), preferably a mirror, in particular an EUV mirror. The method comprises processing the optical element (Mi), preferably an in particular transparent substrate (25) of the optical element (Mi), outside the optical surface (25a) in order to reduce surface damage, in particular in order to reduce a surface roughness Ra, of the optical element (Mi) outside the optical surface (25a). During processing, material is removed from the substrate (25) of the optical element (Mi) preferably by brushing by means of at least one brushing tool (27). The invention also relates to an optical element (Mi), comprising: an optical surface (25a), preferably for reflecting radiation, in particular for reflecting EUV radiation. The optical element (Mi), preferably an in particular transparent substrate (25) of the optical element (Mi), has a surface roughness Ra of 5 µm or less, preferably of 3 µm or less, particularly preferably of 1.5 µm or less, on a partial surface or on multiple partial surfaces outside the optical surface (25a) and / or the partial surface or the multiple partial surfaces are transparent. The invention also relates to an system for semiconductor lithography, which has at least one optical element (Mi) of this type, which is preferably arranged in a projection optical unit (10).

The invention provides a volume 3D printing optical element manufacturing method based on multi-dimensional spin-coating surface modification, which comprises the following steps: preparing a photosensitive resin precursor solution containing a low-concentration photoinitiator, and performing exposure molding through a volume 3D printing technology to obtain a semi-cured initial blank; preparing a spin-coating liquid containing a high-concentration photoinitiator and an optional functional additive, and coating the surface of the primary blank with the spin-coating liquid through a precise spin-coating process; and finally, light curing is performed in a vacuum environment, so that the liquid film is completely crosslinked and chemically bonded with the surface of the initial blank. The high-concentration initiator spin-coating layer is used for overcoming the oxygen inhibition effect, a traditional solvent cleaning process is replaced, and the Ralt is obtained; the high-smoothness optical surface with the thickness of 5 nm is obtained, the original geometric accuracy of printing is kept, meanwhile, spin coating liquid is used as a universal carrier, full-color coloring, gradient color and multi-layer function superposition of the surface of an optical element are achieved, and the application range of volume printing in the optical field is greatly expanded.

Provided is a light scanning apparatus wherein each of optical surfaces of an imaging optical element includes an effective portion on which a light flux traveling toward an effective region of a scanned surface is incident, and two non-effective portions provided on both sides in main scanning direction of effective portion, wherein, when each of a change in a sagittal line tilt amount and a change in a sagittal line curvature in main scanning direction on at least one of optical surfaces is represented by a function, at least one of functions is continuous and is not infinitely differentiable at a predetermined position on each of two non-effective portions, and wherein, with respect to at least one of sagittal line tilt amount and sagittal line curvature, an absolute value at a first end of non-effective portion on a side opposite to effective portion is smaller than that at predetermined position.

The invention relates to the technical field of head-up display, in particular to a stray light blocking structure, a design method of the stray light blocking structure and a head-up display device. The stray light blocking structure comprises a plurality of blocking units, and the blocking units are arranged along an optical surface array of an imaging component of the head-up display device so as to block non-imaging light in the head-up display device. Wherein the blocking unit is provided with opposite end faces and side faces surrounding the end faces, the side faces are not parallel to non-imaging light rays in the head-up display device, and the side faces are used for absorbing the non-imaging light rays projected to the side faces. The stray light blocking structure can restrain stray light from being formed, and the display quality of the head-up display device is improved.

A method of designing a wide-angle optical system having at least one free-form optical surface without rotational symmetry to create a custom 2D object-image mapping. The method is based on iteratively adjusting the shape of the at least one free-form optical 2D surface to have the desired precise 2D object-image mapping, and then adjusting the surface of the optical element to meet other desired optical specifications. The iterative method is applied until the desired 2D object-image mapping and other desired optical specifications are achieved.

The application discloses a three-freedom-degree large-stroke fast-tool-servo device, which comprises a workbench, a voice coil motor, a Z-direction displacement transmission mechanism, a three-axis connecting mechanism, an X-direction driving platform, a Y-direction driving platform, a tool holder and a tool. The three-axis connecting mechanism comprises a three-axis connecting plate and a three-axis connecting frame, and the three-axis connecting plate is connected with the three-axis connecting frame through X-axis and Y-axis flexible hinges around the three-axis connecting plate. The flexible hinges are provided with Z-axis flexible hinge points. The double-axis flexible hinges are provided with at least one X-axis flexible hinge point and one Y-axis flexible hinge point. The Z-direction displacement transmission mechanism, the three-axis connecting mechanism and the driver connecting rod are designed in an integrated mode. The piezoelectric ceramic driver is adopted. The three-freedom-degree active cutting of the tool can be realized, the large-stroke output capacity is achieved, the machining process of a complex optical surface can be efficiently completed, the displacement errors in multiple directions can be compensated, and the cutting force disturbance problem is solved.

The invention relates to the technical field of optical precision machining, in particular to a curvature self-adaptive curved surface fitting method and system in optical element polishing, and the method comprises the steps: obtaining a material height difference removal matrix based on interference measurement data before and after polishing of an optical element; traversing the height difference matrix by using a sliding window mode, calculating a Hessian matrix eigenvalue in a local area, forming a curvature sensitivity index (CSI), dividing an optical surface area into a plane area, a gradual change area and a high curvature area, and setting curved surface fitting parameters in the areas respectively; performing curved surface fitting on the region by adopting a weighted least square method to obtain a continuous surface model, and performing adaptive numerical integration calculation on the continuous surface to obtain a material removal volume; according to the method, the process control requirement of high-precision optical manufacturing can be met, the calculation precision is high, the calculation precision and the calculation efficiency can be maximized, the global efficiency is high, the capability of capturing local features can be achieved, the method can be integrated into an existing quality control system, and process decision making is facilitated.

There was a need for optical components or elements that would be useful in miniaturizing spectroscopic devices. [Solution] An optical component made of a solid material that transmits light of a wavelength to be used, characterized in that a diffraction grating consisting of a plurality of grooves extending along a second direction is provided on a first optical surface into which the light of the wavelength to be used is incident, and a plurality of lenses arranged along the second direction are provided on a second optical surface into which the light of the wavelength to be used that was incident from the first optical surface is emitted.

This invention provides a directly coupled stacked structure for improved image quality in optical devices. [Solution] Optical surfaces are planarized and plasma activated to laminate them together, and then a direct bond is formed between the two surfaces without adhesive or an adhesive layer. This process provides an improved optical element with higher image brightness, lower light scattering, better resolution, and higher image fidelity. Direct bonding also provides a heat-resistant interface that can withstand much higher temperatures than conventional optical adhesives. Exemplary processes can be used to manufacture many types of improved optical components such as improved laminated lenses, mirrors, beam splitters, collimators, prism systems, optical conduits, and specular waveguides for smart glasses and head-up displays (HUDs), which provide better image quality and elimination of dark lines of sight that are apparent to the human observer when conventional adhesives are used in conventional lamination.