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327 results about "Optical surface" patented technology

Nanometer single particle reaction rate measuring system and method based on optical surface wave dark field imaging

The invention relates to the technical field of nano particle heterogeneous reaction kinetic research, in particular to a nano single particle reaction rate measuring system and method based on optical surface wave dark field imaging. The method comprises the following steps: preparing a nano single particle sample; the humidity of the environment where the nano single particles are located is adjusted; starting a heterogeneous reaction of the nano single particulate matter, performing in-situ dark field imaging on the nano single particulate matter in the reaction process, and collecting scattering hot spot imaging data under different reaction times and different humidity; and based on the acquired imaging data, the reaction rate of the nano single particulate matter is inversed in combination with a kinetic model. According to the invention, the defects in the existing nano-particle reaction rate measurement technology can be overcome, and the reaction rate of a single particle as low as 50 nanometers in the heterogeneous reaction process can be accurately measured and inverted under the high-humidity standard atmospheric pressure condition.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Fixing assembly for installing lens measuring instrument and measuring instrument

The invention relates to the technical field of high-precision optical detection, in particular to a fixing assembly for installing a lens measuring instrument and the measuring instrument, and the fixing assembly comprises a rooting block which is used for being connected to the back surface of a lens in a gluing manner; the base is connected with the rooting block through a fastening assembly, the base is provided with at least three first contacts opposite to the back face of the lens and at least two second contacts opposite to the side face of the lens, and the fastening assembly is configured to be capable of generating first elastic force on the base in the first direction; and a second elastic force in a second direction. The rooting block is adhered to the back surface of the lens, so that a mechanical attachment point is prevented from being found on a vulnerable optical surface; meanwhile, the base is elastically connected with the rooting block through the fastening assembly instead of being rigidly and directly fixed, and the base elastically abuts against the back face and the side face of the lens through the first contact and the second contact respectively, so that self-adaptive accurate positioning of the base with the mirror face as the benchmark is achieved.
Owner:ANHUI JIANXING TECH CO LTD

Method for reducing long-term changes in a pass, optical element and system of semiconductor technology

The invention relates to a method for reducing long-term changes (ΔP) in a pass (P) of an optical surface (25a) of an optical element (Mi), preferably a mirror, in particular an EUV mirror. The method comprises processing the optical element (Mi), preferably a substrate (25) of the optical element (Mi), outside the optical surface (25a) to reduce surface damage, in particular to reduce surface roughness R. a, of the optical element (Mi) outside the optical surface (25a). During processing, material is preferably removed from the substrate (25) of the optical element (Mi) by brushing with at least one brush tool (27). The invention also relates to an optical element (Mi) comprising: an optical surface (25a), preferably for reflecting radiation, in particular for reflecting EUV radiation. The optical element (Mi), preferably a substrate (25) of the optical element (Mi) that is particularly transparent, has a surface roughness R on one or more partial surfaces outside the optical surface (25a). aof 5 µm or less, preferably of 3 µm or less, particularly preferably of 1.5 µm or less, and / or the partial surface or the multiple partial surfaces are transparent. The invention also relates to a semiconductor lithography system comprising at least one such optical element (Mi), which is preferably arranged in a projection optic (10).
Owner:CARL ZEISS SMT GMBH

Interferometric measurement method

PendingDE102024135315A1Using optical meansInterferomeOptical surface
In a method for the interferometric determination of the shape of a freeform optical surface of a test specimen using an interferometer, the specimen is successively positioned in different measurement positions. These positions include a nominal position and a multitude of non-nominal positions that deviate from it, each of which can be described by a change in position relative to the nominal position. An interferogram is recorded in each measurement position, and phase information derived from the interferogram is evaluated to determine the surface shape. An interferometer error tilt sensitivity is determined by means of position changes in the form of tilts. A shear of the surface form error is determined by means of position changes in the form of displacements. Through integration, the surface form error, and consequently the interferometer error, can be determined.
Owner:CARL ZEISS SMT GMBH

Optical component and system of semiconductor technology with heating structures

The invention relates to an optical component, in particular a mirror, comprising: at least one heating structure (25, 25a) that can be subjected to an electric current, in particular a resistance heating structure, for introducing heat into a material of the optical component. In one aspect of the invention, the heating structure (25a) and a further, adjacent heating structure (25b) have interlocking edge structures (30a, 30b), wherein a heating power density (1a) of the edge structures (30a) of the heating structure (25a) on a side (32b) of the edge structures (30a) of the heating structure (25a) facing the further heating structure (25b) is lower than on a side (32a) of the edge structures (30a) of the heating structure (25a) facing away from the further heating structure (25b).In another aspect of the invention, the at least one heating structure (25) extends substantially over the entire optical surface (27) of the optical component and has a locally varying electrical resistance (Ra(x,y)) which preferably approximates a basis function extending substantially over the entire optical surface (27), in particular a Zernike polynomial.
Owner:CARL ZEISS SMT GMBH

Method for manufacturing an optical test element for determining a fit defect of an optical surface

Method for producing an optical test element (19) for determining a fit defect of an optical surface (20). The method comprises the following steps: - Determining a CGH design (24) suitable for measuring the optical surface (20), - Generating a CGH auxiliary structure (25) corresponding to the CGH design (24) on an auxiliary substrate (30) using a direct-write lithography process, - Generating an image of the CGH auxiliary structure (25) on a final substrate (40) using a transfer lithography process, - Generating a CGH structure (50) corresponding to the CGH design (24) based on the generated image. The method offers the advantage that the auxiliary substrate can be produced with high precision using a standardized direct-write lithography system, regardless of the size of the optical test element.
Owner:CARL ZEISS SMT GMBH

Method for manufacturing an optical assembly

To manufacture an optical assembly (27) with at least two adjacent optical components (17a, 18, 17b) in a useful light beam path, a basic optical assembly is first prepared. Within this assembly, the opposing optical surfaces of the two adjacent components (17a, 18, 17b) are initially in direct contact with each other. A gap with a finite slit width is then defined between the opposing optical surfaces of the two adjacent components (17a, 18, 17b). A gap (d) then exists between the two adjacent components (17a, 18, 17b). P , d S ). This results in a manufacturing process that produces an optical assembly which in turn ensures a precisely defined light guidance through the optical neighboring components of the optical assembly.
Owner:CARL ZEISS SMT GMBH

Anti-peep light source module and anti-peep display device

An anti-peep light source module and an anti-peep display device having an anti-peep function and good image quality are provided. The anti-peep light source module includes a light guide plate, a first light emitting element, a second light emitting element, a plurality of optical microstructures and a first surface. The light guide plate has a first light incident surface and a second light incident surface. Each of the optical microstructures has a first optical surface facing the first light incident surface and a second optical surface facing the second light incident surface. A magnitude of a first included angle between the first optical surface and the first surface and a magnitude of a second included angle between the second optical surface and the first surface gradually change as getting farther away from the first surface.
Owner:CHAMP VISION DISPLAY INC +1

Optical member, virtual image display device, and method for measuring optical member

An optical component, a virtual image display device, and a measurement method for the optical component. While measuring multiple optical surfaces, the relative tilt and arrangement relationships between the multiple optical surfaces are accurately determined. The optical component (10, 210) has multiple effective optical surfaces (11a, 11b, 11c), and is accompanied by multiple measurement reference components (16, 17) each having a reference related to the arrangement of the multiple effective optical surfaces (11a, 11b, 11c). In this case, the relative positional relationships of the effective optical surfaces (11a, 11b, 11c) can be determined, and the optical performance of the optical component (10, 210) can be accurately evaluated.
Owner:SEIKO EPSON CORP

Method for reducing a long-term change in a form, optical element and system for semiconductor technology

The invention relates to a method for reducing a long-term change (∆P) in a form (P) of an optical surface (25a) of an optical element (Mi), preferably a mirror, in particular an EUV mirror. The method comprises processing the optical element (Mi), preferably an in particular transparent substrate (25) of the optical element (Mi), outside the optical surface (25a) in order to reduce surface damage, in particular in order to reduce a surface roughness Ra, of the optical element (Mi) outside the optical surface (25a). During processing, material is removed from the substrate (25) of the optical element (Mi) preferably by brushing by means of at least one brushing tool (27). The invention also relates to an optical element (Mi), comprising: an optical surface (25a), preferably for reflecting radiation, in particular for reflecting EUV radiation. The optical element (Mi), preferably an in particular transparent substrate (25) of the optical element (Mi), has a surface roughness Ra of 5 µm or less, preferably of 3 µm or less, particularly preferably of 1.5 µm or less, on a partial surface or on multiple partial surfaces outside the optical surface (25a) and / or the partial surface or the multiple partial surfaces are transparent. The invention also relates to an system for semiconductor lithography, which has at least one optical element (Mi) of this type, which is preferably arranged in a projection optical unit (10).
Owner:CARL ZEISS SMT GMBH

Volume 3D printing optical element manufacturing method based on multi-dimensional spin-coating surface modification

The invention provides a volume 3D printing optical element manufacturing method based on multi-dimensional spin-coating surface modification, which comprises the following steps: preparing a photosensitive resin precursor solution containing a low-concentration photoinitiator, and performing exposure molding through a volume 3D printing technology to obtain a semi-cured initial blank; preparing a spin-coating liquid containing a high-concentration photoinitiator and an optional functional additive, and coating the surface of the primary blank with the spin-coating liquid through a precise spin-coating process; and finally, light curing is performed in a vacuum environment, so that the liquid film is completely crosslinked and chemically bonded with the surface of the initial blank. The high-concentration initiator spin-coating layer is used for overcoming the oxygen inhibition effect, a traditional solvent cleaning process is replaced, and the Ralt is obtained; the high-smoothness optical surface with the thickness of 5 nm is obtained, the original geometric accuracy of printing is kept, meanwhile, spin coating liquid is used as a universal carrier, full-color coloring, gradient color and multi-layer function superposition of the surface of an optical element are achieved, and the application range of volume printing in the optical field is greatly expanded.
Owner:JIANGNAN UNIV

Light scanning apparatus and image forming apparatus

Provided is a light scanning apparatus wherein each of optical surfaces of an imaging optical element includes an effective portion on which a light flux traveling toward an effective region of a scanned surface is incident, and two non-effective portions provided on both sides in main scanning direction of effective portion, wherein, when each of a change in a sagittal line tilt amount and a change in a sagittal line curvature in main scanning direction on at least one of optical surfaces is represented by a function, at least one of functions is continuous and is not infinitely differentiable at a predetermined position on each of two non-effective portions, and wherein, with respect to at least one of sagittal line tilt amount and sagittal line curvature, an absolute value at a first end of non-effective portion on a side opposite to effective portion is smaller than that at predetermined position.
Owner:CANON KK

Wide-angle lens with free-form curved surface

A method of designing a wide-angle optical system having at least one free-form optical surface without rotational symmetry to create a custom 2D object-image mapping. The method is based on iteratively adjusting the shape of the at least one free-form optical 2D surface to have the desired precise 2D object-image mapping, and then adjusting the surface of the optical element to meet other desired optical specifications. The iterative method is applied until the desired 2D object-image mapping and other desired optical specifications are achieved.
Owner:YIMEI LANDSCAPE CO

Three-degree-of-freedom large-stroke fast tool servo device and curved surface machining method thereof

The application discloses a three-freedom-degree large-stroke fast-tool-servo device, which comprises a workbench, a voice coil motor, a Z-direction displacement transmission mechanism, a three-axis connecting mechanism, an X-direction driving platform, a Y-direction driving platform, a tool holder and a tool. The three-axis connecting mechanism comprises a three-axis connecting plate and a three-axis connecting frame, and the three-axis connecting plate is connected with the three-axis connecting frame through X-axis and Y-axis flexible hinges around the three-axis connecting plate. The flexible hinges are provided with Z-axis flexible hinge points. The double-axis flexible hinges are provided with at least one X-axis flexible hinge point and one Y-axis flexible hinge point. The Z-direction displacement transmission mechanism, the three-axis connecting mechanism and the driver connecting rod are designed in an integrated mode. The piezoelectric ceramic driver is adopted. The three-freedom-degree active cutting of the tool can be realized, the large-stroke output capacity is achieved, the machining process of a complex optical surface can be efficiently completed, the displacement errors in multiple directions can be compensated, and the cutting force disturbance problem is solved.
Owner:JILIN UNIVERSITY

Curvature self-adaptive curved surface fitting method and system in optical element polishing

The invention relates to the technical field of optical precision machining, in particular to a curvature self-adaptive curved surface fitting method and system in optical element polishing, and the method comprises the steps: obtaining a material height difference removal matrix based on interference measurement data before and after polishing of an optical element; traversing the height difference matrix by using a sliding window mode, calculating a Hessian matrix eigenvalue in a local area, forming a curvature sensitivity index (CSI), dividing an optical surface area into a plane area, a gradual change area and a high curvature area, and setting curved surface fitting parameters in the areas respectively; performing curved surface fitting on the region by adopting a weighted least square method to obtain a continuous surface model, and performing adaptive numerical integration calculation on the continuous surface to obtain a material removal volume; according to the method, the process control requirement of high-precision optical manufacturing can be met, the calculation precision is high, the calculation precision and the calculation efficiency can be maximized, the global efficiency is high, the capability of capturing local features can be achieved, the method can be integrated into an existing quality control system, and process decision making is facilitated.
Owner:SHANGHAI YUDI PHOTOELECTRIC TECH CO LTD

Optical components, methods for manufacturing optical components

There was a need for optical components or elements that would be useful in miniaturizing spectroscopic devices. [Solution] An optical component made of a solid material that transmits light of a wavelength to be used, characterized in that a diffraction grating consisting of a plurality of grooves extending along a second direction is provided on a first optical surface into which the light of the wavelength to be used is incident, and a plurality of lenses arranged along the second direction are provided on a second optical surface into which the light of the wavelength to be used that was incident from the first optical surface is emitted.
Owner:CANON KK

Direct coupling stacking for improved image quality in optical devices

PendingJP2026062761APrismsMirrorsOptical bondingBeam splitter
This invention provides a directly coupled stacked structure for improved image quality in optical devices. [Solution] Optical surfaces are planarized and plasma activated to laminate them together, and then a direct bond is formed between the two surfaces without adhesive or an adhesive layer. This process provides an improved optical element with higher image brightness, lower light scattering, better resolution, and higher image fidelity. Direct bonding also provides a heat-resistant interface that can withstand much higher temperatures than conventional optical adhesives. Exemplary processes can be used to manufacture many types of improved optical components such as improved laminated lenses, mirrors, beam splitters, collimators, prism systems, optical conduits, and specular waveguides for smart glasses and head-up displays (HUDs), which provide better image quality and elimination of dark lines of sight that are apparent to the human observer when conventional adhesives are used in conventional lamination.
Owner:ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC

Protection of optical devices during operation

An apparatus for protecting an optical device during operation is disclosed. The apparatus includes a receiving seat configured to receive an optical device, the receiving seat having an optical surface that is substantially rotationally symmetric about an axis of symmetry, where the optical surface extends non-orthogonally with respect to the axis of symmetry to radially enclose the optical device when the optical device is received in the receiving seat; a seal including an engagement edge substantially complementarily shaped with the optical surface, the engagement edge remaining in engagement with the optical surface to seal against the optical surface, where the seal forms a continuous ring on the receiving seat and includes a scraping portion extending non-orthogonally with respect to the axis of symmetry along the optical surface; and an actuator coupled between the receiving seat and the sealing member, the actuator configured to drive relative rotation between the receiving seat and the sealing member about the axis of symmetry to cause the scraping portion to slide along the optical surface and scrape dirt from the optical surface.
Owner:EXCELLENT SENSING TECH CO

Miniaturized three-mode compound detection optical system

PendingCN122283745ALaser lightMillimetre wave
This invention belongs to the field of target detection technology, and particularly relates to a miniaturized three-mode composite detection optical system. Target light rays are transmitted through a radome and then incident on a primary mirror. The primary mirror reflects the target light rays onto a secondary mirror. A dichroic film is coated on the surface of the secondary mirror closest to the primary mirror, separating the target light rays into laser and infrared rays. The laser light rays sequentially pass through the optical surface of the secondary mirror closest to the radome, a first lens, a second lens, and a filter to reach the photosensitive surface of a laser four-quadrant detector. The infrared light rays sequentially pass through a first infrared lens, a second infrared lens, and a third infrared lens to reach an infrared detector. Millimeter-wave signals emitted by a millimeter-wave waveguide slotted array radar are radiated to the target sequentially through the primary mirror and the radome. The echo signals reflected by the target are transmitted through the radome and the primary mirror sequentially before reaching the millimeter-wave waveguide slotted array radar. This invention can reduce the system length and volume, and expand the rotation angle of the servo frame within a limited space.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Splicing aspheric surface characterization method based on CGH lens zero position compensation detection light path

The present application relates to the technical field of optical aspheric surface, especially refers to a kind of splicing aspheric surface characterization method based on CGH lens zero position compensation detection optical path, with the detection of aspheric surface as the guidance, based on zero position compensation detection principle, according to ray tracing method, Snell's law, diffraction principle and equal optical path principle, using the parameters required by the zero position compensation detection system of interferometer incident wave front as plane wave, compensator as single CGH lens and diffraction surface as binary optical surface 3 or binary optical surface 4 to characterize aspheric surface surface shape, and according to the aspheric surface type defined by the characterization method, it is called zero position splicing aspheric surface.According to the splicing aspheric surface characterization method, the measurement scheme can be determined in the design stage through the mathematical description of splicing aspheric surface, which avoids the influence of stray light and projection distortion of CGH detection, reduces the detection difficulty of splicing aspheric surface surface shape, and realizes the function of zero position splicing aspheric surface design.
Owner:SUZHOU UNIV

Light-emitting structure, vehicle lamp and vehicle

The utility model provides a light-emitting structure, a vehicle lamp and a vehicle. The light-emitting structure comprises a light-emitting part, a thick-wall light guide body and a light inlet body. The light-emitting part comprises a first light-emitting group and a second light-emitting group comprising at least two second light-emitting lamps which are distributed at intervals in the first direction. The thick-wall light guide body is provided with an optical surface and a light emitting surface. The light inlet body is provided with a light inlet face, the light inlet face comprises a reflection area extending in the first direction, and the reflection area is obliquely arranged towards the second light-emitting set and used for receiving the second light emitted by the second light-emitting set and reflecting the second light to the optical face so that the second light can enter the thick-wall light guide body through the optical face. According to the embodiment of the invention, the reflecting region is designed to be inclined towards the second light-emitting group, so that the incident angle of more second light rays reaching the reflecting region is greater than the critical angle, total reflection can be generated at the reflecting region, and the light loss is reduced. The extension direction of the reflection area is consistent with the distribution direction of the second light-emitting lamps in the second light-emitting group, so that the reflection area can receive second light rays emitted by all the second light-emitting lamps.
Owner:MIND ELECTRONICS APPLIANCE CO LTD

Implantable APD implant for treating presbyopia

The invention relates to the technical field of ophthalmology optics, and discloses an implantable APD implant for treating presbyopia, and the method comprises the steps: carrying out the focal power mapping of a far-sight diopter component in a target optical parameter, obtaining the basic refraction surface type data, and carrying out the layout of a near-sight diopter component annular structure, and obtaining the diffraction phase structure data; carrying out integrated aberration balance on the two kinds of data to obtain a composite optical surface type data set; converting the phase variation in the composite optical surface type data set into an initial step height by combining a lens material and an environmental medium optical constant; obtaining diffraction structure morphology parameters based on material dispersion attribute optimization; constructing a digital processing map by taking the geometric position of the surface as a processing node and taking a topology and depth evolution relationship as a processing edge; performing microstructure construction on the surface of the optical polymer substrate according to the digital processing atlas to obtain an APD implant; according to the invention, the APD implantation processing efficiency and the optical adaptability efficiency can be improved.
Owner:SHANGHAI JINGWEIER MEDICAL TECHNOLOGY CO

Method for cooperatively detecting curvature radius and surface shape error of toroidal optical element

The invention discloses a method for cooperatively detecting the curvature radius and the surface shape error of a toroidal optical element. The method comprises the following steps: S1, determining the position of a CGH compensator relative to a laser plane wave interferometer; s2, determining the position of the ring surface optical element and acquiring curvature radius data; and S3, performing zero position measurement to obtain surface shape error data of the optical surface of the ring surface optical element. The method for cooperatively detecting the curvature radius and the surface shape error of the toroidal optical element has the advantages of being few in steps, ingenious in design, capable of cooperatively detecting the curvature radius and the surface shape error of the toroidal optical element and the like.
Owner:NAT UNIV OF DEFENSE TECH

An optical imaging system, camera module and electronic device

The application relates to the field of camera technology, in particular to an optical imaging system, a camera module and electronic equipment. The optical imaging system comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a filter arranged in sequence from an object side to an image side along an optical axis. The object side surface of the first lens is a convex surface, and the object side surfaces of the second to sixth lenses are all concave surfaces. One optical surface of the filter is a binary surface. Incident light passes through the first to sixth lenses in sequence, is deflected by the binary surface, and then exits to an imaging surface adjacent to the image side surface of the filter. The optical imaging system satisfies the relationship TTL / ImgH*FOV= or TTL / ImgH*FOV=. TTL is the total length of the optical imaging system, ImgH is the image height of the optical imaging system, and FOV is the field of view of the optical imaging system. The optical system provided by the embodiment improves the imaging quality of the lens module and meets the requirements of simplification and thinning design of the lens module.
Owner:KUNSHAN Q TECH CO LTD

Computer system of composite stripe multi-mode imaging model based on parallel single pixel

PendingCN121711580AUsing optical means3D-image renderingMultiplexingDirect illumination
The invention discloses a computer system of a composite stripe multi-mode imaging model based on parallel single pixels. The computer system comprises a control unit, a projector and a color industrial camera, the control unit performs multi-modal imaging through the following method: constructing at least one stripe pattern with a specified frequency, and synthesizing the stripe patterns into an RGB composite stripe pattern; collecting a color composite image modulated by the surface of the target object; acquiring three-dimensional depth information of the target object; reconstructing a direct illumination texture map of the scene; the scattered field distribution of the scene is modeled and reconstructed; and based on the three-dimensional depth information, the direct illumination texture map information and the scattered field distribution information, a final multi-modal imaging result is obtained. The sampling efficiency is remarkably improved through spectrum channel multiplexing, the imaging interference problem of a complex optical surface is effectively solved, and the method is suitable for synchronous high-precision measurement of geometric and physical attributes in a dynamic scene.
Owner:GUANGDONG UNIV OF TECH

Method and system for producing a colored optical coating

Methods and systems for producing optical constructions on optical substrates, one such method comprising: (a) microvalving droplets of a dye-containing liquid formulation onto an optical surface of the optical substrate to form a wet continuous layer; and (b) treating the wet layer to produce a continuous, dry, dye-containing layer on the optical surface, wherein the optical surface is a curved surface, and wherein the optical surface is a polymeric surface.
Owner:FLO OPTICS LTD

Tma telescope having two optical channels

The invention relates to a three-mirror anastigmat telescope, comprising at least a primary mirror (1), a secondary mirror (2) positioned in front of the primary mirror (1) such that the primary and secondary mirrors have optical surfaces (1.1, 2.1) opposite one another, a tertiary mirror (3) having an optical surface (3.1) opposite the optical surface (2.1) of the secondary mirror (2), and a first optronic sensor (10) positioned opposite the tertiary mirror (3). The telescope comprises a second optronic sensor (20) positioned behind the secondary mirror (2) and the optical surface of the secondary mirror (2.1) has a dichroic treatment (2') intended to separate an incident luminous flux reflected by the primary mirror (1) into a first luminous flux reflected towards the first optronic sensor (10) via the tertiary mirror (3) and a second luminous flux transmitted to the second optronic sensor (20), the first luminous flux and the second luminous flux being in different spectral bands and the secondary mirror (2) being transparent to the spectral band of the second luminous flux.
Owner:SAFRAN REOSC

Optical element, lens device, image pickup device, and method for identifying optical element

The invention discloses an optical element, a lens device, an image pickup device, and a method for identifying the optical element. An optical element includes a region satisfying the inequality 50 nm < = PV < = 1000 nm, where PV represents a PV value, which is a difference between a maximum value and a minimum value of [Delta] f ([theta]) obtained by removing a primary symmetric component and a secondary symmetric component about an optical axis from f ([theta]), wherein f ([theta]) represents a position of the optical surface in the optical axis direction on a circumference at a first radius of 60% or more and 100% or less of the optical effective diameter with respect to a position [theta] in the rotation direction about the optical axis.
Owner:CANON KK

Semiconductor technology system and methods for inspecting an optical surface

UndeterminedDE102024139070A1Reflective surface testingOptically investigating flaws/contaminationCatoptricsLight beam
The invention relates to a semiconductor technology system, in particular an EUV lithography system, comprising: a housing (25) in which a plurality of preferably reflective optical elements (M1, M2, ...) are arranged in a beam path (33) of the semiconductor technology system, and an inspection device, in particular a camera (30) which has an imaging optic (31) for imaging at least a partial area (T1, T2, ...) of an optical surface (M1', M2', ...) of at least one optical element (M1, M2, ...) to be inspected in the housing (25) onto a spatially resolving detector (32). The inspection device is designed to inspect at least the partial area (T2, T3, ...) of the optical surface (M2', M3', ...) of the optical element (M2, M3, ...) to be inspected via at least one optical surface (M1', M2', ...) of at least one in the beam path (33) between the optical element (M2, M3, ...) to be inspected.) and the optical element (M1, M2, ...) arranged in the housing (25) of the inspection device. The invention also relates to an associated method.
Owner:CARL ZEISS SMT GMBH

Thick-wall light guide lamp

The invention relates to the field of automobile lamps, and discloses a thick-wall light guide lamp. The thick-wall light guide lamp comprises a thick-wall piece provided with a first light inlet face, a second light inlet face, an optical face and a light outlet face. The light emitting surface is formed on the front wall surface of the thick-wall piece, and the second light incident surface and the optical surface are formed on the side wall surfaces of the two sides of the thick-wall piece; the first light source assembly is used for emitting first light rays, and the first light rays enter the thick-wall part through the first light inlet face to be spread and are emitted out of the light outlet face; the second light source assembly is used for emitting second light rays, and the second light rays enter the thick-wall part through the second light inlet surface to be spread and are emitted from the light outlet surface after being reflected by the optical surface; wherein an optical structure for collimating the second light is formed on the second light incident surface. According to the thick-wall light guide lamp, the front wall face of the thick-wall part emits light through the first light source assembly, the side wall face of the thick-wall part is subjected to supplementary lighting through the second light source assembly, and then the problem that a light-emitting dark area exists when the thick-wall part of the thick-wall light guide lamp is laterally observed is solved.
Owner:SHANGHAI LIXIANG AUTOMOBILE CO LTD