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2633 results about "Optical surface" patented technology

Projection optical system and exposure apparatus having the projection optical system

A projection optical system according to the present invention whose image side numerical aperture is greater than or equal to 0.75, and which forms an image of a first object upon a second object using light of a predetermined wavelength less than or equal to 300 nm, comprises: a first lens group G1 of positive refractive power; a second lens group G2 of negative refractive power; a third lens group G3 of positive refractive power; and a fourth lens group G4 of positive refractive power, and: the first lens group G1, the second lens group G2, the third lens group G3 and the fourth lens group G4 are arranged in order from a side of the first object; and a distance D in mm along an optical axis between an optical surface of the fourth lens group G4 closest to the second object, and the second object, satisfies a condition of 0.1<D<5.
Owner:NIKON CORP

Immersion fluid for immersion Lithography, and method of performing immersion lithography

An immersion lithographic system 10 comprises an optical surface 51, an immersion fluid 60 with a pH less than 7 contacting at least a portion of the optical surface, and a semiconductor structure 80 having a topmost photoresist layer 70 wherein a portion of the photoresist is in contact with the immersion fluid. Further, a method for illuminating a semiconductor structure 80 having a topmost photoresist layer 70 comprising the steps of: introducing an immersion fluid 60 into a space between an optical surface 51 and the photoresist layer wherein the immersion fluid has a pH of less than 7, and directing light preferably with a wavelength of less than 450 nm through the immersion fluid and onto the photoresist.
Owner:TAIWAN SEMICON MFG CO LTD

Lithography apparatus for manufacture of integrated circuits

An immersion lithographic system 10 comprises an optical surface 51, an immersion fluid 60 contacting at least a portion of the optical surface, and a semiconductor structure 80 having a topmost photoresist layer 70 having a thickness of less than about 5000 angstroms, wherein a portion of the photoresist is in contact with the immersion fluid. Further, a method for illuminating a semiconductor structure 80 having a topmost photoresist layer 70 with a thickness of less than about 5000 angstroms, comprising introducing an immersion fluid 60 into a space between an optical surface 51 and the photoresist layer, and directing light preferably with a wavelength of less than about 450 nm through the immersion fluid and onto the photoresist.
Owner:TAIWAN SEMICON MFG CO LTD

Projection optical system and exposure apparatus having the projection optical system

A projection optical system according to the present invention whose image side numerical aperture is greater than or equal to 0.75, and which forms an image of a first object upon a second object using light of a predetermined wavelength less than or equal to 300 nm, comprises: a first lens group G<HIL><PDAT>1 < / BOLD><PDAT>of positive refractive power; a second lens group G<HIL><PDAT>2 < / BOLD><PDAT>of negative refractive power; a third lens group G<HIL><PDAT>3 < / BOLD><PDAT>of positive refractive power; and a fourth lens group G<HIL><PDAT>4 < / BOLD><PDAT>of positive refractive power, and: the first lens group G<HIL><PDAT>1, < / BOLD><PDAT>the second lens group G<HIL><PDAT>2, < / BOLD><PDAT>the third lens group G<HIL><PDAT>3 < / BOLD><PDAT>and the fourth lens group G<HIL><PDAT>4 < / BOLD><PDAT>are arranged in order from a side of the first object; and a distance D in mm along an optical axis between an optical surface of the fourth lens group G<HIL><PDAT>4 < / BOLD><PDAT>closest to the second object, and the second object, satisfies a condition of 0.1<D<5.
Owner:NIKON CORP

Waveguide and method of smoothing optical surfaces

Disclosed is a waveguide having a light inlet surface and a viewing surface comprising stacked core layers separated by clad layers to form channels and bearing a smoothing layer on at least one of the light inlet surface or the viewing surface thereof.
Owner:SKC HAAS DISPLAY FILMS CO LTD

Compact folded-optics illumination lens

A method for manufacturing an apparatus and the apparatus being configured to convert a first distribution of an input radiation to a second distribution of output radiation. The method consists of the steps of generating a two-dimensional representation of at least three active optical surfaces of an optical device including calculating a segment of a first surface based on edge ray sets as a first generalized Cartesian oval, calculating a segment of an entry surface based on the edge ray set as a second generalized Cartesian oval, calculating a segment of a second surface based on the edge ray set as a third generalized Cartesian oval, and successively repeating the steps of calculating the segment of the first surface and calculating the segment of the second surface in a direction towards a source, and rotationally sweeping the two-dimensional representation about a central axis providing a three-dimensional representation of the optical device.
Owner:LIGHT ENGINE

Presbyopia correction using patient data

InactiveUS7293873B2Mitigates presbyopiaLaser surgeryEye diagnosticsPatient dataOptical surface
Methods, devices, and systems establish an optical surface shape that mitigates or treats presbyopia in a particular patient. The combination of distance vision and near vision in a patient can be improved, often based on input patient parameters such as pupil size, residual accommodation, and power need. Iterative optimization may generate a customized corrective optical shape for the patient.
Owner:AMO MFG USA INC

Miniature Optical Elements for Fiber-Optic Beam Shaping

In part, the invention relates to optical caps having at least one lensed surface configured to redirect and focus light outside of the cap. The cap is placed over an optical fiber. Optical radiation travels through the fiber and interacts with the optical surface or optical surfaces of the cap, resulting in a beam that is either focused at a distance outside of the cap or substantially collimated. The optical elements such as the elongate caps described herein can be used with various data collection modalities such optical coherence tomography. In part, the invention relates to a lens assembly that includes a micro-lens; a beam director in optical communication with the micro-lens; and a substantially transparent film or cover. The substantially transparent film is capable of bi-directionally transmitting light, and generating a controlled amount of backscatter. The film can surround a portion of the beam director.
Owner:LIGHTLAB IMAGING

Method for focus detection for optically detecting deviation of the image plane of a projection lens from the upper surface of a substrate, and an imaging system with a focus-detection system

A microlithographic projection illumination system has a focus-detection system for optically detecting deviations of the image plane of a projection lens from the upper surface of a substrate arranged in the vicinity of its image plane. The focus-detection system has a system for coupling in at least one measuring beam that is obliquely incident on, and to be reflected at, the substrate surface into an intermediate zone between the final optical surface of the imaging system and the substrate surface and a system for coupling out the measuring beam and detecting it following its reflection at the substrate surface. The system for coupling the measuring beam in and the system for coupling it out are configured such that the measuring beam is reflected at least once at the substrate surface and at least once at a reflecting surface of the imaging system that reflects the light employed for measurement purposes before the measuring beam enters the system for coupling it out, which allows employing the image side of the imaging system as part of the focus-detection system. The focus-detection system also operates reliably when used on ultrahigh-aperture lenses that have correspondingly short working distances.
Owner:CARL ZEISS SMT GMBH

Method and apparatus to guide laser corneal surgery with optical measurement

InactiveUS20070282313A1Faster visual recoveryLess invasiveLaser surgerySurgical instrument detailsRefractive errorPhototherapeutic keratectomy
Optical coherence tomography (OCT) is used to map the surface elevation and thickness of the cornea. The OCT maps are used to plan laser procedures for the treatment of an irregular, opacified or weakened cornea, and in the treatment of refractive errors. In the excimer laser phototherapeutic keratectomy (PTK) procedure, the OCT data is used to plan a map of ablation depth needed to restore a smooth optical surface. In the excimer laser photorefractive keratectomy procedure, OCT mapping of epithelial thickness is used to achieve clean laser epithelial removal. In femtosecond laser anterior keratoplasty procedure, OCT data is used to plan the depth of femtosecond laser dissection to remove an anterior layer of the cornea, leaving a smooth recipient bed of uniform thickness to receive a disk of donated corneal tissue. The linkage of an OCT system to a precise laser surgical system enables the performance of new procedures that are safer, less invasive and produce faster visual recovery than conventional surgical procedures.
Owner:UNIV OF SOUTHERN CALIFORNIA

Unitary reflector and lens combination for a light emitting device

A unitary lens and light emitting device combination is provided that produces a highly uniform beam of light, corrected for distortions and gaps in illumination, throughout a full output beam width. The unitary lens incorporates all of the necessary optical surfaces to provide the output beam, including a pattern-correcting spherical refracting surface that smooths intensity variations in the overall illumination pattern.
Owner:BAYCO PRODS

Structured Substrates for Optical Surface Profiling

This disclosure provides methods and devices for the label-free detection of target molecules of interest. The principles of the disclosure are particularly applicable to the detection of biological molecules (e.g., DNA, RNA, and protein) using standard SiO2-based microarray technology.
Owner:TRUSTEES OF BOSTON UNIV

Method and apparatus for protecting surfaces of optical components

The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.
Owner:KLA TENCOR TECH CORP

LED signal lamp

An LED signal using a novel optical element to control the light distribution of a small LED light source. Light emitted by the LEDs illuminates the optical element. The optical element has a plurality of clusters, shaped along the x-, y- and z-axis to control the light. After the light is distributed, it encounters a second optical surface of the optical element, typically a fresnel surface. The light is controlled by the optical element.Optionally, a lens can be placed over each LED to control the light pattern of the LED. The lens has an entry face to direct the light to a total internal reflection surface on the side, which redirects the light to the exit face. The resulting signal is a uniform, efficient signal.
Owner:GE LIGHTING SOLUTIONS LLC

Miniature camera head

An electronic imaging device (27) includes an optical objective (28) for collecting optical radiation from an object, the objective having an optical axis, and an image sensor (24), including a matrix of optical detectors arranged in a plane that is substantially non-perpendicular to the optical axis, the image sensor having a lateral dimension in the plane. A turning mirror (38) has an optical surface that is positioned so as to reflect the radiation collected by the objective in order to form a focused image in the plane of the image sensor, while a maximum distance from the optical surface to the plane of the image sensor is substantially less than the lateral dimension of the image sensor.
Owner:GYRUS ACMI INC (D B A OLYMPUS SURGICAL TECH AMERICA)

High-strength laminated sheet for optical applications

A laminated sheet includes a surface layer having an optical surface that is of fire-polished quality and a core layer having a higher modulus than the surface layer to increase an overall stiffness or fracture toughness of the laminated sheet.
Owner:CORNING INC

Process for fabricating MEMS membrane with integral mirror/lens

An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
Owner:EXCELITAS TECH

System and methods for image segmentation in N-dimensional space

A system and methods for the efficient segmentation of globally optimal surfaces representing object boundaries in volumetric datasets is provided. An optical surface detection system and methods are provided that are capable of simultaneously detecting multiple interacting surfaces in which the optimality is controlled by the cost functions designed for individual surfaces and by several geometric constraints defining the surface smoothness and interrelations. The present invention includes surface segmentation using a layered graph-theoretic approach that optimally segments multiple interacting surfaces of a single object using a pre-segmentation step, after which the segmentation of all desired surfaces of the object are performed simultaneously in a single optimization process.
Owner:UNIV OF IOWA RES FOUND

Apparatus and method for focusing ions and charged particles at atmospheric pressure

Improvements have been made for collection and focusing of ions generated from atmospheric pressure sources such as electrospray, atmospheric pressure chemical ionization, inductively coupled plasma, discharge, photoionization and atmospheric pressure matrix assisted laser desorption ionization. A high transmission electro-optical surface is placed between the source regions and the focusing regions to optimize the field geometries and strengths in each respective region. Compression ratios of greater than 5000 are capable of transferring virtually all ions from large volume dispersive ion regions into ion beam cross-sections of less than 1 mm. Embodiments of this invention are methods and devices for improving sensitivity of mass spectrometry when coupled to atmospheric pressure ionization sources.
Owner:SHEEHAN EDWARD W +1

Method and device for determining refractive components and visual function of the eye for vision correction

A method and an instrument is provided for measuring aberration refraction of an eye with a first device for measuring the total aberration refraction of the eye and a second device for measuring the aberration refraction of the cornea of the eye. The component of aberration refraction caused by the lens caused by the lens is calculated using the measured total eye aberration refraction and the measured component of aberration refraction of the cornea mapped over the optical surfaces of the eye. Each component portion of the aberration refraction provides information usable for making appropriate corrective actions at the cornea, at the lens, or both as indicated by the mapped measurements and calculations.
Owner:TRACEY TECH

System and methods for image segmentation in n-dimensional space

A system and methods for the efficient segmentation of globally optimal surfaces representing object boundaries in volumetric datasets is provided. An optical surface detection system and methods are provided that are capable of simultaneously detecting multiple interacting surfaces in which the optimality is controlled by the cost functions designed for individual surfaces and by several geometric constraints defining the surface smoothness and interrelations.
Owner:UNIV OF IOWA RES FOUND

System and methods for image segmentation in N-dimensional space

A system and methods for the efficient segmentation of globally optimal surfaces representing object boundaries in volumetric datasets is provided. An optical surface detection system and methods are provided that are capable of simultaneously detecting multiple interacting surfaces in which the optimality is controlled by the cost functions designed for individual surfaces and by several geometric constraints defining the surface smoothness and interrelations. The graph search applications use objective functions that incorporate non-uniform cost terms such as “on-surface” costs as well as “in-region” costs.
Owner:UNIV OF IOWA RES FOUND

Contact lens mold

An ophthalmic lens mold includes a first mold half having a front side and a back side. The front side defines an optical surface. A second mold half has a front side defining an optical surface. Upon alignment of the first mold half with respect to the second mold half so that the front sides oppose each other, a mold cavity is formed between the front sides to form an ophthalmic lens therein from a moldable material. The first mold half includes a first section that transmits curing light and that extends from the back side to the front side. The first section includes at an area of the first mold half optical surface enclosed by an outermost circumference of the ophthalmic lens. A second section is co-molded with the first section and blocks the light. The second section is disposed with respect to the first section so that the second section prevents the curing light incident to the-back side from passing through the first mold half into an area of the mold cavity extending from the first mold half front side to the second mold half front side surrounding and extending radially outward of a boundary that includes the ophthalmic lens circumference and so that the first section passes the incident light to an area of the mold cavity bounded by and within the boundary.
Owner:ALCON INC

Shaped ophthalmic lenses

InactiveUS6454408B1Maximise fashion appealDiminish the appeal of the productOptical partsLens plateOptical surface
An optical lens element includinga first surface; anda second surface of complementary curvature;at least one surface exhibiting significant deviation in curvature from a standard optical surface;the first and second surfaces in combination defining an optical zone exhibiting substantially constant mean through power along at least one meridian.
Owner:CARL ZEISS VISION AUSTRALIA HO

Optical tracking device using micromirror array lenses

The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.
Owner:STEREO DISPLAY

Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements

The efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements belongs to the field of precise optical machine technology. The polishing process includes: constituting polishing process model based on the profile data obtained through measurement with interferometer or other instrument, determining the machining path, speed, pressure and other parameters of the element under the control of computer to perform simulating machining, verifying the technological parameters based on the simulating machining results and determining the ultimate technological parameters, creating NC program and machining. The present invention has high machining efficiency and high machining precision.
Owner:CHANGCHUN EQUIP TECH RES INST

Method for optically detecting deviations of an image plane of an imaging system from the surface of a substrate

A microlithographic projection illumination system has a focus-detection system for optically detecting deviations of the image plane of a projection lens from the upper surface of a substrate arranged in the vicinity of its image plane. The focus-detection system has a system for coupling in at least one measuring beam that is obliquely incident on, and to be reflected at, the substrate surface into an intermediate zone between the final optical surface of the imaging system and the substrate surface and a system for coupling out the measuring beam and detecting it following its reflection at the substrate surface. The system for coupling the measuring beam in and the system for coupling it out are configured such that the measuring beam is reflected at least once at the substrate surface and at least once at a reflecting surface of the imaging system that reflects the light employed for measurement purposes before the measuring beam enters the system for coupling it out, which allows employing the image side of the imaging system as part of the focus-detection system. The focus-detection system also operates reliably when used on ultrahigh-aperture lenses that have correspondingly short working distances.
Owner:CARL ZEISS SMT GMBH

Optical system of light and small-sized big angular field free curved surface prism helmet display

The invention relates to a small and light wide-field free-form surface prism HMD optical system, which belongs to the field of optical system and device design and is applied to the virtual reality and augmented reality field. The invention comprises a free-form surface prism with three optical surfaces, and a micro-image display; the free-form surface prism is made of plastic glass materials with the refractive index greater than 1; the three free-form optical surfaces are concave surfaces, which meet one of the three surface-type equations, and the location relationship of each surface meets three condition equations; the incident angle formed between the widest-field upper edge rays emitted by an LCD and the second free-form surface meets the total reflection conditions; and an image source element is an LCD of 0.61 or 0.59 inches. The small and light wide-field free-form surface prism HMD optical system is light and compact and has the advantages of good aberration correction and high light energy utilization rate; the optical system enables the observer to see clear images in a wide field of view, and the displayed images do not have apparent brightness attenuation and can not easily cause visual fatigue to the observer.
Owner:BEIJING NEDPLUSAR DISPLAY TECH CO LTD
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