108 results about "Micromirror array" patented technology

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The invention provides a structured light projector calibration method and system and a medium, and the method comprises the steps: projecting a multi-frequency stripe pattern to a target region based on an MEMS micromirror array module, obtaining a distorted image sequence, and carrying out the phase decoding, and obtaining a phase diagram corresponding to each frequency; resolving the phase diagram based on a phase shift method and an optical path triangulation principle to obtain a preliminary three-dimensional point coordinate; constructing a neural network model and a calibration sample set, obtaining a real three-dimensional coordinate by using a standard calibration plate or a known curved surface, and calculating the deviation between the initial three-dimensional point coordinate and the real three-dimensional coordinate to obtain a training sample set; and training the neural network model according to a training sample set based on an Euclidean distance loss function, outputting a three-dimensional offset compensation amount according to the neural network model, correcting the initial three-dimensional point coordinates, and realizing an end-to-end error self-compensation mechanism through the neural network model, so that deviation compensation is effectively performed on the three-dimensional point coordinates, and the accuracy of the three-dimensional point coordinates is improved. And the three-dimensional reconstruction precision is improved.

The invention discloses a calibration method of a polarization focal plane imaging system and an imaging system, relates to the field of photoelectric imaging and remote sensing detection imaging, and solves the problems of low correction efficiency and difficulty in correcting a system with a changed polarization state in the conventional polarization error correction technology. According to the calibration method, a plurality of coding patterns and corresponding polarization modulation matrixes are obtained based on the collected uniform light field and serve as calibration results. The polarization error correction method comprises the steps of obtaining an observation intensity vector based on a target scene; a corresponding polarization modulation matrix is obtained based on the coding pattern according to a coding polarization modulation matrix lookup table, and then a down-sampling Stokes vector after polarization error correction is obtained; and completing the correction of the polarization error through an imaging reconstruction method. A polarization focal plane imaging system comprises an imaging lens, a DMD digital micromirror array coding module, a focal plane DoFP polarization detector and an imaging reconstruction module. The method is suitable for the fields of remote sensing detection, target identification, environment monitoring and the like.

The invention discloses a scanning type exposure method and system adopting a parallel digital micromirror array, and relates to the technical field of photoetching exposure and maskless direct writing of mask.The scanning type exposure method comprises the steps that parallel digital micromirror initial mapping is established through a reference target exposure detection registration method; generating a block distortion field parameter table according to the initial mapping of the parallel digital micromirror, determining a micro-mark insertion position based on the block distortion field parameter table, and generating an expected coordinate; performing micro-mark exposure on the expected coordinate position, acquiring imaging data of the inserted micro-mark position, extracting an actual measurement coordinate from the imaging data of the micro-mark position, calculating a residual error by taking the expected coordinate and the actual measurement coordinate as an input difference, and writing the residual error into a residual error set; incremental fitting is carried out according to the residual set, the block distortion field parameter table is updated, and the exposure controller controls the parallel digital micromirror array to remap the pattern according to the updated block distortion field parameter table and triggers exposure. The method provided by the invention has better effects in coordinate mapping consistency and block parameter manageability.

The invention discloses a moving target identification and tracking system based on an analog micromirror array (AMA), belongs to the technical field of photoelectric tracking and machine vision, and aims to solve the technical problems of slow response, large inertia and complex structure of a traditional mechanical tracking system. According to the technical scheme, an AMA composed of a plurality of MEMS micromirror units which can be independently controlled and have the static or quasi-static two-dimensional deflection capacity is adopted as a non-mechanical light beam deflection actuator, the AMA can be composed of micromirror arrays in various forms, digital image data are analyzed in real time to solve the target offset, and the non-mechanical light beam deflection actuator is obtained. And an instruction is generated to drive the AMA to deflect at a high speed so as to compensate the deflection, so that continuous and stable locking and tracking imaging of the moving target are realized. The system has the advantages of being high in response speed, high in tracking precision, free of mechanical inertia and compact in structure, supports flexible switching of various working modes such as wide-area scanning and long-distance tracking, and is high in application flexibility.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and an elongated interface element (250) over which the MEMS mirror array structure (210) projects laterally, and a higher-level assembly (300) with at least one receptacle (350) for the interface element (250) of the MEMS micromirror unit (200), wherein the MEMS micromirror unit (200) is mounted in a receptacle (350) of the higher-level assembly (300) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) abuts the higher-level assembly (300). A gas atmosphere with a thermal conductivity of more than 0.05 W / (m·K) is introduced into a gap (400) between the interface element (250) and the receptacle (350).

The invention relates to the technical field of intelligent peripherals, in particular to a user-oriented interaction information expansion method, which comprises the following steps that: each keycap acquires displacement and pressure, generates an event packet, uploads the event packet through an optical wireless link, and obtains a clock and supplies power; constructing a keycap graph by a master controller, obtaining an intention vector through graph convolution and pooling, inputting the intention vector into a cyclic network to generate a pixel matrix and a phase matrix, and downlink after Bernoulli sparse coding; performing key cap side orthogonal matching pursuit decoding and four-round gradient optimization, and outputting a differential pixel set, a differential phase set and a synchronization mark; the master control refreshes the digital micromirror array and the ultrasonic phased array in a differential manner, locks a frame-level time sequence through a synchronization pulse, compensates link delay and hardware drift in real time based on Kalman filtering, and keeps an optical-acoustic alignment error to be less than 100 microseconds; degradation monitoring enables a link to be automatically switched to a pre-carved character layer and to be quickly recovered when the link is abnormal, and a keyboard interaction information expansion scheme with low delay and high consistency is provided.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and a higher-level assembly (300), wherein the MEMS micromirror unit (200) is attached to the higher-level assembly (230) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) is in contact with the higher-level assembly (300). The MEMS mirror array module (100) is configured such that sufficient heat conduction from the MEMS mirror array structure (210) to the higher-level assembly (300) is achieved to prevent an undesirably high temperature rise in or on the MEMS mirror array structure (210).

The present application relates to the technical field of furniture detection, and relates to a device for detecting the smoothness of the inner wall of a hole in solid wood furniture, comprising a support and a detection unit, the support being used for arranging and adjusting the direction and angle of the detection unit, the detection unit comprising a fiber bundle probe and a main component, the fiber bundle probe being used for emitting light and receiving reflected light of the inner wall of the hole in the solid wood furniture to detect the smoothness, the fiber bundle probe comprising one emitting fiber and a plurality of receiving fibers, the emitting fiber being located at the center and the plurality of receiving fibers being uniformly distributed around the emitting fiber; the main component being connected with the fiber bundle probe and being used for providing a light source and processing reflected light signals, the main component comprising a laser diode, a programmable laser drive circuit, a MEMS micromirror array, a photodiode array and a microprocessor, the present application realizes non-contact detection through emitting and receiving light, completely avoids physical damage to the hole wall of the wood, and is particularly suitable for quality control of high-grade solid wood furniture.

The invention discloses a geometric phase metasurface high-flux laser direct writing system and method, and the system comprises a femtosecond laser, a beam expander, a angular dispersion compensation module, a digital micromirror array, a second 4F system, a spatial light modulator, a fifth lens and an objective lens according to the light advancing direction. Wherein the spatial light modulator is used for performing phase modulation on each unit light spot from the digital micromirror array based on a loaded holographic phase diagram to form a rod-shaped light spot array, and the rod-shaped light spot array forms parallel light transmitted at different angles through the fifth lens and converges at an entrance pupil of the objective lens together. And finally, a parallel direct-writing light spot array is formed in the two-photon photoresist, and geometric phase metasurface unit structure array printing is completed. According to the system, high-flux and high-flexibility direct-writing manufacturing of the geometric phase type metasurface is finally realized.

The embodiment of the invention provides an optical system and optical processing equipment. The optical system comprises a light source module, a polarization modulation module, a micromirror array and an objective lens assembly. The light source module is used for outputting femtosecond laser pulses. The polarization modulation module is used for receiving the femtosecond laser pulse and modulating the polarization state of the femtosecond laser pulse into a circular polarization state. And the micro-mirror array is used for receiving the femtosecond laser pulse in the circular polarization state and performing spatial modulation on the femtosecond laser pulse to generate different patterns. The objective lens assembly is used for receiving and focusing the pattern to the surface of the sample. Thus, the femtosecond laser pulse passing through the polarization modulation module has the same polarization state in all directions, so that the absorptivity and the working efficiency of different positions of the sample M are consistent in the laser processing process, and the processing quality and effect are improved. Moreover, the micro-mirror array is sensitive to the polarization state, so that energy loss and non-uniformity caused by polarization can be avoided, and the processing uniformity and the processing precision can be further improved.

The invention provides a control method and system of a reconfigurable optical phased array device. The control system comprises an MEMS micromirror array, a silicon-based waveguide array, a mode switching device and a controller, and the controller is configured to configure laser output parameters including a central wavelength, a tuning range and single longitudinal mode output control information, initialize the phase shifter position of each array element of the optical phased array, and control the phase shifter position of each array element of the optical phased array. Setting an initial deflection angle of the MEMS micromirror array and initializing a working state of the mode switching device; and receiving target scene information and judging whether the target scene information is changed or not, if so, generating a control instruction according to the target scene information, and controlling the optical phased array device according to the control instruction. The high integration of the optical system is realized by utilizing the high integration characteristic of the silicon-based optical chip and combining the design of the MEMS micromirror array and the mode switching device, and the overall performance and efficiency of the system are improved.

The invention discloses a working method and system of a projection camera integrated with a temperature control function, and relates to the field of cameras. The method comprises the following steps: synchronously acquiring an infrared thermal field, dark current of an image sensor and a duty state of a micro-mirror array, and calculating a multi-source thermal disturbance characteristic value through an entropy algorithm and photo-thermal phase difference analysis; driving a thermal diffusion diagram neural network by the characteristic values, inverting a thermal strain field, and projecting the thermal strain field to a Zernike basis function space to generate a thermally induced aberration risk index and a thermodynamic diagram; calculating an active temperature control intervention level and a strategy parameter through an adaptive threshold value and fuzzy reasoning based on the risk index and the convection intensity estimation value; constructing a multi-objective non-convex optimization problem according to the intervention level, and solving to obtain a collaborative scheduling weight and an optimization instruction; and extracting the maximum Lyapunov index and generating a thermal stability look-ahead confidence coefficient with the risk index to predict future thermal evolution and perform adaptive regulation and control. According to the invention, the imaging precision of the projection camera under thermal disturbance is improved through multi-level cooperative temperature control.

The application relates to the field of wafer defect detection, in particular to a MEMS-based fast zoom wafer detection microscope and a detection method. The microscope comprises an illumination component, a sample stage, a beam splitter, a microscope objective, a MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a FPGA-based synchronous control and processing module. By introducing the MEMS micromirror array zoom module composed of multiple micro-mirror units into the optical path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflection surface with controllable equivalent curvature is formed, the focusing regulation of the imaging light beam is realized, and electronic focusing without mechanical movement is completed. The response speed is superior to that of traditional mechanical regulation, and the high-speed online detection is adapted.

The application relates to the technical field of optical detection, and discloses an intelligent spectrum adaptive detection system based on a programmable micro-mirror array, which comprises the following components: an optical path assembly; a programmable micro-mirror array; a spectrum sampling unit for collecting spectrum characteristic data of incident light in real time; a control unit for calling a target relative spectral response curve, controlling the light flux modulation degree of each wavelength corresponding region of the programmable micro-mirror array, obtaining a target spectrum intensity distribution curve, receiving an electric signal of the spectrum detection unit, obtaining an output spectrum intensity distribution curve of the system based on the electric signal, and feeding back and correcting the light flux modulation degree of the programmable micro-mirror array based on the target spectrum intensity distribution curve. The control unit modulates and feedback adjusts the light flux degree of the programmable micro-mirror array, so that the automation degree and the precision of measured optical information are improved.

The invention relates to the technical field of projection display, and discloses a holographic projection device based on a micromirror array, and the device comprises a projection imaging assembly, the projection imaging assembly comprises a cabinet housing, an air duct assembly is installed in the cabinet housing, the front surface of the air duct assembly is fixedly communicated with a leveling assembly, the leveling assembly comprises a transverse air pipe, and the transverse air pipe is fixedly connected with the cabinet housing. A rotating roller is installed on the inner side of the transverse air pipe, fan plates are fixedly connected to the two ends of the rotating roller, a pressing plate is installed at the bottom of the rotating roller, the air duct assembly generates air flow and is matched with the leveling assembly to restrain warping of the micromirror chip substrate, the air flow circulates in the transverse air pipe, the fan plates are transversely arranged, the rotating roller is driven to rotate, and the pressing plate is pushed to move downwards. The micro-mirror chip is pressed, and the problems that flatness errors and thermal expansion coefficient differences exist in the base and chip packaging, and when screws are tightened or the temperature is changed, assembly stress and thermal stress are generated, so that the chip substrate warps, and the holographic image quality is permanently reduced are solved.

The invention discloses a micromirror assembly and a direct writing lithography system. The direct-writing photoetching system comprises a light source, a micro-reflecting mirror array, a micro-convex mirror array and a workbench, the light source is used for generating irradiation light towards the micro-reflector array; the micro-reflector array is used for modulating irradiation light into a target pattern light beam and emitting the target pattern light beam to the micro-convex lens array; the micro-convex lens array is used for receiving the target pattern light beam, processing the target pattern light beam into a focusing dot matrix and emitting the focusing dot matrix to the workbench; the micro-reflecting mirrors and the micro-convex mirrors are the same in number and are in one-to-one correspondence in central position; the central points of the six micro-mirrors adjacent to any one micro-mirror are connected to form a hexagon, the central points of any three micro-mirrors in the six adjacent micro-mirrors are not collinear, and the micro-mirrors are micro-reflecting mirrors or micro-convex mirrors. According to the direct-writing photoetching system, the connecting lines of the central points of the six adjacent micromirrors in any one of the micromirror array and the microconvex mirror array form a hexagon, so that the structure is compact, the duty ratio is improved, and the effective utilization rate of a light source is improved.

This invention discloses a multilevel photonic inverter and its inversion method based on MEMS optical switches. Addressing the problems commonly found in traditional switching inverters, such as complex topology, numerous switching devices, limited number of output levels, and high output waveform distortion, this invention proposes a multilevel photonic inverter and its inversion method based on MEMS optical switches. This method switches the optical transmission path by controlling a micromirror array of MEMS optical switches, thereby achieving PV inversion output. This inversion method completely eliminates power switching devices in the main circuit. Compared to traditional switching converters, the photonic inverter of this invention exhibits advantages such as simple structure, no need for power switching devices, wide application range, and good electrical isolation, while also possessing the advantages of low electromagnetic interference and low output ripple.

This application discloses a method, apparatus, device, and medium for displaying vehicle auxiliary information. It collects left and right eye frame data for generating 3D images and 2D auxiliary information from an in-vehicle system, and prioritizes the 2D information. Based on the 3D parallax determined from the left and right eye frame data and the priority of the 2D information, the micromirror array of the DMD chip is logically partitioned into a left-eye frame display area, a right-eye frame display area, and a 2D information display area. Independent micromirror control parameters, including deflection angle, switching frequency, and reflection efficiency, are calculated for each of these three display areas. Based on these set control parameters, the left-eye frame data, right-eye frame data, and 2D auxiliary information are precisely mapped and driven to their corresponding display areas. This application can achieve separate modulation and interference-free fusion display of 3D stereoscopic images and 2D auxiliary information on the physical optical path. The technical solution of this application can be widely applied in the field of vehicle technology.

The application relates to a multi-focal plane imaging defect detection method and a defect detection system. The defect detection method comprises the following steps: a first polarized light path and a second polarized light path are respectively irradiated to different regions of a beam splitter to obtain a plurality of sub-beams; the plurality of sub-beams are respectively focused on different axial depths of a wafer; reflected light is collected to form a plurality of detection lights which do not overlap with each other; the plurality of detection lights are respectively irradiated to different photosensitive areas of a detector, so that images of different focal planes are simultaneously imaged on different spatial positions of the detector to obtain focal plane images corresponding to the different focal planes; the plurality of focal plane images are geometrically corrected and pixel-aligned, and are stacked along an axial direction to form a data body, and three-dimensional spatial coordinates (xc, yc, zc) of defects are obtained through connected domain analysis. The defect detection system comprises an illumination module, a polarization module, a beam splitter, a micromirror array and a detector which are sequentially arranged along a light path. The application can determine the positions of defects.

Disclosed are a fixed-focus projection optical system and a projection device. The fixed-focus projection optical system is provided with an object side and an image side arranged relatively along an optical axis direction, and includes: a micro-mirror array, an equivalent prism, a galvanometer, a first lens group, a second lens group, a plane mirror, and a curved mirror provided in sequence from the object side to the image side. The plane mirror is provided at one side of the optical axis, and the curved mirror is provided at the other side of the optical axis. The plane mirror is provided at an angle with the optical axis, and one end of the plane mirror is intersected with the optical axis.

The present disclosure belongs to the technical field of optical communications. Provided is an optical switching system. The optical switching system comprises a first optical-fiber array unit, a second optical-fiber array unit, a first micromirror array, a second micromirror array, a first monitoring optical source, and a first detector, wherein the first micromirror array is located on the optical path of the first optical-fiber array unit, the second micromirror array is located on the optical path of the second optical-fiber array unit, and the second micromirror array is located on the optical path of the first micromirror array; the first monitoring optical source is connected to the first optical-fiber array unit, and the first detector is connected to the second optical-fiber array unit; and the first monitoring optical source is used for transmitting, to the first detector by means of the first micromirror array and the second micromirror array, an emitted monitoring optical signal that does not carry service information, so as to determine the power of the monitoring optical signal at a receiving end, which monitoring optical signal is transmitted by the first monitoring optical source. The present disclosure can monitor an insertion loss on an optical transmission link in a scenario in which no service optical signal is transmitted.

An irradiation device for additively manufacturing a three-dimensional object includes two beam generation devices emitting energy beams that are characteristically different than one another. An optical modulator includes a micromirror array disposed downstream from the first and second beam generation devices. A focusing lens assembly is disposed downstream from the optical modulator. The micromirror array includes a plurality of micromirror elements to reflect beam segments corresponding to the first and second energy beams incident upon the focusing lens assembly. The focusing lens assembly focuses a first portion of the beam segments corresponding to the first energy beam to at least partially overlap with one another at a first one of a plurality of combination zones and focuses a second portion of the beam segments corresponding to the second energy beam to at least partially overlap with each other at a second one of a plurality of combination zones.

The invention relates to a multi-purpose container (36) for transporting and testing MEMS assemblies (30), in particular a micromirror array (32) with sensitive surfaces (34). The multi-purpose container (36) has a lower part (64) and a removable upper part (62). The MEMS assembly (30) contained in the closed multi-purpose container (36) can be pressurized or vacuum-controlled via at least one pressure port (48), temperature-controlled via a temperature control (52) of a cylinder wall (46), and electrically connected from the outside via at least one electrical connection (50). Furthermore, the invention relates to the use of the multi-purpose container (36) for transporting and testing MEMS assemblies (30), in particular micromirror arrays (32) with sensitive surfaces (34).

This invention discloses a phase-height mapping calibration method and apparatus in fringe projection, relating to the field of three-dimensional object contour measurement technology. The method includes: controlling a projector to project a set of phase-shifted sinusoidal fringe patterns onto a micromirror array with known height values; simultaneously triggering a camera to acquire fringe image sequences; performing phase shift calculations on the fringe image sequences to obtain a wrap-around phase map; constructing a global optimization model of absolute phase using the known height value of the micromirror array as an absolute constraint; solving for the absolute phase field corresponding to the height of the micromirror array; extracting the center coordinates, absolute phase values, and known height values ​​of each micromirror element; constructing a three-dimensional control point set; fitting the three-dimensional control point set; calculating the continuous model coefficient field; and forming a phase-height lookup table. This invention can significantly improve the real-time calculation efficiency of three-dimensional measurement, meeting the practical needs of high-precision, high-stability industrial three-dimensional shape measurement.

An ultra-compact optical receiver supporting the laser scanning of objects in three-dimensions is disclosed. The receiver's narrow field-of-view may track the movement of a transmit beam, allowing isolation of a reflected receive signal from sensitivity reducing solar background and interfering signals. Small portions of a full receive field may be selected using a Digital Light Projector (DLP) micromirror array by placing a small portion of the mirror array elements into a “pass-state” allowing light to be directed towards the optical detector. The remaining mirror elements can be placed into a “dump state” where light is directed away from the detector. Furthermore, a unique total internal reflection (TIR) prism configuration may be used to allow the incoming receive signal to pass directly to the DLP mirror array while directing the light from pass and dump state DLP mirror orientations to the detector or optical absorbing regions of the receiver respectively.

The invention relates to the technical field of light beam control, in particular to an MEMS micromirror-IMU (Inertial Measurement Unit) integration technology. The invention relates to an MEMS micromirror-IMU integrated system, which comprises a substrate, an inertial measurement unit, a micromirror array and a control chip are integrated on the upper surface of the substrate; the inertial measurement unit comprises an accelerometer chip and a gyroscope chip; the micro-mirror array comprises a packaging shell which is of a cup-shaped structure, and a cup opening of the packaging shell faces upwards; an MEMS micromirror A is mounted on the inner bottom surface of the packaging shell; the inner side surface of the packaging shell is provided with an even number of more than or equal to four MEMS micromirrors B; the input end of the control chip is electrically connected with the output end of the accelerometer chip and the output end of the gyroscope chip respectively; the output end of the control chip is electrically connected with the control end of the MEMS micromirror A and the control end of each MEMS micromirror B. The invention solves the problems of small scanning field angle, slow compensation speed and low compensation precision of the existing beam control technology, and is suitable for the fields of laser radar, free space optical communication, portable projection, imaging stability and the like.

The application relates to a calibration method of a polarization defocus plane imaging system and the imaging system, and relates to the fields of photoelectric imaging and remote sensing detection imaging. The application solves the problems of low correction efficiency and difficulty in correcting the system for polarization state changes in the existing polarization error correction technology. The calibration method is based on collected uniform light fields to obtain a plurality of encoding patterns and corresponding polarization modulation matrices as calibration results. The polarization error correction method is based on a target scene to obtain an observation intensity vector; based on the encoding pattern, a corresponding polarization modulation matrix is obtained according to an encoding polarization modulation matrix lookup table, and then a down-sampling Stokes vector after correction of the polarization error is obtained; and the correction of the polarization error is completed through an imaging reconstruction method. A polarization defocus plane imaging system comprises an imaging lens, a DMD (digital micro-mirror array) encoding module, a defocus plane DoFP polarization detector and an imaging reconstruction module. The application is suitable for the fields of remote sensing detection, target identification and environment monitoring.

This application discloses a field-of-view modulation hyperspectral imaging device based on a MEMS micromirror array, relating to the field of snapshot hyperspectral imaging. In this device, each micromirror unit of the first micromirror array is deflected at an arbitrary angle. Different fields of view are modulated by reflection from the first micromirror array. The modulated beam is then imaged by a pre-imaging system. A multiple interferometry system performs phase modulation on each snapshot image, forming interferometric images with different modulation optical path differences. These interferometric images with different modulation optical path differences are projected onto a surface detector via a relay imaging system. The surface detector receives the interferometric images with different modulation optical path differences and transmits them to a controller. The controller is used to acquire hyperspectral images based on the interferometric images with different modulation optical path differences. This application can adjust and improve resolution, and simultaneously adjust the field of view to acquire hyperspectral images under different fields of view.

The present invention introduces the ASIC integrated MEMS device with exposed bond-pads from bottom attached ASIC and method for making the same. The ASIC integrated MEMS device with exposed bond-pads from bottom attached ASIC can be especially used for micromirror array MEMS devices. With the present invention and technology, individually controlling of thousands of micromirrors becomes possible and bring easier fabrication method. With the present invention and technology, individually controllable micromirror array can implement easier control method and more compact packing becomes feasible. With help of the present invention scheme, more complicated light modulating device scheme can be implemented with micromirror array or MEMS device with a large number of controlling channels. Scheme, apparatus, and method are disclosed in the present invention.