160 results about "Micromirror array" patented technology

The invention provides an MEMS (Micro Electro Mechanical System) micromirror array chip, a module and optical scanning equipment. The MEMS micromirror array chip comprises a plurality of micromirror structures, a substrate, a vertical lead structure and a capacitance angle sensing structure, according to the micro-mirror array chip integrated with the capacitive sensor, array-level real-time angle detection, feedback control and high-precision scanning angle detection are realized, and the micro-mirror array chip is fast in driving and resistant to interference; meanwhile, the wiring density is reduced by frequency division multiplexing isolation signals; in addition, the application of a monolithic integrated capacitance angle sensor in a high-density micro-mirror array chip is realized by a thick substrate with a silicon through hole; and finally, the micromirror array chip of the monolithic integrated capacitance angle sensor is used for precision optical scanning equipment, a photoelectric angle detector is omitted, optical scanning high-precision real-time angle detection and feedback control, high-precision angle detection and high-speed scanning are realized, the use design is convenient, and the cost is low.

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The invention provides a structured light projector calibration method and system and a medium, and the method comprises the steps: projecting a multi-frequency stripe pattern to a target region based on an MEMS micromirror array module, obtaining a distorted image sequence, and carrying out the phase decoding, and obtaining a phase diagram corresponding to each frequency; resolving the phase diagram based on a phase shift method and an optical path triangulation principle to obtain a preliminary three-dimensional point coordinate; constructing a neural network model and a calibration sample set, obtaining a real three-dimensional coordinate by using a standard calibration plate or a known curved surface, and calculating the deviation between the initial three-dimensional point coordinate and the real three-dimensional coordinate to obtain a training sample set; and training the neural network model according to a training sample set based on an Euclidean distance loss function, outputting a three-dimensional offset compensation amount according to the neural network model, correcting the initial three-dimensional point coordinates, and realizing an end-to-end error self-compensation mechanism through the neural network model, so that deviation compensation is effectively performed on the three-dimensional point coordinates, and the accuracy of the three-dimensional point coordinates is improved. And the three-dimensional reconstruction precision is improved.

The invention discloses a calibration method of a polarization focal plane imaging system and an imaging system, relates to the field of photoelectric imaging and remote sensing detection imaging, and solves the problems of low correction efficiency and difficulty in correcting a system with a changed polarization state in the conventional polarization error correction technology. According to the calibration method, a plurality of coding patterns and corresponding polarization modulation matrixes are obtained based on the collected uniform light field and serve as calibration results. The polarization error correction method comprises the steps of obtaining an observation intensity vector based on a target scene; a corresponding polarization modulation matrix is obtained based on the coding pattern according to a coding polarization modulation matrix lookup table, and then a down-sampling Stokes vector after polarization error correction is obtained; and completing the correction of the polarization error through an imaging reconstruction method. A polarization focal plane imaging system comprises an imaging lens, a DMD digital micromirror array coding module, a focal plane DoFP polarization detector and an imaging reconstruction module. The method is suitable for the fields of remote sensing detection, target identification, environment monitoring and the like.

The invention discloses a scanning type exposure method and system adopting a parallel digital micromirror array, and relates to the technical field of photoetching exposure and maskless direct writing of mask.The scanning type exposure method comprises the steps that parallel digital micromirror initial mapping is established through a reference target exposure detection registration method; generating a block distortion field parameter table according to the initial mapping of the parallel digital micromirror, determining a micro-mark insertion position based on the block distortion field parameter table, and generating an expected coordinate; performing micro-mark exposure on the expected coordinate position, acquiring imaging data of the inserted micro-mark position, extracting an actual measurement coordinate from the imaging data of the micro-mark position, calculating a residual error by taking the expected coordinate and the actual measurement coordinate as an input difference, and writing the residual error into a residual error set; incremental fitting is carried out according to the residual set, the block distortion field parameter table is updated, and the exposure controller controls the parallel digital micromirror array to remap the pattern according to the updated block distortion field parameter table and triggers exposure. The method provided by the invention has better effects in coordinate mapping consistency and block parameter manageability.

The invention discloses a moving target identification and tracking system based on an analog micromirror array (AMA), belongs to the technical field of photoelectric tracking and machine vision, and aims to solve the technical problems of slow response, large inertia and complex structure of a traditional mechanical tracking system. According to the technical scheme, an AMA composed of a plurality of MEMS micromirror units which can be independently controlled and have the static or quasi-static two-dimensional deflection capacity is adopted as a non-mechanical light beam deflection actuator, the AMA can be composed of micromirror arrays in various forms, digital image data are analyzed in real time to solve the target offset, and the non-mechanical light beam deflection actuator is obtained. And an instruction is generated to drive the AMA to deflect at a high speed so as to compensate the deflection, so that continuous and stable locking and tracking imaging of the moving target are realized. The system has the advantages of being high in response speed, high in tracking precision, free of mechanical inertia and compact in structure, supports flexible switching of various working modes such as wide-area scanning and long-distance tracking, and is high in application flexibility.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and an elongated interface element (250) over which the MEMS mirror array structure (210) projects laterally, and a higher-level assembly (300) with at least one receptacle (350) for the interface element (250) of the MEMS micromirror unit (200), wherein the MEMS micromirror unit (200) is mounted in a receptacle (350) of the higher-level assembly (300) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) abuts the higher-level assembly (300). A gas atmosphere with a thermal conductivity of more than 0.05 W / (m·K) is introduced into a gap (400) between the interface element (250) and the receptacle (350).

The invention relates to the technical field of intelligent peripherals, in particular to a user-oriented interaction information expansion method, which comprises the following steps that: each keycap acquires displacement and pressure, generates an event packet, uploads the event packet through an optical wireless link, and obtains a clock and supplies power; constructing a keycap graph by a master controller, obtaining an intention vector through graph convolution and pooling, inputting the intention vector into a cyclic network to generate a pixel matrix and a phase matrix, and downlink after Bernoulli sparse coding; performing key cap side orthogonal matching pursuit decoding and four-round gradient optimization, and outputting a differential pixel set, a differential phase set and a synchronization mark; the master control refreshes the digital micromirror array and the ultrasonic phased array in a differential manner, locks a frame-level time sequence through a synchronization pulse, compensates link delay and hardware drift in real time based on Kalman filtering, and keeps an optical-acoustic alignment error to be less than 100 microseconds; degradation monitoring enables a link to be automatically switched to a pre-carved character layer and to be quickly recovered when the link is abnormal, and a keyboard interaction information expansion scheme with low delay and high consistency is provided.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and a higher-level assembly (300), wherein the MEMS micromirror unit (200) is attached to the higher-level assembly (230) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) is in contact with the higher-level assembly (300). The MEMS mirror array module (100) is configured such that sufficient heat conduction from the MEMS mirror array structure (210) to the higher-level assembly (300) is achieved to prevent an undesirably high temperature rise in or on the MEMS mirror array structure (210).

The present application relates to the technical field of furniture detection, and relates to a device for detecting the smoothness of the inner wall of a hole in solid wood furniture, comprising a support and a detection unit, the support being used for arranging and adjusting the direction and angle of the detection unit, the detection unit comprising a fiber bundle probe and a main component, the fiber bundle probe being used for emitting light and receiving reflected light of the inner wall of the hole in the solid wood furniture to detect the smoothness, the fiber bundle probe comprising one emitting fiber and a plurality of receiving fibers, the emitting fiber being located at the center and the plurality of receiving fibers being uniformly distributed around the emitting fiber; the main component being connected with the fiber bundle probe and being used for providing a light source and processing reflected light signals, the main component comprising a laser diode, a programmable laser drive circuit, a MEMS micromirror array, a photodiode array and a microprocessor, the present application realizes non-contact detection through emitting and receiving light, completely avoids physical damage to the hole wall of the wood, and is particularly suitable for quality control of high-grade solid wood furniture.

The application discloses an exposure system and a photoetching machine. The exposure system comprises a light source, a micromirror array and a microlens array. The light source is used for emitting light. The micromirror array is used for receiving the light and converting the light into a first light spot array. The microlens array and the light source are respectively located on opposite sides of the micromirror array. The microlens array is used for receiving the first light spot array and performing focusing processing on the first light spot array to form a second light spot array. The microlens array projects the second light spot array onto a substrate. The photoetching machine comprises the exposure system. The micromirror array performs patterning processing on all the light and forms the first light spot array. The microlens array performs focusing processing on the first light spot array to form the second light spot array. Each microlens in the microlens array corresponds to each micromirror in the micromirror array. Compared with a traditional exposure system, the alignment accuracy problem between the microlens array and the DMD micromirror does not need to be considered.

The invention discloses a dual-imaging vehicle-mounted display device and a control method, and belongs to the field of vehicle-mounted display, a light sensor is mounted on a front windshield to detect the light intensity of ambient light, and a controller judges a currently required imaging mode according to light intensity data; when holographic film imaging is needed, the winding driving part drives the reel to rotate, the holographic film extends out and is unfolded to be attached to a front windshield, the deflection driving part drives the micromirror array to deflect, and light emitted by the image source is guided to the holographic film through the micromirror array to achieve imaging. When the free-form surface mirror is needed for imaging, the winding driving part drives the reel to rotate reversely, the holographic film is wound on the reel, the deflection driving part drives the micro-mirror array to deflect reversely, light emitted by the image source is reflected to the free-form surface mirror through the micro-mirror array, and the free-form surface mirror transmits the light to a front windshield for imaging. The projection area is greatly expanded to more than 20 inches, the field of view (FOV) is improved to more than 15 degrees * 5 degrees, and the virtual image distance is more than 20 m.

The invention belongs to the technical field of electronic manufacturing, and particularly relates to a patterning preparation method of a flexible circuit board, which comprises the following steps of: pre-processing and precisely positioning a flexible substrate; through an integrated multi-point optical deformation sensing system, structured light projection and high-resolution image acquisition are utilized, and a substrate surface deformation field function is sensed and constructed in a real-time and high-resolution manner; calculating an inverse deformation field in real time and reconstructing a compensation pattern through a high-speed digital pattern compensation processor based on the deformation field function; a high-resolution micro-mirror array digital light processor (DMD) is adopted as a dynamic mask, an ultraviolet light source and a projection optical system are combined, and the compensated pattern is exposed to a photoresist layer on the flexible substrate in real time; and finally, carrying out post-treatment such as developing, etching and photoresist removing. The problem of inherent deformation of the flexible substrate is fundamentally solved, the patterning precision, the preparation reliability and the yield are remarkably improved, and the preparation requirements of complex patterns and large-area flexible circuit boards are met.

The invention discloses a geometric phase metasurface high-flux laser direct writing system and method, and the system comprises a femtosecond laser, a beam expander, a angular dispersion compensation module, a digital micromirror array, a second 4F system, a spatial light modulator, a fifth lens and an objective lens according to the light advancing direction. Wherein the spatial light modulator is used for performing phase modulation on each unit light spot from the digital micromirror array based on a loaded holographic phase diagram to form a rod-shaped light spot array, and the rod-shaped light spot array forms parallel light transmitted at different angles through the fifth lens and converges at an entrance pupil of the objective lens together. And finally, a parallel direct-writing light spot array is formed in the two-photon photoresist, and geometric phase metasurface unit structure array printing is completed. According to the system, high-flux and high-flexibility direct-writing manufacturing of the geometric phase type metasurface is finally realized.

The embodiment of the invention provides an optical system and optical processing equipment. The optical system comprises a light source module, a polarization modulation module, a micromirror array and an objective lens assembly. The light source module is used for outputting femtosecond laser pulses. The polarization modulation module is used for receiving the femtosecond laser pulse and modulating the polarization state of the femtosecond laser pulse into a circular polarization state. And the micro-mirror array is used for receiving the femtosecond laser pulse in the circular polarization state and performing spatial modulation on the femtosecond laser pulse to generate different patterns. The objective lens assembly is used for receiving and focusing the pattern to the surface of the sample. Thus, the femtosecond laser pulse passing through the polarization modulation module has the same polarization state in all directions, so that the absorptivity and the working efficiency of different positions of the sample M are consistent in the laser processing process, and the processing quality and effect are improved. Moreover, the micro-mirror array is sensitive to the polarization state, so that energy loss and non-uniformity caused by polarization can be avoided, and the processing uniformity and the processing precision can be further improved.

The invention discloses an angle continuously adjustable super-resolution microscope illumination device and method. The device comprises a light beam coupling assembly; an LED-DMD excitation light path and a digital micromirror array perform intensity modulation on Kohler illumination light according to a loaded intensity distribution reference pattern, a first light beam is reflected, and the first light beam is projected to a sample plane through a light beam coupling assembly and a conjugate light path in sequence; an SLM-Laser excitation / light control light path, a spatial light modulator performs phase modulation on parallel light according to a loaded phase distribution reference pattern to generate a second light beam, and the second light beam is coupled with the first light beam through a light beam coupling assembly and then is projected to a sample plane; the excitation mode switching module is used for switching a conjugate surface to realize TIRF illumination or spot scanning excitation; the control system realizes seamless switching between a preset light control imaging mode and a real-time light control imaging mode. The problems that a traditional super-resolution microscope is single in function, high in phototoxicity, poor in adaptability and the like are solved, and a more powerful imaging platform can be provided for biomedical research.

The invention relates to an electromechanical component comprising an electromechanical arrangement and a protective layer. The electromechanical element is characterized in that a protective layer is at least partially applied to the at least one surface and / or at least partially applied in the at least one cavity. The invention also relates to a separate mirror for reflecting DUV and / or VUV and / or EUV radiation, comprising an electromechanical element according to the invention and a reflective coating, the reflective coating being at least partially applied to a surface. The invention also relates to a micromirror array having at least two individual mirrors according to the invention. The invention also relates to a facet mirror having at least two micromirror arrays according to the invention. The invention also relates to a semiconductor technology system comprising at least one facet mirror according to the invention. The invention further relates to a method for producing the electromechanical element according to the invention and to a method for producing the individual mirror according to the invention.

The invention provides a control method and system of a reconfigurable optical phased array device. The control system comprises an MEMS micromirror array, a silicon-based waveguide array, a mode switching device and a controller, and the controller is configured to configure laser output parameters including a central wavelength, a tuning range and single longitudinal mode output control information, initialize the phase shifter position of each array element of the optical phased array, and control the phase shifter position of each array element of the optical phased array. Setting an initial deflection angle of the MEMS micromirror array and initializing a working state of the mode switching device; and receiving target scene information and judging whether the target scene information is changed or not, if so, generating a control instruction according to the target scene information, and controlling the optical phased array device according to the control instruction. The high integration of the optical system is realized by utilizing the high integration characteristic of the silicon-based optical chip and combining the design of the MEMS micromirror array and the mode switching device, and the overall performance and efficiency of the system are improved.

The invention discloses a working method and system of a projection camera integrated with a temperature control function, and relates to the field of cameras. The method comprises the following steps: synchronously acquiring an infrared thermal field, dark current of an image sensor and a duty state of a micro-mirror array, and calculating a multi-source thermal disturbance characteristic value through an entropy algorithm and photo-thermal phase difference analysis; driving a thermal diffusion diagram neural network by the characteristic values, inverting a thermal strain field, and projecting the thermal strain field to a Zernike basis function space to generate a thermally induced aberration risk index and a thermodynamic diagram; calculating an active temperature control intervention level and a strategy parameter through an adaptive threshold value and fuzzy reasoning based on the risk index and the convection intensity estimation value; constructing a multi-objective non-convex optimization problem according to the intervention level, and solving to obtain a collaborative scheduling weight and an optimization instruction; and extracting the maximum Lyapunov index and generating a thermal stability look-ahead confidence coefficient with the risk index to predict future thermal evolution and perform adaptive regulation and control. According to the invention, the imaging precision of the projection camera under thermal disturbance is improved through multi-level cooperative temperature control.

The utility model discloses an array type ultraviolet LED irradiation system which comprises an LED ultraviolet light source, an ultraviolet light beam control module, a digital light modulator (DMD), a projection lens module, a camera and a computer control module. And the ultraviolet light beam control module is used for controlling and adjusting the light path of the ultraviolet light from the LED ultraviolet light source, so that the light path is matched with the micromirror array of the DMD. The camera shoots an image of the target area and transmits the image to the computer control module. And the computer control module identifies a treatment area according to the received image and generates a control signal to control the DMD, so that the ultraviolet light beam is accurately projected to the treatment area. According to the utility model, through a DMD technology and a computer control technology, accurate control of ultraviolet light beams is realized, the ultraviolet light beams are accurately projected to a focus area, wrong irradiation to healthy skin is avoided, the treatment effect is improved, side effects and adverse reactions are reduced, and meanwhile, the safety of ultraviolet phototherapy is improved.

The utility model discloses a fixed-focus optical system and a DLP projector, and relates to the technical field of optics, and the fixed-focus optical system is provided with an image side and an object side which are oppositely arranged along the direction of an optical axis. The system is composed of a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a diaphragm, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, an equivalent prism and a micromirror array which are sequentially arranged from the image side to the object side. The fixed-focus optical system has the advantages of large visual angle, short focal length, high definition, low distortion and better imaging effect.

The present invention discloses a two-dimensional scanning micromirror, comprising a frame, a reflective portion, and a torsion beam with a semi-enclosed structure that is symmetrical about the center of the reflective portion, wherein the ends of the torsion beam are respectively connected to the reflective portion and the frame; the frame is processed with a metal electrode, which is connected to a conductive coil, and the conductive coil is located on the surface of the reflective portion, and the other side of the reflective portion is a mirror surface. The two-dimensional scanning micromirror of the present invention uses a novel torsion beam structure, requiring only a frame and a set of torsion beams with a semi-enclosed structure that are symmetrical about the center of the reflective portion to deflect the mirror surface in two directions, thereby achieving two-dimensional scanning of light signals. Since only a frame and a set of torsion beams are used, the mirror surface duty cycle is significantly improved, thereby improving signal transmission efficiency. Furthermore, when forming a micromirror array, the mirror surface duty cycle can also be increased, which is beneficial to the arraying of two-dimensional scanning micromirrors.

The invention discloses a rapid and efficient laser fuze signal high repetition frequency and high speed modulation system based on a DMD, and belongs to the field of laser fuze signal modulation. The modulation system is composed of a coupling optical system, a DMD modulation optical system and an emission optical system. The emission optical system is used for receiving the pulse laser beam output by the DMD modulation optical system, shaping the pulse laser beam and then projecting the pulse laser beam to a target area at a preset angle so as to illuminate a fuse; the divergence angle of the emergent laser beam is adjusted through the focusing mechanism, so that the illumination area is changed; the DMD modulation optical system is used for receiving the coupling optical laser beams output by the coupling optical system and outputting the coupling optical laser beams after spatial intensity modulation on the DMD micromirror array; in an echo receiving mode, laser echoes returned by a target are imaged on the surface of the DMD micromirror array; and the coupling optical system is used for coupling the laser beam output by the optical fiber laser source to a free space and adjusting the size and the divergence angle of the laser beam. The device is used for laser fuze signal modulation.

The application relates to the field of wafer defect detection, in particular to a MEMS-based fast zoom wafer detection microscope and a detection method. The microscope comprises an illumination component, a sample stage, a beam splitter, a microscope objective, a MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a FPGA-based synchronous control and processing module. By introducing the MEMS micromirror array zoom module composed of multiple micro-mirror units into the optical path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflection surface with controllable equivalent curvature is formed, the focusing regulation of the imaging light beam is realized, and electronic focusing without mechanical movement is completed. The response speed is superior to that of traditional mechanical regulation, and the high-speed online detection is adapted.

The present invention provides a miniature interference spectrometer and a measurement method thereof. The spectrometer comprises a light source system, a phase modulation system, a digital micromirror array, and a detector system. The light source system is used to emit a parallel light beam, which, after distributed phase modulation by the phase modulation system, produces a light field array composed of N×N light field units. The digital micromirror array is used to select the light field array so that at least two light field units are incident on the detector system, causing interference, thereby obtaining an interference pattern signal and acquiring spectral information of the parallel light beam. The present invention avoids the high-precision manufacturing and control issues of moving mirror scanning in traditional Fourier transform spectrometers. By using a driving voltage to switch the digital micromirror units of the digital micromirror array on and off, the system eliminates the need for a beam splitting system, reduces the system's volume and weight, and improves its energy efficiency.

The application relates to the technical field of optical detection, and discloses an intelligent spectrum adaptive detection system based on a programmable micro-mirror array, which comprises the following components: an optical path assembly; a programmable micro-mirror array; a spectrum sampling unit for collecting spectrum characteristic data of incident light in real time; a control unit for calling a target relative spectral response curve, controlling the light flux modulation degree of each wavelength corresponding region of the programmable micro-mirror array, obtaining a target spectrum intensity distribution curve, receiving an electric signal of the spectrum detection unit, obtaining an output spectrum intensity distribution curve of the system based on the electric signal, and feeding back and correcting the light flux modulation degree of the programmable micro-mirror array based on the target spectrum intensity distribution curve. The control unit modulates and feedback adjusts the light flux degree of the programmable micro-mirror array, so that the automation degree and the precision of measured optical information are improved.

The invention relates to the technical field of projection display, and discloses a holographic projection device based on a micromirror array, and the device comprises a projection imaging assembly, the projection imaging assembly comprises a cabinet housing, an air duct assembly is installed in the cabinet housing, the front surface of the air duct assembly is fixedly communicated with a leveling assembly, the leveling assembly comprises a transverse air pipe, and the transverse air pipe is fixedly connected with the cabinet housing. A rotating roller is installed on the inner side of the transverse air pipe, fan plates are fixedly connected to the two ends of the rotating roller, a pressing plate is installed at the bottom of the rotating roller, the air duct assembly generates air flow and is matched with the leveling assembly to restrain warping of the micromirror chip substrate, the air flow circulates in the transverse air pipe, the fan plates are transversely arranged, the rotating roller is driven to rotate, and the pressing plate is pushed to move downwards. The micro-mirror chip is pressed, and the problems that flatness errors and thermal expansion coefficient differences exist in the base and chip packaging, and when screws are tightened or the temperature is changed, assembly stress and thermal stress are generated, so that the chip substrate warps, and the holographic image quality is permanently reduced are solved.

The invention discloses an under-screen camera control system and method for a vehicle. The under-screen camera control system comprises a near-infrared camera, a millimeter-wave radar, an eyeball tracking module, an IMU (Inertial Measurement Unit) sensor group, a dynamic field angle optimization engine, a multi-mode biological characteristic fusion module and a warning module, wherein the near-infrared camera is embedded below a vehicle machine screen; the millimeter-wave radar is arranged in a vehicle A column; the near-infrared camera is integrated with an MEMS micromirror array and is used for adjusting a field angle in a dynamic driving process; the millimeter wave radar is used for acquiring iris displacement data; the IMU and eyeball tracking module provides head and pupil position information. The dynamic view field angle optimization engine calculates view angle adjustment parameters based on multi-source data, and controls the MEMS micromirror to realize rapid inclination angle response; and the fusion module fuses the multi-modal physiological data through cross-modal alignment and a weighting strategy to realize high-robustness identification. According to the system, dynamic perception and real-time intervention of the driver state can be realized, and the safety and interactivity of the intelligent cabin are improved.

The utility model is suitable for the technical field of projection lenses, and provides a vehicle lamp which comprises a light source, a collimation module, a reflector, a digital micromirror array and a projection lens which are sequentially arranged in the light path direction. The collimation module is composed of a spherical lens and an aspherical lens, and all lenses in the collimation module and the projection lens are glass lenses; light beams emitted by the light source are sequentially converged and collimated by the collimation module, reflected by the reflector and reflected by the digital micromirror array and then enter the projection lens, and patterns on the digital micromirror array are projected by the projection lens to form projection light spots. The vehicle lamp provided by the embodiment of the utility model is high in brightness and low in cost, and dark corners are reduced.

The invention discloses a micromirror assembly and a direct writing lithography system. The direct-writing photoetching system comprises a light source, a micro-reflecting mirror array, a micro-convex mirror array and a workbench, the light source is used for generating irradiation light towards the micro-reflector array; the micro-reflector array is used for modulating irradiation light into a target pattern light beam and emitting the target pattern light beam to the micro-convex lens array; the micro-convex lens array is used for receiving the target pattern light beam, processing the target pattern light beam into a focusing dot matrix and emitting the focusing dot matrix to the workbench; the micro-reflecting mirrors and the micro-convex mirrors are the same in number and are in one-to-one correspondence in central position; the central points of the six micro-mirrors adjacent to any one micro-mirror are connected to form a hexagon, the central points of any three micro-mirrors in the six adjacent micro-mirrors are not collinear, and the micro-mirrors are micro-reflecting mirrors or micro-convex mirrors. According to the direct-writing photoetching system, the connecting lines of the central points of the six adjacent micromirrors in any one of the micromirror array and the microconvex mirror array form a hexagon, so that the structure is compact, the duty ratio is improved, and the effective utilization rate of a light source is improved.