199 results about "Micromirror array" patented technology

The invention relates to the technical field of three-dimensional measurement, and discloses a double-zoom system and a three-dimensional information acquisition method thereof, and the three-dimensional information acquisition method comprises the steps: adjusting a projection unit and a first micromirror array, and enabling a projection end to work in a coaxial light mode; controlling the second micromirror array to zoom by adopting a preset second zoom parameter, and processing the two-dimensional image data of the imaging unit in real time to generate a two-dimensional ultra-depth-of-field image; adjusting the parameters of the second micromirror array until the image acquired by the imaging unit is clear; a preset first zooming parameter is adopted to control zooming of the first micromirror array, and scanning information and image data are obtained in real time and processed to obtain surface height information; generating three-dimensional information containing texture information in combination with the two-dimensional super field depth image and the surface height information; according to the method disclosed by the invention, the problem of high calculation error in the absence of 2D texture information in the traditional 3D imaging technology is solved, and the height information can be accurately acquired even in an area with scarce texture information.

The invention is suitable for the field of imaging, and discloses a micro lens array zoom module zoom method and an imaging system, and the method comprises the steps: obtaining a mapping relation table between a deviation objective lens working distance and a micro lens array state of a micro lens array zoom module; acquiring a laser spot image formed by irradiating the to-be-measured object with laser, and calculating the position of the to-be-measured object to the focal plane of the objective lens; determining an adjustment reference distance of the micro-lens array zoom module based on the position from the object to be measured to the focal plane of the objective lens, and comparing the adjustment reference distance with the mapping relation table to determine the micro-lens array state of the micro-lens array zoom module; and on the basis of the determined state of the microlens array, a focusing instruction is generated so as to realize automatic zooming of the microlens array zooming module, automatic zooming of the microlens array zooming module is realized, and the method has the advantages of extremely high focusing speed and high precision.

The invention provides an MEMS (Micro Electro Mechanical System) micromirror array chip, a module and optical scanning equipment. The MEMS micromirror array chip comprises a plurality of micromirror structures, a substrate, a vertical lead structure and a capacitance angle sensing structure, according to the micro-mirror array chip integrated with the capacitive sensor, array-level real-time angle detection, feedback control and high-precision scanning angle detection are realized, and the micro-mirror array chip is fast in driving and resistant to interference; meanwhile, the wiring density is reduced by frequency division multiplexing isolation signals; in addition, the application of a monolithic integrated capacitance angle sensor in a high-density micro-mirror array chip is realized by a thick substrate with a silicon through hole; and finally, the micromirror array chip of the monolithic integrated capacitance angle sensor is used for precision optical scanning equipment, a photoelectric angle detector is omitted, optical scanning high-precision real-time angle detection and feedback control, high-precision angle detection and high-speed scanning are realized, the use design is convenient, and the cost is low.

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The invention provides a structured light projector calibration method and system and a medium, and the method comprises the steps: projecting a multi-frequency stripe pattern to a target region based on an MEMS micromirror array module, obtaining a distorted image sequence, and carrying out the phase decoding, and obtaining a phase diagram corresponding to each frequency; resolving the phase diagram based on a phase shift method and an optical path triangulation principle to obtain a preliminary three-dimensional point coordinate; constructing a neural network model and a calibration sample set, obtaining a real three-dimensional coordinate by using a standard calibration plate or a known curved surface, and calculating the deviation between the initial three-dimensional point coordinate and the real three-dimensional coordinate to obtain a training sample set; and training the neural network model according to a training sample set based on an Euclidean distance loss function, outputting a three-dimensional offset compensation amount according to the neural network model, correcting the initial three-dimensional point coordinates, and realizing an end-to-end error self-compensation mechanism through the neural network model, so that deviation compensation is effectively performed on the three-dimensional point coordinates, and the accuracy of the three-dimensional point coordinates is improved. And the three-dimensional reconstruction precision is improved.

According to the micro-mirror array based on the electric control deformable micro-nano structure provided by the invention, the micro-mirror array with remarkable size advantage and cost benefit can be manufactured by innovatively fusing the electric control deformable suspended nano structure and the mirror surface design of the supporting column body; the suspended nano-structure can generate surface shape deformation through potential regulation and control so as to drive the mirror surface array to generate displacement, so that optical phase regulation and control or optical display are carried out through the mirror surface array, and the key technical bottlenecks of complex manufacturing process, low duty ratio, insufficient dynamic performance and the like of existing market products are effectively solved; performance limitation of a traditional micro-mirror device is broken through, and meanwhile localization breakthrough of a core device is achieved.

The invention discloses a calibration method of a polarization focal plane imaging system and an imaging system, relates to the field of photoelectric imaging and remote sensing detection imaging, and solves the problems of low correction efficiency and difficulty in correcting a system with a changed polarization state in the conventional polarization error correction technology. According to the calibration method, a plurality of coding patterns and corresponding polarization modulation matrixes are obtained based on the collected uniform light field and serve as calibration results. The polarization error correction method comprises the steps of obtaining an observation intensity vector based on a target scene; a corresponding polarization modulation matrix is obtained based on the coding pattern according to a coding polarization modulation matrix lookup table, and then a down-sampling Stokes vector after polarization error correction is obtained; and completing the correction of the polarization error through an imaging reconstruction method. A polarization focal plane imaging system comprises an imaging lens, a DMD digital micromirror array coding module, a focal plane DoFP polarization detector and an imaging reconstruction module. The method is suitable for the fields of remote sensing detection, target identification, environment monitoring and the like.

The invention discloses a scanning type exposure method and system adopting a parallel digital micromirror array, and relates to the technical field of photoetching exposure and maskless direct writing of mask.The scanning type exposure method comprises the steps that parallel digital micromirror initial mapping is established through a reference target exposure detection registration method; generating a block distortion field parameter table according to the initial mapping of the parallel digital micromirror, determining a micro-mark insertion position based on the block distortion field parameter table, and generating an expected coordinate; performing micro-mark exposure on the expected coordinate position, acquiring imaging data of the inserted micro-mark position, extracting an actual measurement coordinate from the imaging data of the micro-mark position, calculating a residual error by taking the expected coordinate and the actual measurement coordinate as an input difference, and writing the residual error into a residual error set; incremental fitting is carried out according to the residual set, the block distortion field parameter table is updated, and the exposure controller controls the parallel digital micromirror array to remap the pattern according to the updated block distortion field parameter table and triggers exposure. The method provided by the invention has better effects in coordinate mapping consistency and block parameter manageability.

The invention provides a micro-mirror chip, a micro-mirror device and an optical device, and belongs to the technical field of micro electro mechanical systems. The micro-mirror chip comprises a substrate, a micro-mirror array, an electrode, a light window and a fixing ring. The micromirror array is located on the first surface of the substrate, the electrode is located on the second surface of the substrate, and the first surface and the second surface are opposite in position in the thickness direction of the substrate; the fixing ring is fixed on the first surface of the substrate, the micro-mirror array is located in an in-ring space of the fixing ring, and the light window is fixed on the fixing ring and covers the micro-mirror array. In the packaging of the micro-mirror chip, the micro-mirror array is sealed in the sealed space formed by the substrate, the fixing ring and the light window, so that small particles do not fall into the environment where the micro-mirror array is located in the subsequent packaging process, the qualified rate of the packaged micro-mirror device can be improved, and the yield of the packaged micro-mirror device can be improved. Therefore, the yield of the packaged micro-mirror device is improved.

An obstacle detector uses a Micro-Electro-Mechanical System (MEMS) Micro-mirror Array (MMA) for scanning one or more laser beams over a field of regard to identify negative obstacles in the path of an autonomous vehicle or in other limited visual environments. In certain examples, the MEMS MMA may be segmented to concurrently and independently form and scan multiple laser beams over the field of regard to interrogate different areas, concurrently identify and verify candidate objects, maintain specified spatial resolution or implement a composite scan pattern. The MEMS MMA may be configured to concurrently and independently scan multiple laser beams at different wavelengths or spectral bands. The MEMS MMA may be configured to adjust a size, divergence or intensity profile of the laser beam(s) or to provide wavefront correction to compensate for atmospheric distortion. In certain embodiments, the MEMS MMA may be provided with tip, tilt and piston actuation of the mirrors to form the laser beams.

The invention discloses a moving target identification and tracking system based on an analog micromirror array (AMA), belongs to the technical field of photoelectric tracking and machine vision, and aims to solve the technical problems of slow response, large inertia and complex structure of a traditional mechanical tracking system. According to the technical scheme, an AMA composed of a plurality of MEMS micromirror units which can be independently controlled and have the static or quasi-static two-dimensional deflection capacity is adopted as a non-mechanical light beam deflection actuator, the AMA can be composed of micromirror arrays in various forms, digital image data are analyzed in real time to solve the target offset, and the non-mechanical light beam deflection actuator is obtained. And an instruction is generated to drive the AMA to deflect at a high speed so as to compensate the deflection, so that continuous and stable locking and tracking imaging of the moving target are realized. The system has the advantages of being high in response speed, high in tracking precision, free of mechanical inertia and compact in structure, supports flexible switching of various working modes such as wide-area scanning and long-distance tracking, and is high in application flexibility.

The invention is applicable to the field of microscopic imaging, and discloses a light sheet fluorescence microscopic imaging system and method.The system comprises a laser generator, a first semi-transparent and semi-reflecting mirror, a first micromirror array, a light beam scanning assembly, an object carrying platform, an imaging device, a second semi-transparent and semi-reflecting mirror, a camera and a second micromirror array; a laser beam generated by the laser generator is transmitted to the first micro-mirror array through the first semi-transparent and semi-reflecting mirror to be adjusted to generate an emergent beam, the emergent beam is reflected to the beam scanning assembly through the first micro-mirror array, and the beam scanning assembly scans the emergent beam in the X-axis direction and the Z-axis direction to generate a light sheet. After the light sheet irradiates a measured object placed on the object carrying platform, excited fluorescence is imaged through the imaging device and then is transmitted to the second micro-mirror array through the second semi-transparent and semi-reflecting mirror, the fluorescence adjusted by the second micro-mirror array is reflected to the camera through the second semi-transparent and semi-reflecting mirror, and high-speed tomography can be achieved.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and an elongated interface element (250) over which the MEMS mirror array structure (210) projects laterally, and a higher-level assembly (300) with at least one receptacle (350) for the interface element (250) of the MEMS micromirror unit (200), wherein the MEMS micromirror unit (200) is mounted in a receptacle (350) of the higher-level assembly (300) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) abuts the higher-level assembly (300). A gas atmosphere with a thermal conductivity of more than 0.05 W / (m·K) is introduced into a gap (400) between the interface element (250) and the receptacle (350).

Systems and method described herein are directed a digital micromirror device high resolution lamp system. The system can include an optical module. The optical module can be configured to dispose inside a headlamp. The optical module can include an array of micromirrors. The system can include one or more processors coupled with memory. The one or more processors can be configured to provide a beam of light. The beam of light can include an origin. The one or more processors can be configured to control a zone within the beam of light, using the array of micromirrors. The zone can be configured to project a graphic within the beam of light. The zone can include at least a 400:1 contrast ratio within at least a 20 degree by 10-degree field of view from the origin.

The invention relates to the technical field of intelligent peripherals, in particular to a user-oriented interaction information expansion method, which comprises the following steps that: each keycap acquires displacement and pressure, generates an event packet, uploads the event packet through an optical wireless link, and obtains a clock and supplies power; constructing a keycap graph by a master controller, obtaining an intention vector through graph convolution and pooling, inputting the intention vector into a cyclic network to generate a pixel matrix and a phase matrix, and downlink after Bernoulli sparse coding; performing key cap side orthogonal matching pursuit decoding and four-round gradient optimization, and outputting a differential pixel set, a differential phase set and a synchronization mark; the master control refreshes the digital micromirror array and the ultrasonic phased array in a differential manner, locks a frame-level time sequence through a synchronization pulse, compensates link delay and hardware drift in real time based on Kalman filtering, and keeps an optical-acoustic alignment error to be less than 100 microseconds; degradation monitoring enables a link to be automatically switched to a pre-carved character layer and to be quickly recovered when the link is abnormal, and a keyboard interaction information expansion scheme with low delay and high consistency is provided.

The invention discloses an ultrafast three-dimensional refractive index reconstruction method based on compressed sensing illumination. According to the invention, a multiplexing ODT imaging system based on double DMDs is adopted to collect a holographic image of multiplexing illumination; modulation and spatial filtering are carried out on the illumination light beam through the double-digital micromirror array; carrying out holographic solution on the holographic image to obtain a composite object light field at a plurality of illumination angles to train a deep learning neural network for demultiplexing the light field; obtaining a composite object light optical field at each illumination angle through a deep learning neural network, and reconstructing to obtain a three-dimensional refractive index of a sample based on a reverse reconstruction algorithm of a scalar diffraction theory; on the premise that the number of illumination angles is the same and the collection number is reduced exponentially, the imaging quality equivalent to that of a traditional ODT method is achieved, and the collection number can be saved by 10 times at most; the method is more excellent in the aspects of reconstruction contrast, fine structure fidelity and recovery precision, and the smaller the number of times of collection is, the more significant the improvement of image quality is.

The invention belongs to the technical field of laser ultrasonic nondestructive testing, and provides a laser ultrasonic nondestructive testing device based on compressed sensing calculation imaging. Comprising a pulse laser, a half-wave plate, a polarization beam splitting cube, a photoelectric detector, a beam expanding system, a diaphragm, a reflecting mirror, a homogenizing system, a digital micromirror array, a 4F imaging system, a sample, a reflecting mirror, a laser barrel vibration meter and an industrial personal computer. The invention further discloses an inversion imaging algorithm used for compressed sensing calculation imaging, the compressed sensing theory is introduced into laser ultrasound, the number of scanning points in traditional field scanning can be effectively reduced, the field scanning time is shortened, and meanwhile, due to the adoption of the digital micromirror array, the imaging accuracy is improved. Noise caused by movement of a mechanical system in a traditional scanning system can be effectively reduced, in addition, a frequency domain synthetic aperture algorithm is introduced into compressed sensing calculation imaging, the defect that only two-dimensional images can be obtained through compressed sensing imaging is overcome, and three-dimensional information of the defects can be reconstructed.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and a higher-level assembly (300), wherein the MEMS micromirror unit (200) is attached to the higher-level assembly (230) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) is in contact with the higher-level assembly (300). The MEMS mirror array module (100) is configured such that sufficient heat conduction from the MEMS mirror array structure (210) to the higher-level assembly (300) is achieved to prevent an undesirably high temperature rise in or on the MEMS mirror array structure (210).

The present invention discloses a three-dimensional correlation imaging method for underwater targets based on vortex light spatial filtering, comprising: (1) emitting pulsed laser, which is irradiated onto the underwater target after passing through a beam expander and a transmitting mirror group; (2) performing speckle encoding modulation on the light intensity distribution of the emitted or received light through a digital micromirror device (DMD); (3) filtering the light modulated by the DMD through a spiral phase plate and a mask plate with a transparent ring to achieve the filtering of scattered light and background light; (4) using a photomultiplier tube to obtain the filtered light intensity fluctuation changes and performing synchronous sampling to obtain the echo light intensities of targets at different distances; (5) performing reconstruction calculation according to the echo light intensities of targets at different distances and the speckle encoding modulation mode of the DMD to obtain the target images of different distance slices, namely three-dimensional imaging. By using the present invention, the interference of water body scattering and background light can be effectively filtered, and high signal-to-noise ratio and high-resolution three-dimensional imaging of underwater targets can be achieved.

The present application relates to the technical field of furniture detection, and relates to a device for detecting the smoothness of the inner wall of a hole in solid wood furniture, comprising a support and a detection unit, the support being used for arranging and adjusting the direction and angle of the detection unit, the detection unit comprising a fiber bundle probe and a main component, the fiber bundle probe being used for emitting light and receiving reflected light of the inner wall of the hole in the solid wood furniture to detect the smoothness, the fiber bundle probe comprising one emitting fiber and a plurality of receiving fibers, the emitting fiber being located at the center and the plurality of receiving fibers being uniformly distributed around the emitting fiber; the main component being connected with the fiber bundle probe and being used for providing a light source and processing reflected light signals, the main component comprising a laser diode, a programmable laser drive circuit, a MEMS micromirror array, a photodiode array and a microprocessor, the present application realizes non-contact detection through emitting and receiving light, completely avoids physical damage to the hole wall of the wood, and is particularly suitable for quality control of high-grade solid wood furniture.

The application discloses an exposure system and a photoetching machine. The exposure system comprises a light source, a micromirror array and a microlens array. The light source is used for emitting light. The micromirror array is used for receiving the light and converting the light into a first light spot array. The microlens array and the light source are respectively located on opposite sides of the micromirror array. The microlens array is used for receiving the first light spot array and performing focusing processing on the first light spot array to form a second light spot array. The microlens array projects the second light spot array onto a substrate. The photoetching machine comprises the exposure system. The micromirror array performs patterning processing on all the light and forms the first light spot array. The microlens array performs focusing processing on the first light spot array to form the second light spot array. Each microlens in the microlens array corresponds to each micromirror in the micromirror array. Compared with a traditional exposure system, the alignment accuracy problem between the microlens array and the DMD micromirror does not need to be considered.

The invention discloses a dual-imaging vehicle-mounted display device and a control method, and belongs to the field of vehicle-mounted display, a light sensor is mounted on a front windshield to detect the light intensity of ambient light, and a controller judges a currently required imaging mode according to light intensity data; when holographic film imaging is needed, the winding driving part drives the reel to rotate, the holographic film extends out and is unfolded to be attached to a front windshield, the deflection driving part drives the micromirror array to deflect, and light emitted by the image source is guided to the holographic film through the micromirror array to achieve imaging. When the free-form surface mirror is needed for imaging, the winding driving part drives the reel to rotate reversely, the holographic film is wound on the reel, the deflection driving part drives the micro-mirror array to deflect reversely, light emitted by the image source is reflected to the free-form surface mirror through the micro-mirror array, and the free-form surface mirror transmits the light to a front windshield for imaging. The projection area is greatly expanded to more than 20 inches, the field of view (FOV) is improved to more than 15 degrees * 5 degrees, and the virtual image distance is more than 20 m.

The invention belongs to the technical field of electronic manufacturing, and particularly relates to a patterning preparation method of a flexible circuit board, which comprises the following steps of: pre-processing and precisely positioning a flexible substrate; through an integrated multi-point optical deformation sensing system, structured light projection and high-resolution image acquisition are utilized, and a substrate surface deformation field function is sensed and constructed in a real-time and high-resolution manner; calculating an inverse deformation field in real time and reconstructing a compensation pattern through a high-speed digital pattern compensation processor based on the deformation field function; a high-resolution micro-mirror array digital light processor (DMD) is adopted as a dynamic mask, an ultraviolet light source and a projection optical system are combined, and the compensated pattern is exposed to a photoresist layer on the flexible substrate in real time; and finally, carrying out post-treatment such as developing, etching and photoresist removing. The problem of inherent deformation of the flexible substrate is fundamentally solved, the patterning precision, the preparation reliability and the yield are remarkably improved, and the preparation requirements of complex patterns and large-area flexible circuit boards are met.

The invention discloses a geometric phase metasurface high-flux laser direct writing system and method, and the system comprises a femtosecond laser, a beam expander, a angular dispersion compensation module, a digital micromirror array, a second 4F system, a spatial light modulator, a fifth lens and an objective lens according to the light advancing direction. Wherein the spatial light modulator is used for performing phase modulation on each unit light spot from the digital micromirror array based on a loaded holographic phase diagram to form a rod-shaped light spot array, and the rod-shaped light spot array forms parallel light transmitted at different angles through the fifth lens and converges at an entrance pupil of the objective lens together. And finally, a parallel direct-writing light spot array is formed in the two-photon photoresist, and geometric phase metasurface unit structure array printing is completed. According to the system, high-flux and high-flexibility direct-writing manufacturing of the geometric phase type metasurface is finally realized.

The embodiment of the invention provides an optical system and optical processing equipment. The optical system comprises a light source module, a polarization modulation module, a micromirror array and an objective lens assembly. The light source module is used for outputting femtosecond laser pulses. The polarization modulation module is used for receiving the femtosecond laser pulse and modulating the polarization state of the femtosecond laser pulse into a circular polarization state. And the micro-mirror array is used for receiving the femtosecond laser pulse in the circular polarization state and performing spatial modulation on the femtosecond laser pulse to generate different patterns. The objective lens assembly is used for receiving and focusing the pattern to the surface of the sample. Thus, the femtosecond laser pulse passing through the polarization modulation module has the same polarization state in all directions, so that the absorptivity and the working efficiency of different positions of the sample M are consistent in the laser processing process, and the processing quality and effect are improved. Moreover, the micro-mirror array is sensitive to the polarization state, so that energy loss and non-uniformity caused by polarization can be avoided, and the processing uniformity and the processing precision can be further improved.

The invention discloses an angle continuously adjustable super-resolution microscope illumination device and method. The device comprises a light beam coupling assembly; an LED-DMD excitation light path and a digital micromirror array perform intensity modulation on Kohler illumination light according to a loaded intensity distribution reference pattern, a first light beam is reflected, and the first light beam is projected to a sample plane through a light beam coupling assembly and a conjugate light path in sequence; an SLM-Laser excitation / light control light path, a spatial light modulator performs phase modulation on parallel light according to a loaded phase distribution reference pattern to generate a second light beam, and the second light beam is coupled with the first light beam through a light beam coupling assembly and then is projected to a sample plane; the excitation mode switching module is used for switching a conjugate surface to realize TIRF illumination or spot scanning excitation; the control system realizes seamless switching between a preset light control imaging mode and a real-time light control imaging mode. The problems that a traditional super-resolution microscope is single in function, high in phototoxicity, poor in adaptability and the like are solved, and a more powerful imaging platform can be provided for biomedical research.

An assembly for movably supporting a mirror comprises: a mirror; and one or more deformable members. A first end of the or each deformable member defines a support portion and a second end of the or each deformable member is attached (either directly or indirectly to the mirror (for example on a rear surface of the mirror). The or each deformable member comprises a first actuator and a second actuator, the first and second actuators being independently addressable. Actuation of the first actuator moves the mirror relative to the support portion in a first direction and actuation of the second actuator moves the mirror relative to the support portion in a second direction that is opposite to the first direction. In use, the support portion may be attached or fixed to a support and the first and second actuators can be used to move the mirror relative to said support.

The invention relates to an electromechanical component comprising an electromechanical arrangement and a protective layer. The electromechanical element is characterized in that a protective layer is at least partially applied to the at least one surface and / or at least partially applied in the at least one cavity. The invention also relates to a separate mirror for reflecting DUV and / or VUV and / or EUV radiation, comprising an electromechanical element according to the invention and a reflective coating, the reflective coating being at least partially applied to a surface. The invention also relates to a micromirror array having at least two individual mirrors according to the invention. The invention also relates to a facet mirror having at least two micromirror arrays according to the invention. The invention also relates to a semiconductor technology system comprising at least one facet mirror according to the invention. The invention further relates to a method for producing the electromechanical element according to the invention and to a method for producing the individual mirror according to the invention.

The invention provides a control method and system of a reconfigurable optical phased array device. The control system comprises an MEMS micromirror array, a silicon-based waveguide array, a mode switching device and a controller, and the controller is configured to configure laser output parameters including a central wavelength, a tuning range and single longitudinal mode output control information, initialize the phase shifter position of each array element of the optical phased array, and control the phase shifter position of each array element of the optical phased array. Setting an initial deflection angle of the MEMS micromirror array and initializing a working state of the mode switching device; and receiving target scene information and judging whether the target scene information is changed or not, if so, generating a control instruction according to the target scene information, and controlling the optical phased array device according to the control instruction. The high integration of the optical system is realized by utilizing the high integration characteristic of the silicon-based optical chip and combining the design of the MEMS micromirror array and the mode switching device, and the overall performance and efficiency of the system are improved.

The invention discloses a working method and system of a projection camera integrated with a temperature control function, and relates to the field of cameras. The method comprises the following steps: synchronously acquiring an infrared thermal field, dark current of an image sensor and a duty state of a micro-mirror array, and calculating a multi-source thermal disturbance characteristic value through an entropy algorithm and photo-thermal phase difference analysis; driving a thermal diffusion diagram neural network by the characteristic values, inverting a thermal strain field, and projecting the thermal strain field to a Zernike basis function space to generate a thermally induced aberration risk index and a thermodynamic diagram; calculating an active temperature control intervention level and a strategy parameter through an adaptive threshold value and fuzzy reasoning based on the risk index and the convection intensity estimation value; constructing a multi-objective non-convex optimization problem according to the intervention level, and solving to obtain a collaborative scheduling weight and an optimization instruction; and extracting the maximum Lyapunov index and generating a thermal stability look-ahead confidence coefficient with the risk index to predict future thermal evolution and perform adaptive regulation and control. According to the invention, the imaging precision of the projection camera under thermal disturbance is improved through multi-level cooperative temperature control.