89 results about "Wavefront" patented technology

A radar level gauge system, for determining a filling level of a product in a tank, comprises a transceiver, an antenna assembly, and processing. The antenna assembly comprises a dielectric antenna body having a conical external surface facing an interior of the tank and an internal surface facing away from the interior of the tank, when the antenna assembly is arranged at the opening in the tank wall, and an antenna feed coupled to the transceiver, and configured to propagate the transmit signal towards the internal surface of the dielectric antenna body as electromagnetic waves with convex wavefronts. The internal surface of the dielectric antenna body is shaped to refract the transmit signal from the antenna feed in such a way that the transmit signal propagates towards the surface of the product in the tank as electromagnetic waves with substantially planar wavefronts, following passage through the dielectric antenna body.

This invention relates to the field of semiconductor lithography error correction technology, specifically a lithography machine error correction method and system. The method includes: deploying an interferometric sampling array to capture the initial wavefront phase distribution to obtain a reference wavefront field; using a thermal drift separation operator to remove the slowly varying drift component caused by environmental thermal effects; and using multidimensional convolution matching between the residual wavefront field and a nominal lens aberration feature library to identify static aberration patterns, generating an inverse aberration compensation driving signal. A time-varying trend predictor based on a Kalman filter framework is used to continuously estimate future thermal drift, which is then superimposed with the inverse aberration compensation driving signal to synthesize a composite correction instruction set. Based on this instruction set, the workpiece stage positioning system and the projection lens focusing system are jointly kinematically adjusted to offset the overlay error jointly introduced by aberrations and thermal deformation. This method can separate the thermal drift component, improve aberration recognition accuracy, and achieve feedforward thermal drift correction and dual-system coordinated adjustment.

The present application relates to a kind of Hartmann wavefront measurement dynamic range extension method based on quadratic phase control, belong to wavefront measurement technical field.For the problem that the measurable slope interval is limited in the limited detection displacement range in traditional Hartmann wavefront measurement, at least the sub-aperture phase distribution containing reference focusing phase and quadratic phase term is constructed in super surface phase control, and the displacement of each sub-aperture corresponding light spot on the detection surface and the local average slope of the sub-aperture satisfy the preset monotone reversible nonlinear mapping relationship in design working interval by combining theoretical modeling, numerical optimization and / or experimental calibration.The present application can reconstruct the slope-displacement encoding rule of traditional Hartmann under the premise of keeping local average slope reversible and wavefront reconstructable, extend the encodable slope range in given displacement range, so as to improve the dynamic range of Hartmann wavefront measurement, especially suitable for the measurement scene of strong non-uniform, large dynamic range wavefront.

A method includes generating coherent light that has a wavefront, shaping the wavefront of the coherent light to provide the coherent light with a shaped wavefront, directing a probe beam of the coherent light with the shaped wavefront to an inspection surface of a wafer, causing a reflection beam to be reflected from the inspection surface of the wafer, capturing an image formed from the reflection beam reflected from the inspection surface of the wafer and generating image data related to the image, and analyzing the image data to determine whether there is a defect in the inspection surface of the wafer.

This invention relates to the field of laser processing technology, and discloses a method and system for femtosecond laser three-dimensional surface processing based on adaptive optics. The method includes: spatial topology reconstruction of the original point cloud data of the workpiece to be processed to obtain a three-dimensional digital surface; row spacing planning and optimization of the three-dimensional digital surface to obtain a spatial processing trajectory, and point wavefront mapping of the spatial processing trajectory to obtain pre-compensated phase distribution data; optical field distortion analysis of the surface reflected light signal of the workpiece to be processed to obtain the actual wavefront phase; encoding the pre-compensated phase distribution data into an initial wavefront control command for a beam shaping device, and iteratively optimizing the initial wavefront control command to obtain a wavefront supplement signal; and updating the spatial processing trajectory by combining the real-time contour data of the workpiece to be processed. This invention can improve the efficiency of femtosecond laser three-dimensional surface processing based on adaptive optics.

A method for reworking an optical element, in particular for microlithography, wherein the optical element has a first functional layer (203) which is optionally located on a figure individualised with figure processing for use in a first optical system or on an existing carrier layer (202). The method includes: over-coating the first functional layer (203) with an adjustment layer system (204), applying a carrier layer (205) onto the adjustment layer system (204), determining a setpoint wavefront effect for a new use of the optical element, carrying out a layer manipulation depending on the setpoint wavefront effect and applying a second functional layer (206) onto the carrier layer (205), wherein the optical element (200) is a lens or a wavefront correction element.

The present application relates to quantum key distribution, in particular to a satellite-ground continuous variable quantum key distribution system and method based on deep learning, a signal receiving and branching module receives multiplexed optical signals containing quantum signals and classical reference pulses from a satellite, and separates the quantum signals and classical reference pulses corresponding to a coherent detection and key generation module and an intensity measurement module; the intensity measurement module obtains a two-dimensional intensity distribution image of the classical reference pulses; a deep learning phase estimation module has a pre-trained deep learning model, takes the two-dimensional intensity distribution image as input, and outputs a two-dimensional phase correction value matrix with the same resolution as the input image; a phase modulation module performs real-time phase correction on the locally generated optical wavefront according to the two-dimensional phase correction value matrix to compensate for the phase distortion caused by atmospheric turbulence; the present application can effectively overcome the defect that it is difficult to accurately and real-time correct the phase distortion caused by atmospheric turbulence in the satellite-ground link.

This invention relates to the field of optical detection technology, specifically a multifocal parallel phase extraction and alignment system based on a spatial light modulator, comprising: a wavefront modulation module, a parallel detection module, an information extraction module, a parameter calculation module, and a correction and execution module. The wavefront modulation module loads a phase modulation pattern through a spatial light modulator, generating a complex wavefront containing multiple diffraction orders via the objective lens, forming multiple spatially separated detection focal spots on the sample surface. The parallel detection module receives the reflected light signals from each focal spot in parallel through an array detector. The information extraction module analyzes the signals and extracts the phase offset of each focal spot, constructing a mapping set between position and phase offset. The parameter calculation module calculates the tilt angle and field curvature distribution parameters based on this set. The correction and execution module generates a comprehensive correction signal to drive the objective lens or sample stage to perform multidimensional attitude adjustments. This system achieves multifocal parallel detection and synchronous parameter calculation, improving alignment efficiency and accuracy.

This invention provides a three-dimensional sonar imaging method based on acoustic orbital angular momentum and Bessel compensation. The method performs initial elevation and azimuth beamforming on multimodal OAM echoes to obtain preliminary three-dimensional sonar imaging results. The elevation angle is extracted and a Bessel compensation factor is obtained to correct signal distortion and suppress sidelobes in the time domain. Secondary beamforming is then performed using modal-dimensional azimuth matching vectors to improve azimuth resolution. Finally, a high-resolution, high-contrast three-dimensional image is output. This invention accurately compensates for amplitude and phase distortion of multimodal OAM echo signals by using a compensation factor obtained based on the target elevation angle and the characteristics of the Bessel function. This significantly reduces signal errors caused by wavefront bending, modal coupling, and non-ideal scattering, restores the orthogonality between different OAM modes, and improves imaging fidelity. This invention effectively compensates for OAM mode propagation and scattering distortion and suppresses modal coupling, making it suitable for various high-precision three-dimensional sonar imaging scenarios.

This relates to laser processing equipment and its components. [Solution] The laser processing apparatus includes a positioner positioned within a beam path through which a laser energy beam can propagate. A controller may be used to control the operation of the positioner to deflect the beam path within a first primary angular range and a second primary angular range, and to deflect the beam path to multiple angles within each of the first and second primary angular ranges. In other embodiments, the integrated beam dump system includes a frame and a pick-off mirror and beam dump connected to the frame. In yet another embodiment, the wavefront correction optical component includes a mirror having a reflective surface having a shape characterized by specific ratios of Fringe-Zernike terms Z4 and Z9. Many more embodiments are disclosed.

This invention belongs to the field of lidar detection and provides a dynamic underwater target localization method based on lidar. The main steps include: S1: The lidar simultaneously emits a blue-green beam and multiple near-infrared beams surrounding the blue-green beam; S2: Obtaining the pointing angles of the multiple near-infrared beams and the blue-green beam emitted by the lidar, and multiple water surface distance signals received by the lidar from the near-infrared beams returning via the water surface; S3: Calculating the normal vector of the wavefront cell where the blue-green beam intersects with the air-water interface, and determining the position of this intersection point; S4: Calculating the angle of refraction of the blue-green beam through the water surface; S5: Obtaining the three-dimensional coordinates of the underwater target. This invention captures dynamic water surface reflection characteristics using near-infrared beams, accurately obtains wavefront position and angle information, and simultaneously emits blue-green beams for dynamic underwater target detection, thereby achieving high-precision localization of underwater targets.

Described is a method and system for reducing a mask three-dimensional (M3D) induced contrast loss in a lithography process. A diffraction pattern of a target pattern is determined based on a zeroth and first order diffraction of the target pattern. The diffraction pattern is discretized and partitioned into zeroth order and first order diffraction zones to create partitioned zones. A wavefront target is determined based on the partitioned zones and a desired phase shift between the zeroth order diffraction and the first order diffraction.

The present invention includes a focusing device comprising micro-diffraction elements configured to diffract incident light applied by a user into G focused beams, wherein each micro-diffraction element belongs to one of the G groups, the micro-diffraction element belonging to the g-th group of the G groups generates the g-th focused beam, the density distribution of the micro-diffraction elements belonging to the g-th group is adjusted to apply an arbitrary intensity distribution to the g-th focused beam before it is focused, the position of the micro-diffraction elements belonging to the g-th group is adjusted to apply an arbitrary wavefront to the g-th focused beam before it is focused, and G is 2 or greater.

A method for inspecting curved objects is provided. The method includes: guiding a wavefront onto the surface of a curved object having at least one large-scale curvature; acquiring at least one reflection image, the at least one reflection image including distorted reflections from the wavefront of the curved object; and determining distortion correction parameters based on the large-scale curvature of the object. The method further includes at least one of: i) adjusting the reflection image by correcting distortion caused by the large-scale curvature of the object to create an adjusted image; and analyzing the adjusted image to look for small-scale local texture variations that may exist on the surface of the curved object; or ii) analyzing the reflection image using the distortion correction parameters; and adjusting a mesh algorithm to rate the small-scale local texture variations that may exist on the surface of the curved object. A system for inspecting curved objects is also provided.

The invention relates to the technical field of optical engineering, and discloses a handheld laser directional energy system which comprises a Shack-Hartmann wavefront detection system, a visual observation system, an atmospheric turbulence correction system, a laser emission system, a laser ranging system and an anti-shake system. By integrating wavefront detection and adaptive correction, coaxial design, target background difference enhancement through light splitting, MEMS reflector dynamic adjustment, jitter compensation and other technologies, the problems that the imaging quality is interfered by atmospheric turbulence, correction is inaccurate due to system space separation, the contrast ratio of a dark and weak target is poor, aiming is difficult, and jitter miss is caused are solved; the effects of high-resolution imaging, energy concentration, easy target discovery, automatic locking and stable aiming are achieved.

This invention relates to the field of thickness visual measurement technology, specifically to a method and system for detecting icing on power transmission lines based on unmanned aerial vehicles (UAVs). The method acquires a continuous video stream, performs global motion compensation using feature point matching, analyzes the temporal grayscale changes of pixels after image stabilization to extract a photometric fluctuation map, locates the insulator string connection point physically connected to the conductor as the source point, performs diffusion connectivity analysis in the wavefront propagation velocity field constructed by the photometric fluctuation, filters out non-connectivity interference based on the difference in connectivity propagation time, and obtains the conductor region. Within the conductor region, the cross-sectional width is measured, and the actual physical icing thickness is calculated. This invention integrates video stabilization, temporal micro-motion analysis, and spatial topological connectivity physical constraints, improving detection accuracy in environments with weak texture and dynamic interference, achieving a more accurate quantitative perception of the true state of iced conductors in complex environments, and providing more reliable data support for the operation and maintenance of power systems with icing.

A method for optimizing a source profile and wavefront profile to simulate a lithography process is disclosed. More particularly, a method for minimizing a phase offset between diffraction orders in a source profile to generate an optimized source profile and an optimized wavefront profile, using a cost function with a phase cost term is disclosed. The disclosed method may further include a diffraction overlap penalty term in the cost function.

This invention discloses a high-precision ranging method and system for time-refined DC back-traveling waves, belonging to the field of power system fault location technology. The method includes: acquiring signals and performing mode transformation to extract first-mode voltage and current signals; establishing a time-domain expression for the back-traveling wave; performing wavelet denoising on the signals to extract the first-mode DC voltage signal; reconstructing the time scale in the time-refined model; performing variational mode decomposition and Hilbert transform to obtain instantaneous amplitude and instantaneous energy sequences, constructing an energy kurtosis index, detecting sudden increases in energy kurtosis, and identifying the arrival time of the first DC back-traveling wavefront generated by the fault; calculating the wavefront arrival time difference based on the arrival times of the first DC back-traveling wavefront measured at both ends of the DC line, and determining the location of the fault point by combining the DC line length and traveling wave propagation characteristics. This invention has low dependence on traveling wave propagation parameters, provides reliable ranging results, and is applicable to deep-sea offshore wind power flexible DC systems.

The application discloses a deformable surface for regulating W-waveband microwave beam wavefront shape, relates to the microwave diagnosis technical field of magnetic confinement nuclear fusion plasma, and comprises a mirror surface assembly which comprises a plurality of strip-shaped reflecting units arranged in sequence and is connected in series through a hinge structure between two adjacent strip-shaped reflecting units, the hinge structure allowing relative angular displacement between the adjacent reflecting units; a driving array which comprises a plurality of stepping push rod motors, a push rod of the stepping push rod motor being drivenly connected with a back side support of the mirror surface assembly through a push rod connecting piece; and a reflecting layer used for covering a reflecting side surface of the mirror surface assembly. The deformable surface for regulating W-waveband microwave beam wavefront shape can realize continuous and accurate regulation of mirror surface curvature through cooperative control of the plurality of stepping push rod motors and adapt to dynamic changes of the plasma shape.

This invention discloses a single-frame coded phase retrieval system and parameter calibration method based on iterative filtering inversion, belonging to the field of lensless computational microscopy imaging technology. It solves the problems of mismatch between single-frame coded phase retrieval algorithms and complex coding scenarios, difficulty in balancing noise suppression and resolution, large system diffraction distance estimation errors, and inaccurate wavefront lateral offset calibration, leading to low imaging accuracy and poor stability. This invention constructs a system including a light source, replaceable amplitude / phase coding, CMOS imaging, one-dimensional electric displacement drive, and a built-in IrCPR algorithm control module, along with a process of "multi-distance calibration of coding functions → Z1 / Z2 calibration using ToG / SG according to coding board type → cross-correlation spectrum registration." This invention improves the accuracy of coding function calibration and diffraction distance estimation, achieves pixel-level alignment of the coded wavefront, and completes complex amplitude reconstruction with a single frame acquisition. The system has strong adaptability and stability, making it suitable for high-precision microscopy imaging scenarios.

A high-quality beam-shaping metasurface device for high-power laser processing belongs to the fields of optics and electromagnetic wave absorption. This invention includes a substrate and an asymmetric Fabry-Perot cavity; artificial micro / nano units include H-shaped, I-shaped, double-rod, double-elliptical, or V-shaped structures. The asymmetric Fabry-Perot cavity is a three-layer composite structure of "metasurface structure layer - dielectric spacer layer - metal," achieving the device's preset low light absorption function through resonant modulation; the metasurface structure layer consists of multiple subwavelength artificial micro / nano units arranged periodically or aperiodically for controlling the transmitted wavefront. This invention achieves customized beam shaping based on topology-optimized artificial micro / nano structure units, and enhances the low absorption capability of the metasurface device based on asymmetric Fabry-Perot cavity structure optimization. This invention maintains high optical efficiency and robustness under high power density conditions, achieving high-precision control of beam energy distribution, phase, and wavefront, enabling customized laser processing.

A wavefront control device to which the present invention is applied is provided with: an optical frequency comb generation unit that emits an optical frequency comb having a plurality of optical pulses disposed in numerical order on a time axis; and a wavefront synthesis unit that distributes the plurality of optical pulses of the optical frequency comb incident from the optical frequency comb generation unit to positions different from each other according to the relative phases thereof with respect to the first optical pulse on a plane crossing the traveling direction of the optical frequency comb, and generates a synthesized wavefront of the optical pulses emitted from the positions different from each other. The optical frequency comb generation unit is provided with a phase control unit that controls the repetition frequency and offset frequency of the optical frequency comb.

The application discloses a point diffraction wavefront regulation device based on an integrated structure of a fiber taper probe and a superlens and an optical detection equipment, and relates to the technical field of optical field regulation and micro / nano fiber output wavefront. Based on the point diffraction wavefront characteristics of the probe tip and the wavefront regulation capability of the superlens, the micro-scale light spot after phase shaping is accurately projected to a specific area on the sample surface under the condition that the axial propagation distance is significantly larger than the characteristic scale of the probe tip, and the functions of local excitation, selective irradiation and optical field control under the condition of high spatial bunching are realized. Compared with the traditional point diffraction wavefront generation scheme using a pinhole, an aperture or a conventional fiber end face, the application has significant advantages in the phase consistency of the point diffraction wavefront, the energy utilization rate, the processing repeatability and the system integration degree, and provides a high-controllability device structure scheme for micro / nano-scale optical detection and optical field analysis.

This invention discloses an intelligent early warning method, system, and medium for abnormal waves based on a three-branch bilinear gated fusion model, belonging to the field of marine engineering safety early warning technology. The method includes the following steps: constructing an original dataset containing normal wave samples and abnormal wave samples; constructing abnormal wave early warning samples based on a preset input time window and early warning period; extracting the first, second, and third feature vectors from a specific wavefront sequence using a three-branch feature extraction network; performing adaptive fusion through a bilinear gated fusion module to obtain the final fused features; inputting the final fused features into a classification and discrimination module, and outputting the probability of abnormal wave occurrence through multi-dimensional comprehensive analysis. This invention addresses the problems of scarce abnormal wave samples and highly imbalanced categories by introducing hybrid training, asymmetric loss, and false alarm suppression strategies to improve the stability and generalization ability of the developed model under real sea conditions.

The application relates to the field of optical precision measurement, in particular to a large-aperture aspheric mirror measuring device and method based on double CGHs, which comprises an interferometer, double CGH elements, a precision axial translation stage, a displacement measuring device and a computing unit, the double CGH elements are integrated with two CGHs on the same substrate, and the two CGHs are respectively designed to generate zero-position wavefronts at different axial positions. During measurement, the two CGHs are used to detect the zero position of the mirror in sequence, and the corresponding two axial positions are recorded, the actual relative displacement between the two zero positions is measured through the displacement measuring device, and the actual vertex curvature radius of the mirror is calculated by combining a geometric optical model. The application converts the high-precision absolute long-distance measurement which is difficult to realize in the traditional method into high-precision relative small displacement measurement which is easy to realize, fundamentally breaks through the precision bottleneck of the traditional method, and has the advantages of high precision, non-contact, simple operation and the like.

This invention provides a high-resolution computational imaging system and method for multi-structure electron irradiation and data fusion. The system includes: an electron beam source module that generates an electron beam of at least one wavefront shape and irradiates the sample under test; a sample platform module that carries the sample under test and, in conjunction with the electron beam of each wavefront shape, controls the relative displacement between the sample and the electron beam for zoned illumination; an electron detection module that, during zoned illumination, acquires diffraction patterns formed by the electron beam of the corresponding wavefront shape passing through the corresponding zone of the sample under test at each zone location; and a data processing module that stitches together the diffraction patterns of the wavefront-shaped electron beams corresponding to each zone location and uses an image reconstruction algorithm to perform phase recovery and complex amplitude reconstruction on the diffraction information of the stitched patterns to determine the sample transmission information and obtain a sample transmittance image. This invention achieves high-resolution imaging, has a simple overall structure, and low equipment cost.

This invention relates to a testing device and method for the frequency variation of wavefronts in atmospheric turbulence and aerodynamic effects, belonging to the field of photoelectric system tracking and control. The device includes: a photodetector, a spatial intensity distribution modulation plate, a lens, and a beacon light source. The beacon light source modulates its wavefront information through the lens and the spatial intensity distribution modulation plate, converting it into intensity information. The photodetector collects the intensity information. A thin-film panel is fabricated on the lens. The beneficial effects of this invention are: it converts the spatial distribution characteristics of the wavefront into intensity information and achieves the acquisition of the temporal characteristics of the wavefront information through a high-speed photodetector, enabling a measurement bandwidth at the MHz level, thus providing support for the study of strong turbulence and aerodynamic effects.