110 results about "Laser amplifiers" patented technology

A laser device according to one embodiment includes a laser light source configured to output pulsed laser light L1 and a pulse width control unit configured to amplify the pulsed laser light output from the laser light source, change a pulse width of the pulsed laser light, and output the pulsed laser light. The pulse width control unit includes a first laser amplifier configured to amplify the pulsed laser light and a pulse waveform manipulation unit disposed between the first laser amplifier and the laser light source and configured to manipulate a pulse waveform of the pulsed laser light.

The invention relates to the field of semiconductor device and integrated circuit research, in particular to a semiconductor device dose rate effect laser simulation system. Multiple wavelengths and a wide energy range are achieved through the optical fiber laser pulse seed source assembly and the solid laser amplifier assembly, the pulse width can range from 1 ns to 100 microseconds, variable complex waveforms such as square waves, rectangular waves, sine waves and pulse strings are achieved, and pulse laser with the energy range from the nanojoule level to the joule level and adjustable wavelengths and waveforms can be output according to requirements. The high-low energy laser adopts a common-path design, so that the system integration degree is improved; light spots are adjustable from centimeter level to micron level, and global irradiation and micro-area positioning and scanning of an irradiation sample can be realized. According to the invention, dose rate effects under different conditions can be accurately and flexibly simulated, the blank of a high-energy, variable-waveform and multi-wavelength dose rate effect laser simulation system is filled up, and an efficient solution is provided for the reliability research of devices under a complex irradiation environment.

The application provides an optical system and a monitoring method for monitoring stimulated Brillouin scattering effect. The optical system for monitoring stimulated Brillouin scattering effect firstly delivers a narrow linewidth seed source into a laser amplifier through a first optical device to amplify the narrow linewidth laser, and guides stimulated Brillouin scattering light generated by the laser amplifier to a back light monitoring module to detect the back light power and spectral components of the stimulated Brillouin scattering light in real time through the back light monitoring module, so as to realize the purpose of simultaneously and accurately measuring the stimulated Brillouin scattering light power and observing the laser components, and is more conducive to judging whether the stimulated Brillouin scattering effect occurs. Further, the optical system can adjust the light splitting ratio of the first optical device and the back light monitoring module to protect the narrow linewidth seed source and the spectrometer in the back light monitoring module from the damage of the back light to the greatest extent, and achieve the purpose of accurately judging the stimulated Brillouin scattering effect and protecting the system safety.

The invention provides an electromagnetic field constraint system and constraint method for a CO2 laser amplifier, and the system comprises a spiral electrode which is wound on a discharge tube of the CO2 laser amplifier, the spiral electrode comprises a first DC positive electrode, a radio frequency positive electrode, a second DC positive electrode and a ground electrode which are sequentially and adjacently arranged, and the current flows through the first DC positive electrode in the electric field direction from the first DC positive electrode to the ground electrode. The electric field direction of the current from the second direct current positive electrode to the ground electrode is partially perpendicular to the electric field direction of the current from the radio frequency positive electrode to the ground electrode; the CO2 laser amplifier discharge tube and the Helmholtz coil are coaxially arranged, and the magnetic field direction of the Helmholtz coil is perpendicular to the electric field direction from the radio frequency positive electrode to the ground electrode. In the discharge area of the CO2 laser amplifier, the strong electromagnetic field restraint system is adopted, the vertical alternating high-voltage electric field and the vertical alternating high-voltage magnetic field are used for restraining plasma movement, the electro-optical conversion efficiency can reach about 20%, the CO2 laser power can be effectively improved, and the arc discharge problem under the high radio frequency power injection condition is avoided.

A laser device includes an oscillator outputting pulse laser light; an amplifier amplifying the pulse laser light; an optical pulse stretcher extending a pulse width of the pulse laser light; a beam divergence angle adjuster including an upstream lens arranged on an optical path of the pulse laser light, a downstream lens arranged downstream of the upstream lens, and an optical path length changing mechanism for changing an inter-lens optical path length between the upstream lens and the downstream lens; and a processor controlling the beam divergence angle adjuster and obtaining a repetition frequency or a duty of the pulse laser light, and to change, when the repetition frequency or the duty changes by a preset threshold or more, the inter-lens optical path length so that the beam divergence angle of the extended pulse laser light becomes small in accordance with the repetition frequency or the duty after the change.

The application discloses a concentration gradient design method of a laser amplifier gain medium and the laser amplifier gain medium, and relates to the technical field of laser amplification, and aims to solve the heat effect problem that heat distribution is uneven due to uneven pump light absorption distribution of the laser amplifier gain medium. Technical points of the application include: according to the heat conduction equation, the phase difference of each section of the crystal corresponding to the seed light passing through the pump light region when the laser amplifier amplifies the seed light is calculated and obtained; according to the phase difference of each section of the crystal through which the seed light passes being equal, the phase difference of each section of the crystal corresponding to the seed light passing through the pump light region is set to be equal; the absorption coefficient of each section of the crystal is obtained by iterative solution using simulation software; and the concentration gradient of each section of the crystal is calculated and obtained according to the relationship between the absorption coefficient and the concentration gradient. According to the application, the concentration distribution of the laser amplifier crystal is designed according to the depolarization generated by the seed light passing through the amplification laser medium, so that the purpose of reducing the thermal depolarization effect from the root is achieved.

The application discloses a multi-pass disk laser amplifier, which comprises a near end and a far end, a pump laser beam, a seed laser beam, a first parabolic mirror, a second parabolic mirror, a laser gain medium, a first deflection optical prism group and a second deflection optical prism group, wherein the laser gain medium comprises a medium reflection surface; the pump laser beam located at the near end is aligned to the first parabolic mirror located at the far end for incidence through a first beam collimator; and the seed laser beam located at the near end is aligned to the second parabolic mirror located at the far end for incidence after passing through a second beam collimator. Compared with a conventional multi-pass disk laser amplifier, the application has a simpler structure, a shorter amplification optical path, a more compact volume and higher system stability. Furthermore, by changing the structure of the design prism of the pump light path, 12-pass, 24-pass, 36-pass, 48-pass and other multi-pass amplifications can be realized.

The invention relates to a laser amplifier assembly, a laser system and a lithographic apparatus. The laser amplifier assembly includes: first and second optical mirrors configured to transmit one of signal light and pump light and reflect the other of the signal light and the pump light, a wavelength of the pump light being different from a wavelength of the signal light; the laser amplification cavity is arranged between the first optical lens and the second optical lens, the laser amplification cavity comprises a laser gain medium doped with at least one doping agent, and the signal light is transmitted to the laser amplification cavity through one of the first optical lens and the second optical lens and penetrates through the laser gain medium; the pump light is transmitted to the laser amplification cavity via at least one of the first optical mirror and the second optical mirror and passes through the laser gain medium to interact with the laser gain medium to amplify the signal light, and one of the first optical mirror and the second optical mirror is configured to output the amplified signal light.

The invention discloses a Raman beam combination laser amplifier, relates to the technical field of laser, and aims to solve the problem of low conversion efficiency of an existing beam combination laser amplifier. A first bowl-shaped reflecting mirror and a second bowl-shaped reflecting mirror are coaxially arranged at the two ends of a columnar reflecting mirror assembly, the concave surfaces face the columnar reflecting mirror assembly, and a Raman laser crystal is arranged in the columnar reflecting mirror assembly; seed light output by the seed light module enters the Raman laser crystal through the center of the first bowl-shaped reflector; and a plurality of beams of fundamental frequency light output by the plurality of fundamental frequency light modules are obliquely incident to the Raman laser crystal from the side surface of the columnar reflector assembly. Each beam of fundamental frequency light of the Raman beam combination laser amplifier can be reflected for multiple times in the amplifier and interacts with the seed light for multiple times, the conversion efficiency of the single beam of fundamental frequency light is improved, the adjustment difficulty of the fundamental frequency light module is low, and the Raman beam combination laser amplifier is suitable for integrated use.

The invention discloses a high-wind-speed coherent laser wind-finding radar device, which comprises a seed laser, a plurality of cascaded acousto-optic frequency shift modules, a laser amplifier, a first optical switch, a laser transmitting and receiving detection module, a wind field inversion module and a wind speed identification and control unit, and is characterized in that the plurality of cascaded acousto-optic frequency shift modules realize frequency shift and beam splitting of the seed laser; the first optical switch selects the seed laser output by one acousto-optic frequency shift module as heterodyne detection seed laser; the wind field inversion module performs wind field inversion on the heterodyne beat frequency signal output by the balance detector to obtain a wind speed measurement result; the wind speed identification and control unit controls the frequency shift amount of the emitting seed laser and the frequency shift amount of the heterodyne detection seed laser, so that the difference value between the Doppler frequency shift amount caused by the wind speed and the frequency shift amount of the heterodyne detection seed laser is within the bandwidth range of the balance detector, and effective detection of the wind speed is achieved. According to the invention, the wind speed measurement range of the coherent wind lidar can be effectively improved, and the reduction of the wind speed measurement precision is not caused.

The invention discloses a 2-micron short-period laser amplifier based on a thulium-doped positive dispersion fluorotellurite optical fiber, which can solve the problem that a negative dispersion thulium-doped optical fiber is not suitable for performing gain management nonlinear amplification on a 2-micron pulse, and can obtain a pulse width lt. 50 fs, and single pulse energy gt; the femtosecond laser output device has the advantages of being full-fibrillated and compact in structure. The 2-micron femtosecond seed source is femtosecond pulse laser of a 2-micron wave band generated based on nonlinear amplification loop mirror mode locking; the chirped pulse amplifier is used for obtaining sub-picosecond 1.9 mu m femtosecond laser output with the average power greater than or equal to 1W; the optical fiber GMN amplifier is used for obtaining a few-period femtosecond pulse; the high-power optical fiber pulse compressor is a hollow-core optical fiber and is used for carrying out accurate dispersion compensation and high-quality pulse compression.

The application provides a kind of laser amplifier control system and method, the system includes the seed source, amplifier, phase modulator, nonlinear frequency conversion module and dichroic mirror arranged in sequence on optical path;The light output by nonlinear frequency conversion module is divided into two ways through dichroic mirror, one of which is used as system output light, and the direction of the other light path is provided with optical garbage bin;Adjust the phase modulator, so that the polarization direction of laser matches the nonlinear frequency conversion module, the system output light is the light after nonlinear frequency conversion, and the other way of fundamental light is recycled by optical garbage bin;Otherwise, the nonlinear frequency conversion module only outputs the fundamental light.By using the application, whether there is system output light, laser always passes through the crystal in nonlinear frequency conversion module, and the crystal will not exist the temperature drift caused by selective laser passing, to ensure the stability of system output light.

The present invention discloses a device for measuring the temporal gain evolution and relaxation process of CO2 laser amplification, belonging to the field of laser technology. The device comprises: a continuous CO2 laser seed source, a short-pulse CO2 laser seed source, a first beam splitter located in the outgoing optical path of the short-pulse CO2 laser seed source; a pulsed CO2 laser information detection module located in the transmitted optical path of the first beam splitter; a first thin-film polarizer located at the intersection of the reflected optical path of the first beam splitter and the outgoing optical path of the continuous CO2 laser seed source; a CO2 laser amplifier, a second thin-film polarizer, a second beam splitter, a chopper wheel module, and a first mercury cadmium telluride detector located sequentially in the outgoing optical path of the first thin-film polarizer; and a time gating circuit for controlling the on / off timing of the continuous CO2 laser seed source, the short-pulse CO2 laser seed source, and the CO2 laser amplifier. This device simplifies traditional gain measurement devices while simultaneously studying various relaxation phenomena during the amplification process.

The application discloses a birefringence compensation device and method for improving extraction efficiency of a laser amplifier, wherein two end-pumped Yb:YAG crystal rods are connected in series through a 4f system and a quartz optical rotation crystal, signal laser is amplified twice after passing through the 4f system, and thermal-induced birefringence is precisely compensated; meanwhile, a beam expanding 4f imaging system is adopted to reduce the size of signal laser and pump laser in the first rod, so as to improve the extraction efficiency, and meanwhile, the signal spot in the second rod is ensured to be large enough to prevent damage of high-energy laser to optical elements. Compared with the traditional birefringence compensation method, the application designs parameters according to the disadvantages of Yb:YAG crystal quasi-three-level, so that the extraction efficiency is improved while the same compensation effect is achieved, and higher-energy laser pulses are outputted, which is beneficial to industrial processing.

A laser amplifier includes a laser amplifying medium having a rectangular cross section perpendicular to an optical path axis of seed light, a pair of metal blocks bonded to two wider opposite surfaces of four surfaces of the laser amplifying medium parallel to the optical path axis, an excitation light source configured to output excitation light that excites the laser amplifying medium, and a collimating lens configured to collimate the excitation light.

The invention provides a laser amplifier control system and method. The system comprises a seed source, an amplifier, a phase modulator, a nonlinear frequency conversion module and a dichroic mirror which are sequentially arranged on a light path. Light output by the nonlinear frequency conversion module is divided into two paths through a dichroic mirror, one path serves as system output light, and a light garbage can is arranged in the light path direction of the other path; the phase modulator is adjusted, so that when the polarization direction of the laser is matched with the nonlinear frequency conversion module, the light output by the system is the light subjected to nonlinear frequency conversion, and the other path of frequency light is recycled by the light garbage can; otherwise, the nonlinear frequency conversion module only outputs the fundamental frequency light. According to the invention, no matter whether system output light exists or not, laser always passes through the crystal in the nonlinear frequency conversion module, the crystal does not have temperature drift caused by selective laser passing, and the stability of the system output light is ensured.

The invention relates to the technical field of lasers, in particular to a closed laser amplifier beam expanding and focusing integrated device. According to the technical scheme, the device comprises a bottom plate for providing support, and further comprises a collimation system, a laser amplifier used for generating high-energy and high-beam-quality laser and a focusing system which are installed on the top of the bottom plate and sequentially arranged, and a lifting system used for adjusting the height of the laser amplifier is installed on the bottom plate; the laser amplifier comprises a light-gathering cavity shell, a water inlet is formed in the bottom of the light-gathering cavity shell, and a water outlet is formed in the top of the light-gathering cavity shell; a ceramic layer is laid on the inner wall of the condensation cavity shell, and a quartz layer is laid on the surface of the ceramic layer. According to the invention, the collimating and focusing system and the laser amplifier are integrated in the dustproof shell through modular design, so that the multi-stage laser can be conveniently constructed, the light path can be accurately adjusted, the heat can be efficiently dissipated, the light beam quality can be guaranteed, and dust invasion can be prevented.

The utility model provides a double-end pumping slab laser amplifier based on temperature control, which comprises end face pumping laser modules respectively arranged at two ends of a slab heat sink module, and the end face pumping laser modules and the slab heat sink module are connected with a temperature detection assembly and a temperature control assembly. The temperature detection assembly comprises a first temperature probe used for monitoring the temperature of the end face pumping laser module, a second temperature probe used for monitoring the side face of the lath gain medium, and a third temperature probe used for monitoring the top face of the lath gain medium. The temperature control assembly comprises a first water cooling device and a fourth water cooling device which are used for adjusting the temperature of the end face pumping laser module, and further comprises a second water cooling device and a third water cooling device which are used for adjusting the temperature of the lath heat sink module. And the slab gain medium fully absorbs the pump light, so that the damage risk caused by escape of the pump light is reduced.

A mid-infrared laser generation system based on dispersion-managed soliton bunch pulses. The system can achieve high-power, high-efficiency and high-proportion mid-infrared laser output, and has the advantages of an all-fiber configuration, a compact structure and a high power proportion in a longer-wavelength region of a mid-infrared spectrum. A pulsed fiber laser device generates a nanosecond pulse laser in a 1.5-micron band. A fiber pulse stretcher is made of a single-mode silica fiber, splits nanosecond pulses into a plurality of ultrafast soliton pulses by means of a nonlinear effect, and performs spectral energy conversion from 1.5 microns to 2.4 microns. A fiber laser amplifier further increases the output power of a stretched pulse laser and extends a spectrum to a 2.7-micron band, and also increases pulse energy beyond a 2.3-micron band. A fiber mode field adapter efficiently couples into a nonlinear fiber pulses generated in the fiber laser amplifier. The nonlinear fiber extends a laser to a mid-infrared 3-5-micron band, thereby achieving high-power, high-efficiency and high-proportion mid-infrared laser output.

This application belongs to the field of laser amplification technology and provides a beam-actively controlled disk laser amplifier, comprising: a disk crystal for laser amplification; a seed light source for providing a polarized seed laser to be amplified, the seed laser having a first diameter spot at the disk crystal, and the size of the first diameter spot being dynamically adjustable; a pumping device for pumping the disk crystal, the pump light emitted by the pumping device having a second diameter spot at the disk crystal; and a spot adjustment component for dynamically adjusting the size of the first diameter spot, so that the ratio of the first diameter spot to the second diameter spot is within a preset range. This application uses a spot analysis device to monitor the diameter of the output seed amplified laser spot and uses a surface shape adjustment mirror to calibrate the spot diameter of the seed light in real time, thereby achieving a stable output spot diameter from low to high pump power and under power fluctuations, thus ensuring the stability of the output laser power and beam quality.

The invention discloses a picosecond optical fiber optical parametric oscillator based on acousto-optic wavelength tuning, which comprises an embedded integrated control platform, and the embedded integrated control platform controls a mode-locked laser seed source, a narrow-spectrum high-power tunable pumping source and an optical fiber optical parametric resonant cavity in a coordinated manner; the mode-locked laser seed source adopts a mode-locked laser oscillator as a seed source, a tunable spectrum filter and a laser amplifier are arranged behind the mode-locked laser seed source, and the tunable spectrum filter can also be arranged in a resonant cavity of the mode-locked laser oscillator. And a laser amplifier is arranged behind the mode-locked laser oscillator to obtain narrow-spectrum high-power tunable pulse laser. On the basis of the laser saturation gain amplification process of bi-pass filtering, narrow-spectrum, high-power and picosecond pulse laser output with the adjustable center wavelength of 1035-1065 nm is achieved, and on the basis of the optical fiber optical parametric oscillation process, high-power, narrow-spectrum and picosecond pulse laser output with the rapidly-adjusted center wavelength of 785-985 nm is achieved.

A high-power fiber laser array includes a pump module array, a pump fiber array, a resonant cavity module array or a power amplifier module array, and a power transfer fiber array. The pump module array, resonant cavity module array, or power amplifier module array are arranged separately, and connected to each other via the pump fiber array. The fiber laser resonators forming the resonant cavity module array are arranged as closely as possible in a linear array, or the fiber laser amplifiers forming the power amplifier module array are arranged as closely as possible in a linear array, thereby shortening the length of the power transfer fiber between each fiber laser resonator or fiber laser amplifier and the beam combining device. This specification can effectively shorten the length of the power transfer fiber in fiber laser array combining, improving the output power and stability of a single fiber laser oscillator or power amplifier.

To provide a laser amplifier in which the deformation of seed light due to a thermal lens is suppressed even if the energy of excitation light becomes high.SOLUTION: A laser amplifier includes a laser amplification medium 1b having a rectangular cross section perpendicular to an optical path of seed light, a pair of metallic blocks 2a and 2b joined to two wider surfaces 11 and 12 facing each other among four surfaces of the laser amplification medium parallel to the optical path, a pumping source that outputs pumping light for pumping the laser amplification medium, and a collimating lens that collimates the pumping light.SELECTED DRAWING: Figure 5

The invention discloses a birefringence compensation device and method for improving the extraction efficiency of a laser amplifier, in the birefringence compensation device, two end-pumped Yb: YAG crystal rods are connected in series through a 4f system and a quartz optical rotation crystal, and after passing, signal laser is amplified for the second time, and meanwhile, thermally induced birefringence is accurately compensated; meanwhile, a method of expanding a 4f imaging system is adopted, the extraction efficiency is improved by reducing the sizes of signal laser and pumping laser in the first rod, and meanwhile it is guaranteed that signal light spots in the second rod are large enough to prevent large-energy laser from damaging optical elements. Compared with a traditional birefringence compensation method, parameter design is carried out aiming at the disadvantages of quasi-three energy levels of the Yb: YAG crystal, the same compensation effect is achieved, meanwhile, the extraction efficiency is improved, laser pulses with higher energy are output, and industrial machining is facilitated.

The application relates to the technical field of laser amplification, and discloses a high-efficiency dye laser amplification method, which comprises the following steps: using a high-repetition-rate ultrafast laser as a pumping source, expanding and collimating the pumping light through a telescope system; adjusting the dye concentration in real time through a microfluidic system, and monitoring the dye concentration in real time through a fluorescence detection system; performing frequency doubling conversion through a photonic crystal frequency-doubling crystal; collecting pumping light intensity, dye concentration and output power data, and performing standardization processing; performing data analysis and system parameter optimization through a deep learning model; and monitoring and adjusting the temperature distribution of the laser amplifier in real time through an intelligent thermal management system. Through integration of a high-repetition-rate ultrafast laser pumping source and a telescope system, uniform expansion and collimation of the light beam are realized, and the efficiency and stability of laser amplification are significantly improved. Compared with the prior art, the application effectively reduces the influence of light spot unevenness on the amplification effect, and ensures the quality and consistency of the output light beam.

This invention provides a method for controlling ASE (Alternating Escalation) in a laser amplifier, comprising the following steps: configuring a controllable resonant cavity sharing the gain medium with the laser amplifier; and modulating the loss of the controllable resonant cavity to allow the gain medium to store and amplify the signal light during the signal light incident phase, and to rapidly release the remaining energy at the end of the signal light phase, so that the gain is below the ASE generation threshold, thereby suppressing ASE generation at its source. This invention actively regulates the energy state of the gain medium, releasing excess stored energy before ASE generation, ensuring the gain remains below the ASE generation threshold, thus eradicating ASE at its generation mechanism. Compared to the traditional passive attenuation method after ASE generation, this method eliminates signal light loss, provides more thorough suppression, and offers a faster response, making it suitable for various pulsed laser amplifier systems. Furthermore, the controllable resonant cavity shares the same gain medium with the laser amplifier, eliminating the need for additional gain modules, resulting in a simpler optical path, higher integration, and significantly reduced system complexity and hardware costs.

The invention discloses a method for measuring the thermal conversion coefficient of an end-pumped rod-shaped MOPA laser amplifier, and the method comprises the steps: placing a ZnSe reflector on the front end surface of a crystal at an angle of 45 degrees, and reflecting a pumping light beam and a signal light beam to be amplified into the crystal, so as to simulate the actual working state of the laser amplifier; a thermal infrared imager is placed behind the ZnSe reflector and faces the front end face of the crystal, and the temperature of the end face of the crystal is measured and collected; constructing a crystal steady-state temperature field equation containing a thermal conversion coefficient, wherein the equation is used for calculating crystal temperature distribution; and performing similarity calculation on the obtained crystal temperature distribution and the measurement result of the thermal infrared imager by continuously adjusting the value of the thermal conversion coefficient until the similarity reaches a set threshold value, thereby obtaining the final thermal conversion coefficient. The method can be embedded into a designed light path of the laser amplifier, and it is ensured that the measured value conforms to the actual working condition of the laser amplifier.

Various embodiments of a fiber laser amplifier are disclosed. In some embodiments, a gain fiber for a laser amplifier is provided in which a core of the gain fiber has one or more characteristics at a first end that differ from at a second end, including, for example, one or more of diameter, refractive index, and rare earth dopant concentration. In some embodiments, the residual pump laser reflecting element is positioned to reflect the residual pump laser back into the gain fiber to improve amplification efficiency. In some embodiments, a first cladding having a non-uniform thickness is disposed around a core of a gain fiber. These and other aspects of embodiments are more comprehensively disclosed herein.

The invention, which relates to the technical field of ultrafast laser, discloses a multi-disc multi-pass ultrafast laser amplification system comprising a first grating assembly, a first laser adjustment assembly, a multi-disc gain assembly, a second laser adjustment assembly and a second grating assembly which are arranged in sequence. A plurality of disc crystals of the multi-disc gain assembly are arranged at equal intervals to form a gain area; the first laser turn-back mirror and the second laser turn-back mirror are oppositely arranged on two sides of the multi-disc gain assembly and are used for reflecting the pulse laser distributed in the strip shape for multiple times to pass through a gain area of the multi-disc gain assembly; the first pump light coupling mirror and the second pump light coupling mirror are oppositely arranged on the two sides of the multi-disc gain assembly and used for coupling the input collimated rectangular pump light to a gain area of the multi-disc gain assembly. The first grating assembly and the second grating assembly form a chirped pulse compressor. According to the invention, the problem that the laser and the pump light are difficult to fully realize spatial overlapping in a gain region is solved, and the energy of the laser amplifier is effectively extracted.

The application discloses a full-fiber structure laser amplifier of a multi-core optical fiber, relates to the technical field of optical systems, and comprises an injection optical fiber, a beam splitting waveguide, a phase controller, an amplification device, a beam combining waveguide and an end cap. The injection optical fiber is used for injecting input laser into the beam splitting waveguide to form a beam splitting laser array. The beam splitting laser array is phase controlled by the phase controller and then transmitted to the amplification device for amplification processing. The amplification device outputs amplified amplification laser array to the beam combining waveguide. The beam combining waveguide combines the amplification laser array to obtain beam combining laser. The beam combining laser is expanded by the end cap to generate output laser. The scheme provided by the application can improve the stability of the laser amplification process.