309 results about "Master oscillator" patented technology

A fiber laser amplifier system including a master oscillator that generates a signal beam. A splitter splits the signal beam into a plurality of fiber beams where a separate fiber beam is sent to a fiber amplifier for amplifying the fiber beam. A tapered fiber bundle couples all of the output ends of all of the fiber amplifiers into a combined fiber providing a combined output beam. An end cap is optically coupled to an output end of the tapered fiber bundle to expand the output beam.

A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in a film on a workpiece is disclosed, which may comprise a master oscillator power amplifier MOPA or power oscillator power amplifier configured XeF laser system producing a laser output light pulse beam at a high repetition rate and high power with a pulse to pulse dose control; an optical system producing an elongated thin pulsed working beam from the laser output light pulse beam. The apparatus may further comprise the laser system is configured as a POPA laser system and further comprising: relay optics operative to direct a first output laser light pulse beam from a first laser PO unit into a second laser PA unit; and, a timing and control module timing the creation of a gas discharge in the first and second laser units within plus or minus 3 ns, to produce the a second laser output light pulse beam as an amplification of the first laser output light pulse beam. The system may comprise divergence control in the oscillator laser unit. Divergence control may comprise an unstable resonator arrangement. The system may further comprise a beam pointing control mechanism intermediate the laser and the workpiece and a beam position control mechanism intermediate the laser and the workpiece. Beam parameter metrology may provide active feedback control to the beam pointing mechanism and active feedback control to the beam position control mechanism.

Laser apparatus and methods involving multiple amplified outputs are disclosed. A laser apparatus may include a master oscillator, a beam splitter coupled to the master oscillator, and two or more output heads optically coupled to the beam splitter. The beam splitter divides a signal from the master oscillator into two or more sub-signals. Each output head receives one of the two or more sub-signals. Each output head includes coupling optics optically coupled to the beam splitter. An optical power amplifier is optically coupled between the beam splitter and the coupling optics. Optical outputs from the two or more output heads do not spatially overlap at a target. The master oscillator signal may be pulsed so that optical outputs of the output heads are pulsed and substantially synchronous with each other.

In a master oscillator power amplifier, a driver (208) of a diode laser (202) is specially controlled to generate a set of two or more injection laser pulses that are injected into a power amplifier (204) operated in an unsaturated state to generate a set (50) of laser pulses (52) that replicate the temporal power profile of the injection laser pulses to remove a conductive link (22) and/or its overlying passivation layer (44) in a memory or other IC chip. Each set (50) includes at least one specially tailored pulse (52) and/or two or more pulses (50) having different temporal power profiles. The duration of the set (50) is short enough to be treated as a single “pulse” by conventional positioning systems (380) to perform on-the-fly link removal without stopping.

A coherent laser beam combining system wherein the output of a single master oscillator is split into a plurality of signals, the signals are electronically modulated at unique frequencies. One signal is designated a reference signal while the remaining signals are passed through phase adjusters. All signals are optically amplified, aligned and passed through a beam splitter to split off a small sample that is imaged onto a photodetector. The photodetector output is fed to a signal processor that produces phase error signals that drive the phase adjusters resulting in a high-powered optically coherent output signal.

A fiber laser cavity that provides a new pulse shaping and spectral shaping technique is disclosed in this invention to achieve the purpose of resolving the difficulties arising from the issues related to Q-switched solid state lasers. The laser system achieves high repetition rate (1 kHz-100 kHz) and high pulse-to-pulse energy stability with small timing jitter of the laser pulses and scalable to the Joule pulse energy level. The laser system of this invention employs new approach with a hybrid fiber/waveguide master Oscillator-High Power Amplifier (MOPA) laser system in combination with the pulse shaping technology that allows not only to scale the fiber laser pulse energy to the multi-Joule level with high pulse-to-pulse energy stability but also achieve precise control of laser pulse timing jitter in a scale of <100 ps that is at least 5 to 10 time more accurate than for Q-switched systems where the same parameter reaches 500-1000 ps range.

A fiber laser amplifier system including a plurality of master oscillators each generating a signal beam at a different wavelength. A splitter is provided for each master oscillator that splits the signal beam into a plurality of fiber beams where a separate fiber beam is sent to a fiber amplifier. A tapered fiber bundle couples the output ends the fiber amplifiers for each wavelength group into a combined fiber providing a combined output beam, where a separate combined output beam is provided for the wavelength for each master oscillator. An end cap is optically coupled to an output end of each of the tapered fiber bundles to expand the combined output beam. A spectral beam combination grating receives the combined beams from the tapered fiber bundles at different angles and outputs an output beam of all of the combined beams as a single beam being directed in the same direction.

A system and method for providing a wavefront corrected high-energy beam of electromagnetic energy. In the illustrative embodiment, the system includes a source of a first beam of electromagnetic energy; an amplifier for amplifying said beam to provide a second beam; a sensor for sensing aberration in said second beam and providing an error signal in response thereto; a processor for processing said error signal and providing a correction signal in response thereto; and a spatial light modulator responsive to said correction signal for adjusting said beam to facilitate a correction of said aberration thereof. In more specific embodiments, the source is a laser and the sensor is a laser wavefront sensor. A mirror is disposed between said modulator and said sensor for sampling said beam. The mirror has an optical thin-film dielectric coating on at least one optical surface thereof. The coating is effective to sample said beam and transmit a low power sample thereof to said means for sensing aberration. The processor is an adaptive optics processor. The spatial light modulator may be a micro electro-mechanical system deformable mirror or an optical phased array. In the illustrative embodiment, the source is a master oscillator and the amplifier is a power amplifier beamline. An outcoupler is disposed between the oscillator and the amplifier.

A coherent laser beam combining system wherein the output of a single master oscillator is split into a plurality of N signals, and the N signals are electronically modulated at unique frequencies. There is no reference signal and all of the signals are passed through phase adjusters. All N signals are optically amplified, aligned and passed through a beam splitter to split off a small sample that is imaged onto a photodetector. The photodetector output is fed to a signal processor that separates the N signals and produces N phase error signals that drive the N phase adjusters resulting in a high-powered optically coherent output signal.

A supply-regulated VCO exhibits reduced or no supply sensitivity peaking. The VCO includes an oscillator whose supply current is regulated to control the oscillating frequency of the oscillator. A VCO input signal controls the supply current so that there is a relationship between the input signal and the oscillator output frequency. Power supply noise that might otherwise affect oscillator operation is shunted from a supply current input lead of the oscillator to ground by a bypass capacitor. In one example, an auxiliary circuit supplies an auxiliary supply current to the oscillator, thereby reducing the amount of supply current a supply regulation control loop circuit must supply. In another example, a supply regulation control loop circuit supplies a control current to a main oscillator, but the bypass capacitor is not coupled to this oscillator but rather is coupled to a slave oscillator that is injection locked to the main oscillator.

The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber.

Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F₂ injection controls with novel learning algorithm.