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31results about How to "Output power" patented technology

High power deep ultraviolet laser with long life optics

The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities. Techniques and components are disclosed for minimizing the potential for optical damage and for reducing the pulse energy density to less than 100×10−6 J/cm3. Important improvements described in this specification have been grouped into the following subject matter categories: (1) Solution to CaF2 surface damage discovered by Applicants, (2) description of a high power ArF MOPA laser system, (3) description of beam delivery units, (4) polarization considerations (5) a high speed water-cooled auto shutter energy detector module and (6) other improvements.
Owner:CYMER INC

Wind power system

The present invention relates to a wind power generation system. Said system is an array of a number of wind power generation units on the supporting tower, each wind power generation unit is formed by one vertical axis wind rotor and one or more power generation unit(s), in which the rotation shaft of the wind rotor is coupled with the rotor shaft of the single generator set through a connector, or the rotation shaft of the wind rotor is connected with the rotor shafts of multiple generator sets through the transmission mechanism. The present invention proposes a helical vertical axis wind rotor and a lineal vertical axis wind rotor constructed by the drag type blade and the lift type blade, and proposes a helical wind rotor with pure drag type blade as well as the disassembling and splicing design of the above wind rotor. The present invention is similar to a “building block” power generation unit whose design could be optimized according to the wind field to reach megawatts scale power output. Furthermore, by adjusting the number of the generator sets connected with the single wind rotor in the power generation unit, the starting load of the wind rotor can be lowered on the one hand, on the other hand this can load proper number of generator sets with small power by disengaging and engaging at real time according to the varying conditions of the wind speed. The manufacture, transportation, installation and maintenance of said power generation unit are relatively easier and it can resist larger wind disaster, thus being of higher safety.
Owner:NANJING YUNENG NEW ENERGY TECH

Electric mixer

An electric mixer including a driving mechanism and a transmission mechanism. A first connecting tube, a second connecting tube and a third connecting tube which are parallelly arranged under the transmission mechanism at intervals. The first connecting tube is positioned in the middle of the electric mixer for connecting with and driving a mixing rod and a paddle. The second and third connecting tubes are respectively disposed on two sides of the first connecting tube. Each of the second and third connecting tubes serves to connect with and drive another mixing rod and another paddle. A smaller first gap is defined between the first middle connecting tube and any of the second and third lateral connecting tubes. A larger second gap is defined between the second and third connecting tubes. One mixing rod and paddle thereof can be connected with any of the first, second and third connecting tubes to form a single-paddle electric mixer. Alternatively, two mixing rods and paddles thereof can be respectively connected with the second and third connecting tubes to form a twin-paddle electric mixer with the larger gap. Still alternatively, two mixing rods and paddles thereof can be respectively connected with the first middle connecting tube and any of the second and third connecting tubes to form a twin-paddle electric mixer with the smaller gap.
Owner:LEE YEONG IND

Lithography laser with beam delivery and beam pointing control

The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam to a desired location such as the entrance port of the production line machine. Preferred embodiments include equipment for beam attenuation, equipment for automatic feedback beam alignment and equipment for accurate optics module positioning at installation and during maintenance. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.
Owner:CYMER INC
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