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23 results about "Pulse stretcher" patented technology

Pulse width expansion device

Provided is a pulse width expansion device for expanding the pulse width of a pulsed laser beam, the pulse width expansion device including a first optical pulse stretcher, a second optical pulse stretcher, a third optical pulse stretcher, and a fourth optical pulse stretcher disposed on the optical path of the pulsed laser beam, the first optical pulse stretcher, the second optical pulse stretcher, the third optical pulse stretcher, and the fourth optical pulse stretcher being disposed on the optical path of the pulsed laser beam. The optical path length of the delay optical path of the first optical pulse stretcher is L1, the optical path length of the delay optical path of the second optical pulse stretcher is L2, the optical path length of the delay optical path of the third optical pulse stretcher is L3, and the optical path length of the delay optical path of the fourth optical pulse stretcher is L4. When n is an integer of 2 or more, L2 is an integer multiple of 2 or more of L1, L3 satisfies (n-0. 75) * L1 < = L3 < = (n-0.25) * L1, and L4 satisfies (n-0.25) * L1 < = L4 < = (n + 0.25) * L1.
Owner:AURORA ADVANCED LASER CO LTD

Pulse modification apparatus comprising at least one pulse stretching and / or pulse compression device

ActiveUS12580357B2Laser monitoring arrangementsPulse stretcherActuator
A pulse modification apparatus includes at least one pulse stretcher for dispersive stretching of laser pulses and / or at least one pulse compressor for dispersive compression of the laser pulses, an actuator for setting a dispersion of the at least one pulse stretcher or a dispersion of the at least one pulse compressor by setting at least one manipulated variable, a controller for controlling the actuator based on a measurement signal, and an ambient sensor for detecting at least one ambient parameter as the measurement signal. The dispersion of the at least one pulse stretcher or the dispersion of the at least one pulse compressor is dependent on the at least one ambient parameter.
Owner:TRUMPF LASER GMBH CO KG

Laser device and electronic device manufacturing method

A laser device includes an oscillator outputting pulse laser light; an amplifier amplifying the pulse laser light; an optical pulse stretcher extending a pulse width of the pulse laser light; a beam divergence angle adjuster including an upstream lens arranged on an optical path of the pulse laser light, a downstream lens arranged downstream of the upstream lens, and an optical path length changing mechanism for changing an inter-lens optical path length between the upstream lens and the downstream lens; and a processor controlling the beam divergence angle adjuster and obtaining a repetition frequency or a duty of the pulse laser light, and to change, when the repetition frequency or the duty changes by a preset threshold or more, the inter-lens optical path length so that the beam divergence angle of the extended pulse laser light becomes small in accordance with the repetition frequency or the duty after the change.
Owner:GIGAPHOTON INC

Laser device and method for manufacturing electronic device

This laser device is provided with: a laser oscillator which includes an optical resonator and a pair of electrodes for generating discharge by applying a voltage to a laser gas, and which outputs a first pulsed laser light; a first optical pulse stretcher that transmits a portion of the first pulse laser light, surrounds the other portion of the first pulse laser light by one circle, and outputs a first transmitted light and a first one-circle surrounding light, which have a first shift amount and spatially overlap a portion of the first transmitted light and the first one-circle surrounding light, thereby outputting a second pulse laser light in which the pulse time width of the first pulse laser light has been expanded; and a second optical pulse stretcher that transmits a part of the second pulse laser light, surrounds the other part of the second pulse laser light by one circle, and outputs second transmitted light and second one-circle surrounding light that have a second offset amount different from the first offset amount and spatially overlap a part of the second transmitted light and a part of the second one-circle surrounding light. As a result, a third pulse laser beam having an extended pulse time width of the second pulse laser beam is output.
Owner:AURORA ADVANCED LASER CO LTD

Apparatus for and method of optical component alignment

Apparatus for and method of aligning optical components such as beam splitters in an optical pulse stretcher in which a landing spot of a beam which has traversed a portion of the optical beam splitter and a coincident landing spot of a beam split from a retroreflected input beam are made to align on a target spot. Also disclosed is an apparatus and method for aligning the retroreflector to facilitate proper beam alignment. A fluorescent material may be used to render a beam landing spot visible.
Owner:CYMER INC

Femtosecond laser pulse compression system with compact structure and adjustable pulse width

The invention provides a femtosecond laser pulse compression system with a compact structure and an adjustable pulse width, and relates to the technical field of femtosecond lasers, the system sequentially comprises a seed source, a pulse stretcher, an amplification chain and a pulse compression device along a light path, the pulse compression device comprises a polarization beam splitting unit, an electro-optical polarization modulation unit, a single compression grating and a light path turn-back unit; wherein the polarization beam splitting unit, the electro-optical polarization modulation unit, the single compression grating and the light path turn-back unit jointly form a multi-channel folding compression light path; a voltage signal with a specific time sequence is applied to the electro-optical polarization modulation unit, and the polarization state of a light beam is dynamically switched, so that the light beam is selectively controlled to complete back-and-forth transmission of a preset number of times in a multi-channel folding compression light path in different polarization states, and the compression ratio of laser pulses and the width of output pulses are continuously adjusted. On the premise that large-spread-width matching is guaranteed, the system is extremely compact, and the pulse width is continuously and flexibly adjusted in an electric control mode.
Owner:TIANJIN UNIV

Pulse stretcher and electronic device manufacturing method

A pulse stretcher includes a beam splitter splitting pulse laser light into two beams of pulse laser light, first concave mirrors arranged side by side in a predetermined direction, and second concave mirrors arranged side by side in the predetermined direction as having the same number as the first concave mirrors and facing the first concave mirrors, respectively. One beam of pulse laser light split by the beam splitter travels to one first concave mirror among the first concave mirrors and is reflected alternately by the first concave mirrors and the second concave mirrors 12 times or more as even number times to return to the beam splitter. A number of overlapping of the one beam at each of concentration points where at least part of the one beam of pulse laser light overlaps at beam waists of the one beam is two.
Owner:GIGAPHOTON INC

Laser apparatus and electronic device manufacturing method

PendingUS20260124697A1Laser beam welding apparatusPulse broadeningPulse stretcher
A laser apparatus includes an oscillator configured to output a pulse laser beam, a random phase plate disposed in an optical path of the pulse laser beam, and an optical pulse stretcher disposed in the optical path of the pulse laser beam that has passed through the random phase plate and configured to stretch a pulse time width of the pulse laser beam by transmitting part of the pulse laser beam, making the other part circulate at least once through a delay optical path, and outputting transmitted light and circulating light.
Owner:GIGAPHOTON INC

Mid-infrared laser generation system based on dispersion-managed soliton bunch pulses

PCT designated stageWO2026103541A1Active medium shape and constructionLaser cooling arrangementsMid infrared laserPulse stretcher
A mid-infrared laser generation system based on dispersion-managed soliton bunch pulses. The system can achieve high-power, high-efficiency and high-proportion mid-infrared laser output, and has the advantages of an all-fiber configuration, a compact structure and a high power proportion in a longer-wavelength region of a mid-infrared spectrum. A pulsed fiber laser device generates a nanosecond pulse laser in a 1.5-micron band. A fiber pulse stretcher is made of a single-mode silica fiber, splits nanosecond pulses into a plurality of ultrafast soliton pulses by means of a nonlinear effect, and performs spectral energy conversion from 1.5 microns to 2.4 microns. A fiber laser amplifier further increases the output power of a stretched pulse laser and extends a spectrum to a 2.7-micron band, and also increases pulse energy beyond a 2.3-micron band. A fiber mode field adapter efficiently couples into a nonlinear fiber pulses generated in the fiber laser amplifier. The nonlinear fiber extends a laser to a mid-infrared 3-5-micron band, thereby achieving high-power, high-efficiency and high-proportion mid-infrared laser output.
Owner:BEIJING UNIV OF TECH

Laser device and method of manufacturing electronic device

PendingCN122436779ABeam splitterPulse stretcher
The present application provides a laser device and a manufacturing method of an electronic device, the laser device according to one aspect includes: a discharge excitation type laser oscillator which outputs pulsed laser in an ultraviolet wavelength region; a first optical pulse stretcher which includes a beam splitter and a plurality of concave mirrors, and which expands a pulse width of the pulsed laser; and a relay lens which includes a first lens and a second lens arranged on an optical path of the pulsed laser after the pulse width is expanded, the first lens being a spherical plano-convex lens, and the second lens having a focal length in a long side direction of a beam cross section of the pulsed laser which is shorter than a focal length in a short side direction.
Owner:AURORA ADVANCED LASER CO LTD

A laser welding method based on variable pulse width double pulse and a multi-scale observation system

ActiveCN116890169BLaser beam welding apparatusNanosecond laser pulseFemto second laser
This invention relates to a laser welding method based on variable pulse width dual pulses and a multi-scale observation system, belonging to the field of femtosecond laser welding application technology. The invention splits a femtosecond laser pulse into two femtosecond laser pulses. One of these pulses is spread into a picosecond-nanosecond pulse with adjustable pulse width using a pulse stretcher. The delay between the two pulses can be controlled using a delay translation stage. This allows the interface to be welded to first be irradiated by the picosecond-nanosecond laser pulse to generate a suitable thermal effect, followed by irradiation by the femtosecond laser pulse to form a "cold weld." By controlling the thermal phase transition process, welding efficiency and performance are improved. Combined with a multi-scale observation system, the welding process can be observed in real time from the femtosecond to the second scale. This invention has the advantages of high efficiency and simplicity, enabling high-quality, high-strength, and high-efficiency welding of difficult-to-machine dissimilar materials.
Owner:YANGTZE DEITA GRADUATE SCHOOI OF BEIJING INST OF TECH (JIAXING) +1

Laser apparatus, pulse width stretching apparatus, and electronic device manufacturing method

A laser apparatus according to an aspect of the present disclosure includes a laser oscillator configured to emit a pulse laser beam, and a first optical pulse stretcher, a second optical pulse stretcher, and a third optical pulse stretcher that are disposed on an optical path of the pulse laser beam. When L1 represents an optical path length of a delay optical path of the first optical pulse stretcher, L2 represents an optical path length of a delay optical path of the second optical pulse stretcher, L3 represents an optical path length of a delay optical path of the third optical pulse stretcher, and n represents an integer equal to or larger than two, L2 is an integral multiple of L1 by an integer equal to or larger than two and L3 satisfies the following condition: (n−0.75)×L1≤L3≤(n−0.25)×L1.
Owner:GIGAPHOTON INC

An eight-way pulse stretcher

ActiveCN116316027BAvoid the problem of increased back-end amplification noiseAvoid the problem of increased amplification noiseLaser detailsDiffraction gratingsGratingPulse broadening
This application provides an eight-channel pulse stretcher, including a circulator, a collimator, a polarization beam splitter, a two-pass transmission-type single-grating stretching unit, a beam-shrinking unit, a quarter-wave plate, a first 0-degree reflector, and a second 0-degree reflector. The pulse stretcher of this application achieves a large pulse stretching by having the pulse pass through the two-pass transmission-type single-grating stretching unit four times. This is simpler, more reliable, and more practical than existing active-switching methods, and avoids the problem of increased amplification noise at the back end of the pulse stretcher. The pulse stretcher of this application has a compact structure, high stability, and does not require switching control. It can stretch pulses to the nanosecond level, making it very suitable for the stretching and amplification of high-energy pulses. The pulse stretcher of this application uses a circulator and collimator to realize the fiber input and output of the optical pulse, greatly improving the stretcher's accessibility and making it very suitable for embedding in high-energy laser systems.
Owner:WUHAN YANGTZE SOTON LASER CO LTD

Laser apparatus and method of manufacturing electronic device

A laser apparatus includes a laser oscillator including an optical resonator and a pair of electrodes that apply a voltage to a laser gas to cause discharge, and configured to output a first pulse laser beam, a first optical pulse stretcher configured to output a second pulse laser beam for which a pulse time width of the first pulse laser beam is extended by transmitting a part of the first pulse laser beam, making the other part circulate once, and outputting first transmitted light and first once-circulating light that spatially partially overlap with a first shift amount, and a second optical pulse stretcher configured to output a third pulse laser beam for which a pulse time width of the second pulse laser beam is extended by transmitting a part of the second pulse laser beam, making the other part circulate once, and outputting second transmitted light and second once-circulating light that spatially partially overlap with a second shift amount, which is different from the first shift amount.
Owner:GIGAPHOTON INC

Optical pulse stretcher, laser apparatus, and electronic device manufacturing method

ActiveUS12671220B2Pulse broadeningPolarizer
An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.
Owner:GIGAPHOTON INC +1

A compact compressor and a stretcher for spectrally-divided broadband chirped pulse amplification

PCT designated stageWO2026082300A1Laser arrangementsOptical devices for laserPulse broadeningChirped pulse amplification
Chirped pulse amplification with an optical pulse stretcher (13) for dividing an optical input pulse (14) in temporally and spectrally separated collinear pulses and a compressor for applying a negative dispersion to an optical signal (2), the compressor comprising: - a first dispersive element (3); - a second dispersive element (5), wherein the second dispersive element (5) is arranged parallel to the first dispersive element (3) and downstream of the first dispersive element (3); - a reflective element (7) downstream of the second dispersive element (5) configured for reflecting the optical signal (2) onto the second dispersive element (5); and -a first mirror (8) and a second mirror (9) arranged downstream the first dispersive element (3) and upstream of the second dispersive element (4), wherein the first mirror (8) and the second mirror (9) are parallel to each other and are configured for increasing an optical path length of the optical signal (2).
Owner:VIENNA UNIVERSITY OF TECHNOLOGY

Method for manufacturing laser devices and electronic devices

PendingJP2026081568ALaser detailsLaser beam welding apparatusLaser lightPulse stretcher
The present invention provides a laser device that reduces beam coherence and suppresses energy loss. [Solution] The laser device 10A comprises an oscillator 12 that emits pulsed laser light, a random phase plate 14 arranged in the optical path of the pulsed laser light, and an optical pulse stretcher 100 arranged in the optical path of the pulsed laser light that has passed through the random phase plate, which extends the pulse time width of the pulsed laser light by transmitting a portion of the pulsed laser light and causing another portion to circulate at least once in a delay optical path, thereby outputting transmitted light and circulating light.
Owner:GIGAPHOTON INC

Multi-soliton pulse output fiber laser transmitter and radar system

The invention provides a multi-soliton pulse output fiber laser transmitter and a radar system, the fiber laser transmitter comprises a seed generation module, the seed generation module comprises a seed pumping source, the seed pumping source is connected with the pumping end of a wavelength division multiplexing device, the signal end of the wavelength division multiplexing device is connected with a nonlinear phase shifter, and the nonlinear phase shifter is connected with a non-linear phase shifter; the common end of the wavelength division multiplexing device is connected with the seed gain optical fiber, the other end of the nonlinear phase shifter and the other end of the seed gain optical fiber are in coupling connection through the output coupler, the output side of the output coupler is connected with the reflection element, and the seed generation module can output seed light of multiple soliton pulses in a passive mode locking mode; a multi-stage amplification module, wherein the multi-stage amplification module comprises a pulse stretcher; the pulse compression module comprises a grating pair; and the frequency doubling module comprises a frequency doubling crystal and can enable the optical fiber laser transmitter to output multiband laser. The problem that in the prior art, the output power of an optical fiber laser transmitter is difficult to improve is solved.
Owner:CHINA TELECOM CORP LTD

Laser device and method for manufacturing electronic device

The invention provides a laser device and a method for manufacturing an electronic device. A laser device is provided with: an oscillator that emits pulsed laser light; a random phase plate disposed in an optical path of the pulse laser light; and an optical pulse stretcher that is disposed in the optical path of the pulse laser light that has passed through the random phase plate, and that spreads the pulse time width of the pulse laser light by transmitting a portion of the pulse laser light and causing the other portion of the pulse laser light to surround at least one circle in a delayed optical path and outputting transmitted light and surrounding light.
Owner:AURORA ADVANCED LASER CO LTD

Optical metrology with supercontinuum laser illumination

A system and methods of optical metrology and inspection are provided. A supercontinuum laser (SCL) source generates an SCL output that is conditioned by a pulse stretcher to form a spectrally dispersed plane. A spectral balancing filter is positioned in the spectrally dispersed plane to provide a balanced broadband output, which is then temporally dispersed by the pulse stretcher to form a temporally dispersed SCL output. The temporally dispersed SCL output is directed along normal and / or oblique paths toward a sample surface, and reflected radiation from the sample surface is directed to one or more spectrometers for measurement.
Owner:NOVA MEASURING INSTR LTD

Gas laser device and method of manufacturing an electronic device

This invention provides a method for manufacturing a gas laser device and electronic components. The gas laser device includes: a cavity device that emits pulsed laser light; and a pulse stretcher comprising multiple annular optical paths for extending the pulse width of the pulsed laser light, the annular optical paths comprising: a beam splitter to which the pulsed laser light is incident; and multiple surrounding mirrors that sequentially reflect portions of the pulsed laser light incident on the beam splitter and return it to the beam splitter in a manner that overlaps with another portion of the pulsed laser light. The pulse stretcher includes a unit that can separate and detach two or more beam splitters from one or more surrounding mirrors.
Owner:AURORA ADVANCED LASER CO LTD

Pulse stretcher, laser device, method of alignment adjustment, and method of manufacturing electronic device

The present application provides a pulse stretching device, a laser device, an alignment adjustment method, and a method for manufacturing electronic devices, wherein the pulse stretching device according to one aspect includes: a beam splitter that branches a pulsed laser into a loop light and a straight-through light, and overlaps the loop light that has at least circled once in a loop light path with the straight-through light; and a plurality of concave mirrors that constitute the loop light path, wherein the total number of the plurality of concave mirrors is 4n when n is an integer of 1 or more, and wherein a first concave mirror in which the loop light first enters from the beam splitter and a second concave mirror in which the loop light enters from the beam splitter for the third or 4n-1th time are respectively configured to be able to change the angle of the reflecting surface in a state in which the position is fixed.
Owner:AURORA ADVANCED LASER CO LTD

DUV laser system beam divergence control apparatus and process

PCT designated stageWO2026139752A1Divergence angleLight beam
A deep ultraviolet laser system includes a pulse stretcher including multiple steerable mirrors; a sensor positioned to measure a divergence of beams passed through the pulse stretcher; and a controller connected to the sensor and to the mirrors, the controller configured to (1) using the sensor, measure and record an initial divergence of a beam passed through the pulse stretcher (2) separately dither each steerable mirror and measure and record corresponding divergences (3) calculate, based on the corresponding divergences, new angular positions for each steerable mirror to produce a divergence at, within, or closer to a target or target range, and (4) position each respective steerable mirror of the pulse stretcher at its new angular position and, (5) measure and record a new divergence. A process of controlling divergence is also disclosed.
Owner:CYMER INC