40 results about "Pulse stretcher" patented technology

Provided is a pulse width expansion device for expanding the pulse width of a pulsed laser beam, the pulse width expansion device including a first optical pulse stretcher, a second optical pulse stretcher, a third optical pulse stretcher, and a fourth optical pulse stretcher disposed on the optical path of the pulsed laser beam, the first optical pulse stretcher, the second optical pulse stretcher, the third optical pulse stretcher, and the fourth optical pulse stretcher being disposed on the optical path of the pulsed laser beam. The optical path length of the delay optical path of the first optical pulse stretcher is L1, the optical path length of the delay optical path of the second optical pulse stretcher is L2, the optical path length of the delay optical path of the third optical pulse stretcher is L3, and the optical path length of the delay optical path of the fourth optical pulse stretcher is L4. When n is an integer of 2 or more, L2 is an integer multiple of 2 or more of L1, L3 satisfies (n-0. 75) * L1 < = L3 < = (n-0.25) * L1, and L4 satisfies (n-0.25) * L1 < = L4 < = (n + 0.25) * L1.

A pulse modification apparatus includes at least one pulse stretcher for dispersive stretching of laser pulses and / or at least one pulse compressor for dispersive compression of the laser pulses, an actuator for setting a dispersion of the at least one pulse stretcher or a dispersion of the at least one pulse compressor by setting at least one manipulated variable, a controller for controlling the actuator based on a measurement signal, and an ambient sensor for detecting at least one ambient parameter as the measurement signal. The dispersion of the at least one pulse stretcher or the dispersion of the at least one pulse compressor is dependent on the at least one ambient parameter.

A laser device includes an oscillator outputting pulse laser light; an amplifier amplifying the pulse laser light; an optical pulse stretcher extending a pulse width of the pulse laser light; a beam divergence angle adjuster including an upstream lens arranged on an optical path of the pulse laser light, a downstream lens arranged downstream of the upstream lens, and an optical path length changing mechanism for changing an inter-lens optical path length between the upstream lens and the downstream lens; and a processor controlling the beam divergence angle adjuster and obtaining a repetition frequency or a duty of the pulse laser light, and to change, when the repetition frequency or the duty changes by a preset threshold or more, the inter-lens optical path length so that the beam divergence angle of the extended pulse laser light becomes small in accordance with the repetition frequency or the duty after the change.

The present invention is applicable to the field of pulsed laser technology and provides a pulsed laser modulation system. The system includes: a laser seed source for emitting a laser signal; a polarization-maintaining circulator having an incident end, a first emission end, and a second emission end, with the laser seed source and the incident end of the polarization-maintaining circulator being located on the same optical path; a fiber preamplifier and a laser pulse stretcher, with the first emission end, the fiber preamplifier, and the laser pulse stretcher being sequentially arranged on the same optical path; and an acousto-optic modulator and a fiber amplifier, with the second emission end, the acousto-optic modulator, and the fiber amplifier being sequentially arranged on the same optical path. The present invention proposes a design scheme for a pulsed laser modulation device that integrates stretching, preamplification, and frequency selection. By using this scheme, a low-repetition-rate pulsed laser output with a compact structure, good stability, and a high signal-to-noise ratio can be achieved.

This laser device is provided with: a laser oscillator which includes an optical resonator and a pair of electrodes for generating discharge by applying a voltage to a laser gas, and which outputs a first pulsed laser light; a first optical pulse stretcher that transmits a portion of the first pulse laser light, surrounds the other portion of the first pulse laser light by one circle, and outputs a first transmitted light and a first one-circle surrounding light, which have a first shift amount and spatially overlap a portion of the first transmitted light and the first one-circle surrounding light, thereby outputting a second pulse laser light in which the pulse time width of the first pulse laser light has been expanded; and a second optical pulse stretcher that transmits a part of the second pulse laser light, surrounds the other part of the second pulse laser light by one circle, and outputs second transmitted light and second one-circle surrounding light that have a second offset amount different from the first offset amount and spatially overlap a part of the second transmitted light and a part of the second one-circle surrounding light. As a result, a third pulse laser beam having an extended pulse time width of the second pulse laser beam is output.

Apparatus for and method of aligning optical components such as beam splitters in an optical pulse stretcher in which a landing spot of a beam which has traversed a portion of the optical beam splitter and a coincident landing spot of a beam split from a retroreflected input beam are made to align on a target spot. Also disclosed is an apparatus and method for aligning the retroreflector to facilitate proper beam alignment. A fluorescent material may be used to render a beam landing spot visible.

The invention provides a femtosecond laser pulse compression system with a compact structure and an adjustable pulse width, and relates to the technical field of femtosecond lasers, the system sequentially comprises a seed source, a pulse stretcher, an amplification chain and a pulse compression device along a light path, the pulse compression device comprises a polarization beam splitting unit, an electro-optical polarization modulation unit, a single compression grating and a light path turn-back unit; wherein the polarization beam splitting unit, the electro-optical polarization modulation unit, the single compression grating and the light path turn-back unit jointly form a multi-channel folding compression light path; a voltage signal with a specific time sequence is applied to the electro-optical polarization modulation unit, and the polarization state of a light beam is dynamically switched, so that the light beam is selectively controlled to complete back-and-forth transmission of a preset number of times in a multi-channel folding compression light path in different polarization states, and the compression ratio of laser pulses and the width of output pulses are continuously adjusted. On the premise that large-spread-width matching is guaranteed, the system is extremely compact, and the pulse width is continuously and flexibly adjusted in an electric control mode.

A pulse stretcher includes a beam splitter splitting pulse laser light into two beams of pulse laser light, first concave mirrors arranged side by side in a predetermined direction, and second concave mirrors arranged side by side in the predetermined direction as having the same number as the first concave mirrors and facing the first concave mirrors, respectively. One beam of pulse laser light split by the beam splitter travels to one first concave mirror among the first concave mirrors and is reflected alternately by the first concave mirrors and the second concave mirrors 12 times or more as even number times to return to the beam splitter. A number of overlapping of the one beam at each of concentration points where at least part of the one beam of pulse laser light overlaps at beam waists of the one beam is two.

An optical pulse stretcher for stretching the pulse width of pulsed laser light, the optical pulse stretcher comprising: a polarizer that separates a component of incident pulsed laser light that has a specific polarization direction; delay optics including a plurality of mirrors for propagating the pulsed laser light that has been reflected by or transmitted through the polarizer; and a first Faraday rotator that includes a first magnet and a first Faraday material, is disposed on the optical path of the delay optics, and rotates the polarization direction of the pulsed laser light.

A laser apparatus includes an oscillator configured to output a pulse laser beam, a random phase plate disposed in an optical path of the pulse laser beam, and an optical pulse stretcher disposed in the optical path of the pulse laser beam that has passed through the random phase plate and configured to stretch a pulse time width of the pulse laser beam by transmitting part of the pulse laser beam, making the other part circulate at least once through a delay optical path, and outputting transmitted light and circulating light.

A mid-infrared laser generation system based on dispersion-managed soliton bunch pulses. The system can achieve high-power, high-efficiency and high-proportion mid-infrared laser output, and has the advantages of an all-fiber configuration, a compact structure and a high power proportion in a longer-wavelength region of a mid-infrared spectrum. A pulsed fiber laser device generates a nanosecond pulse laser in a 1.5-micron band. A fiber pulse stretcher is made of a single-mode silica fiber, splits nanosecond pulses into a plurality of ultrafast soliton pulses by means of a nonlinear effect, and performs spectral energy conversion from 1.5 microns to 2.4 microns. A fiber laser amplifier further increases the output power of a stretched pulse laser and extends a spectrum to a 2.7-micron band, and also increases pulse energy beyond a 2.3-micron band. A fiber mode field adapter efficiently couples into a nonlinear fiber pulses generated in the fiber laser amplifier. The nonlinear fiber extends a laser to a mid-infrared 3-5-micron band, thereby achieving high-power, high-efficiency and high-proportion mid-infrared laser output.

The application belongs to the field of laser emitting devices, and provides a system and method for compensating high-order dispersion through cooperative adjustment of stretching and compression, calculating second-order dispersion and third-order dispersion introduced by a pulse amplifier; adjusting the introduced third-order dispersion by changing the grating incident angle in a pulse stretcher, so that the third-order dispersion is offset with the total third-order dispersion of the system; calculating the second-order dispersion value required to be provided by the pulse compressor according to the second-order dispersion change generated after the angle adjustment of the pulse stretcher, and accurately compensating by adjusting the effective distance of the grating pair; feeding back the third-order dispersion of the pulse compressor after adjustment to correct the angle of the pulse stretcher again, and repeating the above steps until the total second-order dispersion and third-order dispersion of the system tend to be zero, so as to realize near transform limit compression. The application adjusts the grating incident angle of the stretcher and the effective distance of the grating of the compressor, so that the second-order dispersion and third-order dispersion in the ultrafast laser system are simultaneously compensated, and near transform limit pulse output is obtained.

A deterioration estimation method of an optical pulse stretcher configured to extend a pulse width of pulse laser light includes acquiring a first temporal waveform, at a first measurement timing, of the pulse laser light having the pulse width extended by the optical pulse stretcher; acquiring a second temporal waveform, at a second measurement timing after the first measurement timing, of the pulse laser light having the pulse width extended by the optical pulse stretcher; and estimating a degree of deterioration of the optical pulse stretcher based on the first temporal waveform and the second temporal waveform.

The present application provides a laser device and a manufacturing method of an electronic device, the laser device according to one aspect includes: a discharge excitation type laser oscillator which outputs pulsed laser in an ultraviolet wavelength region; a first optical pulse stretcher which includes a beam splitter and a plurality of concave mirrors, and which expands a pulse width of the pulsed laser; and a relay lens which includes a first lens and a second lens arranged on an optical path of the pulsed laser after the pulse width is expanded, the first lens being a spherical plano-convex lens, and the second lens having a focal length in a long side direction of a beam cross section of the pulsed laser which is shorter than a focal length in a short side direction.

The present disclosure relates to a laser system comprising: a mode-locked oscillator or laser configured for generating seed laser pulses; a nonlinear crystal configured for frequency doubling the seed laser pulses from the oscillator, whereby modified laser pulses are obtained; a pulse stretcher, such as a chirped fiber-Bragg grating (CFBG), configured for temporally stretching the modified laser pulses, whereby stretched laser pulses are obtained; a regenerative amplifier configured for amplifying the stretched laser pulses, whereby amplified laser pulses are obtained, wherein the regenerative amplifier comprises a gain crystal selected from the group of chromium-doped Colquiriite crystals (Cr:Colquiriites) and Alexandrite crystals; and a compressor for temporally compressing the amplified laser pulses, whereby compressed pulses are obtained.

This invention relates to a laser welding method based on variable pulse width dual pulses and a multi-scale observation system, belonging to the field of femtosecond laser welding application technology. The invention splits a femtosecond laser pulse into two femtosecond laser pulses. One of these pulses is spread into a picosecond-nanosecond pulse with adjustable pulse width using a pulse stretcher. The delay between the two pulses can be controlled using a delay translation stage. This allows the interface to be welded to first be irradiated by the picosecond-nanosecond laser pulse to generate a suitable thermal effect, followed by irradiation by the femtosecond laser pulse to form a "cold weld." By controlling the thermal phase transition process, welding efficiency and performance are improved. Combined with a multi-scale observation system, the welding process can be observed in real time from the femtosecond to the second scale. This invention has the advantages of high efficiency and simplicity, enabling high-quality, high-strength, and high-efficiency welding of difficult-to-machine dissimilar materials.

A laser apparatus according to an aspect of the present disclosure includes a laser oscillator configured to emit a pulse laser beam, and a first optical pulse stretcher, a second optical pulse stretcher, and a third optical pulse stretcher that are disposed on an optical path of the pulse laser beam. When L1 represents an optical path length of a delay optical path of the first optical pulse stretcher, L2 represents an optical path length of a delay optical path of the second optical pulse stretcher, L3 represents an optical path length of a delay optical path of the third optical pulse stretcher, and n represents an integer equal to or larger than two, L2 is an integral multiple of L1 by an integer equal to or larger than two and L3 satisfies the following condition: (n−0.75)×L1≤L3≤(n−0.25)×L1.

A gas laser device includes a chamber device; and a pulse stretcher which includes a looped optical path including a beam splitter and a plurality of mirrors, and a light guide optical system, and which the pulse laser light output from the chamber device enters. The light guide system causes the pulse laser light having entered the pulse stretcher to be output from the pulse stretcher via the beam splitter. The looped optical path returns a part of the pulse laser light having entered the beam splitter to the beam splitter via the plurality of mirrors to cause the part of the pulse laser light to overlap another part thereof, and is sandwiched between a first straight line along an optical path of the pulse laser light entering the pulse stretcher and a second straight line along an optical path of the pulse laser light output from the pulse stretcher.

To provide a gas laser device capable of suppressing a decrease in the amount of laser light.SOLUTION: A gas laser device includes a chamber device including a pair of electrodes in an internal space filled with laser gas and emitting pulsed laser light, and a pulse stretcher including a loop optical path consisting of a beam splitter and multiple mirrors, and a light-guiding optical system including multiple light-guiding mirrors. The light-guiding optical system is configured such that the pulsed laser light incident on the pulse stretcher is output from the pulse stretcher via the beam splitter. The loop optical path is configured such that a portion of the pulsed laser light incident on the beam splitter is returned to the beam splitter via the multiple mirrors to be superimposed on another portion of the pulsed laser light incident on the beam splitter, and is disposed so as to be sandwiched between a first straight line along an input optical path which is the optical path of the pulsed laser light incident on the pulse stretcher, and a second straight line along an output optical path which is the optical path of the pulsed laser light output from the pulse stretcher.SELECTED DRAWING: Figure 7

An optical system is in a pulse stretcher of a deep ultraviolet light source. The optical system includes: an optical element configured, in operation, along a path of a light beam produced by the deep ultraviolet light source; and an adjustable mounting apparatus to which the optical element is located. The adjustable mounting apparatus includes: a passive alignment mount, and a drive mechanism coupled to the passive alignment mount, the drive mechanism including a wedge that is rotationally constrained.

A gas laser apparatus and a method of manufacturing an electronic device are provided. This gas laser device is provided with: a cavity device that includes a pair of electrodes in an internal space in which a laser gas is sealed, and that emits pulsed laser light; and a pulse stretcher including a ring-shaped optical path configured from a beam splitter and a plurality of reflectors, and a light guide optical system including a plurality of light guide reflectors, the light guide optical system being configured so that the pulse laser light incident on the pulse stretcher is emitted from the pulse stretcher via the beam splitter, the ring-shaped optical path being configured so that the ring-shaped optical path is configured so that the ring-shaped optical path is configured so that the ring-shaped optical path is configured so that the ring-shaped optical path is configured so that the ring-shaped optical path is configured so that the ring-shaped optical path is configured so that the ring-shaped optical path is separated from the ring-shaped optical path. And a ring-shaped optical path disposed between a first straight line along the input optical path and a second straight line along the output optical path, the ring-shaped optical path being disposed between the first straight line along the input optical path and the second straight line along the output optical path, and the ring-shaped optical path being disposed between the first straight line along the input optical path and the second straight line along the output optical path. The input light path is a light path of pulse laser emitted to the pulse stretcher, and the output light path is a light path of pulse laser emitted from the pulse stretcher.

The invention relates to a spectrum and electron beam combined detection method and device for particles on the surface of a wafer, and the method comprises the steps: scanning the surface of the wafer on a sample stage by using a scattered light pre-detection unit, obtaining a pollutant position coordinate set, and inputting the coordinate set into a positioning control unit; pulse lasers emitted by the two pulse lasers are respectively broadened to a picosecond level through the pulse stretcher and then are combined, and are focused to the surface of the pollutant through the objective lens to excite an anti-Stokes optical signal, so that spectral data are obtained, and the components of the organic pollutant are identified; and in combination with the morphology feature data and the pollutant component data, outputting a target pollutant component state analysis result. By exciting an anti-Stokes light signal enhanced by a nonlinear effect, avoiding a fluorescence interference wave band and filtering stray light in combination with the band-pass optical filter group, the signal-to-noise ratio of a spectral signal is greatly improved, and the problem of fluorescence interference is effectively solved. Sample pollutant component information can be obtained more quickly and comprehensively, and the defect that conventional detection equipment can only detect the particle size is overcome.

A laser device of one aspect of the present disclosure has a laser oscillator that outputs pulsed laser light, and a first optical pulse stretcher, a second optical pulse stretcher, and a third optical pulse stretcher that are arranged on an optical path of the pulsed laser light. In a case where an optical path length of a delay optical path of the first optical pulse stretcher is L1, an optical path length of a delay optical path of the second optical pulse stretcher is L2, an optical path length of a delay optical path of the third optical pulse stretcher is L3, and n is an integer of 2 or more, L2 is an integer of 2 or more times L1, and L3 satisfies (n-0.75) x L1 ≤ L3 ≤ (n-0.25) x L1.

This application provides an eight-channel pulse stretcher, including a circulator, a collimator, a polarization beam splitter, a two-pass transmission-type single-grating stretching unit, a beam-shrinking unit, a quarter-wave plate, a first 0-degree reflector, and a second 0-degree reflector. The pulse stretcher of this application achieves a large pulse stretching by having the pulse pass through the two-pass transmission-type single-grating stretching unit four times. This is simpler, more reliable, and more practical than existing active-switching methods, and avoids the problem of increased amplification noise at the back end of the pulse stretcher. The pulse stretcher of this application has a compact structure, high stability, and does not require switching control. It can stretch pulses to the nanosecond level, making it very suitable for the stretching and amplification of high-energy pulses. The pulse stretcher of this application uses a circulator and collimator to realize the fiber input and output of the optical pulse, greatly improving the stretcher's accessibility and making it very suitable for embedding in high-energy laser systems.

A laser apparatus includes a laser oscillator including an optical resonator and a pair of electrodes that apply a voltage to a laser gas to cause discharge, and configured to output a first pulse laser beam, a first optical pulse stretcher configured to output a second pulse laser beam for which a pulse time width of the first pulse laser beam is extended by transmitting a part of the first pulse laser beam, making the other part circulate once, and outputting first transmitted light and first once-circulating light that spatially partially overlap with a first shift amount, and a second optical pulse stretcher configured to output a third pulse laser beam for which a pulse time width of the second pulse laser beam is extended by transmitting a part of the second pulse laser beam, making the other part circulate once, and outputting second transmitted light and second once-circulating light that spatially partially overlap with a second shift amount, which is different from the first shift amount.

The invention discloses a giant dispersion compact laser pulse stretcher or compressor, which adopts a chirped Bragg grating for stretching or compression, and uses a polarization beam splitting cube, a quarter-wave plate and a reflector to return light along the same path and pass through the chirped Bragg grating for multiple times. Compared with a conventional Offner stretcher, a Martinez stretcher and a Treack type grating pair compressor, the dispersion amount provided by the stretcher or the compressor is greatly improved, compared with the conventional Offner stretcher, the Martinez stretcher and the Treack type grating pair compressor, a large distance is not needed, an ultra-compact structure can be achieved, in addition, a complex alignment process is not needed, in this way, the requirement for the operation level of experimenters is lowered, and the operation efficiency is improved. And popularization is facilitated, so that wider application is realized.

An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.

Chirped pulse amplification with an optical pulse stretcher (13) for dividing an optical input pulse (14) in temporally and spectrally separated collinear pulses and a compressor for applying a negative dispersion to an optical signal (2), the compressor comprising: - a first dispersive element (3); - a second dispersive element (5), wherein the second dispersive element (5) is arranged parallel to the first dispersive element (3) and downstream of the first dispersive element (3); - a reflective element (7) downstream of the second dispersive element (5) configured for reflecting the optical signal (2) onto the second dispersive element (5); and -a first mirror (8) and a second mirror (9) arranged downstream the first dispersive element (3) and upstream of the second dispersive element (4), wherein the first mirror (8) and the second mirror (9) are parallel to each other and are configured for increasing an optical path length of the optical signal (2).

The present invention provides a laser device that reduces beam coherence and suppresses energy loss. [Solution] The laser device 10A comprises an oscillator 12 that emits pulsed laser light, a random phase plate 14 arranged in the optical path of the pulsed laser light, and an optical pulse stretcher 100 arranged in the optical path of the pulsed laser light that has passed through the random phase plate, which extends the pulse time width of the pulsed laser light by transmitting a portion of the pulsed laser light and causing another portion to circulate at least once in a delay optical path, thereby outputting transmitted light and circulating light.

A laser device according to one aspect of the present disclosure is provided with: an oscillator that outputs pulsed laser light having an ultraviolet wavelength; an amplifier that amplifies the pulse laser light; the optical pulse stretcher comprises a beam splitter and a plurality of reflectors and is used for expanding the pulse width of the pulse laser; and a beam divergence angle adjuster including an upstream-side lens disposed on the upstream side on the optical path of the pulse laser light, a downstream-side lens disposed on the downstream side of the upstream-side lens, and an optical path length changing mechanism for changing the length of an inter-lens optical path between the upstream-side lens and the downstream-side lens. Adjusting the beam divergence angle of the expanded pulse laser; and a processor that controls the beam divergence angle adjuster, obtains a repetition frequency or a duty ratio of the pulse laser light, and, when the repetition frequency or the duty ratio has changed by at least a preset threshold value, controls the beam divergence angle adjuster on the basis of the changed repetition frequency or duty ratio. The inter-lens optical path length is changed so that the beam divergence angle of the expanded pulse laser light becomes small.