174 results about "Laser oscillator" patented technology

An adjustment method of a laser processing apparatus includes a spatial light modulator adjustment step of adjusting a spatial light modulator into a state ready for splitting a laser beam emitted from a laser oscillator and applying a plurality of laser beams such that laser beams will have a desired positional relation, a processing mark formation step of operating the laser oscillator to apply the laser beams to a wafer such that a plurality of processing marks is formed, an imaging step of stopping the laser oscillator, and imaging the processing marks formed at the wafer, and an aberration correction step of correcting aberration of the condenser by comparing the desired positional relation and a positional relation among the imaged processing marks, and adjusting the spatial light modulator such that the positional relation among the processing marks conforms to the desired positional relation.

The invention relates to the technical field of laser processing process control, and discloses an intelligent control method and system for a laser oscillator, and the method comprises the steps: collecting an optical signal, determining the current spectrum ratio measurement, and adjusting the laser oscillator according to the current spectrum ratio measurement; according to the method and the system, the technical problem that a static control target is easy to lose efficacy when facing working condition drift is solved, the control precision is improved by monitoring the adjusting quantity of the controller, and the control precision is improved. A fast and slow loop self-adaptive control logic is constructed, so that the system obtains the capability of self-calibrating a control target value, thereby being capable of self-adapting to working condition drift caused by material batches or equipment aging, and ensuring long-period process consistency.

Provided is a mobile removal device. The mobile removal device includes a camera, a laser oscillator, a controller, and a guide portion. The guide portion includes one or more reflectors configured to reflect a laser beam. At least one of the one or more reflectors is a specific reflector having a function of reflecting the laser beam and a function of transmitting a light that can be captured by the camera. The camera is arranged so that an optical axis of the camera passes through the specific reflector in an area where the laser beam does not pass through.

The utility model belongs to the field of laser cutting, and particularly relates to an anti-shake structure of a high-precision laser galvanometer, which comprises a shell. A second mounting groove is formed in the upper end of the shell, a third groove body is formed in the lower end of the inner wall of the second mounting groove in a penetrating mode, a first mounting groove is formed in the front end of the shell, a second groove body is formed in the rear end of the inner wall of the first mounting groove in a penetrating mode, a fourth groove body is formed in the rear end of the shell in a penetrating mode, and a laser mounting guide pipe is fixedly connected to the rear end of the shell in a penetrating mode. According to the utility model, when the first reflector is driven by the first motor to rotate to adjust the angle, as the insertion column on the strip-shaped plate is inserted into the limiting insertion hole, the rotating column synchronously rotates with the first reflector on the rotating ring, so that the first reflector is stably clamped by the fixed disc and the sliding plate in the rotating process; therefore, tiny shaking generated in the working process is reduced, and the problem that shaking is likely to be generated due to the fact that one end is fixed by the micro rotating motor and the other end is of a suspended structure in the long-term use process is solved.

A ring resonator (10) and a NALM (20) configured as a saturable absorption mechanism constitute a laser oscillator. A multiport BPF (12) is provided to a path through which light propagates in the laser oscillator, the multiport BPF (12) passing light in a prescribed band of the propagating light, and branching light outside of the prescribed band as monitoring light (L). A photodetector (1) detects the monitoring light (L). A control unit (2) controls the oscillation state of the light propagating through the laser oscillator on the basis of the intensity of the monitoring light (L), thereby controlling the mode synchronization of the light propagating through the laser oscillator.

A laser device includes a laser oscillator configured to generate pulse laser light, an actuator configured to adjust a laser light parameter of the pulse laser light, and a laser control processor configured to correct an operation parameter value of the actuator so that a difference between a measurement value and a target value of the laser light parameter becomes small based on a change pattern of a pulse time interval of the pulse laser light continuously changing within a burst of burst oscillation in accordance with a command of an exposure apparatus, and control the actuator.

A biological information detection device is disclosed that includes a first laser oscillator that oscillates a first pulsed laser beam adapted for detection of a lactic acid or lactic acid salt; a second laser oscillator that oscillates a second pulsed laser beam adapted for detection of a pyruvic acid; an irradiation mechanism that emits the first pulsed laser beam and the second pulsed laser beam to blood; a light receiving sensor that receives a detected laser beam output from the blood; and a control unit. The control unit outputs oscillation instructions for oscillating the first pulsed laser beam and the second pulsed laser beam, cuts out detected signals provided from the light receiving sensor as time segment data for time periods, and calculates respective quantities of the lactic acid or lactic acid salt and the pyruvic acid in the blood based on the time segment data.

Laser processing device (40) comprising: a clamping table (54) which holds a wafer (10) having a front side (10a) and a back side (10b); a laser beam application means (44) that applies a laser beam to the wafer (10) which is held by the clamping table (54); and a processing feed means (43) that performs a relative processing feed of the clamping table (54) and the application means (44) for a laser beam, wherein the application means for a laser beam comprises a laser oscillator (44b) which oscillates a pulsed laser beam, and a focusing device (44a) which focuses the pulsed laser beam oscillated by the laser oscillator (44b) in order to apply the pulsed laser beam to the wafer (10) which is held by the clamping table (54), and The pulsed laser beam, oscillated by the laser oscillator (44b), includes burst pulses (BP), each of which has several subpulses that are gradually amplified stepwise from a lower energy to a high energy, and the burst pulses (BP) are applied to the wafer (10) to form shielding tunnels (100), each containing a small hole (102) and an amorphous phase (104) surrounding the small hole, wherein the application means (44) is configured for a laser beam to form a circular small hole (102) and a circular amorphous phase (104), each extending from the front side (10a) to the rear side (10b) of the wafer (10), wherein the focusing device (44a) is movable in the direction of the optical axis and configured such that the focal point is positioned at a predetermined position in the wafer (10). is.

A pulse generation unit generates a driving voltage signal including a pulse signal. A laser oscillation module oscillates a laser beam by carrying out, based on the driving voltage signal, a pulse oscillating operation. When the power command signal has a voltage command value corresponding to a laser power greater than a predetermined laser power during a high period, the pulse generation unit modulates, in a pulsed manner, a voltage value of the high period of the driving voltage signal so as to alternately repeat, for a preset period of time from a rising time of the high period of the driving voltage signal, a high state in which the voltage value is maintained and a low state in which the voltage value is lowered by a predetermined voltage value without being lowered to a voltage value of a low period of the driving voltage signal.

A laser processing apparatus and a method for adjusting the phase pattern are provided, which can suppress performance differences of the laser beams irradiating the workpiece between processing devices, thereby achieving the desired processing result. The laser processing apparatus includes a laser beam irradiation unit that irradiates the workpiece with a laser beam and a control unit. The laser beam irradiation unit includes: a laser oscillator that oscillates laser light; a focusing lens; a concave mirror that has a focal point at the focusing point of the focusing lens and has a spherical reflecting surface; a beam splitter that allows the laser beam emitted from the laser oscillator to pass through the focusing lens and branches the reflected light; and a wavefront measurement unit that receives the reflected light and acquires the wavefront data of the laser beam. The control unit changes the phase pattern displayed on the display unit of a spatial light modulator based on the wavefront data.

The invention relates to the technical field of fiber bragg gratings, and discloses a fiber bragg grating annealing method and device, an optical fiber and an optical fiber laser oscillator. The fiber bragg grating annealing method comprises the steps of providing an optical fiber; heating the grating area until the temperature of the grating area reaches a first preset temperature, and keeping the temperature of the grating area at the first preset temperature for a first preset duration; cooling the optical fiber until the temperature of the grating area is reduced to a second preset temperature; the optical fiber is placed in a constant-temperature environment for a second preset duration, the temperature of the constant-temperature environment is a third preset temperature, and the third preset temperature is smaller than the first preset temperature; heating the grating area until the temperature of the grating area reaches a fourth preset temperature, and keeping the temperature of the grating area at the fourth preset temperature for a third preset duration; and cooling the grating area until the temperature of the grating area is reduced to a fifth preset temperature. The beneficial effects are that the temperature rise coefficient of the fiber bragg grating can be reduced, and the bearing power of the fiber bragg grating can be improved.

This processing state monitoring device, which monitors a processing state caused by laser processing, comprises: a first sensor that detects first radiation light from a processing part of a processing object that receives laser light emitted from a laser oscillator via a processing optical element, and acquires first temperature information pertaining to the temperature of the processing part on the basis of the first radiation light; and a second sensor that detects second radiation light from the processing optical element and acquires second temperature information pertaining to the temperature of the processing optical element on the basis of the second radiation light.

To provide a technique that can prevent a stripe pattern from being formed on a result of irradiation, even in a situation where energy variation whose variation cycle is fast occurs in a laser oscillator.SOLUTION: A laser processing device 1 comprises: a laser oscillator 21 that oscillates processing laser light R on the basis of an inputted PWM signal S; a galvano-scanner 18 that emits the oscillated processing laser light R along a scanning line extending in a predetermined direction to an object 7 to be processed; a laser driver 37 that outputs the PWM signal S; and a CPU 41 that can set an operation mode and controls operation of the galvano-scanner 18 and of the laser driver 37 on the basis of the set operation mode. When a first mode is set as the operation mode, the CPU 41 controls the laser driver 37 so that output timings of the PWM signal S are made different between adjacent scanning lines.SELECTED DRAWING: Figure 7

This laser device is provided with: a laser oscillator which includes an optical resonator and a pair of electrodes for generating discharge by applying a voltage to a laser gas, and which outputs a first pulsed laser light; a first optical pulse stretcher that transmits a portion of the first pulse laser light, surrounds the other portion of the first pulse laser light by one circle, and outputs a first transmitted light and a first one-circle surrounding light, which have a first shift amount and spatially overlap a portion of the first transmitted light and the first one-circle surrounding light, thereby outputting a second pulse laser light in which the pulse time width of the first pulse laser light has been expanded; and a second optical pulse stretcher that transmits a part of the second pulse laser light, surrounds the other part of the second pulse laser light by one circle, and outputs second transmitted light and second one-circle surrounding light that have a second offset amount different from the first offset amount and spatially overlap a part of the second transmitted light and a part of the second one-circle surrounding light. As a result, a third pulse laser beam having an extended pulse time width of the second pulse laser beam is output.

A wobble laser processing apparatus according to an embodiment of the present invention comprises: a laser oscillator provided to oscillate a laser; and a wobble laser irradiator that is provided to, to process a partial area of a coating electrode which is traveling, irradiate the laser irradiated from the laser oscillator, to a coating electrode in a wobbling pattern, and that is capable of adjusting at least one of a wobbling width, a wobbling height, and a wobbling frequency on the basis of a traveling speed of the coating electrode.

A laser processing method and apparatus for printed circuit boards are provided, which effectively utilize a laser oscillator to optimize processing efficiency and quality. The laser processing method uses a laser oscillator to perform laser processing by applying RF pulses to oscillate the laser. During laser output after the application of the RF pulse ends, the RF pulse is applied again to continue laser oscillation, and a desired duration of laser light is extracted from the continuously oscillating laser for laser processing of the printed circuit board.

To provide a laser oscillator capable of obtaining a desired beam profile by continuously changing the beam profile of a laser beam emitted from an optical fiber.SOLUTION: The laser oscillator 90 includes a laser module 10, a condenser lens 42, an optical fiber 80, a polarization adjustment mechanism 30, and a birefringent plate 43. The laser module 10 emits a linearly polarized laser beam LB. The condenser lens 42 condenses the laser beam LB on the optical fiber 80. The optical fiber 80 has a center core 81 and a ring core 83. The polarization adjustment mechanism 30 has a half-wave plate 31 and changes the polarization direction of the laser beam LB. The birefringent plate 43 branches the laser beam LB into the first laser beam LB1 and the second laser beam LB2, and changes the ratio of the light amounts of the first laser beam LA and the second laser beam LA.SELECTED DRAWING: Figure 2A

Disclosed is a method for manufacturing a stator for a rotating electric machine, comprising: a step of bringing a coil sheet (52) and a front end portion (40) of another coil sheet (52) used to form a stator coil (24) of a rotating electric machine (1) into contact with each other; and a welding step of irradiating a laser beam (110) having a wavelength of less than 0.6 μm to a welding target portion of the abutting front end portion, wherein the laser beam is generated in each pulse oscillation of a laser oscillator in a manner having a laser output of more than 3.0 kW, and during at least a portion of one pulse oscillation, the laser beam moves in a manner such that the irradiation position changes linearly parallel to the abutting surface (401) of the front end portion.

The present invention provides a laser processing device that achieves excellent productivity without increasing the laser beam spot diameter. The laser beam irradiation unit of the laser processing device includes: a laser oscillator that oscillates laser light; a Y-axis scanner that scans the laser beam emitted from the laser oscillator at high speed along the Y-axis; an X-axis scanner that feeds the laser beam emitted from the laser oscillator along the X-axis for processing; and a condenser. The Y-axis scanner is selected from an acousto-optic deflector, a resonant scanner, and a polygonal scanner, while the X-axis scanner is selected from a galvano scanner or a resonant scanner.

An extreme ultraviolet light generation apparatus includes a first light source outputting first excitation light, a laser oscillator including an active medium and performing laser oscillation by irradiating the active medium with the first excitation light to output the laser light, a measurement instrument measuring a pulse energy and a pulse time width of the laser light, a temperature regulator that adjusts a temperature of a cooling medium that cools the first light source, and a processor. The processor controls the temperature regulator to adjust the temperature of the cooling medium so that the pulse energy measured by the measurement instrument falls within a target range of the pulse energy, and adjust a current value of a current supplied to the first light source so that the pulse time width measured by the measurement instrument falls within a target range of the pulse time width.

The present invention is a numerical aperture variable device which reconfigures the spatial distribution or the spatial position of a plurality of lasers (LA, LB) emitted from a laser oscillator, and condenses the reconfigured plurality of lasers (LA, LB) and emits them into a delivery fiber, the numerical aperture variable device having light shielding members (326-1, 326-2) which are provided on the extension line of the optical axis of the delivery fiber, and shield the laser light from the delivery fiber toward the laser oscillator, that is, the reflected laser light.

A laser machine includes at least one laser oscillator configured to output a laser beam, at least one beam control element configured to control a shape of the laser beam output from the laser oscillator, at least one lens arranged between the beam control element and a workpiece and configured to control a size of the laser beam, the shape of which is controlled by the beam control element, and irradiate the size-controlled laser beam onto the workpiece, and a controller configured to set a machining line width to be formed on the workpiece, determine a rotation angle of the beam control element according to the set machining line width, and control the beam control element to be rotated around a rotation axis parallel to a normal line of a plane of the workpiece according to the determined rotation angle.

To excellently control an irradiation position of a laser beam.SOLUTION: A mobile removal device configured to irradiate an inhibitor that may inhibit the growth of a plant with a laser beam includes a camera, a laser oscillator, a control unit, and a guide unit. The laser oscillator is configured to output a laser beam. The control unit is configured to detect an inhibitor on the ground based on an image captured by the camera and to irradiate the inhibitor with a laser beam. The guide unit is configured to guide a laser beam output from the laser oscillator. The guide unit includes a half mirror. The camera is configured to photograph the ground over the half mirror.SELECTED DRAWING: Figure 1

A maintenance method of a laser apparatus including a laser oscillator configured to output pulse laser light and a pulse width stretching apparatus configured to stretch a pulse width of the pulse laser light having entered the pulse width stretching apparatus, the maintenance method comprising: attaching, when an abnormality occurs in laser performance of the pulse laser light output from the laser apparatus, a bypass apparatus to the laser apparatus, the bypass apparatus constituting a bypass optical path that bypasses the pulse width stretching apparatus.

A laser handpiece according to an embodiment of the present disclosure may comprise: a main body unit; a laser radiation unit disposed inside the main body unit and configured to radiate a laser toward the front of the main body unit; a lens unit formed in front of the laser radiation unit and configured to refract the laser; a contact unit detachably coupled to the main body unit in front of the main body unit and configured to contact the skin of a person to be treated to irradiate the skin with the laser; a connector configured to be detachably coupled to a cable provided with a power supply line for supplying power and a discharge line for discharging heat generated from the laser radiation unit; and an intake unit formed in the main body unit and configured to draw air toward the connector.

This technology provides the ability to measure temperature over a wide temperature range within a chamber. [Solution] The temperature measurement system according to the exemplary embodiment comprises a sensor substrate, a mounting table, and a measuring device. The sensor substrate includes a base substrate, an optical ring resonator provided on the base substrate, and a waveguide provided on the base substrate and optically coupled to the optical ring resonator. The measuring device includes a laser oscillator that inputs laser light into the waveguide of the sensor substrate placed on the mounting table, and a spectrometer that receives reflected light of the laser light propagating through the waveguide and output from the waveguide.

A method is disclosed for controlling a pulse repetition rate of pulsed laser beam 1 created by pulsed laser oscillator 100, includes generating beam 1 by oscillator 100, splitting beam 1 into first pulsed split beam 1a and second pulsed split beam 1b, time-delaying split beam 1a relative to split beam 1b by optical delay device 220, generating timing baseband signal Sc including a timing jitter of the pulse repetition rate based on split beam 1a and second split beam 1b by timing detector device 230, generating feedback signal Sf based on timing baseband signal Sc, and applying feedback signal Sf on oscillator 100 and controlling the pulse repetition rate of beam 1 based on the feedback signal Sf. Furthermore, repetition rate control apparatus 200 for controlling a pulse repetition rate of pulsed laser oscillator 100 and pulsed laser oscillator 100, comprising repetition rate control apparatus 200 are described.

A mode-locked semiconductor laser oscillator configured to emit laser pulses. The oscillator comprises a large area diode supporting multiple spatial modes. The diode is configured to emit a multi-mode light beam. The oscillator also comprises a multi-mode saturable absorber configured to absorb a portion of the multi-mode light beam and to convert the multi-mode light beam into a train of ultrashort optical pulses. The oscillator also comprises an external laser cavity surrounding the diode and the saturable absorber, the external laser cavity is configured to filter the multi- mode light beam such that only a single-mode light beam is reflected back towards the multi-mode diode and allowed to oscillate in the external laser cavity. The laser pulses are emitted via the external laser cavity.

A laser beam application unit of a laser processing machine includes a laser oscillator that emits a laser beam, an fθ main lens that focuses and applies the laser beam which has been emitted from the laser oscillator, to a workpiece held on a holding table, a scan unit that is arranged on an optical path between the laser oscillator and the fθ main lens, scans the laser beam, and guides the resulting scanned laser beam to the fθ main lens, and an fθ sub-lens that is arranged on the optical path between the laser oscillator and the scan unit and converts the laser beam from parallel light into diffused light.

To provide a laser oscillator capable of collecting an air flow from a flow passage connected to a laser light source without stopping the laser light source.SOLUTION: The laser oscillator 80 comprises a laser beam source 10, a pump 41, a first filter 42 for removing organic matter, a main pipe 44, a bypass pipe 44A, a collecting pipe 46, a flow control valve 45A, and first and second valves 45B and 45C. The main pipe 44 is connected in series to the laser light source 10, the pump 41, and the first filter 42, and dry air is circulated inside the main pipe 44. The bypass pipe 44A is connected in parallel with the main pipe 44, and the collecting pipe 46 is arranged in series with the bypass pipe 44A. The flow control valve 45A is arranged in series in the main pipe 44, and the first and second valves 45B and 45C are arranged in series in the bypass pipe 44A.SELECTED DRAWING: Figure 2B