236 results about "Laser oscillator" patented technology

An adjustment method of a laser processing apparatus includes a spatial light modulator adjustment step of adjusting a spatial light modulator into a state ready for splitting a laser beam emitted from a laser oscillator and applying a plurality of laser beams such that laser beams will have a desired positional relation, a processing mark formation step of operating the laser oscillator to apply the laser beams to a wafer such that a plurality of processing marks is formed, an imaging step of stopping the laser oscillator, and imaging the processing marks formed at the wafer, and an aberration correction step of correcting aberration of the condenser by comparing the desired positional relation and a positional relation among the imaged processing marks, and adjusting the spatial light modulator such that the positional relation among the processing marks conforms to the desired positional relation.

A laser processing apparatus includes a laser oscillator that oscillates processing laser light to be incident on a processing point on a processing surface of a workpiece, a coupling mirror that deflects or transmits the processing laser light and measurement light to be incident on the processing point toward the processing point, a measurement light deflection unit that changes an incident angle of the measurement light on the coupling mirror, a lens that concentrates the processing laser light and the measurement light on the processing point, a controller that controls the laser oscillator and the measurement light deflection unit, a measurement processor that measures a depth of a keyhole generated at the processing point by the processing laser light by using an optical interference signal based on an interference generated by an optical path difference between the measurement light reflected at the processing point and reference light, and a beam position measurement unit that measures positions of the processing laser light and the measurement light.

The invention relates to the technical field of all-solid-state laser, and provides a thermal stress self-matching laser device and a regulation and control method thereof. The resonant cavity oscillates the pumping laser, and an input lens and an output lens are oppositely arranged in the resonant cavity; the gain medium is arranged between the input lens and the output lens; the stress self-adaptive heat sink is used for dissipating heat and can monitor and adjust a real-time stress value borne by the gain medium; the power meter is arranged at the downstream of the output lens along the light path and is used for measuring the power of the output laser; a stress threshold value is preset in the processor; and the processor is used for controlling the stress adaptive heat sink to adjust the real-time stress value based on the power and the stress threshold value, so that the power meets a preset requirement. According to the invention, the stress of the gain medium in the operation process of the laser is monitored, regulated and controlled, and the stress matching of the gain medium is realized, so that the thermally induced stress damage risk of the gain medium is reduced.

The invention relates to the technical field of laser processing process control, and discloses an intelligent control method and system for a laser oscillator, and the method comprises the steps: collecting an optical signal, determining the current spectrum ratio measurement, and adjusting the laser oscillator according to the current spectrum ratio measurement; according to the method and the system, the technical problem that a static control target is easy to lose efficacy when facing working condition drift is solved, the control precision is improved by monitoring the adjusting quantity of the controller, and the control precision is improved. A fast and slow loop self-adaptive control logic is constructed, so that the system obtains the capability of self-calibrating a control target value, thereby being capable of self-adapting to working condition drift caused by material batches or equipment aging, and ensuring long-period process consistency.

A gas laser apparatus includes a laser oscillator including a pair of discharge electrodes disposed to face each other and configured to generate light from laser gas upon application of voltage, and a laser-side resonator in which the light resonates; an amplifier including an amplification unit and an amplification-side resonator; a beam splitter configured to reflect a part of the light from the laser-side resonator; an optical sensor configured to detect the light reflected by the beam splitter; and a processor configured to control the voltage based on an output from the optical sensor. The amplification-side resonator includes a rear mirror and an output coupling mirror. The laser-side resonator includes a grating and an output coupling mirror. The processor maintains the voltage at a constant value equal to or larger than a threshold of the voltage when the voltage is to be smaller than the threshold.

The invention discloses a narrow-linewidth thulium-doped fiber laser oscillator, which is characterized in that a saturable absorption fiber has certain absorption on signal light wavelength and is arranged between a first high-reflectivity fiber bragg grating and a second high-reflectivity fiber bragg grating, and when the laser gain exceeds the loss of a laser resonant cavity formed by the first high-reflectivity fiber bragg grating, the second high-reflectivity fiber bragg grating and a low-reflectivity fiber bragg grating, a thulium-doped fiber is generated; laser oscillation is formed and output through the low-reflection fiber bragg grating; the first and second high-reflectivity fiber gratings form an etalon effect; an etalon effect is formed between the second high-reflectivity fiber bragg grating and the low-reflectivity fiber bragg grating and between the first high-reflectivity fiber bragg grating and the low-reflectivity fiber bragg grating; signal light oscillated between the first high-reflectivity fiber bragg grating and the second high-reflectivity fiber bragg grating can form standing waves, and a dynamic grating is formed in the saturable absorption fiber. Under the action of the resonant cavity vernier effect and the saturable absorption dynamic optical fiber, signal light oscillates in a narrow linewidth mode between the first high-reflectivity fiber bragg grating and the second high-reflectivity fiber bragg grating, and the narrowed signal light is injected into the thulium-doped gain optical fiber through the second high-reflectivity fiber bragg grating, so that the laser maintains narrow spectral linewidth operation.

Provided is a mobile removal device. The mobile removal device includes a camera, a laser oscillator, a controller, and a guide portion. The guide portion includes one or more reflectors configured to reflect a laser beam. At least one of the one or more reflectors is a specific reflector having a function of reflecting the laser beam and a function of transmitting a light that can be captured by the camera. The camera is arranged so that an optical axis of the camera passes through the specific reflector in an area where the laser beam does not pass through.

The mid-infrared optical parametric oscillator pumped by the dual-wavelength nanosecond pulse solid laser can simultaneously output 1.9 micron laser and 2.1 micron laser, realizes broad spectrum / multi-wavelength output of the mid-infrared optical parametric oscillator, and can ensure that mid-infrared laser has excellent beam quality and relatively high output power. The output power of the 1.9 [mu] m optical fiber laser pumping source is hectowatt magnitude, and the 1.9 [mu] m optical fiber laser pumping source serves as a pumping source of a Ho crystal in the solid laser oscillator. In a Tm solid laser oscillator and a Ho solid laser oscillator, a resonant cavity comprises two plano-concave sub-cavities, the two plano-concave sub-cavities are a Tm crystal oscillation cavity and a Ho crystal oscillation cavity respectively, the two plano-concave sub-cavities share one output mirror, the Tm crystal oscillation cavity adopts a 793 nm semiconductor laser for pumping, and the Ho crystal oscillation cavity adopts a 1.9 [mu] m optical fiber laser pumping source I for pumping; in the phosphorus-germanium-zinc optical parametric oscillator, a planar four-mirror annular cavity is used as a single-resonance optical parametric oscillation cavity.

The utility model belongs to the field of laser cutting, and particularly relates to an anti-shake structure of a high-precision laser galvanometer, which comprises a shell. A second mounting groove is formed in the upper end of the shell, a third groove body is formed in the lower end of the inner wall of the second mounting groove in a penetrating mode, a first mounting groove is formed in the front end of the shell, a second groove body is formed in the rear end of the inner wall of the first mounting groove in a penetrating mode, a fourth groove body is formed in the rear end of the shell in a penetrating mode, and a laser mounting guide pipe is fixedly connected to the rear end of the shell in a penetrating mode. According to the utility model, when the first reflector is driven by the first motor to rotate to adjust the angle, as the insertion column on the strip-shaped plate is inserted into the limiting insertion hole, the rotating column synchronously rotates with the first reflector on the rotating ring, so that the first reflector is stably clamped by the fixed disc and the sliding plate in the rotating process; therefore, tiny shaking generated in the working process is reduced, and the problem that shaking is likely to be generated due to the fact that one end is fixed by the micro rotating motor and the other end is of a suspended structure in the long-term use process is solved.

A molten metal bath composition analysis system includes: a laser oscillator that oscillates a laser beam; a cylindrical probe that includes an opening end immersed in a molten metal bath, supplies an inert gas toward the opening end, and guides the laser beam to the opening end to irradiate a molten metal with the laser beam; and a detector that detects and spectroscopically analyzes plasma emission of the molten metal caused by the irradiation with the laser beam, wherein at least one of the position of the opening end of the cylindrical probe in the molten metal bath and the angle of the cylindrical probe with respect to a vertical direction can be controlled.

The present invention relates to a laser device, which includes a laser oscillator, a mirror frame assembly, a corrector, a diagnostic module, a calculation module and a controller. The diagnostic module re-diagnoses whether the optical path distortion occurs by re-calculating the optical path difference between the processing optical path changed by the drive motor according to the target drive speed and the target drive time and the reference processing optical path. When the re-calculated optical path difference is greater than the reference optical path difference, the calculation module re-calculates the target drive speed and the target drive time based on the re-calculated optical path difference, and the controller re-drives the drive motor according to the re-calculated target drive speed and the target drive time.

A ring resonator (10) and a NALM (20) configured as a saturable absorption mechanism constitute a laser oscillator. A multiport BPF (12) is provided to a path through which light propagates in the laser oscillator, the multiport BPF (12) passing light in a prescribed band of the propagating light, and branching light outside of the prescribed band as monitoring light (L). A photodetector (1) detects the monitoring light (L). A control unit (2) controls the oscillation state of the light propagating through the laser oscillator on the basis of the intensity of the monitoring light (L), thereby controlling the mode synchronization of the light propagating through the laser oscillator.

The present invention discloses a tunable pump terahertz broadband near-field imaging and spectroscopy device and its usage method, which relates to the field of terahertz near-field microscopes. The device includes: a first fiber laser oscillator, a second fiber laser oscillator, an optical fiber beam splitter, a first delay line, a second delay line, a third delay line, a fourth delay line, a transmitting antenna, a first parabolic mirror, a second parabolic mirror, an atomic force microscope, a receiving antenna, a processor, a synchronous phase-locked loop, a first energy adjustment module, a second energy adjustment module, a first reflector and a second reflector; the present invention realizes the advantages of high pump light energy and tunable pump wavelength in a terahertz near-field microscope.

The laser annealing system includes: a laser system; and a laser annealing device, which irradiates a first pulse laser and a second pulse laser to an irradiated object, the laser annealing device includes: an irradiation optical system, which guides the first pulse laser and the second pulse laser to the irradiated object; a moving mechanism, which causes the irradiation positions of the first pulse laser and the second pulse laser to move relative to the irradiation position of the irradiated object; and a control unit, which controls the laser system so that the irradiated object is irradiated with the first pulse laser, and after the irradiation with the first pulse laser, the area of ​​the irradiated object irradiated with the first pulse laser is irradiated with the second pulse laser, the laser system includes: a laser oscillator, which outputs a pulse laser; an optical pulse stretcher, which stretches the pulse laser output from the laser oscillator; and a gate, which is arranged on a delay optical path of the optical pulse stretcher, and the control unit controls the output of the first pulse laser and the second pulse laser by controlling the opening and closing of the gate.

A gas laser device that amplifies laser light output from a laser oscillator by means of an amplifier and emits the amplified laser light, the amplifier being provided with: a chamber device that amplifies laser light from the laser oscillator; a resonator that resonates the laser light emitted from the chamber device between both sides sandwiching the chamber device; and a beam expander, the resonator including an output coupling mirror disposed on one side sandwiching the chamber device, through which a portion of the laser beam emitted from the chamber device passes, and which reflects the other portion of the laser beam emitted from the chamber device so as to return to the chamber device, the beam expander including: a convex mirror, which is disposed on the other side of the chamber device, and which reflects the other portion of the laser beam emitted from the chamber device so as to return the other portion of the laser beam to the chamber device; a reflection mirror disposed between the chamber device and the output coupling mirror and reflecting the laser beam emitted from the chamber device so as to enlarge the beam width of the laser beam; and a concave mirror that reflects the laser beam reflected by the convex mirror toward the output coupling mirror so as to perform collimation such that the amplified beam width of the laser beam is constant.

A laser device includes a laser oscillator configured to generate pulse laser light, an actuator configured to adjust a laser light parameter of the pulse laser light, and a laser control processor configured to correct an operation parameter value of the actuator so that a difference between a measurement value and a target value of the laser light parameter becomes small based on a change pattern of a pulse time interval of the pulse laser light continuously changing within a burst of burst oscillation in accordance with a command of an exposure apparatus, and control the actuator.

A biological information detection device is disclosed that includes a first laser oscillator that oscillates a first pulsed laser beam adapted for detection of a lactic acid or lactic acid salt; a second laser oscillator that oscillates a second pulsed laser beam adapted for detection of a pyruvic acid; an irradiation mechanism that emits the first pulsed laser beam and the second pulsed laser beam to blood; a light receiving sensor that receives a detected laser beam output from the blood; and a control unit. The control unit outputs oscillation instructions for oscillating the first pulsed laser beam and the second pulsed laser beam, cuts out detected signals provided from the light receiving sensor as time segment data for time periods, and calculates respective quantities of the lactic acid or lactic acid salt and the pyruvic acid in the blood based on the time segment data.

Laser processing device (40) comprising: a clamping table (54) which holds a wafer (10) having a front side (10a) and a back side (10b); a laser beam application means (44) that applies a laser beam to the wafer (10) which is held by the clamping table (54); and a processing feed means (43) that performs a relative processing feed of the clamping table (54) and the application means (44) for a laser beam, wherein the application means for a laser beam comprises a laser oscillator (44b) which oscillates a pulsed laser beam, and a focusing device (44a) which focuses the pulsed laser beam oscillated by the laser oscillator (44b) in order to apply the pulsed laser beam to the wafer (10) which is held by the clamping table (54), and The pulsed laser beam, oscillated by the laser oscillator (44b), includes burst pulses (BP), each of which has several subpulses that are gradually amplified stepwise from a lower energy to a high energy, and the burst pulses (BP) are applied to the wafer (10) to form shielding tunnels (100), each containing a small hole (102) and an amorphous phase (104) surrounding the small hole, wherein the application means (44) is configured for a laser beam to form a circular small hole (102) and a circular amorphous phase (104), each extending from the front side (10a) to the rear side (10b) of the wafer (10), wherein the focusing device (44a) is movable in the direction of the optical axis and configured such that the focal point is positioned at a predetermined position in the wafer (10). is.

A pulse generation unit generates a driving voltage signal including a pulse signal. A laser oscillation module oscillates a laser beam by carrying out, based on the driving voltage signal, a pulse oscillating operation. When the power command signal has a voltage command value corresponding to a laser power greater than a predetermined laser power during a high period, the pulse generation unit modulates, in a pulsed manner, a voltage value of the high period of the driving voltage signal so as to alternately repeat, for a preset period of time from a rising time of the high period of the driving voltage signal, a high state in which the voltage value is maintained and a low state in which the voltage value is lowered by a predetermined voltage value without being lowered to a voltage value of a low period of the driving voltage signal.

A laser processing apparatus and a method for adjusting the phase pattern are provided, which can suppress performance differences of the laser beams irradiating the workpiece between processing devices, thereby achieving the desired processing result. The laser processing apparatus includes a laser beam irradiation unit that irradiates the workpiece with a laser beam and a control unit. The laser beam irradiation unit includes: a laser oscillator that oscillates laser light; a focusing lens; a concave mirror that has a focal point at the focusing point of the focusing lens and has a spherical reflecting surface; a beam splitter that allows the laser beam emitted from the laser oscillator to pass through the focusing lens and branches the reflected light; and a wavefront measurement unit that receives the reflected light and acquires the wavefront data of the laser beam. The control unit changes the phase pattern displayed on the display unit of a spatial light modulator based on the wavefront data.

The invention relates to the technical field of fiber bragg gratings, and discloses a fiber bragg grating annealing method and device, an optical fiber and an optical fiber laser oscillator. The fiber bragg grating annealing method comprises the steps of providing an optical fiber; heating the grating area until the temperature of the grating area reaches a first preset temperature, and keeping the temperature of the grating area at the first preset temperature for a first preset duration; cooling the optical fiber until the temperature of the grating area is reduced to a second preset temperature; the optical fiber is placed in a constant-temperature environment for a second preset duration, the temperature of the constant-temperature environment is a third preset temperature, and the third preset temperature is smaller than the first preset temperature; heating the grating area until the temperature of the grating area reaches a fourth preset temperature, and keeping the temperature of the grating area at the fourth preset temperature for a third preset duration; and cooling the grating area until the temperature of the grating area is reduced to a fifth preset temperature. The beneficial effects are that the temperature rise coefficient of the fiber bragg grating can be reduced, and the bearing power of the fiber bragg grating can be improved.

An imaging method of a coherent Raman scattering imaging device based on spectral progressive scanning according to the present invention includes a synchronous two-color light source, a nonlinear amplification and spectral broadening module, a spectral progressive scanning control module, a linear amplification module, a beam combining and sample detection module, and a data processing module. The present invention does not require tuning a laser oscillator, nor does it require time scanning. By controlling the seed light and pump light of the nonlinear amplifier, adjusting parameters such as the dispersion, power, chirp of the seed light, and the pump power of the amplifier, the spectral evolution of the nonlinear amplifier is dynamically adjusted, so that it gradually transitions from a narrow spectrum to a wide spectrum, and from covering a single Raman peak to progressively covering multiple Raman peaks. This spectral progressive scanning coherent Raman light source can achieve simultaneous imaging of multiple chemical bonds, has a fast scanning speed, a flexible imaging method, and combines high spectral resolution and a wideband detection range, and also provides a new way to eliminate noise in coherent Raman scattering imaging.

This processing state monitoring device, which monitors a processing state caused by laser processing, comprises: a first sensor that detects first radiation light from a processing part of a processing object that receives laser light emitted from a laser oscillator via a processing optical element, and acquires first temperature information pertaining to the temperature of the processing part on the basis of the first radiation light; and a second sensor that detects second radiation light from the processing optical element and acquires second temperature information pertaining to the temperature of the processing optical element on the basis of the second radiation light.

To provide a technique that can prevent a stripe pattern from being formed on a result of irradiation, even in a situation where energy variation whose variation cycle is fast occurs in a laser oscillator.SOLUTION: A laser processing device 1 comprises: a laser oscillator 21 that oscillates processing laser light R on the basis of an inputted PWM signal S; a galvano-scanner 18 that emits the oscillated processing laser light R along a scanning line extending in a predetermined direction to an object 7 to be processed; a laser driver 37 that outputs the PWM signal S; and a CPU 41 that can set an operation mode and controls operation of the galvano-scanner 18 and of the laser driver 37 on the basis of the set operation mode. When a first mode is set as the operation mode, the CPU 41 controls the laser driver 37 so that output timings of the PWM signal S are made different between adjacent scanning lines.SELECTED DRAWING: Figure 7

This laser device is provided with: a laser oscillator which includes an optical resonator and a pair of electrodes for generating discharge by applying a voltage to a laser gas, and which outputs a first pulsed laser light; a first optical pulse stretcher that transmits a portion of the first pulse laser light, surrounds the other portion of the first pulse laser light by one circle, and outputs a first transmitted light and a first one-circle surrounding light, which have a first shift amount and spatially overlap a portion of the first transmitted light and the first one-circle surrounding light, thereby outputting a second pulse laser light in which the pulse time width of the first pulse laser light has been expanded; and a second optical pulse stretcher that transmits a part of the second pulse laser light, surrounds the other part of the second pulse laser light by one circle, and outputs second transmitted light and second one-circle surrounding light that have a second offset amount different from the first offset amount and spatially overlap a part of the second transmitted light and a part of the second one-circle surrounding light. As a result, a third pulse laser beam having an extended pulse time width of the second pulse laser beam is output.

A wobble laser processing apparatus according to an embodiment of the present invention comprises: a laser oscillator provided to oscillate a laser; and a wobble laser irradiator that is provided to, to process a partial area of a coating electrode which is traveling, irradiate the laser irradiated from the laser oscillator, to a coating electrode in a wobbling pattern, and that is capable of adjusting at least one of a wobbling width, a wobbling height, and a wobbling frequency on the basis of a traveling speed of the coating electrode.

A laser processing method and apparatus for printed circuit boards are provided, which effectively utilize a laser oscillator to optimize processing efficiency and quality. The laser processing method uses a laser oscillator to perform laser processing by applying RF pulses to oscillate the laser. During laser output after the application of the RF pulse ends, the RF pulse is applied again to continue laser oscillation, and a desired duration of laser light is extracted from the continuously oscillating laser for laser processing of the printed circuit board.

A laser system is provided with: a laser oscillator system that outputs a first pulse laser beam in a first polarization direction and a second pulse laser beam in a second polarization direction that is rotated by 45 degrees in a first rotation direction with respect to the first polarization direction; the beam combiner is used for combining the first pulse laser and the second pulse laser; the beam combiner is provided with: a first polarizing plate; a first Faraday rotator that rotates the polarization direction of the first pulse laser beam that has passed through the first polarizing plate by 45 degrees in the direction opposite to the first rotation direction; and a second polarizing plate that transmits the first pulse laser beam that has passed through the first Faraday rotator and reflects the second pulse laser beam. And the multi-pass Faraday mirror is used for reflecting the first pulse laser and the second pulse laser towards the second polarizer. The multi-pass Faraday mirror comprises a first Faraday material, an electromagnet and a plurality of reflectors, the processor controls current flowing through the electromagnet through the power supply, so that the current does not flow through the electromagnet when the first pulse laser penetrates through the multi-pass Faraday mirror, and current rotating 90 degrees in the polarization direction of the second pulse laser flows through the electromagnet when the second pulse laser penetrates through the first Faraday material.

To provide a laser oscillator capable of obtaining a desired beam profile by continuously changing the beam profile of a laser beam emitted from an optical fiber.SOLUTION: The laser oscillator 90 includes a laser module 10, a condenser lens 42, an optical fiber 80, a polarization adjustment mechanism 30, and a birefringent plate 43. The laser module 10 emits a linearly polarized laser beam LB. The condenser lens 42 condenses the laser beam LB on the optical fiber 80. The optical fiber 80 has a center core 81 and a ring core 83. The polarization adjustment mechanism 30 has a half-wave plate 31 and changes the polarization direction of the laser beam LB. The birefringent plate 43 branches the laser beam LB into the first laser beam LB1 and the second laser beam LB2, and changes the ratio of the light amounts of the first laser beam LA and the second laser beam LA.SELECTED DRAWING: Figure 2A

Disclosed is a method for manufacturing a stator for a rotating electric machine, comprising: a step of bringing a coil sheet (52) and a front end portion (40) of another coil sheet (52) used to form a stator coil (24) of a rotating electric machine (1) into contact with each other; and a welding step of irradiating a laser beam (110) having a wavelength of less than 0.6 μm to a welding target portion of the abutting front end portion, wherein the laser beam is generated in each pulse oscillation of a laser oscillator in a manner having a laser output of more than 3.0 kW, and during at least a portion of one pulse oscillation, the laser beam moves in a manner such that the irradiation position changes linearly parallel to the abutting surface (401) of the front end portion.