2106 results about "Galvanometer" patented technology

The invention relates to the technical field of laser engraving, and discloses a laser engraving method and system capable of automatically correcting coordinates of a galvanometer and a camera, and the method comprises the following steps: calculating a target conversion coefficient based on a calibration size and a pixel size of an image collected by the camera, and controlling the galvanometer to perform laser etching on a cross mark on the surface of a PCB (Printed Circuit Board), recording origin data of a galvanometer coordinate system; adjusting the position of the camera to enable the cross center of the view of the camera to coincide with the cross mark, and calculating the coordinate offset; coordinate space transformation is carried out on all the points to be machined, and galvanometer marking coordinate data are obtained; after laser engraving is carried out on the galvanometer marking coordinate data, an engraving area image is collected, the position residual error and the size proportion deviation are calculated, laser engraving is carried out again, and a laser engraving result is obtained. The technical problem that the visual positioning coordinate and the galvanometer marking coordinate in the laser engraving system are not consistent is effectively solved.

The invention belongs to the technical field of automatic assembly, and discloses an automatic assembly system and method for a large nut of a water turbine ball valve, and the system comprises a mechanical arm, an end effector and an intelligent nut tightening control system. The end effector integrates an electromagnet adsorption mechanism, a servo drive rotating mechanism, a floating compensation mechanism and a visual recognition mechanism, nuts of different specifications are grabbed in a self-adaptive mode through an electromagnet, submillimeter-level accurate positioning is achieved through a laser galvanometer stereo camera, and the assembling posture is automatically adjusted in combination with the floating compensation mechanism. The intelligent control system adopts a staged tightening strategy, performs real-time monitoring through a torque sensor, and has a dual protection mechanism. The hydraulic turbine ball valve large nut assembling machine achieves full-automatic assembling of hydraulic turbine ball valve large nuts, has the advantages of being high in assembling efficiency, high in positioning precision, high in adaptability, reliable in quality and the like, solves the problems that manual assembling is large in labor intensity, many in potential safety hazards, poor in quality consistency and the like, and remarkably improves the assembling quality and efficiency of key parts of a hydropower station.

The invention relates to the technical field of precision manufacturing, and discloses a multi-mode laser galvanometer calibration method and device. The method comprises the steps of obtaining a smooth angle sequence, comparing the smooth angle sequence with a calibration model, extracting an abnormal component if a comparison deviation is abnormal, and performing smooth processing to obtain a deviation vector; fusing the statistical characteristics of the light beam position and the deviation vector, predicting the light beam position, and generating a calibration parameter set if the light beam position exceeds a deviation range; extracting a key compensation item and optimizing a driving sequence, fusing frequency domain interference to generate a simulation track, and determining a stability index; and comparing the environment feature set, adjusting parameters to obtain an enhanced path model, and determining a final calibration scheme in combination with real-time feedback. According to the method, accurate calibration of the galvanometer in a multi-mode dynamic scene can be realized.

The invention relates to the technical field of solar cell processing, in particular to a laser light-transmitting scribing control method and system for a solar thin-film cell. The control method comprises the steps that a large-size substrate is divided into a plurality of galvanometer view fields through a dynamic flight continuous machining mode, a continuous snake-shaped machining path is generated, the laser machining platform is driven to continuously move at the constant speed, and the galvanometer scanning system is synchronously triggered to start lineation in a splicing area in advance. According to the method, a time domain coupling equation of galvanometer scanning frequency-platform movement speed-laser pulse sequence is established, and dynamic compensation of an optical path and self-adaptive adjustment of energy density are achieved in the continuous machining process. Based on a view field expansion algorithm of a nonlinear kinematics model, the phase deviation of a scanning vector and a motion vector is effectively inhibited, and the geometric continuity of a splicing interface in ultra-long stroke machining is guaranteed.

The invention discloses a photoacoustic spectrum-confocal Raman spectrum multi-view-field high-dimensional imaging method and a photoacoustic spectrum-confocal Raman spectrum multi-view-field high-dimensional imaging device. Nanosecond pulse laser with adjustable wavelength is generated through a continuous spectrum nanosecond pulser and a narrow-band spectrum tuning module and cooperates with a microscopic detection module, a depth imaging module, a galvanometer system and an electric displacement table to obtain spatial three-dimensional data, a photoacoustic spectrum and a Raman spectrum under multiple view fields; shallow photoacoustic spectrum-Raman spectrum tomography and deep three-dimensional photoacoustic imaging are realized; correcting a photoacoustic spectrum quantitative error by using a spectrum decoupling algorithm, and fusing the multi-view-field data to generate multi-view-field high-dimensional photoacoustic spectrum-Raman spectrum data; high-dimensional data features are extracted based on a 3D convolution instance segmentation network, and quantitative analysis and spatial distribution visualization of blood oxygen, inflammatory factors and the like are achieved. According to the method, the limitation that substances are difficult to analyze in photoacoustic imaging is overcome, the contradiction between the imaging resolution and the penetration depth is solved, and an accurate analysis means is provided for diagnosis of diseases such as knee osteoarthritis and sepsis.

The invention relates to the technical field of modern precision machining and optical scanning, and discloses a motion control method and system of a laser galvanometer. The method comprises the steps that a real-time position signal is collected and preprocessed, and a filtered position signal is obtained; the deviation between the trajectory model and a preset trajectory model is calculated, when the deviation exceeds a threshold value, the trajectory model is identified as a complex trajectory segment, offset vector data is generated, and an offset compensation demand signal is generated accordingly; driving an instruction device in combination with historical data to obtain compensation parameters; when the deviation is lower than an updating threshold value, updating the trajectory model; a stable control signal is generated based on the optimization model and filtering signal prediction, and the environmental interference is calibrated and the signal smoothness is enhanced through the stable control signal; and finally, comparing the enhanced signal with the optimization model, and repeating the compensation process when the deviation exceeds the standard to obtain a final stable control signal. According to the method, through multi-level deviation processing and iterative optimization, the control precision and the anti-interference performance of the laser galvanometer in complex track movement are improved.

The invention provides a laser galvanometer intelligent control system and method based on big data, and belongs to the technical field of intelligent control systems. S2, data preprocessing; s3, feature extraction; s4, model training; s5, performing real-time prediction; s6, generating a control instruction; s7, executing a control instruction; and S8, performing feedback and optimization. High-precision closed-loop control over movement of the laser galvanometer can be achieved, the deviation between the actual movement state and the target movement state is effectively reduced, the laser machining precision is improved, and application scenes such as electronic chip fine machining with extremely high precision requirements are met.

The invention provides a subjective optometry prediction method combining wavefront aberration and optical signals. According to the method, eyeball wavefront aberration data are measured through a wavefront sensor, cornea, crystal and retina biological parameters are obtained by combining multi-view-field scanning of a galvanometer system, and after high-credibility data points are screened, a gradient refractive index eyeball three-dimensional model is constructed by adopting an NURBS algorithm; using finite element analysis to optimize cornea stress distribution, iteratively correcting the model through a deformation energy function, and dynamically compensating eyeball motion errors based on eye movement tracking data; and generating a multi-field-angle visual chart image through ray tracing simulation, and predicting a subjective optometry result in combination with an image quality evaluation algorithm. According to the method, high-precision modeling, dynamic error suppression and intelligent simulation technologies are fused, the optometry prediction accuracy, the personalized adaptation degree and the dynamic scene adaptability are remarkably improved, and an efficient and reliable solution is provided for refraction correction.

According to the switchable double-laser-head machining light path system and device, a three-dimensional galvanometer and a cutting head assembly are integrated into a machining head assembly, a light path switching mechanism is adopted, two dichroscopes are horizontally moved through a sliding table, selective light splitting is conducted on wavelength setting of the two dichroscopes, and therefore the machining precision of the two dichroscopes is improved. Rapid seamless switching and light path multiplexing between a three-dimensional galvanometer machining mode and a cutting head machining mode are achieved, it is ensured that the lens angle does not need to be adjusted again or light path alignment does not need to be conducted after light path switching, coaxial CCD monitoring is adopted, according to the wavelength setting characteristics of the two dichroscopes, the wavelength differentiation design is conducted on the first illumination light source and the second illumination light source, and therefore the machining efficiency is improved. According to the multi-axis moving platform, the same CCD camera is shared by two machining modes, high-precision real-time monitoring under the double machining modes is achieved, a closed-loop control basis is provided for the laser machining process, and meanwhile, the multi-axis moving platform is matched with the two rotary table assemblies, so that laser machining can be flexibly conducted on a curved-surface workpiece within a large-format range.

The invention provides a laser positioning method for improving gemstone cutting precision, and belongs to the technical field of gemstone cutting laser positioning. A gemstone crystal refractive index tensor model and a ray tracing algorithm are established to simulate a propagation path of light in a gemstone; a thermo-optic effect prediction model is adopted to predict a focus drift distance according to temperature distribution and laser power data and calculate wavefront predistortion phase distribution for compensation, and a zero-vibration input shaping filter is designed for a galvanometer scanning system to suppress residual vibration. A composite control strategy that feedforward control compensates inertia lag and feedback control corrects position errors is adopted to drive a galvanometer, the inherent frequency of a system is recognized through spectral analysis, and the scanning frequency is adjusted to avoid resonance. The technical problem that in the long-time machining process, due to the thermo-optic effect and vibration of a galvanometer scanning system, the laser focus point position generates accumulated drifting, and the cutting precision is reduced is solved.

The invention relates to the technical field of satellite laser communication, and discloses a laser communication double-end on-orbit calibration system and method, and the system comprises an A end and a B end which are in communication connection and have the same structure; the end B is a second laser communication terminal; the A end is a first laser communication terminal which comprises a main light path, and a transmitting branch, a receiving branch, a tracking branch and a calibration branch which are connected with the main light path; the main light path is composed of an A-end optical antenna, an A-end reflex reflector, an A-end fine tracking galvanometer, an A-end first spectroscope, an A-end second spectroscope, an A-end third spectroscope and an A-end emission galvanometer which are connected in sequence; the transmitting branch is connected with the A-end transmitting galvanometer; the receiving branch is connected with the A-end third spectroscope; the calibration branch is connected with the A-end second spectroscope; and the tracking branch is connected with the A-end first spectroscope. According to the invention, on-orbit receiving and transmitting coaxial calibration is carried out, calibration is carried out without the help of a ground end, and the efficiency is improved.

The invention discloses a multi-light-spot batch 3D printing device and method, and belongs to the field of 3D printing, the device comprises at least one galvanometer scanning unit, and each galvanometer scanning unit is provided with a laser beam splitting unit; the laser beam splitting unit is used for splitting one laser beam into a plurality of laser beams so as to form a laser matrix, and the distance between adjacent laser beams in the laser matrix is adjusted; the galvanometer scanning unit is used for reflecting the laser matrix to the printing working face, the laser matrix scans on the printing working face by adjusting the reflection angle of the galvanometer scanning unit, and multiple parts are printed in batches. Under the condition that the number of the galvanometers and the number of the lasers are not increased, the printing speed of small parts can be increased, and the requirement for batch production is met.

The invention discloses a laser channel atmospheric turbulence fading real-time compensation device and method based on a galvanometer system, and the method comprises the steps: enabling an incident light beam to irradiate a transparent PCB integrated with a photodiode array after the incident light beam is focused through a convex lens, obtaining the light intensity distribution of a current light spot through the photodiode array, and transmitting the light intensity distribution to a signal processing unit; the signal processing unit coarsely adjusts the deviation direction of the light spots according to the received light intensity distribution data, and aligns the part with the strongest light intensity in the light spots to the end face of the optical fiber; and based on the roughly adjusted light spot deviation direction, the signal processing unit dynamically adjusts the deflection angle of the galvanometer by using a gradient descent method according to the power measurement value of the receiving coupling module, so that the fine adjustment of the light spot deviation direction is realized, and the receiving coupling power is maximized. The objective of receiving optical power maximization is achieved, optical design, electronic control and algorithm optimization are combined, and atmospheric turbulence compensation with high cost performance is achieved.

The invention discloses a three-dimensional curved surface pattern layering processing method based on parameterized segmentation, and aims to solve the problem of high-precision pattern processing on the surface of a curved surface by using a laser scanning galvanometer. The method comprises the following steps: firstly, importing a three-dimensional model, and carrying out parameterization processing to obtain a two-dimensional parameter domain; positioning a to-be-processed plane pattern in the two-dimensional parameter domain to form a complete two-dimensional geometric grid covering a pattern area, generating a three-dimensional pattern grid attached to a curved surface, and calculating a center normal vector of the three-dimensional pattern grid; then, generating an equidistant plane group on the surface of the curved surface, and calculating an intersection line of the plane and the three-dimensional pattern grid as a laser scanning track; and the five-axis linkage platform-galvanometer system is started for machining. Through the parameterization domain, distortion of curved surface pattern machining is effectively solved, machining uniformity is improved, and the method is particularly suitable for laser machining of large-scale or high-complexity curved surface patterns.

The invention relates to a super-resolution fluorescence lifetime microscopic imaging method and system based on pixel relocation. The method comprises the following steps: S1, carrying out multi-focus parallel scanning on a sample by using an acousto-optic deflector; s2, synchronously collecting a fluorescence intensity image and fluorescence lifetime data through an area array detector and a point detector; and S3, carrying out super-resolution reconstruction on the fluorescence intensity image based on a pixel relocation algorithm, and mapping fluorescence lifetime data to a reconstructed image to generate a super-resolution fluorescence lifetime microscopic image. According to the invention, an AOD is adopted to replace a scanning galvanometer in a traditional TCSPC-FLIM imaging system as a light beam scanner; addressing scanning of AOD, image acquisition of EMCCD and life data acquisition of PMT and TCSPC cards are closely linked by combining well-designed multiple paths of synchronizing signals, and fluorescence life data are distributed to each dot matrix through a later data processing method, so that organic combination of super-resolution and FLIM can be realized without complicated equipment, and SR-FLIM images of samples are obtained.

The invention relates to a laser cladding system for mold repair and a control method of the laser cladding system, and belongs to the technical field of laser cladding. The laser cladding system comprises a central control unit; the scanning system is used for collecting a morphology signal of the surface of the workpiece and sending the signal to the central control unit; the infrared temperature measurement system is used for collecting temperature signals of a workpiece machining area and sending the signals to the central control unit; the central control unit carries out signal processing on the morphology signal and the temperature signal; the galvanometer system receives a two-dimensional deflection control instruction sent by the central control unit after signal processing; the deflector system is used for receiving a micro-angle adjusting instruction sent by the central control unit after signal processing; and the laser receives the temperature signal processed by the central control unit, adjusts laser process parameters according to the control signals of the galvanometer system and the deflector system, and processes the workpiece, so that the cladding precision, the processing stability and the automation level are remarkably improved.

The invention relates to a calibration method, device and equipment of a laser scanning galvanometer performance detection device. The method comprises the steps that a laser is controlled to emit laser, a rotating table and / or a scanning galvanometer are / is controlled to rotate until a position sensitive detector detects that a light spot of the laser is located at a preset zero point position, and the deflection angle of the rotating table is determined as an initial angle; determining an angle range based on the initial angle and a preset angle, controlling the rotating table to rotate in the angle range, and obtaining light spot positions detected by the position sensitive detectors at multiple angles in the angle range; based on the light spot positions at the multiple angles, calibration parameters in the target calibration function are solved; the solved target calibration function is used for carrying out performance detection on the scanning galvanometer. By adopting the method, the laser scanning galvanometer performance detection device can be automatically calibrated.

The invention discloses a five-axis linkage platform-galvanometer collaborative curved surface machining method based on space curve filling. The method comprises the following steps: firstly, importing a three-dimensional model stored in a triangular patch format, segmenting a closed curved surface target processing area, and then obtaining a two-dimensional plane mapping graph through parameterization; a space curve is adopted to fill the pattern, and a five-axis linkage platform motion trail is obtained through smooth processing; a filling pattern and a path are reflected to a three-dimensional space, a five-axis linkage platform and galvanometer motion instruction is generated, five-axis linkage platform motion parameters are checked, and local smooth iteration is carried out if the five-axis linkage platform motion parameters do not reach the standard; calculating a laser incident angle and a focal offset distance, and iteratively optimizing a smoothing mode when the requirements are not met; and the relative positions of the five-axis linkage platform, the workpiece and the galvanometer coordinate system are determined, coordinates are converted, and the five-axis linkage platform is combined with the two-dimensional or three-dimensional galvanometer module to complete machining. According to the method, high-frequency scanning of the galvanometer and smooth motion of the five-axis linkage platform are combined, and curved surface pattern machining under comprehensive constraint of the focal offset distance and the incident angle is achieved.

The invention relates to the technical field of automobile glass film removal, in particular to a laser film removal control method and system based on dynamic environment compensation. The control method comprises the steps that a multi-source vibration monitoring network is constructed at key nodes of a galvanometer system base, a linear guide rail driving unit and a workpiece clamp of the laser film removing equipment, an original vibration signal set containing acceleration, angular speed and displacement is collected in real time through a three-axis acceleration sensor and a gyroscope set, and the sampling frequency is not lower than 10 kHz. According to the method, breakthrough improvement of curved surface laser processing is achieved through a full-link compensation mechanism, specifically, a three-axis sensor network is synchronously deployed at a motor flange, a lead screw bearing seat and a clamp interface, a differential anti-interference circuit is combined, coupling vibration characteristics of a mechanical transmission link are captured at the same time for the first time, and a data foundation is laid for accurate compensation.

The invention discloses a handheld multi-beam alignment fiber bragg grating sensing device and method. The handheld multi-beam alignment fiber bragg grating sensing device comprises a passive sensing grating assembly, a handheld module and a demodulation control module. The passive sensing grating assembly converts laser propagating in the optical fiber into a spatial light parallel laser beam and concrete an invisible passive end optical axis; the handheld module is used for realizing multi-beam high-speed space scanning and completing laser collimation and projection; and the demodulation control module is used for generating and distributing multiple paths of sensing laser and controlling the galvanometer in the handheld module to move synchronously. Due to the adoption of the hollow circular ring, the invisible virtual optical axis of the passive end can be visualized, an operator can conveniently and roughly recognize the position of the optical axis of the passive end, and the manual alignment efficiency is greatly improved. And meanwhile, one laser beam is divided into four laser beams by adopting a two-stage light beam increasing method, and the four laser beams are scanned through a galvanometer module and an off-axis parabolic mirror to form hundreds of laser beams in time, so that the space coverage is large, and the alignment efficiency is greatly improved.

The invention discloses a fan blade surface image acquisition system and acquisition method based on a galvanometer. The wide-angle camera is right opposite to a fan blade, the galvanometer control module is arranged right below the wide-angle camera, the high-magnification camera is arranged on the side of the galvanometer control module in the mode of facing the galvanometer control module, and the optical axis of the high-magnification camera is perpendicular to the optical axis of the wide-angle camera. The wide-angle camera and the high-magnification camera are respectively used for shooting a global surface image and a local surface image of the fan blade, and the wide-angle camera, the high-magnification camera and the galvanometer control module are electrically connected with the image processor. The variable-view camera module is constructed through the two cameras, synchronous acquisition of high-resolution image information of the surface of the fan blade under the large view is realized by combining the two-dimensional galvanometer, the problems of unclear imaging of the blade image, low acquisition efficiency and the like are solved, the health state monitoring and defect repairing of the blade in a wind power project are realized, and the method is suitable for popularization and application. The method has important theoretical significance and application value.

The invention provides a gas detection method based on galvanometer scanning, and the method comprises the following steps: obtaining a visible light image of a to-be-detected region collected by a visible light imaging module, processing the visible light image based on a pre-trained semantic segmentation model, and obtaining a background category matrix; acquiring gas concentration information of each scanning point obtained by scanning the to-be-detected area by the galvanometer laser telemetering assembly, wherein the galvanometer laser telemetering assembly is registered with the visible light imaging module in advance; and acquiring a background category corresponding to each scanning point according to the background category matrix, and correcting a gas concentration signal of the point based on a background correction coefficient associated with the background category. According to the gas detection method, the problems of false detection and the like caused by factors such as unknown background reflectors and unknown detection object types in the existing galvanometer scanning gas detection are effectively solved, and the accuracy of gas concentration detection is improved.

The invention belongs to the technical field of laser welding, and provides a method for welding multiple layers of tabs through annular light spot laser, which comprises the following steps: selecting a material to be processed for careful inspection to ensure that the material is qualified; performance parameters of a laser are checked and corrected, the power and frequency of ultrasonic waves are obtained through an intelligent ultrasonic frequency and power matching algorithm, and the to-be-machined material is pre-welded; welding the welding area by adopting an annular light spot; a preset laser power curve is obtained through an intelligent laser power matching algorithm, real-time power is compared with the preset power curve through a measurement method based on an energy meter, and the laser power is adjusted in time; an intelligent path planning algorithm based on computer vision is utilized to automatically generate an optimal galvanometer swing path to optimize a galvanometer path; and after welding is completed, defect type standards are recognized and recalled through the welding defect automatic recognition model based on deep learning.

The invention relates to the technical field of optical processing, and discloses an imaging depth adjustable laser optical processing system, which comprises a laser emission unit, an optical conduction unit, a spectral domain optical coherence tomography imaging unit, a laser galvanometer scanning unit, an indication light imaging unit, an image processing display unit and a control unit, according to the spectral domain optical coherence tomography imaging system, time scanning of high output wavelength is realized by utilizing a wavelength scanning mode that the scanning telescopic rotating module drives the spectral domain optical coherence tomography imaging system, and position information or image information of a sample from the surface to the interior is provided in real time in combination with an image processing technology; the three-dimensional galvanometer scanning unit scans the position of a sample in real time and records the position and orientation information of a scanning point at the same time, real-time image information and different depths, widths and axial positions of the sample are scanned at the same time, the focusing depth and wavelength of an imaging laser beam and the focusing position and energy of the scanning laser beam are fed back and adjusted, and the laser beam is positioned to the sample for machining.

The invention discloses a laser galvanometer projection correction method and system suitable for an uneven tunnel section, and the method comprises the steps: scanning the point cloud data of a tunnel face through a laser radar, so as to extract the point cloud data of concave-convex regions in the uneven tunnel section, and carrying out the extraction of the point cloud data of each concave-convex region; the projection coordinates of the tunnel contour points and the blast hole points are corrected through the point cloud data, laser galvanometer projection is carried out according to the corrected projection design parameters, and the tunnel contour and the drilling position can be projected on the uneven tunnel section rapidly and accurately; the problem of projection position deviation caused by unevenness of the tunnel face after blasting is effectively solved, and the accuracy of drilling and positioning of the uneven tunnel section is improved. Moreover, manual correction is not needed in the whole process, and before projection lofting is carried out every time, a user only needs to start software to automatically start the laser radar for scanning and automatically complete correction, so that personnel operation is greatly reduced, and safety is improved.

The invention discloses a dynamic compensation method and system for laser galvanometer delay and a related device, which are used for realizing dynamic compensation for the laser galvanometer delay and improving the dynamic compensation efficiency at the same time. The method comprises the following steps: firstly, collecting galvanometer data, receiving target galvanometer trajectory data, and constructing a dynamic prediction model of a TCN architecture; thirdly, decomposing the galvanometer data sample into a plurality of sub-tasks, dividing the dynamic prediction model into a plurality of sub-models, and matching the plurality of sub-tasks to the plurality of sub-models to obtain predicted galvanometer trajectory data and predicted galvanometer time deviation data; then, generating a compensation control instruction according to the predicted galvanometer trajectory data and the predicted galvanometer time deviation data, and after the compensation control instruction is triggered, obtaining multi-dimensional deviation data through incremental comparison calculation; and finally, according to the multi-dimensional deviation data, calculating a galvanometer deviation weight, and dynamically updating model parameters of the plurality of sub-models based on a galvanometer deviation weight value and the multi-dimensional deviation data.

The invention relates to a laser processing system and method for array micropores. The method comprises the following steps: selecting and preparing a chemical solution according to a to-be-processed material; determining the number of laser beams, the size of a galvanometer and machining parameters of each layer; a laser focus is positioned on the upper surface of the to-be-machined material, axial feeding machining is conducted on the first layer according to the determined machining parameters, the micropore morphology is obtained during machining, and machining of the next layer is conducted when set requirements are met; a laser focal plane is positioned to a machining plane after machining of the upper layer is finished, axial feeding machining is carried out on the current layer according to the determined machining parameters, machining of the next layer is carried out during machining when the micropore morphology meets the set requirement, and execution is repeated till the focal plane passes through the lower surface of the material to form a through hole; and the target material is moved to the next machining position, the laser beam is adjusted to the initial machining state, and repeated machining of the micropores is conducted. Through a variable-parameter layer-by-layer girdling technology, a focal plane is flush with the surface of a material to be processed, and light spot dispersion and energy density reduction caused by enlargement of laser light spots are avoided.

The invention discloses a device and a method for promoting methanation of carbon dioxide through temperature oscillation induced by laser scanning. The device comprises a reactor, a laser and a galvanometer, a transparent cover plate is arranged at the top of the reactor, an air outlet is formed in the side surface, and an objective table is arranged in the reactor; a catalyst layer is arranged above the objective table; the catalyst layer is provided with a longitudinally-penetrating gas leading-in hole, a gas flow channel is arranged in the objective table, one end of the gas flow channel is communicated with the gas leading-in hole, and the other end of the gas flow channel is communicated with the gas inlet. Introducing mixed gas containing hydrogen and carbon dioxide into a gas inlet of the reactor, changing the irradiation position of a laser beam emitted by a laser through a galvanometer, and enabling the laser beam to periodically scan and irradiate the catalyst layer to obtain methane. The surface temperature distribution of the catalyst is dynamically regulated and controlled through laser scanning, so that the temperature of a catalytic active site is continuously switched between a high temperature and a low temperature, the thermodynamic limitation of a carbon dioxide methanation reaction can be effectively reduced, and an efficient and stable carbon dioxide methanation process is realized.

The invention relates to a laser galvanometer detection system with temperature drift self-detection and correction functions. The laser galvanometer detection system comprises an error judgment module and an error calibration module, the error judgment module comprises a CMOS image sensing module, a visual detection module and a storage module; the error calibration module comprises a calibration module and a laser marking module; the CMOS image sensing module is used for shooting a high-definition image, and the visual detection module can generate a prediction image and perform deviation identification on the image shot by the CMOS image sensing module. According to the invention, the temperature drift error is automatically detected through real-time detection of the position drift error of each visual single detection area in the galvanometer processing breadth, and each visual single detectable area is detected one by one to form an adjacent array, so that the temperature drift error detection of the whole processing breadth is realized; and comparing the difference between'theoretical due 'and'actual existing' through an intelligent algorithm so as to detect, compensate and correct the error in real time.

The invention discloses a control method and system for enhancing repetition precision of a laser galvanometer, and the method comprises the steps: collecting laser power fluctuation and mirror surface temperature sequence data, obtaining a heat effect state vector through preprocessing, carrying out the noise interference updating of the heat effect state vector, inputting the heat effect state vector into a neural network model, and obtaining a preliminary thermal deformation predicted value; calculating an angle compensation parameter in combination with a preset compensation matrix to obtain a preliminary compensation signal; posterior state estimation correction is carried out, control parameters are adjusted, and enhanced compensation signals are obtained; then generating an instruction input sequence and carrying out iterative optimization to obtain an optimized angle compensation parameter; fusing position feedback to obtain a stable output track; and calculating the deviation between the angle compensation parameter and the real-time trajectory data, optimizing a heat effect state vector to obtain an optimized heat effect state vector, and recalculating the angle compensation parameter to obtain a final angle compensation parameter. According to the method, the track precision and stability of the laser galvanometer system under the complex heat effect can be remarkably improved.