207 results about "Reference mirror" patented technology

The invention relates to the technical field of wafer warpage and curvature detection, in particular to a wafer warpage and curvature detection system and a detection method thereof, and the detection system comprises a laser, a beam expander, a diaphragm, a beam splitter prism, a collimating mirror, a reference mirror, an imaging lens, a CCD and a computer, the light beam is reflected by the sample to be measured and then returns along the same path to interfere with the reference light so as to generate three groups of interference fringes, and the three groups of interference fringes pass through the imaging lens, the CCD and the computer and then are calculated so as to obtain the warping degree and the bending degree of the sample to be measured. According to the invention, the multi-surface interference fringe pattern of the double-sided polished sample to be measured is acquired by using the wavelength-adjustable Hunfizeau interferometer, and the warping degree and the bending degree of the sample to be measured are obtained through calculation, so that the problem of mapping errors caused by measuring the surface shape by using two interferometers or overturning the measured surface shape is solved; therefore, the detection steps of the warping degree and the bending degree of the wafer can be simplified, and the precision of the detection result is improved.

The invention discloses a two-plane absolute surface shape detection method and device based on multi-signal phase extraction, and relates to the technical field of optical interference measurement, and the method comprises the steps: obtaining a rotation asymmetric error through employing the wavefront phase distribution data of an initial position and an average value of the wavefront phase distribution data after rotation; then translating the reference mirror along the X axis, measuring translated wavefront phase distribution data, obtaining a rotational symmetry error according to the translated wavefront phase distribution data, and combining the rotational symmetry error with the rotational asymmetry error to obtain a solved surface shape error. According to the two-plane absolute surface shape detection method and device based on multi-signal phase extraction provided by the invention, errors caused by overturning of the mirror to be detected are eliminated, the measurement precision is improved, the measurement steps are simplified, and the stability of surface shape detection is improved.

The invention relates to the technical field of laser ranging, in particular to a double-optical-comb hybrid ranging device which comprises a signal detection optical path system and a signal demodulation optical path system. Wherein the signal detection optical path system comprises a first optical frequency comb, a first optical isolator, a first optical collimator, a first beam splitter prism, a reference mirror, a Faraday rotator, a convergence mirror and a target reflector; the signal demodulation optical path system comprises a second optical frequency comb, a second optical isolator, a second optical collimator, a half-wave plate, a second beam splitter prism, a third beam splitter prism, a first polarization controller, a first photoelectric detector, a reflector, a polarization beam splitter prism, a second polarization controller and a second photoelectric detector. A third polarization controller; and a third photoelectric detector. According to the invention, three ranging technologies of asynchronous optical sampling ranging, multi-heterodyne interference ranging and synthetic wavelength ranging are fused, and the problem that a large ranging range and high ranging precision cannot be simultaneously considered in the ranging process is solved.

The invention discloses an optical coherence tomography device for optimizing aberration digital compensation and an imaging method, the device comprises an optical coherence tomography device and an image processing module, and the optical coherence tomography device comprises an illumination module, an interference module, an area array detection module and a synchronous control module. The imaging method comprises the following steps: setting device light source parameters according to coherent gating, and determining a sampling matching relation of the area array detection module according to a sampling theorem; selecting a frequency sweeping mode or a time domain mode, electrifying to activate a corresponding light source and a synchronous time sequence, and adjusting the position of a reference mirror; collecting a full-field interference sequence of the area-array camera, performing digital aberration compensation, performing compensation and denoising on volume data of different depths, and exporting a three-dimensional diffraction limit image; and outputting a three-dimensional tomographic image with transverse diffraction limit and axial micron-level resolution. According to the invention, the imaging resolution and the imaging speed of optical coherence tomography are improved under the conditions that the camera specification is reduced, the GPU dependence is reduced and the system cost is reduced.

The invention provides a wafer platform and electron beam detection equipment, the wafer platform comprises a seat body mechanism, a mounting piece, an electrostatic chuck, a reference mirror, a limiting piece and a first fixing assembly, the electrostatic chuck is used for bearing a wafer, and the mounting piece is connected to an isolation plate of the seat body mechanism and is used for positioning the wafer platform; one end of the limiting part is adjustably connected to the mounting part, the other end of the limiting part is connected to the reference mirror, so that the reference mirror is positioned on the mounting part, and the electrostatic chuck is adjustably connected to the isolation plate through the first fixing assembly. According to the structure, the limiting piece connected to the mounting piece and the reference mirror is adjustably connected to the mounting piece, and the electrostatic chuck is adjustably connected to the isolation plate through the first fixing assembly, so that the reference mirror and the electrostatic chuck can be independently subjected to position adjustment relative to the seat body mechanism; and the convenience of adjusting the position of the wafer platform is improved.

The invention discloses an optical coherence tomography optical path structure and a dispersion compensation method thereof. The light path structure comprises a coherent light source, a 2 * 2 optical fiber coupler, a reference light path, a sample light path, an equal-wave-number spectrograph and an upper computer; low-coherence broadband light emitted by the coherent light source is divided into reference light and sample light after passing through the 2 * 2 optical fiber coupler, the reference light and the sample light are sequentially transmitted in a reference light path and a sample light path, the reference light and the sample light are retroreflected through a sample and a reference mirror and are retroreflected to the 2 * 2 optical fiber coupler according to an original light path, interference is generated, and interference light beams are transmitted to the equal-wave-number spectrometer. Interference light beams are split to an upper computer according to equal wave number intervals, and a tomographic image of a sample is obtained through algorithm processing of the upper computer. By means of the structure, the existing dispersion loss problem is solved from the source, most dispersion generated by a light path is solved, other dispersion is eliminated by adding a dispersion compensating mirror made of optical glass materials with certain thickness in the light path through algorithm calculation, the algorithm is simple, convenient and fast, and the imaging speed is high.

The invention discloses a coherent interference-based coaxial transceiving line scanning three-dimensional profile measurement system and method. The system comprises a low-coherence light source; the beam splitter is used for collimating light emitted by the low-coherence light source and then dividing the light into two paths; the measuring light is focused into a linear light beam through the cylindrical lens and is emitted to the surface of the to-be-measured sample, and the measuring light reflected by the surface of the to-be-measured sample returns to the beam splitter along the original path; the reference light is emitted to a reference mirror with a certain inclination angle and is reflected back to the beam splitter through the reference mirror; the measuring light reflected by the surface of the sample to be measured and the reference light reflected by the reference mirror are subjected to beam combination interference through a beam splitter and are imaged to enter a camera for interference pattern acquisition; the signal processing system is used for processing the interference patterns to obtain height distribution of the to-be-measured sample on a line field, and three-dimensional profile measurement of the to-be-measured sample is realized by transversely moving or transversely scanning the to-be-measured sample and overlapping the interference patterns measured at different positions. Therefore, high-efficiency measurement can be realized while the micro-nano precision is kept.

An optical coherence tomography (OCT) system comprises an interferometer configured to split incident light into a reference beam and a test beam, and to interfere the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern. The OCT system also comprises a spectrometer configured to analyze spectral components of the interference pattern at non-uniformly sampled wavenumbers. A computer-readable memory of the OCT system is configured to store a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers. The OCT system further comprises a processor configured to determine the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of the measured intensities with the measurement model.

Disclosed are a high-speed optical phase measurement system, a measurement method and an application thereof. The system includes an illumination module, a microscope module, an interference module, a camera module, a high-precision positioning stage and a control and data processing module. The illumination module, microscope module and interference module form an interferometer, with a preset angle between the reference mirror and the plane perpendicular to the optical axis; the high-precision positioning stage is configured to carry the sample and provide stable and accurate scanning; the emitted light from the collimated light source passes through the objective lenses and is incident on the sample and reference mirror respectively, the reflected light of the sample interferes with the reference light and is collected by the camera module; the control and data processing module implements on-line phase measurement based on the interference image.

The invention provides a signal synchronous acquisition and processing system and method for white light interference focusing, and is applied to the technical field of semiconductor measurement, the signal acquisition and processing system is used for overlay error measurement in the semiconductor measurement technology, and a CMOS sensor and an avalanche breakdown diode sensor are adopted. High-precision white light interference measurement is realized through components such as a beam splitter, a tube mirror, a halogen light source, a shutter, a microscope objective, a reference mirror and piezoelectric ceramics; a signal conditioning channel is designed and comprises a passive attenuation circuit, an impedance conversion circuit, a gain amplification circuit and an ADC (Analog to Digital Converter) driving circuit, so that accurate acquisition and processing of signals are ensured; the signal acquisition and processing system evaluates acquired interference signals through a template matching method, and realizes rapid determination of a zero optical path difference position and automatic focusing of wafer. The system has the advantages of high stability, high accuracy, high cost effectiveness and compact space structure, and is suitable for high-precision semiconductor measurement equipment.

The invention relates to the technical field of optical precision measurement, in particular to a rotation and translation absolute calibration method based on a nerve radiation field, a medium and equipment. The method comprises the following steps: acquiring at least three groups of interference measurement data of a measured mirror under original, rotation and translation poses by using an interference measurement system to be calibrated, inputting pixel coordinates and position coding information in the data into a neural radiation field network, optimizing network parameters through a self-supervised training strategy, and completing calibration of a reference mirror surface shape. Compared with a traditional Zernike method, the scheme adopts a neural radiation field to construct a double-branch network, can adaptively learn complex surface shape space distribution, and improves medium-high frequency error separation precision; the error of the reference mirror and the measured mirror is synchronously and directly output by double branches without successive dependence, so that error transmission and accumulation are avoided; the self-supervised training mechanism implicitly compensates pose deviation and noise interference through redundancy constraint, and shows higher engineering robustness.

The invention relates to a double-anti-terahertz compact range assembly error compensation method, which comprises the following steps of: assembling a main support structure, and removing assembly stress through high-temperature aging; a main reflector is installed on the main supporting structure, and the main reflector is calibrated; the current position of the main reflector is calibrated to a reference mirror on the side edge of the main reflector, and a test coordinate system is established based on the reference mirror; an auxiliary reflector mounting bottom plate is mounted on the main supporting structure, an auxiliary reflector is mounted on the auxiliary reflector mounting bottom plate, and the auxiliary reflector is calibrated; calculating the offset of the final position of the feed source assembly relative to the theoretical position of the feed source assembly; and with the main reflector as a reference, the position of the feed source assembly is adjusted based on the offset by adopting a high-precision six-degree-of-freedom platform, so that the feed source assembly is located at a final position. According to the invention, the assembly and calibration difficulty of the sub-reflector is effectively reduced, and the final assembly and calibration precision of the terahertz compact range system is equivalent to the test precision of an optical test instrument, namely the highest precision can be achieved.

The invention relates to the technical field of laser measurement, in particular to a laser interference surface shape measurement method based on a calibration plate, a medium, equipment and a system. Comprising the following steps: attaching a reflecting mirror to a reference mirror, and obtaining reflecting surface shape data of the reflecting mirror; the calibration glass plate is tightly clamped between the reflector and the reference mirror, and light facing surface reflection surface shape data and mixed transmission surface shape data of the calibration glass plate are obtained; removing the reflector, moving the calibration glass plate to a preset measurement distance along a laser optical axis, carrying out multi-surface synchronous measurement through a laser interferometer, and respectively obtaining light facing surface mixed reflection surface shape data and to-be-measured surface shape mixed data; and obtaining target surface shape data of the surface to be measured. According to the invention, the movable calibration glass plate is introduced to establish a double-reference measurement system, so that the space calibration of the airflow disturbance error can be realized. The device is simple in structure and low in measurement environment requirement. Interference of air turbulent flow can be eliminated only through single-time measurement, and the measurement time is saved.

The invention discloses a Linnik type wide spectrum measurement automatic focusing system and method. The Linnik type wide spectrum measurement automatic focusing system comprises a sample objective lens, a reference objective lens, a beam splitter prism, a beam splitter, an astigmatic lens group, a first detector, a barrel lens and a second detector. Light with sample morphology information enters the beam splitter prism through the sample objective lens, light reflected by the reference mirror enters the beam splitter prism through the reference objective lens, the light with the sample morphology information and the light reflected by the reference mirror are combined in the beam splitter prism and then enter the beam splitter, and the beam splitter divides the combined light into a first light beam and a second light beam. The first light beam enters the astigmatic lens group and irradiates the first detector, and the second light beam irradiates the second detector through the barrel lens. According to the invention, the focal plane can be searched in a large range, and the problem of short detection distance due to the coherent gap of the existing wide-spectrum interference measurement system is solved.

The invention relates to a dot matrix auxiliary focusing digital holographic microscope system and a holographic reconstruction method, the system comprises a digital holographic microscopy light path part and a dot matrix auxiliary focusing light path part, the digital holographic microscopy light path part adopts polarization modulated narrow-band laser to irradiate an object sample to be measured to become object light; the reference light which is orthogonal with the polarization reflected by the reference mirror is subjected to interference imaging in the polarization camera, so that different phase shift acquisition of a single image is realized; the dot matrix auxiliary focusing light path part calculates the focus position of the object sample to be measured by using the definition of the image, and the optimal inverse diffraction distance required in the digital holographic reconstruction process can be directly obtained. Compared with the prior art, the method has the advantages that the automatic focusing efficiency of the digital holographic microscope is improved, the digital holographic three-dimensional surface reconstruction speed is greatly increased, and the reconstruction efficiency and real-time performance are improved on the premise that the reconstruction measurement precision is guaranteed.

The application provides a high-precision autocollimator based on the Tyman Green interference principle and an angle measuring method, aiming at solving the problem that the prior art cannot continue to break through the existing angle measuring precision due to the limitation of geometric optical principle and the influence of environmental factors. The autocollimator comprises a laser, a filtering collimation module, a beam splitter, a reference mirror, a plane mirror, a detector and a data acquisition and processing computer. After the autocollimator is leveled, the plane mirror is placed on a turntable to be measured, and the measurement is carried out when the turntable has no rotation angle and has a rotation angle, so that the laser is emitted to the filtering collimation module to be emitted as monochromatic parallel light to the beam splitter and is divided into two paths. One path is reflected by the plane mirror and then passes through the beam splitter to reach the detector again. The other path is reflected by the reference mirror and then reflected by the beam splitter to reach the detector again. The two beams interfere on the target surface of the detector, the detector records the interference image and uploads it to the computer to calculate the interference fringe offset, so that the angle measurement is completed.

The invention discloses an intelligent assembling method of a glass reference mirror, which utilizes an intelligent mechanical arm to complete the assembling of the glass reference mirror, utilizes a set of six-degree-of-freedom intelligent mechanical arm to complete the accurate position control of the glass reference mirror, and utilizes two sets of double-shaft photoelectric autocollimators to measure the orientation of the reference mirror. The position of the mechanical arm is adjusted through a central control closed-loop algorithm, and the glued surface of the reference mirror is aligned with the reference mirror mounting surface of the inertial attitude sensor, so that the reading of a reference collimator is the lowest, namely the precision is the highest, and the actual measurement precision can be within 15 seconds of arc. Meanwhile, by using the system, the thickness of the epoxy adhesive layer can be controlled through a known reference surface, and the temperature cycle of-35 DEG C to 70 DEG C can be resisted when the thickness of the adhesive film is 0.20 mm to 0.60 mm through test verification.

In order to solve the technical problems that a conventional reflector antenna electrical axis direction calibration method is relatively complex and the error is relatively large when the conventional reflector antenna electrical axis direction calibration method is applied to a reflector antenna of which a mechanical axis is not easy to determine, the invention provides a reflector antenna electrical axis direction calibration method. A reference point tool coordinate system measured by a laser tracker and a reference point tool coordinate system tested by a photogrammetry camera are used as transfer, an incidence relation between an antenna coordinate system and a plane scanning frame coordinate system is established, and finally, the plane scanning frame coordinate system is obtained by combining the measured electric axis direction under the plane scanning frame coordinate system. And the electric axis direction under the antenna coordinate system can be obtained. The mechanical axis of the antenna does not need to be tested, a reference mirror is not needed, only one laser tracker and one photogrammetry camera are needed for testing, the testing method is simpler, the testing efficiency is higher, for the antenna of which the mechanical axis is not easy to determine, errors caused by fitting of the mechanical axis are avoided, and the testing precision is improved. The electric axis obtained by the method is more accurate in pointing.

The invention relates to a laser interference surface type measurement method using random mechanical disturbance for resolving. The method comprises the following steps: acquiring an interference image of a measured element by using a surface type measurement device based on laser interference; applying random mechanical disturbance to the surface type measuring device to cause the change of the relative pose between the reference mirror and the measured element so as to acquire N frames of interference images in different disturbance states; and processing the acquired interference images through a natural phase decoding algorithm to obtain the surface topography of the measured element. Compared with the prior art, high-precision measurement of the surface type of the measured element can be realized without vibration isolation equipment and a high-precision phase shifter, and the method has the advantages of low cost, low system complexity and high adaptability.

The invention discloses a high-precision guide rail angle swing error measuring device and method based on a pen type interference principle, and relates to the technical field of ultra-precision machining and detection. The beam splitter prism is arranged in front of the monochromatic laser, the linear polarizer is arranged between the beam splitter prism and the monochromatic laser, the two cube-corner prisms are arranged on a reflection light path and a transmission light path of the beam splitter prism, the half-wave plate is arranged on an emergent light path of the beam splitter prism, the polarizing beam splitter is arranged behind a light path of the half-wave plate, and the quarter-wave plates are arranged on the reflection light path and the transmission light path of the polarizing beam splitter respectively. One light path is selected as a laser emergent window direction to arrange the plane optical flat, the reference mirror is arranged on the other light path, the Fourier lens is arranged on an emergent light path of the polarizing beam splitter, and the photoelectric detector is arranged on a focal plane. The angle swing error of the guide rail can be measured in real time in place, the measurement resolution not lower than 5 arc seconds and the RMS repeated measurement precision of 10 nm are achieved, the overall structure is simple, and installation, adjustment and maintenance are convenient.

This invention relates to an interferometric measurement method and apparatus for large warp wafers, belonging to the field of optical detection and semiconductor measurement technology. The detection light is polarized and birefringently split to form P-beams and S-beams, which are then further divided into P-reference beams, S-silicon beams, S-reference beams, and P-silicon beams, respectively. By adjusting the spatial orientation of the reference mirror and the wafer under test, and using an aperture for spatial filtering, the P-reference beam and S-silicon beam are allowed to enter the subsequent optical path, while the S-reference beam and P-silicon beam are blocked. The S-silicon beam forms a measurement wavefront carrying information about the surface shape of the wafer under test. The P-reference beam is modulated by a deformable mirror to form a modulated reference wavefront similar to the measurement wavefront. The two form a resolvable interference fringe pattern at the camera. A wavefront sensor measures the surface shape information of the deformable mirror, and a calculation system obtains the surface shape information of the wafer under test based on the deformable mirror surface shape information and the relative surface shape change. This invention can reduce the interference fringe density in the detection of large warp wafers, reduce splicing measurement errors, and improve detection efficiency and accuracy.

The invention discloses a device and a method for synchronously detecting the focal length and the surface topography of a micro-lens array, which can realize synchronous detection on the focal length and the surface topography of the micro-lens array through a set of system, realize mutual matching between two parts of results and greatly shorten the detection time. The device comprises a first monochromatic laser light source (1), a first collimating lens (2), an attenuation sheet (3), a reflector (4), a microlens array sample (5), a microscope objective (6), a barrel lens (7), a first quarter-wave plate (8), an area array detector (9), a first monochromatic optical filter (10), a second monochromatic laser light source (11), a second collimating lens (12), a linear polarizer (13), a beam splitter prism (14), a polarization beam splitter prism (15), a second quarter-wave plate (16) and a reference lens (17). A third quarter-wave plate (18), a second monochromatic optical filter (19) and a polarization camera (20).

The application discloses a multi-axis laser interferometer optical axis space position positioning system and a positioning method, which comprises XYZ three-axis laser interferometer optical axis perpendicular adjustment and XYZ three-axis laser interferometer optical axis space intersection adjustment; wherein the optical axis perpendicular adjustment is to move a turntable independent measurement frame into a space coordinate system vertical reference mirror, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence according to displacement information and energy signals displayed on a display terminal until the displacement information is the minimum and the energy signal is the maximum; and the optical axis space intersection adjustment is to move a standard reference sphere above the turntable independent measurement frame, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence until the displacement information is the minimum and the energy information is the maximum. The application is simple in operation, fast in laser interferometer space position adjustment, and can realize high-precision positioning of multi-axis laser interferometer optical axes in space positions.

The present invention relates to a scanning hologram interferometer using a reference mirror. According to the present invention, provided is a scanning hologram interferometer comprising: a scan beam generation unit which modulates the phase of a first beam in a light source to convert the first beam into a first curvature beam, converts a second beam into a second curvature beam, and then interferes the first and second curvature beams to form a scan beam; a scanning unit which controls the scanning position of the scan beam in the horizontal and vertical directions and transmits the scan beam to a reflective object to scan the object by using the scan beam; a beam splitter which is disposed between the scanning unit and the object and transmits and reflects an incident beam, thereby splitting the beam; a reference mirror which is disposed on the upper side of the beam splitter and reflects an incident beam; a photodetector which is disposed on the lower side of the beam splitter and detects beams that have reflected off the object and the reference mirror and passed through the beam splitter; and an electronic processing unit which processes signals detected by the photodetector, thereby generating a hologram of the object.

The invention discloses a response non-consistency correction method for a multi-lens multi-detector spliced imaging system, and the method comprises the steps: constructing an initial compensation model of response differences between lenses according to optical design parameters and a ray tracing simulation result; carrying out on-satellite two-point calibration on each lens, and establishing a pixel-level initial linear response relationship; in an in-orbit imaging process, extracting each pixel coordinate in an image overlapping region between adjacent lenses and a corresponding gray scale response difference; performing on-orbit optimization fitting by taking the pixel coordinate as an independent variable and the gray scale response difference as a dependent variable to generate a dynamic compensation item for correcting on-orbit response drift; the adjacent lenses are divided into a reference lens and a target lens, and the dynamic compensation item is applied to the response of the whole image after the target lens is spliced, so that the response consistency correction of the target lens relative to the reference lens is realized. According to the invention, the gray continuity and the system-level radiation consistency of the image splicing area can be obviously improved.

This invention discloses an absolute measurement device and method for the second-order term of the surface shape of an X-ray plane mirror. The device includes a clamping platform, an interferometer, and a rotating stage. The rotating stage has a rotatable mounting platform for the mirror under test and a reference mirror mounting plate. The mounting platform is positioned in front of the interferometer's plane lens to fix the X-ray plane mirror under test. The reference mirror mounting plate has a mounting platform for a reference mirror, on which a reference plane mirror is mounted. The reference plane mirror reflects the light reflected from the X-ray plane mirror under test back to the interferometer's plane lens to measure the surface shape of the mirror. This invention aims to achieve high-precision absolute measurement of the second-order term surface shape of an X-ray plane mirror, improve measurement accuracy, and provide guiding surface shape measurement results for the manufacturing of high-precision X-ray plane mirrors.

The present application discloses a two-plane absolute surface shape detection method and device based on multi-signal phase extraction, which relates to the field of optical interference measurement technology. The rotational asymmetric error is obtained by using the wavefront phase distribution data of the initial position and the average value of the wavefront phase distribution data after multiple rotations; then the reference mirror is translated along the X-axis, and the wavefront phase distribution data after translation is measured, and the rotational symmetric error is obtained according to the wavefront phase distribution data after translation. The rotational symmetric error and the rotational asymmetric error are combined to obtain the surface shape error to be solved. The two-plane absolute surface shape detection method and device based on multi-signal phase extraction provided by the present application eliminate the error caused by the flipping of the mirror to be measured, improve the measurement accuracy, simplify the measurement steps, and improve the stability of surface shape detection.

Provided are an optical inspection device capable of accurately obtaining the film thickness of a film covering a sample even when there is a difference in spatial intensity distribution between irradiation light to the sample and irradiation light to a reference mirror, and a control method therefor. The optical inspection device includes: a light source that emits light; a beam splitter that splits the light emitted from the light source into first irradiation light directed toward a sample and second irradiation light directed toward a reference mirror; an interference light measurement unit that measures interference light due to object light which is reflected light of the first irradiation light from the sample and reference light which is reflected light of the second irradiation light from the reference mirror; and a control unit that controls each unit. The optical inspection device is characterized by further including: an object light measurement unit that measures the intensity of only the object light; and a storage unit that stores the intensity of the object light of a reference sample measured in advance by the object light measurement unit. The control unit is characterized by obtaining the film thickness of a film covering an observation sample on the basis of the intensity of the object light of the reference sample and the intensity of the object light of the observation sample measured by the object light measurement unit.

The invention provides a satellite-borne product installation precision testing device and method. The satellite-borne product installation precision testing device comprises a single-machine product, a reference mirror LJ1 assembly, a satellite platform and a reference mirror LJ2 assembly. According to the invention, the assembly precision test of the satellite product is realized through a high-precision measurement system, and the assembly precision is rapidly calculated, and the adjustment direction and the adjustment amount are directly given in an Euler rotation angle mode, so that rapid calculation and accurate orientation adjustment are realized; a reference mirror is used as a measurement basis, an electronic theodolite is used as test equipment, industrial measurement software (SA) is matched for use, and the size requirement and the use method of the reference mirror are provided. The method has the advantages that the error rate of testing and adjusting is effectively avoided, and the method is simple, easy to understand and high in operation adaptability; the device is suitable for assembly precision test and adjustment of all aerospace products.

This invention relates to a lightweight, miniaturized 3S configuration triaxial integrated fiber-MEMS inertial measurement unit, belonging to the field of measurement devices. It includes a base cover, a power supply and detection board assembly located on the top of the base cover, a light source assembly located above the power supply and detection board assembly, a MEMS assembly mounted above the light source assembly, a base fixed to the base cover, fiber optic ring assemblies fixed to the base, and a reference mirror fixed to the top of the base. The power supply and detection board assembly, the light source assembly, and the MEMS assembly are all arranged inside the base. The three fiber optic ring assemblies are evenly distributed on a conical surface with an outer half-cone angle of 54.74° and a bottom projection of 120°. The light source assembly shares a light source with the three fiber optic ring assemblies via a 1*3 coupler. This invention eliminates the unnecessary space occupied by the traditional three independent light source configuration, reduces the overall volume, and improves optical path consistency and system stability. It can meet the engineering requirements of commercial satellite platforms for the miniaturization and mass production of inertial measurement components.