The invention belongs to the related technical field of
laser micro-
nano machining, and particularly relates to a 2.5 D micro-pattern
laser machining method based on an acousto-optic deflector and a
galvanometer, which is realized by adopting a
laser device based on combination of an acousto-optic deflection module and the
galvanometer, and comprises the following steps: in single track scanning of the
galvanometer, according to a preset pulse
machining sequence corresponding to a machined pattern, carrying out
laser processing on the machined pattern according to a preset
pulse processing sequence corresponding to the machined pattern; frequency control signals corresponding to the pulses are input into the two acousto-optic deflectors respectively, so that laser pulse distribution formed on the machined part after single-time track scanning of the galvanometer is shown as the pulse superposition number in the
depth direction and the
lap joint rate between adjacent pulses in the normal direction of the advancing direction of the galvanometer; the pulse superposition number of each pulse position in the
depth direction reflects the
processing depth of the pulse position, and the
pulse number and the pulse overlap rate of each positioning position in the normal direction of the moving direction of the galvanometer are determined according to the section width and the contour
radian in the width direction of a
processing graph. According to the invention, the
processing of any 2.5 D micro-pattern can be realized.