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297 results about "Focal position" patented technology

Laser positioning method for improving gem cutting precision

The invention provides a laser positioning method for improving gemstone cutting precision, and belongs to the technical field of gemstone cutting laser positioning. A gemstone crystal refractive index tensor model and a ray tracing algorithm are established to simulate a propagation path of light in a gemstone; a thermo-optic effect prediction model is adopted to predict a focus drift distance according to temperature distribution and laser power data and calculate wavefront predistortion phase distribution for compensation, and a zero-vibration input shaping filter is designed for a galvanometer scanning system to suppress residual vibration. A composite control strategy that feedforward control compensates inertia lag and feedback control corrects position errors is adopted to drive a galvanometer, the inherent frequency of a system is recognized through spectral analysis, and the scanning frequency is adjusted to avoid resonance. The technical problem that in the long-time machining process, due to the thermo-optic effect and vibration of a galvanometer scanning system, the laser focus point position generates accumulated drifting, and the cutting precision is reduced is solved.
Owner:SCHOOL OF JEWELRY WEST YUNNAN UNIV OF APPLIED TECH

Focusing calibration algorithm and system for assembling camera lens by Monte Carlo tree search

The invention relates to the technical field of computer vision, and discloses a Monte Carlo tree search-based camera lens assembly focusing calibration algorithm and system, and the algorithm comprises the steps: constructing a three-dimensional search space comprising a focus position, a horizontal inclination angle and a vertical inclination angle, and combining a high-contrast cross wire test pattern to generate a local definition matrix; calculating an initial inclination angle based on the matrix to construct a root node of the Monte Carlo tree; according to the algorithm, an optimal search path is dynamically selected by applying an upper confidence bound strategy, child nodes are expanded in a three-dimensional space, physical adjustment is executed, and optimal three-dimensional configuration parameters are finally determined based on node scores through back propagation iterative optimization. The method breaks through a traditional one-dimensional search framework, effectively avoids a pseudo peak trap caused by inclination of a lens-sensor axis, improves the calibration precision and efficiency of the full-view-field definition of the camera, and achieves the precise positioning of a global optimal solution under a complex assembly tolerance.
Owner:JILIN YUNTOU LAISENGOU DIGITAL TECH CO LTD

Automatic focusing method and system of cell slide scanner

The invention discloses an automatic focusing method and system of a cell slide scanner, and relates to the related field of optical equipment focusing technology.The method comprises the steps that a slide is previewed and scanned, a multi-mode preview image and physical height sensing data are synchronously collected and preprocessed, and then the pre-processed image is obtained; the multi-modal preview image and the corresponding height data are input into a pre-training focus prediction model, a focusing strategy graph aligned with a slide coordinate space is output, and the graph comprises the predicted optimal focus offset, the focusing function recommendation identifier, the focus verification confidence coefficient and the search radius of each view point; according to the focusing strategy graph, a final focus is determined through feedforward positioning, limited verification and conditional adjustment, a scanner objective table is controlled to carry out formal scanning at the final focus position, and a complete scanning image of the cell slide is collected. The problems that a traditional focusing method is long in time consumption and poor in adaptability to complex samples with low contrast, high background fluorescence and scratch pollution are solved, and the adaptive capacity of the focusing process is improved.
Owner:JIANGSU MICROCONTROL BIOTECHNOLOGY CO LTD

Pattern inspection apparatus

According to one aspect of the present invention, a pattern inspection apparatus includes: an imaging sensor including a plurality of first detection elements that detect light flux transmitted through or reflected by a target object illuminated with inspection Light and capture a pattern image of the target object, and a plurality of second detection elements that are arranged adjacent to the plurality of first detection elements, detect Light fluxes obtained by shifting a focus position of the light flux front side and rear side, and capture images for focus adjustment; an adjustment mechanism configured to adjust a focal position of the light flux by using the images for the focus adjustment captured by the plurality of second detection elements; and a comparison circuit configured to compare the pattern image captured by the plurality of first detection elements and a predetermined reference image.
Owner:NUFLARE TECH INC

SLM quality improvement method and system based on dynamic focusing and light spot tracking

The invention belongs to the technical field of additive manufacturing, and provides an SLM quality improving method and system based on dynamic focusing and light spot tracking. Comprising three core processes of real-time measurement, compensation calculation and dynamic focusing scanning, wherein height information of an actual working surface on a current scanning path relative to an ideal focal plane is measured in real time; the central processing and control unit calculates the real-time compensation amount of the laser focus; the three-dimensional dynamic focusing device adjusts the laser Z-axis focus position and is matched with the two-dimensional galvanometer to realize that a light spot is always focused on an actual working surface; according to the invention, the three-dimensional dynamic focusing device works cooperatively with the central processing and control unit and the distance measuring device to form a shape follow-up processing mechanism; a closed-loop control system effectively reduces forming defects through a ranging-control-focusing circulation mechanism; the adaptive adjustment capability of the system broadens the application boundary of the SLM technology.
Owner:XIAN AEROSPACE MECHATRONICS & INTELLIGENT MANUFACTURING CO LTD

X-ray imaging apparatus and X-ray tube

The present invention provides an X-ray imaging apparatus and X-ray tube that can reduce artifacts caused by a limited number of imaging angles while suppressing the increase in imaging time required to acquire projected image data. [Solution] This X-ray imaging apparatus 100 comprises an X-ray tube 1 including a first electron irradiation unit 10a and a second electron irradiation unit 10b, a detector 2, a subject placement unit 3, a rotation mechanism 4, and a control unit 21. The control unit 21 performs the following controls: for each of the multiple imaging angles 6, it controls the simultaneous irradiation of electrons from the first electron irradiation unit 10a and the second electron irradiation unit 10b; and it controls the first relative focal position 7a of the first electron irradiation unit 10a at the first imaging angle 6a, the second relative focal position 7b of the second electron irradiation unit 10b at the first imaging angle 6a, the third relative focal position 7d of the first electron irradiation unit 10a at the second imaging angle 6b, and the fourth relative focal position 7e of the second electron irradiation unit 10b at the second imaging angle 6b, so as not to overlap with each other.
Owner:SHIMADZU SEISAKUSHO LTD

Multi-focus off-axis super lens of visible light wave band

The invention belongs to the technical field of micro-nano optics. The invention provides a multi-focus off-axis super lens of a visible light wave band. The multi-focus off-axis super lens comprises a plurality of groups of off-axis single-focus sub super lens assemblies which are circularly arranged, wherein each group of off-axis single-focus sub super lens assemblies comprises a plurality of off-axis single-focus sub super lenses which are concentrically and annularly distributed; wherein the off-axis single-focus sub-super-lens comprises a micro-structure unit and a substrate unit, the micro-structure unit comprises a plurality of micro-structure columns which are uniformly arranged, and one end of each micro-structure column is arranged on the substrate unit. According to the embodiment of the invention, on the basis of a geometric phase modulation principle, through reasonable phase design and microstructure arrangement, the off-axis single-focus sub-super-lens has a designed focus position; through spatial multiplexing of the micro-structures of the multiple off-axis single-focus sub-super-lenses, one super-lens has the phase characteristics of the multiple off-axis single-focus sub-super-lenses, and the functions of the multiple off-axis single-focus sub-super-lenses are achieved on one super-lens.
Owner:LUOYANG INST OF ELECTRO OPTICAL EQUIP OF AVIC

Photodetection device

Provided is an EVS to which an image plane phase difference method AF function can be easily applied.A photodetection device includes: a first pixel configured to photoelectrically convert incident light from a portion on one side to generate a first current; a second pixel configured to photoelectrically convert the incident light from a portion on a side opposite to the portion of the first pixel to generate a second current; a first luminance circuit provided individually corresponding to the first pixel and configured to generate a first luminance signal according to the first current; a second luminance circuit provided individually corresponding to the second pixel and configured to generate a second luminance signal according to the second current; a first current comparison circuit provided individually corresponding to the first pixel, and configured to compare the first luminance signal with a reference signal and convert the first luminance signal into a first digital signal; a second current comparison circuit provided individually corresponding to the second pixel, and configured to compare the second luminance signal with the reference signal and convert the second luminance signal into a second digital signal; and a control unit configured to adjust a focal position of the incident light on the basis of the first digital signal and the second digital signal.
Owner:SONY SEMICON SOLUTIONS CORP

Welding machining method for drawer sliding rail

The invention discloses a welding machining method for a drawer sliding rail, and belongs to the technical field of welding machining. S1, a middle rail workpiece is conveyed to a welding platform; s2, the clamp is controlled, so that the separation blade workpiece is attached to the welding position of the middle rail workpiece; s3, the compressed to-be-welded area is scanned through a visual sensor, and detection data of the gap and the surface state are obtained; s4, based on the detection data, the output power, the welding speed and the focus position parameters of a laser welding head are set; and S5, according to the set parameters, the laser welding head is controlled to weld the joint part of the separation blade workpiece and the middle rail workpiece, the visual sensor is used for detecting the assembly gap and the surface state in real time, and it is guaranteed that the weld penetration depth is consistent, and connection is firm; and secondly, a low heat input process is combined, so that the welding thermal deformation is greatly inhibited, the flatness of the separation blade and the middle rail is effectively maintained, and the welding precision, the structural strength and the sliding smoothness of the sliding rail are remarkably improved.
Owner:JIEYANG JINRUNDA IND CO LTD +1

Real-time focusing compensation method and system for femtosecond laser curved surface machining

The invention discloses a real-time focusing compensation method and system for femtosecond laser curved surface machining, and particularly relates to the technical field of light beam focusing control in femtosecond laser precision machining. The method is used for solving the technical problem of focus space-time deviation during high-speed curved surface machining caused by mismatching of dynamic response characteristics of an existing galvanometer and a dynamic focusing system. Pre-judging a response asynchronous risk by acquiring system response parameters and combining geometric and dynamic characteristics of a processing track, and identifying a dominant lag type; determining an error contribution distribution relation between the two systems according to the lag type; resolving to obtain a space trajectory error component which should be borne by the dynamic focusing system; and finally, controlling the laser to delay light emission according to the component until the dynamic focusing system is adjusted in place. Accurate diagnosis and quantitative compensation of a focus lag root are realized, and the focus position precision and the process reliability of femtosecond laser processing of a complex curved surface are effectively improved.
Owner:LUOYANG INST OF SCI & TECH +1

Measurement apparatus and measurement method

A measurement apparatus includes a laser apparatus, a branching part that splits a laser beam into reference light and measurement light, a condensing part that condenses the measurement light onto an object to be measured, a control part that adjust a focal position where the condensing part condenses the measurement light, and a distance calculation part that calculates distance to the object to be measured on the basis of an optical path difference between the reference light and the measurement light, wherein the condensing part includes a first lens and a correspondence calculation part that calculates a correspondence between a focal position of the condensing part and a position of the first lens on the basis of a position of the first lens and a distance to the object to be measured.
Owner:MITUTOYO CORP

Pattern inspection apparatus, focus position adjustment method, and pattern inspection method

The pattern inspection device according to one embodiment of the present invention is characterized by comprising: a related data creation circuit, in a state in which an evaluation substrate on which an evaluation pattern is formed is placed on a table, an autofocus signal serving as a parameter for autofocus control for each height position and a focus evaluation value for evaluating the focus position are acquired while changing the height position of a pattern formation surface of the evaluation substrate. Making related data of the automatic focusing signal and the focusing evaluation value; the automatic focus signal calculation circuit for inspection uses an automatic focus signal and a focus evaluation value for each height position, which are acquired while changing the height position of a pattern forming surface of a substrate to be inspected in a state where the substrate to be inspected on which a graphic pattern is formed is placed on a table, and related data of an evaluation substrate. Calculating an auto-focus signal for inspection that obtains a focus evaluation value greater than or equal to a threshold value on the substrate to be inspected; and an autofocus mechanism for adjusting the height position of the pattern forming surface of the substrate to be inspected to the height position of the pattern forming surface corresponding to the value of the autofocus signal for inspection.
Owner:NUFLARE TECH INC

Ophthalmic device and ophthalmic device control program

PendingJP2026044432AOthalmoscopesOphthalmological deviceOphthalmology department
An ophthalmic device and an ophthalmic device control program are provided that are capable of appropriately acquiring three-dimensional information about the anterior segment of the eye while stabilizing the fixation of the subject's eye. [Solution] The fixation target presenting optical system presents a fixation target to the subject's eye. The cross-sectional imaging optical system captures cross-sectional images of the anterior segment by receiving return light from the anterior segment that has been optically sectioned by the imaging light. The moving unit moves an optical unit including the fixation target presenting optical system and the cross-sectional imaging optical system relative to the subject's eye. The control unit can perform a three-dimensional information acquisition process to acquire three-dimensional information about the anterior segment by capturing cross-sectional images of multiple locations on the anterior segment while moving the optical unit and scanning the imaging light. When performing the three-dimensional information acquisition process, the control unit positions the fixation target within a limited area centered on the focal position of the entire lens system of the fixation target presenting optical system, regardless of the refractive power of the subject's eye.
Owner:NIDEK CO LTD

Methods and systems for generating depth profiles with improved optical resolution

Provided herein are methods, devices, and systems that may improve optical resolution when imaging through a thickness of samples. A method for generating a depth profile of a tissue of a subject may comprise using an optical probe to transmit an excitation light beam from a light source towards a surface of the tissue; using one or more focusing units in the optical probe to simultaneously adjust a depth and a position of a focal point of the excitation light beam along a scanning path; detecting at least a subset of the signals generated upon contacting the tissue with the excitation light beam; and using one or more computer processors programmed to process the at least the subset of the signals to generate the depth profile of the tissue.
Owner:ENSPECTRA HEALTH INC

Six-clawed crawling robot laser cleaning device and method thereof

The application provides a six-claw crawling robot laser cleaning device and a method thereof, which comprises a robot main body, a cleaning device, a light path adjusting device and a control system; the robot main body comprises three layers of substrates; the cleaning device comprises a first laser device and a second laser device; the first laser device and the second laser device are installed at the same end of the third layer of substrates; the second laser device is made to rotate in all directions through a holder device; the light path adjusting device can change the focal point position of the first laser beam; the control system is used for the first laser device and the second laser device to emit laser to clean stains and control the light path adjusting device to change the focal point position of the first laser beam. The device increases the stability of the robot on the curved surface by arranging the suction cup; meanwhile, the device realizes the dead angle-free cleaning of the curved surface under the joint action of the two laser cleaning devices, the two laser cleaning devices work at the same time, and the working efficiency is improved.
Owner:JIANGSU UNIV

Metasurface structure and refractive index detector

This invention discloses a metasurface structure and a refractive index detector. The metasurface structure is simple, consisting only of a substrate and an array of nanopillars disposed on the first surface of the substrate. By defining the orientation angle of each nanopillar in the array, the metasurface structure can obtain spatial refractive index information by reading the focal position information on the focal plane, which is then used for refractive index detection. The metasurface structure of this invention has a size of only tens of micrometers, a flexible detection range, and its results can be clearly presented on the focal plane without requiring complex spectral analysis and calculation modules. This invention has significant implications for the miniaturization of refractive index detectors.
Owner:SUZHOU SUNA OPTOELECTRONICS CO LTD

Welding machine and welding method

One embodiment of the fusion splicer (1) is a fusion splicer (1) for splicing optical fibers (F). The fusion splicer (1) includes: a light source (19) for illuminating the optical fiber (F); a camera (18) for receiving light emitted from the light source (19) and passing through the end face (E) of the optical fiber (F) to capture an image of the end face (E); and a fiber core detection unit (32) for detecting the fiber core (F31) of the optical fiber (F) from the image of the end face (E) captured by the camera (18). The camera (18) captures an image of the end face (E) with the focal position of the camera (18) set to the inner portion of the end face (E) of the optical fiber (F).
Owner:SUMITOMO ELECTRIC INDUSTRIES LTD

A test system

ActiveCN117667649BInfraredCapacitance
This application provides a testing system comprising: a first slide rail, a second slide rail, a third slide rail, a fourth slide rail, a capacitive pen control slide rail, a capacitive pen, a first infrared rangefinder, a second infrared rangefinder, a pressure sensor, and a controller. The first, second, third, and fourth slide rails are disposed around the periphery of the screen. The capacitive pen control slide rail is perpendicularly connected to the first and second slide rails. The controller controls the movement of the first and second infrared rangefinders. The controller obtains the focal position based on the intersection of the infrared rays emitted by the first and second infrared rangefinders and controls the movement of the capacitive pen control slide rail and the capacitive pen on the slide rail, so that the pen tip performs a click operation at the focal position according to the set click conditions, thus completing the test. This application embodiment can reduce testing costs.
Owner:SHANGHAI PATEO ELECTRONIC EQUIPMENT MANUFACTURING CO LTD

Artificial acoustic lens transducer for ultrasonic physiotherapy and method for regulating focal depth

The application provides an artificial sound structure lens ultrasonic physiotherapy transducer, an ultrasonic output end of the transducer (2) is fixed at a positioning groove at a bottom end of an artificial sound structure lens, and the ultrasonic output end is closely combined with the artificial sound structure lens; a ring-shaped groove is distributed at an output end of the artificial sound structure lens; epoxy resin (4) is filled in the ring-shaped groove, and the filling height of the epoxy resin is different between different regions of the filling area; the artificial sound structure lens takes the epoxy resin filled in the ring-shaped groove as a phase adjusting medium, adjusts the phase delay of ultrasonic waves by changing the filling height proportion of the phase adjusting medium in the ring-shaped groove, and changes the focal point position of the artificial sound structure lens; and the application can solve the problems of insufficient sound energy of the ultrasonic physiotherapy focal point position, the shallow ultrasonic physiotherapy focal point position, the relatively fixed focal point position of the ultrasonic physiotherapy transducer, and the heating of the contact surface after long-time use.
Owner:FUZHOU UNIV

System and method for autofocus and automated cell counting using artificial intelligence

We provide a system and method for autofocus and automated cell counting. [Solution] A system and method for autofocus using artificial intelligence includes (i) capturing multiple monochrome images over a nominal focal range, (ii) identifying one or more connected components within each monochrome image, (iii) sorting the identified connected components based on the number of pixels associated with each connected component, (iv) generating focus quality estimates for at least some of the sorted connected components using a machine learning module, and (iv) calculating a target focal position based on the focus quality estimates of the evaluated connected components. The target focal position can be used to perform cell counting using artificial intelligence, for example, by (i) generating seed likelihood images and whole cell likelihood images based on the output of a convolutional neural network, and (ii) generating a mask indicating the quantity and / or pixel location of objects based on the seed likelihood image.
Owner:LIFE TECHNOLOGIES CORP +1

A laser cutting device for metal product manufacturing

This invention discloses a laser cutting device for metal product manufacturing, comprising a multi-parameter sensing unit, a state estimation unit, a low-order physical model unit, a proxy prediction unit, an optimization control unit, and an execution and feedback unit. The optimization control unit adopts a hybrid control architecture that combines model predictive control with a long-term optimization module based on policy learning to achieve real-time coupled adjustment of multiple parameters such as laser power, cutting speed, auxiliary gas pressure, and focal position. Through deep integration of algorithms and parameters, this device achieves intelligent, precise, and stable control of the laser cutting process, and is suitable for automated processing and production of high-precision metal products.
Owner:SUZHOU FORMEN MASCH TECH CO LTD

Fresnel lens verification method and Fresnel lens

The invention discloses a Fresnel lens calibration method and a Fresnel lens, particularly relates to the technical field of industrial visual inspection, and is used for solving the problem that an existing focal length calibration method based on machine vision is easily interfered by inherent annular textures of the Fresnel lens, so that the measurement accuracy and reliability are insufficient. A focusing light spot image sequence is collected by moving an image sensor along an optical axis, then a radial intensity distribution gradient feature evaluation value and an annular texture edge gradient saliency evaluation value of each image are calculated, and a candidate focus area is identified by analyzing the correlation of the two evaluation value sequences; then, the convergence of the position change trajectory of the preset feature points is analyzed in the candidate region to determine an optimized candidate region, the symmetry of the evolution trajectory of the morphological descriptor is further analyzed to accurately position and optimize the focus position, and finally the focal length is calculated; the interference of annular textures can be effectively suppressed, and the precision and robustness of focal length verification of an industrial vision system on an automatic production line are improved.
Owner:JI SHANGTAI (SHENZHEN) TECH CO LTD

Charged particle beam lithography method, charged particle beam lithography apparatus, and program

A method is provided that can correct the focal position even when the height position distribution has changed due to irreversible deformation of a sample caused by irradiation with a charged particle beam. [Configuration] A charged particle beam writing method according to one aspect of the present invention is characterized by comprising the steps of: determining a height change distribution, which defines the height change from the height position of the sample before irradiation caused by irreversible deformation of the sample at each position on the sample at the time of irradiating the sample with a charged particle beam, the sample being irreversibly deformed depending on the irradiation dose distribution of the charged particle beam; correcting the focal position of the charged particle beam when irradiating the sample with the charged particle beam based on the height change distribution; and writing a pattern on the sample with the charged particle beam having the corrected focal position.
Owner:NUFLARE TECH INC

Focus control method for spectroscopic measuring apparatus, inspection method for semiconductor device, and spectroscopic measuring apparatus for performing the same

In a focus control method of a spectroscopic measuring apparatus, the spectroscopic measuring apparatus having a first objective lens and a second objective lens equipped with a microsphere is provided. A sample is placed on a stage. A spectrum is obtained while moving the second objective lens vertically downward. A light intensity function that changes with a distance from a sample surface is obtained from the spectrum. A focal position of the second objective lens is determined from a threshold value of the light intensity function.
Owner:SAMSUNG ELECTRONICS CO LTD

Automatic focusing method based on double-frame image and focus fusion depth coding

The invention relates to an automatic focusing method based on double-frame image and focus fusion depth coding. The automatic focusing method comprises the following steps: acquiring a first original image, a second original image, a first focus position scalar and a second focus position scalar; based on a focus perception and feature alignment module, obtaining a first cross-frame fusion feature according to the first grayscale image, the first focus position scalar, the second grayscale image and the second focus position scalar, and obtaining a second cross-frame fusion feature with a reduced size and a regular channel according to the first cross-frame fusion feature; performing focus feature extraction processing on the second cross-frame fusion feature through T focus feature extraction modules in sequence, and finally outputting a Tth focus prediction feature; and performing focus regression by using the Tth focus prediction feature to determine a final focus position. According to the automatic focusing method provided by the invention, the focus position information is coded and deeply fused with the visual features of the image, so that the optimal focus position can be quickly, accurately and flexibly predicted.
Owner:XIDIAN UNIV

Method, system and computer program product for producing a subsurface laser engraving

A method, and related system and computer program product are provided for producing a subsurface laser engraving (SSLE). The method involves, using at least one processor, generating a three-dimensional (3D) model for the object based on a two-dimensional (2D) digital image file of the object, by applying a trained machine learning (ML) model to the 2D digital image file, generating a point cloud model for the object based at least on the 3D model for the object, and controlling a focal position and a focal depth of a laser, based at least on the point cloud model for the object, while the laser performs subsurface engraving of a transparent material block to produce the SSLE depicting the object.
Owner:CRYSTALLIZE IT INC

Image capturing apparatus capable of manual focusing, control method therefor, and storage medium storing control program therefor

An image capturing apparatus that enables stable exposure follow-up while obtaining an appropriate image capturing effect without unnatural blur variation when an object to be focused is switched by manual focusing. The image capturing apparatus includes an image capturing system to capture an image, a focusing mechanism to adjust the focal position in capturing an image, a memory device that stores instructions, and a processor that executes the instructions to detect objects from the image, calculate depths of field within which the objects falls, respectively, perform control based on a program diagram relating to exposure in capturing an image, and change the program diagram in a case where the focal position is adjusted by manual focusing and it is determined that the objects respectively falling within the depths of field calculated satisfy a predetermined condition.
Owner:CANON KK

Signal lamp and light control system

The embodiment of the invention discloses a signal lamp and a light control system. The signal lamp comprises a bowl-shaped reflecting cover, the bowl-shaped reflecting cover comprises n reflecting areas, and the focal positions of the reflecting areas are not overlapped; the n light sources are arranged at the focal positions of the light reflecting areas in a one-to-one correspondence manner; wherein n is an integer greater than or equal to 2. According to the embodiment of the invention, the bowl-shaped reflecting cover is divided into a plurality of reflecting areas with non-overlapped focuses, and the corresponding light sources are arranged at the focus positions of the reflecting areas in a matched manner, so that the problems of low optical efficiency and poor lighting uniformity caused by out-of-focus arrangement of the light sources of the existing multifunctional signal lamp are solved.
Owner:STARRY SKY PLAN (SHANGHAI) AUTOMOBILE TECHNOLOGY CO LTD

All-focus image generation method, all-focus image generation device, and all-focus image generation program

A method (MT1) is provided with: an original image acquisition step (step ST1) for capturing an image of an object while shifting a focal position in a predetermined direction, and acquiring an original image for each focal position relating to the object; a frequency decomposition step (step ST2) for performing frequency decomposition on the original image of each focal position and generating an edge image of each frequency band; an all-focus edge image generation step (step ST3) in which the edge images for each frequency band are integrated in a prescribed direction and all-focus edge images for each frequency band are generated; and an all-focus image generation step (step ST4) for integrating the all-focus edge images of each frequency band and generating an all-focus image.
Owner:HAMAMATSU PHOTONICS KK

Pattern inspection device and pattern inspection method

The invention provides a pattern inspection device and a pattern inspection method, which can focus the focal point of the light beam of each detection optical system on each imaging sensor even when a plurality of inspection images are simultaneously captured by different imaging sensors. A pattern inspection device according to one embodiment of the present invention is provided with: a first detection means for detecting a change in a first positional relationship between a focal position of a first light beam and a first sensor; a second detection mechanism that detects a change in a second positional relationship between the focal position of the second light beam and the second sensor; a third detection mechanism that detects a change in a third positional relationship between the focal position of the separated third light beam and the focal position on the substrate side of the common detection optical system; the control circuit controls at least two of the first adjusting mechanism, the second adjusting mechanism and the third adjusting mechanism so as to adjust at least two of the first position relation, the second position relation and the third position relation.
Owner:NUFLARE TECH INC