688 results about "Electron microscope" patented technology

The invention discloses a method and device for identifying organic matter pores in a shale electron microscope scanning image, and the method comprises the steps: obtaining a shale scanning electron microscope original image, carrying out the manual marking, and generating an original image and mask image data set; performing synchronous data enhancement on the data set and dividing a training set and a verification set; constructing an improved U-Net model containing a multi-scale feature fusion input module, a residual attention module and a wavelet domain feature enhancement center module; training the model by adopting a dynamic mixed loss function and an AdamW optimizer; and verifying the model through an average intersection-to-union ratio, a pore Dice coefficient and a pore error, and identifying the pores of the image to be processed after reaching the standard. The device correspondingly comprises an image acquisition annotation module, a data preprocessing module, a model construction module, a training module, a verification module and a pore recognition module. According to the method, full-automatic identification is realized, the multi-scale pore segmentation precision and the low-porosity sample adaptability are improved, and the efficient characterization requirement of the shale gas reservoir is met.

The invention discloses an integrated circuit equipment data optimization monitoring system and method based on big data, and relates to the technical field of integrated circuit manufacturing. The method is used for solving the problems of insufficient multi-physical field monitoring, difficulty in abnormal traceability and lack of closed-loop control in plasma etching. A plasma sheath thickness inversion model and an etching selection ratio model are constructed by collecting radio frequency reflection phase, mass spectrum ion strength and wafer temperature data, and process parameter-plasma state dynamic coupling is established. Interference image distortion features and electron microscope size data are fused, micro-groove geometric parameters are analyzed, morphology instability risk indexes are generated, and nanoscale early warning is achieved. And designing a dual-channel fusion network, embedding a physical constraint attention mechanism, and generating an etching rate optimization instruction. On the basis of incremental learning, model parameters are updated online, a'monitoring-decision-feedback 'closed-loop system is formed, anomaly detection sensitivity and decision reliability are improved, and technical support is provided for intelligence of integrated circuit equipment.

The invention relates to the technical field of electron microscope sample pretreatment, and discloses a critical point drying control method and device based on online near-infrared monitoring, and the method comprises the steps: obtaining infrared spectrum data, and unmixing the spectrum data to obtain a feature data set of a solvent; outputting a to-be-corrected signal according to the feature data set, correcting the to-be-corrected signal with preset data, and determining a signal feature of the solvent; carrying out dynamic correction on the signal characteristics and a preset characteristic matrix, outputting concentration time sequence data of the solvent, carrying out steady state judgment by combining a preset convergence threshold value, and determining a critical state of the solvent; acquiring control strategy data according to the critical state, analyzing the control strategy data into execution response characteristics, performing multi-channel mapping and correction processing, and outputting a process control signal; and performing control gain correction on the process control signal to finish closed-loop feedback control of the final drying process. The method is based on multi-solvent spectrum sensing and concentration dynamic analysis, and self-adaptive closed-loop control of the critical point drying process is achieved.

The invention discloses a machine vision-based automatic identification and calculation method for pore change of a rock section under an SEM (scanning electron microscope), and the method comprises the steps: obtaining original image data of the rock section through a scanning electron microscope, transmitting the original image data to a machine vision SEM pore intelligent quantification cloud platform, and dividing the original image data into a plurality of image sub-regions which are not overlapped with each other; calling a special threshold inversion model to analyze the gray information of each sub-region, and determining a dual-phase pore segmentation threshold; carrying out edge extraction on the sub-regions after threshold processing by adopting a pore edge gradient enhancement algorithm; performing topological structure analysis on the intermediate image data by using a biphase pore topological inversion model, constructing and optimizing a pore space topological network, and eliminating false pore structure data; and according to the optimized pore space topology network, integrating calculation results of all the sub-regions to obtain a pore change identification calculation result of the whole rock section. The method improves the pore identification precision and processing efficiency, and adapts to different types of rock samples.

The invention discloses chicken infectious anemia virus-like particles as well as a preparation method and application thereof. The invention discloses a virus-like particle vaccine for preventing chicken infectious anemia. The virus-like particle vaccine comprises VP1 and VP2 proteins of chicken infectious anemia viruses. Chicken infectious anemia VP1 and VP2 proteins are expressed by using a baculovirus expression system, immunoblotting shows that the two proteins are successfully expressed in sf9 cells, electron microscope observation finds that the expressed proteins can be autonomously assembled into complete chicken infectious anemia virus-like particles, and the chicken infectious anemia virus-like particles have a space structure similar to that of an original virus and can be used for preparing chicken infectious anemia virus-like particles. Meanwhile, the virus-like particles have the advantages of high titer, high safety, capability of stimulating humoral immunity and cellular immunity and the like. The preparation method disclosed by the invention is simple, can be used for preparing the antigen protein of the chicken infectious anemia virus on a large scale, is high in expression quantity and short in time consumption, greatly reduces the production cost, and is suitable for large-scale production.

The invention relates to the technical field of electron microscopic imaging, in particular to a correction method and device for geometric distortion in scanning electron microscope measurement, computer equipment, a storage medium and a computer program product. The method comprises the following steps: acquiring a scanning electron microscope image of a standard sample; calculating an orthogonal included angle parameter and a length-width ratio parameter of the scanning electron microscope image; iteratively adjusting the angle correction parameter and the gain correction parameter under a fixed scanning rotation angle until a preset local calibration constraint condition is met; verifying the orthogonal included angle parameter and the length-width ratio parameter under each scanning rotation angle; and when the orthogonality included angle parameter and the length-width ratio parameter do not meet a preset global stability constraint condition, adjusting a relative gain coefficient, and re-executing calibration verification under each scanning rotation angle until a full-angle correction requirement is met. By adopting the method, high precision and stability of imaging correction can be kept in a full-angle range.

The invention relates to a mechanical property simulation method for researching the service life of an aluminum alloy material for a reactor. The simulation method for the life period mechanical property of the aluminum alloy material comprises the following steps: S1, preparing initial, middle and last stage aluminum alloy samples according to a < 27 > Al-< 28 > Si transmutation path of the aluminum alloy material; s2, representing the sample by using a transmission electron microscope, obtaining precipitated particle parameters, calculating a volume fraction f, fitting f and operation time t, and constructing a precipitation evolution model f (t); s3, performing high-energy ion irradiation on the sample, and performing nanoindentation experiment and load-depth curve fitting to obtain nano hardness H; s4, based on the f (t), establishing a relation model of the nano hardness H and the irradiation damage D; and S5, calculating the change quantity of the nano hardness H, converting the change quantity into the change quantity of the yield strength, associating the irradiation damage D with the service time T, and establishing a life period yield strength prediction model. According to the method, the mechanical property of the aluminum alloy in the full service cycle of the research reactor can be accurately evaluated.

The invention relates to the technical field of material analysis, in particular to a light microscope-field emission electron microscope combined shale rock slice analysis and identification method, which comprises the following steps of: firstly, combining a brightness distribution condition represented by a bright field image of a shale rock slice and a birefringence deviation condition represented by a cross polarization image from an optical angle; determining a mineral discrimination index representing an atomic number agent; applying offsets of different sizes based on the distribution condition of mineral discrimination indexes and the surface fluctuation condition of shale rock slices, and determining a position offset vector by combining gray scale gradient distribution on the basis; and finally, determining the cross-scale positioning and more accurate electron microscope objective table coordinates corresponding to each pixel point in combination with a position offset vector in a pixel coordinate conversion process based on an image physical distance scale and rotation translation processing, so that the cross-scale positioning accuracy of the optical microscope and the field emission scanning electron microscope is higher. The reliability of analyzing and identifying the shale rock slice is obviously improved.

The invention discloses a method for preparing a section sample of a new energy automobile battery powder material, and relates to the technical field of battery material analysis, and the method comprises the following steps: uniformly mixing a battery powder material with a liquid conductive adhesive solution; pouring the mixture into a mold for curing, and demolding to obtain a conductive sample block with a regular shape; directly loading the conductive sample block in an ion beam cutting system for ion cutting to obtain a flat sample section; and surface metal spraying treatment is not needed, and electron microscope observation and analysis are directly carried out. According to the preparation method, the conductive adhesive solution is adopted for inlaying and is combined with mold forming, so that time-consuming mechanical grinding and polishing procedures in a traditional method are omitted, and the preparation period is greatly shortened; and meanwhile, an in-situ conductive network formed after the glue solution is cured is utilized to effectively inhibit the charge effect, so that direct observation without metal spraying is realized, sample preparation damage and plating interference are avoided, and the authenticity and accuracy of an analysis result are ensured. The method is simple and convenient to operate and good in repeatability.

The invention relates to the technical field of brain science image processing, and discloses a brain tissue neuronal morphology three-dimensional reconstruction and connection group analysis method and system, and the method comprises the steps: carrying out the feature point extraction and matching and optical flow registration of continuous ultrathin section electron microscope images, and obtaining three-dimensional image volume data; carrying out semantic segmentation on cell bodies, dendrites, axons and dendritic spines through a three-dimensional deep convolutional neural network, and driving secondary registration through confidence feedback; detecting synapses and classifying the synapses as excitatory or inhibitory types; executing topology perception skeletonized reconstruction and performing segmentation correction through topology anomaly feedback constraint; and constructing a synaptic connection matrix and executing graph theory analysis.

This invention provides a PAM staining method that enables staining suitable for magnified observation of various samples using a range of microscopes, from optical microscopes to electron microscopes. [Solution] A PAM staining method comprising the steps of: silvering a biological sample; coloring the biological sample; and fixing the color of the biological sample, wherein the biological sample is a biologically derived sample that has been oxidized; the silvering step involves immersing the biological sample in a methenamine silver aqueous solution at room temperature, raising the methenamine silver aqueous solution from room temperature to 62°C or higher and 68°C or lower, and carrying out the silvering reaction for 30 to 40 minutes from the start of the reaction at room temperature; the coloring step involves immersing the silvered biological sample in a 0.2% gold chloride aqueous solution at room temperature for 8 to 12 hours; and the fixing step involves immersing the sample in a hard film fixing solution containing 11% to 13% sodium thiosulfate and aluminum potassium sulfate dodecahydrate for 3 minutes or more at room temperature.

The invention relates to the technical field of scanning electron microscope image processing, and discloses a scanning electron microscope image restoration method based on a wavelet frequency domain adjustment diffusion model, and the method comprises the steps: constructing a two-stage degradation pipeline comprising random light path disturbance and fixed circuit collection limitation, and generating a specific domain training data set; extracting multi-scale high-frequency energy characteristic modulation noise distribution by using a frequency domain prior encoder, and training a wavelet frequency domain adjustment diffusion model; and inputting a target low-quality degraded image into the pre-training model, initializing a potential noisy state, then executing reverse denoising iteration, calculating wavelet domain consistency gradient correction noise prediction, and updating the potential noisy state until a restored image is generated. According to the method, data distribution mismatch is relieved through physical degradation modeling, high-frequency detail perception is enhanced by means of a frequency domain adjustment mechanism, the structural fidelity is improved through wavelet domain gradient guidance, and balance between scanning electron microscope image noise suppression and detail recovery is achieved.

In a method, for training an artificial neural network (ANN) to reduce noise and / or artefacts in an electron microscopy image, a plurality of training image pairs is generated. For each pair, an undistorted synthetic specimen image and a distorted image are created by simulating additional noise and / or artefact features. The ANN is trained, in which the distorted images are used as input and the corresponding undistorted images as output. An adversarial training strategy is used in which the ANN is trained, as a generator network, in conjunction with concomitantly training a further ANN, as a discriminator network, to differentiate output produced by the generator network from synthetic images in the training set. In training, parameters of the ANN and further ANN are optimized using a generator loss function and a discriminator loss function, in which a dependency exists between said loss functions to train the networks in an adversarial manner.

The invention relates to the technical field of wafer defect detection, and discloses a wafer defect detection method, a storage medium and electronic equipment.The wafer defect detection method comprises the steps that an electron microscope is controlled to conduct positioning scanning on a target lattice in a wafer according to optical coordinates of the target lattice, and an electron microscope image of the target lattice is obtained; and performing defect detection on the electron microscope image of the target lattice by using a pre-trained ViT model to generate a defect type of the target lattice. According to the wafer defect detection method, the electron microscope image of the target lattice in the wafer can be obtained by controlling the electron microscope to scan according to the optical coordinate of the target lattice, convenient control and acquisition of the high-resolution electron microscope image of the target lattice are realized, defect detection is performed on the electron microscope image of the target lattice by using the pre-trained ViT model, and the defect detection accuracy is improved. And fine defect classification of a target lattice can be realized.

To provide an aluminum alloy sheet excellent in rollability.SOLUTION: 0.05% by mass or more and 0.35% by mass or less of Si, 0.05% by mass or more and 0.50% by mass or less of Fe, 0.01% by mass or more and 0.35% by mass or less of Cu, 0.10% by mass or more and 0.80% by mass or less of Mn, 2.0% by mass or more and 6.0% by mass or less of Mg, 0.01% by mass or more and 0.15% by mass or less of Cr, and a balance of Al and inevitable impurities, in a cross section in a sheet thickness direction, a ratio of an area occupied by central grains is 1.15% or less, and in a sheet thickness Mg2Si region, a number-density ratio obtained by dividing a number-density of precipitates observed with a transmission-type electron microscope by a number-density in a reference aluminum alloy sheet, a Si-amount ratio obtained by dividing a Si content by a reference Si content, and a Mg-amount ratio obtained by dividing a Mg content by a reference Mg content satisfy the following formulas: Number density ratio ≥ 10.929 * Si amount ratio - 15.814 + 2.043 * (Mg amount ratio - 1) SELECTED DRAWING: Figure 5

The invention discloses a scanning electron microscope three-dimensional shape measurement method and a measurement system thereof, which are characterized in that the method adopts a directional focusing method to perform separated focusing and measurement on the top and the bottom of a target structure, and three-dimensional shape parameters of the target structure are obtained through a definition evaluation function; the system comprises a displacement sample stage system, an electron beam imaging system and an image processing algorithm, the electron beam imaging system is composed of an electron source, an electromagnetic lens, an electron detector and an imaging module, and the electron beam imaging system generates a focused electron beam and obtains a secondary electronic signal image; the image processing algorithm is integrated in an electron beam imaging module in the CD-SEM, and accurate positioning, feature recognition and precise measurement of a target structure are achieved. Compared with the prior art, the method has the advantages that directional focusing of the top or the bottom is achieved by analyzing the gradient distribution characteristics of the image profile curve, and the measurement problem of separating and quantifying key three-dimensional parameters such as the side wall angle, the bottom key size and the structure depth is effectively solved.

The invention provides an infrared detector readout circuit repairing method, and relates to the technical field of silicon readout circuit repairing, and the method comprises the steps: screening chips with abnormal electrical properties from processed circuit chips, and determining the relative coordinates of a problem line and a nearest bonding pad according to the fault type; under an FIB-SEM double-beam scanning electron microscope, the sample table is moved to reach the relative coordinates, and a reference pattern with the depth shallower than the thickness of the metal layer is formed through etching with the relative coordinates as the center; measuring a problem line operation point coordinate by taking the reference graphic feature point as a zero point; performing etching exposure on the coordinate area of the operation point by using an FIB-SEM double-beam scanning electron microscope; and carrying out line repairing operation. The problems that the reference point distance is long and the positioning deviation is large are effectively solved, and accurate positioning of a small-feature-size circuit needing to be operated in the infrared detector reading circuit repairing process is achieved.

The invention relates to a processing method of a transmission electron microscope test piece and the transmission electron microscope test piece, the transmission electron microscope test piece comprises a plurality of holes arranged at intervals, the inner wall of each hole is provided with a diffusion barrier layer comprising a multi-layer structure, and the processing method comprises the following steps: arranging a first protection layer on the surface of the diffusion barrier layer; a reserved area is divided in the hole, a first edge line and a second edge line which are oppositely arranged are divided in the reserved area, the reserved area comprises two arc-shaped sections located on the edge of the hole, and the first edge line and the second edge line are connected between the two arc-shaped sections; cutting the transmission electron microscope test piece from the outer side of the reserved area to the first edge line; cutting the transmission electron microscope test piece from the outer side of the reserved area to a second edge line; a remaining portion of the first protective layer is removed. Thus, the cross section of the hole can be exposed, layering of the diffusion barrier layer on the surface of the inner wall of the hole can be observed, the boundary between multiple layers is more obvious, the coating condition of the diffusion barrier layer can be checked more easily, and whether the coating missing phenomenon exists or not can be judged.

Provided herein is an electron particle system comprising an electron source system comprising a high voltage component housed within a high voltage component volume occupied by an insulation gas, a sample chamber, and an electron beam column. Also provided herein is a charged particle system comprising a charged source system comprising a high voltage component housed within a high voltage component volume occupied by an insulation gas, a sample chamber, and an electron beam column. Further provided herein is a method of using an insulation gas in a high voltage component of an electron particle system.

The invention discloses a preparation method of a hydrogen-responsive composite multilayer magnesium-based film surface self-wrinkle pattern. The preparation method comprises the following steps: A, preparing a polymer elastic layer on the surface of a supporting substrate; b, depositing a plurality of layers of metal-based films on the polymer elastic layer by adopting a magnetron sputtering method; and C, exposing the prepared sample in a hydrogen-containing atmosphere, and forming a wrinkle pattern of which the recognizable size is in a range of 10nm-1000mu m on the surface through hydrogenation reaction at normal temperature. According to the method, the surface of the thin film can be deformed by exposing the thin film to the hydrogen-containing atmosphere environment, so that the three-dimensional wrinkle texture can be quickly realized, and the three-dimensional wrinkle morphology can be accurately regulated and controlled by adjusting the element components, sputtering time, sputtering power, working gas flow and hydrogen treatment parameters of the magnesium or magnesium alloy hydrogen-sensitive reaction film layer. The pattern features of the prepared wrinkle pattern can be recognized through characterization means such as an optical microscope, a scanning electron microscope, an atomic force microscope or a diffraction light-variable device.

The utility model discloses an objective table of a scanning electron microscope, which comprises a base, a knob arranged on the side edge of the base, a transmission assembly arranged in the base, a rotating assembly connected with the transmission assembly, and a supporting assembly connected with the rotating assembly, the transmission assembly comprises a worm arranged in the knob and a worm gear connected to the worm; the rotating assembly comprises a threaded piece connected to the worm gear and a lead screw connected to the threaded piece. The supporting assembly comprises a supporting base connected to the top of the lead screw and a first platform arranged on the supporting base. According to the utility model, the worm and the worm gear are matched with each other to adjust the height of the sample, and the displacement of the sample in the horizontal direction is realized through the matching among the first slide rail, the first slide block, the second slide rail and the second slide block.

The invention discloses a material ion transmission mechanism research method based on an electronic holography and integral differential phase contrast technology. The method aims at solving the key problem that a traditional characterization means is difficult to directly associate material defects with a local electric field at the same time of an atomic scale. The method comprises the following steps: preparing a transmission electron microscope film sample containing a specific defect structure and applying a tiny bias voltage; obtaining two-dimensional potential and electric field distribution in the sample by using an off-axis electronic holographic technology; obtaining an atomic structure image capable of distinguishing light elements in the same region by using an integral differential phase contrast technology; and finally, carrying out accurate space alignment and correlation analysis on the information of the specific atom defect and the local electric field so as to directly reveal the coupling relationship between the specific atom defect and the local electric field and the influence mechanism of the specific atom defect on ion transmission. The method disclosed by the invention is particularly suitable for illuminating the ion transmission behavior at the shear surface in the Wadsleep-Roth phase niobium-based fast-charging negative electrode material, and has the beneficial effects of high mechanism analysis depth, strong technical complementarity, guiding significance to material design, good method universality and the like.

The disclosure provides a kind of recognition positioning method and system of colloidal gold particles in cryo-EM image, the scheme includes: obtaining the electron microscope image to be identified, and carries out corresponding pretreatment;Wavelet transform is handled to the image after pretreatment based on Atrous algorithm, obtains corresponding wavelet image;For the wavelet image obtained, in turn, binaryzation processing, noise point removal and clustering operation are carried out, obtain the corresponding several clusters of colloidal gold particles in binary image;From the several clusters, the cluster satisfying the preset constraint is screened out, and the average template is obtained based on the obtained cluster satisfying the preset constraint;Template matching is carried out using the average template and the several clusters respectively, and the cluster whose matching result is lower than the preset threshold is filtered out, and the remaining cluster is used as the candidate colloidal gold particle target;The position and size estimation of the candidate colloidal gold particle target obtained are obtained by corresponding the original image.

The invention relates to a method for rapidly preparing a cell scanning electron microscope sample through cell surface metal deposition. The method comprises immobilizing a cell sample with an immobilizing agent; incubating in a catalyst solution; placing in a metal deposition solution for cell metal deposition; the cell sample is obtained. The prepared cell sample can be directly used for scanning electron microscope imaging after being dried. According to the method, the micro-nano structure on the surface of the cell is directly mechanically enhanced in the solution through electroless metal deposition, the cell sample is endowed with electrical conductivity, additional chemical modification on the cell is not needed, gradient dehydration on the cell is not needed, and metal spraying treatment on the cell is not needed; and cell scanning electron microscope sample preparation and imaging can be conveniently and quickly carried out.

A coated member of the present invention includes a substrate and a hard coating film that is formed on the surface of the substrate and includes a nitride or carbonitride of a metal element. A content of Al is 65 atom % or more and 85 atom % or less, a content of Cr is 15 atom % or more and 35 atom % or less, and a total content of Al and Cr is 90 atom % or more and 100 atom % or less in a total amount of the metal element and metalloid element contained in the hard coating film, and in an intensity profile obtained from a selected area diffraction pattern of a transmission electron microscope, a crystal plane exhibiting a maximum peak intensity is different between a vicinity of the substrate and a vicinity of the surface, in the vicinity of the substrate, a peak corresponding to a (111) plane or a (200) plane of a face-centered cubic lattice structure exhibits a maximum intensity, and in the vicinity of the surface, a peak intensity corresponding to a (220) plane is 0.6 times or more a larger one of a peak intensity corresponding to the (200) plane and a peak intensity corresponding to the (111) plane of the face-centered cubic lattice structure.

The invention provides an electron microscope side insertion type sample rod table automatic sample injection method, and belongs to the technical field of transmission electron microscope automatic loading and intelligent control. Coaxially aligning the sample rod and the sample inlet, and sequentially executing primary propulsion, secondary propulsion and tertiary propulsion; when a preset primary limiting condition is met after primary propulsion is executed, detecting whether a vacuum state is met or not, and if yes, executing secondary propulsion; when a preset secondary limiting condition is met after the secondary propulsion is executed, judging whether the communication is stable or not; if the communication is stable, executing three times of propulsion; when a preset three-time limiting condition is met after three-time propulsion is executed, the sample injection is completed; according to the method, the sample injection process is decomposed into multi-stage propulsion, state judgment is carried out based on axial contact force, torque and preset target positions of all stages, and step-by-step sample injection control is achieved; and meanwhile, the connectivity of the transmission channel is evaluated by combining vacuum state monitoring, so that the sampling precision is dynamically adjusted, and the sampling efficiency is remarkably improved on the premise of ensuring reliability.

The invention provides an MEMS suspended heating bearing structure for characterization of a projection electron microscope (TEM) and a preparation method of the MEMS suspended heating bearing structure. An SOI silicon wafer comprises device layer silicon, a buried oxide layer and substrate layer silicon. A first silicon oxide layer is arranged on the surface of the device layer, and a heating electrode is arranged on the first silicon oxide layer; the surface of the substrate layer is provided with a second silicon dioxide layer used for back patterning and etching control. The device layer silicon is provided with a first cavity to form a suspended supporting structure, and comprises a central bearing region, a transmission window region and a plurality of supporting beams connected with the central bearing region; the substrate layer silicon is etched from the back surface to form a second cavity, and the second cavity covers the bearing area, the transmission window and the projection range of the supporting beam in the thickness direction. And the second cavity is communicated with the first cavity, so that a through type cavity heat insulation structure is formed. According to the invention, while the permeability of the electron beam transmission window is maintained, stable bearing and controllable heating of the to-be-tested sample are realized, and the requirements of structural reliability, low power consumption and electrical parasitic suppression are considered.

The invention provides an electron beam detection electron microscope, a related equipment module and an electron beam scanning imaging method. The related equipment module comprises electron beam detection control equipment and a detection execution module. In the electron beam detection electron microscope, the electron emission module emits electron beams to a sample to be detected, and the detector module comprises a transmission detection unit and a non-transmission detection unit. The non-transmission detection unit is arranged between the electron emission module and the bearing surface of the sample bearing platform, detects non-transmission signal electrons generated when the electron beam focuses and scans the sample to be detected, and outputs non-transmission detection signals. The transmission detection unit is arranged on one side of the back side surface of the sample bearing platform and is used for detecting and collecting signal electrons of a transmission diffraction image generated by focusing transmission scanning of the sample to be detected by an electron beam and outputting a four-dimensional transmission detection signal, and the electron beam detection control equipment forms a scanning image according to a non-transmission detection signal and the four-dimensional transmission detection signal; the detection efficiency of the material characterization of the to-be-detected sample is effectively improved.

An embodiment of the present disclosure provides a pulse electron microscope device including: a pulse generator configured to emit a laser pulse; a first beam splitter configured to split the laser pulse into a first laser pulse and a second laser pulse; a second beam splitter configured to split the second laser pulse and to reflect a second-1 laser pulse; an interval controller configured to control a time interval between the first laser pulse and the second-1 laser pulse by controlling an optical path length of the first laser pulse; a column part including a photocathode, the photocathode configured to convert the first laser pulse into a first electron pulse and convert the second-1 laser pulse into a second electron pulse; and an inspection module configured to inspect electrical defects in the sample by detecting a change in potential occurring on a surface of the sample.

The application discloses a method for precisely modulating microstructure of a silicon-rich silicon oxide film and a product prepared by the method. x The method comprises the following step S20: in-situ heating SiO x Film samples, and the electron beam generated by the transmission electron microscope is irradiated on the SiO x Film samples, so as to realize the thermal annealing treatment of the SiO x Film. The method promotes the process of decomposing the SiO x Film into nanometer silicon crystals and silicon dioxide by means of heating combined with electron beam irradiation, the processing area can be precisely controlled to the nanometer level, rapid thermal annealing is realized, and damage caused by the thermal annealing to the SiO