1606 results about "Electron microscope" patented technology

The invention provides a defect detection method and system for integrated circuit manufacturing. Wherein in the integrated circuit packaging stage, packaged chips are divided into a first type of chips meeting a preset physical characteristic threshold value and a second type of chips exceeding the physical characteristic threshold value through a pneumatic sorting device; performing scanning electron microscope imaging on the surface of the second type of chip, generating a three-dimensional topological structure by using an image reconstruction technology, and positioning a micron-sized particle defect area by comparing reference type differences; synchronously applying high-frequency electric signal excitation in the sorting process, detecting impedance response of the second type of chips, and recording an abnormal signal sequence exceeding a preset frequency domain range; performing space-time correlation matching on the micron-sized particle defect area and the abnormal signal sequence, and judging that the defect is a multi-layer composite defect when a preset coupling condition is met; and dynamically adjusting the mesh diameter and vibration frequency parameters of the pneumatic sorting device. According to the technical scheme provided by the invention, accurate identification of the multi-layer composite defect of the chip is realized, and the defect interception efficiency is remarkably improved.

The invention provides a preparation method of a transmission electron microscope ultrathin sample with a cross section of an electron beam sensitive material, which comprises the following steps: selecting a specific region as a to-be-extracted sample region for the electron beam sensitive material by adopting an electron beam imaging technology; depositing a protective layer on the surface of the to-be-extracted sample area by adopting an electron beam and / or an ion beam; bombarding a to-be-extracted sample area by utilizing a high-energy ion beam, extracting an electron beam sensitive material cross section sample from the to-be-extracted sample area, and fixing the extracted sample to a metal bracket; performing pre-thinning treatment on the extracted sample by using a focused ion beam to obtain a first thinned sample of which the thickness is reduced to be less than a first thickness; and transferring the first thinned sample into a micro-beam fixed-point ion thinning system, and carrying out multi-time stepped low-energy ion beam fine thinning treatment on the first thinned sample by using inert gas ion micro-beams to obtain a second thinned sample which is clean in surface and free of a surface ion damage layer and has the thickness reduced to be less than a second thickness, and taking the second thinned sample as a transmission electron microscope ultrathin sample.

The invention provides a pore-fracture-based shale reservoir classification evaluation method and system, and relates to the technical field of oil and gas geology, and the method comprises the steps: S1, scanning an electron microscope image of a shale reservoir to be classified and evaluated, and recognizing different types of reservoir spaces of the shale reservoir; s2, reservoir space parameters of the shale reservoir are extracted according to the recognition result of the reservoir space; s3, calculating evaluation parameters of the shale reservoir based on the reservoir space parameters and a pre-obtained view field area of the shale reservoir; s4, inputting the evaluation parameters and the pre-calculated weight value of each evaluation parameter into a pre-constructed classification evaluation model, and calculating to obtain an evaluation coefficient of the shale reservoir; and S5, based on the evaluation coefficient, performing classification evaluation on the shale reservoir. According to the method, quantitative evaluation can be carried out on the shale reservoir on the microcosmic aspect, and compared with a traditional shale reservoir evaluation method, the shale reservoir evaluation is more visual and accurate on the basis of the microcosmic characteristics of the pore fractures.

The invention provides a double-space fatigue electron microscope test system, which is applied to the technical field of material analysis, and comprises an electron microscope module, a fatigue loading module and a vacuum isolation damping module, the vacuum isolation damping module controls two spaces of the electron microscope module and the fatigue loading module to be communicated or independent; the fatigue loading module comprises a hydraulic loading actuator, an electromechanical loading actuator, a loading rod and a fixing clamp, the fixing clamp is used for clamping a to-be-tested sample, and the loading rod is used for stretching or extruding the to-be-tested sample; and the fatigue loading module is driven by the moving mechanism to reciprocate along the X axis to adjust the position of the to-be-tested sample or rotate along the X axis to realize switching of different stations. According to the double-space fatigue electron microscope test system, combined use or independent use of the electron microscope module and the fatigue loading module is realized, and adverse factors such as vibration and pulse generated by the fatigue loading module during electron microscope observation are improved; in-situ compensation is achieved by means of cooperation of loading force and displacement of the fatigue loading module, and the observation effect of the electron microscope is improved.

The invention relates to the technical field of transmission electron microscope in-situ experiments, in particular to a transmission electron microscope in-situ multi-field coupling experiment platform which comprises a sample rod, a carrying table, a thermoelectric chip, a magnetic field generating device and a flexible circuit board. A first mounting groove and a second mounting groove are formed in the carrying table; the thermoelectric chip is arranged in the first mounting groove, and a carrying part, an electrical control unit and a temperature control unit are arranged on the thermoelectric chip; the magnetic field generating device is arranged in the second mounting groove and can generate a controllable magnetic field on the carrying part; the carrying part is used for carrying a sample, the electrical control unit is configured to load and measure an electrical signal of the sample, the temperature control unit is configured to control and measure the temperature of the carrying part, and the transmission electron microscope in-situ multi-field coupling experiment platform provided by the invention realizes cooperative application and accurate control of an electric field, a magnetic field and a temperature field.

The invention discloses a method and device for identifying organic matter pores in a shale electron microscope scanning image, and the method comprises the steps: obtaining a shale scanning electron microscope original image, carrying out the manual marking, and generating an original image and mask image data set; performing synchronous data enhancement on the data set and dividing a training set and a verification set; constructing an improved U-Net model containing a multi-scale feature fusion input module, a residual attention module and a wavelet domain feature enhancement center module; training the model by adopting a dynamic mixed loss function and an AdamW optimizer; and verifying the model through an average intersection-to-union ratio, a pore Dice coefficient and a pore error, and identifying the pores of the image to be processed after reaching the standard. The device correspondingly comprises an image acquisition annotation module, a data preprocessing module, a model construction module, a training module, a verification module and a pore recognition module. According to the method, full-automatic identification is realized, the multi-scale pore segmentation precision and the low-porosity sample adaptability are improved, and the efficient characterization requirement of the shale gas reservoir is met.

The invention discloses an integrated circuit equipment data optimization monitoring system and method based on big data, and relates to the technical field of integrated circuit manufacturing. The method is used for solving the problems of insufficient multi-physical field monitoring, difficulty in abnormal traceability and lack of closed-loop control in plasma etching. A plasma sheath thickness inversion model and an etching selection ratio model are constructed by collecting radio frequency reflection phase, mass spectrum ion strength and wafer temperature data, and process parameter-plasma state dynamic coupling is established. Interference image distortion features and electron microscope size data are fused, micro-groove geometric parameters are analyzed, morphology instability risk indexes are generated, and nanoscale early warning is achieved. And designing a dual-channel fusion network, embedding a physical constraint attention mechanism, and generating an etching rate optimization instruction. On the basis of incremental learning, model parameters are updated online, a'monitoring-decision-feedback 'closed-loop system is formed, anomaly detection sensitivity and decision reliability are improved, and technical support is provided for intelligence of integrated circuit equipment.

The invention relates to the technical field of electron microscope sample pretreatment, and discloses a critical point drying control method and device based on online near-infrared monitoring, and the method comprises the steps: obtaining infrared spectrum data, and unmixing the spectrum data to obtain a feature data set of a solvent; outputting a to-be-corrected signal according to the feature data set, correcting the to-be-corrected signal with preset data, and determining a signal feature of the solvent; carrying out dynamic correction on the signal characteristics and a preset characteristic matrix, outputting concentration time sequence data of the solvent, carrying out steady state judgment by combining a preset convergence threshold value, and determining a critical state of the solvent; acquiring control strategy data according to the critical state, analyzing the control strategy data into execution response characteristics, performing multi-channel mapping and correction processing, and outputting a process control signal; and performing control gain correction on the process control signal to finish closed-loop feedback control of the final drying process. The method is based on multi-solvent spectrum sensing and concentration dynamic analysis, and self-adaptive closed-loop control of the critical point drying process is achieved.

The invention relates to the technical field of metal material sample preparation, in particular to a preparation method for extracting carbon replica of steel for a high-carbon wire rod. The method specifically comprises the following steps: S1, preparing a sample; s2, immersing the sample into a nitric acid alcohol solution; s3, placing the sample in a sample chamber of a high-vacuum coating instrument, evaporating a carbon film with the thickness of 10-20 nm on the surface of the sample, and taking out the sample after vacuum is relieved; s4, performing electrolytic film removal by adopting an electrolytic polishing corrosion instrument; s5, after the carbon film falls off, the nitric acid alcohol on the carbon film is cleaned until the absolute ethyl alcohol in the weighing bottle is colorless; s6, the carbon film is transferred into deionized water, after the carbon film is fully unfolded, the carbon film is fished up through a transmission electron microscope and a copper net and placed on filter paper, and the carbon film is tightly attached to the copper net; and S7, baking the carbon film sample adhered to the copper mesh for 30-60 seconds, and placing the dried sample under an electron microscope for observation to complete the preparation of the steel extraction carbon replica sample for the high-carbon wire rod. The method has the advantages of high demolding speed, complete and firm carbon film form, simple configuration and low cost.

Various implementations include a low temperature sample rod device for side entry electron microscopes. The device includes a conduction rod, a thermoelectric module, a coupler, and a thermal battery. The conduction rod has a first end configured to support a sample. The thermoelectric module has a first side thermally coupled to a second end of the conduction rod. The thermoelectric module is configured to transfer heat between the first side and a second side when supplied with electricity. The coupler has a first coupling surface thermally coupled to the second side of the thermoelectric module. The thermal battery has a battery coupling surface configured to be thermally coupled to a second coupling surface of the coupler. The thermal battery includes a material that can be melted from solid to liquid phase by heat transferred from the conduction rod, through the thermoelectric module, through the coupler, and into the thermal battery.

The invention discloses a preparation device of an electron microscope sheet sample, and belongs to the field of test and measurement. The cutting unit and the grinding unit are integrally arranged, and the feeding unit penetrates through the cutting unit and the grinding unit, so that feeding, cutting and grinding of samples can be sequentially completed by one set of device, the samples do not need to be transferred among different devices, and the sample processing quality is also improved while the sample processing efficiency is improved; in the whole set of preparation device, the working mode that the feeding unit and the grinding unit work simultaneously, the cutting unit and the receiving cavity discharge work simultaneously, and the feeding unit and the grinding unit as well as the cutting unit and the receiving cavity work alternately is achieved, and the adjacent units work alternately; according to the transmission electron microscope slice sample processing device, the preparation cohesion of feeding, cutting, grinding and discharging of a single sample is ensured, and synchronous operation of all unit components in the whole device is also ensured, so that continuous online production of transmission electron microscope slice samples can be realized, and the processing efficiency is favorably improved.

The invention discloses a machine vision-based automatic identification and calculation method for pore change of a rock section under an SEM (scanning electron microscope), and the method comprises the steps: obtaining original image data of the rock section through a scanning electron microscope, transmitting the original image data to a machine vision SEM pore intelligent quantification cloud platform, and dividing the original image data into a plurality of image sub-regions which are not overlapped with each other; calling a special threshold inversion model to analyze the gray information of each sub-region, and determining a dual-phase pore segmentation threshold; carrying out edge extraction on the sub-regions after threshold processing by adopting a pore edge gradient enhancement algorithm; performing topological structure analysis on the intermediate image data by using a biphase pore topological inversion model, constructing and optimizing a pore space topological network, and eliminating false pore structure data; and according to the optimized pore space topology network, integrating calculation results of all the sub-regions to obtain a pore change identification calculation result of the whole rock section. The method improves the pore identification precision and processing efficiency, and adapts to different types of rock samples.

The invention discloses a microscopic crack dynamic in-situ characterization method, and relates to the technical field of crack in-situ detection. According to the method, a plurality of hardened cement paste bodies are soaked in a sulfate solution, the porosity development trend of the hardened cement paste bodies is obtained through a nuclear magnetic resonance test and a mercury injection test in the soaking process, a test sample and a test sample are prepared after soaking is finished, and the crack propagation length of the test sample is measured through a scanning electron microscope. According to the distance gradient between the sampling angle of the test sample and the exposed surface, space coordinates of crack cracking are converted into a time process along the center axis of the test sample, a delay microscope is established on the microscale, and the test sample is scanned by using X-ray computed tomography equipment in a matched mode; a crack propagation animation image is formed based on a crack form between adjacent X-ray tomography slices, and a crack development process is obtained by continuously capturing high-resolution images, so that omission of time information is avoided, and in-situ detection of microscopic cracks in a hardened cement paste sample is realized.

The invention relates to an SEM (scanning electron microscope) and CT (computed tomography) compatible solid propellant mechanical property testing device and method, belongs to the technical field of precise scientific instruments and material micro-mechanical property testing, and solves the problems that in the prior art, due to the fact that imaging equipment is single, and image quality becomes poor due to creeping accumulation, micro-scale failure information of propellants is incomplete and inaccurate to obtain. In the mechanical property testing device, the in-situ mechanical testing device performs mechanical loading and load holding on the propellant sample, the SEM obtains the surface appearance of the propellant sample, the double-source double-probe industrial CT obtains the internal three-dimensional structure of the propellant sample, and the in-situ mechanical testing device is transmitted between the transfer cabin main cavity and the electron microscope cabin through the transfer channel. And the vacuum transfer cabin containing the in-situ mechanical testing device is transferred between the transfer channel and the scanning turntable of the double-source double-probe industrial CT by the mechanical arm. According to the invention, more comprehensive and accurate mesoscopic failure information of the propellant sample can be obtained while less time cost is paid.

The invention discloses a gold wire bonding abnormal point automatic identification system and method based on a neural network architecture, and relates to the technical field of image processing. A detection image of a product is obtained through shooting of an electron microscope and input into the backbone network, and features of different scales are extracted through multiple convolution and pooling operations; then, in a hybrid encoder, through a series of convolution and up-sampling operations, adjusting the size of the feature map to carry out feature fusion; and then, through down-sampling operation, splicing with the previously fused feature map, and carrying out feature fusion again. And finally, inputting the three feature maps with different scales into a decoder, and carrying out target detection, thereby completing automatic identification of the gold wire. The product image is processed through the improved RT-DETR model, and automatic gold wire identification and defect marking are realized, so that an operator can quickly position according to the defect marking and complete the gold wire refilling operation, and the production efficiency is improved.

Provided is an endoscopic surgery system with automatic hydraulic monitoring function, comprising a control system, a cart kit and an endoscope accessory. Then control system includes a processor, a touch display, a perfusion pump, a negative pressure pump, etc. The cart kit includes a cart, a perfusion tube and an extraction tube. The endoscope accessory includes a pressure measuring guide sheath, a hydraulic sensor and an electron microscope. When the endoscope is employed for observation, the invention can control the perfusion and monitoring of the liquid in endoscope instrument, as well as the cavity liquid pressure in organs, allowing for precise control of the intracavity pressure during operation. The real-time monitoring module measures the liquid pressure in the organ in real time and sends data to the control system, calculates a state of the intracavity pressure based on real-time data obtained from the hydraulic sensor using intelligent PID control.

The utility model provides a sample rod for detecting the quality of a prepared sample in an in-situ atmosphere and liquid atmosphere experiment, which comprises a sample rod head which is provided with a first chip groove, a second chip groove, a first tabletting assembly and a second tabletting assembly, the second chip groove is located in the first chip groove, the first tablet pressing assembly is used for pressing and fixing the first chip, the second tablet pressing assembly is used for pressing and fixing the second chip, and a tested sample is dripped on the first chip or the second chip; the annular first elastic gasket is arranged in the first chip groove and annularly arranged outside the second chip groove; the second elastic cushion block is arranged in the second chip groove, and the first chip is placed on the annular first elastic gasket and then electrically connected with the second chip; the power supply electrode assembly is arranged on the sample rod head and located at the rear end of the first chip groove, the first chip is electrically connected with the power supply electrode assembly, and the power supply electrode assembly is connected to an external controller of the transmission electron microscope.

The invention provides a method for measuring and calculating the article position of continuous silver ore with the particle size of 0.037 mm or above, and belongs to the technical field of mineral grade detection. The silver grade in the sample is measured and calculated through screening; leaching and measuring the content of silver monomers and continuous silver minerals, and reselecting to obtain a heavy sand product; carrying out fluorescent dyeing on the heavy sand product, and selecting monomer silver minerals; analyzing the color of the silver mineral through point scanning data of a scanning electron microscope, melting the monomer silver mineral to obtain the volume of the monomer silver mineral, and calculating the content of the monomer silver mineral; and carrying out conversion to obtain the continuous silver ore article position with the size of more than 0.037 mm. According to the method, the target mineral is rapidly and accurately obtained by adopting density medium reselection and fluorescent dye tracing; introducing a scanning electron microscope to measure and calculate the actual density of the silver mineral to replace the theoretical density, smelting the silver mineral in a mold, and carrying out volume measurement and calculation to obtain the actual metal amount closer to the actual silver mineral; measuring and calculating errors caused by impurities and irregular shapes of mineral particles are reduced; and the calculated grade of the silver mineral is more accurate.

Provided are anode material and lithium ion battery. The anode material includes a porous carbonaceous material. A silicon material is distributed inside the porous carbonaceous material. The anode material has a uniformity degree N, and N meets N>80%. In a Backscattered Electron (BSE) diagram obtained by scanning the anode material using a Scanning Electron Microscope (SEM) in a BSE automatic brightness and contrast mode, in any one of 100 μm*100 μm regions, the number of particles of the anode material having first brightness is recorded as C1, the number of particles of the anode material having second brightness is recorded as C2, the anode material has a uniformity degree N′=C2 / (C2+C1)*100% in the region, and the uniformity degree N of the anode material is an arithmetic mean of at least 10 N's.

The invention relates to the technical field of section analysis of printed circuit boards, in particular to a section analysis method for PCB positioning cutting, a target abnormal area is positioned on a PCB through an optical microscope, the optical microscope not only can observe the morphology of the surface layer of a sample, but also can observe the morphology within a certain range below the surface layer, and the accuracy of section analysis is improved. And meanwhile, the optical microscope is very sensitive and accurate in color identification, so that compared with the prior art in which the target abnormal area is positioned on the PCB through a scanning electron microscope, the target abnormal area can be more effectively positioned on the PCB, and the purpose of reducing the positioning difficulty of the target abnormal area is achieved. Besides, the positioning layer and the protection layer are deposited in the target abnormal area, so that the cross section sample can be prevented from being physically and chemically damaged in the cutting process on the basis of improving the cutting precision of the cross section sample, and the failure analysis precision of the PCB is improved.

The invention discloses chicken infectious anemia virus-like particles as well as a preparation method and application thereof. The invention discloses a virus-like particle vaccine for preventing chicken infectious anemia. The virus-like particle vaccine comprises VP1 and VP2 proteins of chicken infectious anemia viruses. Chicken infectious anemia VP1 and VP2 proteins are expressed by using a baculovirus expression system, immunoblotting shows that the two proteins are successfully expressed in sf9 cells, electron microscope observation finds that the expressed proteins can be autonomously assembled into complete chicken infectious anemia virus-like particles, and the chicken infectious anemia virus-like particles have a space structure similar to that of an original virus and can be used for preparing chicken infectious anemia virus-like particles. Meanwhile, the virus-like particles have the advantages of high titer, high safety, capability of stimulating humoral immunity and cellular immunity and the like. The preparation method disclosed by the invention is simple, can be used for preparing the antigen protein of the chicken infectious anemia virus on a large scale, is high in expression quantity and short in time consumption, greatly reduces the production cost, and is suitable for large-scale production.

The invention discloses a three-dimensional visualization method for deformation dislocation Schmidt factor distribution, and the method comprises the steps: preparing a transmission sample based on a deformation sample, and obtaining a physical identifier marking the direction of an external load; dislocation images of a plurality of different angles of the transmission sample are obtained through a transmission electron microscope, three-dimensional reconstruction is carried out, and a dislocation three-dimensional image under a sample coordinate system is obtained; tilting the sample in situ, and obtaining conversion parameters of a sample coordinate system and a crystal coordinate system according to the tilting parameters and the diffraction pattern; acquiring optical images of the sample rod and the transmission sample through an optical microscope, acquiring an applied load direction under a sample coordinate system according to the optical images, and acquiring an applied load direction under a crystal coordinate system based on the conversion parameters; and determining a dislocation slippage system according to the dislocation Burkholtz vector and the dislocation three-dimensional image, and calculating to obtain a dislocation Schmidt factor by combining with the direction of the external load under the crystal coordinate system, and displaying the dislocation Schmidt factor in the three-dimensional image. According to the method, the deformation dislocation Schmidt factor can be accurately and intuitively represented in the dislocation three-dimensional image.

The invention discloses a TEM sample preparation method and a method for detecting single dislocation in gallium nitride single crystal, the sample preparation method comprises the following steps: performing SEM-CL scanning on the surface of a substrate sample containing the gallium nitride single crystal to obtain a first SEM image and a cathode fluorescence image corresponding to the first SEM image; marking a target single dislocation from the first SEM image based on the cathode fluorescence image; marking a first target area where the target single dislocation is located in the first SEM image; performing SEM scanning on a first target area on the surface of the substrate sample to obtain a second SEM image of carbon deposition generated by dislocation around a target single root; scanning the second SEM image by using FIB-SEM, and marking a second target area where the deposited carbon is located; and etching the second target area on the surface of the substrate sample after the carbon deposition is generated, and preparing to obtain the TEM sample. According to the method, the single dislocation can be accurately positioned from the substrate sample containing the gallium nitride single crystal, so that the TEM sample containing the single dislocation is prepared, and the dislocation type of the single dislocation is determined.

The invention relates to the technical field of electron microscopic imaging, in particular to a correction method and device for geometric distortion in scanning electron microscope measurement, computer equipment, a storage medium and a computer program product. The method comprises the following steps: acquiring a scanning electron microscope image of a standard sample; calculating an orthogonal included angle parameter and a length-width ratio parameter of the scanning electron microscope image; iteratively adjusting the angle correction parameter and the gain correction parameter under a fixed scanning rotation angle until a preset local calibration constraint condition is met; verifying the orthogonal included angle parameter and the length-width ratio parameter under each scanning rotation angle; and when the orthogonality included angle parameter and the length-width ratio parameter do not meet a preset global stability constraint condition, adjusting a relative gain coefficient, and re-executing calibration verification under each scanning rotation angle until a full-angle correction requirement is met. By adopting the method, high precision and stability of imaging correction can be kept in a full-angle range.

The invention relates to the technical field of scanning electron microscopes, in particular to a scanning electron microscope which comprises a mounting frame, an electron microscope body, a vacuumizing mechanism, an adapter, a damping mechanism and a vacuum tube structure, the electron microscope body comprises a lens cone and a sample bin, and the vacuumizing mechanism is used for synchronously vacuumizing the lens cone and the sample bin; the damping mechanism is arranged between the mounting rack and the electron microscope main body; the adapter comprises an adapter tube, a first joint and a second joint, and the first joint and the second joint are arranged on the two sides of the adapter tube; the vacuum tube structure comprises a first flexible tube, a first rigid tube, a second flexible tube and a second rigid tube, and the first flexible tube and the second flexible tube are symmetrically arranged. Due to the fact that the flexible pipes are connected with the vacuumizing mechanism and the rigid pipe is connected with the electron microscope body, the symmetrical flexible pipes can balance pulling force in the vacuumizing process, the influence of the pulling force on the electron microscope body is reduced, the influence on the image quality is reduced, and the detection accuracy of the scanning electron microscope and the definition of images are effectively guaranteed.

The invention relates to an ultrafast electron microscopic imaging device and an imaging method thereof, in particular to a multi-mode multi-dimensional ultrafast electron microscopic imaging device and an imaging method thereof, and solves the problem that the existing electron microscopic imaging technical scheme is difficult to simultaneously meet the measurement requirements of high time-space-energy-momentum resolution and material diversification. The device comprises a sample cabin, an electron gun, a laser generation module, a secondary electron detector, an STEM detector, an in-cabin plug-in detection assembly, a plug-in camera and an energy filtering electron microscope assembly which are arranged below the sample cabin, and a vacuum system, a hollow sample table is arranged in the sample cabin, and at least two ultrafast pumping laser introduction windows are arranged on the cabin wall of the sample cabin; an ultrafast detection laser introduction window is arranged on the electronic gun shell; the secondary electron detector is arranged obliquely above the sample table; the STEM detector is arranged on the side cabin wall of the sample cabin and is positioned below the sample table; and the in-cabin plug-in detection assembly is arranged below the STEM detector.

The invention discloses a rapid positioning method for a scanning electron microscope. The rapid positioning method comprises the following steps: acquiring a reference image and a target image of a sample; decomposing the reference image and the target image into a plurality of areas, and respectively extracting target points of each area in the reference image and the target image; matching the target point pairs in the same area of the reference image and the target image, calculating the deformation tensor of the area where the target point is located in the target image, and distinguishing the deformation type of each area in the target image; according to the local deformation type, affine or thin-plate spline transformation models are dynamically allocated to a plurality of areas of the target image; splicing the plurality of sub-models to obtain a complete three-dimensional model of the sample; based on the obtained three-dimensional model, mapping coordinates of a target point in real time; according to the method, the accurate sample three-dimensional model is obtained by using the transformation model according to the deformation tensors of different areas of the target image, so that high-precision reconstruction of the target point at the position of the warped edge curved surface is realized, and the positioning precision of the target point in the three-dimensional space is improved.

The present invention discloses a sample fixture for realizing the combination of FIB-TKD and a scanning electron microscope detection system. The sample fixture includes a sample holder and a semi-copper mesh clamping piece rotatably mounted on the sample holder. The sample holder is detachably connected to the sample stage of the scanning electron microscope. At least one semi-circular groove is provided on the semi-copper mesh clamping piece for placing the semi-copper mesh, and each semi-circular groove is equipped with a pressing spring piece for clamping and fixing the semi-copper mesh on the semi-circular groove. A positioning unit is provided between the sample holder and the semi-copper mesh clamping piece to fix the position of the semi-copper mesh clamping piece after rotating a certain angle by using the positioning unit. Based on this sample fixture, the present application also proposes a scanning electron microscope detection system for simultaneously realizing FIB sample preparation and TKD experiments, including a TKD experiment unit, a sample preparation system, etc. By adjusting the position of the sample using the sample fixture, a planar transmission electron microscope sample that meets the test requirements can be prepared quickly and efficiently, and a transmission EBSD (TKD) experiment can also be completed.

A method for generating a training dataset for determining grain boundaries and minerals in a thin section of a rock sample, includes receiving the thin section of the rock sample, generating optical images of the thin section with an optical tool, generating mineral phase images of the thin section with an electron microscopy tool, computing first and second pseudo-images based on different features extracted from the optical images, generating the training dataset based on (1) the optical images, (2) the mineral phase images, and (3) the pseudo-images, and training a single deep neural network, DNN, based on the training dataset to simultaneously determine a mineral type and grain boundaries in the thin section of the rock sample.

To provide a novel method for detecting dislocation that is present in a single crystal silicon specimen after a coating is formed thereto.SOLUTION: A method for detecting dislocation of a single crystal silicon specimen includes a step of detecting a part as dislocation that is observed as a bright line in an electronic channeling image that is acquired by irradiating a surface of a single crystal silicon specimen with an electron beam by a scanning electron microscope, where the irradiation with the electron beam includes a step of irradiating one or more crystal planes of the single crystal silicon specimen with the electron beam in an incidence azimuth within a range of satisfying an electronic channeling condition and the one or more crystal planes include a {220} surface.SELECTED DRAWING: None