47results about "Energy spectrometers" patented technology

Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other. The substrate processing tool may further comprise one or more reflectors adapted to generate a flood pattern of ultraviolet radiation over the substrate that has complementary high and low intensity areas which combine to generate a substantially uniform irradiance pattern if rotated. Other embodiments are also disclosed.

A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

An electrospray interface for forming ions from a liquid sample in a mass analyzing system includes a capillary tube having a free end for introducing a spray of droplets into an ionization chamber, a first gas passageway positioned near the capillary tube for directing a first gas stream into the ionization chamber, and a second gas passageway positioned more remotely from the capillary tube for directing a second, low-velocity gas stream into the ionization chamber. The second gas stream is heated to increase the droplet desolvation rate. A heated sampling capillary having an end extending into the ionization chamber guides the analyte ions toward a mass analyzer and evaporates the solvent from any incompletely desolvated droplets entering the sampling capillary.

Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

A spectrometer (10) for sample surface analysis by irradiation of the surface by primary particles and a corresponding method of surface analysis spectroscopy. The spectrometer (10) provides sample viewing and secondary charged particle collection substantially normal to the sample surface. A collection chamber (22) comprises a secondary charged particle lens arrangement (20) to focus the emitted particles in a downstream direction along a first normal axis (24) and thereby to define a charged particle optical crossover location (25); and a light-reflecting optical element (50) downstream of the lens arrangement and arranged to receive image light (41) and reflect it away from a second normal axis (42) for providing a viewable image of the surface. The optical element (50) is positioned at, or near to, the crossover location (25) and comprises an opening (52) therethrough, such that the focused particles pass through the opening for downstream spectroscopic analysis substantially without obstruction by the optical element.

The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.

Apparatuses (41, 91, 111, 115, 121, 151) and methods (31) for time-of-flight mass spectrometry providing effective pulsed conversion of continuous ion beams into pulsed ion packets is disclosed. Bunching of energetic continuous ion beams forms ion packets, which are filtered by a subsequent isochronous energy filter (49, 79, 81-84, 110). The bunching method is particularly suitable for ion sources with relatively large spatial emittance, otherwise unable to fir the acceptance of orthogonal accelerators. The method is particularly suitable for multi-reflecting TOF MS, which accommodates small size ion packets and where the duty cycle advantage of orthogonal accelerators is minor.

An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

A mass spectrometer is provided herein and is configured to have two ionization sources, in which a first ionization source, such as MALDI, ESI and the like, which is capable of providing in addition to ions a set of normally intractable desorbed neutrals that are ionized by a second EI source coupled with the first source.

A multi-energy cargo inspection system features a compact electron accelerator is used that is more compact, more efficient and less expensive than a single linear accelerator with the same energy. The system has enhanced capabilities to recognize the elemental content of a container which can be used to detect concealed explosive and fissionable materials.

A time-of-flight secondary ion mass spectrometer comprises an ion source which generates cluster ions each comprised of two or more atoms, a pulsing mechanism which pulses the cluster ions, a selecting mechanism which selects ions having a specific mass number from the pulsed cluster ions and passes the selected ions in an ON state of the selecting mechanism, and, passes the pulsed cluster ions without the selecting in an OFF state of the selecting mechanism, and a time-of-flight mass spectrometric unit which measures a mass spectrum of secondary ions generated from a sample using a difference in time of flight when the sample is irradiated with the ions passed through the selecting mechanism.

A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.

In a mass spectrometer having an auto-tuning function for sequentially executing parameter adjustments for each part in accordance with a prescribed procedure, a long time is required to tune all of the sections. Therefore, sections which require parameter adjustments are divided into block units, and tuning is executed in a predetermined block order. In each block, tuning is first executed on a representative part of the block, and the result is compared with past tuning results. If the values of both results fall within a prescribed range, the tuning of other sections included in the block is omitted.

A direct-write (DW) exposure system is provided which includes a stage for holding a substrate and configured to scan the substrate along an axis during exposure, a data processing module for processing pattering data and generating instructions associated with the patterning data, and an exposure module that includes a plurality of beams that are focused onto the substrate such that the beams cover a width that is larger than a width of a field size and a beam controller that controls the plurality of beams in accordance with the instructions as the substrate is scanned along the axis. The widths are in a direction different from the axis.

A charged particle spectrometer of hemispherical analyzer type for analyzing a particle emitting sample, the spectrometer comprising at least a first mechanism configured to move at least a part of the lens with respect to the axis between the sample spot and the analyzer entrance in a coordinate direction synchronously with a deflection of the particle beam.

A method for process monitoring includes receiving a sample having a first layer that is at least partly conductive and a second layer formed over the first layer, following production of contact openings in the second layer. A beam of charged particles is directed along a beam axis that deviates substantially in angle from a normal to a surface of the sample, so as to irradiate one or more of the contact openings in each of a plurality of locations distributed over at least a region of the sample. A specimen current flowing through the first layer is measured in response to irradiation of the one or more of the contact openings at each of the plurality of locations. A map of at least the region of the sample is created, indicating the specimen current measured in response to the irradiation at the plurality of the locations.

The invention relates to a method and a mapping meter for mapping flight time and momentum energy of a refraction type charged particle. The method comprises the following steps: 1) forming a reflection electric field which is uniform along axial direction in a vacuum test tube; 2) generating a charged particle by a charged particle source at one end of the vacuum test tube; 3) performing decelerated motion in the reflection electric field by the charged particle till an axial speed is reduced to zero; 4) immediately performing contrary accelerated motion in the reflection electric field by the charged particle till the charged particle arrives at a position sensing detector at the position of the charged particle source; and 5) detecting and recording the position information (x, y) and the flight time ttota1 of the charged particle by the position sensing detector, thereby finally mapping initial momentum and energy Epsilon i of the charged particle. The method and the mapping meterprovided by the invention are used for prolonging the flight time of the charged particle, by aiming at the bottleneck at the aspect of comprehensively promoting three parameters of energy resolution, energy detection range and charged-particle collecting efficiency of an existing charged particle flight time and momentum energy spectrometer.

Pulsed MeV ion beam techniques are broadly applied in time-of-flight experiments for direct measurements of neutron velocities and energies. They are also used to achieve a neutron monochromater by allowing the selection of neutrons having a well defined velocity. The sequence of components needed for creation of sub-nanosecond pulsed MeV ion beam systems usually consist of a suitable DC ion source, a chopper module for production of beam pulses, a klystron buncher for introducing time compression to individual pulses and a final ion-acceleration stage. It is pointed out that the achievable pulse compression is limited by the energy spread within the pulses that are directed into the klystron buncher. Furthermore, that this energy spread may be dominated by the energy spread created within the preceding chopper system. The present invention minimizes this problem of chopper introduced energy spreads and discloses a chopping system that comprises at least two electrostatic deflectors with phase-locked radiofrequency voltages. With proper amplitude and phase control chopper assemblies are described that do not add significant energy spreads to the beam.

The invention relates to methods and devices for measuring daughter ion spectra (also called fragment ion spectra or MS / MS spectra) in time-of-flight mass spectrometers with orthogonal injection of the ions. The invention filters the parent ions selected to be fragmented by a mass filter before they are injected into the time-of-flight mass spectrometer, fragments the selected ions in a first stage of the time-of-flight mass spectrometer within a collision cell filled with collision gas at collision energies between one and five kiloelectron-volts, further accelerates the fragment ions and measures the fragment ions in a second stage of the time-of-flight mass spectrometer.

The methods described herein generally relate to characterization of large analytes, such as biomolecules, by molecular mass analysis. Specifically, the methods are directed to molecular mass analysis of singly- or multiply-charged ions by selective ion filtering carried out by a digital thresholding process.

A field terminating imaging electron spectrometer being used for imaging electrons created within a magnetic field such as an image produced with a magnetic projection lens in a photoelectron microscope. The preferred embodiment is a CHA with magnetic input and output lenses.

The present invention relates to a charged particle beam apparatus enabling a selection of a charged particle beam in a specified energy range by symmetrically arranging cylindrical electrostatic lenses deflecting a path of the charged particle beam and disposing an energy selection aperture between the cylindrical electrostatic lenses. Since an integral structure in which a central electrode and a plurality of electrodes that are arranged at a front portion and a rear portion in relation to the central electrode of a monochromator are fixed to each other through insulator, is applied, a mechanism for adjusting an offset with respect to an optical axis is simplified as compared to the case of separately providing the lenses at the front portion and the rear portion, respectively, and a secondary aberration is canceled in an exit plane due to symmetry of an optical system.

The present invention relates to a cryo-charging specimen holder for the electron microscope, particularly to a cryo-charging specimen holder for the electron microscope to hold various biological materials. The major feature of the invention is to charge the biological specimen and freeze the specimen at low temperature. The ice around the biological sample is also doped, so that after charging the doped ice surrounding the sample has a conductivity level comparable to that of conductor. Therefore, the sample can be embedded by the doped and charged ice obtaining the property of conductor, in order to be observed by the electron microscope.

Provided is an ion selection method capable of isolating and leaving a target ion in an ion trap within a short period of time and with high separating power. In a digital ion trap, after ions over a wide range of m / z near a target ion are selectively retained by rough isolation using an FNF signal or the like (S11), unnecessary ions on a low-mass side are removed with high separating power by changing the duty ratio of a rectangular voltage (S12). Furthermore, unnecessary ions on a high-mass side are removed with high separating power by resonant excitation discharge (S13).

System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.

Disclosed is a spectrometry method including: for at least one ionizing-radiation energy Ei, obtaining, for each energy Ei, a curve of the number of photons detected, during a measurement interval, as a function of time, by spectrometer; b) for each curve, computing a ratio of the number of photons detected defined and separate time periods to obtain, for each ionizing-radiation energy Ei, a number ai, or for each curve, acquiring one or more fitting parameters PAJi by making a fit to the corresponding curve with a fitting function; and comparing each number ai or each fitting parameter or set of fitting parameters PAJi with reference constants ai or, respectively, with reference fitting parameters PAJi associated with reference energies Ei to determine, for each number ai or each fitting parameter or set of fitting parameters PAJi, reference energy Ei of the ionizing radiation for which the corresponding curve was measured.

Apparatuses (41, 91, 111, 115, 121, 151) and methods (31) for time-of-flight mass spectrometry providing effective pulsed conversion of continuous ion beams into pulsed ion packets is disclosed. Bunching of energetic continuous ion beams forms ion packets, which are filtered by a subsequent isochronous energy filter (49, 79, 81-84, 110). The bunching method is particularly suitable for ion sources with relatively large spatial emittance, otherwise unable to fir the acceptance of orthogonal accelerators. The method is particularly suitable for multi-reflecting TOF MS, which accommodates small size ion packets and where the duty cycle advantage of orthogonal accelerators is minor.