47results about "Energy spectrometers" patented technology

A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

A spectrometer (10) for sample surface analysis by irradiation of the surface by primary particles and a corresponding method of surface analysis spectroscopy. The spectrometer (10) provides sample viewing and secondary charged particle collection substantially normal to the sample surface. A collection chamber (22) comprises a secondary charged particle lens arrangement (20) to focus the emitted particles in a downstream direction along a first normal axis (24) and thereby to define a charged particle optical crossover location (25); and a light-reflecting optical element (50) downstream of the lens arrangement and arranged to receive image light (41) and reflect it away from a second normal axis (42) for providing a viewable image of the surface. The optical element (50) is positioned at, or near to, the crossover location (25) and comprises an opening (52) therethrough, such that the focused particles pass through the opening for downstream spectroscopic analysis substantially without obstruction by the optical element.

Apparatuses (41, 91, 111, 115, 121, 151) and methods (31) for time-of-flight mass spectrometry providing effective pulsed conversion of continuous ion beams into pulsed ion packets is disclosed. Bunching of energetic continuous ion beams forms ion packets, which are filtered by a subsequent isochronous energy filter (49, 79, 81-84, 110). The bunching method is particularly suitable for ion sources with relatively large spatial emittance, otherwise unable to fir the acceptance of orthogonal accelerators. The method is particularly suitable for multi-reflecting TOF MS, which accommodates small size ion packets and where the duty cycle advantage of orthogonal accelerators is minor.

An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

An X-ray photoelectron spectroscopy includes an X-ray generator generating an X-ray, a collimator collimating the X-ray generated in the X-ray generator, a monochromator for converting the collimated X-ray into a single wavelength X-ray and reflecting the single wavelength X-ray to a test sample, the monochromator being installed to be displaceable and rotatable in response to an irradiating direction of the X-ray, an analysis chamber in which the test sample is disposed, the analysis chamber being installed to be rotatable in response to the displacement of the monochromator so as to allow the single wavelength to be accurately irradiated to the test sample, an energy analyzer for measuring kinetic energy of an electron that is emitted from the test sample by the single wavelength X-ray, and an electron detector for detecting an electron passing to the energy analyzer.

A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.

In a mass spectrometer having an auto-tuning function for sequentially executing parameter adjustments for each part in accordance with a prescribed procedure, a long time is required to tune all of the sections. Therefore, sections which require parameter adjustments are divided into block units, and tuning is executed in a predetermined block order. In each block, tuning is first executed on a representative part of the block, and the result is compared with past tuning results. If the values of both results fall within a prescribed range, the tuning of other sections included in the block is omitted.

The invention relates to a method and a mapping meter for mapping flight time and momentum energy of a refraction type charged particle. The method comprises the following steps: 1) forming a reflection electric field which is uniform along axial direction in a vacuum test tube; 2) generating a charged particle by a charged particle source at one end of the vacuum test tube; 3) performing decelerated motion in the reflection electric field by the charged particle till an axial speed is reduced to zero; 4) immediately performing contrary accelerated motion in the reflection electric field by the charged particle till the charged particle arrives at a position sensing detector at the position of the charged particle source; and 5) detecting and recording the position information (x, y) and the flight time ttota1 of the charged particle by the position sensing detector, thereby finally mapping initial momentum and energy Epsilon i of the charged particle. The method and the mapping meterprovided by the invention are used for prolonging the flight time of the charged particle, by aiming at the bottleneck at the aspect of comprehensively promoting three parameters of energy resolution, energy detection range and charged-particle collecting efficiency of an existing charged particle flight time and momentum energy spectrometer.

A field terminating imaging electron spectrometer being used for imaging electrons created within a magnetic field such as an image produced with a magnetic projection lens in a photoelectron microscope. The preferred embodiment is a CHA with magnetic input and output lenses.

System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.

Disclosed is a spectrometry method including: for at least one ionizing-radiation energy E_i, obtaining, for each energy E_i, a curve of the number of photons detected, during a measurement interval, as a function of time, by spectrometer; b) for each curve, computing a ratio of the number of photons detected defined and separate time periods to obtain, for each ionizing-radiation energy E_i, a number a_i, or for each curve, acquiring one or more fitting parameters PAJ_i by making a fit to the corresponding curve with a fitting function; and comparing each number a_i or each fitting parameter or set of fitting parameters PAJ_i with reference constants a_i or, respectively, with reference fitting parameters PAJ_i associated with reference energies E_i to determine, for each number a_i or each fitting parameter or set of fitting parameters PAJ_i, reference energy E_i of the ionizing radiation for which the corresponding curve was measured.